Lifting type graphite heater for direct single crystal furnace

By designing a simplified lifting graphite heater structure, the furnace body is lifted and lowered by fixed substrates, drive motors and traction screws, solving the problems of inconvenience in control and high failure rates in the prior art, and improving the durability and operation of the equipment Convenience.

CN222119467UActive Publication Date: 2024-12-06LIAOCHENG QIYUAN MASCH EQUIP CO LTD
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Patent Information

Application Number
CN202420065990.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-01-11
Publication Date
2024-12-06
Estimated Expiration
2034-01-11

AI Technical Summary

Technical Problem

The existing lifting graphite heaters for direct single crystal furnaces are inconvenient to control during use, have a high failure rate, and there are too many overall working originals.

Method used

A lifting graphite heater including a fixed substrate, a bearing base, a driving motor, a traction screw, a U-shaped seat, a fixed box and a limit slide chute is designed. The driving motor and a heating box are controlled by an electrical signal, and the traction screw is used. The block and limit chute realize the lifting and lowering of the furnace body, and the overall material is a high-temperature resistant material to improve durability.

Benefits of technology

The control process of graphite heater is simplified, the failure rate is reduced, the convenience and durability of operation are improved, and the requirements of high temperature environment are met.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of a lifting type graphite heater for a direct single crystal furnace, and discloses a lifting type graphite heater for a direct single crystal furnace, which comprises a fixed base plate, the top of the fixed base plate is fixedly connected with a bearing base, and a driving motor is fixedly arranged on the inner wall of the bearing base; a control panel is fixedly mounted at the right end of the bearing base, is connected to the driving motor and the heating box body through electric signals, and is used for controlling the connected driving motor and heating box body; a fixed box body is fixedly connected to the bottom of the inner wall of the moving U-shaped seat, a cabinet door is hinged to the front face of the connected fixed box body, a fixed handle is fixedly connected to the front face of the cabinet door, and a furnace body is fixedly installed at the bottom of the inner wall of the fixed box body; the communicating pipe arranged on the top of the furnace body in a communicating mode is arranged on the back face of the heating box body in a communicating mode for heating, and the whole furnace is made of high-temperature-resistant materials and used for meeting the high-temperature-resistant characteristic to achieve certain durability.
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Description

Technical Field

[0001] The utility model relates to the technical field of a lifting type graphite heater for a direct single crystal furnace, in particular to a lifting type graphite heater for a direct single crystal furnace. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows dislocation-free single crystals using the Czochralski method.

[0003] Disclosed is a lifting graphite heater for a direct single crystal furnace, with the publication number of CN212771044U. The beneficial effects are as follows: by cooperating with four first multi-stage hydraulic cylinders, two forward and reverse motors, two connecting shafts, two pairs of connecting blocks, three slide groove columns, three sliders, three support rods, two gears, two racks and a mounting plate, it is convenient to control the working height of the graphite heater; the two connecting shafts, two pairs of connecting blocks, three slide groove columns, three sliders, three support rods, two gears, two racks and the mounting plate are all made of high-temperature resistant materials to meet the high-temperature resistance characteristics to achieve a certain durability; by cooperating with the first multi-stage hydraulic cylinder control switch, the forward and reverse motor and the second multi-stage hydraulic cylinder control switch, the graphite heating cylinder control switch and the steering gear control switch on the switch panel, it is convenient for staff to avoid direct operation by hand, thereby improving the practicality of the graphite heater.

[0004] The lifting graphite heater for direct single crystal furnace is matched with four first multi-stage hydraulic cylinders, two forward and reverse motors, two connecting shafts, two pairs of connecting blocks, three slide columns, three sliders, three support rods, two gears, two racks and a mounting plate, so that the working height of the graphite heater can be controlled easily. However, the device has too many working parts as a whole, which makes it inconvenient to control during use and has a high failure rate. Based on this, a lifting graphite heater for direct single crystal furnace is proposed. Utility Model Content

[0005] The purpose of the utility model is to provide a lifting graphite heater for a direct single crystal furnace, which solves the problems described in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a lifting graphite heater for a direct single crystal furnace, comprising a fixed base, the top of the fixed base is fixedly connected to a receiving base, the inner wall of the receiving base is fixedly installed with a driving motor, the output end of the driving motor is fixedly connected to a driving screw, the outer wall of the driving screw is threadedly connected to a traction screw block, the inner side of the traction screw block is fixedly connected to a U-shaped seat, the bottom of the inner wall of the U-shaped seat is fixedly connected to a fixed box, the top of the fixed box is connected to a connecting pipe, and the other end of the connecting pipe is connected to a heating box.

[0007] Preferably, a control panel is fixedly mounted on the right end of the receiving base, and electrical signals are connected to the driving motor and the heating box.

[0008] Preferably, the inner wall of the receiving base is provided with a limiting slide groove, the driving motor is fixedly mounted on the inner wall of the limiting slide groove, and the traction screw block is slidably connected to the inner wall of the limiting slide groove.

[0009] Preferably, the heating box is fixedly mounted on the bottom of the inner wall of the receiving base.

[0010] Preferably, a cabinet door is hinged on the front of the fixed box body, and a fixed handle is fixedly connected to the front of the cabinet door.

[0011] Preferably, a feed pipe is provided at the left end of the fixed box body, a cover plate is hinged on the top of the feed pipe, and a furnace body is provided at the right end of the feed pipe.

[0012] Preferably, the furnace body is fixedly installed at the bottom of the inner wall of the fixed box, and the connecting pipe is connected to the top of the furnace body.

[0013] The utility model provides a lifting type graphite heater for a direct single crystal furnace. The lifting type graphite heater for a direct single crystal furnace has the following beneficial effects:

[0014] 1. The lifting graphite heater for direct single crystal furnace is fixedly installed on the right end of the receiving base with a control panel, which is connected to the drive motor and the heating box through electrical signals to control the connected drive motor and the heating box; the U-shaped seat fixedly connected to the inner side of the traction screw block moves accordingly, and the bottom of the inner wall of the movable U-shaped seat is fixedly connected to a fixed box, a cabinet door is hinged on the front of the connected fixed box, a fixed handle is fixedly connected to the front of the cabinet door, a furnace body is fixedly installed on the bottom of the inner wall of the fixed box, and a connecting pipe arranged on the top of the furnace body is connected to the back of the heating box for heating, and the overall material is made of high-temperature resistant material to meet the high-temperature resistance characteristics to achieve a certain durability.

[0015] 2. The lifting graphite heater for the direct single crystal furnace has a receiving base fixedly connected to the top of the connected fixed base plate, a limiting slide groove is provided on the inner wall of the receiving base, a driving motor is fixedly installed at the bottom of the limiting slide groove, and a driving screw fixedly connected to the output end of the driving motor rotates, driving the traction screw block threadedly connected to the outer wall to move, and the movable traction screw block slides on the inner wall of the limiting slide groove on the inner side of the receiving base, so as to facilitate the lifting and lowering of the entire furnace body according to needs. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional schematic diagram of the structure of the utility model;

[0017] Figure 2It is a schematic diagram of the back side of the structure of the utility model;

[0018] Figure 3 It is a schematic diagram of the local structure of the utility model;

[0019] Figure 4 It is a schematic diagram of the oblique side of the structure of the utility model.

[0020] In the figure: 1. fixed base plate; 2. receiving base; 3. control panel; 4. driving motor; 5. driving screw; 6. traction screw block; 7. U-shaped seat; 8. fixed box body; 9. cabinet door; 10. fixed handle; 11. connecting pipe; 12. heating box body; 13. feeding pipe; 14. cover plate; 15. furnace body. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] Example:

[0023] The utility model provides a lifting type graphite heater for a direct single crystal furnace. Figures 1 to 4 As shown: a lifting graphite heater for a direct single crystal furnace, comprising a fixed substrate 1, a receiving base 2 is fixedly connected to the top of the fixed substrate 1, a driving motor 4 is fixedly installed on the inner wall of the receiving base 2, a driving screw 5 is fixedly connected to the output end of the driving motor 4, a traction screw block 6 is threadedly connected to the outer wall of the driving screw 5, a U-shaped seat 7 is fixedly connected to the inner side of the traction screw block 6, a fixed box 8 is fixedly connected to the bottom of the inner wall of the U-shaped seat 7, a connecting pipe 11 is connected to the top of the fixed box 8, and the other end of the connecting pipe 11 is connected to a heating box 12; a control panel 3 is fixedly installed on the right end of the receiving base 2, and an electrical signal is connected to the driving The driving motor 4 and the heating box body 12 are provided; a limiting slide groove is provided on the inner wall of the receiving base 2, the driving motor 4 is fixedly installed on the inner wall of the limiting slide groove, and the traction screw block 6 is slidably connected to the inner wall of the limiting slide groove; the heating box body 12 is fixedly installed at the bottom of the inner wall of the receiving base 2; a cabinet door 9 is hinged on the front of the fixed box body 8, and a fixed handle 10 is fixedly connected to the front of the cabinet door 9; a feed pipe 13 is connected to the left end of the fixed box body 8, a cover plate 14 is hinged on the top of the feed pipe 13, and a furnace body 15 is connected to the right side of the feed pipe 13; the furnace body 15 is fixedly installed at the bottom of the inner wall of the fixed box body 8, and a connecting pipe 11 is connected to the top of the furnace body 15.

[0024] A receiving base 2 is fixedly connected to the top of the connected fixed base plate 1, a limited sliding groove is provided on the inner wall of the receiving base 2, a driving motor 4 is fixedly installed at the bottom of the limited sliding groove, a driving screw 5 fixedly connected to the output end of the driving motor 4 rotates, and drives a traction screw block 6 threadedly connected to the outer wall to move, and the movable traction screw block 6 slides on the inner wall of the limited sliding groove inside the receiving base 2, a heating box 12 is fixedly installed at the bottom of the inner wall of the receiving base 2, and a control panel 3 is fixedly installed at the right end of the receiving base 2, which is connected to the driving motor 4 and the heating box 12 through electrical signals, so as to control the connected The driving motor 4 and the heating box 12 are controlled; the U-shaped seat 7 fixedly connected to the inner side of the traction screw block 6 moves accordingly, and the bottom of the inner wall of the movable U-shaped seat 7 is fixedly connected to a fixed box 8, a cabinet door 9 is hinged on the front of the connected fixed box 8, a fixed handle 10 is fixedly connected to the front of the cabinet door 9, a furnace body 15 is fixedly installed on the bottom of the inner wall of the fixed box 8, and a connecting pipe 11 arranged on the top of the furnace body 15 is connected to the back of the heating box 12 for heating use, and the overall material is made of high-temperature resistant material to meet the high-temperature resistant characteristics to achieve a certain durability.

[0025] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0026] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A lifting graphite heater for a direct single crystal furnace, comprising a fixed substrate (1), Features: The top of the fixed base plate (1) is fixedly connected to a receiving base (2); the inner wall of the receiving base (2) is fixedly mounted with a driving motor (4); the output end of the driving motor (4) is fixedly connected to a driving screw rod (5); the outer wall of the driving screw rod (5) is threadedly connected to a traction screw block (6); the inner side of the traction screw block (6) is fixedly connected to a U-shaped seat (7); the bottom of the inner wall of the U-shaped seat (7) is fixedly connected to a fixed box body (8); the top of the fixed box body (8) is connected to a connecting pipe (11); the other end of the connecting pipe (11) is connected to a heating box body (12).

2. A lifting graphite heater for a direct single crystal furnace according to claim 1, Features: A control panel (3) is fixedly mounted on the right end of the receiving base (2), and an electrical signal is connected to the driving motor (4) and the heating box (12).

3. The lifting graphite heater for direct single crystal furnace according to claim 1, Features: The inner wall of the receiving base (2) is provided with a limiting slide groove, the driving motor (4) is fixedly mounted on the inner wall of the limiting slide groove, and the traction screw block (6) is slidably connected to the inner wall of the limiting slide groove.

4. The lifting graphite heater for direct single crystal furnace according to claim 1, Features: The heating box (12) is fixedly mounted on the bottom of the inner wall of the receiving base (2).

5. The lifting graphite heater for direct single crystal furnace according to claim 1, Features: The front of the fixed box body (8) is hinged with a cabinet door (9), and the front of the cabinet door (9) is fixedly connected with a fixed handle (10).

6. The lifting graphite heater for direct single crystal furnace according to claim 1, Features: The left end of the fixed box (8) is connected to a feed pipe (13), the top of the feed pipe (13) is hinged with a cover plate (14), and the right side of the feed pipe (13) is connected to a furnace body (15).

7. The lifting graphite heater for direct single crystal furnace according to claim 6, Features: The furnace body (15) is fixedly mounted on the bottom of the inner wall of the fixed box body (8), and the connecting pipe (11) is connected and arranged on the top of the furnace body (15).