A reaction furnace for producing a semiconductor-grade high-thermal-conductivity graphite material

Abstract

The application relates to the technical field of graphitization furnaces, in particular to a production reaction furnace for semiconductor-grade high-thermal-conductivity graphite material, which comprises a reaction unit and a storage unit, the reaction unit comprises a furnace body, a discharging mechanism, a discharging mechanism and a heating mechanism, the storage unit comprises a frame body fixedly connected in the furnace body, the frame bodies are vertically arranged from top to bottom in the furnace body, shaft rods are rotationally connected to the inner walls of the frame bodies, the outer surfaces of the shaft rods are fixedly sleeved with bottom plates, the bottom of the furnace body is provided with a releasing assembly, the graphite material is shunted into multiple independent frame bodies through the split structure design of the frame bodies and the bottom plates, the material accumulation effect in the single frame body is low during heating, the difference between the upper and lower parts in thermal conduction is small, the heat conduction path is shorter, heat loss is smaller, the heating efficiency is greatly improved, the quality difference caused by local overheating or insufficient heating is reduced, the bottom plates can be turned over through the transmission of a motor, a driving central rod and a driving wheel and a driven wheel, and the effect of discharging is achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of graphitization furnace, in particular to a production reaction furnace for semiconductor-grade high-thermal-conductivity graphite material. BACKGROUND

[0002] The production reaction furnace for graphite material is a high-temperature equipment for converting carbon material into graphite, commonly referred to as a graphitization furnace, mainly composed of a furnace body, a heating system, a cooling system, and a control system, etc., which converts carbon material into graphite through heating.

[0003] According to the search, the invention patent with the publication number CN115159517A proposes a graphitization furnace for carbon products, which includes a furnace body and a telescopic assembly. The bottom surface of the furnace body is uniformly provided with legs. The top opening of the furnace body is correspondingly matched with a furnace cover. The top end of the furnace cover is provided with a top seat. A lifting hole is formed in the top seat. The side surface of the furnace body is provided with a power assembly. The side surface bottom of the furnace body is provided with a moving assembly. The moving assembly is provided with a transmission assembly and a driving assembly. The telescopic assembly includes a side shaft, a sliding rail, a sliding rod, a sliding seat, a side seat, and an electric push rod. The side shaft is symmetrically arranged on both sides of the top of the furnace body. One end of the sliding rail is fixedly sleeved on the end of the side shaft. The sliding rod penetrates the end of the sliding rail. The graphitization furnace has a lifting function, which is convenient for placing materials and opening the furnace cover. In addition, it is convenient to move the position of the furnace body, and it has high practicality.

[0004] The above-mentioned patent still has some deficiencies in actual use. The traditional reaction furnace is of an integrated structure. The graphite materials added into the reaction furnace are stacked together as a whole. Under the action of gravity, the graphite materials at the bottom are compacted, and the graphite materials at the top are relatively loose, which leads to differences in thermal conductivity, forms uneven temperature, and affects the overall heating efficiency. Based on this, the present application discloses a production reaction furnace for semiconductor-grade high-thermal-conductivity graphite material. SUMMARY

[0005] To solve the problem of differences in thermal conductivity of graphite materials stacked in the furnace body in the background art affecting the heating efficiency, the present application provides a production reaction furnace for semiconductor-grade high-thermal-conductivity graphite material, which includes a reaction unit and a storage unit.

[0006] The reaction unit includes a furnace body, a feeding mechanism, a discharging mechanism, and a heating mechanism. The feeding mechanism is arranged at the top of the furnace body. The discharging mechanism is arranged at the bottom of the furnace body. The heating mechanism is distributed in a ring shape along the outer surface of the furnace body in a gradient manner.

[0007] The storage unit includes a frame body fixedly connected inside the furnace body. A plurality of frame bodies are arranged vertically from top to bottom inside the furnace body. The inner wall of the frame body is rotatably connected with a shaft rod. The outer surface of the shaft rod is fixedly sleeved with a bottom plate. The bottom plate is provided in the form of a quarter circular ring structure. All the bottom plates are connected to form an integral circular ring structure.

[0008] The bottom of the furnace body is provided with a release assembly, and the outer surface of the furnace body is provided with a gas feeding unit;

[0009] The release assembly comprises a motor I arranged at the bottom of the furnace body, a central rod fixedly connected to the driving end of the motor I, a driving wheel fixedly sleeved to the outer surface of the central rod, a column fixedly connected to the inside of the furnace body, the column being arranged on the outer surface of the central rod, a guide pipe arranged at the bottom of the discharging mechanism, the number of the guide pipes being the same as that of the frame bodies, and the bottom outlet of each guide pipe being arranged on the upper part of a different frame body.

[0010] As a further improvement of the technical solution, the end of the shaft rod away from the inner wall of the frame body is movably inserted into the side of the column, the end of the shaft rod extending into the inside of the column is fixedly connected with a driven wheel, and the driving wheel is in meshing connection with the driven wheel.

[0011] As a further improvement of the technical solution, the gas feeding unit comprises an air inlet pipe fixedly connected to the lower part of the outer surface of the furnace body, a fan arranged in the inside of the air inlet pipe, a flow converging plate arranged on the inner wall of the furnace body, the flow converging plate being arranged in a triangular structure with the side line being an arc line, a convection assembly arranged on the inner wall of the air inlet pipe, and an air outlet assembly arranged on the upper part of the outer surface of the furnace body.

[0012] As a further improvement of the technical solution, the convection assembly comprises a transmission rod movably inserted into the middle part of the air inlet pipe, a motor II arranged on the outer surface of the furnace body, the driving end of the motor II being fixedly connected to the bottom of the transmission rod, and an eccentric wheel fixedly sleeved to the outer surface of the transmission rod.

[0013] As a further improvement of the technical solution, a vertical plate is slidably connected to the inner wall of the air inlet pipe, the outer surface of the vertical plate is slidably clamped to the outer surface of the eccentric wheel through a limiting sliding block, and a flow guide plate is hingedly connected to the side of the vertical plate.

[0014] As a further improvement of the technical solution, a limiting rod is fixedly connected to the inner wall of the air inlet pipe, and a strip-shaped groove is formed through the upper surface of the flow guide plate and sleeved to the outer surface of the limiting rod.

[0015] As a further improvement of the technical solution, the air outlet assembly comprises an air outlet pipe fixedly connected to the upper part of the outer surface of the furnace body, a round rod movably inserted into the middle part of the air outlet pipe, a plurality of baffle plates annularly arranged on the outer surface of the round rod, and a cross-shaped groove disc fixedly connected to the bottom end of the round rod.

[0016] As a further improvement of the technical solution, a turntable is fixedly sleeved to the outer surface of the transmission rod close to the top, a push block is fixedly connected to the edge of the upper surface of the turntable, and the push block is slidably clamped in the inside of the cross-shaped groove disc.

[0017] Compared with the prior art, the present application has the following advantages:

[0018] 1. In the production reaction furnace for the semiconductor-grade high-thermal-conductivity graphite material, the graphite material is divided into multiple independent frames through the separated structure design of the frame and the bottom plate, the material accumulation effect in the single frame is low when heating, the difference in thermal conduction between the upper and lower parts is small, the heat conduction path is shorter, the heat loss is less, the heating efficiency is greatly improved, the quality difference caused by local overheating or insufficient heating is reduced, and the bottom plate is turned over by the transmission of the motor, the driving center rod and the driven wheel to realize the discharging effect.

[0019] 2. In the production reaction furnace for the semiconductor-grade high-thermal-conductivity graphite material, the air flow is driven into the furnace body by the fan in the air inlet pipe, and after being heated by the heating mechanism, the air flow is guided along the flow converging plate to form converging convection, the flow guide plate is driven to swing back and forth at a small amplitude by the motor, the bifurcated design makes the air flow flow to both sides, the angle change changes the direction of the air flow and the cross-sectional area of the channel when swinging, forming a turbulent effect, the air flow is no longer single, but cross convection in the furnace, enhancing the heat exchange with the graphite material.

[0020] 3. In the production reaction furnace for the semiconductor-grade high-thermal-conductivity graphite material, the rotating disc drives the ten cross-shaped groove plates to rotate periodically by driving the ten cross-shaped groove plates, the circular rod drives the baffle to rotate periodically, and the gap area between the baffle and the exhaust pipe is changed. When the gap is opened, the hot air is quickly discharged, and when the gap is reduced, the air flow circulation is blocked, breaking the closed loop circulation of the air flow in the furnace, promoting the temperature field to be more uniform due to the alternating disturbance of the air flow, and further improving the heat transfer efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of the present application;

[0022] Figure 2 It is a schematic diagram of the first view of the internal structure of the furnace body of the present application;

[0023] Figure 3 It is a schematic diagram of the second view of the internal structure of the furnace body of the present application;

[0024] Figure 4 It is a schematic diagram of the first state structure of the storage unit of the present application;

[0025] Figure 5 It is a schematic diagram of the second state structure of the storage unit of the present application;

[0026] Figure 6 It is Figure 5 It is an enlarged view of structure A in the middle;

[0027] Figure 7 It is a schematic diagram of the air supply assembly structure of the present application;

[0028] Figure 8 Structure diagram of the convection assembly of the present application;

[0029] Figure 9 Structure diagram of the exhaust assembly of the present application.

[0030] The meanings of the respective reference numerals in the drawings are as follows:

[0031] 11, furnace body; 12, discharging mechanism; 13, discharging mechanism; 14, heating mechanism; 21, frame body; 22, shaft rod; 23, bottom plate; 24, guide pipe; 31, motor one; 32, column body; 33, center rod; 34, driving wheel; 35, driven wheel; 41, air inlet pipe; 42, fan; 43, converging plate; 51, motor two; 52, transmission rod; 53, eccentric wheel; 54, vertical plate; 55, guide plate; 56, limiting rod; 57, strip-shaped groove; 61, exhaust pipe; 62, round rod; 63, baffle; 64, rotating disc; 65, shifting block; 66, cross-shaped groove disc. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0033] To this end, the present application provides a reaction furnace for producing semiconductor-grade high-thermal-conductivity graphite material, as shown in Figures 1 to 9 which comprises a reaction unit and a storage unit.

[0034] The reaction unit comprises a furnace body 11, a discharging mechanism 12, a discharging mechanism 13 and a heating mechanism 14. The discharging mechanism 12 is arranged at the top of the furnace body 11, the discharging mechanism 13 is arranged at the bottom of the furnace body 11, and the heating mechanism 14 is annularly and gradiently distributed along the outer surface of the furnace body 11. The storage unit comprises a frame body 21 fixedly connected inside the furnace body 11. The frame body 21 is arranged vertically from top to bottom inside the furnace body 11. The inner wall of the frame body 21 is rotationally connected with a shaft rod 22. The outer surface of the shaft rod 22 is fixedly sleeved with a bottom plate 23. The bottom plate 23 is arranged as a quarter of a circular ring structure. All the bottom plates 23 are spliced to form an integral circular ring structure. The bottom of the discharging mechanism 12 is provided with a guide pipe 24. The bottom of the furnace body 11 is provided with a releasing assembly. The outer surface of the furnace body 11 is provided with a gas feeding unit. The specific connection mode and operation principle of the reaction furnace structure such as the discharging mechanism 12, the discharging mechanism 13 and the heating mechanism 14 are the prior art known to those skilled in the art, and will not be described in detail here.

[0035] When the graphite material is heated and reacted, the graphite material is conveyed into the furnace body 11 by the feeding mechanism, and the graphite material flows out of each conduit 24 after entering the feeding mechanism, realizing the diversion of the graphite material into all frame bodies 21. The graphite material is placed in the frame body 21 arranged in a separated manner, the graphite material in a single frame body 21 has a low accumulation effect, and the heat conduction effect of the graphite material in the upper and lower parts has a small difference. The heating mechanism 14 heats the graphite material in the single frame body 21 in the furnace body 11, the heat conduction path is shorter, the heat loss is less, the heating efficiency is greatly improved, the quality difference caused by local overheating or insufficient heating is reduced, and the initial stage of heating uses the air feeding unit to enhance the convective heat transfer effect of hot air in the furnace, improve the heating effect of the graphite material, and the release assembly can drop the heated graphite material on the bottom of the furnace body 11, and finally discharge it from the discharging mechanism 13.

[0036] As shown in Figures 2 to 6 The release assembly includes a motor 31 arranged at the bottom of the furnace body 11, the driving end of the motor 31 is fixedly connected with a center rod 33, the outer surface of the center rod 33 is fixedly sleeved with a driving wheel 34, the driving wheel 34 is arranged in position corresponding to the frame body 21, the inside of the furnace body 11 is fixedly connected with a column 32, the column 32 is arranged on the outer surface of the center rod 33, the column 32 is a hollow cylindrical structure, which not only plays a protective role on the center rod 33, but also provides a supporting and positioning structure for the shaft rod 22, the end of the shaft rod 22 away from the inner wall of the frame body 21 is movably inserted into the side of the column 32, the end of the shaft rod 22 inserted into the inside of the column 32 is fixedly connected with a driven wheel 35, the driving wheel 34 is meshingly connected with the driven wheel 35, the number of the conduits 24 is the same as that of the frame bodies 21, the bottom outlet of each conduit 24 is arranged on the upper part of a different frame body 21, respectively, the conduit 24 conveys the graphite material into the feeding mechanism, and each conduit 24 is provided with a flow guide spiral on the inner wall of the bottom, which can effectively guide the graphite material to fall uniformly into all frame bodies 21;

[0037] The motor 31 is started to drive the center rod 33 to rotate, the center rod 33 rotates to drive the driving wheel 34 to rotate, and the driving wheel 34 drives the meshing driven wheel 35 to rotate synchronously, the shaft rod 22 is further driven to rotate by the driven wheel 35, and the bottom plate 23 rotates from the horizontal state to the vertical state, and the graphite material on the bottom plate 23 begins to slide due to the action of gravity when the bottom plate 23 is turned to a certain angle with the vertical direction, and finally completely turns to the vertical state, so that all the graphite material falls on the bottom of the furnace body 11 and is discharged outside the furnace by the guide of the discharging mechanism 13.

[0038] As shown in Figures 7 to 9As shown, the air supply unit includes an air inlet pipe 41 fixedly connected to the lower part of the outer surface of the furnace body 11, the inside of the air inlet pipe 41 is provided with a fan 42, the inner wall of the furnace body 11 is provided with a flow converging plate 43, the flow converging plate 43 is arranged in a triangular structure with an arc line as the side line, which can better fit the inner wall of the furnace body 11 and also guide the airflow, the inner wall of the air inlet pipe 41 is provided with a convection assembly, and the upper part of the outer surface of the furnace body 11 is provided with an exhaust assembly;

[0039] The fan 42 can drive air to flow into the furnace body 11 after being powered on, and the air is heated to high temperature after being in contact with the heating mechanism 14 in the furnace, and the airflow after being heated flows along the arc edge of the flow converging plate 43, and converges under the guidance of the triangular structure, and the convection hot air flows towards the frame 21, so that the air flow in the furnace body 11 can be improved while realizing convection heat transfer, and the heat transfer efficiency in the initial heating stage is improved, and the heating speed in the initial heating stage is significantly improved.

[0040] As shown in Figure 7 and Figure 8 The convection assembly includes a transmission rod 52 movably inserted in the middle of the exhaust pipe 61, the outer surface of the furnace body 11 is provided with a motor two 51, the driving end of the motor two 51 is fixedly connected with the bottom of the transmission rod 52, the outer surface of the transmission rod 52 is fixedly sleeved with an eccentric wheel 53, the upper and lower sides of the eccentric wheel 53 are provided with annular grooves, the inner wall of the air inlet pipe 41 is fixedly connected with a vertical plate 54, the outer surface of the vertical plate 54 is slidably connected with the outer surface of the eccentric wheel 53 through a limiting sliding block, the limiting sliding block on the outer surface of the vertical plate 54 is slidably connected in the annular groove, the side edge of the vertical plate 54 is hingedly connected with a flow guide plate 55, the inner wall of the air inlet pipe 41 is fixedly connected with a limiting rod 56, a strip-shaped groove 57 is formed through the upper surface of the flow guide plate 55, and the strip-shaped groove 57 is sleeved on the outer surface of the limiting rod 56;

[0041] The motor 51 drives the transmission rod 52 to rotate, and the transmission rod 52 synchronously drives the eccentric wheel 53 and the rotating disc 64 to rotate. The eccentric wheel 53 drives the vertical plate 54 to move back and forth during rotation, and converts the circular motion into the linear reciprocating motion of the vertical plate 54. The vertical plate 54 drives the guide plate 55 to move while performing the linear reciprocating motion. Since the strip-shaped slot 57 in the middle of the guide plate 55 is limited by the limiting rod 56, the guide plate 55 slides around the limiting rod 56 while being pushed by the vertical plate 54, so as to realize small-amplitude reciprocating swing. In this process, the airflow delivered by the fan 42 is guided into the furnace body 11 through the guide plate 55. The reciprocating swing of the guide plate 55 causes the direction of the airflow to change periodically. The bifurcated design of the guide plate 55 can make the airflow flow to both sides. The change in the angle of the guide plate 55 changes the airflow direction, and the change in the angle also changes the cross-sectional area of the airflow passage. When the guide plate 55 swings to the limit position, the passage narrows, and the airflow speed increases. When the guide plate 55 swings back to the middle position, the passage widens, and the airflow speed slows down. This dynamic adjustment causes the airflow in the furnace to form a turbulent effect. The airflow no longer flows in a single direction, but forms a cross-flow in the furnace, thereby enhancing the heat exchange efficiency between the air and the graphite material, and ensuring that the temperature field in the furnace tends to be uniform due to uniform disturbance of the airflow.

[0042] As shown in Figure 7 and Figure 9 , the exhaust assembly includes an exhaust pipe 61 fixedly connected to the upper part of the outer surface of the furnace body 11. The middle part of the exhaust pipe 61 movably penetrates a round rod 62. The outer surface of the round rod 62 is annularly arrayed with baffles 63. The bottom end of the round rod 62 is fixedly connected with a cross-shaped groove disc 66. The top end of the transmission rod 52 is rotatably connected to the lower surface of the exhaust pipe 61. The outer surface of the transmission rod 52 is fixedly sleeved with a rotating disc 64 near the top. The upper surface edge of the rotating disc 64 is fixedly connected with a push block 65. The push block 65 is slidingly connected in the interior of the cross-shaped groove disc 66.

[0043] The rotating disc 64 drives the push block 65 to perform circular motion around the center of the rotating disc 64 during rotation. The push block 65 slides into the cross-shaped groove disc 66 and drives the cross-shaped groove disc 66 to drive the round rod 62 to rotate during rotation. Since the push block 65 is engaged with the cross-shaped groove disc 66 only once every rotation, the round rod 62 is driven to rotate by 90 degrees each time. The rotation of the round rod 62 synchronously drives the baffles 63 to rotate. The gap area between the baffles 63 and the exhaust pipe 61 changes periodically. When the baffles 63 rotate to the limit position, the gap is completely opened, and the hot air is quickly discharged. When the baffles 63 are close to the inner wall of the exhaust pipe 61 again, the gap is reduced, and the airflow circulation is blocked. This intermittent discharge breaks the closed-loop circulation of the airflow in the furnace, constantly replenishes the fresh hot air, and drives the original airflow to form a turbulent flow, so as to make the temperature field more uniform due to the alternating disturbance of the airflow, and further improve the heat transfer efficiency.

[0044] The technical scheme provided by the application is that when graphite material is heated and reacted, the graphite material is conveyed into the furnace body 11 by the feeding mechanism, the heating mechanism 14 is started to heat the inside of the furnace body 11, the graphite material is graphitized by the heating and reaction, the graphite material flows out from each conduit 24 after entering the feeding mechanism, and the outlets of different conduits 24 are correspondingly arranged above different frame bodies 21, so that the graphite material is branched into all the frame bodies 21, at this time, the bottom plate 23 is in a horizontal state, which facilitates the receiving of the graphite material, the graphite material is arranged in the frame body 21 arranged in a separated mode, the graphite material in a single frame body 21 has a low accumulation effect, and the heat conduction effect of the graphite material in the upper and lower parts is small, the graphite material in a single frame body 21 in the inside of the furnace body 11 is heated by the heating mechanism 14, and the heating efficiency is greatly improved;

[0045] In the initial stage of heating, the air inlet pipe 41 and the exhaust pipe 61 are opened, and the fan 42 is powered on to drive the air flow into the furnace body 11. The air is heated synchronously by the heating mechanism 14 in the furnace body 11. The air flows along the guide plate 55 during the flow process, realizes convergent convection, and the hot air of the convection flows against the frame body 21. Thus, the air flow in the furnace body 11 can be improved at the same time to realize convection heat transfer, improve the heat transfer efficiency in the initial stage of heating, and drive the transmission rod 52 to rotate by starting the motor two 51. The eccentric wheel 53 and the rotating disc 64 are synchronously driven to rotate by the transmission rod 52. The eccentric wheel 53 pulls the vertical plate 54 to move back and forth during the rotation process. The vertical plate 54 moves linearly and reciprocally, and pushes the guide plate 55 to move. Because the strip-shaped slot 57 in the middle of the guide plate 55 is limited by the limiting rod 56, the guide plate 55 slides around the limiting rod 56 while being pushed by the vertical plate 54. Thus, a small-amplitude reciprocating swing is realized. The air flow conveyed by the fan 42 is guided into the furnace body 11 through the guide plate 55. The reciprocating swing of the guide plate 55 changes the direction of the air flow periodically. The bifurcated design of the guide plate 55 can make the air flow to both sides. The change of the angle of the guide plate 55 changes the air flow direction and the air flow passage cross-sectional area. When the swing reaches the limit position, the passage becomes narrow, and the air flow speed increases. When the swing returns to the middle position, the passage becomes wide, and the air flow speed slows down. This dynamic adjustment makes the air flow in the furnace form a turbulent effect. The air flow no longer flows in a single direction, but forms a cross convection in the furnace, thereby enhancing the heat exchange efficiency between the air and the graphite material, improving the convection heat transfer efficiency, ensuring a more uniform temperature field, and improving the heating effect on the graphite material. In addition, the round rod 62 and the baffle 63 are arranged in the exhaust pipe 61. The baffle 63 can block the air flow in the exhaust pipe 61 to a certain extent. The rotating disc 64 rotates to drive the block 65 to move in a circular motion around the center of the rotating disc 64. The block 65 slides into the cross-shaped groove disc 66 during the rotation process and drives the cross-shaped groove disc 66 to rotate the round rod 62 by ninety degrees. The rotation of the round rod 62 synchronously drives the baffle 63 to rotate. The gap area between the baffle 63 and the exhaust pipe 61 changes periodically. When the baffle 63 rotates to the limit position, the gap is completely opened, and the hot air is quickly discharged. When the baffle 63 approaches the inner wall of the exhaust pipe 61 again, the gap is reduced, the air flow is blocked, the circulation of the air flow is broken, and the heat transfer efficiency is further improved.

[0046] The end of the air inlet pipe 41 is provided with a freely openable and closable valve. When the heating process is in the middle stage, the valve of the air inlet pipe 41 and the air outlet pipe 61 is closed to avoid the adverse effect caused by the air entering in the high temperature state. After the heating process is completed, the discharging mechanism 13 is opened, the motor 31 is started to drive the central rod 33 to rotate, the central rod 33 drives the driving wheel 34 to rotate, and the driving wheel 34 drives the meshed driven wheel 35 to rotate synchronously. The driven wheel 35 further drives the shaft rod 22 to rotate, the bottom plate 23 rotates with the shaft rod 22 to change from the horizontal state to the vertical state, and the heated graphite material placed on the bottom plate 23 falls to the bottom of the furnace body 11 and is finally discharged from the discharging mechanism 13. The bottom plate 23 rotates with the shaft rod 22 again to change from the vertical state to the horizontal state, facilitating the next feeding and heating process.

[0047] It should be noted that the relational terms herein such as first and second and the like are used solely to distinguish one from another entity or action, without necessarily requiring or implying any actual relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0048] Although the embodiments of the present application have been shown and described, it is to be understood that various modifications, substitutions, replacements and changes can be made to the embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A reactor for producing semiconductor-grade high thermal conductivity graphite materials, characterized in that, Includes reaction unit and storage unit; The reaction unit includes a furnace body (11), a feeding mechanism (12), a discharge mechanism (13), and a heating mechanism (14). The feeding mechanism (12) is located at the top of the furnace body (11), the discharge mechanism (13) is located at the bottom of the furnace body (11), and the heating mechanism (14) is distributed in a ring gradient along the outer surface of the furnace body (11). The storage unit includes a frame (21) fixedly connected inside the furnace body (11). Multiple frames (21) are arranged vertically from top to bottom inside the furnace body (11). The inner wall of the frame (21) is rotatably connected to a shaft (22). A base plate (23) is fixedly sleeved on the outer surface of the shaft (22). The base plate (23) is set as a quarter-circular ring structure. All the base plates (23) are spliced ​​together to form an integral circular ring structure. The bottom of the furnace body (11) is provided with a release component, and the outer surface of the furnace body (11) is provided with a gas supply unit; The release assembly includes a motor (31) located at the bottom of the furnace body (11). The drive end of the motor (31) is fixedly connected to a central rod (33). An active wheel (34) is fixedly sleeved on the outer surface of the central rod (33). A column (32) is fixedly connected inside the furnace body (11). The column (32) is located on the outer surface of the central rod (33). A guide tube (24) is provided at the bottom of the feeding mechanism (12). The number of guide tubes (24) is the same as the number of frames (21). The bottom outlet of each guide tube (24) is respectively located on the upper part of different frames (21).

2. The semiconductor-grade high thermal conductivity graphite material production reactor according to claim 1, characterized in that: The end of the shaft (22) away from the inner wall of the frame (21) is movably inserted through the side of the column (32). The end of the shaft (22) that extends into the inside of the column (32) is fixedly connected to a driven wheel (35). The driving wheel (34) is meshed with the driven wheel (35).

3. The semiconductor-grade high thermal conductivity graphite material production reactor according to claim 1, characterized in that: The gas supply unit includes an air inlet pipe (41) fixedly connected to the lower part of the outer surface of the furnace body (11). A fan (42) is installed inside the air inlet pipe (41). A flow-concentrating plate (43) is installed on the inner wall of the furnace body (11). The flow-concentrating plate (43) is a triangular structure with arc edges. A convection component is installed on the inner wall of the air inlet pipe (41). An exhaust component is installed on the upper part of the outer surface of the furnace body (11).

4. The semiconductor-grade high thermal conductivity graphite material production reactor according to claim 3, characterized in that: The convection assembly includes a transmission rod (52) that is movably inserted in the middle of the air inlet pipe (41). A second motor (51) is provided on the outer surface of the furnace body (11). The driving end of the second motor (51) is fixedly connected to the bottom of the transmission rod (52). An eccentric wheel (53) is fixedly sleeved on the outer surface of the transmission rod (52).

5. The semiconductor-grade high thermal conductivity graphite material production reactor according to claim 4, characterized in that: The inner wall of the air intake pipe (41) is slidably connected to a vertical plate (54), and the outer surface of the vertical plate (54) is slidably engaged with the outer surface of the eccentric wheel (53) by a limiting slider. A guide plate (55) is hinged to the side of the vertical plate (54).

6. The semiconductor-grade high thermal conductivity graphite material production reactor according to claim 5, characterized in that: The inner wall of the air intake pipe (41) is fixedly connected to a limiting rod (56), and a strip groove (57) is provided through the upper surface of the guide plate (55), and the strip groove (57) is sleeved on the outer surface of the limiting rod (56).

7. The semiconductor-grade high thermal conductivity graphite material production reactor according to claim 6, characterized in that: The exhaust assembly includes an exhaust pipe (61) fixedly connected to the upper part of the outer surface of the furnace body (11). A round rod (62) is movably inserted through the middle of the exhaust pipe (61). Baffles (63) are distributed in a ring array on the outer surface of the round rod (62). A cross-shaped grooved plate (66) is fixedly connected to the bottom end of the round rod (62).

8. The semiconductor-grade high thermal conductivity graphite material production reactor according to claim 7, characterized in that: A turntable (64) is fixedly sleeved on the outer surface of the transmission rod (52) near the top. A lever (65) is fixedly connected to the edge of the upper surface of the turntable (64). The lever (65) is slidably engaged inside the cross-shaped grooved plate (66).

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