A washing and cooling device for a wafer dicing machine tool and a wafer dicing machine

Abstract

The present invention relates to the technical field of precision cutting and dicing equipment, and specifically discloses a flushing and cooling device for a dicing machine tool and a dicing machine, wherein the flushing and cooling device for the tool comprises a cover and a U-shaped nozzle, wherein the cover is fixed to the front end of the spindle of the dicing machine and is arranged above the blade; the U-shaped nozzle is sequentially divided into a first nozzle section, a bending section, and a second nozzle section, wherein the opening end of the first nozzle section is arranged at the end of the cover and is connected to a cooling medium source; the blade is located in the middle of the U-shaped nozzle; the walls of the first nozzle section and the second nozzle section are provided with a plurality of spray holes facing the edge of the blade, and a nozzle facing the bottom of the blade is arranged in the middle of the bending section. The present invention can cool both axial sides of the blade while flushing and cooling the blade radially, and has a better cooling effect, and does not require an additional flushing device, and has a simple structure and is easy to install.

Description

Technical Field

[0001] The present invention relates to the technical field of precision cutting and dicing equipment, and in particular to a washing and cooling device for a dicing machine tool and a dicing machine. Background Art

[0002] When the dicing machine is in operation, the blade will generate a lot of heat when dicing the workpiece, which will rapidly increase the temperature of the blade and the workpiece. Excessive temperature will seriously affect the dicing quality and greatly shorten the service life of the blade. In order to reduce the temperature of the blade and the workpiece, cooling medium needs to be sprayed on the blade and the workpiece to cool them during the dicing process. At the same time, the dicing machine will generate waste during operation. The presence of waste will have an adverse effect on the dicing quality of the workpiece, so the waste needs to be flushed while the dicing machine is working.

[0003] At present, the cooling and flushing of the blade on the dicing machine are usually divided into two dedicated parts, one for spraying the cooling medium on the axial side, and the other for spraying the flushing medium radially on the bottom of the blade. The structure is complex, the installation is cumbersome, and the operation is inconvenient. The cooling part can usually only cool one side of the axial direction, and the cooling effect is not ideal. Summary of the invention

[0004] The object of the present invention is to provide a rinsing and cooling device for dicing machine tools and a dicing machine with a simple structure, good cooling effect, and no need for a special rinsing device, aiming to solve the technical problems raised in the background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a flushing and cooling device for a dicing machine tool, comprising a cover and a U-shaped nozzle, wherein the cover is fixed to the front end of the main shaft of the dicing machine and is arranged above the blade; the U-shaped nozzle is divided into a first nozzle section, a bending section and a second nozzle section in sequence, the first nozzle section is open at one end away from the bending section, and the second nozzle section is closed at one end away from the bending section; the open end of the first nozzle section is arranged at the end of the cover and is connected to a cooling medium source; the blade is located in the middle of the U-shaped nozzle, so that the first nozzle section and the second nozzle section are respectively located on both sides of the axial direction of the blade, and the bending section is located on one side of the radial direction of the blade; a plurality of spray holes facing the lower edge of the blade are provided on the tube walls of the first nozzle section and the second nozzle section, and a nozzle facing the bottom of the blade is provided in the middle of the bending section.

[0006] In the above structure, the cooling medium can be introduced into the axial sides of the blade for cooling through the U-shaped pipe, and the cooling medium can be introduced into the radial direction of the blade for cooling and flushing.

[0007] A further configuration is that the first nozzle section and the second nozzle section of the U-shaped nozzle are both arc-shaped, and the middle part of the first nozzle section or the second nozzle section is lower than the two ends. The arc-shaped U-shaped nozzle can make the spray holes on the first nozzle section and the second nozzle section closer to the bottom edge of the blade, which can improve the cooling effect.

[0008] A further configuration is that a rotating seat is rotatably provided at the lower part of one end of the cover, and the open end of the first nozzle section of the U-shaped nozzle is fixedly connected to the rotating seat. When the rotating seat rotates, the U-shaped nozzle can be driven to rotate, so that the spray angle of the spray hole and the nozzle can be easily adjusted.

[0009] A further configuration is that a cooling medium joint is provided on the rotating seat, the cooling medium joint is communicated with the inside of the U-shaped nozzle, and the U-shaped nozzle is connected to a cooling medium source through the cooling medium joint.

[0010] A further configuration is that a flow meter is provided inside the rotating seat to facilitate adjustment of the flow rate of the cooling medium.

[0011] A further configuration is that the vertical projection of the spray hole on the cross section of the first spray pipe section or the second spray pipe section is fan-shaped, and its wider opening is arranged outward, so that the cooling medium sprayed from the spray hole spreads out in a fan shape, which helps to improve the cooling effect.

[0012] A further configuration is that the number of the spray holes is three to five, and the spray holes are arranged equidistantly near the middle position of the first spray pipe section or the second spray pipe section.

[0013] A further configuration is that the spray hole in the middle is larger than the other spray holes on both sides thereof, so that the spray hole in the middle sprays more cooling medium, which helps to more concentratedly cool the lower part of the blade where the most heat is generated.

[0014] A further configuration is that the aperture of the nozzle gradually decreases from the inside to the outside, which has a bunching effect on the cooling medium sprayed from the nozzle, increases the pressure of the cooling medium, and thus improves the flushing effect.

[0015] The present invention provides a dicing machine, on which the above-mentioned dicing machine tool flushing and cooling device is installed.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] 1. The present invention provides a flushing and cooling device for a dicing machine tool. A cooling medium can be introduced into the axial sides of the blade for cooling through a U-shaped pipe, and a cooling medium can be introduced into the radial direction of the blade for cooling and flushing. This is equivalent to spraying the cooling medium from three directions at the same time, so the cooling effect is better, and there is no need to set up a flushing device separately. The flushing step is completed by the nozzle of the bent section. The structure is simple, the installation is easy, and the cooling and flushing effects are better.

[0018] 2. The present invention is suitable for tools of different sizes by arranging a rotating seat to facilitate the adjustment of the spray direction of the spray hole and the nozzle.

[0019] 3. The present invention can improve the cooling and flushing effects by arranging an arc-shaped U-shaped nozzle, a fan-shaped spray hole and a nozzle with a variable diameter.

[0020] 4. Since the dicing machine provided by the present invention is equipped with the tool flushing and cooling device of the present invention, it has a better cooling effect on the tool, thereby helping to extend the service life of the tool. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0022] Figure 2 It is a three-dimensional structural schematic diagram of the rotating seat and the U-shaped nozzle in the present invention.

[0023] Figure 3 It is a side structural schematic diagram of the rotating seat and the U-shaped nozzle in the present invention.

[0024] Figure 4 It is a schematic diagram of the top view of the structure of the rotating seat and the U-shaped nozzle in the present invention.

[0025] Figure 5 yes Figure 4 Schematic diagram of the enlarged structure of A.

[0026] In the figure: 1, cover; 2, U-shaped nozzle, 201, first nozzle section, 202, bending section, 203, second nozzle section; 3, blade; 4, sawing machine main shaft; 5, rotating seat, 501, flow channel; 6, cooling medium joint; 7, workpiece; 8, spray hole; 9, nozzle. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further specifically described below through embodiments and in conjunction with the accompanying drawings. It should be noted that the directions or positional relationships indicated by "upper", "lower", "bottom" and the like are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0028] Embodiment: A washing and cooling device for a saw blade, such as Figure 1-5 As shown, it includes a cover 1 fixed to the front end of the dicing machine spindle 4 and a U-shaped nozzle 2 arranged at the lower part of one end of the cover 1. The cover 1 is arranged above the blade 3 to prevent the cooling medium from splashing upward during flushing and cooling.

[0029] The U-shaped nozzle 2 is a U-shaped hollow pipe, which is divided into a first nozzle section 201, a bending section 202 and a second nozzle section 203 in sequence. The first nozzle section 201 is open at one end away from the bending section 202, and the second nozzle section 203 is closed at one end away from the bending section 202. The open end of the first nozzle section 201 is arranged at the end of the cover 1 and connected to the cooling medium source.

[0030] In this embodiment, the cooling medium is water, and in other embodiments of the present invention, it may also be cooling oil or some gas used for cooling.

[0031] The U-shaped nozzle 2 surrounds the blade 3 therein, so that the first nozzle section 201 and the second nozzle section 203 are respectively located on two axial sides of the blade 3 , and the bent section 202 is located on one radial side of the blade 3 .

[0032] The first nozzle section 201 and the second nozzle section 203 are respectively provided with three spray holes 8 facing the lower edge of the blade 3 on the tube wall, and the three spray holes 8 are arranged at equal distances. In actual use, the heat generated at the lower part of the blade 3 is the greatest. In order to cool it better, the spray hole 8 located in the middle position in this embodiment is larger than the other two spray holes on both sides thereof, so that the amount of water sprayed by the spray hole 8 in the middle is larger and the cooling effect is better. In addition, the vertical projection of the spray hole 8 on the cross section of the first nozzle section 201 or the second nozzle section 203 is fan-shaped, and its wider opening is arranged outward, the purpose of which is to make the water flow sprayed from the spray hole 8 fan-shaped, increase the cooling area, and further improve the cooling effect.

[0033] In other embodiments of the present invention, three to five spray holes 8 may be provided on the first spray pipe section 201 and the second spray pipe section 203, which are arranged at equal intervals, and the spray hole 8 located in the middle is larger than the other spray holes on both sides thereof.

[0034] As a preferred embodiment of the present invention, the side projections of the first nozzle segment 201 and the second nozzle segment 203 are both arc-shaped, and the middle part of the first nozzle segment 201 or the second nozzle segment 203 is lower than the two ends, so that the spray holes 8 on the first nozzle segment 201 and the second nozzle segment 203 are closer to the bottom edge of the blade, which can further improve the cooling effect.

[0035] A nozzle 9 is disposed in the middle of the inner side of the bending section 202, facing the bottom of the blade 3, for flushing the waste generated by the blade 9 and the workpiece 7, and also for cooling. The aperture of the nozzle 9 gradually decreases from the inside to the outside, which has a clustering effect on the cooling medium sprayed from the nozzle 9, increases the pressure of the cooling medium, and thus improves the flushing effect.

[0036] The present invention can introduce cooling medium into the axial sides of the blade 3 for cooling through the U-shaped pipe 2, and at the same time introduce cooling medium into the radial direction of the blade 3 for cooling and flushing; compared with the prior art that uses different special components to complete the cooling and flushing processes respectively, the present invention only needs one component, the U-shaped pipe 2, to complete the cooling and flushing at the same time, and the cooling and flushing effects are better, the structure is simpler, the installation is more convenient, and the cost is saved.

[0037] In this embodiment, a rotating seat 5 is rotatably provided at the lower part of one end of the cover 1, and a flow channel 501 is provided in the rotating seat 5. The open end of the first nozzle section 201 of the U-shaped nozzle 2 is fixedly plugged into one end of the flow channel 501 on the rotating seat 5; the other end of the flow channel 501 is connected to a cooling medium joint 6, which is connected to the inside of the U-shaped nozzle 2, and the U-shaped nozzle 2 is connected to the cooling medium source through the cooling medium joint 6. When the rotating seat 5 rotates, it can drive the U-shaped nozzle 2 to rotate, so that the spray angle of the spray hole 8 and the nozzle 9 can be easily adjusted; in addition, when the dicing machine is dicing different workpieces 7, it is often necessary to replace tools of different sizes. The setting of the rotating seat 5 can make the tool flushing and cooling device in the present invention suitable for tools of different sizes.

[0038] In order to adjust the flow rate of the cooling medium, a flow meter is provided in the flow channel 501 in the rotating seat 5 to monitor the flow rate of the cooling medium in real time.

[0039] The dicing machine of the present invention is provided with a flushing and cooling device for the above-mentioned tool.

[0040] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with the technology to understand the content of the present invention and implement it accordingly, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A washing and cooling device for a dicing machine tool, characterized in that: It includes a cover and a U-shaped nozzle, wherein the cover is fixed to the front end of the spindle of the dicing machine and is arranged above the blade; The U-shaped nozzle is divided into a first nozzle section, a bending section and a second nozzle section in sequence, the first nozzle section is open at one end away from the bending section, and the second nozzle section is closed at one end away from the bending section; the open end of the first nozzle section is arranged at the end of the cover and connected to a cooling medium source; the blade is located in the middle of the U-shaped nozzle, so that the first nozzle section and the second nozzle section are respectively located on both sides of the axial direction of the blade, and the bending section is located on one side of the radial direction of the blade; a rotating seat is rotatably provided at the lower part of one end of the cover, a flow meter is arranged in the rotating seat, the open end of the first nozzle section of the U-shaped nozzle is fixedly connected to the rotating seat, a cooling medium joint is arranged on the rotating seat, the cooling medium joint is communicated with the inside of the U-shaped nozzle, the U-shaped nozzle is connected to the cooling medium source through the cooling medium joint, a plurality of spray holes facing the lower edge of the blade are arranged on the tube walls of the first nozzle section and the second nozzle section, and a nozzle facing the bottom of the blade is arranged in the middle of the bending section; The first nozzle section and the second nozzle section of the U-shaped nozzle are both arc-shaped, and the middle part of the first nozzle section or the second nozzle section is lower than the two ends.

2. The device for flushing and cooling a saw blade according to claim 1, characterized in that: The vertical projection of the spray hole on the cross section of the first spray pipe section or the second spray pipe section is fan-shaped, and the wider opening of the spray hole is arranged outward.

3. The flushing and cooling device for a dicing machine tool according to claim 1, characterized in that: The number of the spray holes is three to five, and they are arranged equidistantly near the middle position of the first spray pipe section or the second spray pipe section.

4. The device for flushing and cooling a saw blade according to claim 3, characterized in that: The spray hole at the middle position is larger than the other spray holes on both sides thereof.

5. The flushing and cooling device for a dicing machine tool according to claim 1, characterized in that: The aperture of the nozzle gradually decreases from the inside to the outside.

6. A dicing machine, characterized in that: The dicing machine is equipped with a flushing and cooling device for the dicing machine tool as described in any one of claims 1-5.

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