Wafer chuck inner gear transmission gap detection tool

Abstract

The utility model provides a wafer chuck internal gear transmission gap detection tool comprising an angle scale used for sleeving a clamp of a wafer chuck, the angle scale is provided with a sleeve hole and an arc scale taking the center of the sleeve hole as a circle center, and the inner diameter of the sleeve hole is matched with the outer diameter of the clamp; the pointer is used for rotating the clamp, and the tail end of the pointer is provided with a fixing part which is used for being detachably fixed with the clamp. The detection tool utilizes the principle of angle amplification, can visually and accurately display the rotation angle used for representing the transmission gap between the internal gear and the driving gear, is simple in structure and convenient and flexible to operate, and therefore, in the assembling and using processes, the detection efficiency is greatly improved, and the detection cost is reduced. The transmission gap between the internal gear and the driving gear can be accurately and conveniently detected.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer chuck detection, and in particular relates to a tool for detecting transmission clearance of gears inside a wafer chuck. Background Art

[0002] When cleaning the wafer, the wafer is fixed by the process chuck and rotates at high speed. The process liquid is sprayed on the surface of the high-speed rotating wafer through the relevant transmission pipeline to clean and dissolve the pollutants on the surface of the wafer. Under the action of centrifugal force, the process liquid and the pollutants are thrown out from the surface of the wafer together, thereby achieving the purpose of cleaning the wafer.

[0003] During the cleaning process, the multiple clamps on the process chuck rotate under the drive of the corresponding internal gears to clamp the wafer, and the multiple internal gears are driven by the driving gear. It is difficult to ensure the consistency of the transmission gap between the internal gears and the driving gears during the processing and assembly process, and the degree of wear of each internal gear is also inconsistent. This will cause the clamping force and starting position of each clamp to be different, resulting in the wafer shaking during the cleaning process and causing the process liquid to be thrown out.

[0004] Therefore, in order to adjust the transmission clearance between each internal gear and the driving gear to be consistent, it is necessary to detect the transmission clearance between the internal gear and the driving gear during assembly and use. Utility Model Content

[0005] Based on this, in order to solve the above technical problems, a tool for detecting the transmission gap of the gears inside the wafer chuck is provided.

[0006] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0007] A wafer chuck internal gear transmission clearance detection tool, comprising:

[0008] An angle disc used to be sleeved on a clamp of a wafer chuck, the angle disc having a sleeve hole and an arc-shaped scale with the center of the sleeve hole as the center of a circle, and the inner diameter of the sleeve hole is adapted to the outer diameter of the clamp;

[0009] A pointer is used to rotate the card clip, and a fixing portion for detachably fixing with the card clip is provided at the tail end of the pointer.

[0010] The detection tool of the utility model utilizes the principle of angle magnification and can intuitively and accurately display the rotation angle used to characterize the transmission clearance between the internal gear and the driving gear. At the same time, the detection tool has a simple structure and is convenient and flexible to operate. Therefore, during the assembly and use process, the transmission clearance between the internal gear and the driving gear can be accurately and conveniently detected. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a schematic diagram of the structure of the utility model;

[0012] Figure 2 This is a structural schematic diagram of the angle plate of the utility model;

[0013] Figure 3 It is a schematic diagram of the structure of the pointer and the fixing part of the utility model;

[0014] Figure 4 This is a principle diagram of the pointer of the utility model driving the internal gear of the clip to rotate;

[0015] Figure 5 It is the principle diagram of the utility model. DETAILED DESCRIPTION

[0016] The following will illustrate the implementation methods of the utility model in conjunction with the drawings in the specification. It should be noted that the implementation methods involved in this specification are not exhaustive and do not represent the only implementation methods of the utility model. The following corresponding embodiments are only for the purpose of clearly illustrating the utility model content of the utility model patent, and are not intended to limit its implementation methods. For ordinary technicians in this field, different forms of changes and modifications can be made on the basis of the description of this embodiment. All obvious changes or modifications that belong to the technical concept and utility model content of the utility model are also within the scope of protection of the utility model.

[0017] like Figure 1 As shown, an embodiment of the present application provides a wafer chuck internal gear transmission gap detection tool, including an angle plate 110, a pointer 120 and a fixing part 130.

[0018] The angle plate 110 is used to be mounted on the clamp 21 of the wafer chuck 2. Figure 2 As shown, there is a sleeve hole 111 and an arc scale 112 with the center of the sleeve hole 111 as the center of the circle, and the inner diameter of the sleeve hole 111 is adapted to the outer diameter of the clamp 2.

[0019] For example, Figure 2 As shown, the angle disk 110 is fan-shaped, the sleeve hole 111 is formed at the central corner of the angle disk 110 , and the arc scale 112 is arranged on the front side of the arc portion of the angle disk 110 .

[0020] In this embodiment, there are two sleeve holes 111 and two arc scales 112, and the sleeve holes 111 correspond to the arc scales 112 one by one (sleeve hole 111a corresponds to the first arc scale 112a, and sleeve hole 111b corresponds to the first arc scale 112b). The two sleeve holes 111 are arranged radially front to back, and the two arc scales 112 are also arranged radially front to back, so that the angle disk 110 can adapt to two sizes of wafer chucks.

[0021] Among them, the directions of the two arc scales 112 are opposite: the reading of the first arc scale 112a gradually increases in the clockwise direction, and the reading of the second arc scale 112b gradually increases in the counterclockwise direction. At the same time, the front of the angle disk 110 has a first stop 113 and a second stop 114. When the pointer 120 points to the zero scale line of the first arc scale 112a, the first stop 113 just touches the pointer 120. When the pointer 120 points to the zero scale line of the second arc scale 112b, the second stop 114 just touches the pointer 120, so that it is convenient for the detection personnel to judge whether the pointer 120 points to the zero scale line.

[0022] Since the first arc scale 112a and the second arc scale 112b are in opposite directions, the first stopper 113 and the second stopper 114 can be separated from each other on the rotation path of the pointer 120, thereby preventing the pointer 120 from interfering with the other stopper when one stopper approaches the pointer 120.

[0023] It is understandable that there may be only one sleeve hole 111 and one arc scale 112. Furthermore, the first stop 113 and the second stop 114 may be omitted, and the inspector may determine by naked eyes whether the pointer 120 points to the zero scale line. Therefore, in the absence of the above-mentioned interference, the number of sleeve holes 111 and arc scales 112 may be more than two, and the directions of the plurality of arc scales 112 may be the same, or some may be the same and some may be different.

[0024] like Figure 2 As shown, the fixing portion 130 is used to be detachably fixed to the clip 21, which is connected to the pointer 120. After the fixing portion 130 is fixed to the clip 21, the clip 2 can be rotated by rotating the pointer 120, thereby driving the internal gear 3 of the clip 2 to rotate, see Figure 3 .

[0025] Among them, the fixing part 130 is a fixing clamp, which is connected to the tail end of the pointer 120 by bolts. The fixing clamp has two arms 131 arranged on the left and right, and a clamping opening for the clamp 21 to pass through is formed between the two arms 131. Locking bolts 132 are provided at the ends of the two arms 131 for making the two arms 131 clamp the clamp 21.

[0026] In this embodiment, the structural materials of each part of the detection tooling are plastic parts, which are suitable for dust-free environment.

[0027] Based on the detection tooling provided in the embodiment of the present application, the detection process of the gear transmission clearance inside the wafer chuck is as follows:

[0028] 1. Put the angle plate 110 on a clamp 21 of the wafer chuck 2 through the sleeve hole 111a, see Figure 1 .

[0029] 2. Fix the fixing portion 130 and the clip 21 .

[0030] 3. Rotate the pointer 120 in the opposite direction (counterclockwise) of the first arc scale 112a to drive the internal gear 3 to rotate until the meshing teeth 31 of the internal gear 3 are blocked by the driving gear 4 at point a and cannot rotate. Figure 5 .

[0031] 4. Keep the pointer 120 stationary, and rotate the angle disk 110 with the clamp 2 as the rotation center, so that the first stop 113 touches the pointer 120. At this time, the pointer 120 just points to the zero scale line of the angle disk.

[0032] 5. Rotate the pointer 120 in the opposite direction (clockwise) until the meshing teeth 31 of the internal gear 3 are blocked by the driving gear 4 at point b and cannot rotate. Figure 5 , read the scale currently pointed by the pointer 120, which is the rotation angle of the meshing tooth 31 from point a to point b. The rotation angle represents the transmission clearance between the internal gear 3 and the driving gear 4.

[0033] From the above, it can be seen that the detection tool provided in the embodiment of the present application utilizes the principle of angle magnification, and can intuitively and accurately display the rotation angle used to characterize the transmission clearance between the internal gear 3 and the driving gear 4. At the same time, the detection tool has a simple structure and is easy and flexible to operate. Therefore, during the assembly and use process, the transmission clearance between the internal gear 3 and the driving gear 4 can be accurately and conveniently detected.

[0034] Obviously, those skilled in the art should realize that the above embodiments are only used to illustrate the present invention, and are not used to limit the present invention. As long as they are within the spirit of the present invention, any changes or modifications to the above embodiments will fall within the scope of the claims of the present invention.

Claims

1. A wafer chuck internal gear transmission clearance detection tool, characterized in that: include: An angle disc used to be sleeved on a clamp of a wafer chuck, the angle disc having a sleeve hole and an arc-shaped scale with the center of the sleeve hole as the center of a circle, and the inner diameter of the sleeve hole is adapted to the outer diameter of the clamp; A pointer is used to rotate the card clip, and a fixing portion for detachably fixing with the card clip is provided at the tail end of the pointer.

2. A wafer chuck internal gear transmission clearance detection tool according to claim 1, characterized in that: The angle disk is fan-shaped, the sleeve hole is formed at the central corner of the angle disk, and the arc scale is arranged on the front side of the arc portion of the angle disk.

3. The wafer chuck internal gear transmission clearance detection tooling according to claim 1, characterized in that: There are multiple sets of holes and arc-shaped scales, and the sets of holes correspond to the arc-shaped scales one by one. The multiple sets of holes are arranged radially front to back, and the multiple arc-shaped scales are arranged radially front to back.

4. A wafer chuck internal gear transmission clearance detection tool as described in claim 3, characterized in that: There are two sleeve holes and two arc-shaped scales.

5. A wafer chuck internal gear transmission clearance detection tool as claimed in claim 4, characterized in that: The directions of the two arc scales are opposite: the reading of the first arc scale gradually increases in the clockwise direction, and the reading of the second arc scale gradually increases in the counterclockwise direction.

6. The wafer chuck internal gear transmission clearance detection tooling according to claim 5, characterized in that: The front side of the angle disk has a first stop portion that just touches the pointer when the pointer points to the zero scale line of the first arc scale, and a second stop portion that just touches the pointer when the pointer points to the zero scale line of the second arc scale. The first stop portion and the second stop portion are away from each other on the rotation path of the pointer.

7. The wafer chuck internal gear transmission clearance detection tool according to claim 1, characterized in that: The fixing part is a fixing clip, which is connected to the tail end of the pointer by bolts. The fixing clip has two arms arranged on the left and right, and a clamping opening for the clamp to pass through is formed between the two arms. The ends of the two arms are provided with locking bolts for the two arms to clamp the clamp.

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