Atomic layer deposition equipment
By using a thermal insulation device to close the reaction chamber opening in the atomic layer deposition equipment, the problems of damage and preheating time of heat dissipation on components are solved, and the life of components is extended and the working efficiency is improved.
Patent Information
- Application Number
- CN202323419980.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-14
- Publication Date
- 2024-12-10
- Estimated Expiration
- 2033-12-14
AI Technical Summary
In the atomic layer deposition equipment, after the boat pushing mechanism exits from the reaction chamber, the heat in the reaction chamber is rapidly dissipated, resulting in component damage and subsequent preheating time too long, reducing working efficiency.
A heat insulation device is designed to close the reaction chamber opening after the guide column and the heat insulation body slide out after the boat pushing mechanism is slided out, and the heat dissipation rate is slowed down, including the guide column, heat insulation body, connecting block, buffer pad, slider, and spacer Hot plates and drive cylinders ensure sealing and efficient operation.
It extends the service life of components, reduces the preheating time for subsequent operations, improves work efficiency, and prevents heat from burning the staff.
Smart Images
Figure CN222139261U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of thin film deposition, and in particular to an atomic layer deposition device. Background Art
[0002] Atomic layer deposition equipment is a device that uses advanced thin film deposition technology to achieve high-quality and uniform thin film deposition on the surface of various materials. During the operation of the atomic layer deposition equipment, the aluminum boat is pushed into the reaction chamber with the help of a boat pusher mechanism. The reaction temperature in the reaction chamber is usually 230-350°C. After the reaction is completed, the boat pusher mechanism withdraws from the reaction chamber to complete an operation. In related technologies, after the boat pusher mechanism withdraws from the reaction chamber, the opening of the reaction chamber is in an open state, which will cause the heat in the reaction chamber to dissipate quickly. On the one hand, the dissipated heat will damage the components near the opening and affect the service life of the components; on the other hand, after the heat is dissipated, it needs to be preheated again in subsequent operations, resulting in a long preheating time and reduced work efficiency. Utility Model Content
[0003] In order to solve the above-mentioned technical problems, an embodiment of the present application provides an atomic layer deposition device, which can seal the opening of the reaction chamber through a heat insulation device after the boat pusher mechanism slides out of the reaction chamber to slow down the heat dissipation rate. On the one hand, it can reduce the impact of heat on components near the opening and extend the service life of the components; on the other hand, it can reduce the preheating time of subsequent operations and improve work efficiency.
[0004] In a first aspect, an atomic layer deposition device is provided, comprising:
[0005] A furnace body is provided with a reaction chamber, one end of the reaction chamber having an opening;
[0006] A boat pushing mechanism, slidably matched with the furnace body, the boat pushing mechanism is used to slide into or out of the reaction chamber through the opening;
[0007] A heat insulating device is located outside the reaction chamber and is connected to the furnace body; wherein the heat insulating device is used to close the opening after the boat pushing mechanism slides out of the reaction chamber.
[0008] According to the first aspect of the present application, the thermal insulation device comprises:
[0009] A guide column connected to the furnace body, wherein the guide column extends along the radial direction of the opening;
[0010] The heat insulator is slidably matched with the guide post along the extension direction of the guide post.
[0011] According to the first aspect of the present application, the number of the guide pillars is two, the opening is located between the two guide pillars, the two guide pillars are arranged in parallel, and the heat insulator is slidably matched with the two guide pillars.
[0012] According to the first aspect of the present application, the thermal insulation device further comprises:
[0013] A connecting block is connected to the furnace body, the connecting block is provided with a connecting hole, and the end of the guide column cooperates with the connecting hole.
[0014] According to the first aspect of the present application, two ends of the guide column respectively cooperate with the connecting holes on different connecting blocks.
[0015] According to the first aspect of the present application, a buffer pad is provided on the bottom end of the guide column.
[0016] According to the first aspect of the present application, the thermal insulator comprises:
[0017] A slider, slidably matched with the guide column;
[0018] A heat insulation board is detachably connected to the sliding block, and the heat insulation board is used to close the opening.
[0019] According to the first aspect of the present application, the slider is provided with an assembly hole; the heat insulation device further comprises:
[0020] A bearing is arranged in the assembly hole, and the bearing is slidably matched with the guide column.
[0021] According to the first aspect of the present application, the thermal insulation device further comprises:
[0022] A mounting base connected to the furnace body;
[0023] A driving cylinder, a cylinder body of the driving cylinder is connected to the mounting seat, and a movable part of the driving cylinder is connected to the heat insulating body.
[0024] According to the first aspect of the present application, the driving cylinder comprises a rodless cylinder, both ends of which are respectively connected to the two mounting seats arranged opposite to each other, and the movable body frame of the rodless cylinder is connected to the heat insulating body.
[0025] The atomic layer deposition equipment provided in the embodiment of the present application includes a furnace body, a boat pushing mechanism and a heat insulating device. The furnace body is provided with a reaction chamber, and one end of the reaction chamber has an opening; the boat pushing mechanism is slidably matched with the furnace body, and the boat pushing mechanism is used to slide into or out of the reaction chamber through the opening; the heat insulating device is located outside the reaction chamber, and the heat insulating device is connected to the furnace body; after the boat pushing mechanism slides out of the reaction chamber, the opening can be closed by the heat insulating device, so that the heat dissipation rate in the reaction chamber can be slowed down. On the first hand, the heat insulating device closes the opening, and the components near the opening are less affected by the heat, which can extend the service life of the components; on the second hand, the heat insulating device closes the opening to keep the heat in the reaction chamber. When the boat pushing mechanism slides into the reaction chamber again for heating, the reaction chamber maintains a higher temperature, which can effectively reduce the preheating time, thereby improving overall work efficiency; on the third hand, the heat insulating device closes the opening to prevent a large amount of heat from causing burns to the staff. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.
[0027] Figure 1 A schematic structural diagram of an atomic layer deposition device provided for an exemplary embodiment of the present application.
[0028] Figure 2 A schematic structural diagram of a heat insulation device and a furnace body provided in an exemplary embodiment of the present application.
[0029] Figure 3 A schematic structural diagram of a heat insulation device provided for an exemplary embodiment of the present application.
[0030] Figure markings: 100-atomic layer deposition equipment; 110-furnace body; 111-reaction chamber; 112-opening; 120-boat pushing mechanism; 130-heat insulation device; 131-guide column; 132-heat insulation body; 1321-slider; 1322-heat insulation board; 1323-assembly hole; 1324-first threaded hole; 1325-first positioning hole; 133-connecting block; 1331-connecting hole; 134-buffer pad; 135-bearing; 136-mounting seat; 137-drive cylinder; 138-rodless cylinder. DETAILED DESCRIPTION
[0031] Below, the exemplary embodiments according to the present application will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application, and it should be understood that the present application is not limited to the exemplary embodiments described here.
[0032] Figure 1 A schematic structural diagram of an atomic layer deposition device provided for an exemplary embodiment of the present application. Figure 2 This is a schematic diagram of the structure of a heat insulation device and a furnace body provided by an exemplary embodiment of the present application. Figure 1 and Figure 2 As shown, the atomic layer deposition device 100 provided in the embodiment of the present application may include a furnace body 110 and a boat pushing mechanism 120. The furnace body 110 is provided with a reaction chamber 111. One end of the reaction chamber 111 has an opening 112. The boat pushing mechanism 120 is slidably matched with the furnace body 110. In actual operation, the boat pushing mechanism 120 can slide into the reaction chamber 111 through the opening 112. After the reaction is completed, the boat pushing mechanism 120 can slide out of the reaction chamber 111 through the opening 112, and the operation can be repeated multiple times.
[0033] like Figure 1 and Figure 2 As shown, the atomic layer deposition device 100 may also include a heat insulating device 130, which is located outside the reaction chamber 111 and is connected to the furnace body 110. After the boat pushing mechanism 120 slides out of the reaction chamber 111, the heat insulating device 130 can close the opening 112, so that the heat dissipation rate in the reaction chamber 111 can be slowed down. On the one hand, the heat insulating device 130 closes the opening 112, and the components near the opening 112 are less affected by the heat, which can extend the service life of the components; on the other hand, the heat insulating device 130 closes the opening 112 to keep the heat in the reaction chamber 111. When the boat pushing mechanism 120 slides into the reaction chamber 111 again for heating, the reaction chamber 111 maintains a high temperature, which can effectively reduce the preheating time, thereby improving the overall work efficiency; on the third hand, the heat insulating device 130 closes the opening 112 to prevent a large amount of heat from causing burns to the staff.
[0034] In one embodiment, the heat insulating device 130 can achieve the function of closing the opening 112 by rotating the structure connected to the furnace body 110 .
[0035] In one embodiment, the heat insulating device 130 can achieve the function of closing the opening 112 by slidingly connecting the structure of the furnace body 110 .
[0036] Figure 3 This is a schematic diagram of the structure of a heat insulation device provided by an exemplary embodiment of the present application. Figure 2 and Figure 3As shown, the heat insulating device 130 may include a guide column 131 and a heat insulating body 132 , the guide column 131 is connected to the furnace body 110 , and the heat insulating body 132 is slidably matched with the guide column 131 along the extension direction of the guide column 131 .
[0037] It should be noted that the guide post 131 extends along the radial direction of the opening 112, and the guide post 131 can guide the sliding of the heat insulator 132. In other words, the heat insulator 132 can slide along the radial direction of the opening 112, which can not only achieve the function of closing the opening 112, but also ensure that the heat insulator 132 is closely attached to the outer wall of the opening 112, so that the sealing and heat insulation effect is better, and the heat dissipation rate of the heat in the reaction chamber 111 can be further slowed down.
[0038] by Figure 2 For example, Figure 2 The directions indicated by arrows A and B can be understood as radial directions of the opening 112 .
[0039] In one embodiment, the surface of the guide post 131 is provided with a chrome-plated layer, so that the wear resistance of the surface of the guide post 131 can be enhanced, the surface of the guide post 131 is not easy to rust, and the service life of the guide post 131 can be extended.
[0040] like Figure 2 and Figure 3 As shown, there are two guide posts 131, the opening 112 is located between the two guide posts 131, the two guide posts 131 are arranged in parallel, and the heat insulator 132 slides with the two guide posts 131, so that the stability of the heat insulator 132 during the sliding process can be improved, making it less likely for the heat insulator 132 to shake or deflect.
[0041] like Figure 2 and Figure 3 As shown, the heat insulation device 130 may include a connection block 133, the connection block 133 is connected to the furnace body 110, the connection block 133 is provided with a connection hole 1331, and the end of the guide column 131 cooperates with the connection hole 1331. In this way, on the one hand, the connection block 133 can limit the heat insulation body 132 to prevent the heat insulation body 132 from sliding out of the end of the guide column 131; on the other hand, in actual application, the setting position of the connection hole 1331 is first determined, and then the guide column 131 is assembled according to the setting position of the connection hole 1331, which can prevent the guide column 131 from being tilted when assembled; on the other hand, the matching structure between the guide column 131 and the connection hole 1331 can facilitate the installation and removal of the guide column 131, and can effectively improve the disassembly efficiency.
[0042] In one embodiment, the connection hole 1331 may include a round hole, a square hole, etc.; correspondingly, the end of the guide column 131 may include a round end, a square end, etc.
[0043] In one embodiment, the connection block 133 and the furnace body 110 are connected to each other by welding, bonding, bolting, etc.
[0044] like Figure 2 and Figure 3 As shown, the two ends of the guide column 131 respectively cooperate with the connecting holes 1331 on different connecting blocks 133, that is, for the same guide column 131, the guide column 131 is assembled between the two connecting blocks 133. On the first hand, the two connecting blocks 133 can limit the thermal insulator 132 in two different directions to prevent the thermal insulator 132 from sliding out of the guide column 131 from the two ends of the guide column 131; on the second hand, the connecting holes 1331 of the two connecting blocks 133 respectively cooperate with the two ends of the guide column 131, so that the guide column 131 can be maintained in the original installation position for a long time, which is conducive to achieving the function of guiding the radial movement of the thermal insulator 132 along the opening 112 for a long time.
[0045] In one embodiment, the number of the guide posts 131 is two, the number of the connection blocks 133 is four, and each guide post 131 corresponds to two connection blocks 133 .
[0046] In actual application, when the heat insulator 132 moves toward the bottom end of the guide column 131, the heat insulator 132 may impact the end of the guide column 131 and the connecting block 133 under the action of gravity. Figure 3 As shown, a buffer pad 134 is provided at the bottom end of the guide column 131. The buffer pad 134 can buffer the insulator 132, reduce the damage to the insulator 132, the guide column 131 and the connecting block 133 during the impact process, and effectively extend the overall service life of the insulation device 130.
[0047] In one embodiment, buffer pads 134 may be sleeved on both ends of the same guide column 131 to provide buffering effects in different directions.
[0048] In one embodiment, the number of the guide posts 131 is two, and a buffer pad 134 may be disposed at the bottom of the two guide posts 131 to further enhance the buffering effect.
[0049] like Figure 3 As shown, the heat insulator 132 includes a slider 1321 and a heat insulating plate 1322. The slider 1321 is slidably matched with the guide column 131, and the heat insulating plate 1322 is detachably connected to the slider 1321. It should be understood that after the boat pushing mechanism 120 slides out of the reaction chamber 111, the slider 1321 moves along the extension direction of the guide column 131, and the heat insulating plate 1322 can be used to close the opening 112 of the reaction chamber 111.
[0050] It should be noted that a detachable connection structure is adopted between the heat insulation plate 1322 and the slider 1321, so that the heat insulation plate 1322 can be easily replaced. In addition, during the process of replacing the heat insulation plate 1322, there is no need to remove the slider 1321 from the guide column 131, which can improve the overall replacement efficiency.
[0051] In one embodiment, the heat insulation board 1322 is connected to the slider 1321 by bolts. Figure 3 As shown, the heat insulation board 1322 is provided with a first threaded hole 1324 and a first positioning hole 1325, and the slider 1321 is provided with a second threaded hole (not shown in the figure) and a second positioning hole (not shown in the figure), and the first threaded hole 1324 is connected with the second threaded hole, and the first positioning hole 1325 is connected with the second positioning hole. In actual application, the installation position of the heat insulation board 1322 is positioned by using a pin to match the first positioning hole 1325 and the second positioning hole, and then the bolt is assembled into the first threaded hole 1324 and the second threaded hole. In this way, the installation accuracy between the heat insulation board 1322 and the slider 1321 can be improved, ensuring that the heat insulation board 1322 can completely cover the area of the opening 112 during the movement of the slider 1321 along the guide column 131.
[0052] In one embodiment, the aforementioned first positioning hole 1325 is arranged between the two first threaded holes 1324, and correspondingly, the second positioning hole is arranged between the two second threaded holes. In this way, after using the pin shaft to match the first positioning hole 1325 and the second positioning hole, the two first threaded holes 1324 can be aligned with the corresponding two second threaded holes respectively.
[0053] like Figure 3 As shown, the slider 1321 is provided with an assembly hole 1323, and the heat insulation device 130 may further include a bearing 135, which is provided in the assembly hole 1323, and the bearing 135 is slidably matched with the guide column 131. In other words, the slider 1321 is slidably matched with the guide column 131 through the bearing 135, and the bearing 135 can improve the smoothness of the sliding process of the slider 1321, so as to facilitate the quick and accurate driving of the heat insulation board 1322 to the target position.
[0054] In one embodiment, the bearing 135 may be a linear bearing, which has a small friction coefficient and can further improve the smoothness of the sliding block 1321 during sliding.
[0055] like Figure 3 As shown, the heat insulating device 130 may include a mounting seat 136 and a driving cylinder 137, wherein the mounting seat 136 is connected to the furnace body 110, the cylinder body of the driving cylinder 137 is connected to the mounting seat 136, and the movable part of the driving cylinder 137 is connected to the heat insulating body 132. In practical applications, after the driving cylinder 137 is started, its movable part can drive the heat insulating body 132 to move, thereby driving the slider 1321 to slide along the extension direction of the guide column 131.
[0056] In one embodiment, the driving cylinder 137 may include an oil cylinder, a pneumatic cylinder, an electric cylinder, etc.
[0057] like Figure 3 As shown, the driving cylinder 137 includes a rodless cylinder 138, and the two ends of the rodless cylinder 138 are respectively connected to two mounting seats 136 arranged opposite to each other, and the moving body frame of the rodless cylinder 138 is connected to the heat insulator 132. Specifically, the two mounting seats 136 arranged opposite to each other can serve as mounting carriers of the rodless cylinder 138, and play a role in positioning the mounting position of the rodless cylinder 138. After the rodless cylinder 138 is started, its moving body frame can drive the heat insulator 132 to move, thereby driving the slider 1321 to slide along the extension direction of the guide column 131.
[0058] It should be noted that the rodless cylinder 138 is relatively small in size, which can reduce the space occupied and is convenient to be arranged on the furnace body 110 , thereby realizing a lightweight design of the heat insulation device 130 .
[0059] It should be noted that the specific structure of the rodless cylinder 138 is well documented in the relevant technology and will not be described in detail here.
[0060] In one embodiment, the driving cylinder 137 may include a rod cylinder, the cylinder body of the rod cylinder is connected to the mounting seat 136, and the piston rod of the rod cylinder is connected to the insulator 132. After the rod cylinder is started, the piston rod can drive the insulator 132 to move, thereby driving the slider 1321 to slide along the extension direction of the guide column 131.
[0061] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.
[0062] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.
[0063] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.
[0064] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.
[0065] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.
Claims
1. An atomic layer deposition device, characterized in that: include: A furnace body (110) is provided with a reaction chamber (111), one end of the reaction chamber (111) having an opening (112); A boat pushing mechanism (120) is slidably matched with the furnace body (110), and the boat pushing mechanism (120) slides into or out of the reaction chamber (111) through the opening (112); A heat insulating device (130) is located outside the reaction chamber (111), and the heat insulating device (130) is connected to the furnace body (110); wherein the heat insulating device (130) is used to close the opening (112) after the boat pushing mechanism (120) slides out of the reaction chamber (111).
2. The atomic layer deposition device according to claim 1, characterized in that: The heat insulation device (130) comprises: A guide column (131) connected to the furnace body (110), the guide column (131) extending in the radial direction of the opening (112); The heat insulator (132) is slidably matched with the guide post (131) along the extension direction of the guide post (131).
3. The atomic layer deposition device according to claim 2, characterized in that: The number of the guide posts (131) is two, the opening (112) is located between the two guide posts (131), the two guide posts (131) are arranged in parallel, and the heat insulator (132) is slidably matched with the two guide posts (131).
4. The atomic layer deposition device according to claim 2, characterized in that: The heat insulation device (130) further comprises: A connecting block (133) is connected to the furnace body (110); the connecting block (133) is provided with a connecting hole (1331); and the end of the guide column (131) is matched with the connecting hole (1331).
5. The atomic layer deposition device according to claim 4, characterized in that: The two ends of the guide column (131) respectively match the connection holes (1331) on different connection blocks (133).
6. The atomic layer deposition device according to claim 2, characterized in that: The bottom end of the guide column (131) is sleeved with a buffer pad (134).
7. The atomic layer deposition device according to claim 2, characterized in that: The heat insulator (132) comprises: A slider (1321) slidably matched with the guide post (131); A heat insulation board (1322) is detachably connected to the slider (1321), and the heat insulation board (1322) is used to close the opening (112).
8. The atomic layer deposition device according to claim 7, characterized in that: The sliding block (1321) is provided with an assembly hole (1323); the heat insulation device (130) further comprises: The bearing (135) is disposed in the assembly hole (1323), and the bearing (135) is slidably matched with the guide column (131).
9. The atomic layer deposition device according to claim 2, characterized in that: The heat insulation device (130) further comprises: A mounting seat (136) connected to the furnace body (110); A driving cylinder (137), wherein a cylinder body of the driving cylinder (137) is connected to the mounting seat (136), and a movable part of the driving cylinder (137) is connected to the heat insulating body (132).
10. The atomic layer deposition device according to claim 9, characterized in that: The driving cylinder (137) comprises a rodless cylinder (138), the two ends of the rodless cylinder (138) are respectively connected to the two mounting seats (136) arranged opposite to each other, and the movable body frame of the rodless cylinder (138) is connected to the heat insulating body (132).