High and low temperature circulation bias insulation roll-to-roll coating cold roller structure

Abstract

The utility model discloses a high and low temperature circulation bias insulation roll-to-roll film coating cold roller structure which comprises a cold roller, the outer surface of the cold roller is a ceramic layer, six circulating water channels are designed on the inner side of the ceramic layer and are spirally distributed at equal intervals, two concentric hollow water channels are designed in a main shaft in the middle of the cold roller, and the hollow water channels are communicated with the ceramic layer. The power input ends of the cold rollers extend out of the vacuum cavity, high-rotating-speed vacuum sealing is achieved through magnetofluid, the power input ends of the cold rollers are provided with synchronous wheels and connected with synchronous wheels on servo motors through synchronous belts, the servo motors are installed on motor bases, and the synchronous wheels are connected with the synchronous wheels through synchronous belts. The tail of the power input end of the cold roller is connected with a water inlet and outlet pipe rotating joint which is communicated with the main water inlet channel and the main water return channel. The water inlet and outlet pipe rotating joint is externally connected with negative potential or positive potential of a bias device. Constant-temperature film forming control of the flexible base material is achieved, one-time forming of most processes is achieved, the film layer quality is guaranteed, and meanwhile high-yield mass production is stable.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating equipment, in particular to a high-low temperature cycle bias insulation roll-to-roll coating cold roller structure. Background Art

[0002] The application of vacuum coating technology in production is becoming more and more extensive, and vacuum evaporation coating is the earliest developed, most common and most widely used vacuum coating process. Continuous roll-to-roll vacuum coating equipment has gradually become popular due to its high speed, high efficiency and low cost, and is widely used in the production of large-area flexible films.

[0003] In recent years, the market demand for flexible substrate coating has increased significantly, and it is widely used in industries such as flexible packaging, electronic information, electromagnetic shielding films, new energy lithium batteries, and photovoltaic modules. In particular, with the rapid development of demand for new energy power batteries, the demand for preparing film layers on ultra-thin flexible base films has become increasingly evident. When evaporating and coating such ultra-thin flexible base films, the base film is prone to deformation and wrinkling in the high coating heating environment temperature, which seriously affects production efficiency and coating quality. At present, most of the industry has achieved mass production of thin films with single coating (film thickness of 50-100nm each time). In order to achieve the final mass production of thicker thick films (film thickness of 800-1000nm), multiple reciprocating coatings are required to accumulate thickness to achieve the final film thickness requirements. During this process, multiple film formations are required and the substrate needs to be reciprocated multiple times, which significantly increases the risk points: for example, due to multiple film formations, the interface contamination between the layers leads to purity differences; due to multiple film passes, the film layers are stretched and tensile multiple times, leading to micro cracks; due to multiple film passes, any failure caused by any one failure is overall failure, the stability and controllability are low, and the yield is difficult to control, etc. Utility Model Content

[0004] In response to the above problems, the utility model provides a negative potential or positive potential of an external bias device at the inlet and outlet water channel rotating joint at one end of a cold roller, so as to realize a high and low temperature cyclic bias insulation roll-to-roll coating cold roller structure by adjusting the negative potential or positive potential of the bias before or during the deposition of a film layer on the surface of a flexible substrate.

[0005] In order to solve the above technical problems, the technical solution adopted by the utility model is: a high and low temperature cycle bias insulation roll-to-roll coating cold roller structure, including a cold roller, a vacuum chamber door panel, a magnetic fluid, a magnetic fluid insulation sleeve, a bellows, a built-in front end bearing seat, a built-in end bearing seat, a synchronous wheel, an inlet and outlet water pipe rotary joint, a synchronous belt and a servo motor. The outer surface of the cold roller is a ceramic layer, and six circulating water channels are designed on the inner side of the ceramic layer. The six circulating water channels are equidistantly distributed in spirals, and the six water inlet channels are close to the vacuum chamber door panel, and the six water return channels are far away from the vacuum chamber door panel. Two concentric hollow water channels are designed in the middle spindle of the cold roller. Channels are respectively a total water inlet channel and a total water return channel. The shoulders at both ends of the cold roller are positioned and installed on two parallel supporting side plates fixed to the door plate of the vacuum chamber through a built-in front end bearing seat and a built-in end bearing seat. The power input end of the cold roller extends out of the vacuum chamber, and high-speed vacuum sealing is achieved through magnetic fluid. The power input end of the cold roller is designed to be equipped with a synchronous wheel and is connected to the synchronous wheel on the servo motor through a synchronous belt. The servo motor is installed on the motor seat. The tail of the power input end of the cold roller is connected to an inlet and outlet water pipe rotating joint to connect the total water inlet channel and the total water return channel. The inlet and outlet water pipe rotating joint is externally connected to the negative potential or positive potential of the bias device.

[0006] Furthermore, the ceramic layer has a finishing thickness of 200 μm after grinding, a surface hardness greater than 65 degrees, and a surface roughness better than 0.04 μm.

[0007] Furthermore, the inner ring of the built-in front end bearing seat and the inner ring of the built-in end bearing seat are both fixed with insulating sleeves that rotate with the bearings.

[0008] Furthermore, the magnetic fluid inner ring is sealed with a magnetic fluid insulating sleeve via an O-ring.

[0009] Furthermore, the magnetic fluid is connected to the vacuum chamber door panel by a bellows.

[0010] From the above description of the structure of the utility model, it can be seen that compared with the prior art, the utility model has the following advantages:

[0011] 1. The present invention realizes the purpose of close adsorption of the film and the cold roller by adjusting the negative potential or positive potential of the bias device externally connected to the water inlet and outlet rotary joint at one end of the cold roller before or during the deposition of the film layer on the surface of the flexible substrate, thereby greatly improving the heat exchange capacity.

[0012] 2. The cold roller system of the present invention is connected to the refrigeration / heating system for heat exchange. The cold roller system can be used to quickly cool down the flexible substrate during the vapor deposition process. The cooling effect is good, deformation of the flexible substrate is avoided, and the quality of the film after vapor deposition is guaranteed. In addition, when vapor deposition is not performed, the cold roller system starts heating to heat the cold roller to room temperature to prevent frosting of the cold roller.

[0013] 3. The cold roller of the present invention is designed with six spiral circulating water channels, which makes the cooling more uniform. At the same time, the cold roller system structure is relatively compact, which is convenient for assembly and maintenance, thereby improving production efficiency and reducing maintenance costs.

[0014] 4. The present invention realizes constant temperature film forming control of flexible substrates, ensures film forming quality and stable mass production, especially for products with high requirements for film thickness, it has more advantages in the coating process with higher film forming heat, effectively reduces the number of reciprocating coating times, and realizes one-time forming of most processes, while ensuring the quality of the film layer and stable high-yield mass production. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0016] Figure 1 It is a schematic diagram of a high and low temperature cycle bias insulation roll-to-roll coating cold roller structure of the utility model. DETAILED DESCRIPTION

[0017] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0018] Example

[0019] refer to Figure 1 , oneA high-low temperature cycle bias insulation roll-to-roll coating cold roller structure, including a cold roller 1, a vacuum chamber door panel 8, a magnetic fluid 6, a magnetic fluid insulation sleeve 7, a bellows 9, a built-in front end bearing seat 5, a built-in end bearing seat 14, a synchronous wheel 10, an inlet and outlet water pipe rotary joint 11, a synchronous belt 12 and a servo motor 13. The outer surface of the cold roller 1 is a ceramic layer 2 to ensure insulation from the film material, while being corrosion-resistant and high-temperature-resistant. Six circulating water channels 3 are designed on the inner side of the ceramic layer 2, and the six circulating water channels are equidistantly spirally distributed near the vacuum chamber door panel. 8 is a six-way water inlet channel 4, and away from the vacuum chamber door panel 8 is a six-way water return channel 15. Two concentric hollow water channels are designed in the middle spindle of the cold roller 1, which are a total water inlet channel 16 and a total water return channel 17. The cooling water of the cold roller 1 flows in from the water inlet port of the inlet and outlet water pipe rotary joint 11, flows through the total water inlet channel 16 and then is diverted to the six-way water inlet channels 4, and then one-to-one corresponds to the six-way circulating water channels 3 for spiral circulation, and then flows out from the six-way water return channels 15 to the total water return channel 17, and finally flows in from the water return port of the inlet and outlet water pipe rotary joint 11. The shoulders at both ends of the cold roller 1 are positioned and installed on two parallel supporting side plates fixed to the vacuum chamber door panel 8 through the built-in front end bearing seat 5 and the built-in end bearing seat 14, so as to ensure that the cold roller can run smoothly at a higher speed. The power input end of the cold roller extends out of the vacuum chamber, and high-speed vacuum sealing is achieved through the magnetic fluid 6. The magnetic fluid 6 is connected to the vacuum chamber door panel 8 with a bellows 9. The power input end of the cold roller 1 is designed to be equipped with a synchronous wheel 10 and is connected to the synchronous wheel on the servo motor 13 through a synchronous belt 12. The servo motor 13 is installed on the motor seat 18. The tail of the power input end of the cold roller 1 is connected with an inlet and outlet water pipe rotating joint 11 to connect the total water inlet channel 16 and the total return water channel 17. The inlet and outlet water pipe rotating joint 11 is externally connected to the negative potential or positive potential of the bias device, which can form a negative potential or a positive potential on the bottom surface of the ceramic layer 2, and can tightly adsorb the flexible substrate to the outer ceramic surface of the cold roller before or during the deposition of the film layer on the surface of the flexible substrate, thereby increasing the cooling contact area and greatly improving the heat exchange capacity.

[0020] The ceramic layer 2 has a finishing thickness of 200 μm after grinding, a surface hardness greater than 65 degrees, and a surface roughness better than 0.04 μm.

[0021] The inner rings of the built-in front end bearing seat 5 and the built-in end bearing seat 14 are both fixed with insulating sleeves that rotate with the bearings. The preferred material of the insulating sleeves is PEEK to ensure the insulation of the cold roller 1 and the vacuum cavity.

[0022] The inner ring of the magnetic fluid 6 is sealed with a magnetic fluid insulating sleeve 7 through an O-ring, and the preferred material is PEEK.

[0023] The present invention achieves the purpose of close adsorption of the film and the cold roller by adjusting the negative potential or positive potential of the bias voltage before or during the deposition of the film layer on the surface of the flexible substrate through the negative potential or positive potential of the inlet and outlet water channel rotary joint externally connected to the bias voltage device at one end of the cold roller, thereby greatly improving the heat exchange capacity; the cold roller system is connected to the refrigeration / heating system for cold and heat exchange, and the cold roller system can be used to quickly cool down the flexible substrate in the process of evaporation, with good cooling effect, avoiding deformation of the flexible substrate, and ensuring the quality of the film after evaporation. In addition, when no evaporation is performed, the cold roller system is started Dynamic heating heats the cold roller to room temperature to prevent frost on the cold roller; the cold roller is designed with six spiral circulating water channels for more uniform cooling. At the same time, the cold roller system has a compact structure, which is convenient for assembly and maintenance, thereby improving production efficiency and reducing maintenance costs; it achieves constant temperature film forming control of flexible substrates to ensure film quality and stable mass production, especially for products with high requirements for film thickness. The coating process with higher film forming heat has more advantages, effectively reducing the number of reciprocating coating times, achieving one-time molding of most processes, while ensuring the quality of the film layer and stable high-yield mass production.

[0024] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A high and low temperature cycle bias insulation roll-to-roll coating cold roller structure, characterized by: The invention comprises a cold roller (1), a vacuum chamber door panel (8), a magnetic fluid (6), a magnetic fluid insulating spacer (7), a bellows (9), a built-in front end bearing seat (5), a built-in end bearing seat (14), a synchronous wheel (10), an inlet and outlet water pipe rotary joint (11), a synchronous belt (12) and a servo motor (13). The outer surface of the cold roller (1) is a ceramic layer (2), and six circulating water channels (3) are designed on the inner side of the ceramic layer (2). The six circulating water channels are equidistantly distributed in spirals. The six water inlet channels (4) are close to the vacuum chamber door panel (8), and the six water return channels (15) are far away from the vacuum chamber door panel (8). Two concentric hollow water channels are designed in the middle main shaft of the cold roller (1), which are a total water inlet channel (16) and a total water return channel (17). ), the shoulders at both ends of the cold roller (1) are positioned and installed on two parallel supporting side plates fixed to the vacuum chamber door plate (8) through a built-in front end bearing seat (5) and a built-in end bearing seat (14), the power input end of the cold roller (1) extends out of the vacuum chamber, and a high-speed vacuum seal is achieved through a magnetic fluid (6), the power input end of the cold roller (1) is designed to be installed with a synchronous wheel (10) and is connected to the synchronous wheel on the servo motor (13) through a synchronous belt (12), and the servo motor (13) is installed on the motor seat (18), and the tail of the power input end of the cold roller (1) is connected to an inlet and outlet water pipe rotating joint (11) to connect the total water inlet channel (16) and the total water return channel (17), and the inlet and outlet water pipe rotating joint (11) is externally connected to the negative potential or positive potential of the bias device.

2. According to claim 1, a high and low temperature cycle bias insulation roll-to-roll coating cold roller structure, characterized in that: The ceramic layer (2) has a finishing thickness of 200 μm after grinding, a surface hardness greater than 65 degrees, and a surface roughness better than 0.04 μm.

3. According to claim 1, a high and low temperature cycle bias insulation roll-to-roll coating cold roller structure is characterized by: The inner ring of the built-in front end bearing seat (5) and the inner ring of the built-in end end bearing seat (14) are both fixed with insulating sleeves that rotate with the bearings.

4. According to claim 1, a high and low temperature cycle bias insulation roll-to-roll coating cold roller structure, characterized in that: The inner ring of the magnetic fluid (6) is sealed with a magnetic fluid insulating sleeve (7) via an O-ring.

5. According to claim 1, a high and low temperature cycle bias insulation roll-to-roll coating cold roller structure is characterized by: The magnetic fluid (6) and the vacuum chamber door panel (8) are connected via a bellows (9).

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