AOI detection light source and detection system

Abstract

The invention relates to the technical field of optical detection, in particular to an AOI detection light source and a detection system. The detection light source comprises a first light source, a second light source and a third light source; part of light emitted by the first light source is condensed by the cylindrical mirror and obliquely reflected by the semi-reflecting and semi-transmitting mirror to form a first light beam; the two groups of second light sources are symmetrically arranged, and light emitted by each group of second light sources is obliquely reflected by the first light guide surface and the second light guide surface in sequence and then converged to form a second light beam; the two third light sources are symmetrically arranged, light emitted by each third light source is obliquely reflected by the third light guide surface and then converged to form a third light beam, and the third light beam is located on the side, away from the first light beam, of the second light beam; the total angle of the first light beam, the second light beam and the third light beam is larger than or equal to 160 degrees. According to the AOI detection light source disclosed by the invention, through a unique optical design, light rays up to 160 degrees can be incident to a defect area in a convergent form, so that a camera can conveniently capture defect characteristic information.

Description

Technical Field

[0001] The present invention relates to the field of optical detection technology, and in particular to an AOI detection light source and a detection system. Background Art

[0002] When it comes to semiconductor silicon wafers, the detection of micro-shorts and micro-defects (such as those formed by the accumulation of impurities or point defects, dislocations, and stacking faults) is particularly critical. These defects are often extremely small, typically only tens of microns or just a few microns, posing a significant challenge to detection.

[0003] During front-end PCB circuit quality inspection, detecting defects such as capsules and bottom copper is equally challenging. Capsule defects are often caused by a thin resist layer or uneven pattern distribution during the electroplating process. They can lead to direct short circuits, seriously impacting PCB performance and yield. Bottom copper defects, on the other hand, can be caused by uneven electroplating or poor copper material quality, impacting the PCB's conductivity and reliability.

[0004] Traditional inspection methods struggle to detect these tiny anomalies, so the industry has begun adopting more advanced inspection technologies. While AOI optical inspection systems can non-destructively detect defects using high-resolution camera imaging technology, they are still unable to detect defects such as micro-shorts, film formation, and bottom copper defects encountered during quality inspections of semiconductor silicon wafers and front-end PCB circuits. Summary of the Invention

[0005] The purpose of the present invention is to overcome the shortcomings of the AOI optical inspection system in the background art that is unable to detect defects such as shorts, capsules, and bottom copper encountered in the quality inspection of semiconductor silicon wafers, PCB board front-end circuits, etc., and to provide an AOI inspection light source and inspection system. The unique optical design is used to converge up to 160 degrees of light onto the shooting surface, thereby ensuring multi-angle incidence and uniformity of the defect area, making it easy for the camera to capture defect feature information.

[0006] In a first aspect, the present invention provides an AOI inspection light source, comprising: A first light source, wherein part of the light emitted by the first light source is focused by a cylindrical mirror and then obliquely reflected by a half-reflecting half-mirror to form a first light beam; Two symmetrically arranged groups of second light sources, wherein light emitted by each group of the second light sources is sequentially reflected obliquely by the first light-guiding surface and the second light-guiding surface and then converges to form a second light beam, and the two groups of the second light beams are symmetrical with respect to the first light beam; Two symmetrically arranged groups of third light sources, wherein light emitted by each group of the third light sources is obliquely reflected by the third light-guiding surface and then converges to form a third light beam, the third light beam being located on a side of the second light beam away from the first light beam, and the two groups of the third light beams being symmetrical with respect to the first light beam; The first light beam, the second light beam, and the third light beam converge to the same side, and a total angle of the first light beam, the second light beam, and the third light beam is greater than or equal to 160 degrees.

[0007] The AOI inspection light source provided by the present invention utilizes a unique optical design, using multiple light sources to form multiple converging beams. This increases the overall angle of the beam, allowing up to 160 degrees of light to converge and strike the defect area, facilitating camera capture of defect feature information. In a preferred embodiment, the surface of the object being inspected can be perpendicular to the main optical path of the first light beam. When the light beams of different inclinations from the first, second, and third beams strike the object, the combined beam simultaneously illuminates the front and side surfaces of the concave-convex structure, enabling the camera to clearly image the concave-convex structure and facilitate identification of defects on the object.

[0008] As a preferred solution of the present invention, the third light source and the third light guiding surface are located on a side of the first light guiding surface away from the second light source.

[0009] As a preferred solution of the present invention, the third light guiding surface and the first light guiding surface are provided on the same light guiding component.

[0010] As a preferred solution of the present invention, the half-reflecting half-mirror lens has an included angle a with the main direction of the first light beam, where a=45°.

[0011] As a preferred solution of the present invention, the first light guiding surface, the second light guiding surface and the third light guiding surface all extend along the first direction; the projection of the first light guiding surface in the first direction is a straight line; the projection of the second light guiding surface and the third light guiding surface in the first direction is a concave curve.

[0012] As a preferred solution of the present invention, the first light beam, the second light beam and the third light beam are all converging light beams extending along the first direction, and the first light beam, the second light beam and the third light beam converge in the same focusing area.

[0013] As a preferred solution of the present invention, the first light source, the second light source and the third light source each include a plurality of LED lamp beads arranged in sequence along a first direction; a strip-shaped Fresnel lens is provided on the light-emitting side of the LED lamp beads.

[0014] As a preferred solution of the present invention, the two second light guiding surfaces are symmetrically arranged, and there is a space between the two second light guiding surfaces for the first light beam to pass through.

[0015] As a preferred solution of the present invention, the two third light guiding surfaces are symmetrically arranged, and there is a space between the two third light guiding surfaces for the first light beam and the second light beam to pass through.

[0016] As a preferred solution of the present invention, it comprises a housing, a light outlet is provided on one side of the housing, and the first light beam, the second light beam and the third light beam are all emitted from the light outlet.

[0017] As a preferred solution of the present invention, the height of the half-reflecting half-mirror relative to the light outlet is greater than the height of the second light guiding surface relative to the light outlet.

[0018] As a preferred solution of the present invention, a height of the second light guiding surface relative to the light outlet is greater than a height of the third light guiding surface relative to the light outlet.

[0019] As a preferred solution of the present invention, a first plate and a second plate that are flush with each other are provided on one side of the shell, and the light outlet is located between the first plate and the second plate; one group of the third light sources is provided on the inner wall of the first plate, and another group of the third light sources is provided on the inner wall of the second plate.

[0020] As a preferred solution of the present invention, a camera port is further provided on the housing, and the camera port is opposite to the light outlet.

[0021] In a second aspect, the present invention provides an AOI detection system, comprising a camera and the AOI detection light source as described above; the camera is located on the side of the half-reflecting half-mirror away from the first light source, and the camera is located on the reverse extension line of the main direction of the first light beam.

[0022] As a preferred solution of the present invention, it further includes an object to be inspected, wherein the object to be inspected is located on the main light path of the first light beam, and the first light beam, the second light beam and the third light beam are all emitted towards the object to be inspected.

[0023] Compared with the prior art, the present invention has the following beneficial effects: The AOI inspection light source provided by the present invention utilizes a unique optical design, using multiple light sources to form multiple converging beams. This increases the overall angle of the beam, allowing up to 160 degrees of light to converge and strike the defect area, facilitating camera capture of defect feature information. In a preferred embodiment, the surface of the object being inspected can be perpendicular to the main optical path of the first light beam. When the light beams of different inclinations from the first, second, and third beams strike the object, the combined beam simultaneously illuminates the front and side surfaces of the concave-convex structure, enabling the camera to clearly image the concave-convex structure and facilitate identification of defects on the object. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1This is a schematic diagram of the appearance of the AOI detection light source of the present invention; Figure 2 This is a structural diagram of the AOI detection light source of the present invention; Figure 3 This is a cross-sectional view of the AOI detection light source of the present invention; Figure 4 Schematic diagram of the illumination of the AOI inspection system of the present invention.

[0025] Markings in the figure: 1-housing; 11-end plate; 12-camera port; 13-light outlet; 14-first plate body; 15-second plate body; 2-LED light source; 21-first light source; 22-second light source; 23-third light source; 3-half-reflective half-mirror; 4-cylindrical mirror; 5-first light guiding surface; 6- second light guiding surface; 7- third light guiding surface; 8-Fresnel lens; 9-Camera; 10- Object to be inspected. DETAILED DESCRIPTION

[0026] The present invention will be further described in detail below with reference to specific embodiments. However, this should not be construed as limiting the scope of the present invention to the following embodiments, as all technologies implemented based on the present invention fall within the scope of the present invention.

[0027] Unless otherwise specified, in the description of the specific embodiments of the present invention, the terms indicating the orientation or positional relationship, such as "upper", "lower", "left", "right", "center", "inside", and "outside", are based on the expressions of the orientation or positional relationship shown in the accompanying drawings, or are the orientation or positional relationship in which the invented product / device / apparatus is placed when it is conventionally used. These terms of orientation or positional relationship are merely for the purpose of facilitating the description of the scheme of the present invention or simplifying the description of the specific embodiments to facilitate the rapid understanding of the scheme by technicians, and do not indicate or imply that a specific device / component / element must have a specific orientation, or be constructed and operated in a specific positional relationship, and therefore should not be understood as limiting the present invention.

[0028] In addition, if the terms "horizontal", "vertical", "overhanging", "parallel" and the like appear, it does not mean that the corresponding devices / components / elements are required to be absolutely horizontal or vertical or overhanging or parallel, but may be slightly tilted or have deviations. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but may be slightly tilted. Alternatively, it can be simply understood that the corresponding devices / components / elements are set in directions such as "horizontal", "vertical", "overhanging", and "parallel", and can have an error / deviation of ±10% relative to the corresponding direction setting, more preferably an error / deviation within ±8%, more preferably an error / deviation within ±6%, more preferably an error / deviation within ±5%, and more preferably an error / deviation within ±4%. As long as the corresponding device / component / element is within the error / deviation range, it can still achieve its role in the solution of the present invention.

[0029] In addition, the expressions “first”, “second”, “third”, etc. in the terms are merely used to distinguish the description of the same or similar components, and should not be understood as emphasizing or implying the relative importance of specific components.

[0030] In addition, in the description of the embodiments of the present invention, "several," "plurality," and "a number" represent at least two. It can also be any number such as two, three, four, five, six, seven, eight, nine, or even more than nine.

[0031] Furthermore, in the description of the technical solution of the present invention, unless otherwise expressly specified, defined, or limited, the terms "disposed," "installed," "connected," "connected," "provided with," "laid," and "arranged" should be understood broadly. For example, they may refer to fixed connections, detachable connections, or integral connections. They may be welded, riveted, bolted, threaded, or other commonly used connection methods in the art. Such connections may be mechanical, electrical, or communicative; they may be direct, indirect via an intermediate medium, or internally connected between two components.

[0032] Example 1 like Figures 1 to 4As shown, this embodiment provides an AOI detection light source, including a first light source 21, a second light source 22 and a third light source 23. Part of the light emitted by the first light source 21 is focused by a cylindrical mirror 4 and then obliquely reflected by a half-reflecting mirror 3 to form a first light beam; two groups of second light sources 22 are symmetrically arranged, and the light emitted by each group of second light sources 22 is successively obliquely reflected by the first light-guiding surface 5 and the second light-guiding surface 6 and then converged to form a second light beam, and the two groups of second light beams are symmetrical relative to the first light beam; two groups of third light sources 23 are symmetrically arranged, and the light emitted by each group of third light sources 23 is obliquely reflected by the third light-guiding surface 7 and then converged to form a third light beam, the third light beam is located on the side of the second light beam away from the first light beam, and the two groups of third light beams are symmetrical relative to the first light beam; the first light beam, the second light beam and the third light beam converge to the same side, and the total angle of the first light beam, the second light beam and the third light beam is greater than or equal to 160 degrees.

[0033] The first light source 21, the second light source 22 and the third light source 23 can all be LED light sources 2, which emit directional divergent light beams to a certain side through LED chips or LED lamp beads. After the divergent light beams travel a certain distance in space, they can form a larger range of surface light.

[0034] Part of the light emitted by the first light source 21 is first focused by the cylindrical mirror 4, and then obliquely reflected by the half-reflecting half-mirror 3 to form a first light beam; the cylindrical mirror 4 refers to an optical element having a cylindrical shape in at least one cross section, and the cylindrical mirror 4 is usually a strip structure extending in a certain direction, which can be used for focusing or astigmatism of the strip light source; in this embodiment, the cylindrical mirror 4 is a type of cylindrical lens with a focusing function, including but not limited to a plano-convex cylindrical lens, a biconvex cylindrical lens or a meniscus cylindrical lens; Figure 2 and Figure 3 As shown, the cylindrical mirror 4 in the figure extends along the first direction, and it is a plano-convex cylindrical lens. Through the focusing effect of the cylindrical mirror 4, the light beam emitted by the first light source 21 is changed from a divergent state to a convergent state, and the half-reflecting half-mirror 3 is located in front of the convergence point of the convergent light beam, that is, the first light beam formed after reflection by the half-reflecting half-mirror 3 is also a convergent light beam.

[0035] Oblique reflection refers to a type of reflection occurring on a reflecting surface in which the incident direction of a light beam is different from the reflection direction. Through oblique reflection, the reflected light beam can have an optical path different from that of the incident light beam, thereby irradiating a designated position. The reflecting surface includes the half-reflective half-mirror 3, the first light-guiding surface 5, the second light-guiding surface 6 and the third light-guiding surface 7 described in this embodiment.

[0036] The half-reflecting half-mirror 3 is an optical element that can partially transmit and partially reflect light, and is sometimes also called a semi-transparent half-reflecting mirror, a spectroscopic film, a spectroscope, etc.; through the effect of partial reflection, when the light beam emitted by the first light source 21 and focused by the cylindrical mirror 4 is obliquely emitted toward the half-reflecting half-mirror 3, part of the light will be reflected by the half-reflecting half-mirror 3 to form a first light beam, and there is an angle a between the main direction of the first light beam and the half-reflecting half-mirror 3, and the angle a is preferably: 10°≤a≤80°, further preferably 30°≤a≤60°; further preferably a=45°.

[0037] When a=45°, the main direction of the light beam emitted by the first light source 21 after being focused by the cylindrical mirror 4 is perpendicular to the main direction of the first light beam. In the arrangement of the optical system, the rectangular space in the rectangular shell can be fully utilized, making the structure more compact, and the rectangular shell is also convenient for transportation and storage.

[0038] There are two groups of second light sources 22, and the two groups of second light sources 22 are symmetrically arranged relative to the first light beam. For each group of second light sources 22, the light emitted by it is reflected by the first light-guiding surface 5 and the second light-guiding surface 6 in sequence to form a second light beam, wherein at least one of the first light-guiding surface 5 and the second light-guiding surface 6 has a converging effect on the light, so that the second light beam formed after two reflections is a converging light beam; the two groups of second light beams are symmetrically arranged on both sides of the first light beam, so that the overall light beam formed by the first light beam and the second light beam has a larger total angle.

[0039] Preferably, the first light-guiding surface 5 is a plane, and the second light-guiding surface 6 is a strip-shaped concave surface. The light is converged by the second light-guiding surface 6. This creates a larger surface light on the second light-guiding surface 6, which helps increase the convergence angle of the second light beam. The strip-shaped concave surface refers to a reflective surface that extends along a first direction and whose projection in the first direction is a concave curve.

[0040] There are two groups of third light sources 23, which are symmetrically arranged relative to the first light beam. The light emitted by each group of third light sources 23 is reflected by the third light guide surface 7 to form a third light beam. The third light guide surface 7 has a converging effect on the light, so that the third light beam is a convergent beam. Figure 4 As shown, the third light beam is symmetrically arranged on both sides of the first light beam, and the third light beam is located on the side of the second light beam away from the first light beam. The third light beam can further increase the total angle of the entire light beam; the third light guiding surface 7 can be a strip-shaped concave surface as described above.

[0041] In this embodiment, the total angle of the first light beam, the second light beam, and the third light beam refers to the angle between the edgemost light beams on both sides of the overall light beam formed by them.

[0042] Preferably, the first, second, and third light beams converge on the same focusing area, which can be a linear area or a strip area of ​​a certain width. The total convergence angle of the first, second, and third light beams is greater than or equal to 160 degrees. The convergence angle refers to the angle between the edge rays on both sides of the convergence beam. Preferably, the second light beam and the first light beam are projected continuously in the first direction, that is, the overall light beam formed by the first and second light beams includes light rays at any angle within the convergence angle range.

[0043] In summary, the AOI inspection light source provided in this embodiment utilizes a unique optical design, using multiple groups of light sources to form multiple converging beams. This increases the overall angle of the beam, allowing up to 160 degrees of light to converge and strike the defect area, thereby facilitating the capture of defect feature information by the camera 9. In a preferred embodiment, the surface of the object under inspection 10 can be perpendicular to the main optical path of the first light beam. When the light beams of different inclination angles in the first, second, and third light beams strike the object under inspection 10, the overall beam can simultaneously illuminate the front and side surfaces of the concave-convex structure, enabling the camera 9 to clearly image the concave-convex structure, thereby facilitating the identification of defects on the object under inspection 10.

[0044] Those skilled in the art will understand that, through the partial transmission effect of the half-reflecting half-mirror 3, when the light of the incident light beam is absorbed and reflected by the object, part of the reflected light irradiated on the half-reflecting half-mirror 3 can be transmitted out, and the transmitted reflected light can be obtained by the camera 9 or other detection equipment, so as to perform imaging or other detection on the object.

[0045] In some embodiments, the third light source 23 and the third light guiding surface 7 are located on a side of the first light guiding surface 5 away from the second light source 22 .

[0046] like Figure 3 and Figure 4 As shown, by arranging the third light source 23 and the third light-guiding surface 7 on the side of the first light-guiding surface 5 away from the second light source 22, the optical path of the third light beam formed by them to illuminate the focusing area can be reduced, and because the third light-guiding surface 7 is closer to the focusing area than the second light-guiding surface 6, the third light beam can have a larger inclination angle relative to the first light beam, thereby increasing the total angle of the overall light beam formed by the first light beam, the second light beam and the third light beam.

[0047] Preferably, the third light guide surface 7 and the first light guide surface 5 are provided on the same light guide member, such as Figure 3 As shown, the first light guide surface 5 and the third light guide surface 7 can be respectively provided on two surfaces on different sides of the same light guide component, and the light emitting side of the third light source 23 is directed toward the light guide component, thereby forming a third light beam with a larger inclination angle relative to the first light beam.

[0048] In some embodiments, the first light guiding surface 5, the second light guiding surface 6 and the third light guiding surface 7 all extend along the first direction; the projection of the first light guiding surface 5 in the first direction is a straight line; the projection of the second light guiding surface 6 and the third light guiding surface 7 in the first direction are concave curves; the first light beam, the second light beam and the third light beam are all converging light beams extending along the first direction.

[0049] A converging beam refers to a beam in which light converges along an area. In this embodiment, the first beam, the second beam, and the third beam all converge toward a linear or strip-shaped area, and the first beam, the second beam, and the third beam converge in the same focusing area, so that the overall beam formed by them is a converging beam.

[0050] The first light source 21 , the second light source 22 and the third light source 23 each include a plurality of LED lamp beads arranged in sequence along a first direction; a strip-shaped Fresnel lens 8 is provided on the light-emitting side of the LED lamp beads.

[0051] A plurality of LED lamp beads arranged in a linear pattern can form linear illumination, which, in conjunction with the first light-guiding surface 5, the second light-guiding surface 6, and the third light-guiding surface 7, can form a strip-shaped converging light beam. A Fresnel lens 8 is provided on the light-emitting side of the LED lamp bead to focus light, thereby reducing the beam angle of the light beam emitted by the LED lamp bead.

[0052] In some embodiments, the two second light guiding surfaces 6 are symmetrically arranged, and there is a space between the two second light guiding surfaces 6 for the first light beam to pass through; the two third light guiding surfaces 7 are symmetrically arranged, and there is a space between the two third light guiding surfaces 7 for the first light beam and the second light beam to pass through.

[0053] Preferably, at the opposing edges of the two second light-guiding surfaces 6, the first light beam and the second light beam are continuous, that is, the edge rays of the first light beam and the edge rays of the second light beam passing between the two second light-guiding surfaces 6 have the same or similar optical paths. To this end, a cut surface inclined relative to the main optical path of the first light beam can be provided on the opposing sides of the two light-guiding components provided with the second light-guiding surfaces 6, with the included angle of the cut surface being greater than the included angle of the edge rays of the first light beam passing between the two second light-guiding surfaces 6.

[0054] Preferably, at the opposing edges of the two third light-guiding surfaces 7, the second and third light beams are continuous. That is, the edge rays of the second and third light beams passing between the two third light-guiding surfaces 7 have the same or similar optical paths as the edge rays of the second and third light beams. To this end, a tangent plane can be provided on opposing sides of the two light-guiding members provided with the third light-guiding surfaces 7. The tangent plane is inclined relative to the main optical path of the first light beam, and the included angle of the tangent plane is greater than the included angle of the edge rays of the second light beam passing between the two third light-guiding surfaces 7.

[0055] In some embodiments, a housing 1 is included, and a light outlet 13 is provided on one side of the housing 1 . The first light beam, the second light beam, and the third light beam are all emitted from the light outlet 13 .

[0056] Each optical component can be installed within the housing 1, which protects and maintains the relative positions of the components. A light outlet 13 is provided on one side of the housing 1. Light outlet 13 can be made of a light-transmitting material, such as a transparent material. Light outlet 13 is relatively large to allow the first, second, and third light beams to be emitted from the light outlet 13.

[0057] Preferably, the height of the half-reflecting half-mirror 3 relative to the light outlet 13 is greater than the height of the second light guiding surface 6 relative to the light outlet 13; the height of the second light guiding surface 6 relative to the light outlet 13 is greater than the height of the third light guiding surface 7 relative to the light outlet 13.

[0058] The heights of the half-reflecting mirror 3, the second light-guiding surface 6 and the third light-guiding surface 7 relative to the light outlet 13 are successively lowered, so that the distribution of each light beam is clearly layered; the light-guiding component where the second light-guiding surface 6 is located blocks the excess light on both sides of the first light beam, and the light-guiding component where the third light-guiding surface 7 is located blocks the excess light on one side of the second light beam, thereby reducing the overlap between the light beams and improving the uniformity of the light output.

[0059] In some embodiments, a first plate 14 and a second plate 15 that are flush with each other are provided on one side of the housing 1, and the light outlet 13 is located between the first plate 14 and the second plate 15; a group of third light sources 23 is provided on the inner wall of the first plate 14, and another group of third light sources 23 is provided on the inner wall of the second plate 15.

[0060] The first plate 14 and the second plate 15 are located on the same side of the housing 1. The first plate 14 and the second plate 15 are flush with each other and there is a gap between them, which is the light outlet 13. The two groups of third light sources 23 are respectively arranged on the inner walls of the plates on both sides of the light outlet 13, which can make the height difference between the third light sources 23 and the light outlet 13 smaller, thereby reducing the height of the third light guide surface 7.

[0061] Preferably, the housing 1 is further provided with a camera port 12 , which is opposite to the light outlet 13 .

[0062] The light transmitted from the half-mirror 3 can be emitted from the camera port 12 to be captured by a detection device, such as a camera 9, for imaging. The camera port 12 is made of a light-transmitting material, such as a transparent material; and its size is smaller than that of the light outlet 13.

[0063] Specifically, the housing 1 can be a rectangular block, including four side surfaces and two end plates 11, and a light outlet 13 and a camera port 12 can be respectively provided on the two opposite side surfaces; an air cooling or liquid cooling pipe can be provided on the end plate 11, and the pipe passes through the inside of the light source to absorb the heat of the light source for cooling.

[0064] The unique optical design of the AOI inspection light source provided in this embodiment is at least reflected in the following aspects: 1) The light emitted by the second light source 22 forms a second light beam after two reflections, and the third light source 23 and the third light-guiding surface 7 are located on the side of the first light-guiding surface 5 away from the second light source 22. This can more fully utilize space while forming a larger total angle, making the optical system more compact.

[0065] 2) The heights of the half-reflecting mirror 3, the second light-guiding surface 6, and the third light-guiding surface 7 relative to the light outlet 13 are successively lowered, and each light beam is formed after surface light is reflected, so that each light beam has distinct layers in distribution; the light-guiding component where the second light-guiding surface 6 is located blocks excess light on both sides of the first light beam, and the light-guiding component where the third light-guiding surface 7 is located blocks excess light on one side of the second light beam, thereby reducing overlap between the light beams and improving the uniformity of light output.

[0066] 3) Each light beam has a large convergent beam angle. When the first light beam, the second light beam, and the third light beam converge in the same focusing area, by adjusting the shape and posture of each optical component, the overall light beam can contain light at any angle within the convergent beam angle range, and the uniformity of the light angle is better.

[0067] Example 2 This embodiment provides an AOI detection system, including a camera 9 and the AOI detection light source as described in Example 1; the camera 9 is located on the side of the half-reflecting half-mirror 3 away from the first light source 21, and the camera 9 is located on the reverse extension line of the main direction of the first light beam.

[0068] The camera 9 is used to obtain the light transmitted from the half-mirror lens 3 to form an image; specifically, the camera 9 faces the camera port 12 .

[0069] Preferably, the device further includes an object 10 , which is located on the main optical path of the first light beam, and the first light beam, the second light beam and the third light beam are all directed towards the object 10 .

[0070] After the first light beam, the second light beam and the third light beam are irradiated onto the object to be inspected 10, part of the light is reflected by the object to be inspected 10 and irradiated onto the half-reflecting half-mirror 3 in the opposite direction to the first light beam. Part of the light irradiated onto the half-reflecting half-mirror 3 is transmitted through the half-reflecting half-mirror 3 and is incident on the photosensitive element on the camera 9 for imaging. Thus, a high-definition image of a local area on the object to be inspected 10 can be obtained. Since the total convergence beam angle of the entire light beam is large, the defect characteristics of the local area on the object to be inspected 10 can be clearly displayed.

[0071] In a preferred embodiment, the AOI detection light source includes a housing 1, and a light outlet 13 and a camera port 12 are respectively provided on two opposite surfaces of the housing 1. The light outlet 13 and the camera port 12 are arranged opposite to each other. The object 10 to be inspected is located outside the light outlet 13 and opposite to the light outlet 13. The camera 9 is located outside the camera port 12 and opposite to the camera port 12. Figure 4 As shown, inside the housing 1, a half-reflecting half-mirror 3 is provided between the light outlet 13 and the camera port 12. The half-reflecting half-mirror 3 is inclined to the line connecting the centers of the light outlet 13 and the camera port 12, and the inclination angle is preferably 45°. A first light source 21 is provided on the left or right side of the half-reflecting half-mirror 3. The light emitted by the first light source 21 is focused by the cylindrical mirror 4 and then emitted onto the half-reflecting half-mirror 3, of which part is reflected by the half-reflecting half-mirror 3 and emitted from the light outlet 13. The light beam reflected by the half-reflecting half-mirror 3 is the above-mentioned first light beam; two groups of second light sources 22 and two groups of third light sources 23 are provided on both sides of the line connecting the centers of the light outlet 13 and the camera port 12, wherein: the second light source 22 and the first light guide surface 5 are respectively connected. The first light guiding surface 5 is cooperated with the second light guiding surface 6, the first light guiding surface 5 is facing upward, the second light guiding surface 6 is facing downward, the light emitted by the second light source 22 is reflected by the first light guiding surface 5 and the second light guiding surface 6 in sequence and then emitted from the light outlet 13, the light beam reflected by the second light guiding surface 6 is the above-mentioned second light beam, and the two groups of second light beams are distributed on both sides of the first light beam; the third light source 23 is cooperated with the third light guiding surface 7, the third light guiding surface 7 is facing the light outlet 13, the third light source 23 is facing upward, the light emitted by the third light source 23 is reflected by the third light guiding surface 7 and then emitted from the light outlet 13, the third light guiding surface 7 is located on the side of the first light guiding surface 5 away from the second light source 22, and the third light guiding surface 7 and the first light guiding surface 5 are located on the same light guiding component.

[0072] For the convenience of description, the "upper" and "lower" in this embodiment refer to Figure 4 In the above and below, in actual use, "above" and "below" are not limited to up and down in space. Depending on the placement method, it can be left and right, front and back, etc.

[0073] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. An AOI inspection light source, characterized in that: include: A first light source (21), wherein part of the light emitted by the first light source is focused by a cylindrical mirror (4) and then obliquely reflected by a half-reflecting half-mirror (3) to form a first light beam; Two groups of second light sources (22) are symmetrically arranged, wherein light emitted by each group of the second light sources (22) is sequentially reflected obliquely by the first light guide surface (5) and the second light guide surface (6) and then converges to form a second light beam, and the two groups of the second light beams are symmetrical with respect to the first light beam; Two groups of third light sources (23) are symmetrically arranged, wherein light emitted by each group of the third light sources (23) is converged to form a third light beam after being obliquely reflected by the third light guide surface (7), the third light beam being located on a side of the second light beam away from the first light beam, and the two groups of the third light beams are symmetrical with respect to the first light beam; The first light beam, the second light beam, and the third light beam converge to the same side, and a total angle of the first light beam, the second light beam, and the third light beam is greater than or equal to 160 degrees.

2. The AOI inspection light source according to claim 1, characterized in that: The third light source (23) and the third light guide surface (7) are located on a side of the first light guide surface (5) away from the second light source (22).

3. The AOI inspection light source according to claim 2, wherein: The third light guide surface (7) and the first light guide surface (5) are arranged on the same light guide component; and / or, The half-reflecting half-mirror (3) has an included angle a with the main direction of the first light beam, where a=45°.

4. The AOI inspection light source according to claim 1, characterized in that: The first light guiding surface (5), the second light guiding surface (6) and the third light guiding surface (7) all extend along a first direction; the projection of the first light guiding surface (5) in the first direction is a straight line; the projections of the second light guiding surface (6) and the third light guiding surface (7) in the first direction are concave curves; The first light beam, the second light beam and the third light beam are all converging light beams extending along the first direction, and the first light beam, the second light beam and the third light beam converge at the same focusing area; The first light source (21), the second light source (22) and the third light source (23) each comprise a plurality of LED lamp beads arranged in sequence along a first direction; a strip-shaped Fresnel lens (8) is provided on the light-emitting side of the LED lamp beads.

5. The AOI inspection light source according to claim 1, characterized in that: The two second light guiding surfaces (6) are symmetrically arranged, and there is a space between the two second light guiding surfaces (6) for the first light beam to pass through; The two third light guiding surfaces (7) are symmetrically arranged, and there is a space between the two third light guiding surfaces (7) for the first light beam and the second light beam to pass through.

6. The AOI inspection light source according to any one of claims 1 to 5, characterized in that: It comprises a housing (1), wherein a light outlet (13) is provided on one side of the housing (1), and the first light beam, the second light beam and the third light beam are all emitted from the light outlet (13).

7. The AOI inspection light source according to claim 6, characterized in that: The height of the half-reflecting half-mirror (3) relative to the light outlet (13) is greater than the height of the second light-guiding surface (6) relative to the light outlet (13); The height of the second light guiding surface (6) relative to the light outlet (13) is greater than the height of the third light guiding surface (7) relative to the light outlet (13).

8. The AOI inspection light source according to claim 6, wherein: A first plate (14) and a second plate (15) flush with each other are provided on one side of the housing (1), and the light outlet (13) is located between the first plate (14) and the second plate (15); one group of the third light sources (23) is provided on the inner wall of the first plate (14), and another group of the third light sources (23) is provided on the inner wall of the second plate (15); and / or, The housing (1) is also provided with a camera port (12), and the camera port (12) is opposite to the light outlet (13).

9. An AOI inspection system, characterized in that: The invention comprises a camera (9) and an AOI detection light source as described in any one of claims 1 to 8; the camera (9) is located on a side of the half-reflecting half-mirror lens (3) facing away from the first light source (21), and the camera (9) is located on the reverse extension line of the main direction of the first light beam.

10. The AOI inspection system according to claim 9, characterized in that: It also includes an object to be inspected (10), the object to be inspected (10) is located on the main light path of the first light beam, and the first light beam, the second light beam and the third light beam are all emitted towards the object to be inspected (10).

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