An integrated device for improving the surface smoothness of an aluminum layer

Abstract

The utility model belongs to vacuum evaporation technology field, and disclose an integrated device of improvement aluminium layer surface smoothness, including vacuum coating box, the inside of vacuum coating box is provided with second vacuum chamber and first vacuum chamber, the inside of second vacuum chamber and first vacuum chamber is provided with coiling roller and pay -off roll respectively, transmission has base material between pay -off roll and coiling roller, the inside of first vacuum chamber is provided with first evaporation boat and first crucible under base material. The utility model due to the setting of first evaporation boat and first crucible can realize the pre -plating of building foundation and the surface repair plating of base material side in order under the sealed environment of second vacuum chamber, can form smooth coating layer on the surface of base material efficiently, and the intervention time length of evaporation boat plating and crucible electron beam plating is reasonably configured, thereby help to realize the plating process of low cost, high efficiency and high quality as far as possible.

Description

Technical Field

[0001] This invention belongs to the field of vacuum evaporation technology, specifically an integrated device for improving the surface smoothness of aluminum layers. Background Technology

[0002] In vacuum evaporation processes, aluminum is one of the most commonly used metal coating materials. Currently, the mainstream evaporation sources are boat evaporation and crucible electron beam evaporation. The former typically uses a tungsten, molybdenum, or other metal boat to directly heat the aluminum material with a high current. It has the advantages of low cost, high efficiency, and suitability for large-area evaporation. However, it also suffers from poor process stability. During the heating process, the aluminum material will undergo violent boiling and splashing, causing molten aluminum droplets to splash onto the substrate, forming micron-sized bumps, which seriously affects the density, appearance uniformity, optical reflectivity, and barrier properties of the coating. The latter uses an electron beam to bombard the aluminum material in the crucible, causing it to melt and evaporate. It has the advantages of uniform heating, precise temperature control, stable process, and almost no splashing, resulting in a very smooth coating. However, it also has disadvantages such as high equipment investment and operating costs, and a relatively slow evaporation rate.

[0003] Therefore, it is necessary to develop an integrated device to improve the surface smoothness of aluminum layers in order to address the shortcomings of existing technologies. Utility Model Content

[0004] To address the problems mentioned in the background art, this utility model provides an integrated device for improving the surface smoothness of aluminum layers, which has advantages such as high quality and low cost.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an integrated device for improving the surface smoothness of an aluminum layer, comprising a vacuum coating box, wherein the vacuum coating box is provided with a second vacuum chamber and a first vacuum chamber, wherein a take-up roller (5) is provided inside the second vacuum chamber, and a feed roller (4) is provided inside the first vacuum chamber, wherein a substrate is transferred between the feed roller and the take-up roller, wherein a first evaporation boat and a first crucible are provided inside the first vacuum chamber and located below the substrate, wherein a second evaporation boat and a second crucible are provided inside the second vacuum chamber, and a coating guide roller is provided above the first evaporation boat, the first crucible, the second evaporation boat and the second crucible; The substrate is transported between the feeding roller and the winding roller, and passes sequentially through the first evaporation boat, the first crucible, the second evaporation boat, and the second crucible via the coating guide roller. One side of the substrate passes sequentially through the coating guide roller above the first evaporation boat and the first crucible in the first vacuum chamber, and then sequentially through the two coating guide rollers above the second evaporation boat and the second crucible.

[0006] Furthermore, both the second vacuum chamber and the first vacuum chamber are equipped with a number of guide rollers and tension rollers. When the substrate is transferred between the feeding roller, the coating guide roller and the winding roller, it passes through the number of guide rollers in sequence and passes through a predetermined area. The number of tension rollers keep the substrate in a taut state when it passes through different areas.

[0007] Furthermore, the vacuum coating chamber has a door panel on its front side, a hinge is connected to one side of the vacuum coating chamber and the door panel, and a connector is connected to the other side of the vacuum coating chamber and the door panel. One side of the door panel is hinged to the vacuum coating chamber via the hinge, and the other side of the door panel is connected to the vacuum coating chamber via the connector.

[0008] Furthermore, a limiting groove is provided at the front end of the door panel, the lower end of the limiting groove extends to the bottom of the door panel, and a linkage plate that moves up and down is slidably engaged inside the limiting groove, and a handle is connected to the front of the linkage plate.

[0009] Furthermore, the vacuum coating chamber has sliding grooves on both sides, and the door panel has slots on both sides. The rear ends of the hinge and connector are slidably connected to the sliding grooves on both sides of the vacuum coating chamber, and the front ends of the hinge and connector are connected to the slots on both sides of the door panel.

[0010] Furthermore, the hinge includes a first limiting slider that is slidably engaged in a groove on one side of the vacuum coating chamber. The front end of the first limiting slider is hinged to a hinge rod. The front end of the hinge rod passes through the groove and extends to the front of the vacuum coating chamber, and is movably connected to a slot on one side of the door panel.

[0011] Furthermore, the connector includes a second limiting slider that is slidably engaged in a groove on the other side of the vacuum coating chamber. A positioning spring is connected to the rear end of the second limiting slider. The rear end of the positioning spring is embedded in the vacuum coating chamber and fixedly connected to the vacuum coating chamber.

[0012] Furthermore, the front end of the second limiting slider is connected to a second hinge rod, the front end of the second hinge rod passes through the slide groove and extends to the front of the vacuum coating box, and is connected to a linkage block, which is engaged in a slot on the other side of the door panel.

[0013] Furthermore, a guide groove is provided on the top of the linkage block, and a guide push rod is inserted into the inside of the guide groove from top to bottom. A connecting rod is connected to the other side of the upper end of the guide push rod, and the front end of the connecting rod extends into the limiting groove and is connected to the back of the linkage plate.

[0014] Furthermore, the upper end of the inner cavity of the guide groove away from the second hinge rod is a smooth inclined surface, and its lower end is a vertical smooth surface. The lower end of the guide push rod away from the second hinge rod is a smooth inclined surface, and its upper end is a vertical surface. The inclined surface of the outer surface of the guide push rod is in contact with the inclined surface of the inner cavity of the guide groove, and the vertical surface of the outer surface of the guide push rod is in contact with the vertical surface of the inner cavity of the guide groove.

[0015] Compared with the prior art, the beneficial effects of this utility model are as follows: Due to the arrangement of the first evaporation boat and the first crucible, this invention can achieve pre-plating of the substrate and surface repair plating on one side in a sealed environment of the second vacuum chamber. This not only efficiently forms a smooth coating layer on the substrate surface, but also rationally configures the intervention time of the evaporation boat plating and the crucible electron beam plating, thereby helping to achieve a low-cost, high-efficiency and high-quality coating process as much as possible.

[0016] Due to the arrangement of the guide roller and tension roller, this utility model can achieve the following: the two sides of the substrate are respectively controlled to correspond to the first evaporation boat and the first crucible, and the second evaporation boat and the second crucible in the second vacuum chamber and the first vacuum chamber, respectively. Thus, the first evaporation boat and the second evaporation boat are used to pre-plate the two sides of the substrate in sequence, and the first crucible and the second crucible are used to repair the two sides of the substrate in sequence, so as to achieve the rationality and tightness of the continuous double-sided coating structure configuration.

[0017] This invention controls the travel speed of the substrate and the time it takes to pass through the first evaporation boat and the first crucible or the second evaporation boat and the second crucible, thereby controlling the duration of evaporation boat deposition and crucible electron beam deposition. This allows most of the deposition work to be completed through evaporation boat deposition, while the remaining small amount of repair deposition is completed through crucible electron beam deposition. This ensures the coating effect while greatly reducing the cost of vacuum coating.

[0018] Due to the hinge design, this invention allows the door panel to remain connected to the vacuum coating chamber for easy opening and closing. Furthermore, with the assistance of the connector, the door panel, after being placed against the surface of the vacuum coating chamber, can move horizontally backward under the negative pressure of the second and first vacuum chambers within the chamber, further improving the sealing and bonding effect between the door panel and the vacuum coating chamber.

[0019] Due to the design of the guide groove, the inclined surfaces on the inner wall and outer surface of the guide push rod cooperate to push the linkage block forward when the guide push rod moves down along the guide groove. This stretches the positioning spring and increases its elastic restoring force, thereby ensuring that after the door panel is released, the door panel automatically seals and adheres to the surface of the vacuum coating box under the elastic restoring force of the positioning spring.

[0020] Due to the vertical surface at the bottom of the inclined surface of the guide push rod's inner cavity, this utility model allows the guide push rod to move downwards in cooperation with the vertical surface at the top of the inclined surface of the guide push rod's bottom. Through the action of the inclined surface of the latter, the linkage block is pushed forward. Then, with the contact action of the vertical surfaces of the two, the linkage block remains stationary, achieving an automatic locking effect. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the secondary vapor deposition process of this utility model; Figure 2 This is a structural schematic diagram of the present invention. Figure 3 This is a schematic diagram of the structure of the hinge component of this utility model; Figure 4 This is a schematic diagram of the structure of the connector of this utility model; Figure 5 This is a cross-sectional schematic diagram of the guide groove of this utility model.

[0022] In the diagram: 1. Vacuum coating chamber; 2. Second vacuum chamber; 3. First vacuum chamber; 4. Feeding roller; 5. Rewinding roller; 6. Substrate; 7. Coating guide roller; 8. First evaporation boat; 9. First crucible; 10. Second evaporation boat; 11. Second crucible; 12. Guide roller; 13. Tensioning roller; 14. Hinge; 141. First limiting slider; 142. Hinge rod; 15. Connector; 151. Positioning spring; 152. Second limiting slider; 153. Second hinge rod; 154. Linkage block; 155. Guide groove; 156. Guide push rod; 157. Connecting rod; 16. Limiting groove; 17. Linkage plate; 18. Handle; 19. Door panel. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] like Figures 1 to 5As shown, this utility model provides an integrated device for improving the surface smoothness of aluminum layers, including a vacuum coating box 1. The vacuum coating box 1 is provided with a second vacuum chamber 2 and a first vacuum chamber 3. The second vacuum chamber 2 is provided with a take-up roller 5. The first vacuum chamber 3 is provided with a feed roller 4. A substrate 6 is transferred between the feed roller 4 and the take-up roller 5. The first vacuum chamber 3 is provided with a first evaporation boat 8 and a first crucible 9 located below the substrate 6. The second vacuum chamber 2 is provided with a second evaporation boat 10 and a second crucible 11. Coating guide rollers 7 are provided above the first evaporation boat 8, the first crucible 9, the second evaporation boat 10, and the second crucible 11. The substrate 6 is conveyed between the feeding roller 4 and the winding roller 5, and passes sequentially through the first evaporation boat 8, the first crucible 9, the second evaporation boat 10 and the second crucible 11 via the coating guide roller 7. One side of the substrate 6 passes sequentially through the coating guide roller 7 above the first evaporation boat 8 and the first crucible 9 in the first vacuum chamber 3, and the other side of the substrate 6 passes sequentially through the coating guide roller 7 above the second evaporation boat 10 and the second crucible 11 in the second vacuum chamber 2. Due to the arrangement of the first evaporation boat 8 and the first crucible 9, the pre-plating of the substrate 6 and the surface repair plating can be carried out sequentially on one side of the substrate 6 in the sealed environment of the second vacuum chamber 2. This not only efficiently forms a smooth coating layer on the surface of the substrate 6, but also reasonably configures the intervention time of the evaporation boat plating and the crucible electron beam plating, thereby helping to achieve a low-cost, high-efficiency and high-quality coating process as much as possible. By controlling the travel speed of the substrate 6 and the duration of its passage through the first evaporation boat 8 and the first crucible 9 or the second evaporation boat 10 and the second crucible 11, the duration of evaporation boat plating and crucible electron beam plating is achieved. This allows most of the deposition work to be completed through evaporation boat plating, while the remaining small amount of repair plating is completed through crucible electron beam plating. This ensures the coating effect while greatly reducing the cost of vacuum coating.

[0025] The second vacuum chamber 2 and the first vacuum chamber 3 are each equipped with a number of guide rollers 12 and tension rollers 13. When the substrate 6 is transferred between the feeding roller 4, the coating guide roller 7 and the winding roller 5, it passes through a number of guide rollers 12 and passes through a predetermined area in sequence. The number of tension rollers 13 keep the substrate 6 in a tensioned state when it passes through different areas. Due to the arrangement of guide roller 12 and tension roller 13, with their cooperation, it is possible to control the two sides of the substrate 6 in the second vacuum chamber 2 and the first vacuum chamber 3 to correspond sequentially with the first evaporation boat 8 and the first crucible 9, as well as the second evaporation boat 10 and the second crucible 11. Thus, the first evaporation boat 8 and the second evaporation boat 10 are used to pre-plate the two sides of the substrate 6 in sequence, and the first crucible 9 and the second crucible 11 are used to repair the two sides of the substrate 6 in sequence, thereby achieving the rationality and tightness of the continuous double-sided coating structure configuration.

[0026] The vacuum coating chamber 1 has a door panel 19 on its front side. A hinge 14 is connected to one side of the vacuum coating chamber 1 and the door panel 19, and a connector 15 is connected to the other side of the vacuum coating chamber 1 and the door panel 19. One side of the door panel 19 is hinged to the vacuum coating chamber 1 through the hinge 14, and the other side of the door panel 19 is connected to the vacuum coating chamber 1 through the connector 15.

[0027] The door panel 19 has a limiting groove 16 at its front end, the lower end of the limiting groove 16 extends to the bottom of the door panel 19, and a linkage plate 17 that moves up and down is slidably engaged inside the limiting groove 16. A handle 18 is connected to the front of the linkage plate 17.

[0028] The vacuum coating chamber 1 has sliding grooves on both sides, and the door panel 19 has slots on both sides. The rear ends of the hinge 14 and the connector 15 are slidably connected to the sliding grooves on both sides of the vacuum coating chamber 1, and the front ends of the hinge 14 and the connector 15 are connected to the slots on both sides of the door panel 19.

[0029] The hinge 14 includes a first limiting slider 141 that is slidably engaged in a slide groove on one side of the vacuum coating chamber 1. The front end of the first limiting slider 141 is hinged to a hinge rod 142. The front end of the hinge rod 142 passes through the slide groove and extends to the front of the vacuum coating chamber 1, and is movably connected to a slot on one side of the door panel 19. Due to the hinge 14, the door panel 19 can always be connected to the vacuum coating chamber 1, making it easy to open and close. At the same time, with the cooperation of the connector 15, it can ensure that after the door panel 19 is attached to the surface of the vacuum coating chamber 1, under the negative pressure in the second vacuum chamber 2 and the first vacuum chamber 3 in the vacuum coating chamber 1, the door panel 19 can move horizontally backward, further improving the sealing and bonding effect between it and the vacuum coating chamber 1.

[0030] The connector 15 includes a second limiting slider 152 that is slidably engaged in a groove on the other side of the vacuum coating chamber 1. The rear end of the second limiting slider 152 is connected to a positioning spring 151. The rear end of the positioning spring 151 is embedded in the vacuum coating chamber 1 and fixedly connected to the vacuum coating chamber 1.

[0031] The front end of the second limiting slider 152 is connected to the second hinge rod 153. The front end of the second hinge rod 153 passes through the slide groove and extends to the front of the vacuum coating box 1, and is connected to the linkage block 154. The linkage block 154 is engaged in the slot on the other side of the door panel 19.

[0032] The top of the linkage block 154 is provided with a guide groove 155. A guide push rod 156 is inserted into the inside of the guide groove 155 from top to bottom. A connecting rod 157 is connected to the other side of the upper end of the guide push rod 156. The front end of the connecting rod 157 extends into the limiting groove 16 and is connected to the back of the linkage plate 17. Due to the setting of the guide groove 155, with the cooperation of the inclined surfaces on the opposite side of its inner wall and the outer surface of the guide push rod 156, when the guide push rod 156 moves down along the guide groove 155, it can push the linkage block 154 forward under the action of the inclined surfaces of the two contact surfaces, and stretch the positioning spring 151 to increase its elastic restoring force, thereby ensuring that after the door panel 19 is released, it can automatically seal and adhere to the surface of the vacuum coating box 1 under the action of the elastic restoring force of the positioning spring 151.

[0033] The upper end of the inner cavity of the guide groove 155 away from the second hinge rod 153 is a smooth inclined surface, and its lower end is a vertical smooth surface. The lower end of the guide push rod 156 away from the second hinge rod 153 is a smooth inclined surface, and its upper end is a vertical surface. The inclined surface of the outer surface of the guide push rod 156 is in contact with the inclined surface of the inner cavity of the guide groove 155, and the vertical surface of the outer surface of the guide push rod 156 is in contact with the vertical surface of the inner cavity of the guide groove 155. Due to the vertical surface at the bottom of the inclined surface of the inner cavity of the guide push rod 156, the guide push rod 156 can move downwards with the cooperation of the vertical surface at the top of the inclined surface of the bottom of the guide push rod 156. Then, under the action of the inclined surface of the latter, the linkage block 154 can be pushed forward. With the cooperation of the vertical surfaces of the two, the linkage block 154 can be kept stationary, thus achieving the effect of automatic locking.

[0034] Working principle and usage process of this utility model: With the cooperation of feeding roller 4, winding roller 5, coating guide roller 7, guide roller 12 and tension roller 13, the substrate 6 is placed in the first vacuum chamber 3 and the second vacuum chamber 2 in the vacuum coating box 1, and it is ensured that the two sides of the substrate 6 correspond to the first evaporation boat 8 and the first crucible 9 in the first vacuum chamber 3 and the second evaporation boat 10 and the second crucible 11 in the second vacuum chamber 2 respectively. Then, with the cooperation of hinge 14, hinge 14 is flipped so that the slot on the other side is fitted onto the outside of the corresponding linkage block 154. Then, the door panel 19 is pushed to fit against the front surface of the vacuum coating chamber 1. Then, by sliding the linkage plate 17 downward along the limiting groove 16 through the handle 18, several connecting rods 157 can be moved downward along the door panel 19, and the guide push rod 156 is pushed so that its lower end is inserted into the guide groove 155 in the linkage block 154. As the guide push rod 156 continues to move downward, the linkage block 154 moves forward relative to the door panel 19 along the slot in the door panel 19 with the cooperation of the inclined surface corresponding to the inner wall of the guide push rod 156 at its lower end. Under the restriction of the door panel 19 by the vacuum coating chamber 1, the forward-moving linkage block 154 can stretch the positioning spring 151 through the second hinge rod 153 and the second limit slider 152 and increase its elastic restoring force until the vertical surface of the side of the guide push rod 156 is in contact with the vertical surface of the lower end of the inner wall of the guide groove 155. At this time, releasing the handle 18 can make the guide push rod 156 firmly inserted into the inside of the guide groove 155 under the cooperation of the vertical surface of the guide push rod 156 and the guide groove 155. Thus, the elastic restoring force of the positioning spring 151 can pull the door panel 19 through the connector 15 to make it firmly attached to the front end of the vacuum coating chamber 1. Then, the vacuum level in the second vacuum chamber 2 and the first vacuum chamber 3 is evacuated to 3.0 × 10⁻. 4 Below Pa, under negative pressure, the door panel 19 moves further horizontally backward, and with the cooperation of the sealing ring, it is tightly fitted together with the vacuum coating box 1, thereby ensuring the sealing effect in the second vacuum chamber 2 and the first vacuum chamber 3. Finally, the equipment is turned on for continuous vapor deposition. When one side of the substrate 6 passes the corresponding first evaporation boat 8, the substrate 6 is pre-deposited on that side under the action of the first evaporation boat 8, etc., that is, vapor deposition is carried out through the first evaporation boat 8. During this period, the speed of the substrate 6 is controlled to be maintained at 22.5m / s, and the temperature inside the first evaporation boat 8 is adjusted to be above the aluminum wire evaporation temperature by controlling the current in the first evaporation boat 8. Under these conditions, continuous vapor deposition is carried out to form a preliminary aluminum layer with a thickness of about 0.7μm on the substrate 6. When the substrate 6 with the pre-plated preliminary aluminum layer film on this side moves to above the first crucible 9, an additional repair plating layer can be applied to the outer side of the 0.7μm preliminary aluminum layer pre-plated on this side of the substrate 6 by electron beam evaporation equipped with the first crucible 9. By controlling the speed of the substrate 6 and the power of the electron beam, the preset repair plating can be achieved, so that a 0.3μm repair aluminum layer is deposited on the surface of the preliminary aluminum layer of the substrate 6, thereby ensuring the smoothness of the green coating surface. Subsequently, with the cooperation of guide roller 12 and tension roller 13, the other side of substrate 6 is aligned with the second evaporation boat 10 and the second crucible 11 below in the second vacuum chamber 2. Similarly, the preliminary aluminum layer pre-plating and the repair aluminum layer repair plating are carried out in sequence.

[0035] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0036] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An integrated device for improving the surface smoothness of aluminum layers, comprising a vacuum coating chamber (1), characterized in that: The vacuum coating box (1) is provided with a second vacuum chamber (2) and a first vacuum chamber (3). The second vacuum chamber (2) is provided with a take-up roller (5), and the first vacuum chamber (3) is provided with a feed roller (4). The feed roller (4) and the take-up roller (5) transfer a substrate (6). The first vacuum chamber (3) is provided with a first evaporation boat (8) and a first crucible (9) located below the substrate (6), and the second vacuum chamber (2) is provided with a second evaporation boat (10) and a second crucible (11). A coating guide roller (7) is provided above the first evaporation boat (8), the first crucible (9), the second evaporation boat (10) and the second crucible (11). The substrate (6) is transported between the feeding roller (4) and the winding roller (5), and passes sequentially through the first evaporation boat (8), the first crucible (9), the second evaporation boat (10) and the second crucible (11) via the coating guide roller (7). One side of the substrate (6) passes sequentially through the coating guide roller (7) above the first evaporation boat (8) and the first crucible (9) in the first vacuum chamber (3), and then sequentially through the coating guide roller (7) above the second evaporation boat (10) and the second crucible (11).

2. The integrated device for improving the surface smoothness of an aluminum layer according to claim 1, characterized in that: The second vacuum chamber (2) and the first vacuum chamber (3) are each provided with a number of guide rollers (12) and tension rollers (13). When the substrate (6) is transferred between the feeding roller (4), the coating guide roller (7) and the winding roller (5), it passes through a number of guide rollers (12) in sequence and passes through a predetermined area. The tension rollers (13) keep the substrate (6) in a tensioned state when it passes through different areas.

3. The integrated device for improving the surface smoothness of an aluminum layer according to claim 1, characterized in that: The vacuum coating chamber (1) has a door panel (19) on its front side. A hinge (14) is connected to one side of the vacuum coating chamber (1) and the door panel (19), and a connector (15) is connected to the other side of the vacuum coating chamber (1) and the door panel (19). One side of the door panel (19) is hinged to the vacuum coating chamber (1) through the hinge (14), and the other side of the door panel (19) is connected to the vacuum coating chamber (1) through the connector (15).

4. The integrated device for improving the surface smoothness of an aluminum layer according to claim 3, characterized in that: The front end of the door panel (19) is provided with a limiting groove (16), the lower end of the limiting groove (16) extends to the bottom of the door panel (19), and the inside of the limiting groove (16) is slidably engaged with a linkage plate (17) that moves up and down. The front of the linkage plate (17) is connected to a handle (18).

5. The integrated device for improving the surface smoothness of an aluminum layer according to claim 3, characterized in that: The vacuum coating chamber (1) has sliding grooves on both sides, and the door panel (19) has slots on both sides. The rear ends of the hinge (14) and connector (15) are slidably connected in the sliding grooves on both sides of the vacuum coating chamber (1), and the front ends of the hinge (14) and connector (15) are connected in the slots on both sides of the door panel (19).

6. The integrated device for improving the surface smoothness of an aluminum layer according to claim 3, characterized in that: The hinge (14) includes a first limiting slider (141) that is slidably engaged in a groove on one side of the vacuum coating box (1). The front end of the first limiting slider (141) is hinged to a hinge rod (142). The front end of the hinge rod (142) passes through the groove and extends to the front of the vacuum coating box (1), and is movably connected to a slot on one side of the door panel (19).

7. The integrated device for improving the surface smoothness of an aluminum layer according to claim 4, characterized in that: The connector (15) includes a second limiting slider (152) that is slidably engaged in a groove on the other side of the vacuum coating box (1). The rear end of the second limiting slider (152) is connected to a positioning spring (151). The rear end of the positioning spring (151) is embedded in the vacuum coating box (1) and fixedly connected to the vacuum coating box (1).

8. The integrated device for improving the surface smoothness of an aluminum layer according to claim 7, characterized in that: The front end of the second limiting slider (152) is connected to a second hinge rod (153). The front end of the second hinge rod (153) passes through the slide groove and extends to the front of the vacuum coating box (1), and is connected to a linkage block (154). The linkage block (154) is engaged in the slot on the other side of the door panel (19).

9. The integrated device for improving the surface smoothness of an aluminum layer according to claim 8, characterized in that: The top of the linkage block (154) is provided with a guide groove (155), and a guide push rod (156) is inserted into the inside of the guide groove (155) from top to bottom. A connecting rod (157) is connected to the other side of the upper end of the guide push rod (156). The front end of the connecting rod (157) extends into the limiting groove (16) and is connected to the back of the linkage plate (17).

10. The integrated device for improving the surface smoothness of an aluminum layer according to claim 9, characterized in that: The upper end of the inner cavity of the guide groove (155) away from the second hinge rod (153) is a smooth inclined surface, and its lower end is a vertical smooth surface. The lower end of the guide push rod (156) away from the second hinge rod (153) is a smooth inclined surface, and its upper end is a vertical surface. The inclined surface of the outer surface of the guide push rod (156) is in contact with the inclined surface of the inner cavity of the guide groove (155), and the vertical surface of the outer surface of the guide push rod (156) is in contact with the vertical surface of the inner cavity of the guide groove (155).

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