Spectrum chip and spectrum device

Abstract

The utility model provides a spectrum chip and a spectrum device, the spectrum chip comprises a photosensitive layer, a filter layer and a Fresnel lens, the photosensitive layer is used for converting a received optical signal into an electric signal, and the filter layer is arranged at one side of the photosensitive layer and is used for filtering the optical signal entering the photosensitive layer to obtain light with a preset wavelength. The Fresnel lens is arranged on the side, away from the photosensitive layer, of the light filtering layer and used for gathering the light signals and transmitting the light signals to the photosensitive layer through the light filtering layer. The Fresnel lens is adopted to replace a common convex lens, the transmission path of light in the lens is reduced by using a thinner lens structure, compared with the common convex lens, the energy attenuation is reduced, and higher luminous flux and quantum efficiency can be realized for the photosensitive layer.

Description

Technical Field

[0001] The utility model relates to the technical field of spectroscopy, in particular to a spectroscopy chip and a spectroscopy device. Background Art

[0002] In the related technology, ordinary convex lenses are generally used as the focusing device of the spectrum chip. The quantum efficiency can reach 90% in some bands, but the quantum efficiency is less than 50% in some bands. When using ordinary convex lenses, the corners will become dark and blurred. This is because the refraction of light only occurs at the interface of the medium. The convex lens is thick, and the part of the light that propagates in a straight line in the glass will cause the light to attenuate. Utility Model Content

[0003] The embodiments of the utility model provide a spectrum chip and a spectrum device, which can improve the technical problem of weak focusing effect of traditional convex lenses.

[0004] The present application provides a spectral chip, comprising:

[0005] A photosensitive layer, used to convert received light signals into electrical signals;

[0006] A filter layer, disposed on one side of the photosensitive layer, for filtering the optical signal entering the photosensitive layer to obtain light of a preset wavelength;

[0007] The Fresnel lens is arranged on a side of the filter layer away from the photosensitive layer. The Fresnel lens is used to gather the light signal and transmit the light signal to the photosensitive layer through the filter layer.

[0008] In one embodiment, the photosensitive layer includes a plurality of photosensitive units, and there are a plurality of Fresnel lenses, and the plurality of photosensitive units and the plurality of Fresnel lenses are arranged in a one-to-one correspondence.

[0009] In one embodiment, the orthographic projection of each of the Fresnel lenses on the photosensitive layer covers one of the photosensitive units.

[0010] In one embodiment, the filter layer includes a plurality of filter units corresponding to the photosensitive units, and the plurality of photosensitive units are arranged in a one-to-one correspondence with the plurality of filter units;

[0011] The plurality of filter units form a plurality of groups of filter units. Different groups of filter units allow light with different preset wavelengths to pass through, and the same group of filter units allows light with the same preset wavelength to pass through.

[0012] In one embodiment, the photosensitive unit is provided with a light well, and the light well is arranged on a side of the photosensitive unit facing the filter unit.

[0013] In one embodiment, a surface of the photosensitive unit facing the filter unit is a complete surface.

[0014] In one embodiment, the diameter of the Fresnel lens is between 0.1 micrometers and 10 micrometers.

[0015] In one embodiment, the Fresnel lens includes a flat structure and a plurality of annular protrusions, wherein the annular protrusions are protruded from the flat structure, and each of the annular protrusions includes a first side surface and a second side surface, wherein the first side surface is perpendicular to the flat structure, and the second side surface is inclined and connected between two adjacent first side surfaces, and the second side surface is used to change the refraction path of the optical signal.

[0016] In one embodiment, the Fresnel lens includes a convex surface, the convex surface is convexly arranged in the middle of the flat structure, and the plurality of annular protrusions are symmetrically arranged on both sides of the convex surface.

[0017] The present application also provides a spectral device, comprising the spectral chip as described above.

[0018] Beneficial effects of the embodiments of the utility model:

[0019] In a spectrum chip and spectrum device of the utility model, the spectrum chip includes a photosensitive layer, a filter layer and a Fresnel lens. The photosensitive layer is used to convert the received light signal into an electrical signal. The filter layer is arranged on one side of the photosensitive layer, and is used to filter the light signal entering the photosensitive layer to obtain light of a preset wavelength. The Fresnel lens is arranged on the side of the filter layer away from the photosensitive layer, and is used to gather the light signal and transmit the light signal to the photosensitive layer through the filter layer. The Fresnel lens is used to replace the ordinary convex lens, and the thinner lens structure is used to reduce the propagation distance of the light in the lens. While saving a lot of materials, it achieves the same focusing effect as the ordinary convex lens. Compared with the ordinary convex lens, it reduces the energy attenuation, and can achieve higher light flux and quantum efficiency for the photosensitive layer. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0021] Figure 1 This is a top view of a spectrum chip provided by an embodiment of the utility model;

[0022] Figure 2 This is a schematic diagram of a first partial structure of a spectral chip provided by an embodiment of the utility model;

[0023] Figure 3 This is a schematic diagram of a second partial structure of a spectral chip provided by an embodiment of the utility model;

[0024] Figure 4 This is a schematic diagram of the third partial structure of the spectral chip provided by the embodiment of the utility model;

[0025] Figure 5 It is a schematic diagram of a Fresnel lens provided in an embodiment of the utility model.

[0026] Description of reference numerals:

[0027] 1. Fresnel lens; 11. Flat structure; 12. Annular protrusion; 121. First side surface; 122. Second side surface; 14. Convex surface; 2. Filter unit; 3. Photosensitive unit; 31. Light well. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the utility model. In addition, it should be understood that the specific implementation methods described herein are only used to illustrate and explain the utility model, and are not used to limit the utility model. In the utility model, unless otherwise stated, the directional words used, such as "upper" and "lower", generally refer to the upper and lower parts of the device in actual use or working state, specifically the drawing direction in the accompanying drawings; while "inside" and "outside" refer to the outline of the device.

[0029] In the related technology, ordinary convex lenses are generally used as the focusing device of the spectrum chip. The quantum efficiency can reach 90% in some bands, but less than 50% in some bands. When ordinary convex lenses are used, the corners will become dark and blurred. This is because the refraction of light only occurs at the interface of the medium. The convex lens is thick, and the part of the light that propagates in a straight line in the glass will cause the light to attenuate.

[0030] Please refer to Figure 1-Figure 3 , Figure 1 This is a top view of the spectrum chip provided by the embodiment of the utility model. Figure 2 This is a schematic diagram of a first partial structure of a spectral chip provided by an embodiment of the utility model. Figure 3It is a schematic diagram of the second partial structure of the spectral chip provided by an embodiment of the utility model. The present application provides a spectral chip, which includes a photosensitive layer, a filter layer and a Fresnel lens 1. The photosensitive layer can be composed of a photosensitive material, and is used to convert the received optical signal into an electrical signal, and can output the electrical signal through a readout circuit. The filter layer is arranged on one side of the photosensitive layer, and is used to filter the optical signal entering the photosensitive layer to obtain light of a preset wavelength. The Fresnel lens 1 is arranged on the side of the filter layer away from the photosensitive layer, and the Fresnel lens 1 is used to gather the optical signal and transmit the optical signal to the photosensitive layer through the filter layer. The Fresnel lens is a specially designed lens. Although the Fresnel lens itself does not directly participate in the collection and processing of spectral information, it can be used for optical focusing and light path control of spectral chips. Since the Fresnel lens 1 is thinner and lighter than ordinary lenses, the Fresnel lens 1 is used instead of ordinary convex lenses to reduce the propagation distance of light in the lens. After the Fresnel lens 1 adjusts the exit angle, the light signal is projected onto the target area of ​​the photosensitive unit 3, saving a lot of materials while achieving the same focusing effect as an ordinary convex lens. Compared with ordinary convex lenses, it reduces energy attenuation and can achieve higher luminous flux and quantum efficiency for the photosensitive layer.

[0031] In some embodiments, the photosensitive layer includes a plurality of photosensitive units 3, the number of the Fresnel lenses 1 is multiple, and the plurality of photosensitive units 3 is arranged one-to-one with the plurality of Fresnel lenses 1. Specifically, each photosensitive unit 3 corresponds to a Fresnel lens 1, and the filter unit 2 is located between the Fresnel lens 1 and the photosensitive unit 3. The center lines of the Fresnel lens 1, the filter unit 2, and the photosensitive unit 3 are collinear and parallel to the arrangement direction of the photosensitive unit 3. Each photosensitive unit can have the same shape and the same photosensitive area. It can be understood that light enters the photosensitive unit 3 after passing through the Fresnel lens 1 and the filter unit 2 in sequence, and the Fresnel lens 1 can play a focusing role, thereby increasing the light flux entering the filter unit 2, thereby increasing the light flux entering the photosensitive unit 3.

[0032] In some embodiments, the orthographic projection of each of the Fresnel lenses 1 on the photosensitive layer covers one of the photosensitive units 3 to ensure that the light enters the photosensitive unit 3 after passing through the Fresnel lens 1. It is understandable that when the orthographic projection of the Fresnel lens 1 on the photosensitive layer covers the photosensitive unit 3, the overall area formed by the photosensitive path is limited, so that the light is incident on the middle position of the photosensitive unit 3. After the light passes through the Fresnel lens 1, the incident light can only be incident on the photosensitive unit 3 from the area directly opposite to the photosensitive unit 3, which can more effectively prevent the light from being incident on the adjacent photosensitive unit 3.

[0033] In some embodiments, the filter layer includes a plurality of filter units 2 corresponding to the photosensitive units 3, and the plurality of photosensitive units 3 are arranged in a one-to-one correspondence with the plurality of filter units 2. The plurality of filter units 2 form a plurality of groups of filter units 2, and different groups of filter units 2 allow light of different preset wavelengths to pass through, and the same group of filter units 2 allows light of the same preset wavelength to pass through. Specifically, the filter units 2 can selectively transmit light of different wavelengths, and the plurality of filter units 2 form a plurality of filter unit groups, and each filter unit group includes a plurality of filter units 2, such as N filter units 2 as a group, N filter units 2 allow light of the same preset wavelength to pass through, and N filter units 2 are arranged in a one-to-one correspondence with N photosensitive units 3, and N is a positive integer. It can be understood that the structure of the filter unit 2 can be designed according to the wavelength range of natural light in the environment, so that light of different wavelength ranges is obtained after filtering by the filter unit 2, and the natural light includes visible light and non-visible light.

[0034] In some embodiments, the filter layer includes a first filter unit, a second filter unit and a third filter unit. The filter material coated on the first filter unit allows light of a first wavelength to pass through, the filter material coated on the second filter unit allows light of a second wavelength to pass through, and the filter material coated on the third filter unit allows light of a third wavelength to pass through. The first filter unit, the second filter unit and the third filter unit are arranged in sequence. The present application does not limit the specific arrangement of different filter units 2.

[0035] In some embodiments, the photosensitive layer includes a first photosensitive unit, a second photosensitive unit, and a third photosensitive unit. The first photosensitive unit, the second photosensitive unit, and the third photosensitive unit are arranged in a one-to-one correspondence with the first filtering unit, the second filtering unit, and the third filtering unit. The present application does not limit the specific arrangement of different photosensitive units 3.

[0036] Please refer to Figure 4 , Figure 4 This is a schematic diagram of the third partial structure of the spectral chip provided by the embodiment of the utility model. In some embodiments, the photosensitive unit 3 is provided with a light well 31, and the light well 31 is arranged on the side of the photosensitive unit 3 facing the filter unit 2. Specifically, the Fresnel lens 1 and the light well 31 are arranged correspondingly, and the light well 31 can be arranged in the middle of the filter unit 2 to guide the light passing through the filter unit 2. The width of the light well 31 can be uniformly contracted along the length direction, that is, the diameter close to the filter unit 2 is larger than the diameter of the end away from the filter unit 2.

[0037] In some embodiments, the surface of the photosensitive unit 3 facing the filter unit 2 is a complete surface. Compared with the traditional spectral chip, specifically, because the quantum efficiency of the ordinary lens is low, it is necessary to set up a light well 31 to further improve the light concentration and prevent light scattering. However, the present application sets up a Fresnel lens 1, and a better light concentration effect can be achieved without setting up a light well 31. Therefore, setting the surface of the photosensitive unit 3 facing the filter unit 2 as a plane can save the steps of etching, OCL filling, and passivation layer plating when using the light well 31, which can greatly reduce the manufacturing cost.

[0038] In some embodiments, the diameter of the Fresnel lens 1 is between 0.1 microns and 10 microns. Specifically, since the plurality of photosensitive units 3 are arranged in one-to-one correspondence with the plurality of Fresnel lenses 1, the diameter of the Fresnel lens 1 is set according to the diameter of the photosensitive unit 3. Fresnel lenses with larger diameters can usually collect more light and have better imaging capabilities, but smaller Fresnel lenses used in spectral chips can reduce volume and weight. The diameter of the Fresnel lens 1 can be 0.1 microns, 0.3 microns, 0.5 microns, 0.7 microns, 0.9 microns, 10 microns, etc.

[0039] Please refer to Figure 5 , Figure 5 Schematic diagram of a Fresnel lens provided by an embodiment of the utility model. In some embodiments, the Fresnel lens 1 includes a flat structure 11 and a plurality of annular protrusions 12, the annular protrusions 12 are convexly arranged on the flat structure 11, each of the annular protrusions 12 includes a first side surface 121 and a second side surface 122, the first side surface 121 is perpendicular to the flat structure 11, the second side surface 122 is connected between two adjacent first side surfaces 121 at an angle, that is, one end of the second side surface 122 is connected to the bottom end of one first side surface 121, and the other end of the second side surface 122 is connected to the top end of another first side surface 121, and the second side surface 122 is used to change the refraction path of the optical signal.

[0040] Specifically, the flat structure 11 is the base of the Fresnel lens 1, which is used to carry other elements of the Fresnel lens 1. The second side surface 122 of each annular protrusion 12 is the light incident surface. After the light is refracted, it enters the light exiting surface of the flat structure 11, and the light exiting surface is a plane. It can be understood that the side of the annular protrusion 12 close to the light source and from which the light enters is the light incident surface, and the other side of the flat structure 11, that is, the side from which the light exits is the light exiting surface. The multiple annular protrusions 12 are concentric circle structures. The annular protrusions 12 are convexly arranged on the side of the flat structure 11 away from the photosensitive unit 3. An annular groove is formed between adjacent annular protrusions 12, and a sawtooth structure is formed as a whole. The design of multiple annular protrusions 12 can reduce the size and weight of the overall lens, and the brightness of the light is higher than that of the ordinary lens, so that the brightness of the incident light at each part is relatively consistent. The Fresnel lens 1 is used to adjust the light incident from the light incident surface so that the light passes through the flat structure 11 and exits in a direction perpendicular to the light exiting surface and enters the filter unit 2.

[0041] In some embodiments, one end of the second side surface 122 is connected to one end of the first side surface 121, and the other end of the second side surface 122 is spaced apart from the other end of the first side surface 121, and the width of the intervals between the first side surfaces 121 and the second side surfaces 122 of the plurality of annular protrusions 12 may be equal to form an equally spaced Fresnel lens 1 structure.

[0042] In some embodiments, the heights of the first side surfaces 121 of the plurality of annular protrusions 12 may be equal to form a Fresnel lens 1 structure with equal tooth heights, or the heights of the first side surfaces 121 of the plurality of annular protrusions 12 may be unequal, such as the height of the first side surfaces 121 gradually decreases as extending from the center to the periphery. Those skilled in the art may reasonably set the size of the serrated structure in the Fresnel lens 1 according to actual needs, and the present application does not limit this herein.

[0043] In some embodiments, the second side surface 122 may be an arc-shaped structure convex in a direction away from the straight structure 11 , or the second side surface 122 may be a planar structure, which is not limited in the present application.

[0044] In some embodiments, due to the inclined setting of the second side surface 122, the first side surface 121 and the second side surface 122 form an angle. The angle between the second side surface 122 and the first side surface 121 can be 30°, 45°, 60°, etc. to achieve different focusing effects. The present application does not limit the angle here.

[0045] In some embodiments, the Fresnel lens 1 includes a convex surface 14, the convex surface 14 is convexly arranged in the middle of the flat structure 11, and the plurality of annular protrusions 12 are symmetrically arranged on both sides of the convex surface 14. Specifically, the convex surface 14 is an arc surface that protrudes away from the flat structure 11, and the center of the annular protrusion coincides with the center of the arc surface. Different curvature radii of the convex surface 14 correspond to different focal lengths, and the curvature of the arc surface can be changed according to actual conditions, which is not limited in this application.

[0046] The present application also provides a spectral device, such as a spectrometer or a spectral imaging device, wherein the spectral analysis device includes the spectral chip described above. In some embodiments, the spectral analysis device may further include a data processing unit for processing the electrical signal to generate a spectrum or an image, etc. By installing the spectral chip described above, the spectral device can accurately collect, process and analyze spectral information, providing data support for various application scenarios.

[0047] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0048] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more features.

[0049] The above is a detailed introduction to the embodiments of the present invention. Specific examples are used in this article to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method and core idea of ​​the present invention. At the same time, for technicians in this field, according to the idea of ​​the present invention, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A spectral chip, characterized in that: include: A photosensitive layer, used to convert received light signals into electrical signals; A filter layer, disposed on one side of the photosensitive layer, for filtering the optical signal entering the photosensitive layer to obtain light of a preset wavelength; The Fresnel lens is arranged on a side of the filter layer away from the photosensitive layer. The Fresnel lens is used to gather the light signal and transmit the light signal to the photosensitive layer through the filter layer.

2. The spectral chip according to claim 1, characterized in that: The photosensitive layer includes a plurality of photosensitive units, and there are a plurality of Fresnel lenses, and the plurality of photosensitive units and the plurality of Fresnel lenses are arranged in a one-to-one correspondence.

3. The spectral chip according to claim 2, characterized in that: The orthographic projection of each Fresnel lens on the photosensitive layer covers one photosensitive unit.

4. The spectral chip according to claim 2, characterized in that: The filter layer includes a plurality of filter units corresponding to the photosensitive units, and the plurality of photosensitive units are arranged in a one-to-one correspondence with the plurality of filter units; The plurality of filter units form a plurality of groups of filter units. Different groups of filter units allow light with different preset wavelengths to pass through, and the same group of filter units allows light with the same preset wavelength to pass through.

5. The spectral chip according to claim 4, characterized in that: The photosensitive unit is provided with a light well, and the light well is arranged on a side of the photosensitive unit facing the light filtering unit.

6. The spectral chip according to claim 4, characterized in that: The surface of the photosensitive unit facing the filter unit is a complete surface.

7. The spectral chip according to any one of claims 1 to 6, characterized in that: The diameter of the Fresnel lens is between 0.1 micrometers and 10 micrometers.

8. The spectral chip according to any one of claims 1 to 6, characterized in that: The Fresnel lens includes a flat structure and a plurality of annular protrusions, wherein the annular protrusions are protruded from the flat structure, and each of the annular protrusions includes a first side surface and a second side surface, wherein the first side surface is perpendicular to the flat structure, and the second side surface is inclined and connected between two adjacent first side surfaces, and the second side surface is used to change the refraction path of the optical signal.

9. The spectral chip according to claim 8, characterized in that: The Fresnel lens comprises a convex surface, the convex surface is convexly arranged in the middle of the flat structure, and a plurality of annular protrusions are symmetrically arranged on both sides of the convex surface.

10. A spectral device, characterized in that: Comprising a spectral chip as described in any one of claims 1-9.

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