Vacuum coating device with height-adjustable crucible assembly

Abstract

The utility model relates to a vacuum coating device with a height-adjustable crucible assembly, belongs to the technical field of vacuum coating equipment, and solves the technical problem that the distance between a crucible and a coating roller can be adjusted only by opening a door body of the vacuum coating equipment in the prior art. The vacuum coating device comprises a shell and a crucible assembly arranged in the shell, the lifting driving part is installed in the shell, and the crucible assembly is connected with the lifting driving part so as to ascend and descend in the shell along with the lifting driving part; and the control part is connected with the lifting driving part and used for controlling the lifting driving part to act, and the control part is arranged outside the shell. By means of the structure, the crucible assembly in the shell is driven by the lifting driving part to ascend and descend in the shell, the control part for controlling the lifting driving part to ascend and descend is arranged outside the shell, and therefore during adjustment, the shell does not need to be opened, external air can be effectively prevented from entering the shell to be attached to the surface of a component, shutdown is not needed during adjustment, and the adjustment efficiency is improved. And the production efficiency is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum coating equipment, and in particular relates to a vacuum coating device with an adjustable crucible component height. Background Art

[0002] The vacuum coating equipment is usually equipped with an evaporation source crucible for heating the coating material. The evaporation rate of the crucible has a great influence on the coating accuracy, and the distance between the crucible and the coating roller will also affect the coating accuracy. Specifically, after the substrate comes out of the unwinding roller, it reaches the coating roller through the roller reversal. The crucible assembly is placed under the coating roller. After the crucible assembly heats the coating material, the coating material evaporates to form coating vapor. The vapor rises until it reaches the surface of the substrate wound by the coating roller above it, thereby coating the substrate. The substrate after coating is then rewound by the winding roller after the roller reversal. The distance between the crucible assembly and the coating roller directly affects the amount and concentration of the vapor reaching the surface of the substrate, thereby affecting the coating accuracy of the substrate surface. In order to conveniently adjust the distance between the crucible and the coating roller, some vacuum coating equipment at present is internally provided with an adjustment mechanism, which is connected to the crucible, so that the adjustment structure is used to drive the crucible to move in the vacuum coating equipment, thereby changing the distance between the crucible and the coating roller.

[0003] At present, the above-mentioned adjustment mechanism is installed inside the vacuum coating equipment. Each time it is adjusted, the door of the equipment must be opened, and then the adjustment mechanism can be manually operated. However, after the door is opened, the components inside the equipment are exposed to the atmosphere, and the water vapor and organic gas in the atmosphere will adhere to the surface of the components inside the equipment. Therefore, after each adjustment is completed, the inside of the equipment must be baked for a long time to remove the water vapor and organic gas on the surface of the components, so as to return the equipment to an ultra-high vacuum environment, which greatly reduces the utilization efficiency of the equipment. Summary of the invention

[0004] The invention provides a vacuum coating device with an adjustable crucible assembly height, which is used to solve the technical problem that the vacuum coating device in the prior art needs to open the door body to adjust the distance between the crucible and the coating roller.

[0005] The present invention is implemented by the following technical solution: A vacuum coating device with an adjustable crucible assembly height, comprising:

[0006] A housing and a crucible assembly disposed in the housing;

[0007] A lifting drive unit is installed in the housing, and the crucible assembly is connected to the lifting drive unit to be lifted and lowered in the housing along with the lifting drive unit;

[0008] The control unit is connected to the lifting drive unit, and is used to control the movement of the lifting drive unit. The control unit is arranged outside the housing.

[0009] Furthermore, in order to better implement the present invention, the lifting drive unit includes:

[0010] A base, installed in the housing;

[0011] a scissor lift arm mounted on the base;

[0012] A lifting platform, arranged on the top of the scissor-type lifting arm, and the crucible assembly is mounted on the lifting platform;

[0013] The transmission assembly is transmission-connected between the control part and the scissor-type lifting arm to transmit the power of the control part to the scissor-type lifting arm to drive the scissor-type lifting arm to rise and fall.

[0014] Further, in order to better realize the present invention, the scissor-type lifting arm includes a first arm and a second arm pivotally connected together, the bottom end of the first arm is hinged to the base, the top end of the first arm is slidably connected to the lifting platform, the bottom end of the second arm is slidably connected to the base, and the top end of the second arm is hinged to the lifting platform;

[0015] The transmission assembly is transmission-connected between the operating part and the bottom end of the second arm to transmit the power of the operating part to the bottom end of the second arm to drive the bottom end of the second arm to move.

[0016] Furthermore, in order to better implement the present invention, the transmission assembly includes:

[0017] A rotating shaft, wherein two fixed seats facing each other are arranged on the base, the rotating shaft is rotatably passed through the fixed seats, and one end of the rotating shaft passes through the housing and is connected to the control unit;

[0018] A threaded sleeve, sleeved on the rotating shaft and located between the two fixing seats;

[0019] The slider is arranged at the bottom end of the second support arm and is slidably connected to the base. The slider is provided with a screw hole, and the threaded sleeve is screwed to the screw hole.

[0020] Furthermore, in order to better implement the present invention, a sealing member for cooperating and sealing with the housing is also installed on the rotating shaft.

[0021] Furthermore, in order to better implement the present invention, the sealing member is a magnetic fluid sealing structure.

[0022] Furthermore, in order to better implement the present invention, a digital encoder is also installed on the rotating shaft, and the digital encoder is used to determine the lifting value of the lifting platform according to the rotation angle of the rotating shaft.

[0023] Furthermore, in order to better implement the present invention, a guide shaft is provided between the two fixing seats, the sliding block is provided with a guide hole, and the guide shaft is slidably inserted into the guide hole.

[0024] Furthermore, in order to better implement the present invention, the control part is a flower-shaped handle, and the flower-shaped handle is disposed on one end of the rotating shaft.

[0025] Furthermore, in order to better implement the present invention, a track is provided on the lifting platform, and a sliding rod is provided on the top end of the first arm, and the sliding rod is slidably installed on the track.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] The vacuum coating device with an adjustable crucible assembly height provided by the present invention comprises an outer shell, a crucible assembly, a lifting drive unit and a control unit. The crucible assembly is arranged inside the above-mentioned outer shell. Of course, components such as a partition, a substrate (that is, the object to be coated) storage assembly, a coating roller and a heater are also installed in the outer shell. The above-mentioned crucible assembly is used to heat the coating material to achieve the function of vacuum coating. The lifting drive unit is installed in the outer shell, and the crucible assembly is connected to the lifting drive unit, so that the lifting drive unit is used to drive the crucible assembly to rise and fall in the outer shell to change the distance between the crucible and the coating roller. The control unit is connected to the lifting drive unit, and the control unit can control the lifting action of the above-mentioned lifting drive unit, and the control unit is arranged on the outside of the outer shell.

[0028] The staff only needs to operate the above-mentioned control part to conveniently adjust the distance between the crucible assembly and the coating roller (that is, the distance between the crucible assembly and the substrate). Since the control part is located outside the shell, it is not necessary to open the shell when adjusting, thereby effectively preventing external air from entering the shell and adhering to the surface of the components inside the shell, and it is not necessary to stop the machine when adjusting, thereby improving production efficiency. Therefore, through the above-mentioned structure, not only the vacuum environment inside the shell is guaranteed to facilitate vacuum coating, but also the distance between the crucible and the substrate can be conveniently and in real time adjusted to obtain the coating thickness required by the process, and the coating accuracy can be more conveniently and effectively controlled in conjunction with the precise control of the crucible heating temperature. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0030] Figure 1 It is a structural schematic diagram of a vacuum coating device with an adjustable crucible assembly height provided by an embodiment of the present invention;

[0031] Figure 2 yes Figure 1 A local enlarged view of area A;

[0032] Figure 3 is a schematic diagram of the installation structure of the crucible assembly in the housing in an embodiment of the present invention;

[0033] Figure 4 is a schematic diagram of the installation structure of the crucible assembly on the lifting drive unit in an embodiment of the present invention;

[0034] Figure 5 It is a schematic diagram of the connection structure between the slider and the guide shaft in an embodiment of the present invention.

[0035] In the figure:

[0036] 1-housing; 11-unwinding roller; 12-winding roller; 13-passing roller; 14-coating roller; 15-film thickness meter; 16-baffle; 17-substrate;

[0037] 2- Crucible assembly;

[0038] 3-lifting drive unit; 31-base; 311-fixed seat; 312-guide shaft; 32-scissor lift arm; 321-first arm; 322-second arm; 323-slide rod; 33-lifting platform; 331-track; 34-rotating shaft; 341-coupling; 35-threaded sleeve; 36-slider;

[0039] 4-Flower-shaped handle;

[0040] 5-Magnetic fluid sealing structure;

[0041] 6-Digital display encoder. DETAILED DESCRIPTION

[0042] To make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be described in detail below. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other implementation methods obtained by ordinary technicians in this field without creative work belong to the scope of protection of the present invention.

[0043] Embodiment 1:

[0044] The vacuum coating device with adjustable crucible assembly height provided by the utility model comprises a housing 1, a crucible assembly 2, a lifting drive unit 3 and a control unit, wherein:

[0045] The crucible assembly 2 is arranged inside the housing 1. The crucible assembly 2 is used to heat and evaporate the coating material (the coating material can be a volatile metal or compound, etc.). Of course, the housing 1 also includes a baffle 16, a substrate (i.e., an object to be coated) receiving and placing assembly, a coating roller 14, a heater, and other components. Figure 1 and Figure 3 As shown, the baffle 16 divides the internal space of the shell 1 into an upper chamber and a lower chamber, and the substrate taking-up assembly is installed in the upper chamber. Specifically, the substrate taking-up assembly includes an unwinding roller 11, a winding roller 12, a passing roller 13 and a coating roller 14 rotatably installed on the side wall of the shell 1. The substrate 17 to be coated is wound around the unwinding roller 11, the winding roller 12, the passing roller 13 and the coating roller 14. The unwinding roller 11 and the winding roller 12 are respectively driven to rotate by a driving motor. When the unwinding roller 11 and the winding roller 12 are driven by the corresponding driving motors and rotate, the substrate 17 is unwound from the unwinding roller 11 and wound onto the winding roller 12, and the passing roller 13 and the coating roller 14 can be understood as reversing rollers. The crucible assembly 2 is located in the lower chamber, and a notch is provided on the baffle 16. The coating roller 14 and the crucible assembly 2 are respectively located directly above and directly below the notch. When in operation, the crucible assembly 2 heats the coating material placed therein, and the winding roller 12 and the unwinding roller 11 operate. The coating material evaporates to form steam and passes upward through the notch to reach the surface of the substrate 17 at the coating roller 14. The atoms or molecules of the evaporated substance are deposited on the surface of the substrate 17 in a condensed manner, thereby coating the coating material on the surface of the substrate 17. A film thickness meter 15 is also installed in the housing 1. The film thickness meter 15 is located between the coating roller 14 and the winding roller 12 to detect the coating thickness on the surface of the substrate 17.

[0046] Of course, the vacuum coater also includes a controller (such as an electric control box or a control chip, etc.), which is electrically connected to the drive motor, the heating system of the crucible assembly 2, and the film thickness meter 15, so as to use the controller to control the working state of the drive motor and the heating system of the crucible assembly 2, and the controller is also electrically connected to a display screen, which can display the coating thickness detected by the film thickness meter 15. In addition, the vacuum coater also includes a vacuum system, which is used to extract the gas in the housing 1 to form a vacuum environment in the housing 1.

[0047] The lifting drive unit 3 can output lifting actions, and is installed in the housing 1. The crucible assembly 2 is connected to the lifting drive unit 3, so that the lifting drive unit 3 is used to drive the crucible assembly 2 to lift in the housing 1 to change the distance between the crucible and the coating roller 14. It is easy to understand that since the coating roller 14 and the crucible assembly 2 are respectively located on the upper and lower sides of the notch, when the lifting drive unit 3 drives the crucible assembly 2 to lift, the distance between the crucible assembly 2 and the coating roller 14 can be changed. The control unit is connected to the lifting drive unit 3, and the control unit can control the lifting drive unit 3 to perform lifting actions, and the control unit is arranged outside the housing 1.

[0048] When in use, the staff only needs to operate the above-mentioned control part to conveniently adjust the distance between the crucible assembly 2 and the coating roller 14 (that is, the distance between the crucible assembly 2 and the substrate 17). Since the control part is located outside the shell 1, it is not necessary to open the shell 1 when adjusting, so that the external air can be effectively prevented from entering the inside of the shell 1 and adhering to the surface of the components inside the shell 1. In addition, it is not necessary to stop the machine when adjusting, thereby improving production efficiency. Therefore, through the above-mentioned structure, not only the vacuum environment inside the shell 1 is guaranteed to facilitate vacuum coating, but also the distance between the crucible assembly 2 and the substrate 17 can be conveniently and in real time adjusted to obtain the coating thickness required by the process, and the heating temperature of the crucible assembly 2 can be precisely controlled to more conveniently and effectively control the coating accuracy. Moreover, the coating efficiency of the vacuum coating device is higher. In order to facilitate understanding of the higher coating efficiency of the vacuum coating device, this embodiment is described by way of example. For example, after the crucible assembly 2 is heated to 500°C, the volatilization rate of the coating material is optimal. At this time, the lifting assembly is used to drive the crucible assembly 2 upward, so that the crucible assembly 2 is close to the substrate 17 on the surface of the coating roller 14, so that the substrate 17 can obtain the required process deposition conditions (such as evaporated coating material) more quickly. Of course, when the coating is completed, the lifting drive unit 3 is used to drive the crucible assembly 2 downward and reset it to wait for the next coating operation.

[0049] An optional implementation of this embodiment is as follows: Figure 1 , Figure 2 as well as Figure 4As shown, the lifting drive unit 3 includes a base 31, a scissor-type lifting arm 32, a lifting platform 33 and a transmission assembly, wherein:

[0050] The base 31 is installed on the inner bottom wall of the above-mentioned shell 1 by mechanical connection (such as bolt connection), and the above-mentioned scissor-type lifting arm 32 is installed on the base 31. The scissor-type lifting arm 32 is essentially a telescopic structure, and its telescopic direction is the up and down direction, so that the scissor-type lifting arm 32 can be raised and lowered on the base 31.

[0051] The lifting platform 33 is a platform made of metal material. The lifting platform 33 is arranged on the top of the scissor-type lifting arm 32. The crucible assembly 2 is installed on the lifting platform 33. In this way, when the scissor-type lifting arm 32 is raised or lowered, the lifting platform 33 can be driven to rise or fall, thereby driving the crucible assembly 2 to move up and down.

[0052] The transmission assembly is transmission-connected between the control unit and the scissor-type lifting arm 32 , and the transmission assembly can transmit the power of the control unit to the scissor-type lifting arm 32 , thereby driving the scissor-type lifting arm 32 to rise and fall.

[0053] It is easy to understand that the scissor-type lifting arm 32 in this embodiment is an actuator, whose power comes from the above-mentioned control part, and the above-mentioned transmission component transmits the power of the control part to the above-mentioned scissor-type lifting arm 32.

[0054] Since the scissor-type lifting arm 32 has high telescopic stability, the lifting drive unit 3 in this embodiment can drive the crucible assembly 2 to rise and fall smoothly.

[0055] Optionally, the scissor-type lifting arm 32 comprises a first arm 321 and a second arm 322 pivotally connected in the middle, the first arm 321 and the second arm 322 forming a scissor-type structure, the bottom end of the first arm 321 is hinged to the base 31, the top end of the first arm 321 is slidably connected to the lifting platform 33, the top end of the first arm 321 can move smoothly on the lifting platform 33, the bottom end of the second arm 322 is slidably connected to the base 31, that is, the bottom end of the second arm 322 can move smoothly on the base 31, and the top end of the second arm 322 is hinged to the lifting platform 33. In this way, when the bottom end of the second arm 322 is pushed to translate, the entire scissor-type lifting arm 32 can be driven to move up and down. The transmission assembly is connected between the control part and the bottom end of the second arm 322 to transmit the power of the control part to the bottom end of the second arm 322 and drive the bottom end of the second arm 322 to move smoothly on the base 31. It is easy to understand that the transmission assembly converts the power of the control part into a linear push-pull force that drives the bottom end of the second arm 322 to translate.

[0056] Specifically, Figure 4As shown, in this embodiment, the number of the first arm 321 and the number of the second arm 322 are both two, the two first arms 321 are respectively pivotally connected with the two second arms 322 to form a scissor-type structure, and the two scissor-type structures are arranged side by side to form a scissor-type lifting arm 32, so that the lifting platform 33 and the crucible assembly 2 can be driven to rise and fall more smoothly.

[0057] In order to make the top of the first arm 321 slide and install on the lifting platform 33, and also to make the top of the first arm 321 not separate from the lifting platform 33, optionally, in this embodiment, the tops of the two first arms 321 are connected by a slide bar 323, that is, the slide bar 323 is arranged at the top of the first arm 321. The lifting platform 33 is provided with a track 331, which is located on the bottom surface of the lifting platform 33, and the track 331 is actually a frame structure, and the slideway of the track 331 is formed inside the frame structure. The slide bar 323 is slidably placed in the slideway of the track 331. In this way, the slide bar 323 can only move horizontally in the track 331 and will not separate from the track 331 by utilizing the limiting effect of the track 331 on the slide bar 323. As another optional implementation of this embodiment, in this embodiment, a guide rod can also be set on the bottom surface of the above-mentioned track 331, and a through hole can be opened in the above-mentioned slide rod 323, and the guide rod can be slidably inserted in the through hole, so that the guide rod can guide the smooth movement of the slide rod 323.

[0058] An optional implementation of this embodiment is as follows: Figure 1 , Figure 2 as well as Figure 4 As shown, the transmission assembly includes a rotating shaft 34, a threaded sleeve 35 and a slider 36, wherein:

[0059] The rotating shaft 34 is composed of two straight round rods and a coupling. A round through hole is provided on the side wall of the housing 1. One of the straight round rods is rotatably inserted in the round through hole, so that one end of the rotating shaft 34 passes through the housing 1 and extends to the outside of the housing 1. Two opposite fixing seats 311 are provided on the base 31. The two fixing seats 311 are provided with mounting round holes. Another straight round rod is rotatably inserted into the mounting round holes on the two fixing seats 311. The coupling connects the two straight round rods and makes the two straight round rods coaxial. The above-mentioned control part is connected to one end of the rotating shaft 34 extending out of the housing 1. It should be noted that the power output by the control part in this embodiment is rotational power, which is used to drive the above-mentioned rotating shaft 34 to rotate.

[0060] The threaded sleeve 35 is sleeved on the rotating shaft 34 and linked with the rotating shaft 34. The threaded sleeve 35 is located between the two fixed seats 311. The slider 36 is provided with a screw hole. The threaded sleeve 35 is screwed to the screw hole, thereby forming a screw-nut transmission pair. The slider 36 is arranged at the bottom end of the second arm 322. Specifically, the bottom end of the second arm 322 is hinged to the slider 36. The slider 36 is slidably connected to the base 31, so that the bottom end of the second arm 322 is slidably connected to the base 31. When the operating part is used to drive the rotating shaft 34 to rotate, the rotating shaft 34 drives the threaded sleeve 35 to rotate, thereby driving the slider 36 to move smoothly on the base 31, and then pushing or pulling the bottom end of the second arm 322, so that the scissor-type lifting arm 32 is raised or lowered.

[0061] It should be noted that the slider 36 in this embodiment is located between the two second arms 322 to make the structure more compact.

[0062] The transmission structure has high transmission accuracy and sensitivity, so as to accurately transmit the rotational power of the control part to the scissor-type lifting arm 32, thereby driving the scissor-type lifting arm 32 to drive the lifting platform 33 to rise and fall relative to the base 31, thereby changing the distance between the crucible assembly 2 and the coating roller 14.

[0063] As another optional implementation of this embodiment, the rotating shaft 34 in this embodiment can also be a rod with a light rod, and the threaded sleeve 35 is fixedly connected to the light rod by welding. In addition, the rotating shaft 34 can also be a screw. In addition, the transmission assembly in this embodiment can also be a cam mechanism, and the control part at this time is used to drive the cam mechanism to rotate, and the edge of the cam mechanism is in contact with the lower part of the second arm 322. In this case, a slide groove needs to be opened on the base 31, and the bottom end of the second arm 322 is slidably installed in the slide groove. When the cam mechanism rotates and pushes the bottom end of the second arm 322 to move toward the bottom end of the first arm 321, the scissor-type lifting arm 32 is extended and the lifting platform 33 is driven to rise. When the cam mechanism rotates and releases the second arm 322, the downward pressure applied to the scissor-type lifting arm 32 by the crucible assembly 2 and the lifting platform 33 drives the scissor-type lifting arm 32 to retract.

[0064] Optionally, the control part in this embodiment is a flower-shaped handle 4, which is sleeved on one end of the above-mentioned rotating shaft 34 and linked with the rotating shaft 34. In this way, the staff rotates the flower-shaped handle 4 to drive the rotating shaft 34 to rotate, thereby controlling the lifting of the above-mentioned scissor-type lifting arm 32. It is simple and convenient to use, has a simple structure, and has low manufacturing and use costs. As another optional implementation in this embodiment, the control part in this embodiment can also be an electric motor. In this case, the above-mentioned controller can be used to control the motor to automatically control the lifting of the crucible assembly 2. In addition, the above-mentioned control part can also be a crank.

[0065] Preferably, a locking and unlocking structure can be installed between the flower-shaped handle 4 and the outer wall of the housing 1. For example, the locking and unlocking structure includes a mounting frame connected to the outer wall of the housing 1 and a block arranged on the mounting frame. A threaded through hole is provided on the block. A locking bolt is screwed into the threaded through hole. The head of the locking bolt is connected to the outer wall of the rotating shaft 34. When locking is required, the locking bolt is turned so that the head of the locking bolt presses against the rotating shaft 34. At this time, the rotating shaft 34 will not rotate without reason. When the rotating shaft 34 needs to be rotated, the locking bolt is turned so that the locking bolt releases the rotating shaft 34. With the help of the locking and unlocking structure, the use stability of the vacuum coating device can be further improved. As another optional implementation of this embodiment, in this embodiment, a damping structure can also be provided between the rotating shaft 34 and the fixing seat 311 to prevent the rotating shaft 34 from rotating without reason.

[0066] In order to make the slider 36 slide more smoothly on the base 31, to prevent the slider 36 from being separated from the base 31, and to prevent the slider 36 from rotating with the rotating shaft 34 and the threaded sleeve 35, optionally, as Figure 5 As shown, in this embodiment, a guide shaft 312 is further provided between the two fixing seats 311, and the slider 36 is provided with a guide hole, and the guide shaft 312 is slidably inserted into the guide hole, so that the guide shaft 312 is used to guide and limit the smooth movement of the slider 36. Specifically, there are two guide shafts 312, and both guide shafts 312 are arranged parallel to the rotating shaft 34, and the two guide shafts 312 are respectively located on both sides of the rotating shaft 34.

[0067] An optional implementation of this embodiment is as follows: Figure 1 and Figure 4 As shown, a seal for sealing with the housing 1 is also installed on the rotating shaft 34. Since the rotating shaft 34 passes through the round through hole on the side wall of the housing 1 and extends to the outside of the housing 1, and the rotating shaft 34 can rotate in the round through hole, there is a clearance fit between the rotating shaft 34 and the wall of the round through hole, and the seal can prevent air leakage in the clearance between the rotating shaft 34 and the wall of the round through hole.

[0068] Optionally, the seal in this embodiment is a magnetic fluid sealing structure 5, which is a prior art, so it will not be described in detail here. A transmission shaft is arranged inside the magnetic fluid sealing structure 5, and the transmission shaft can be a solid shaft or a hollow shaft. When the transmission shaft is a hollow shaft, the rotating shaft 34 is connected inside the transmission shaft; when the transmission shaft is a hollow shaft, the rotating shaft 34 is located inside the housing 1 and one end of the rotating shaft 34 is connected to the transmission shaft through a coupling 341. At this time, the transmission shaft of the magnetic fluid sealing structure 5 is actually a section of the rotating shaft, and the flower-shaped handle 4 is installed at one end of the transmission shaft located outside the housing 1. With the help of the magnetic fluid sealing structure 5, the gap between the rotating shaft 34 and the wall of the round hole can be well closed to avoid air leakage.

[0069] An optional implementation of this embodiment is as follows: a digital display encoder 6 is also installed on the above-mentioned rotating shaft 34, and the digital display encoder 6 is located outside the housing 1. The digital display encoder 6 is used to determine the lifting value of the lifting platform 33 according to the rotation angle of the rotating shaft 34, and display the lifting value of the lifting platform 33, so that the staff can accurately control the lifting of the crucible assembly 2. It should be noted that the digital display encoder 6 belongs to the prior art, so it will not be described in detail here.

[0070] Another optional implementation of this embodiment is as follows: the lifting drive unit can also be an electric telescopic rod with a telescopic shaft facing upward and mounted on the inner bottom wall of the shell 1, and a mounting platform is connected to the telescopic shaft of the electric telescopic rod, and the crucible assembly 2 is mounted on the mounting platform. The electric telescopic rod is automatically extended and retracted by the controller, thereby driving the crucible assembly 2 to rise and fall in the shell 1. Of course, in this case, it is necessary to install a telescopic tube covered on the outer periphery of the electric telescopic rod between the mounting platform and the inner bottom wall of the shell 1, and the telescopic tube is made of heat-insulating material to insulate the electric telescopic rod, thereby ensuring that the high temperature and vacuum environment in the shell will not affect the normal operation of the electric telescopic rod. In this case, the control unit can be a remote controller for controlling the lifting of the electric telescopic rod. Of course, the lifting drive unit can also be any other lifting device or mechanism, as long as it can achieve lifting.

[0071] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope of the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A vacuum coating device with an adjustable crucible assembly height, characterized in that: include: A housing (1) and a crucible assembly (2) disposed in the housing (1); A lifting drive unit (3) is installed in the housing (1), and the crucible assembly (2) is connected to the lifting drive unit (3) so as to be lifted and lowered in the housing (1) along with the lifting drive unit (3); A control unit is connected to the lifting drive unit (3), the control unit is used to control the movement of the lifting drive unit (3), and the control unit is arranged outside the housing (1).

2. The vacuum coating device with adjustable crucible assembly height according to claim 1, characterized in that: The lifting drive unit (3) comprises: A base (31) installed in the housing (1); A scissor-type lifting arm (32) mounted on the base (31); A lifting platform (33) is arranged on the top of the scissor-type lifting arm (32), and the crucible assembly (2) is installed on the lifting platform (33); A transmission assembly is transmission-connected between the control unit and the scissor-type lifting arm (32) to transmit power of the control unit to the scissor-type lifting arm (32) to drive the scissor-type lifting arm (32) to rise and fall.

3. The vacuum coating device with adjustable crucible assembly height according to claim 2, characterized in that: The scissor-type lifting arm (32) comprises a first arm (321) and a second arm (322) which are pivotally connected together, the bottom end of the first arm (321) is hinged to the base (31), the top end of the first arm (321) is slidably connected to the lifting platform (33), the bottom end of the second arm (322) is slidably connected to the base (31), and the top end of the second arm (322) is hinged to the lifting platform (33); The transmission assembly is transmission-connected between the control part and the bottom end of the second arm (322) to transmit the power of the control part to the bottom end of the second arm (322) and drive the bottom end of the second arm (322) to move.

4. The vacuum coating device with adjustable crucible assembly height according to claim 3, characterized in that: The transmission assembly comprises: A rotating shaft (34), wherein the base (31) is provided with two fixed seats (311) facing each other, the rotating shaft (34) is rotatably inserted into the fixed seats (311), and one end of the rotating shaft (34) passes through the housing (1) and is connected to the control unit; A threaded sleeve (35) is sleeved on the rotating shaft (34) and is located between the two fixing seats (311); The slider (36) is arranged at the bottom end of the second support arm (322) and is slidably connected to the base (31); the slider (36) is provided with a screw hole, and the threaded sleeve (35) is screwed to the screw hole.

5. The vacuum coating device with adjustable crucible assembly height according to claim 4, characterized in that: A sealing member for cooperating with the housing (1) to seal is also mounted on the rotating shaft (34).

6. The vacuum coating device with adjustable crucible assembly height according to claim 5, characterized in that: The sealing element is a magnetic fluid sealing structure (5).

7. The vacuum coating device with adjustable crucible assembly height according to claim 4, characterized in that: A digital display encoder (6) is also installed on the rotating shaft (34), and the digital display encoder (6) is used to determine the lifting value of the lifting platform (33) according to the rotation angle of the rotating shaft (34).

8. The vacuum coating device with adjustable crucible assembly height according to claim 4, characterized in that: A guide shaft (312) is also provided between the two fixing seats (311), and the sliding block (36) is provided with a guide hole, and the guide shaft (312) is slidably inserted into the guide hole.

9. The vacuum coating device with adjustable crucible assembly height according to claim 4, characterized in that: The control part is a flower-shaped handle (4), and the flower-shaped handle (4) is sleeved on one end of the rotating shaft (34).

10. The vacuum coater with adjustable crucible assembly height according to any one of claims 3 to 9, characterized in that: A track (331) is arranged on the lifting platform (33), and a sliding rod (323) is arranged on the top end of the first support arm (321), and the sliding rod (323) is slidably mounted on the track (331).

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