P-type silicon wafer production detection device
By designing a P-type silicon wafer production and detection device including a grab mechanism and a mobile laser detector, the problem that the laser detector position fixed in the prior art cannot achieve all-round detection, and the full-dimensional detection of P-type silicon wafers is achieved, and the detection results are more comprehensive.
Patent Information
- Application Number
- CN202420561587.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-22
- Publication Date
- 2025-03-11
- Estimated Expiration
- 2034-03-22
AI Technical Summary
The laser detector on the existing silicon wafer detection device is fixed, and it is impossible to achieve all-round detection of single crystal silicon wafers, resulting in insufficient comprehensive detection of the detection results.
A P-type silicon wafer production and detection device is designed, and the silicon wafer is grabbed by a grabber mechanism and flipped it to a certain angle. Combined with a moving laser detector, it realizes all-round detection of the silicon wafer.
Through the design of this device, all-round detection of P-type silicon wafers is achieved, and the detection results are more comprehensive and can adapt to silicon wafers of different sizes.
Smart Images
Figure CN222598755U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of silicon wafer detection, and specifically relates to a P-type silicon wafer production detection device. Background Art
[0002] The type of silicon wafer, P-type or N-type, depends on its doping elements. Pure silicon is a semiconductor, and its conductivity itself is not strong, but by adding a small amount of doping elements, its conductivity can be significantly improved. Therefore, after the silicon wafer is produced, it needs to be tested to ensure that its quality meets the standards. When testing silicon wafers, a laser detector can be used, but the position of the laser detector on the existing detection device is fixed. Due to the different sizes of silicon wafers, the laser detector cannot detect different positions of the silicon wafer, and cannot achieve all-round detection of single-crystal silicon wafers. The detection results are not comprehensive enough. For this reason, we propose a P-type silicon wafer production detection device. Utility Model Content
[0003] In order to solve the above problems, the technical solution adopted by the utility model is:
[0004] A P-type silicon wafer production inspection device comprises an inspection platform and a laser detector, wherein a conveyor belt is arranged on the inspection platform, and gantries are arranged on both sides of the inspection platform, top plates are fixedly connected to the top ends of the gantries on both sides, a display screen, a control panel and a controller are fixedly arranged on the top plate, a guide rail is fixedly arranged below the top plate, a slider is arranged on the guide rail, the slider is slidably connected to the guide rail, the slider is fixedly connected to the laser detector, a gripping mechanism is arranged on one side of the conveyor belt, the gripping mechanism comprises a column, a beam and a swivel arm, the two ends of the beam are respectively movably connected to the column and the swivel arm, and a suction cup is fixedly arranged on one end of the swivel arm.
[0005] Preferably, a driving motor is provided on the slider, a first rack is provided on the guide rail, a first gear is provided on the output shaft of the driving motor, the first gear is meshingly connected with the first rack, and the driving motor is electrically connected with the controller.
[0006] Preferably, a sliding sleeve is provided on the column, the sliding sleeve is fixedly connected to the crossbeam, a lifting motor is provided on the sliding sleeve, a second gear is provided on the output shaft of the lifting motor, a second rack is provided on the column, the second gear and the second rack are meshingly connected, and the lifting motor is electrically connected to the controller.
[0007] Preferably, a rotating motor is fixedly provided at the end of the crossbeam, the output shaft of the rotating motor is connected to the swing arm coupling, and the rotating motor is electrically connected to the controller.
[0008] Preferably, a slot hole is provided at the end of the rotating arm, a pull rod is provided in the slot hole, the pull rod is slidably connected to the slot hole, the end of the pull rod is fixedly connected to the suction cup, a spring is sleeved on the pull rod, the spring is provided between the rotating arm and the suction cup, a limit block is provided on the pull rod, and the limit block is larger than the inner diameter of the slot hole.
[0009] Preferably, the suction cup is a vacuum rubber suction cup.
[0010] Preferably, the driving motor and the lifting motor are servo motors.
[0011] Preferably, the rotating motor is an angular motor.
[0012] Compared with the prior art, the beneficial effects of the utility model are:
[0013] The utility model provides a P-type silicon wafer production detection device. A gripping mechanism is provided in the utility model. The produced P-type silicon wafer is gripped by the gripping mechanism and then flipped at a certain angle, so that the laser detector can detect the silicon wafer in all directions, and the detection result is more comprehensive. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 This is a schematic diagram of the structure of the utility model device;
[0015] Figure 2 This is a side structural diagram of the device of the utility model;
[0016] Figure 3 This is a schematic diagram of the rotating arm structure of the utility model.
[0017] In the figure: 1, testing table, 2, laser detector, 3, conveyor belt, 4, door frame, 5, top plate, 6, display screen, 7, control panel, 8, guide rail, 9, slider, 10, controller, 11, column, 12, beam, 13, rotating arm, 14, suction cup, 15, driving motor, 16, first rack, 17, first gear, 18, lifting motor, 19, second gear, 20, second rack, 21, sliding sleeve, 22, rotating motor, 23, slot, 24, pull rod, 25, spring, 26, limit block, 27, grabbing mechanism. DETAILED DESCRIPTION
[0018] The utility model is further described in detail below in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments. All other embodiments obtained by ordinary technicians in this field without making creative work are within the protection scope of the utility model.
[0019] like Figure 1 to Figure 3As shown, the utility model provides an embodiment of a P-type silicon wafer production detection device, including a detection platform 1 and a laser detector 2, a conveyor belt 3 is arranged on the detection platform 1, a door frame 4 is arranged on both sides of the detection platform 1, and a top plate 5 is fixedly connected to the top of the door frame 4 on both sides, and a display screen 6, a control panel 7 and a controller 10 are fixedly arranged on the top plate 5, a guide rail 8 is fixedly arranged below the top plate 5, a slider 9 is arranged on the guide rail 8, and the slider 9 is slidably connected to the guide rail 8, and the slider 9 is fixedly connected to the laser detector 2, and a gripping mechanism 27 is arranged on one side of the conveyor belt 3, and the gripping mechanism 27 includes a column 11, a beam 12 and a rotating arm 13, and the two ends of the beam 12 are respectively movably connected to the column 11 and the rotating arm 13, and one end of the rotating arm 13 is fixedly provided with a suction cup 14. In the embodiment of the utility model, the laser detector 2 is used to detect silicon wafers, and the laser detector 2 is fixedly arranged on the slider 9, and the slider 9 can move left and right along the guide rail 8, and is respectively used to detect P-type silicon wafers of different sizes. Since the sizes of P-type silicon wafers are different, when detecting P-type silicon wafers, after grabbing the P-type silicon wafers conveyed on the production line, the silicon wafers are rotated to a certain angle, and the laser detector 2 is used to perform all-round detection of the silicon wafers at all angles to improve the detection effect of the silicon wafers. In the embodiment of the utility model, the grabbing mechanism adopts a suction cup 14 structure, and the suction cup 14 is a vacuum rubber suction cup. The suction cup 14 is used to connect the vacuum generator, and the rubber suction cup can prevent damage to the silicon wafer grabbing, thereby improving practicality. In the embodiment of the utility model, the controller 10 adopts a PLC controller, which is used to control the motion program control of the conveyor belt 3, the grabbing mechanism 27 and the laser detector 2 respectively.
[0020] The conveyor belt 3 is used to transport the produced P-type silicon wafers. A driving motor is arranged on one side of the conveyor belt 3. The driving motor is electrically connected to the controller 10. A groove belt is arranged on the conveyor belt 3. The P-type silicon wafer is prevented from being placed in the groove belt of the conveyor belt 3. When inspection is required, the P-type silicon wafer is grabbed and inspected by the vacuum suction cup 14 of the grabbing mechanism 27.
[0021] The slider 9 is provided with a driving motor 15, the guide rail 8 is provided with a first rack 16, the output shaft of the driving motor 15 is provided with a first gear 17, the first gear 17 is meshed and connected with the first rack 16, and the driving motor 15 is electrically connected with the controller 10. The driving motor 15 is used to drive the slider 9 to move left and right along the guide rail 8, so that the laser detector 2 can detect silicon wafers at multiple angles in the direction of the guide rail.
[0022] The column 11 is provided with a sleeve 21, the sleeve 21 is fixedly connected to the beam 12, a lifting motor 18 is provided on the sleeve 21, a second gear 19 is provided on the output shaft of the lifting motor 18, a second rack 20 is provided on the column 11, the second gear 19 is meshed with the second rack 20, and the lifting motor 18 is electrically connected to the controller 10. In the embodiment of the utility model, the sleeve 21 is slidably connected to the column 11, and the lifting motor 18 is provided on the sleeve 21 for controlling the up and down movement of the beam 12. In the embodiment of the utility model, a detection sensor is provided on one side of the column 11, which is electrically connected to the controller 10 for detecting the P-type silicon wafer on the conveyor belt. During use, when the detection sensor detects the P-type silicon wafer on the conveyor belt 3 and runs to the bottom of the grabbing mechanism 27, the controller 10 issues a linkage control command, first controlling the conveyor belt 3 to stop running for a period of time. During this period of stoppage, the lifting motor 18 is controlled to drive the crossbeam 12 to move up and down a certain distance, and then the P-type silicon wafer is grabbed by controlling the vacuum suction cup for all-round detection of the P-type silicon wafer. The grabbing mechanism 27 grabs the P-type silicon wafer through the vacuum suction cup at the end, and after rotating a certain angle through the rotating arm 13, it just rotates to the bottom of the laser detector 2, and starts the laser detector 2 to detect the size of the silicon wafer, thereby realizing all-round detection of the silicon wafer.
[0023] A rotating motor 22 is fixedly provided at the end of the crossbeam 12, and the output shaft of the rotating motor 22 is connected to the coupling of the rotating arm 13, and the rotating motor 22 is electrically connected to the controller 10. The rotating motor 22 is an angle motor. The rotating motor 22 is used to control the rotation angle of the rotating arm 13. After the vacuum suction cup absorbs the P-type silicon wafer to be tested, the controller 10 controls the rotating motor 22 to rotate a certain angle. Therefore, the rotating motor 22 adopts an angle motor to facilitate the control of the rotation angle of the rotating arm 13. Under normal circumstances, the produced P-type silicon wafers are flatly conveyed on the conveyor belt 3. After the silicon wafers are grasped by the grasping mechanism 27, they are rotated 90 degrees. The side of the P-type silicon wafer can be inspected to achieve the purpose of all-round inspection.
[0024] like Figure 3As shown, a slot hole 23 is provided at the end of the rotating arm 13, a pull rod 24 is provided in the slot hole 23, the pull rod 24 is slidably connected to the slot hole 23, the end of the pull rod 24 is fixedly connected to the suction cup 14, a spring 25 is sleeved on the pull rod 24, the spring 25 is arranged between the rotating arm 13 and the suction cup 14, a stop block 26 is arranged on the pull rod 24, and the stop block 26 is larger than the inner diameter of the slot hole 23. The rotating arm 13 is a tubular structure, the slot hole 23 and the pull rod 24 are provided at the end of the rotating arm 13, and a stop block larger than the diameter of the slot hole 23 is provided at the end of the pull rod 24, so that the pull rod 24 can slide axially in the slot hole of the rotating arm 13, and a spring 25 is sleeved on the pull rod to alleviate the impact of the grabbing mechanism 27 on the silicon wafer when grabbing the silicon wafer.
[0025] The driving motor 15 and the lifting motor 18 are servo motors.
[0026] Of course, the above embodiments are not intended to limit the present invention, and the present invention is not limited to the above examples. Any changes, modifications, additions or substitutions made by technicians in this technical field within the essential scope of the present invention should also fall within the protection scope of the present invention.
Claims
1. A P-type silicon wafer production detection device, comprising a detection platform (1) and a laser detector (2), characterized in that: A conveyor belt (3) is arranged on the detection platform (1), and door frames (4) are arranged on both sides of the detection platform (1). Top plates (5) are fixedly connected to the top ends of the door frames (4) on both sides, and a display screen (6), a control panel (7) and a controller (10) are fixedly arranged on the top plate (5). A guide rail (8) is fixedly arranged below the top plate (5), and a slider (9) is arranged on the guide rail (8). The slider (9) is slidably connected to the guide rail (8), and the slider (9) is fixedly connected to the laser detector (2). A gripping mechanism (27) is arranged on one side of the conveyor belt (3), and the gripping mechanism (27) includes a column (11), a crossbeam (12) and a rotating arm (13). The two ends of the crossbeam (12) are movably connected to the column (11) and the rotating arm (13) respectively, and a suction cup (14) is fixedly arranged on one end of the rotating arm (13).
2. A P-type silicon wafer production detection device according to claim 1, characterized in that: The slider (9) is provided with a driving motor (15), the guide rail (8) is provided with a first rack (16), the output shaft of the driving motor (15) is provided with a first gear (17), the first gear (17) is meshingly connected with the first rack (16), and the driving motor (15) is electrically connected with the controller (10).
3. A P-type silicon wafer production detection device according to claim 1, characterized in that: The column (11) is provided with a sliding sleeve (21), the sliding sleeve (21) is fixedly connected to the crossbeam (12), a lifting motor (18) is provided on the sliding sleeve (21), a second gear (19) is provided on the output shaft of the lifting motor (18), a second rack (20) is provided on the column (11), the second gear (19) and the second rack (20) are meshingly connected, and the lifting motor (18) is electrically connected to the controller (10).
4. A P-type silicon wafer production detection device according to claim 3, characterized in that: A rotating motor (22) is fixedly arranged at the end of the crossbeam (12); an output shaft of the rotating motor (22) is connected to a coupling of a rotating arm (13); and the rotating motor (22) is electrically connected to a controller (10).
5. A P-type silicon wafer production detection device according to claim 1, characterized in that: A slot hole (23) is provided at the end of the rotating arm (13), a pull rod (24) is provided in the slot hole (23), the pull rod (24) is slidably connected to the slot hole (23), the end of the pull rod (24) is fixedly connected to the suction cup (14), a spring (25) is sleeved on the pull rod (24), the spring (25) is arranged between the rotating arm (13) and the suction cup (14), a limit block (26) is provided on the pull rod (24), and the limit block (26) is larger than the inner diameter of the slot hole (23).
6. A P-type silicon wafer production detection device according to claim 1, characterized in that: The suction cup (14) is a vacuum rubber suction cup.
7. A P-type silicon wafer production detection device according to claim 2, characterized in that: The driving motor (15) is a servo motor.
8. A P-type silicon wafer production detection device according to claim 3, characterized in that: The lifting motor (18) is a servo motor.
9. A P-type silicon wafer production detection device according to claim 4, characterized in that: The rotating motor (22) is an angle motor.