Rotary tank automatic opening and closing cover mechanism

Abstract

The present invention discloses a rotary automatic opening and closing cover mechanism for a trough body, comprising two end covers, the two end covers are located at the upper notch position of the trough body, and rotating arms are arranged on both sides of the two end covers, and the end covers are fixedly connected to the rotating arms through connecting plates, one side of one of the rotating arms is rotatably connected to a support block, and one side of the other rotating arm is connected to a coupling, and one side of the coupling is fixedly installed with a rotating cylinder; using a rotating cylinder driving mode can improve the stability of the end cover switch, improve the opening angle and tightness problems, and improve work efficiency; the opening and closing cover mechanism reduces the labor intensity of workers and improves work efficiency, the end cover can realize closing and opening actions in a smaller space, can adapt to the installation environment where the switch cover in various wet process equipment is allowed to have a narrow installation space, and meet the height requirements, angle and tightness requirements of the end cover itself when it is opened.

Description

Technical Field

[0001] The invention relates to semiconductor wet process equipment, in particular to a rotary tank automatic opening and closing cover mechanism. Background Art

[0002] At present, the opening and closing methods of various wet process equipment are still not perfect, and due to many factors such as the small installation space allowed, the height requirements, angle and tightness requirements of the end cover when opening, many opening and closing methods cannot meet the requirements. Since most traditional mechanisms use manual, stretching cylinders and connecting rods to realize the opening and closing movement of the end cover, due to the limitations of gravity, stretching cylinders and connecting rod mechanisms themselves, it not only brings inconvenience to workers, but also greatly restricts the height, angle and tightness of the end cover when opening. Summary of the invention

[0003] The purpose of the present invention is to provide a rotary trough body automatic opening and closing cover mechanism, in which the opening and closing of the end cover adopts a rotary cylinder drive mode, which can improve the stability of the end cover opening and closing, improve the opening angle and tightness problems, and improve work efficiency; the special end cover and its connection design with the rotating arm can make the end cover realize closing and opening actions in a smaller space, and the height of the end cover when it is opened can be adjusted; the opening and closing cover mechanism does not need manual opening and closing of the end cover, and can adapt to the installation environment of the narrow installation space allowed for the opening and closing cover in various wet process equipment, and meets the requirements of the height, angle and tightness of the end cover when it is opened, and solves the technical problems that the opening and closing covers of the existing wet process equipment need to be opened and closed manually, the labor intensity is high, the work efficiency is low, and it cannot adapt to the narrow installation environment.

[0004] The purpose of the present invention can be achieved through the following technical solutions:

[0005] A rotary trough automatic opening and closing cover mechanism comprises two end covers, the two end covers are located at the upper notch position of the trough body, and rotating arms are arranged on both sides of the two end covers. The end covers are fixedly connected to the rotating arms through connecting plates, one side of one of the rotating arms is rotatably connected to a support block, and one side of the other rotating arm is connected to a coupling, and a rotating cylinder is fixedly installed on one side of the coupling.

[0006] Furthermore, the end cover includes a connecting portion and a covering portion located on one side of the connecting portion, the connecting portion and the covering portion are an integral structure, and two first mounting grooves are provided on the upper surface of the connecting portion, the groove openings of the first mounting grooves are rectangular, and the two first mounting grooves are respectively arranged at the edge positions on both sides of the upper surface of the connecting portion, and a first strip-shaped through groove is provided in the middle of the first mounting groove.

[0007] Furthermore, the cross section of the connecting portion is an arc-shaped structure.

[0008] Furthermore, the connecting plate includes a first connecting arm and a second connecting arm, the second connecting arm is fixedly connected to one end of the first connecting arm, and the first connecting arm and the second connecting arm are perpendicular to each other, the first connecting arm is provided with two first mounting holes, and the second connecting arm is provided with a second strip-shaped through groove.

[0009] Furthermore, the first connecting arm is arranged in the first mounting groove, the first connecting arm is adapted to the first mounting groove, and the connecting part of the first connecting arm and the end cover is fixedly connected by a first bolt, the first bolt is installed through the first mounting hole and the first strip-shaped through groove, and the first bolt is adapted to the first mounting hole and the first strip-shaped through groove.

[0010] Furthermore, the rotating arm includes an arm body and a connecting shaft, the connecting shaft is fixedly connected to one side of the arm body, a second mounting groove is provided on one side of the arm body, the notch of the second mounting groove is rectangular, two second mounting holes are provided on the second mounting groove, the second mounting hole passes through the arm body, the second connecting arm is arranged in the second mounting groove, the arm body and the second connecting arm are fixedly connected by a second bolt, the second bolt passes through and is installed in the second mounting hole and the second strip through groove, and the second bolt is adapted to the second mounting hole and the second strip through groove.

[0011] Furthermore, the connecting shaft of one of the rotating arms is rotatably connected to the support block, the connecting shaft of the other rotating arm is fixedly connected to one end of the coupling, and the other end of the coupling is fixedly connected to the rotating head of the rotating cylinder.

[0012] Furthermore, the rotating cylinder and the supporting block are respectively fixedly mounted on two symmetrical groove walls of the groove body.

[0013] Furthermore, three positioning tubes are fixedly mounted on one side of the rotary cylinder, and the three positioning tubes are distributed in an annular shape with equal arcs on the circumference of the coupling.

[0014] Furthermore, the working steps of the switch cover mechanism are:

[0015] By starting the rotary cylinder, the rotary head of the rotary cylinder rotates forward and drives the coupling fixed thereto to rotate, and drives the connecting shaft to rotate forward through the coupling, and drives the entire rotary arm to rotate forward around the connecting shaft. The rotary arm drives the end cover to rotate forward through the connecting plate, so that the covering part of the end cover is away from the notch of the slot body, so that the notch is in an open state, and the cover is opened. When closing the notch, by starting the rotary cylinder, the rotary head of the rotary cylinder rotates reversely and drives the connecting shaft to rotate reversely through the coupling, and drives the end cover to rotate reversely around the connecting shaft, so that the covering part of the end cover moves to the top of the notch of the slot body, so that the notch is closed.

[0016] Beneficial effects of the present invention:

[0017] The switch of the end cover in the present invention uses a rotating cylinder drive method, which can improve the stability of the end cover switch, improve the opening angle and tightness problems, and improve work efficiency; the end cover and the rotating arm in the present invention are fixedly connected by a connecting plate, the structure is simple and compact, the cross-section of the connecting part of the end cover is an arc structure, and the connecting plate is a bent structure. The special end cover and its connection design with the rotating arm can enable the end cover to achieve closing and opening actions in a smaller space, and the height of the end cover when it is opened can be adjusted; the switch cover mechanism does not require manual opening and closing of the end cover, which is a greater improvement compared with the traditional automatic opening and closing cover method. It can not only reduce the labor intensity of workers and improve work efficiency, but also can adapt to the narrow installation space allowed for the switch cover in various wet process equipment, and meet the requirements of the end cover's own height, angle and tightness when it is opened. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to facilitate understanding by those skilled in the art, the present invention is further described below with reference to the accompanying drawings.

[0019] Figure 1 It is a structural schematic diagram of the rotary tank automatic opening and closing cover mechanism of the present invention;

[0020] Figure 2 It is a partial structural diagram of the rotary tank automatic opening and closing cover mechanism of the present invention;

[0021] Figure 3 It is a schematic diagram of the structure of the end cover in the present invention;

[0022] Figure 4 It is a structural schematic diagram of the connecting plate in the present invention;

[0023] Figure 5 It is a structural schematic diagram of the rotating arm in the present invention.

[0024] In the figure: 1, end cover; 101, connecting part; 1011, first mounting groove; 1012, first strip-shaped through groove; 102, covering part; 2, rotating arm; 21, arm body; 211, second mounting hole; 22, connecting shaft; 3, rotating cylinder; 4, positioning tube; 5, supporting block; 6, connecting plate; 61, first connecting arm; 62, second connecting arm; 621, second strip-shaped through groove; 7, coupling; 8, groove body. DETAILED DESCRIPTION

[0025] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] like Figure 1-5 As shown, the rotary trough body automatic opening and closing cover mechanism includes two end covers 1, and the two end covers 1 are located at the upper notch position of the trough body 8. Rotating arms 2 are arranged on both sides of the two end covers 1. The end covers 1 are fixedly connected to the rotating arms 2 through connecting plates 6. One side of one of the rotating arms 2 is rotatably connected to a support block 5, and one side of the other rotating arm 2 is connected to a coupling 7, and one side of the coupling 7 is fixedly installed with a rotating cylinder 3.

[0027] The end cover 1 includes a connecting portion 101 and a covering portion 102 located on one side of the connecting portion 101, the connecting portion 101 and the covering portion 102 are an integral structure, the upper surface of the connecting portion 101 is provided with two first mounting grooves 1011, the notches of the first mounting grooves 1011 are rectangular, and the two first mounting grooves 1011 are respectively arranged at the edge positions on both sides of the upper surface of the connecting portion 101, and a first strip-shaped through groove 1012 is provided in the middle of the first mounting groove 1011.

[0028] The cross section of the connecting portion 101 is an arc-shaped structure.

[0029] The connecting plate 6 includes a first connecting arm 61 and a second connecting arm 62. The second connecting arm 62 is fixedly connected to one end of the first connecting arm 61, and the first connecting arm 61 and the second connecting arm 62 are perpendicular to each other. The first connecting arm 61 is provided with two first mounting holes, and the second connecting arm 62 is provided with a second strip-shaped through groove 621.

[0030] The first connecting arm 61 is arranged in the first mounting groove 1011, the first connecting arm 61 is adapted to the first mounting groove 1011, and the first connecting arm 61 and the connecting portion 101 of the end cover 1 are fixedly connected by a first bolt, the first bolt is installed through the first mounting hole and the first strip-shaped through groove 1012, and the first bolt is adapted to the first mounting hole and the first strip-shaped through groove 1012.

[0031] The rotating arm 2 includes an arm body 21 and a connecting shaft 22, and the connecting shaft 22 is fixedly connected to one side of the arm body 21. A second mounting groove is provided on one side of the arm body 21, and the notch of the second mounting groove is rectangular. Two second mounting holes 211 are provided on the second mounting groove, and the second mounting holes 211 penetrate the arm body 21. The second connecting arm 62 is arranged in the second mounting groove. The arm body 21 and the second connecting arm 62 are fixedly connected by a second bolt, and the second bolt penetrates and is installed in the second mounting hole 211 and the second strip through groove 621, and the second bolt is adapted to the second mounting hole 211 and the second strip through groove 621.

[0032] The connecting shaft 22 of one of the rotating arms 2 is rotatably connected to the supporting block 5 , the connecting shaft 22 of the other rotating arm 2 is fixedly connected to one end of the coupling 7 , and the other end of the coupling 7 is fixedly connected to the rotating head of the rotating cylinder 3 .

[0033] The rotating cylinder 3 and the supporting block 5 are fixedly mounted on two symmetrical groove walls of the groove body 8 respectively.

[0034] Three positioning tubes 4 are fixedly mounted on one side of the rotary cylinder 3 , and the three positioning tubes 4 are distributed in an annular shape with equal arcs around the coupling 7 .

[0035] The working principle of the present invention is:

[0036] When the switch cover mechanism is in use, the two end covers 1 are arranged above the slot body 8, and the two connecting parts 101 on the two end covers 1 are close to each other. By starting the rotating cylinder 3, the rotating head of the rotating cylinder 3 rotates forward and drives the coupling 7 fixed thereto to rotate, and drives the connecting shaft 22 to rotate forward through the coupling 7, thereby driving the entire rotating arm 2 to rotate forward around the connecting shaft 22, and the rotating arm 2 drives the end cover 1 to rotate forward through the connecting plate 6, so that the covering part 102 of the end cover 1 is away from the notch of the slot body 8, so that the notch is in an open state, and the cover is opened. When closing the notch, by starting the rotating cylinder 3, the rotating head of the rotating cylinder 3 rotates reversely and drives the connecting shaft 22 to rotate reversely through the coupling 7, and drives the end cover 1 to rotate reversely around the connecting shaft 22, so that the covering part 102 of the end cover 1 moves to the top of the notch of the slot body 8, so that the notch is closed.

[0037] The switch of the end cover 1 in the present invention is driven by a rotary cylinder 3, which can improve the stability of the switch of the end cover 1, improve the opening angle and tightness problems, and improve the working efficiency; the end cover 1 and the rotating arm 2 in the present invention are fixedly connected by a connecting plate 6, and the structure is simple and compact. The cross section of the connecting part 101 of the end cover 1 is an arc structure, and the connecting plate 6 is a bent structure. The special design of the end cover 1 and its connection with the rotating arm 2 can enable the end cover 1 to achieve closing and opening actions in a smaller space, and the height of the end cover 1 when it is opened can be adjusted;

[0038] The cover opening and closing mechanism does not require manual opening and closing of the end cover, which is a greater improvement compared to the traditional automatic cover opening and closing method. It can not only reduce the labor intensity of workers and improve work efficiency, but also adapt to the narrow installation space allowed for the cover of various wet process equipment, and meet the height requirements, angle and tightness requirements of the end cover 1 when it is opened.

[0039] The preferred embodiments of the present invention disclosed above are only used to help illustrate the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. Rotary tank automatic opening and closing cover mechanism, characterized in that: The invention comprises two end covers (1), the two end covers (1) are located at the slot positions above the tank body (8), and both sides of the two end covers (1) are provided with rotating arms (2), and the end covers (1) are fixedly connected to the rotating arms (2) through connecting plates (6), one side of one of the rotating arms (2) is rotatably connected to a support block (5), and one side of the other rotating arm (2) is connected to a coupling (7), and one side of the coupling (7) is fixedly installed with a rotating cylinder (3), and the rotating cylinder (3) and the supporting block (5) are respectively fixedly installed on two symmetrical tank walls of the tank body (8); The end cover (1) comprises a connecting portion (101) and a covering portion (102) located on one side of the connecting portion (101); the connecting portion (101) and the covering portion (102) are an integral structure; the cross section of the connecting portion (101) is an arc-shaped structure; two first mounting grooves (1011) are provided on the upper surface of the connecting portion (101); the notches of the first mounting grooves (1011) are rectangular; and the two first mounting grooves (1011) are respectively arranged at the edge positions on both sides of the upper surface of the connecting portion (101); and a first strip-shaped through groove (1012) is provided in the middle of the first mounting groove (1011); The connecting plate (6) comprises a first connecting arm (61) and a second connecting arm (62), the second connecting arm (62) being fixedly connected to one end of the first connecting arm (61), and the first connecting arm (61) and the second connecting arm (62) being perpendicular to each other, the first connecting arm (61) being provided with two first mounting holes, and the second connecting arm (62) being provided with a second strip-shaped through groove (621); The first connecting arm (61) is arranged in the first mounting groove (1011), the first connecting arm (61) is matched with the first mounting groove (1011), and the first connecting arm (61) and the connecting portion (101) of the end cover (1) are fixedly connected by a first bolt, the first bolt is installed through the first mounting hole and the first strip-shaped through groove (1012), and the first bolt is matched with the first mounting hole and the first strip-shaped through groove (1012); The rotating arm (2) comprises an arm body (21) and a connecting shaft (22), wherein the connecting shaft (22) is fixedly connected to one side of the arm body (21), a second mounting groove is provided on one side of the arm body (21), the notch of the second mounting groove is rectangular, two second mounting holes (211) are provided on the second mounting groove, the second mounting holes (211) penetrate the arm body (21), the second connecting arm (62) is arranged in the second mounting groove, the arm body (21) and the second connecting arm (62) are fixedly connected by a second bolt, the second bolt penetrates and is installed in the second mounting hole (211) and the second strip-shaped through groove (621), and the second bolt is adapted to the second mounting hole (211) and the second strip-shaped through groove (621); The connecting shaft (22) of one of the rotating arms (2) is rotatably connected to the support block (5), the connecting shaft (22) of the other rotating arm (2) is fixedly connected to one end of the coupling (7), and the other end of the coupling (7) is fixedly connected to the rotating head of the rotating cylinder (3).

2. The rotary tank automatic opening and closing cover mechanism according to claim 1 is characterized in that: Three positioning tubes (4) are fixedly mounted on one side of the rotary cylinder (3), and the three positioning tubes (4) are distributed in an annular manner with equal arcs on the circumference of the coupling (7).

3. The rotary tank automatic opening and closing cover mechanism according to claim 1 is characterized in that: The working steps of the switch cover mechanism are: By starting the rotary cylinder (3), the rotary head of the rotary cylinder (3) rotates forward and drives the coupling (7) fixed thereto to rotate, and drives the connecting shaft (22) to rotate forward through the coupling (7), and drives the entire rotary arm (2) to rotate forward around the connecting shaft (22). The rotary arm (2) drives the end cover (1) to rotate forward through the connecting plate (6), so that the covering portion (102) of the end cover (1) is away from the notch of the slot body (8), so that the notch is in an open state, and the cover is opened. When closing the notch, by starting the rotary cylinder (3), the rotary head of the rotary cylinder (3) rotates reversely and drives the connecting shaft (22) to rotate reversely through the coupling (7), and drives the end cover (1) to rotate reversely around the connecting shaft (22), so that the covering portion (102) of the end cover (1) moves to the top of the notch of the slot body (8), so that the notch is closed.

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