Linear motor module and semiconductor packaging device
The linear motor module's innovative arrangement of second linear motors with their thickness parallel to the first direction reduces space occupation, enabling miniaturization and efficient operation of semiconductor packaging devices.
Patent Information
- Application Number
- CN202420746176.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-11
- Publication Date
- 2024-12-06
- Estimated Expiration
- 2034-04-11
AI Technical Summary
Traditional linear motor modules occupy large spaces and complicate installation and maintenance due to their structural design, hindering the miniaturization and efficiency of semiconductor packaging devices.
A linear motor module design where the second linear motors are arranged with their thickness direction parallel to the first direction, reducing their space occupation, and multiple movers drive these motors to adjust their positions, facilitating compact design and efficient operation.
The compact design reduces the overall space required by the semiconductor packaging device, enhances space utilization, and improves working efficiency by allowing multiple loads to be driven simultaneously.
Smart Images
Figure CN222127877U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of linear motors, in particular to a linear motor module and a semiconductor packaging device. Background Art
[0002] With the rapid development of modern semiconductor technology, semiconductor packaging technology has put forward higher and higher requirements for the precision and efficiency of production equipment. In the semiconductor packaging process, important processes such as wafer bonding, cutting, bonding, plastic sealing, and dispensing all require the use of high-precision linear motor modules for operation. The linear motor module includes a first linear motor and a second linear motor arranged on the first linear motor. In the existing linear motor module, the width direction of the second linear motor is parallel to the first direction. Due to its large width, it occupies a large space, which increases the space occupied by the linear motor module, and may also increase the difficulty of installation and inconvenience of maintenance of the linear motor module. Utility Model Content
[0003] The main purpose of the utility model is to provide a linear motor module, aiming to reduce the volume of the linear motor module so as to reduce the occupied space of the linear motor module.
[0004] To achieve the above purpose, the linear motor module proposed in the utility model includes:
[0005] A first linear motor comprises a first stator and a movable member disposed on the first stator, wherein the movable member comprises a plurality of first movers and a plurality of mounting seats, wherein one mounting seat is correspondingly disposed on one first mover, and the plurality of first movers move relative to the first stator along a first direction and are sequentially arranged along the first direction; and
[0006] There are multiple second linear motors, one of which is correspondingly arranged on one of the mounting seats, and the thickness direction of the second linear motor is arranged in parallel with the first direction.
[0007] Optionally, in the width direction of the second linear motor, one side of the second linear motor is arranged on the mounting seat, and one second linear motor is correspondingly arranged on one mounting seat.
[0008] Optionally, in the length direction of the second linear motor, a same end of a plurality of the second linear motors is provided with a mounting position.
[0009] Optionally, the first stator is provided with two first guide rails arranged in parallel, the first mover is arranged between the two first guide rails, and the mounting seat is slidably connected to the two first guide rails.
[0010] Optionally, there are multiple movable parts.
[0011] Optionally, the plurality of movable parts include a first movable part and a second movable part, the mounting seat of the first movable part is configured as a first mounting seat, the mounting seat of the second movable part is configured as a second mounting seat, and the first mounting seat and the second mounting seat are alternately arranged in the first direction.
[0012] Optionally, a side of the mounting seat close to the corresponding first mover is provided with an avoidance channel extending along the first direction, and the avoidance channel of one movable member is used to avoid the first mover of another movable member.
[0013] Optionally, in the first direction, two ends of the first mover respectively exceed opposite sides of the mounting seat.
[0014] Optionally, the first stator further includes two magnetic rails arranged in parallel, and a plurality of the first movers are provided on one side of the two magnetic rails close to the second linear motor.
[0015] The utility model also provides a semiconductor packaging device, comprising the aforementioned linear motor module.
[0016] In the technical solution of the utility model, a linear motor module is applied to a semiconductor packaging device, and a plurality of first movers move along a first direction to drive a plurality of second linear motors to move in the first direction, thereby realizing position adjustment of the plurality of second linear motors in the first direction. The thickness direction of the second linear motor is arranged in parallel with the first direction, which greatly saves the layout space of the second linear motor in the first direction, reduces the space occupied by the second linear motor, and thus reduces the overall space occupied by the semiconductor packaging device, which is beneficial to the miniaturization and integrated design of the semiconductor packaging device, and is also beneficial to improving the space utilization of the semiconductor packaging device. At the same time, a plurality of second linear motors are arranged for installation of a plurality of loads, and a plurality of second linear motors are arranged to drive a plurality of loads to work, thereby improving the working efficiency of the semiconductor packaging device. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.
[0018] Figure 1 This is a structural schematic diagram of an embodiment of the linear motor module of the utility model;
[0019] Figure 2 This is a schematic diagram of the structure of the first linear motor of the utility model;
[0020] Figure 3 This is a schematic diagram of the structure of the second linear motor of the utility model;
[0021] Figure 4 It is a structural schematic diagram of an embodiment of a semiconductor packaging device of the present invention.
[0022] Explanation of the accompanying drawings: 100, first linear motor; 110, first stator; 111, first guide rail; 112, magnetic rail; 120, first mover; 130, mounting seat; 131, first mounting seat; 132, second mounting seat; 133, avoidance channel; 200, second linear motor; 210, second stator; 220, second mover; 230, mounting position; 300, load.
[0023] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION
[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0025] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.
[0026] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the utility model.
[0027] With the rapid development of modern semiconductor technology, semiconductor packaging technology has put forward higher and higher requirements for the precision and efficiency of production equipment. In the semiconductor packaging process, important processes such as wafer bonding, cutting, bonding, plastic sealing, and dispensing all require the use of high-precision linear motor modules for operation. Although traditional linear motor modules can meet certain precision and dynamic performance requirements, they are limited by structural design and production processes. The volume and size of linear motor modules are often large, which increases the space occupied by the linear motor module and may also increase the difficulty of installation and inconvenience of maintenance of the linear motor module. To this end, the utility model proposes a linear motor module, which aims to reduce the volume of the linear motor module to reduce the space occupied by the linear motor module.
[0028] Reference Figures 1 to 4 In the technical solution of the utility model, a linear motor module is applied to a semiconductor packaging device, and the linear motor module includes a first linear motor 100 and a second linear motor 200. The first linear motor 100 includes a first stator 110 and a movable part arranged on the first stator 110. The movable part includes a plurality of first movers 120 and a plurality of mounting seats 130. A mounting seat 130 is correspondingly arranged on a first mover 120. The plurality of first movers 120 move relative to the first stator 110 along a first direction and are arranged in sequence along the first direction. The second linear motor 200 is provided with a plurality of second linear motors 200, and a second linear motor 200 is correspondingly arranged on a mounting seat 130. The thickness direction of the second linear motor 200 is arranged in parallel with the first direction. In this way, the plurality of first movers 120 move along the first direction to drive the plurality of second linear motors 200 to move in the first direction, so as to adjust the positions of the plurality of second linear motors 200 in the first direction. The thickness direction of the second linear motor 200 is arranged in parallel with the first direction. Since the size of the second linear motor 200 in the thickness direction is small, the space occupied by the second linear motor 200 on the mounting seat 130 is reduced, which greatly saves the layout space of the second linear motor 200 in the first direction, thereby reducing the overall space occupied by the semiconductor packaging device, which is conducive to the miniaturization and integrated design of the semiconductor packaging device, and is also conducive to improving the space utilization of the semiconductor packaging device. At the same time, multiple second linear motors 200 are arranged for the installation of multiple loads 300, and multiple second linear motors 200 are arranged to drive multiple loads 300 to work, which improves the working efficiency of the semiconductor packaging device. It is worth mentioning that the load 300 mentioned in this article can be a dispensing device, a feeding device or other structures.
[0029] Optionally, in one embodiment, in the width direction of the second linear motor 200, one side of the second linear motor 200 is disposed on the mounting seat 130, and one second linear motor 200 is correspondingly disposed on one mounting seat 130. In this way, in the width direction of the second linear motor 200, one side of the second linear motor 200 is fixed on the mounting seat 130, so that the second linear motor 200 is vertically disposed on the mounting seat 130 along its width direction, thereby reducing the space occupied by the second linear motor 200. Multiple second linear motors 200 are disposed in this way and arranged along the first direction, thereby further reducing the space occupied by the second linear motor 200 and improving the space utilization rate of the semiconductor packaging device.
[0030] Optionally, in another implementation, the second linear motor 200 can be arranged on the mounting seat 130 in a variety of ways, and can also be arranged on the mounting seat 130 on one side in the thickness direction of the second linear motor 200, as long as the installation of the second linear motor 200 on the mounting seat 130 can be completed.
[0031] Optionally, in one embodiment, in the length direction of the second linear motor 200, a plurality of second linear motors 200 are provided with a mounting position 230 at the same end. In this way, the mounting position 230 is provided at the same end of the second linear motor 200, and the mounting position 230 is used to install a device for processing semiconductor chips, i.e., the load 300 mentioned above. The mounting positions 230 are all located at the same end, which facilitates the installation and removal of the load 300 on the mounting position 230, so that the plurality of loads 300 are all located at the same end, which helps to reduce the moving path of the load 300 and simplifies the moving path of the second linear motor 200 and the load 300.
[0032] Optionally, in another embodiment, the mounting position 230 can be arranged in multiple positions. In the length direction of the second linear motor 200, the mounting positions 230 on adjacent second linear motors 200 can be staggered at opposite ends, as long as the second linear motor 200 is provided with a mounting position 230.
[0033] Optionally, in one embodiment, the second linear motor 200 includes a second stator 210 disposed on a mounting seat 130, and a second mover 220 slidably connected to the second stator 210, the second stator 210 and the second mover 220 are arranged relative to each other in the thickness direction of the second linear motor 200, and the second mover 220 moves in the length direction of the second linear motor 200 to realize the movement and adjustment of the second linear motor 200 in its width direction.
[0034] Optionally, in one embodiment, the first stator 110 is provided with two first guide rails 111 arranged in parallel, the first mover 120 is arranged between the two first guide rails 111, and the mounting seat 130 is slidably connected to the two first guide rails 111. In this way, the two first guide rails 111 are arranged in parallel, so that the mounting seat 130 can perform linear reciprocating motion along the first direction on the two first guide rails 111. On the one hand, the possibility of the mounting seat 130 being deflected due to external force interference during the movement can be effectively reduced, thereby ensuring the stability of the operation of the first linear motor 100. On the other hand, the friction between the mounting seat 130 and the first guide rail 111 can also be effectively reduced, thereby reducing the wear of the mounting seat 130 on the first guide rail 111.
[0035] Optionally, in another implementation, the first guide rail 111 can be omitted, and the first mover 120 can be moved to drive the mounting seat 130 in the first direction to drive the second linear motor 200 in the first direction, as long as the first linear motor 100 can drive the second linear motor 200 in the first direction.
[0036] Optionally, in one embodiment, multiple movable members are provided. In this way, multiple movable members are provided, and one movable member is provided corresponding to one second linear motor 200, so that multiple second linear motors 200 can be driven by the movable member to move in the first direction, which effectively improves the working efficiency of the first linear motor 100.
[0037] Optionally, in another implementation, the number of movable parts may be set in various ways, and one movable part may be set on the first stator 110, as long as the second linear motor 200 can be driven in the first direction.
[0038] Optionally, in one embodiment, the plurality of movable members include a first movable member and a second movable member, the first movable member is configured as a first mounting seat 131, the mounting seat 130 of the second movable member is configured as a second mounting seat 132, and the first mounting seat 131 and the second mounting seat 132 are alternately arranged in the first direction. In this way, the first mounting seat 131 and the second mounting seat 132 are alternately arranged in the first direction, and a plurality of first movers 120 are arranged on two parallel first stators 110, and the plurality of first movers 120 on a first stator 110 are alternately connected with the adjacent first mounting seat 131 and the second mounting seat 132, so that the plurality of first movers 120 on the same stator have sufficient sliding space in the first direction, so that the first movers 120 are not prone to collision or interference during the sliding process.
[0039] Optionally, in another implementation, the first mounting seat 131 and the second mounting seat 132 may be arranged in other ways in the first direction, and the first mounting seat 131 and the second mounting seat 132 may be arranged sequentially in the first direction.
[0040] Optionally, in one embodiment, a side of the mounting seat close to the corresponding first mover 120 is provided with an avoidance channel 133 extending along the first direction, and the avoidance channel 133 of a movable member is used to avoid the first mover 120 of another movable member. In this way, the avoidance channel 133 is provided for the first mover 120 to slide through, so that the first mover 120 will not collide with or interfere with a mounting seat 130 during the movement in the first direction, thereby reducing the possibility of the first mover 120 being blocked or interfered during the movement in the first direction.
[0041] Optionally, in one embodiment, in the first direction, both ends of the first mover 120 respectively exceed the opposite sides of the mounting seat 130. In this way, in the first direction, the length of the first mover 120 is greater than the mounting seat 130, and the first mover 120 with a larger length is provided, so that the first mover 120 has a larger mounting surface, which facilitates the installation of other equipment or structures on the first mover 120.
[0042] Optionally, in another implementation, in the first direction, the length of the first mover 120 may also be set to be the same as the size of the mounting seat 130 in the first direction.
[0043] Optionally, in one embodiment, the first stator 110 further includes two magnetic tracks 112 arranged in parallel, and a plurality of first movers 120 are arranged on one side of the two magnetic tracks 112 close to the second linear motor 200. In this way, the two parallel magnetic tracks 112 provide a continuous and directional magnetic field in the first linear motor 100, so that the first movers 120 can be subjected to force in the magnetic field and move smoothly and efficiently along the first direction, providing power for the movement of the first movers 120.
[0044] The utility model also proposes a semiconductor packaging device, which includes a linear motor module. The specific structure of the linear motor module refers to the above-mentioned embodiment. Since all the technical solutions of all the above-mentioned embodiments are adopted, it has at least all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, which will not be described one by one here.
[0045] The above description is only an optional embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.
Claims
1. A linear motor module, characterized in that: include: A first linear motor comprises a first stator and a movable member disposed on the first stator, wherein the movable member comprises a plurality of first movers and a plurality of mounting seats, wherein one mounting seat is correspondingly disposed on one first mover, and the plurality of first movers move relative to the first stator along a first direction and are sequentially arranged along the first direction; and There are multiple second linear motors, one of which is correspondingly arranged on one of the mounting seats, and the thickness direction of the second linear motor is arranged in parallel with the first direction.
2. The linear motor module according to claim 1, characterized in that: In the width direction of the second linear motor, one side of the second linear motor is arranged on the mounting seat, and one second linear motor is correspondingly arranged on one mounting seat.
3. The linear motor module according to claim 1, characterized in that: In the length direction of the second linear motor, a same end of a plurality of the second linear motors is provided with a mounting position.
4. The linear motor module according to claim 1, characterized in that: The first stator is provided with two first guide rails arranged in parallel, the first mover is arranged between the two first guide rails, and the mounting seat is slidably connected to the two first guide rails.
5. The linear motor module according to claim 1, characterized in that: There are multiple movable parts.
6. The linear motor module according to claim 5, characterized in that: The plurality of movable parts include a first movable part and a second movable part, the mounting seat of the first movable part is configured as a first mounting seat, the mounting seat of the second movable part is configured as a second mounting seat, and the first mounting seat and the second mounting seat are alternately arranged in the first direction.
7. The linear motor module according to claim 1, characterized in that: A side of the mounting seat close to the corresponding first mover is provided with an avoidance channel extending along the first direction, and the avoidance channel of one movable member is used to avoid the first mover of another movable member.
8. The linear motor module according to claim 1, characterized in that: In the first direction, two ends of the first mover respectively exceed opposite sides of the mounting seat.
9. The linear motor module according to claim 1, characterized in that: The first stator further includes two magnetic rails arranged in parallel, and a plurality of the first movers are arranged on one side of the two magnetic rails close to the second linear motor.
10. A semiconductor packaging device, characterized in that: Comprising a linear motor module as described in any one of claims 1 to 9.