Novel method for detecting thickness of diamond and diamond-like carbon coating layer based on X-ray

Abstract

The invention discloses a novel method for detecting the thickness of a diamond and diamond-like carbon coating layer based on X-rays, which adopts X-ray nondestructive detection and adds an optimization algorithm, can solve the influence of residues on a detection result by an algorithm for single-ray mutual interference of the same element, and can improve the detection accuracy. The optimization algorithm and the method can be applied to the thickness of diamond grown in the surface physical modification direction of chip products, diamond-like carbon (DLC) coatings on the surfaces of hard alloys such as tool steel and structural materials, CVD (chemical vapor deposition) diamond coatings and the like. The method is also applicable to other element thicknesses of which the surfaces are not detected by the energy dispersion X-ray fluorescence spectrometer, such as nitrogen N layers and oxygen O layers, and also comprises cicada wing membranes or biological bionic membranes in the biological direction. In the aspect of chemical industry, the method is suitable for PE polyethylene and epoxy resin.

Description

Technical Field

[0001] The present invention relates to the technical field of X-ray detection, and specifically relates to a new method for detecting the thickness of diamond and diamond-like coating layers based on X-ray detection. Background Art

[0002] A method for analyzing the composition of a substance and studying its chemical state by exciting atoms in the substance to be measured with primary X-ray photons or other microscopic ions to produce fluorescence (secondary X-rays). According to different excitation, dispersion, and detection methods, it is divided into X-ray spectrometry (wavelength dispersion) and X-ray energy spectrometry (energy dispersion). According to different dispersion methods, X-ray fluorescence analyzers are correspondingly divided into X-ray fluorescence spectrometers (wavelength dispersion) and X-ray fluorescence energy spectrometers (energy dispersion).

[0003] Traditional methods for detecting the thickness of diamond and diamond-like coating layers include four schemes: probe contact testing, Coulomb method testing, electromagnetic method testing, and X-ray method testing.

[0004] Among them, the patents cited for probe contact testing are:

[0005] Probes of horizontal probe cards, Chinese Patent Application No.: CN200810109529.1;

[0006] Probes of vertical probe cards, Chinese Patent Application No.: CN200810098449.0 filing date;

[0007] The probe contact testing has the following disadvantages:

[0008] 1. It is a contact-type destructive test and cannot measure the percentage of each element in the coating;

[0009] 2. It has relatively high requirements for environmental cleanliness;

[0010] 3. It cannot measure curved surfaces or abnormally damaged points;

[0011] 4. Since the test requires steps, it can only measure semi-finished products, and at the same time, it is not very efficient for mass production control production lines. It is not suitable for production line production;

[0012] 5. The object to be measured needs to have a certain rigidity, and the softer the material, the greater the measurement error;

[0013] 6. It can only measure metal coatings.

[0014] The patents cited for Coulomb method testing are:

[0015] Method for testing the coating thickness of electroplated parts, Application No.: CN201710154050.9

[0016] The Coulomb method testing has the following disadvantages:

[0017] 1. This type of testing method uses solution electrolysis testing, which is a destructive test, and the sample is permanently damaged after testing.

[0018] 2. It cannot test the elemental percentage in the coating.

[0019] 3. The edge test accuracy of different substances in the coating is not high, so the thinner the thickness, the lower the test accuracy.

[0020] 4. It is seriously affected by surface impurity contamination.

[0021] 5. It has a layered testing effect and cannot test the results simultaneously.

[0022] 6. This testing method is only suitable for testing the thickness of metals and not for non-metals.

[0023] Patent cited for electromagnetic method testing:

[0024] Coating Thickness Tester, Chinese Utility Model Application No.: CN201520109230.1;

[0025] Disadvantages of electromagnetic method testing:

[0026] 1. The conductivity of the substrate, coating, and plating layer must have a large difference to be tested.

[0027] 2. It cannot test the mass percentage of elements in the coating.

[0028] 3. The types of coatings cannot be too many. Generally, the thickness of coatings with different conductivities of 2 - 3 layers is tested.

[0029] 4. It is greatly affected by environmental electromagnetic interference factors and requires good ability to shield electromagnetic interference.

[0030] 5. It is not suitable for in-line testing.

[0031] Patent cited for X-ray method testing:

[0032] X-ray Fluorescence Gold Content and Plated / Gilded Thickness Testing Method, Chinese Invention Patent Application No.: CN96106707.1;

[0033] The disadvantage of X-ray method testing is that the thickness measurement range for detecting diamond and diamond-like is limited,

[0034] The thickness measurement accuracy is better than 10%.

[0035] Therefore, how to provide a new method for detecting the thickness of diamond and diamond-like coating and infiltration layers based on X-ray to solve the problems existing in the prior art is of great significance for its application. Summary of the Invention

[0036] In view of this, the purpose of the present application is to provide a new method for detecting the thickness of diamond and diamond-like coating infiltration layers based on X-ray to solve the problem.

[0037] To achieve the above object, the present invention provides the following technical solutions:

[0038] A new method for detecting the thickness of diamond and diamond-like coating infiltration layers based on X-ray, comprising the following steps:

[0039] S1: The original spectral data detected by the detector;

[0040] S2: Calculate the spectral area by specifying the element boundary;

[0041] S3: Refer to Algorithm 1, the absorption coefficient of the residue to X-ray;

[0042] S4: Obtain the theoretical area of the element to be measured. If there is no same element, execute S6. If there is the same element, execute S5;

[0043] S5: Refer to Algorithm 2, the algorithm for mutual interference of the same element against a single ray;

[0044] S6: Peel off the theoretical area of the same element to be measured in the coating;

[0045] S7: Refer to Algorithm 3, the influence coefficient of the undetected element on the thickness test;

[0046] S8: Finally, obtain the accurate test value.

[0047] Preferably, the algorithm description for the thickness quantitative detection principle of X-ray:

[0048] Since the intensity attenuation of X-ray after penetrating a substance is proportional to the distance the ray travels in the substance;

[0049] Assume that the intensity of the incident ray is I0, entering a homogeneous absorber with density ρ, and its intensity at x is Ix. When passing through a thickness dx, the intensity attenuation is dI. Define μ as the ratio of X-ray absorbed per unit thickness, then: -dI = μI x dx

[0050] Considering the boundary conditions and integrating, we get: I = I o e^-μρx

[0051] In the formula: I is the intensity of the attenuated X-ray, I0 is the initial intensity of the incident X-ray, μ is the mass absorption coefficient of the material, ρ is the density of the material, and x represents the thickness of the material.

[0052] Preferably, the influence coefficient calculation of Algorithm 1 for the residue of the product is:

[0053]

[0054] Derivation number of algorithm description based on the principle of quantitative thickness detection by X-ray;

[0055] Thickness X = ln(I / I0) / -μ·ρ;

[0056] Thickness X = ln(I / I0) / -(μ + 0.0648)·ρ

[0057] Preferably, error analysis:

[0058] Original thickness / Coating thickness with residue

[0059] = [ln(I / I0) / -μ·ρ] / [ln(I / I0) / -(μ + 0.0648)·ρ]

[0060] = [(μ + 0.0648) / μ]·(ρ 残 / ρ1)

[0061] = [1 + μ + 0.0648)]·(ρ 残 / ρ1).

[0062] Preferably, the calculation formula for the absorption amount of a single X-ray for coating 1 and coating 2 is:

[0063] E 基材 = E 镀层1 + E 镀层2

[0064] That is, the attenuation amount of the substrate peak = the absorption amount of coating 1 to the substrate + the absorption amount of coating 2 to the substrate. However, since coating 2 exists on the surface of coating 1, coating 2 will also have a certain absorption amount to coating 1. Therefore, the above formula can be written as:

[0065] E 基材 = E 镀层1 + E 镀层2+ E 2对1的吸收

[0066] If the substrate and coating 2 are the same element, then the model becomes a simple model containing the same element. At this time, the above formula can be expanded to obtain:

[0067] I1 = I3 / (1 - e^-U1d1)×(1 - e^-U2d2)+I0e^-U1d1 + I0e^-U2d2

[0068] Preferably,

[0069] I0 refers to the pure element peak of coating 2;

[0070] I1 refers to the non-decayed peak of the coating 2-z theory;

[0071] I2 refers to the peak of the coating 2-z that has been attenuated by the coating 1-y;

[0072] I3 refers to the peak of the coating 2-z that has been attenuated by the coating 2-x;

[0073] U1 and U2 refer to the linear absorption coefficients of the coating 1-y and the coating 2-x;

[0074] d1 and d2 refer to the thicknesses of the coating 1-y and the coating 2-x.

[0075] Preferably, the thickness data of the coating 1-y can be directly obtained from the direct test data of the instrument. The thicknesses of the coating 2-x and the coating 2-z need to be analyzed through this algorithm. By adding a substrate element and then analyzing the attenuation of the substrate element, the thicknesses of the coating 2-z and the coating 2-x can be obtained. Through the above derivation, the following general equation is obtained:

[0076] ax + be^-U 12 cX = d

[0077] where: a, b, c, and d are non-zero natural numbers, and U 12 is an absorption coefficient related to the materials of the coatings 1 and 2;

[0078] Finally, by solving the value of X in the above equation, the thickness of the coating 2-x can be obtained.

[0079] Through the above method, the algorithm for mutual interference of the same element against a single ray can be solved.

[0080] Preferably, the algorithm 3 must be used in conjunction with the algorithm 1 and the algorithm 2 for thickness detection, and the principle of this algorithm refers to the algorithm 2.

[0081] Compared with the prior art, the beneficial effects of the present invention are:

[0082] 1. This invention is conducive to solving the detection of the thickness of diamond and diamond-like coating layers by an energy-dispersive X-ray fluorescence spectrometer.

[0083] 2. The test accuracy for diamond and diamond-like coating layers is better than 5%, improving the test accuracy of the instrument.

[0084] 3. The measuring range of diamond and diamond-like coating layers is increased, and the maximum thickness can exceed 1 mm.

[0085] The above description is only an overview of the technical solution of this application. In order to understand the technical means of this application more clearly, it can be implemented according to the content of the specification. In order to make the above and other purposes, features, and advantages of this application more obvious and understandable, the following provides a detailed description of the preferred embodiments of this application in conjunction with the accompanying drawings.

[0086] From the following detailed description of specific embodiments of the present application in conjunction with the accompanying drawings, those skilled in the art will become more clear about the above and other objects, advantages and features of the present application. Description of the Drawings

[0087] In order to more clearly illustrate the technical solutions in the embodiments of the present application or in the prior art, the following will briefly introduce the accompanying drawings required for use in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can also be obtained based on these drawings. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to actual scale.

[0088] Figure 1 It is the flowchart of the method of the present invention;

[0089] Figure 2 It is the explanatory diagram of the X-ray principle in the present invention;

[0090] Figure 3 It is the table of absorption influence coefficients of several common substances on X-ray imaging in the present invention;

[0091] Figure 4 It is the typical residue structure model in the present invention;

[0092] Figure 5 It is the simple model of the same element in the present invention;

[0093] Figure 6 It is the explanatory diagram of the single X-ray principle of the same element in the present invention;

[0094] Figure 7 It is the 2-Z peak diagram of the coating in the present invention;

[0095] Figure 8 It is the comparison diagram of the absorption coefficients of elements Si and diamond in the present invention;

[0096] Figure 9 It is the comparison report of the single-sample data stability test results of Example 1;

[0097] Figure 10 It is the comparison report of the multi-sample data test results of Example 2. Detailed Embodiments

[0098] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are some, but not all, of the embodiments of this application. In the following description, specific details such as specific configurations and components are provided only to assist in a comprehensive understanding of the embodiments of this application. Therefore, those skilled in the art should understand that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of this application. In addition, descriptions of known functions and structures are omitted for clarity and conciseness.

[0099] In addition, this application may repeat reference numerals and / or letters in different instances. This repetition is for the purpose of simplicity and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed.

[0100] The term "and / or" in this document is merely a description of the associated relationship of the associated objects, indicating that three relationships may exist. For example, A and / or B may represent: A exists alone, B exists alone, and both A and B exist simultaneously. The term " / and" in this document describes another associated object relationship, indicating that two relationships may exist. For example, A / and B may represent: A exists alone, and both A and B exist. In addition, the character " / " in this document generally indicates that the associated objects before and after are in an "or" relationship.

[0101] It should also be noted that in this document, relative terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprising", "including", or any other variation thereof are intended to cover non-exclusive inclusion.

[0102] Please refer to Figure 1-8 , this invention provides a technical solution for a new method for detecting the thickness of diamond and diamond-like coating and infiltration layers based on X-ray detection: 1. A new method for detecting the thickness of diamond and diamond-like coating and infiltration layers based on X-ray detection, comprising the following steps:

[0103] S1: The original spectral data detected by the detector;

[0104] S2: Calculate the spectral area by specifying the element boundary;

[0105] S3: Refer to Algorithm 1, the absorption coefficient of the residue to X-ray;

[0106] S4: Obtain the theoretical area of the element to be measured. If there is no same element, execute S6; if there is the same element, execute S5;

[0107] S5: Refer to Algorithm 2, the algorithm for the mutual interference of the same elements for a single ray;

[0108] S6: Strip out the theoretical area of the element to be measured in the coating;

[0109] S7: Refer to Algorithm 3, the influence coefficient of the undetected element on the thickness measurement;

[0110] S8 Finally, obtain the accurate test value.

[0111] Algorithm description of the principle of quantitative thickness detection by X-rays:

[0112] Since the intensity attenuation of X-rays after penetrating a substance is proportional to the distance traveled by the ray in the substance;

[0113] Assume that the intensity of the incident ray is I0, entering a homogeneous absorber with density ρ. At position x, its intensity is Ix. When passing through a thickness dx, the intensity attenuation is dI. Define μ as the ratio of X-rays absorbed per unit thickness. Then we have: -dI = μI x dx

[0114] Considering the boundary conditions and integrating, we get: I = I o e^-μρx

[0115] In the formula: I is the intensity of the attenuated X-rays, I0 is the initial intensity of the incident X-rays, μ is the mass absorption coefficient of the material, ρ is the density of the material, and x represents the thickness of the material.

[0116] Illustration of the algorithm with examples:

[0117] Refer to Figure 1 , in the electroplating solution with known adaptation debugging of X-rays for several common substances, the mass concentrations of the following substances are as follows:

[0118] HCl = 1.05 g / L

[0119] H2SO4 = 2.11 g / L

[0120] HNO3 = 3.28 g / L

[0121] Then convert to the corresponding mass percentages:

[0122] HCl = 16.30%

[0123] H2SO4 = 32.76%

[0124] HNO3 = 50.93%

[0125] Through the above data query, the influence coefficient is obtained as:

[0126] HCl = 0.2840

[0127] H2SO4 = 0.4186

[0128] HNO3 = 0.5451

[0129] The influence coefficient of Algorithm 1 for the residue of the product is calculated as:

[0130]

[0131] Derivation number according to the algorithm description of the thickness quantitative detection principle by X-ray;

[0132] Thickness X = ln(I / I0) / -μ·ρ;

[0133] Thickness X = ln(I / I0) / -(μ + 0.0648)·ρ

[0134] Error analysis:

[0135] Original thickness / plated layer thickness with residue

[0136] = [ln(I / I0) / -μ·ρ] / [ln(I / I0) / -(μ + 0.0648)·ρ]

[0137] = [(μ + 0.0648) / μ]·(ρ 残 / ρ1)

[0138] = [1 + μ + 0.0648)]·(ρ 残 / ρ1).

[0139] The calculation formula for the absorption amount of a single X-ray for plating layer 1 and plating layer 2 is:

[0140] E 基材 = E 镀层1 + E 镀层2

[0141] That is, the attenuation amount of the substrate peak = the absorption amount of plating layer 1 for the substrate + the absorption amount of plating layer 2 for the substrate. However, since plating layer 2 exists on the surface of plating layer 1, plating layer 2 will also have a certain absorption amount for plating layer 1. Therefore, the above formula can be written as:

[0142] E 基材 = E 镀层1 + E 镀层2+ E 2对1的吸收

[0143] If the substrate and plating layer 2 are the same element, then this model becomes a simple model containing the same element. At this time, the above formula can be expanded to obtain:

[0144] I1 = I3 / (1 - e^-U1d1)×(1 - e^-U2d2) + I0e^-U1d1 + I0e^-U2d2

[0145] I0 refers to the pure element peak of coating 2;

[0146] I1 refers to the unattenuated peak of coating 2 - z in theory;

[0147] I2 refers to the peak of coating 2 - z attenuated by coating 1 - y;

[0148] I3 refers to the peak of coating 2 - z attenuated by coating 2 - x;

[0149] U1 and U2 refer to the linear absorption coefficients of coating 1 - y and coating 2 - x;

[0150] d1 and d2 refer to the thicknesses of coating 1 - y and coating 2 - x.

[0151] The thickness data of coating 1 - y can be directly measured by the instrument. The thicknesses of coating 2 - x and coating 2 - z need to be analyzed by this algorithm. By adding a substrate element and then analyzing the attenuation of the substrate element, the thicknesses of coating 2 - z and coating 2 - x can be obtained. Through the above derivation, the following general equation is obtained:

[0152] ax + be^-U 12 cX = d

[0153] Where: a, b, c, and d are non - zero natural numbers, and U 12 is an absorption coefficient related to materials of coating 1 and coating 2;

[0154] Finally, the value of X obtained by solving the above equation can be used to obtain the thickness of coating 2 - x

[0155] Through the above method, the algorithm for mutual interference of the same element against a single ray can be solved

[0156] Algorithm 3 must be used in combination with Algorithm 1 and Algorithm 2 for thickness detection. The principle of this algorithm refers to Algorithm 2.

[0157] The patent applied in this article can be applied to the thickness of diamond grown in the direction of surface physical modification of chip - like products, diamond - like DLC coatings on the surfaces of hard alloys such as tool steel and structural materials, and CVD diamond coatings in other directions.

[0158] At the same time, the present invention is also applicable to the thickness of other elements that cannot be detected by an energy - dispersive X - ray fluorescence spectrometer on the surface, such as nitride layers of nitrogen N and oxide layers of oxygen O, and also includes cicada wing membranes or bio - mimetic membranes in the biological direction, etc. In the chemical industry, it is applicable to polyethylene (PE) and epoxy resins, etc.

[0159] Example 1:

[0160] Existing solutions on the market

[0161] Test the diamond thickness on the surface of monocrystalline silicon. The diamond limit thickness ≤ 45um, and the measurement accuracy ≤ 5%, which is better than the 10% accuracy of the existing patent "Cited patent: X-ray fluorescence gold content and plating, gold-cladding thickness testing method, Chinese invention patent application number: CN96106707.1".

[0162] Figure 9 It is the comparison report of the single-sample data stability test results for Example 1;

[0163] In the report: The RSD of the diamond thickness = 0.30% ≤ 5%;

[0164] Example 2:

[0165] The technical solution of the present invention

[0166] Technical description: Since the diamond thickness > 45um, the peak of silicon Si in the monocrystalline silicon cannot be captured by the energy dispersive X-ray fluorescence spectrometer, resulting in inability to test.

[0167] A solution described in the present invention can increase the thickness detection range of the diamond, and the thickest can exceed 1mm.

[0168] The test steps are as follows:

[0169] (1) Pad a pure metal on the back of the monocrystalline silicon with diamond thickness as a substrate;

[0170] (2) Then use the energy dispersive X-ray fluorescence spectrometer to collect spectral data

[0171] (3) Use the algorithm involved in this patent for data analysis. At the same time, the total thickness value of the monocrystalline silicon and the diamond needs to be input as one of the analysis conditions.

[0172] (4) Finally, the analyzed data thickness can be up to more than 1mm, and the measurement accuracy ≤ 5

[0173] Figure 10 It is the comparison report of the multi-sample data test results for Example 2;

[0174] The report is the actual measurement report of Example 2. In the report:

[0175] The RSDs of the diamond thickness are 1.51%, 2.09%, 1.51%, and 1.11% respectively, and all four groups of data ≤ 5%.

[0176] Applicability analysis of the present invention: In the actual use process, in addition to the thickness detection of diamond and diamond-like materials, this algorithm is also used. It is also applicable to the thickness measurement of other surface elements whose content cannot be detected by the energy dispersive X-ray fluorescence spectrometer, such as cicada wing membranes, biological membranes, or industrial epoxy resins, etc.

[0177] The present invention is registered with an algorithm and application based on the energy dispersive X-ray fluorescence spectrometer. It can accurately measure the thickness under the condition that it cannot be detected by the energy dispersive X-ray fluorescence spectrometer. This solution adapts to the corresponding algorithm, which can not only significantly improve the measurement accuracy, but also increase the detection range of the coating thickness. At the same time, this invention patent retains many advantages of non-destructive and non-contact detection methods and rapid testing, and is very suitable for controlling the flow production line or full inspection of products.

[0178] The above are only the preferred embodiments of the present invention, and they do not limit the protection scope of the present invention. For those skilled in the art, the present invention can have various changes and modifications. All changes, modifications, substitutions, integrations, and parameter changes made to these embodiments by conventional substitutions or those that can achieve the same function without departing from the principle and spirit of the present invention fall within the protection scope of the present invention.

Claims

1. A novel method for detecting the thickness of diamond and diamond-like coating and infiltration layer based on X-ray detection, characterized in that: It includes the following steps: S1: The original spectral data detected by the detector; S2: Calculate the spectral area by specifying the element boundary; S3: Refer to Algorithm 1: Calculation of the absorption coefficient of the residue for X-rays; S4: Obtain the theoretical area of the element to be measured. If there is no same element, execute S6. If there is the same element, execute S5; S5: Refer to Algorithm 2: Algorithm for the mutual interference of the same element for a single ray; S6: Peel off the theoretical area of the same element to be measured in the coating; S7: Refer to Algorithm 3: Calculation of the influence coefficient of the undetected element on the thickness measurement; S8: Finally, obtain the accurate test value.

2. A novel method for detecting the thickness of diamond and diamond-like coating and infiltration layer based on X-ray detection according to claim 1, characterized in that: The above-mentioned Algorithm 1 is the calculation of the influence coefficient of the residue of the product, specifically: Derivation number according to the algorithm description of the X-ray quantitative detection principle for thickness; Thickness X = ln(I / I0) / -μ·ρ; Thickness X = ln(I / I0) / -(μ + 0.0648)·ρ.

3. A novel method for detecting the thickness of diamond and diamond-like coating infiltration layers based on X-ray detection according to claim 2, characterized in that: Error analysis: Original thickness / Thickness of the coating with residue; = [ln(I / I0) / -μ·ρ] / [ln(I / I0) / -(μ + 0.0648)·ρ]; = [(μ + 0.0648) / μ]·(ρ 残 / ρ1); = [1 + μ + 0.0648)] · (ρ 残 / ρ1).

4. A novel method for detecting the thickness of diamond and diamond-like coating infiltration layers based on X-ray detection as claimed in claim 3, characterized in that: The above-mentioned Algorithm 2 is the calculation of the absorption amount of a single X-ray for the coating (1) and the coating (2). The specific formula is: E 基材 = E 镀层1 + E 镀层2 ; That is, the attenuation amount of the substrate peak = the absorption amount of the coating (1) for the substrate + the absorption amount of the coating (2) for the substrate. However, since the coating (2) has the surface of the coating (1), the coating (2) will also have a certain absorption amount for the coating (1). Therefore, the above formula can be written as: E 基材 = E 镀层1 + E 镀层2+ E 2对1的吸收 ; If the substrate and the coating (2) are the same element, then this model becomes a simple model containing the same element. At this time, the above formula can be expanded to obtain: I1 = I3 / (1 - e^-U1d1)×(1 - e^-U2d2)+I0e^-U1d1+I0e^-U2d2.

5. A new method for detecting the thickness of diamond and diamond-like coating by X-ray as described in claim 4, characterized in that: I0 refers to the pure element peak of the coating (2); I1 refers to the theoretically unattenuated peak of the coating (2 - z); I2 refers to the peak of the coating (2 - z) attenuated by the coating (1 - y); I3 refers to the peak of the coating (2 - z) attenuated by the coating (2 - x); U1 and U2 refer to the linear absorption coefficients of the coating (1 - y) and the coating (2 - x); d1 and d2 refer to the thicknesses of the coating (1 - y) and the coating (2 - x).

6. A novel method for detecting the thickness of diamond and diamond-like coating infiltration layers based on X-ray detection according to claim 5, characterized in that: The thickness data of the coating (1 - y) can be directly obtained through the instrument's direct test data. The thicknesses of the coating (2 - x) and the coating (2 - z) need to be analyzed by Algorithm 2. By adding a substrate element and then analyzing the thicknesses of the coating (2 - z) and the coating (2 - x) through the attenuation of the substrate element, the following general equation can be obtained through the above derivation: ax + be^-U 12 cX = d; where: abcd are non-zero natural numbers, U 12 is an absorption coefficient related to the material coatings (1) and (2); Finally, by solving the value of X in the above equation, the thickness of the coating (2 - x) can be obtained; Through the above method, the algorithm for the mutual interference of the same element for a single ray can be solved.

7. A novel method for detecting the thickness of diamond and diamond-like coating and infiltration layer based on X-ray detection according to claim 6, characterized in that: The above-mentioned Algorithm 3 must be used in conjunction with Algorithm 1 and Algorithm 2 for thickness detection. The principle of Algorithm 3 refers to Algorithm 2.

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