Coating device and coating method

By setting up an anode device in the vacuum chamber to regulate the plasma density on the plasma raceway, the problem of poor axial film thickness uniformity of the target material was solved, thereby improving the utilization rate of the target material and the film thickness uniformity.

WO2025232461A1 Publication Date: 2025-11-13SUZHOU MAXWELL TECH CO LTD
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Patent Information

Application Number
PCT/CN2025/088441
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-05-07
Filing Date
2025-04-11
Publication Date
2025-11-13

AI Technical Summary

Technical Problem

During large-area coating, the film thickness uniformity of the target material along the axial direction is poor, and the etching rate at the end of the target material is much higher than that at the middle, resulting in low target material utilization.

Method used

An anode device is set in the vacuum chamber, including a first anode and a second anode arranged sequentially along the axial direction of the target material. The potential of the first anode is higher than that of the second anode. By adjusting the plasma density on the plasma raceway, the difference in etching rate between the end and middle of the target material is reduced.

Benefits of technology

The utilization rate of the target material was optimized, the uniformity of film thickness along the axial direction of the target material was improved, the difference in etching rate between the end and middle of the target material was reduced, and the utilization rate of the target material was improved.

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Abstract

A coating device and a coating method. The coating device comprises a vacuum chamber, a cathode apparatus, and an anode apparatus; a target of the cathode apparatus is rotatably mounted within the vacuum chamber; the target is insulated from the vacuum chamber; an anode body of the anode apparatus is located inside the vacuum chamber and is located on one side of the target; the anode body is arranged adjacent to a first-side track formed on the target; the anode body is insulated from the vacuum chamber; the anode body comprises a first anode and a second anode which are sequentially arranged in the axial direction of the target; the first anode and the second anode both extend in the axial direction of the target; the potential of the first anode is higher than that of the second anode; and the first anode is located on the side of the tail end of the first-side track in a drift current direction, and the second anode is located on the side of the head end of the first-side track in the drift current direction.
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