3D optical contourgraph

Abstract

The utility model belongs to the technical field of optical contourgraphs, and particularly relates to a 3D optical contourgraph, which comprises an optical mechanism, a support mechanism and a protection mechanism, the optical mechanism comprises a support table, an optical scanning device, an optical probe and a first slide rail, the optical scanning device is arranged on the support table, the optical probe is arranged at the bottom of the optical scanning device, and the optical probe is arranged on the first slide rail. A first sliding rail is arranged at the top of the supporting table; the supporting mechanism is arranged on the first sliding rail, the supporting mechanism comprises a sliding table, a sliding groove, a second sliding rail, a movable table and a rack, the sliding groove connected with the first sliding rail is formed in the bottom of the sliding table, the second sliding rail is arranged at the top of the sliding table, and when articles are placed, the sliding table of the supporting mechanism is pulled out, and after the articles are placed on the movable table, the rack is arranged on the movable table. The sliding table is pushed to the position below the probe, the situation that when an object is directly placed, the object collides with the probe and is damaged is avoided, and when the sliding table slides, the protection mechanism is driven to be unfolded for shading protection, and the interference effect of external light is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of optical profilers, in particular to a 3D optical profiler. Background Art

[0002] The optical profilometer is an instrument used to perform nanometer-level measurements on the surfaces of various precision devices. It is based on the principle of white light interferometry. The light emitted by the light source is divided into two beams after passing through a beam splitter prism. One beam is reflected back by the measured surface, and the other beam is reflected by a reference mirror. The two reflected beams eventually converge and interfere. The microscope converts the morphological features of the measured surface into interference fringe signals, and measures the three-dimensional morphology of the surface by measuring the changes in the interference fringes.

[0003] When using a current optical profiler, an object needs to be placed on a storage table below the probe. Improper operation may easily cause the object to collide with the probe, causing damage to the probe. Therefore, the present application proposes a 3D optical profiler. Utility Model Content

[0004] The purpose of this section is to summarize some aspects of the embodiments of the utility model and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the abstract of the specification and the name of the utility model of this application to avoid blurring the purpose of this section, the abstract of the specification and the name of the utility model, and such simplifications or omissions cannot be used to limit the scope of the utility model.

[0005] In view of the above problems and / or problems existing in the existing 3D optical profiler, the present utility model is proposed.

[0006] Therefore, the purpose of the utility model is to provide a 3D optical profiler. When placing an object, the slide of the supporting mechanism is pulled out, and after the object is placed on the movable table, the slide is pushed under the probe to avoid damage to the probe caused by the object colliding with the probe when the object is directly placed. Moreover, when the slide slides, the protective mechanism is driven to unfold to perform light-shielding protection and reduce the interference effect of external light.

[0007] In order to solve the above technical problems, according to one aspect of the present invention, the present invention provides the following technical solutions:

[0008] A 3D optical profiler, comprising:

[0009] The optical mechanism comprises a support platform, an optical scanning device, an optical probe and a first slide rail, wherein the optical scanning device is arranged on the support platform, the optical probe is arranged at the bottom of the optical scanning device, and the first slide rail is arranged on the top of the support platform;

[0010] A support mechanism is arranged on the first slide rail, and the support mechanism includes a slide table, a slide groove, a second slide rail, a movable table and a rack. The slide table is provided with a slide groove connected to the first slide rail at the bottom, the second slide rail is provided at the top of the slide table, the movable table is provided on the second slide rail, and racks are provided on both sides of the slide table;

[0011] A protection mechanism is connected with the rack.

[0012] As a preferred solution of a 3D optical profiler described in the utility model, the protective mechanism includes a bracket, a bellows, a spring, a rotating shaft, a gear and a pull rope, the bracket is arranged at the bottom of the optical scanning device, a bellows is arranged at the upper end of the bracket, a spring is arranged between the top of the bracket and the bottom of the bellows, a rotating shaft is arranged at the lower end of the bracket, a gear connected to a rack is arranged at one end of the rotating shaft, and a pull rope connected to the bottom of the bellows is wound around the other end of the rotating shaft.

[0013] As a preferred solution of the 3D optical profiler described in the utility model, when the slide table is located directly below the optical probe, the bellows is pulled down and unfolded to cover the outside of the movable table.

[0014] As a preferred solution of the 3D optical profiler described in the utility model, wherein: a handle is provided at the front end of the slide, and an anti-slip sheath is provided outside the handle.

[0015] As a preferred solution of the 3D optical profiler described in the utility model, wherein: a knob bolt connected to the first slide rail is provided at the front end of the top of the slide table.

[0016] As a preferred solution of the 3D optical profiler described in the utility model, wherein: the first slide rail and the second slide rail are both T-shaped rails, and the slide groove is a T-shaped groove.

[0017] As a preferred solution of the 3D optical profiler described in the utility model, an anti-slip pad is arranged on the top of the movable table.

[0018] Compared with the prior art: the utility model sets a movable supporting mechanism on the supporting table. When placing an object, the slide of the supporting mechanism is pulled out, and after the object is placed on the movable table, the slide is pushed under the probe to avoid the object colliding with the probe and causing damage when the object is directly placed. Moreover, when the slide slides, the protective mechanism is driven to unfold to perform light-shielding protection and reduce the interference effect of external light. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solution of the implementation of the utility model, the utility model will be described in detail below in combination with the drawings and detailed implementation. Obviously, the drawings described below are only some implementations of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

[0020] Figure 1 This is a schematic diagram of the shaft side structure of the utility model;

[0021] Figure 2 This is a schematic diagram of the optical mechanism structure of the utility model;

[0022] Figure 3 This is a schematic diagram of the support mechanism structure of the utility model;

[0023] Figure 4 It is a schematic diagram of the structure of the protection mechanism of the utility model.

[0024] In the figure: 100 optical mechanism, 110 support platform, 120 optical scanning device, 130 optical probe, 140 first slide rail, 200 support mechanism, 210 slide platform, 220 slide groove, 230 second slide rail, 240 movable platform, 250 rack, 260 handle, 300 protection mechanism, 310 bracket, 320 bellows, 330 spring, 340 rotating shaft, 350 gear, 360 pull rope. DETAILED DESCRIPTION

[0025] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below with reference to the accompanying drawings.

[0026] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific implementation methods disclosed below.

[0027] Secondly, the present invention is described in detail with reference to the schematic diagram. When describing the implementation of the present invention, for the sake of convenience, the cross-sectional diagram showing the device structure will not be partially enlarged according to the general proportion, and the schematic diagram is only an example, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0028] In order to make the purpose, technical solution and advantages of the present invention more clear, the implementation mode of the present invention will be further described in detail below with reference to the accompanying drawings.

[0029] The utility model provides a 3D optical profiler. When placing an object, the slide of the support mechanism is pulled out, and after the object is placed on the movable platform, the slide is pushed under the probe to avoid the object colliding with the probe and causing damage when the object is directly placed. In addition, when the slide slides, the protective mechanism is driven to unfold to perform light shielding protection and reduce the interference effect of external light. Please refer to Figure 1-Figure 4 , including: an optical mechanism 100, a supporting mechanism 200 and a protective mechanism 300.

[0030] The optical mechanism 100 includes a support platform 110, an optical scanning device 120, an optical probe 130 and a first slide rail 140. The optical scanning device 120 is arranged on the support platform 110, the optical probe 130 is arranged at the bottom of the optical scanning device 120, and the first slide rail 140 is arranged at the top of the support platform 110;

[0031] The optical scanning device 120 is a conventional 3D optical profiler, the optical probe 130 is a detection scanning probe, and the first slide rail 140 is a forward and backward sliding support structure.

[0032] The support mechanism 200 is arranged on the first slide rail 140, and the support mechanism 200 includes a slide table 210, a slide groove 220, a second slide rail 230, a movable platform 240 and a rack 250. The slide table 210 is provided with a slide groove 220 connected to the first slide rail 140 at the bottom, the second slide rail 230 is provided at the top of the slide table 210, the movable platform 240 is provided on the second slide rail 230, and racks 250 are provided on both sides of the slide table 210;

[0033] Among them, the first slide rail 140 and the second slide rail 230 both use T-shaped rails, the slide groove 220 uses a T-shaped groove, the slide table 210 slides back and forth on the first slide rail 140 through the slide groove 220, and the movable table 240 slides left and right on the second slide rail 230 to change the placement position of the items. The first slide rail 140 and the second slide rail 230 both use electric slide rails.

[0034] The protection mechanism 300 is connected to the rack 250. The protection mechanism 300 includes a bracket 310, a bellows 320, a spring 330, a rotating shaft 340, a gear 350 and a pull rope 360. The bracket 310 is arranged at the bottom of the optical scanning device 120. The bellows 320 is arranged at the upper end of the bracket 310. The spring 330 is arranged between the top of the bracket 310 and the bottom of the bellows 320. The rotating shaft 340 is arranged at the lower end of the bracket 310. The gear 350 connected to the rack 250 is arranged at one end of the rotating shaft 340. The pull rope 360 ​​connected to the bottom of the bellows 320 is wound around the other end of the rotating shaft 340.

[0035] In the process of sliding the slide 210 forward and backward, the slide 210 drives the gear 350 to rotate, and the gear 350 synchronously drives the rotating shaft 340 to rotate. The rotating shaft 340 winds up the pull rope 360, pulling the bellows 320 to unfold the bellows 320. After unfolding, the spring 330 is used to reset the bellows 320 to make it rebound and contract.

[0036] To achieve light shielding protection, when the slide 210 is located directly below the optical probe 130, the bellows 320 is pulled down and unfolded to cover the outside of the movable platform 240, shielding the outside of the object to prevent external light from affecting the detection effect of the probe.

[0037] Since the slide 210 needs to be pulled and the surface of the slide 210 is smooth, a handle 260 is provided at the front end of the slide 210, and an anti-slip cover is provided outside the handle 260. The slide 210 can be pulled by the handle 260 for easy operation.

[0038] As the spring 330 rebounds, it will pull the slide 210 . To prevent the slide 210 from moving during detection, a knob bolt connected to the first slide rail 140 is provided at the top front end of the slide 210 to fix the slide 210 on the first slide rail 140 .

[0039] To prevent items from sliding, an anti-skid pad is provided on the top of the movable table 240 to improve the stability of item placement.

[0040] During specific use, the slide 210 is pulled outward and the object is placed on the movable table 240. When the slide 210 is pulled outward, the slide 210 drives the gear 350 to rotate, and the gear 350 simultaneously drives the rotating shaft 340 to rotate. The rotating shaft 340 unwinds the pull rope 360, and the spring 330 is used to move the bellows 320 upward. Then, the slide 210 is pushed under the optical probe 130. When pushed in, the slide 210 drives the gear 350 to rotate, and the gear 350 simultaneously drives the rotating shaft 340 to rotate, and the rotating shaft 340 rewinds the pull rope 360. The pull rope 360 ​​is used to pull down the bellows 320 so that the bellows 320 is blocked outside the object to prevent external light from affecting the detection effect.

[0041] Although the present invention has been described above with reference to the embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present invention. In particular, as long as there is no structural conflict, the various features in the embodiments disclosed in the present invention may be used in combination with each other in any manner, and the fact that these combinations are not exhaustively described in this specification is only for the sake of omitting space and saving resources. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A 3D optical profiler, characterized in that: include: An optical mechanism (100) comprises a support platform (110), an optical scanning device (120), an optical probe (130) and a first slide rail (140), wherein the optical scanning device (120) is arranged on the support platform (110), the optical probe (130) is arranged at the bottom of the optical scanning device (120), and the first slide rail (140) is arranged at the top of the support platform (110); A support mechanism (200) is arranged on the first slide rail (140), the support mechanism (200) comprising a slide table (210), a slide groove (220), a second slide rail (230), a movable platform (240) and a rack (250), wherein the slide table (210) is provided with a slide groove (220) connected to the first slide rail (140) at the bottom, the second slide rail (230) is provided at the top of the slide table (210), the movable platform (240) is provided on the second slide rail (230), and racks (250) are provided on both left and right sides of the slide table (210); A protection mechanism (300) is connected to the rack (250).

2. A 3D optical profiler according to claim 1, characterized in that: The protection mechanism (300) comprises a bracket (310), a bellows (320), a spring (330), a rotating shaft (340), a gear (350) and a pull rope (360); the bracket (310) is arranged at the bottom of the optical scanning device (120); the bellows (320) is arranged at the upper end of the bracket (310); a spring (330) is arranged between the top of the bracket (310) and the bottom of the bellows (320); the rotating shaft (340) is arranged at the lower end of the bracket (310); a gear (350) connected to a rack (250) is arranged at one end of the rotating shaft (340); and a pull rope (360) connected to the bottom of the bellows (320) is wound around the other end of the rotating shaft (340).

3. A 3D optical profiler according to claim 2, characterized in that: When the slide table (210) is located directly below the optical probe (130), the bellows (320) is pulled down and unfolded to be sleeved on the outside of the movable table (240).

4. The 3D optical profiler according to claim 1, characterized in that: A handle (260) is provided at the front end of the slide platform (210), and an anti-slip protective cover is provided outside the handle (260).

5. The 3D optical profiler according to claim 1, characterized in that: A knob bolt connected to the first slide rail (140) is provided at the front end of the top of the slide platform (210).

6. The 3D optical profiler according to claim 1, characterized in that: The first slide rail (140) and the second slide rail (230) are both T-shaped rails, and the slide groove (220) is a T-shaped groove.

7. The 3D optical profiler according to claim 1, characterized in that: An anti-slip pad is provided on the top of the movable platform (240).

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