An integrated high-precision ellipsometry film thickness measurement system

Abstract

The application discloses an integrated high-precision ellipsometric film thickness measuring system and relates to the technical field of film measurement. The application discloses an integrated high-precision ellipsometric film thickness measuring system and relates to the technical field of film measurement. The application discloses an integrated high-precision ellipsometric film thickness measuring system and relates to the technical field of film measurement. The application discloses an integrated high-precision ellipsometric film thickness measuring system and relates to the technical field of film measurement. The application discloses an integrated high-precision ellipsometric film thickness measuring system and relates to the technical field of film measurement. The application discloses an integrated high-precision ellipsometric film thickness measuring system and relates to the technical field of film measurement. The application discloses an integrated high-precision ellipsometric film thickness measuring system and relates to the technical field of film measurement. The application discloses an integrated high-precision ellipsometric film thickness measuring system and relates to the technical field of film measurement. The application discloses an integrated high-precision ellipsometric film thickness measuring system and relates to the technical field of film measurement. The application discloses an integrated high-precision ellipsometric film thickness measuring system and relates to the technical field of film measurement. The application discloses an integrated high-precision ellipsometric film thickness measuring system and relates to the technical field of film measurement. The application discloses an integrated high-precision ellipsometric film thickness measuring system and relates to the technical field of film measurement. The application discloses an integrated high-precision ellipsometric film thickness measuring system and relates to the technical field of film measurement. The application discloses an integrated high-precision ellipsometric film thickness measuring system and relates to the technical field of film measurement. The application discloses an integrated high-precision ellipsometric film thickness measuring system and relates to the technical field of film measurement. The application discloses an integrated high-precision ellipsometric film thickness measuring system and relates to the technical field of film measurement. The application discloses an integrated high-precision ell

Description

TECHNICAL FIELD

[0001] The present application relates to the field of thin film measurement technology, and particularly relates to an integrated high-precision ellipsometric film thickness measurement system. BACKGROUND

[0002] In the modern industrial manufacturing and scientific research fields, such as semiconductor chip manufacturing, optical lens coating, flat panel display production and many other industries, the thickness and optical constants of the thin film play a decisive role in product performance. The high-precision ellipsometric film thickness measurement system has become an essential device for thin film measurement due to its non-contact, non-destructive, high-precision and other characteristics.

[0003] The existing ellipsometric film thickness measurement system has a deviation in the placement position of the measured objects when measuring the thickness of multiple measured objects, which requires correction of the position of each measured object to ensure the consistency of the thickness measurement of the measured object. However, the process of modifying the position of each measured object significantly reduces the efficiency of the thickness measurement of the measured object, and repeated position correction also reduces the accuracy of the position of the measured object, resulting in inaccurate thickness measurement of the measured object. SUMMARY

[0004] To overcome the above technical problems, the purpose of the present application is to provide an integrated high-precision ellipsometric film thickness measurement system to solve the problem of low efficiency of measuring the thickness of the measured object in the prior art when measuring the thickness of multiple measured objects due to the deviation in the placement position of the measured objects, which requires correction of the position of each measured object.

[0005] The purpose of the present application can be achieved by the following technical solutions:

[0006] Specifically, an integrated high-precision ellipsometric film thickness measurement system is provided, which includes a device base, a feeding cabinet and a detection cabinet are arranged on the top of the device base, a feeding mechanism is arranged on the front of the feeding cabinet, a feeding mechanism is arranged inside the feeding cabinet, and a detection mechanism is arranged inside the detection cabinet, wherein the feeding mechanism is used to automatically transfer the measured object between the feeding mechanism and the detection mechanism, and the detection mechanism automatically adjusts the position of the measured object.

[0007] As a further scheme of the present application, the feeding mechanism includes a feeding rack, a feeding table is arranged on the top surface of the feeding rack, positioning mechanisms are arranged on both sides of the feeding table, a linkage lifting seat is arranged at the middle position of the top surface of the feeding table, a material supporting table is arranged at the inner middle position of the linkage lifting seat, when the feeding mechanism takes the sheet material, the positioning mechanisms automatically limit the sheet material on the material supporting table, and the linkage lifting seat automatically transfers the sheet material on the material supporting table into the feeding mechanism, and when the feeding mechanism places the sheet material, the linkage lifting seat automatically transfers the sheet material on the feeding mechanism into the material supporting table.

[0008] As a further scheme of the present application, the positioning mechanism comprises a ball screw, the ball screw is installed on the side of the feeding table through a rotating shaft, a nut seat is nested on the side of the ball screw, and a positioning plate is connected to one side of the nut seat through a spring.

[0009] As a further scheme of the present application, the side of the positioning plate away from the nut seat is an arc surface.

[0010] As a further scheme of the present application, a limiting column is arranged at the middle position of the top surface of the tray.

[0011] As a further scheme of the present application, one end of the ball screw is fixedly connected with a screw gear, the bottom of the screw gear is engaged with a positioning gear, and one side of the positioning gear is engaged with a disengaging gear.

[0012] As a further scheme of the present application, the positioning gear comprises a transmission gear, the bottom surface of the transmission gear is fixedly connected with a first circumscribed gear, the disengaging gear comprises a synchronous gear, the bottom surface of the synchronous gear is fixedly connected with a second circumscribed gear, the top surface of the transmission gear is engaged with the screw gear, the side surface of the transmission gear is engaged with the synchronous gear, and the synchronous gear and the second circumscribed gear have a gap, and the thickness of the gap is greater than the thickness of the first circumscribed gear.

[0013] As a further scheme of the present application, the inside of the linkage lifting seat is provided with a telescopic block, the inner side of one end of the telescopic block is provided with a lifting control ring, and the lifting control ring is nested on the side surface of the material lifting table.

[0014] As a further scheme of the present application, the inner side of one end of the telescopic block is fixedly connected with a rack, the side surface of the rack is engaged with a transmission ratchet, the side surface of the transmission ratchet is engaged with a first clockwork gear, the bottom of the first clockwork gear is provided with a second clockwork gear, and the side surface of the lifting control ring is engaged with the second clockwork gear.

[0015] As a further scheme of the present application, the side of the telescopic block away from the transmission ratchet is fixedly connected with a pushing block, the side of the pushing block is provided with a lock hook, and the side surface of the lifting control ring is provided with an inverted hook groove matched with the lock hook at the position close to the lock hook.

[0016] As a further scheme of the present application, the side surface of the material lifting table is provided with a wave groove, and the inner side of the lifting control ring is connected with a cylindrical protruding part matched with the wave groove at the position close to the wave groove.

[0017] As a further scheme of the present application, the material conveying mechanism comprises a mechanism base, the top surface of the mechanism base is installed with a first rotating arm, the top surface of the first rotating arm is connected with a second rotating arm, the top surface of the second rotating arm is connected with a third rotating arm, and one end of the third rotating arm is fixedly connected with a tray.

[0018] As a further scheme of the present application: the top surface of the tray is provided with an adsorption port, the end of the tray is provided with a gas pressure adjusting groove, the gas pressure adjusting groove is communicated with the adsorption port, the inner side of the gas pressure adjusting groove is connected with a gas pressure piston through a spring, and the top surface of the feeding table is fixedly connected with an extrusion rod corresponding to the position of the gas pressure adjusting groove.

[0019] As a further scheme of the present application: the side surface of the tray is provided with a first tooth groove and a second tooth groove corresponding to the first circumscribed gear and the second circumscribed gear respectively.

[0020] As a further scheme of the present application: the detection mechanism comprises a bottom plate fixed on the inner side of the detection cabinet, a PA positioning mechanism installed on the top surface of the bottom plate, an inspection table installed on the top of the PA positioning mechanism, and a mounting arm fixedly connected on one side of the bottom plate, wherein the top of the mounting arm is installed with an ellipsometer.

[0021] As a further scheme of the present application: the PA positioning mechanism comprises a fixed base, a lifting column arranged on the top of the fixed base, a lifting seat fixedly connected on the top surface of the lifting column, and a moving seat arranged on the top surface of the lifting seat, wherein the bottom surface of the inspection table is slidably connected with the top surface of the moving seat.

[0022] The present application has the following beneficial effects:

[0023] 1. In the present application, the material conveying mechanism can automatically take the measured object from the feeding mechanism and automatically transport the measured object to the detection mechanism. After the detection mechanism completes the measurement operation on the measured object, the material conveying mechanism can automatically transport the measured object on the detection mechanism to the feeding mechanism. In the process of thickness measurement, the measured object is completely automated and does not require manual intervention, which is efficient and accurate and stable.

[0024] 2. In the present application, when the material conveying mechanism takes the measured object from the feeding table, the positioning mechanism first centrally positions the measured object on the material supporting table, so that the measured object is in the central position of the material supporting table. After the positioning mechanism completes the central positioning of the measured object, the positioning mechanism will again be separated from the measured object and the side surface of the measured object, so that the positioning mechanism will not affect the movement of the measured object during the movement of the measured object, thereby ensuring the normal transportation of the measured object. After the positioning mechanism is separated from the measured object, the linkage lifting seat automatically controls the material supporting table to move downward, so that the measured object on the material supporting table is automatically placed on the material conveying mechanism. Since the feeding mechanism can centrally position the measured object each time the material conveying mechanism takes the measured object from the feeding mechanism, the accuracy of the position of the material conveying mechanism in taking the measured object is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0025] The present application will be further described below with reference to the accompanying drawings.

[0026] Figure 1It is a kind of integrated high-precision ellipsometric film thickness measurement system structural schematic diagram of the application;

[0027] Figure 2 It is a kind of integrated high-precision ellipsometric film thickness measurement system internal structure schematic diagram of the application;

[0028] Figure 3 It is a kind of integrated high-precision ellipsometric film thickness measurement system in the structure schematic diagram of feeding mechanism;

[0029] Figure 4 It is a kind of integrated high-precision ellipsometric film thickness measurement system in the structure schematic diagram of feeding table;

[0030] Figure 5 It is a kind of integrated high-precision ellipsometric film thickness measurement system in the shaft drawing of positioning mechanism;

[0031] Figure 6 It is a kind of integrated high-precision ellipsometric film thickness measurement system in the structure schematic diagram of positioning mechanism;

[0032] Figure 7 It is a kind of integrated high-precision ellipsometric film thickness measurement system in the structure schematic diagram of positioning gear and disengaging gear;

[0033] Figure 8 It is a kind of integrated high-precision ellipsometric film thickness measurement system in the internal structure schematic diagram of linkage lifting seat;

[0034] Figure 9 It is a kind of integrated high-precision ellipsometric film thickness measurement system in the structure schematic diagram of telescopic block;

[0035] Figure 10 It is a kind of integrated high-precision ellipsometric film thickness measurement system in the local structure schematic diagram of material supporting table;

[0036] Figure 11 It is a kind of integrated high-precision ellipsometric film thickness measurement system in the cooperation schematic diagram of material conveying mechanism and feeding table;

[0037] Figure 12 It is a kind of integrated high-precision ellipsometric film thickness measurement system in the structure schematic diagram of material conveying mechanism;

[0038] Figure 13 It is a kind of integrated high-precision ellipsometric film thickness measurement system in the structure schematic diagram of tray;

[0039] Figure 14 It is a kind of integrated high-precision ellipsometric film thickness measurement system in the local structure schematic diagram of tray;

[0040] Figure 15It is a structure schematic view of the air pressure adjusting groove in the integrated high-precision ellipsometric film thickness measurement system of the present application.

[0041] Figure 16 It is a structure schematic view of the detection mechanism in the integrated high-precision ellipsometric film thickness measurement system of the present application.

[0042] Figure 17 It is a partial structure schematic view of the tray in the integrated high-precision ellipsometric film thickness measurement system of the present application.

[0043] Figure 18 It is a structure schematic view of the PA positioning mechanism in the integrated high-precision ellipsometric film thickness measurement system of the present application.

[0044] The figure mark explanation: 1, device base; 11, material conveying cabinet; 12, detection cabinet; 2, feeding mechanism; 21, feeding rack; 22, feeding table; 23, positioning mechanism; 231, ball screw; 232, nut seat; 233, positioning plate; 234, screw gear; 235, positioning gear; 2351, transmission gear; 2352, first external gear; 236, disengagement gear; 2361, synchronous gear; 2362, second external gear; 24, linkage lifting seat; 241, telescopic block; 2411, rack; 2412, transmission ratchet; 2413, first clockwork gear; 2414, second clockwork gear; 2415, lock hook; 2416, pushing block; 242, lifting control ring; 2421, cylindrical protrusion; 25, material holding table; 251, wave groove; 26, extrusion rod; 3, material conveying mechanism; 31, mechanism base; 32, first rotating arm; 33, second rotating arm; 34, third rotating arm; 35, tray; 351, adsorption port; 352, extrusion block; 353, air pressure adjusting groove; 354, first tooth groove; 355, second tooth groove; 356, air pressure piston; 357, lock block; 36, limiting column; 4, detection mechanism; 41, bottom plate; 42, PA positioning mechanism; 421, fixed base; 422, lifting column; 423, lifting seat; 424, first motor; 425, moving seat; 426, second motor; 43, inspection table; 44, mounting arm; 45, ellipsometer. DETAILED DESCRIPTION

[0045] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present application.

[0046] As an embodiment of the present application, as Figures 1-9As shown, an integrated high-precision ellipsometric film thickness measurement system is disclosed, comprising a device base 1, the top of which is provided with a material conveying cabinet 11 and a detection cabinet 12, the front of the material conveying cabinet 11 is provided with a feeding mechanism 2, and technicians can place the measurement object to be detected on the feeding mechanism 2, the inside of the material conveying cabinet 11 is provided with a material conveying mechanism 3, which can automatically take the measurement object on the feeding mechanism 2, the inside of the detection cabinet 12 is provided with a detection mechanism 4, which automatically places the measurement object on the detection mechanism 4 after the material conveying mechanism 3 takes the measurement object, and the detection mechanism 4 detects the thickness of the measurement object, specifically the thickness of the photoresist on the surface of the measurement object, after the detection is completed, the material conveying mechanism 3 automatically transfers the measurement object from the detection mechanism 4 to the feeding mechanism 2, realizing automatic detection of the measurement object, the feeding mechanism 2 includes a feeding rack 21, the top surface of the feeding rack 21 is provided with a feeding table 22, the two sides of the feeding table 22 are provided with a positioning mechanism 23, the top surface of the feeding table 22 is provided with a linkage lifting seat 24 at the middle position, and the inside of the linkage lifting seat 24 is provided with a material supporting table 25 at the middle position, when the feeding mechanism 2 takes the sheet material, the positioning mechanism 23 automatically limits the sheet material on the material supporting table 25, and at the same time, the linkage lifting seat 24 automatically transfers the sheet material on the material supporting table 25 into the feeding mechanism 2, when the feeding mechanism 2 places the sheet material, the linkage lifting seat 24 automatically transfers the sheet material on the feeding mechanism 2 into the material supporting table 25, it should be noted that when the material conveying mechanism 3 takes the measurement object from the feeding table 22, the positioning mechanism 23 first centrally positions the measurement object on the material supporting table 25, so that the measurement object is at the central position of the material supporting table 25, after the positioning mechanism 23 completes the central positioning of the measurement object, the positioning mechanism 23 will again be separated from the measurement object and be separated from the side surface of the measurement object, so that the positioning mechanism 23 will not affect the movement of the measurement object during the movement of the measurement object, ensuring the normal transportation of the measurement object, after the positioning mechanism 23 is separated from the measurement object, the linkage lifting seat 24 automatically controls the material supporting table 25 to move downward, so that the measurement object on the material supporting table 25 is automatically placed on the material conveying mechanism 3, so that the measurement object is automatically transferred from the material supporting table 25 to the feeding mechanism 2, when the feeding mechanism 2 places the detected measurement object on the feeding table 22, the linkage lifting seat 24 automatically controls the material supporting table 25 to move upward according to the position of the measurement object, so that the material supporting table 25 can automatically hold the measurement object on the material conveying mechanism 3, so that the measurement object is automatically separated from the material conveying mechanism 3, realizing the automatic transfer of the measurement object on the feeding mechanism 2 into the material supporting table 25, since the feeding mechanism 2 can centrally position the measurement object every time the material conveying mechanism 3 takes the measurement object from the feeding mechanism 2, the accuracy of the position of the measurement object taken by the material conveying mechanism 3 is ensured;

[0047] In addition, it should be noted that, as Figure 3 and Figure 4As shown in the drawings, the bottom surface of the feeding table 22 is provided with an adjusting groove, and the top surface of the feeding frame 21 is provided with an adjusting track corresponding to the adjusting groove. The feeding table 22 can move freely along the track of the adjusting track through the cooperation of the adjusting groove and the adjusting track.

[0048] As shown in the drawings, Figure 1 and Figure 2 When the integrated high-precision ellipsometric film thickness measuring device is used for thickness measurement, the measured object (such as a wafer) can be placed on the feeding mechanism 2. The wafer can be automatically taken from the feeding mechanism 2 by the conveying mechanism 3 and transported to the detection mechanism 4. After the wafer is positioned by the detection mechanism 4, the thickness measurement is performed. When the thickness measurement of the wafer is completed, the wafer on the detection mechanism 4 is automatically transported to the feeding mechanism 2 by the conveying mechanism 3. In the whole process, the transportation and measurement of the wafer are automatically completed without manual intervention, which is efficient. When the conveying mechanism 3 provides the wafer to the detection mechanism 4, the position of the wafer is accurate, which improves the accuracy and stability of the measurement of the detection mechanism 4.

[0049] As an embodiment of the present application, as shown in the drawings, Figures 1-9 The positioning mechanism 23 includes a ball screw 231, which is installed on the side surface of the feeding table 22 through a rotating shaft. The side surface of the ball screw 231 is nested with a nut seat 232. One side of the nut seat 232 is connected with a positioning plate 233 through a spring. It should be noted that a moving groove corresponding to the nut seat 232 is formed on the top surface of the feeding table 22 near the nut seat 232. The ball screw 231 is installed in the moving groove through a bearing. The nut seat 232 can slide freely along the groove wall in the moving groove. Specifically, when the ball screw 231 rotates, the rotating ball screw 231 cooperates with the nut seat 232 to make the nut seat 232 automatically move along the groove wall in the moving groove. The moving nut seat 232 can drive the positioning plate 233 through the spring to press the side surface of the measured object. The skilled person can select the spring to ensure that the positioning plate 233 does not damage the measured object when the spring exerts a force on the side surface of the measured object.

[0050] The side of the positioning plate 233 away from the nut seat 232 is arc-shaped. When the positioning plate 233 presses the side surface of the measured object, it can fit the side surface of the measured object on one hand and adjust the measured object to the middle position of the top surface of the material supporting table 25 on the other hand, achieving the automatic centering adjustment effect of the measured object.

[0051] As an embodiment of the present application, as shown in the drawings, Figure 5 , Figure 6 and Figure 7As shown, a lead screw gear 234 is fixedly connected to one end of the ball screw 231. A positioning gear 235 meshes with the bottom of the lead screw gear 234, and a disengagement gear 236 meshes with one side of the positioning gear 235. It should be noted that the top surface of the positioning gear 235 meshes with the lead screw gear 234, so when the positioning gear 235 rotates clockwise (towards...), the ball screw 231 will rotate clockwise (towards...). Figure 5 When the positioning gear 235 rotates (based on the position of the positioning gear 235), the positioning gear 235 can drive the lead screw gear 234 to rotate. The rotating lead screw gear 234 can drive the ball screw 231 to rotate. The rotating ball screw 231 can automatically move the positioning plate 233 by cooperating with the nut seat 232. The positioning gear 235 has a disengagement gear 236 meshing on one side. Therefore, when the disengagement gear 236 rotates clockwise, it will cause the positioning gear 235 to rotate counterclockwise. The counterclockwise rotation of the positioning gear 235 will drive the lead screw gear 234 to rotate in the opposite direction, which will also cause the ball screw 231 to rotate in the opposite direction. Ultimately, the positioning plate 233 will move in the opposite direction.

[0052] In summary, when the positioning gear 235 rotates clockwise, it will cause the positioning plate 233 to move closer to the material support platform 25, thus centering the measuring object on the material support platform 25. When the disengagement gear 236 rotates clockwise, it will cause the positioning plate 233 to move in the opposite direction, that is, to move away from the material support platform 25, thus disengaging the positioning plate 233 from the measuring object on the material support platform 25.

[0053] As one embodiment of the present invention, such as Figures 1-9 As shown, the positioning gear 235 includes a transmission gear 2351, with a first external gear 2352 fixedly connected to the bottom surface of the transmission gear 2351. The disengagement gear 236 includes a synchronizing gear 2361, with a second external gear 2362 fixedly connected to the bottom surface of the synchronizing gear 2361. The top surface of the transmission gear 2351 meshes with the lead screw gear 234, and the side surface of the transmission gear 2351 meshes with the synchronizing gear 2361. There is a gap between the synchronizing gear 2361 and the second external gear 2362, and the thickness of the gap is greater than the thickness of the first external gear 2352. It should be noted that in order to ensure the thickness of the first external gear 2352, the positioning gear 2351 is positioned as follows: 352 and the second external gear 2362 can drive the transmission gear 2351 and the synchronizing gear 2361 to rotate clockwise, respectively. Both the first external gear 2352 and the second external gear 2362 are ratchet gears. That is, when the first external gear 2352 and the second external gear 2362 rotate clockwise, they can drive the transmission gear 2351 and the synchronizing gear 2361 to rotate clockwise, respectively. When the first external gear 2352 and the second external gear 2362 rotate counterclockwise, they will not drive the transmission gear 2351 and the synchronizing gear 2361.

[0054] When the first external gear 2352 rotates clockwise, the first external gear 2352 drives the transmission gear 2351 to rotate clockwise, and since the top surface of the transmission gear 2351 is in mesh with the screw gear 234, the clockwise rotating transmission gear 2351 drives the screw gear 234 to rotate counterclockwise, that is, the screw gear 234 rotates counterclockwise, and the counterclockwise rotating screw gear 234 drives the nut seat 232 to drive the positioning plate 233 to move to one side of the material supporting table 25 through the cooperation of the nut seat 232;

[0055] When the second external gear 2362 rotates clockwise, the second external gear 2362 drives the synchronous gear 2361 to rotate clockwise, and the clockwise rotating synchronous gear 2361 drives the transmission gear 2351 to rotate counterclockwise, and the counterclockwise rotating transmission gear 2351 drives the screw gear 234 to rotate clockwise, that is, the ball screw 231 rotates clockwise, and the clockwise rotating ball screw 231 drives the nut seat 232 to drive the positioning plate 233 to move away from the material supporting table 25 through the cooperation of the nut seat 232.

[0056] As an embodiment of the present application, as shown in Figure 8 、 Figure 9 and Figure 10 , the inside of the linkage lifting seat 24 is provided with a telescopic block 241, the inner side of the telescopic block 241 is provided with a lifting control ring 242, the lifting control ring 242 is nested on the side surface of the material supporting table 25, and it should be noted that when the telescopic block 241 is extruded by the material conveying mechanism 3, the telescopic block 241 drives the lifting control ring 242 to rotate, and the rotating lifting control ring 242 can control the height of the material supporting table 25, when the material supporting table 25 moves downward, the measured objects on the surface of the material supporting table 25 can be automatically transferred to the material conveying mechanism 3, and when the material supporting table 25 moves upward, the measured objects on the material conveying mechanism 3 can be automatically lifted, so that the measured objects are automatically separated from the material conveying mechanism 3.

[0057] Specifically, as shown in Figure 9As shown, the inner end of the telescopic block 241 is fixedly connected with a rack 2411, the side surface of the rack 2411 engages a transmission ratchet 2412, the side surface of the transmission ratchet 2412 engages a first spring gear 2413, the bottom of the first spring gear 2413 is provided with a second spring gear 2414, the second spring gear 2414 engages the side surface of the lifting control ring 242, the transmission ratchet 2412, the first spring gear 2413 and the second spring gear 2414 are all installed inside the linkage lifting seat 24 through a rotating shaft, the installation position is adaptively adjusted by a person skilled in the art according to the volume of each accessory, the first spring gear 2413 and the second spring gear 2414 are movably connected, the inside of the second spring gear 2414 is provided with a cylindrical groove, and a spring is arranged in the cylindrical groove inside the second spring gear 2414, one end of the spring is fixedly connected with the side wall of the cylindrical groove inside the second spring gear 2414, and the other end of the spring is fixedly connected with the bottom surface of the first spring gear 2413, so that Figure 9 The position of the telescopic block 241 in the linkage lifting seat 24 is the reference, when the telescopic block 241 drives the rack 2411 to move to one side of the first spring gear 2413, the rack 2411 drives the transmission ratchet 2412 to rotate counterclockwise, the counterclockwise rotating transmission ratchet 2412 drives the first spring gear 2413 to rotate clockwise, when the second spring gear 2414 is fixed, the first spring gear 2413 drives the spring inside to convert the rotating force into the deformation force of the spring and store it in the spring, once the second spring gear 2414 is released, the deformation force of the spring is transmitted to the second spring gear 2414 to make the second spring gear 2414 rotate clockwise, when the telescopic block 241 drives the rack 2411 to move away from the first spring gear 2413, since the transmission ratchet 2412 is a ratchet, the transmission ratchet 2412 does not drive the first spring gear 2413.

[0058] As one of the embodiments of the present application, as shown in Figure 8 , Figure 9 and Figure 10As shown, the rack 2411 is fixedly connected with a push block 2416 away from one side of the transmission ratchet 2412, one side of the push block 2416 is provided with a lock hook 2415, the side surface of the lifting control ring 242 is provided with a reverse hook groove matched with the lock hook 2415 at a position close to the lock hook 2415, it should be noted that the lock hook 2415 is provided with a spring, one end of the spring acts on the lock hook 2415, and the other end acts in the inside of the linkage lifting seat 24, when the push block 2416 does not contact the lock hook 2415, the lock hook 2415 cooperates with the reverse hook groove on the side surface of the lifting control ring 242 under the action of the spring force, thereby limiting the rotation of the lifting control ring 242, since the second clockwork gear 2414 is engaged with the side surface of the lifting control ring 242, when the rotation of the lifting control ring 242 is limited, the rotation of the second clockwork gear 2414 is also limited, therefore, in the early stage of the transmission ratchet 2412 driving the first clockwork gear 2413, the second clockwork gear 2414 will not rotate, when the push block 2416 contacts the lock hook 2415, the push block 2416 drives the lock hook 2415 through the lever principle, so that the lock hook 2415 is separated from the reverse hook groove on the side surface of the lifting control ring 242, so that the locking of the lifting control ring 242 is automatically released, that is, the locking of the second clockwork gear 2414 is automatically released, at this time, the clockwork can convert the deformation force into the driving force of the second clockwork gear 2414, so that the second clockwork gear 2414 rotates, and the rotating second clockwork gear 2414 can drive the lifting control ring 242 to rotate, since the push block 2416 is arranged at the tail of the rack 2411, the push block 2416 drives the lock hook 2415 in the later stage of the transmission ratchet 2412 driving the first clockwork gear 2413.

[0059] As an embodiment of the present application, as shown in Figure 8 、 Figure 9 and Figure 10 , the side surface of the material supporting table 25 is provided with a wave groove 251, the inside of the lifting control ring 242 is connected with a cylindrical protruding part 2421 matched with the wave groove 251 at a position close to the wave groove 251, it should be noted that the wave groove 251 is controlled to fluctuate by the skilled person in the art according to the angle of each rotation of the lifting control ring 242, so that the cylindrical protruding part 2421 can be at the highest or lowest position of the wave groove 251 after each rotation of the lifting control ring 242, the bottom end of the material supporting table 25 and the feeding table 22 are connected through an elastic rod, the elastic rod provides upward elastic force for the material supporting table 25 on the one hand, and limits the position of the material supporting table 25 in the horizontal direction on the other hand, so that the material supporting table 25 can move up and down but cannot rotate, the size of the elastic force is adaptively selected according to the material supporting table 25, so that the cylindrical protruding part 2421 can be at the middle position of the wave groove 251 when the material supporting table 25 is not loaded.

[0060] As one embodiment of the present application, as shown in Figures 1-15 The material conveying mechanism 3 comprises a mechanism base 31, a first rotating arm 32 is installed on the top surface of the mechanism base 31, a second rotating arm 33 is connected to the top surface of the first rotating arm 32, a third rotating arm 34 is connected to the top surface of the second rotating arm 33, and a tray 35 is fixedly connected to one end of the third rotating arm 34. It should be noted that the first rotating arm 32 can rotate freely on the top of the mechanism base 31 and move up and down along the vertical direction, and the second rotating arm 33 and the third rotating arm 34 can rotate freely. The mechanism base 31, the first rotating arm 32, the second rotating arm 33, and the third rotating arm 34 are all driven by mechanical arms in the prior art, and thus will not be described here.

[0061] The tray 35 fixedly connected to one end of the third rotating arm 34 is used in cooperation with the feeding table 22. Specifically, the top surface of the tray 35 is provided with a suction port 351, the end of the tray 35 is provided with a gas pressure adjusting groove 353, the gas pressure adjusting groove 353 is in communication with the suction port 351, and the inside of the gas pressure adjusting groove 353 is connected with a gas pressure piston 356 through a spring. The top surface of the feeding table 22 is fixedly connected with a pressing rod 26 corresponding to the position of the gas pressure adjusting groove 353. It should be noted that the air slot formed by the feeding table 22 and the linkage lifting seat 24 is matched with the tray 35. In this way, the tray 35 can cooperate with the feeding table 22. When the tray 35 moves to the inside of the feeding table 22, the pressing rod 26 will be embedded into the gas pressure adjusting groove 353, and with the continuous movement of the tray 35, the pressing rod 26 will push the gas pressure piston 356, so that the gas pressure piston 356 overcomes the elastic force of the spring and squeezes the air inside the gas pressure adjusting groove 353, so that the air inside the gas pressure adjusting groove 353 is discharged through the suction port 351. When the measured object is placed on the suction port 351, the measured object will cover the top surface of the suction port 351. In this way, when the tray 35 moves to the side away from the pressing rod 26 on the top surface of the feeding table 22, the pressing rod 26 will gradually move away from the gas pressure piston 356, and the gas pressure piston 356 will also move in the gas pressure adjusting groove 353 under the action of the elastic force of the spring. In this way, the air pressure inside the suction port 351 is reduced, so that the suction effect of the suction port 351 is automatically generated, so as to ensure that the measured object is stably adsorbed on the tray 35 and the stability of the tray 35 when transporting the measured object is ensured.

[0062] When the tray 35 needs to put the measured object on it back to the feeding table 22, the pressing rod 26 will push the gas pressure piston 356 to make the suction effect of the suction port 351 disappear or weaken, so that the measured object can be separated from the tray 35 when the tray 25 moves upward.

[0063] As one embodiment of the present application, as shown in Figures 1-15As shown, the side of the tray 35 corresponds to the position of the first circumscribed gear 2352 and the second circumscribed gear 2362 respectively First tooth groove 354 and second tooth groove 355 are opened, specifically, when the tray 35 is on the top surface of the feeding table 22, the height of the first tooth groove 354 is consistent with the height of the first circumscribed gear 2352, the height of the second tooth groove 355 is consistent with the height of the second circumscribed gear 2362, and the first tooth groove 354 is opened in front of the second tooth groove 355 (as the basis for the tray 35 moving on the top surface of the feeding table 22 to the direction of the extrusion rod 26), so the first tooth groove 354 first contacts the first circumscribed gear 2352, and drives the first circumscribed gear 2352 to rotate clockwise, when the first circumscribed gear 2352 completes the center positioning of the measured object through cooperation The positioning plate 233, the first tooth groove 354 is separated from the first circumscribed gear 2352, the second tooth groove 355 starts to contact the second circumscribed gear 2362, and drives the second circumscribed gear 2362 to rotate clockwise, the second circumscribed gear 2362 drives the positioning plate 233 away from the measured object through cooperation;

[0064] In this process, the inner side of the tray 35 is also provided with an extrusion block 352, that is, when the positioning mechanism 23 completes the center positioning and disengagement operation of the measured object, the tray 35 will extrude the telescopic block 241 through the extrusion block 352, and after the positioning mechanism 23 completes the disengagement operation, the telescopic block 241 will drive the lock hook 2415 through the push block 2416, so that the lifting control ring 242 can control the material holding table 25 to move downward, it needs to be emphasized that the top surface of the suction port 351 on the tray 35 is higher than the top surface of the material holding table 25 when it is lowered to the lowest position, for example, 2-3mm high, so that the measured object on the top surface of the material holding table 25 can be automatically transferred into the tray 35, realizing the automatic centering of the measured object between the feeding mechanism 2 and the material conveying mechanism 3.

[0065] As an embodiment of the present application, Figures 1-16 As shown, the detection mechanism 4 includes a bottom plate 41 fixed on the inner side of the detection cabinet 12, the top surface of the bottom plate 41 is provided with a PA positioning mechanism 42, the top of the PA positioning mechanism 42 is provided with an inspection table 43, one side of the bottom plate 41 is fixedly connected with a mounting arm 44, the top of the mounting arm 44 is provided with an ellipsometer 45, the tray 35 can transport the measured object to the top surface of the inspection table 43 through the cooperation of the mechanism base 31, the first rotating arm 32, the second rotating arm 33 and the third rotating arm 34, so that the ellipsometer 45 can detect the thickness of the measured object on the inspection table 43, it needs to be noted that, as Figure 17As shown, a lock block 357 is arranged on one side of the tray 35, an inner end of the lock block 357 is provided with a driving lever, the other end of the driving lever is movably connected with a lock tongue, it is to be noted that when the lock block 357 moves to a half length of the tray 35, the lock block 357 can make the lock tongue completely separate from the lock tongue groove arranged on the inner side of the third rotating arm 34 through the driving lever, a self-locking groove which is matched with the tray 35 is arranged on the top surface of the inspection table 43, when the tray 35 moves into the self-locking groove, when the measured object on the tray 35 is just at the center position of the inspection table 43, the lock block 357 will be just embedded into the limiting groove arranged on the side wall of the self-locking groove, the limiting groove can extrude the lock block 357 to a half length of the tray 35, so that the lock tongue completely separates from the lock tongue groove arranged on the inner side of the third rotating arm 34, so that the third rotating arm 34 can be separated from the tray 35, and the self-locking groove can limit the horizontal position of the tray 35 through the cooperation of the limiting groove and the lock block 357, so that the tray 35 is stabilized in the self-locking groove, so that the ellipsometer 45 can be used to perform the thickness measurement operation on the measured object adsorbed on the tray 35, when the thickness measurement operation of the measured object is completed, the third rotating arm 34 can be controlled to cooperate with the tray 35, and then the height of the inspection table 43 is lowered through the PA positioning mechanism 42, so that the limiting groove automatically separates from the lock block 357, the lock block 357 makes the lock tongue re-embedded into the lock tongue groove arranged in the third rotating arm 34 under the action of the spring force, so that the locking of the third rotating arm 34 and the tray 35 is completed, so that the tray 35 can transport the measured object to the position of the feeding rack 21 again, it is to be noted that the PA positioning mechanism 42 can adjust the height of the inspection table 43, the horizontal position movement and the horizontal angle of the inspection table 43, the driving mechanism is adaptively selected by the person skilled in the art according to the space size of the detection cabinet 12, for example, the height adjustment adopts a hydraulic push rod, the horizontal adjustment is composed of two groups of ninety-degree screw-nut driving mechanisms.

[0066] As one embodiment of the present application, as Figure 4 、 Figure 5 、 Figure 13 and Figure 14As shown, the middle position of the top surface of the tray 35 is provided with a limiting column 36, it should be noted that the limiting column 36 can be fixed on the top surface of the tray 35, or can be movably arranged on the top surface of the tray 35, when the measured object is a wafer, the two arc-shaped positioning plates 233 can realize the center positioning of the wafer, that is, the deviation correction of the wafer, when the measured object is a square piece, the limiting column 36 and the two positioning plates 233 can cooperate to realize the center positioning of the square piece, and realize the deviation correction of the square piece, specifically, when the two positioning plates 233 realize the horizontal positioning of the square piece, the limiting column 36 can realize the vertical positioning of the square piece when contacting the square piece, so as to realize the deviation correction of the square piece, and the position of the limiting column 36 can be adjusted according to the size of the square piece, specifically, a group of longitudinal screw holes can be formed on the top surface of the tray 35, and the position of the limiting column 36 on the top surface of the tray 35 can be adjusted according to the size of the square piece, or a hydraulic push rod (not shown in the drawing) can be arranged at the end of the third rotating arm 34, the output end of the hydraulic push rod is fixedly connected with the side surface of the limiting column 36, so that the position of the limiting column 36 on the top surface of the tray 35 can be controlled through the hydraulic push rod;

[0067] As shown in Figure 16 and Figure 18 , the PA positioning mechanism 42 comprises a fixed base 421, and the top of the fixed base 421 is provided with a lifting column 422, and the top surface of the lifting column 422 is fixedly connected with a lifting seat 423, and the top surface of the lifting seat 423 is provided with a moving seat 425, and the bottom surface of the inspection table 43 is slidably connected with the top surface of the moving seat 425, it should be noted that the top surface of the lifting seat 423 is fixedly connected with a first motor 424 at one end, the output shaft of the first motor 424 is connected with a lead screw through a shaft coupling, and the lead screw is installed on the top surface of the lifting seat 423 through a bearing, and the bottom surface of the moving seat 425 is fixedly connected with a nut matched with the lead screw at a position close to the lead screw, and the cross-sectional shape of the screw groove of the nut is trapezoidal, when the first motor 424 is turned on, the output shaft of the first motor 424 can drive the lead screw to rotate, and the rotating lead screw can drive the nut on the bottom surface of the moving seat 425, so that the moving seat 425 can freely move along the axis direction of the lead screw on the top surface of the lifting seat 423 (taking the lifting seat 423 in Figure 18 as the reference, that is, to realize the movement of the moving seat 425 along the X-axis direction), and the top surface of the moving seat 425 is fixedly connected with a second motor 426 at one end, the output shaft of the second motor 426 is also connected with a lead screw through a shaft coupling, and the bottom surface of the inspection table 43 is also fixedly connected with a bearing matched with the lead screw at a position close to the lead screw, when the second motor 426 is turned on, the output shaft of the second motor 426 can drive the nut on the bottom surface of the inspection table 43 through the lead screw, so that the inspection table 43 can freely move along the axis direction of the lead screw on the top surface of the moving seat 425 (taking the lifting seat 423 in Figure 18The lifting seat 423 in the fixed base 421 is a reference, that is, to realize the movement of the inspection table 43 along the Y-axis direction, and a hydraulic rod is arranged between the fixed base 421 and the lifting column 422, which is used to control the height of the lifting column 422, that is, to realize the movement of the lifting seat 423 along the Z-axis direction. In summary, the inspection table 43 can drive the measured object to move along the X-axis, Y-axis and Z-axis directions, realize the arbitrary adjustment of the position of the measured object, thereby ensuring the high-precision measurement of the measured object by the ellipsometer 45, and ensuring the thickness measurement accuracy of the measured object.

[0068] In addition, it should be noted that the PA positioning mechanism can also be provided with a CCD visual positioning module, and an industrial camera is arranged in the CCD visual positioning module. The CCD visual positioning module enhances the image of the measured object on the inspection table 43, such as gray scale transformation, filtering, denoising, edge enhancement, etc., extracts the feature points after image enhancement, and then uses morphological operation, edge detection, contour extraction, template matching, Hough transformation and other algorithms to identify the feature points. An XYZ three-axis stereoscopic coordinate system is established based on the inspection table 43, the coordinate information of the feature points is obtained through the stereoscopic coordinate system, and then the position of the measured object on the inspection table 43 is calibrated based on the coordinate information. Specifically, the position of the inspection table 43 is controlled through the lifting column 422, the lifting seat 423 and the moving seat 425, so as to realize the adjustment of the position of the measured object on the inspection table 43, thereby ensuring the accuracy of the position of the measured object.

[0069] The above describes one embodiment of the present application in detail, but the above description is only a preferred embodiment of the present application and cannot be considered as limiting the scope of the present application. Any equivalent changes and improvements made according to the scope of the present application should still belong to the scope of the present application.

Claims

1. An integrated high-precision ellipsometry film thickness measurement system, characterized in that, The utility model relates to a kind of automatic sheet material detection device, including: Device base, its top is provided with material conveying cabinet and detection cabinet; Feeding mechanism, which is arranged on the front side of the material conveying cabinet; Material conveying mechanism, which is arranged inside the material conveying cabinet; Detection mechanism, which is arranged inside the detection cabinet; Wherein, the material conveying mechanism is used for automatically transporting sheet material between the feeding mechanism and the detection mechanism, and the feeding mechanism automatically adjusts the position of the sheet material; The feeding mechanism includes a feeding rack, and the top surface of the feeding rack is provided with a feeding table. The feeding table is provided with a positioning mechanism on both sides. The top surface of the feeding table is provided with a linkage lifting seat in the middle position. The inner side of the linkage lifting seat is provided with a material supporting table in the middle position. The positioning mechanism is used for centrally positioning the sheet material on the material supporting table. The positioning mechanism includes a ball screw, which is installed on the side surface of the feeding table through a rotating shaft. The side surface of the ball screw is nested with a nut seat. One side of the nut seat is connected with a positioning plate through a spring. One end of the ball screw is fixedly connected with a screw gear. The bottom of the screw gear is engaged with a positioning gear. One side of the positioning gear is engaged with a disengagement gear. The positioning gear includes a transmission gear, and the bottom surface of the transmission gear is fixedly connected with a first external gear. The disengagement gear includes a synchronous gear, and the bottom surface of the synchronous gear is fixedly connected with a second external gear. The top surface of the transmission gear is engaged with the screw gear, and the side surface of the transmission gear is engaged with the synchronous gear. The first external gear and the second external gear are both ratchets. When the first external gear rotates clockwise, it drives the transmission gear to rotate clockwise, and drives the screw gear to rotate counterclockwise. When the second external gear rotates clockwise, it drives the synchronous gear to rotate clockwise, and drives the screw gear to rotate clockwise. When the first external gear and the second external gear rotate counterclockwise, they will not drive the transmission gear and the synchronous gear. The material conveying mechanism includes a tray. First and second tooth grooves are respectively formed in the positions corresponding to the first and second external gears on the side surface of the tray. When the tray is on the top surface of the feeding table, the height of the first tooth groove is consistent with the height of the first external gear, and the height of the second tooth groove is consistent with the height of the second external gear. The first tooth groove is formed in front of the second tooth groove. The first tooth groove first contacts the first external gear, drives the first external gear to rotate clockwise, and makes the positioning plate move to one side of the material supporting table. After the sheet material is centrally positioned, the first tooth groove is disengaged from the first external gear, and the second tooth groove contacts the second external gear, drives the second external gear to rotate clockwise, and makes the positioning plate move away from the sheet material.

2. The integrated high-precision ellipsometry film thickness measurement system according to claim 1, wherein, The material conveying mechanism includes a mechanism base, and a first rotating arm is installed on the top surface of the mechanism base. The top surface of the first rotating arm is connected with a second rotating arm. The top surface of the second rotating arm is connected with a third rotating arm. One end of the third rotating arm is fixedly connected with the tray.

3. The integrated high-precision ellipsometry film thickness measurement system according to claim 1, wherein, The detection mechanism includes a bottom plate, which is fixedly connected to the inner side of the detection cabinet. A PA positioning mechanism is installed on the top surface of the bottom plate. An inspection table is installed on the top of the PA positioning mechanism. An installation arm is fixedly connected to one side of the bottom plate. An ellipsometer is installed on the top of the installation arm. The PA positioning mechanism includes a fixed base. A lifting column is arranged on the top of the fixed base. A lifting seat is fixedly connected to the top surface of the lifting column. A moving seat is arranged on the top surface of the lifting seat. The bottom surface of the inspection table is slidably connected to the top surface of the moving seat.

4. The integrated high-precision ellipsometry film thickness measurement system according to claim 1, wherein, The arc-shaped surface is located on the side of the positioning plate away from the nut seat.

5. The integrated high-precision ellipsometry film thickness measurement system according to claim 1, wherein, The tray is provided with a limiting column in the middle of the top surface.

6. The integrated high-precision ellipsometry film thickness measurement system according to claim 1, wherein, When the material conveying mechanism takes the sheet material, the positioning mechanism automatically limits the sheet material on the material supporting table, and simultaneously links the lifting seat to make the sheet material on the material supporting table automatically transfer into the material conveying mechanism; when the material conveying mechanism places the sheet material, the lifting seat is linked to make the sheet material on the material conveying mechanism automatically transfer into the material supporting table; the inside of the lifting seat is provided with a telescopic block, the inside of the telescopic block is provided with a lifting control ring at one end, the lifting control ring is nested on the side surface of the material supporting table, the inside of the telescopic block is fixedly connected with a rack at one end, the side surface of the rack is engaged with a transmission ratchet wheel, the side surface of the transmission ratchet wheel is engaged with a first clockwork gear, the bottom of the first clockwork gear is provided with a second clockwork gear, the second clockwork gear is engaged with the side surface of the lifting control ring, the side tail of the rack away from the transmission ratchet wheel is fixedly connected with a pushing block, the side of the pushing block is provided with a lock hook, the side surface of the lifting control ring is provided with an inverted hook groove matched with the lock hook at the position close to the lock hook, a spring is arranged on the lock hook, one end of the spring acts on the lock hook, and the other end acts on the inside of the lifting seat; when the pushing block does not contact the lock hook, the lock hook is matched with the inverted hook groove in the side surface of the lifting control ring under the action of the spring force, so as to limit the rotation of the lifting control ring; when the pushing block contacts the lock hook, the locking of the lifting control ring is released, the locking of the second clockwork gear is released, at this time, the clockwork converts the deformation force into the power for driving the second clockwork gear, so that the second clockwork gear rotates, the lifting control ring rotates, the side surface of the material supporting table is provided with a wave groove, the inside of the lifting control ring is connected with a cylindrical protruding part matched with the wave groove at the position close to the wave groove, and the bottom end of the material supporting table and the feeding table are connected through an elastic rod; the elastic rod provides upward elastic force for the material supporting table, and limits the horizontal position of the material supporting table, so that the material supporting table moves up and down but cannot rotate.

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