Spectrum detection equipment for measuring thickness of coating film

Abstract

The invention relates to the field of optical detection, in particular to spectrum detection equipment for measuring the thickness of a coating film, and the spectrum detection equipment comprises a feeding unit which comprises an erecting assembly; the erecting assembly is used for placing a to-be-detected coating optical element, a turntable in the feeding unit can transfer the coating optical element to the position of the measuring unit, and two spectrum detectors in the measuring unit can measure the coating thickness of two surfaces of the coating optical element at the same time; compared with an existing measuring device, the designed spectrograph coating thickness measuring device has the advantages that firstly, the coating thicknesses on the two surfaces of a coating optical element can be measured at the same time at a time in the aspect of efficiency, the efficiency is doubled, and the spectrograph coating thickness measuring device is suitable for large-batch coating thickness measuring tasks; in the aspect of accuracy, when the coating thicknesses on the two surfaces of the coating optical element are measured at the same time, the coating optical element does not need to be taken out, turned over and then fed, the problem of turn-over errors is avoided, and the coating thickness of each surface is accurately measured.

Description

Technical Field

[0001] The present invention relates to the field of optical detection, and specifically to a spectral detection device for measuring coating thickness. Background Art

[0002] In the field of optical detection, the measurement of coating thickness is a crucial task. With the continuous progress of technology, spectrometers have become a powerful tool in this field. The principle of measuring coating thickness by spectrometers is mainly based on X-ray fluorescence (XRF) technology. When X-rays irradiate a sample, they interact with the atoms in the sample, exciting characteristic X-rays. By measuring the energy and intensity of the characteristic X-rays of the elements in the sample, the types and contents of the elements are determined, and the coating thickness is calculated. The advantages of the spectrometer technology for measuring coating thickness are fast, non-destructive, non-contact measurement, and can provide high-precision results, playing an important role in coating thickness measurement.

[0003] In the optical element manufacturing industry, coatings are applied to optical lenses to improve the optical performance and durability of the lenses. Some require coatings of different materials on both sides. For the case where the coating types on both sides are different, after coating, spot checks are required, and mass production can only be carried out after the coating thickness meets the requirements. Currently, for the detection of coating thickness on both sides with different types, generally, one side is measured first, and then the other side is measured after flipping. If there are a large number of coated optical elements to be measured, this coating measurement method is difficult to handle, and there is a problem of repeated flipping of the coated optical elements during the flipping of each coated optical element, that is, one surface of a coated optical element is measured twice, and errors occur during the measurement process.

[0004] Therefore, a spectral detection device for measuring coating thickness is proposed to solve the above problems. Summary of the Invention

[0005] In order to make up for the deficiencies of the prior art and solve at least one of the technical problems proposed in the background art.

[0006] The technical solution adopted by the present invention to solve its technical problems is as follows: A spectral detection device for measuring coating thickness according to the present invention includes a feeding unit. The feeding unit includes a turntable. A plurality of L-shaped support rods are provided on the outer circle of the turntable. A ring body is fixedly connected to the end of the support rod. A plurality of mounting components for placing the coated optical elements to be measured are evenly provided on the ring body;

[0007] Each of the mounting components includes a rectangular frame. Both sides of each rectangular frame are fixedly connected to the ring body. L-shaped brackets are symmetrically provided on the inner side walls of the rectangular frame. Two adjacent brackets are used to clamp the coated optical elements to be measured;

[0008] A measuring unit, the measuring unit includes a housing, a measuring area is arranged at the middle position of the housing, a ring body is placed in the measuring area, and spectral detectors are arranged on both sides inside the housing, and the two spectral detectors are respectively arranged at the inner ring position and the outer ring position of the ring body.

[0009] Preferably, a plurality of stepped grooves are formed on the inner side walls on both sides of each rectangular frame, and a plurality of groups of fixing holes are formed on the two side surfaces of the rectangular frame body, and each group of fixing holes is respectively arranged on both sides of each stepped groove;

[0010] A shrapnel is arranged on the back of each bracket, a U-shaped inserting rod is fixedly connected to the end of the shrapnel, and the inserting rod is inserted upside down into the fixing hole.

[0011] Preferably, a first anti-disengagement part is arranged on both sides of the horizontal part of each bracket, and a second anti-disengagement part is arranged on both sides of the vertical part of each bracket.

[0012] Preferably, a bayonet is formed on the upper edge of each second anti-disengagement part, the bayonet is arranged along the length direction of the vertical part of the bracket, a U-shaped plate in an inverted state is clamped in the bayonet, and an L-shaped auxiliary plate is arranged on the outer side wall of the U-shaped plate. Adjacent two auxiliary plates are used for placing the optical element with coating to be measured.

[0013] Preferably, the outer side wall of each U-shaped plate is connected to the back of the vertical part of the auxiliary plate through a plurality of springs.

[0014] Preferably, both the inner side and the outer side of the frame body of each rectangular frame are discontinuously arranged, and an annular positioning plate is fixedly connected between the two discontinuous ends on the same side, and a plurality of supplementary light lamps are arranged on the inner side walls of adjacent two positioning plates.

[0015] Preferably, a cleaning assembly is arranged above the rectangular frame. The cleaning assembly is used to remove foreign matters on the surface of the optical element with coating to be measured, and the cleaning assembly includes a cylinder, the output of the cylinder is fixedly connected with an adapter plate, connecting rods are symmetrically arranged on both sides of the adapter plate, one end of each connecting rod is rotatably connected to the adapter plate through a torsion spring, and a plurality of brush rollers are rotatably connected to the rod body of each connecting rod. The other ends of the two connecting rods are arranged in a flared shape.

[0016] Preferably, sleeves are arranged on both sides of the lower surface of the adapter plate, a pressure spring is arranged in the sleeve to connect a pressure rod, and the lower end of the pressure rod is fixedly connected with a pressing plate, and the pressing plate is arranged opposite to the optical element with coating to be measured.

[0017] Preferably, a dust suction pipe is arranged on one side of the adapter plate, and the dust suction pipe is communicated with an external negative pressure pump; a touch switch is arranged on the upper surface of the adapter plate, and the contact of the touch switch is arranged opposite to the lower end surface of the cylinder body of the cylinder, and the touch switch is used to control the start and stop of the external negative pressure pump.

[0018] Preferably, channels are arranged on both sides of the housing, the two channels are respectively opposite to the entrance and the exit of the measuring area, and the channels cover the ring body above.

[0019] The advantages of the present invention are as follows:

[0020] 1. In the present invention, the designed spectrometer coating thickness measuring device, compared with the existing measuring devices, firstly, in terms of efficiency, it can simultaneously measure the coating thickness on two surfaces of the coated optical element at one time, doubling the efficiency and being suitable for a large number of coating thickness measurement tasks; secondly, in terms of accuracy, when simultaneously measuring the coating thickness on two surfaces of the coated optical element, it is not necessary to take out and flip the coated optical element and then load it again, and the problem of flipping errors is avoided, accurately realizing the measurement of the coating thickness of each surface.

[0021] 2. In the present invention, for the designed cleaning component, the roller brush can remove foreign matters on the surface of the coating of the coated optical element, avoiding the participation of foreign matters in the coating thickness measurement and affecting the accuracy of the coating thickness measurement. At the same time, a dust suction pipe is arranged on one side of the roller brush, which can clean the roller brush, enabling the roller brush to continuously and effectively remove the foreign matters on the surface of the coated optical element. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is the first - perspective three - dimensional view of the spectrometer coating thickness measuring device in the present invention;

[0023] Figure 2 is the second - perspective three - dimensional view of the spectrometer coating thickness measuring device in the present invention;

[0024] Figure 3 is the front view of the spectrometer coating thickness measuring device in the present invention;

[0025] Figure 4 is the top view of the spectrometer coating thickness measuring device in the present invention;

[0026] Figure 5 is the three - dimensional view of the cooperation between the turntable and the ring body in the present invention;

[0027] Figure 6 is the schematic diagram of the internal structure of the housing in the present invention;

[0028] Figure 7 is the three - dimensional view of the bracket in the present invention;

[0029] Figure 8 is the three - dimensional view of the cooperation between two adjacent brackets and the coated optical element in the present invention;

[0030] Figure 9 is the three - dimensional view of the cooperation between the rectangular frame and the limiting plate in the present invention;

[0031] Figure 10 is the three - dimensional view of the cooperation between the limiting plate and the coated optical element in the present invention;

[0032] Figure 11 is a perspective view of the cleaning component in the present invention;

[0033] Figure 12 is a front view of the cleaning component in the present invention;

[0034] Figure 13 is a perspective view of the cooperation between the bracket and the U-shaped plate in the present invention;

[0035] Figure 14 is a schematic diagram of the auxiliary plate bracket coating the optical element in the present invention;

[0036] Figure 15 is a schematic diagram of the structure of the bayonet on the bracket in the present invention.

[0037] In the figure: 101, coated optical element; 1, turntable; 2, support rod; 3, ring body; 4, rectangular frame; 5, bracket; 6, housing; 7, X-ray emission module; 8, detector module; 9, stepped groove; 10, fixing hole; 11, elastic piece; 12, insertion rod; 13, first anti-disengagement part; 14, second anti-disengagement part; 15, bayonet; 16, U-shaped plate; 17, auxiliary plate; 18, spring; 19, positioning plate; 20, supplementary light; 21, cylinder; 22, connecting plate; 23, connecting rod; 24, roller brush; 25, sleeve; 26, pressing rod; 27, pressing plate; 28, touch switch; 29, channel; 30, dust suction pipe; 31, camera. Detailed implementation manners

[0038] In order to make the technical means, creative features, achieved purposes and effects of the present invention easy to understand, the present invention will be further described below in conjunction with specific implementation manners.

[0039] Referring to Figure 1 - Figure 10 , a spectral detection device for measuring the coating thickness, includes a feeding unit and a measuring unit; the feeding unit includes a mounting component; the feeding unit includes a turntable 1, and a plurality of L-shaped support rods 2 are arranged on the outer circle of the turntable 1. The end of the support rod 2 is fixedly connected with a ring body 3, and a plurality of mounting components for placing the coated optical element 101 to be measured are uniformly arranged on the ring body 3; each mounting component includes a rectangular frame 4, both sides of each rectangular frame 4 are fixedly connected to the ring body 3, and L-shaped brackets 5 are symmetrically arranged on the inner side wall of the rectangular frame 4. Two adjacent brackets 5 are used to clamp the coated optical element 101 to be measured; the measuring unit includes a housing 6, a measuring area is arranged in the middle of the housing 6, the ring body 3 is placed in the measuring area, and spectral detectors are arranged on both sides in the housing 6, and the two spectral detectors are respectively arranged at the inner circle position and the outer circle position of the ring body 3;

[0040] In this embodiment, the spectral detector disposed in the housing 6 is specifically the X-ray emission module 7 and the detector module 8 of the spectral detector;

[0041] In this embodiment, a servo motor is provided below the turntable 1. The servo motor is connected to the background control module, and the turntable 1 is driven to rotate intermittently through the cooperation of the background control module and the servo motor;

[0042] As Figure 4 shown, Figure 4 is the top view of the coating thickness measuring device of this spectrometer, which is divided into multiple stations. The leftmost station is divided into station one, and then station two, station three, station four, station five, station six, station seven, and station eight are sequentially arranged in a clockwise direction;

[0043] The specific operation process of this spectrometer coating thickness measuring device is as follows:

[0044] Station two: After the surface thickness measurement of the coated optical element 101 at station one is completed, the turntable 1 rotates by the angle of one station. Then, the coated optical element 101 with the thickness measurement completed is transferred from station one to station two, and then the coated optical element 101 is removed;

[0045] Station three: Loading of the coated optical element 101, that is, installing the coated optical element 101 on two adjacent brackets 5;

[0046] Stations four, five, six, seven, and eight: At all these stations, no operation is performed on the coated optical element 101. It is only rotated and sent into the housing 6 under the intermittent rotation of the turntable 1;

[0047] Station one: The coated optical element 101 is rotated and sent into the housing 6, and the spectral detector in the housing 6 starts to measure the coating thickness of the coated optical element 101;

[0048] The adjacent brackets 5 can load the coated optical element 101 in a vertical state. After being rotated and sent into the housing 6, the coated optical element 101 is placed between two spectral detectors, that is, the two surfaces of the coated optical element 101 are respectively opposite to the X-ray emission module 7 of the spectral detector. At this time, the spectral detectors operate simultaneously and measure the coating thickness on both surfaces of the coated optical element 101 at the same time.

[0049] The spectrometer coating thickness measuring device in this embodiment, compared with the existing measuring devices, firstly, in terms of efficiency, it can simultaneously measure the coating thicknesses on both surfaces of the coated optical element 101 at one time, doubling the efficiency and being suitable for a large number of coating thickness measurement tasks; secondly, in terms of accuracy, when simultaneously measuring the coating thicknesses on both surfaces of the coated optical element 101, it is not necessary to take out the coated optical element 101, turn it over and then load it, and the problem of turning-over mistakes is avoided, accurately realizing the measurement of the coating thickness of each surface.

[0050] Refer to Figure 1 - Figure 10 , a plurality of stepped grooves 9 are formed on the inner side walls on both sides of each rectangular frame 4, and a plurality of groups of fixing holes 10 are formed on both surfaces of the rectangular frame 4 body, and each group of fixing holes 10 is respectively arranged on both sides of each stepped groove 9;

[0051] A shrapnel 11 is arranged on the back surface of each bracket 5, and a U-shaped insertion rod 12 is fixedly connected to the end of the shrapnel 11, and the insertion rod 12 is inserted upside down into the fixing hole 10;

[0052] The measured coating thicknesses of the coated optical element 101 have various sizes, and the sizes and shapes of the coated optical element 101 also have various types. In order to be suitable for the measurement of various coated optical elements 101, the stepped grooves 9 as shown in Figure 9 and Figure 10 are provided, and the sizes of the brackets 5 also have various types, adapting to different positions in the stepped grooves 9, and an insertion rod 12 is arranged on the back surface of the bracket 5, and the insertion rod 12 is detachably connected to the fixing holes 10 on both sides of the stepped groove 9;

[0053] During the process of installing the coated optical element 101 in the rectangular frame 4, firstly, a suitable bracket 5 is selected according to the thickness, size and shape of the coated optical element 101. The two brackets 5 can stably support the coated optical element 101 in the rectangular frame 4. At the same time, the back surface of the bracket 5 is connected to the insertion rod 12 through the shrapnel 11. The elastic extrusion force of the shrapnel 11 can stably clamp the coated optical element 101. When the ring body 3 intermittently starts and stops rotating, the coated optical element 101 can still be in the rectangular frame 4, ensuring that both surfaces of the coated optical element 101 can face the spectral detector, providing a good measurement environment for subsequent thickness measurement.

[0054] Refer to Figure 1 - Figure 15 , a first anti-disengagement portion 13 is arranged on both sides of the horizontal portion of each bracket 5, and a second anti-disengagement portion 14 is arranged on both sides of the vertical portion of each bracket 5;

[0055] After the coated optical element 101 is vertically inserted between the two brackets 5, the vertical parts of the brackets 5 clamp the two vertical side walls of the coated optical element 101, and the horizontal parts of the brackets 5 support the lower surface position of the coated optical element 101. At the same time, the first anti-disengagement part 13 cooperates with the second anti-disengagement part 14 to restrict and constrain the coated optical element 101 on the bracket 5. Even when the ring body 3 intermittently rotates and stops instantaneously, the generated vibration force fails to destroy the stability of the coated optical element 101 on the bracket 5. That is, by increasing the rotation speed of the ring body 3, the measurement efficiency is improved, and problems such as the coated optical element 101 tipping or skewing will not occur.

[0056] Refer to Figure 1 - Figure 15 , a bayonet 15 is opened at the upper edge of each second anti-disengagement part 14. The bayonet 15 is arranged along the length direction of the vertical part of the bracket 5. An inverted U-shaped plate 16 is clamped in the bayonet 15. An L-shaped auxiliary plate 17 is provided on the outer side wall of the U-shaped plate 16. Two adjacent auxiliary plates 17 are used to place the coated optical element 101 to be measured;

[0057] The above-mentioned surface coating thickness detection of the similar flat-shaped coated optical element 101 is mentioned. However, this is only one type in the optical element manufacturing industry. The coated optical element 101 may also be in other abnormal shapes such as square. For the surface coating thickness measurement of coated optical elements 101 in various shapes, the bracket 5 is optimized again to increase the functionality of the bracket 5. That is, the bracket 5 can not only clamp the similar flat-shaped coated optical element 101, but also clamp the Figure 14 square-shaped coated optical element 101 shown in;

[0058] The specific operation is as follows: insert one side of the U-shaped plate 16 into the bayonet 15, and then place the coated optical element 101 between the two auxiliary plates 17. The coated optical element 101 presses the auxiliary plates 17, the auxiliary plates 17 press the U-shaped plate 16, and the U-shaped plate 16 presses the elastic piece 11 through the bracket 5. The elastic force of the elastic piece 11 can stably clamp the coated optical element 101 between the two auxiliary plates 17, facilitating subsequent coating measurement;

[0059] Brackets 5 of different specifications cooperate with the stepped groove 9. At the same time, the connection between the bracket 5 and the U-shaped plate 16 is detachable, which can flexibly adapt to the extrusion and clamping of coated optical elements 101 of different shapes and can also ensure the stability of the coated optical element 101.

[0060] Refer to Figure 1 - Figure 14 , the outer side wall of each U-shaped plate 16 is connected to the back of the vertical part of the auxiliary plate 17 through a plurality of springs 18;

[0061] On the outer side wall of the U-shaped plate 16, a plurality of springs 18 are arranged in the up and down direction. The self-elasticity of the springs 18 can provide a squeezing force for the auxiliary plate 17, and can squeeze and hold the coating optical element 101 with a smaller volume, and can also hold the coating optical element 101 with an irregular shape, and the range of holding the coating optical element 101 is wider.

[0062] Refer to Figure 1 - Figure 10 , the inner and outer sides of the frame body of each rectangular frame 4 are both disconnected, and an annular positioning plate 19 is fixedly connected between the two disconnected ends on the same side, and a plurality of supplementary light lamps 20 are arranged on the inner side walls of two adjacent positioning plates 19;

[0063] After the coating optical element 101 is placed on the bracket 5, it is necessary to pre-determine the position of the coating optical element 101 to ensure that the X-rays emitted by the X-ray emission module 7 can irradiate the surface of the coating optical element 101; Station 2 is the blanking station, and Station 3 is the loading station, that is, the coating optical element 101 is placed on the bracket 5, and then a camera 31 is arranged at the position of Station 4. The camera 31 is opposite to the center of the positioning plate 19, and the camera 31 is used to photograph and obtain the surface coating image of the coating optical element 101. The image is uploaded to the background control module and presented on the display screen; due to the setting of the positioning plate 19, when the camera 31 photographs and obtains the image, there are a limiting plate and the coating optical element 101 in the image. Taking the limiting plate as a reference object, observe the size and position of the coating optical element 101 inside the inner circle of the limiting plate, so as to facilitate the operator to observe the position of the coating optical element 101 and quickly judge whether the position of the coating optical element 101 is appropriate;

[0064] At the same time, a supplementary light lamp 20 is arranged on the inner side wall of the positioning plate 19. The light emitted by the supplementary light lamp 20 irradiates on the coating optical element 101, provides a good shooting environment for the camera 31, and takes a clear image; because the surface of the coating optical element 101 is uneven, the sunken area needs to be filled with light to be photographed clearly, so that the operator can accurately judge the position of the coating optical element 101.

[0065] Refer to Figure 1 - Figure 12 , a cleaning assembly is arranged above the rectangular frame 4. The cleaning assembly is used to remove foreign objects on the surface of the coating optical element 101 to be measured, and the cleaning assembly includes a cylinder 21. The output of the cylinder 21 is fixedly connected with a connecting plate 22. Connecting rods 23 are symmetrically arranged on both sides of the connecting plate 22. One end of the connecting rod 23 is rotatably connected to the connecting plate 22 through a torsion spring. A plurality of rotary brushes 24 are rotatably connected to the rod body of the connecting rod 23. The other ends of the two connecting rods 23 are arranged in a flared shape;

[0066] The camera 31 captures the position image of the coated optical element 101 and magnifies and projects it onto the display screen. Not only can the position of the coated optical element 101 within the inner ring of the limit plate be observed, but also foreign objects on the surface of the coated optical element 101 can be observed. These foreign objects will participate in the measurement of the coating thickness and directly affect the measurement accuracy. Therefore, a cleaning component is set up to clean the foreign objects on the surface of the coating of the coated optical element 101. The cleaning component is arranged above the position of Station Five. When the coated optical element 101 rotates from Station Four to Station Five, the background control module controls the cylinder 21 to execute. The cylinder 21 pushes the connecting rod 23 to move downward through the connecting plate 22. The lower end of the connecting rod 23 is arranged in a flared shape. When the lower end of the connecting rod 23 contacts the coated optical element 101, the connecting rod 23 is forced to expand outward. At the same time, the rotary brush 24 rolls while adhering to the surface of the coated optical element 101. After the cylinder 21 drives the rotary brush 24 to move up and down multiple times, the foreign objects on the surface of the coated optical element 101 are cleaned off. After the cleaning is completed, the cylinder 21 drives the rotary brush 24 to move up and reset. Then, the ring body 3 rotates to transfer the cleaned coated optical element 101 from the position of Station Five to the position of Station Six. Cameras 31 are also arranged on both sides of the position of Station Six. The cameras 31 at Station Six re-capture the coated optical element 101, and the re-captured images are uploaded and projected onto the display screen. The operator observes again whether there are foreign objects on the surface of the coated optical element 101. If there are foreign objects, the coated optical element 101 is directly removed for manual cleaning. The duration of one measurement of the coating thickness by the spectral detector generally lasts for 80 - 200 seconds. The operator has enough time to remove the coated optical element 101 for cleaning and then place it again.

[0067] Refer to Figure 1 - Figure 12 On both sides of the lower surface of the connecting plate 22, there are sleeve tubes 25. Compression springs are arranged inside the sleeve tubes 25 to connect the pressure rods 26. The lower ends of the pressure rods 26 are fixedly connected with pressing plates 27, and the pressing plates 27 are arranged opposite to the coated optical element 101 to be measured;

[0068] The connecting rod 23 is rotatably connected to the connecting plate 22 through a torsion spring. The torsion force of the torsion spring forces the rolling brush 24 to clean the surface of the coated optical element 101 in an extrusion manner. When the rolling brush 24 moves downward as a whole, the coated optical element 101 can be pressed on the bracket 5. When the rolling brush 24 moves upward as a whole, the rolling brush 24 may drive the coated optical element 101 to move upward, that is, the friction resistance between the rolling brush 24 and the coated optical element 101 can pull the coated optical element 101 from the bracket 5 upward. For this purpose, a The pressure rod 26, the upper end of the pressure rod 26 is connected to the sleeve 25 through a compression spring. When the cylinder 21 drives the roller brush 24 to move downward, the lower end of the pressure rod 26 is first pressed on the upper surface of the coated optical element 101, and then the compression spring is compressed, and then the roller brush 24 contacts the surface of the coated optical element 101. When the roller brush 24 moves upward as a whole, the pressure rod 26 is still pressed down on the coated optical element 101, and the coated optical element 101 is continuously pressed down and stabilized on the bracket 5 to prevent the roller brush 24 from moving upward and pulling the coated optical element 101 upward.

[0069] Reference Figure 1 - Figure 12 A dust suction pipe 30 is provided on one side of the connecting plate 22, and the dust suction pipe 30 is connected to an external negative pressure pump; a touch switch 28 is provided on the upper surface of the connecting plate 22, and the contact of the touch switch 28 is arranged opposite to the lower end surface of the cylinder body of the cylinder 21, and the touch switch 28 is used to control the start and stop of the external negative pressure pump;

[0070] When the roller brush 24 cleans the surface of the coated optical element 101, foreign matter will adhere to the surface of the roller brush 24. When the coated optical element 101 is cleaned again, the cleaning effect is not good. For this reason, a dust suction pipe 30 is arranged on the connecting plate 22, and the adsorption port of the dust suction pipe 30 points to the roller brush 24. When the cylinder 21 drives the connecting plate 22 to move downward, the touch switch 28 on the connecting plate 22 is away from the lower end surface of the cylinder body of the cylinder 21. At this time, the contact of the touch switch 28 loses the squeezing of the cylinder 21, and the touch switch 28 starts the operation of the external negative pressure pump. At this time, the adsorption tube adsorbs the foreign matter on the roller brush 24 and the foreign matter on the surface of the coated optical element 101, so as to realize the self-cleaning of the roller brush 24.

[0071] Reference Figure 1 - Figure 6 , channels 29 are provided on both sides of the housing 6, the two channels 29 are respectively opposite to the inlet and outlet of the measuring area, and the channels 29 cover the top of the ring body 3;

[0072] A channel 29 is provided on the housing 6 , and the channel 29 can cover the measuring area, thereby reducing the influence of the external environment on the running spectrometer.

[0073] Working principle: The working principle of the spectrometer coating thickness measurement device is explained according to the workstations, as follows:

[0074] Station 1: The coated optical element 101 is rotated and sent into the housing 6, and the spectral detector in the housing 6 measures the coating thickness of the coated optical element 101;

[0075] Station 2: After the surface thickness measurement of the coated optical element 101 at Station 1 is completed, the turntable 1 rotates by the angle of one station. The coated optical element 101 with the thickness measurement completed is transferred from Station 1 to Station 2, and then the coated optical element 101 is removed at the position of Station 2;

[0076] Station 3: Loading the coated optical element 101, that is, installing the coated optical element 101 on two adjacent brackets 5, and the elastic force of the elastic piece 11 stably clamps the coated optical element 101;

[0077] Station 4: Cameras 31 are arranged on both sides. The cameras 31 take pictures of the coated optical element 101, and the obtained images are uploaded to the background control module and projected onto the display screen so that the operator can observe the position of the coated optical element 101;

[0078] Station 5: The cleaning component is executed. The cleaning component cleans the foreign matters on the surface of the coated optical element 101, and this cleaning component is designed to be more suitable for the coated optical element 101 with a similar flat shape;

[0079] Station 6: Cameras 31 are arranged on both sides. These cameras 31 retake the cleaned coated optical element 101. One is to determine the position of the coated optical element 101 again, and the other is to observe whether there are still foreign matters remaining on the surface of the coated optical element 101;

[0080] Stations 7 and 8: No operation is performed on the coated optical element 101, waiting for the intermittent rotation of the turntable 1 to rotate the coated optical element 101 and send it into the housing 6;

[0081] The above operations are a measurement cycle for the coating thickness of one coated optical element 101, and according to the above operations, just repeat the cycle.

[0082] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. A spectrum detection device for measuring coating thickness, characterized in that: include: A feeding unit, the feeding unit comprising a turntable (1), the outer ring of the turntable (1) being provided with a plurality of L-shaped support rods (2), the ends of the support rods (2) being fixedly connected to a ring body (3), and the ring body (3) being evenly provided with a plurality of mounting components for placing coated optical elements (101) to be measured; Each of the mounting components comprises a rectangular frame (4), two sides of each rectangular frame (4) are fixedly connected to the ring body (3), L-shaped brackets (5) are symmetrically arranged on the inner side wall of the rectangular frame (4), and two adjacent brackets (5) are used to clamp the coated optical element (101) to be measured; A measuring unit, the measuring unit comprising a housing (6), a measuring area being arranged in the middle of the housing (6), a ring body (3) being placed in the measuring area, spectrometers being arranged on both sides of the housing (6), and the two spectrometers being arranged at the inner ring position of the ring body (3) and the outer ring position of the ring body (3), respectively.

2. The spectral detection device for measuring coating thickness according to claim 1, characterized in that: A plurality of stepped grooves (9) are provided on the inner side walls of each rectangular frame (4), and a plurality of groups of fixing holes (10) are provided on the surfaces of both sides of the rectangular frame (4), and each group of fixing holes (10) is respectively provided on both sides of each stepped groove (9); A spring sheet (11) is provided on the back of each bracket (5), a U-shaped insertion rod (12) is fixedly connected to the end of the spring sheet (11), and the insertion rod (12) is inserted upside down in the fixing hole (10).

3. The spectral detection device for measuring coating thickness according to claim 2, characterized in that: A first anti-slip portion (13) is provided on both sides of the horizontal portion of each bracket (5), and a second anti-slip portion (14) is provided on both sides of the vertical portion of each bracket (5).

4. The spectral detection device for measuring coating thickness according to claim 3, characterized in that: A bayonet (15) is provided on the upper edge of each of the second anti-slip portions (14), the bayonet (15) being arranged along the length direction of the vertical portion of the bracket (5), an inverted U-shaped plate (16) being clamped in the bayonet (15), an L-shaped auxiliary plate (17) being arranged on the outer side wall of the U-shaped plate (16), and two adjacent auxiliary plates (17) being used for placing the coated optical element (101) to be measured.

5. The spectrum detection device for measuring coating thickness according to claim 4, characterized in that: The outer side wall of each U-shaped plate (16) is connected to the back side of the vertical portion of the auxiliary plate (17) via a plurality of springs (18).

6. The spectrum detection device for measuring coating thickness according to claim 2, characterized in that: The inner and outer sides of the frame of each rectangular frame (4) are disconnected, and a ring-shaped positioning plate (19) is fixedly connected between the two disconnected ends on the same side, and a plurality of fill lights (20) are provided on the inner side walls of two adjacent positioning plates (19).

7. The spectrum detection device for measuring coating thickness according to claim 6, characterized in that: A cleaning component is provided above the rectangular frame (4), and is used to remove foreign matter on the surface of the coated optical element (101) to be measured. The cleaning component comprises a cylinder (21), and the output of the cylinder (21) is fixedly connected to a connecting plate (22). Connecting rods (23) are symmetrically provided on both sides of the connecting plate (22), and one end of the connecting rod (23) is rotatably connected to the connecting plate (22) through a torsion spring. A plurality of rolling brushes (24) are rotatably connected to the rod body of the connecting rod (23), and the other ends of the two connecting rods (23) are arranged in a flared shape.

8. The spectrum detection device for measuring coating thickness according to claim 7, characterized in that: Sleeves (25) are provided on both sides of the lower surface of the connecting plate (22), a compression spring is provided inside the sleeve (25) to connect a pressure rod (26), a pressure plate (27) is fixedly connected to the lower end of the pressure rod (26), and the pressure plate (27) is arranged opposite to the coated optical element (101) to be measured.

9. The spectrum detection device for measuring coating thickness according to claim 8, characterized in that: A dust suction pipe (30) is provided on one side of the connecting plate (22), and the dust suction pipe (30) is connected to an external negative pressure pump; a touch switch (28) is provided on the upper surface of the connecting plate (22), and a contact of the touch switch (28) is arranged opposite to the lower end surface of the cylinder body of the cylinder (21), and the touch switch (28) is used to control the start and stop of the external negative pressure pump.

10. The spectrum detection device for measuring coating thickness according to claim 1, characterized in that: Channels (29) are provided on both sides of the shell (6), the two channels (29) are respectively opposite to the inlet and outlet of the measuring area, and the channels (29) cover the top of the ring body (3).

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