Thin plate stacking device and thin plate stacking method

Abstract

The present invention relates to a thin plate stacking device and a thin plate stacking method, comprising a frame, a first machine and a second machine; the frame comprises a first support seat, a second support seat and a third support seat; the first machine comprises a first robot arm, the first robot arm can move longitudinally toward or away from the first support group, and move laterally toward or away from the third support seat; the second machine comprises a second robot arm and a third robot arm, the second robot arm can move longitudinally toward or away from the second support seat, and move laterally toward or away from the third support seat; the third robot arm is arranged on the second robot arm, and the third robot arm can move the third adsorption component longitudinally toward or away from the second support seat, and move to the left and right sides. The present invention can replace the manual stacking method, simplify the stacking action of the substrate, film and thin plate through the movement of several robot arms, and effectively improve the overall operation efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of circuit board manufacturing, and in particular to a thin plate stacking device and a thin plate stacking method. Background Art

[0002] In the manufacturing process of printed circuit boards, before the substrate is exposed, a photoresist layer is formed on the upper and lower surfaces of the substrate, and a thin film is adhered to the surface of the photoresist layer. After exposure, the thin film is peeled off to expose the photoresist layer for subsequent development and etching processes. Before the substrate with the photoresist layer and the thin film are formed into a thin plate, they are currently mainly stacked manually, and the substrate and the thin film are stacked up and down in sequence, and then the thin film is adhered to the upper and lower surfaces of the substrate respectively. Summary of the invention

[0003] The first object of the present invention is to provide a thin plate stacking device, which aims to replace the manual stacking method, simplify the stacking action of substrates, films and thin plates through the movement of several robot arms, and effectively improve the overall operation efficiency.

[0004] The above object of the present invention is achieved through the following technical solutions:

[0005] A thin plate stacking device comprises a frame, a first tool, and a second tool;

[0006] The frame comprises a first support seat, a second support seat and a third support seat, the first support seat is provided with a first temporary storage area, the second support seat is provided with a second temporary storage area, and the third support seat is provided with a stacking area;

[0007] The first machine includes a first robot arm, a first adsorption component at the bottom of one end of the first robot arm, the first adsorption component is arranged above the first temporary storage area, and the first robot arm can move longitudinally toward or away from the first temporary storage area, and move transversely toward or away from the stacking area;

[0008] The second machine includes a second robot arm and a third robot arm. A second adsorption component is provided at the bottom of one end of the second robot arm, and the second adsorption component is provided above the second temporary storage area. The second robot arm can move longitudinally toward or away from the second temporary storage area, and move laterally toward or away from the stacking area. A third adsorption component is provided at the bottom of the third robot arm, and the third adsorption component is provided above the second temporary storage area and below the first adsorption component. The third robot arm is provided on the second robot arm, and the third robot arm can move the third adsorption component longitudinally toward or away from the second temporary storage area, and move to the left and right sides.

[0009] By adopting the above technical solution, the first adsorption component is used to adsorb the substrate, and the second adsorption component and the third adsorption component are used to adsorb the film respectively; first, a film is spread on the stacking area, and then the first robot arm is moved to stack the substrate on the film on the stacking area; the second robot arm is moved to stack the film on the third adsorption component on the substrate, and then the third adsorption component is moved, and the second robot arm is lowered to stack the film on the second adsorption component on the former; repeating the above process can realize automatic stacking of substrates, films and thin plates, which can effectively improve overall working efficiency compared with manual methods.

[0010] Furthermore, the first robot arm is provided with a first transverse movement mechanism and a first lifting mechanism; the first transverse movement mechanism is arranged on the frame, and spans the top of the side surfaces of the first support seat and the third support seat, and is located above the first temporary storage area and the stacking area; one end of the first robot arm is arranged on the first transverse movement mechanism, and the first lifting mechanism is arranged at the other end of the first robot arm; the first adsorption assembly is arranged at the output end of the first lifting mechanism.

[0011] By adopting the above technical solution, the first robot arm can move back and forth laterally on the first support seat and the third support seat through the first transverse movement mechanism; the first adsorption component can move longitudinally using the first lifting mechanism, thereby realizing the lateral and longitudinal movement of the substrate.

[0012] Furthermore, the second robot arm is provided with a second transverse movement mechanism and a second lifting mechanism; the second transverse movement mechanism is arranged on the frame, and spans the top of the side surfaces of the second support seat and the third support seat, and is located above the second temporary storage area and the stacking area; one end of the second robot arm is arranged on the second transverse movement mechanism, and the second lifting mechanism is arranged at the other end of the second robot arm; the second adsorption assembly is arranged at the output end of the second lifting mechanism.

[0013] By adopting the above technical solution, the second robot arm can move back and forth laterally on the second support seat and the third support seat through the second transverse movement mechanism; the second adsorption component can move longitudinally using the second lifting mechanism, thereby realizing the lateral and longitudinal movement of the film attached to the second adsorption component.

[0014] Furthermore, one end of the third robot arm is arranged on the second robot arm, and the other end is provided with a third lifting mechanism, a third transverse movement mechanism is provided at the bottom of the third lifting mechanism, and the third adsorption assembly is arranged below the third transverse movement mechanism.

[0015] By adopting the above technical solution, the third adsorption assembly can be moved longitudinally by the third lifting mechanism and laterally by the third transverse movement mechanism, and the third adsorption assembly can also be moved laterally in the second temporary storage area and the stacking area along the second transverse movement mechanism.

[0016] Furthermore, the third robot arm is provided with at least two locations, respectively provided on both sides of the second robot arm, and the bottoms of the two third adsorption components are on the same horizontal plane, and the two third adsorption components can be moved laterally away from or close to the second adsorption component through the third transverse movement mechanism.

[0017] By adopting the above technical solution, it can be ensured that the film adsorbed by the third adsorption component is in a horizontal state, and space can be reserved for the longitudinal movement of the second adsorption component.

[0018] The second object of the present invention is to provide a thin plate stacking method, based on the use of the above-mentioned thin plate stacking device, comprising:

[0019] S10, placing at least one substrate on the first temporary storage area, placing at least one thin film on the second temporary storage area, and placing a first thin film on the stacking area;

[0020] S20, using the first adsorption component to adsorb the substrate, and laterally move the substrate to above the first film, so that the substrate is stacked on the top surface of the first film; using the second adsorption component to adsorb the film on the second temporary storage area, and using the third adsorption component to also adsorb a layer of film;

[0021] S30, moving the second robot arm laterally to allow the thin film on the third adsorption assembly to be stacked on the top surface of the substrate, moving the third adsorption assembly laterally, and lowering the second adsorption assembly to allow the thin film to be stacked on the top surface of the thin film;

[0022] S40, repeating steps S20 and S30 to stack a plurality of thin plates on the stacking area.

[0023] By adopting the above technical solution, the automatic stacking of substrates, films, and thin plates can be realized and simplified through the movement of several robot arms, thereby effectively improving the working efficiency.

[0024] Furthermore, in step S10, the first film is adsorbed and placed by a third adsorption component of a third robot arm.

[0025] By adopting the above technical solution, the position of the first film can be standardized so that the position of the first film is consistent with the positions of other films transported by the third adsorption component.

[0026] Furthermore, in step S30, after the film of the third adsorption component is stacked, the second robot arm moves laterally for a short distance, and after removing the third adsorption component, the second robot arm is lowered, and the film is laterally staggered on the film.

[0027] By adopting the above technical solution, the stacked thin plates can be stacked in a transversely staggered manner.

[0028] Furthermore, in step S40, a plurality of thin plates are stacked on the stacking area in a transversely staggered manner.

[0029] By adopting the above technical solution, a plurality of thin plates stacked in an offset manner can facilitate the subsequent taking out of a single thin plate.

[0030] In summary, the beneficial effects of the present invention are:

[0031] 1. The three robotic arms can simplify the stacking of substrates, films and sheets, increase stacking accuracy and improve overall operating efficiency;

[0032] 2. After the stacking of a single thin plate is completed, the second robot arm is allowed to perform a short-distance lateral offset action so that multiple thin plates can be stacked in a lateral offset manner on the stacking area, thereby making it convenient for operators to quickly separate the thin plates after the stacking operation is completed, thereby saving operation time. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is the front view of the present invention;

[0034] Figure 2 yes Figure 1 Enlarged view of point A in the middle;

[0035] Figure 3 is a top view of the present invention;

[0036] Figure 4 yes Figure 3 Enlarged view of point B in the middle;

[0037] Figure 5 It is a right side view of the present invention;

[0038] Figure 6 yes Figure 5 Enlarged view of point C in the middle;

[0039] Figure 7 is a schematic diagram before the thin plates are stacked;

[0040] Figure 8 is a schematic diagram of a stack of thin plates;

[0041] Fig. 9 It is a schematic diagram of the stacked sheets;

[0042] Fig.10 It is a structural diagram of the lifting platform.

[0043] In the figure, 1, frame; 11, main body; 12, first support seat; 121, first temporary storage area; 13, second support seat; 131, second temporary storage area; 14, third support seat; 141, stacking area; 2, first machine tool; 21, first robot arm; 22, first transverse movement mechanism; 221, moving frame 1; 222, screw rod 1; 223, servo motor 1; 224, guide rod 1; 23, first lifting mechanism; 3, second machine tool; 31, second robot arm; 311, second lifting mechanism; 312, second transverse movement mechanism; 3121, moving frame 2; 32, third robot arm; 321, third lifting mechanism Structure; 322, third transverse movement mechanism; 3221, fixed square passage; 3222, strip hole; 3223, moving rail; 3224, servo motor three; 3225, rack; 3226, gear; 33, second adsorption component; 34, third adsorption component; 4, first adsorption component; 41, main board; 42, support plate; 421, long hole two; 43, moving plate; 431, long hole one; 5, adsorption part; 51, suction cup; 52, ventilation rod; 521, rubber ring; 60, thin plate; 61, substrate; 621-622, film; 63, first film; 7, lifting platform; 71, bracket; 72, detection controller. DETAILED DESCRIPTION

[0044] The present invention is further described in detail below in conjunction with the accompanying drawings.

[0045] Embodiment 1:

[0046] Reference Figure 1 , Figure 3 , Figure 5 The present invention provides a thin plate stacking device, which uses three robot arms to simplify the stacking action of the substrate 61, the film 62 and the thin plate 60, which can increase the stacking accuracy and improve the overall operation efficiency. The specific structure includes: a frame 1, a first machine 2, and a second machine 3.

[0047] Combination Figure 1 , Figure 3 , Figure 5 The frame 1 includes a main body 11, on which are welded a first support seat 12, a third support seat 14, and a second support seat 13 arranged in an "L" shape. When implemented, the first support seat 12, the third support seat 14, and the second support seat 13 can also be adjacently arranged in an "I" shape; when implemented, the first support seat 12 can also be a conveyor belt device or a cart. Figure 3The first support seat 12 is provided with a first temporary storage area 121 for carrying the substrate 61, the second support seat 13 is provided with a second temporary storage area 131 for carrying the film 621; 622, and the third support seat 14 is provided with a stacking area 141 for carrying the thin plate 60; here, the thin plate 60 is a structure composed of two layers of thin films 621; 622 respectively coated on the upper and lower surfaces of the substrate 61.

[0048] Combination Figure 1 and Figure 5 , wherein the first machine 2 includes a first robot arm 21 and a first adsorption assembly 4, and the first robot arm is provided with a first lateral movement mechanism 22 and a first lifting mechanism 23; combined Figure 5 The first transverse movement mechanism 22 is mainly a screw transmission mechanism, which mainly includes a moving frame 221, a screw 222, a servo motor 223, and a guide rod 224. Figure 3 The movable frame 221 is fixed on the main body 11 with bolts and spans over the first support seat 12 and the third support seat 14. Figure 5 The side of the mobile frame 221 away from the mounting surface of the frame 1 is a long slot structure, and the long slot also spans the top of the first support seat 12 and the third support seat 14. The screw rod 222 is arranged in the long slot, and the length direction of the screw rod 222 is parallel to the length direction of the long slot. Both ends of the screw rod 222 are rotatably connected to the two ends of the mobile frame 221 by tapered roller bearings.

[0049] Combination Figure 5 , the guide rod 224 is also arranged in the long slot, the length direction of the guide rod 224 is parallel to the length direction of the screw rod 222, and is arranged below the screw rod 222. The two ends of the guide rod 224 are fixedly arranged at the two ends of the moving frame 221, and the two ends of the guide rod 224 can also be rotatably connected to the two ends of the moving frame 221 during implementation. The servo motor 223 is fixedly arranged outside the end of the moving frame 221 pointing to the third support seat 14 by bolts, and the output end of the servo motor 223 is key-connected with the screw rod 222 pointing to the third support seat 14, and the servo motor 223 can also be arranged outside the end of the moving frame 221 pointing to the first support seat 12 during implementation. One end of the first robot arm 21 is disposed in the long slot of the moving frame 221, and is respectively threadedly connected to the screw rod 222 and slidably connected to the guide rod 224. The first robot arm 21 is disposed at one end of the moving frame 221 and needs to have sufficient thickness to enhance the stability of the first robot arm 21 when it moves along the length direction of the screw rod 222.

[0050] The first lifting mechanism 23 is a cylinder 1, which is fixed to one end of the first robot arm 21 away from the mobile frame 1 221, and the height of the end of the first robot arm 21 away from the mobile frame 1 221 is lower than the height of the other end. The output end of the cylinder 1 is set downward. The first adsorption component 4 is set on the output end of the cylinder 1, and the first adsorption component 4 can adsorb the substrate 61 on the first temporary storage area 121. Figure 3 and Figure 4 The specific structure of the first adsorption component 4 is as follows:

[0051] It includes a main board 41 and a plurality of support boards 42. The main board 41 is provided with one support board. The middle of the support board 42 is perpendicular to one side of the main board 41 and welded. In this embodiment, there are four support boards 42, which are distributed at the bottom of both ends of the main board 41 in pairs, and the two support boards 42 at each end of the main board 41 are equally spaced. A plurality of movable plates 43 are provided on the top of the support board 42. A long hole 1 431 is provided on the movable plate 43 along its length direction. The distance between one end of the long hole 1 431 and one end of the movable plate 43 is greater than the distance between the other end of the long hole 1 431 and the other end of the movable plate 43, and a circular hole is provided at the part of the movable plate 43 with a larger distance. A long hole 2 421 is provided on the support board 42 along its length direction. The long hole 2 421 and the long hole 1 431 are staggered with each other, and are fixed at the staggered point with bolts with nuts, and the nuts face upwards. The nuts here are provided with two misaligned force-applying ends.

[0052] Combination Figure 2 and Figure 4 , an adsorbent 5 is fixedly arranged on the circular hole of the movable plate 43, and the adsorbent 5 includes a suction cup 51 with a corrugated shape, and a vent rod 52 connected to the end of the suction cup 51, and the vent rod 52 is tightly connected to the suction cup 51. Considering that the diameter of the circular hole is usually larger than the diameter of the vent rod 52, a rubber ring 521 is sleeved on the outer peripheral wall of the vent rod 52. The inner ring diameter of the rubber ring 521 is slightly smaller than the outer peripheral diameter of the vent rod 52, and the outer ring diameter of the rubber ring 521 is slightly larger than the diameter of the circular hole. In this way, the elastic effect of the rubber ring 521 can be used to fix the vent rod 52 on the circular hole. And the suction cup 51 should be facing downward.

[0053] In this embodiment, combined with Figure 3, four adsorption members 5 are arranged on each of the two support plates 42 located away from the geometric center of the main board 41. On one of the support plates 42, the adsorption members 5 are evenly divided in pairs at the two ends of the support plate 42 separated by the main board 41, and are arranged at equal intervals. All adsorption members 5 on these two support plates 42 are arranged away from the geometric center of the main board 41. Eight movable plates 43 are arranged on the other two support plates 42. The movable plates 43 are evenly divided in pairs at the two ends of the support plate 42 separated by the main board 41. On one of the support plates 42, eight adsorption members 5 are arranged in a staggered manner, and two adjacent, staggered adsorption members 5 are grouped together. The distance between two adsorption members 5 in the same group is small, and the distance between two adjacent groups of adsorption members 5 is large and equal. In this way, the same adsorption members 5 arranged in four rows and three columns can be formed at both ends of the main board 41.

[0054] Before using the first adsorption assembly 4, the height of the adsorption member 5 needs to be adjusted so that the bottom of the suction cup 51 is flush, and an air pipe connected to an air pressure device is tightly arranged on the top of each ventilation rod 52. The air pressure in the suction cup 51 is changed to adsorb and release the substrate 61.

[0055] The output end of the cylinder is fixedly connected to the middle of the main rod. Figure 3 and Figure 7 First, start the cylinder 1 to lower the first adsorption component 4, and use the suction cup 51 to adsorb the substrate 61 located on the first temporary storage area 121; then withdraw the output end of the cylinder to raise the first adsorption component 4, start the servo motor 1 223, and move the first robot arm 21 laterally under the action of the screw drive until the first adsorption component 4 is located above the stacking area 141, release the substrate 61, and stack the substrate 61 on the stacking area 141; start the servo motor 1 223 to return the first robot arm 21 to its original position.

[0056] Combination Figure 1 and Figure 3The second machine 3 includes a second robot arm 31, a third robot arm 32, a second adsorption assembly 33, and a third adsorption assembly 34. The second robot arm 31 is provided with a second transverse movement mechanism 312 and a second lifting mechanism 311. The second transverse movement mechanism 312 has the same structure as the first transverse movement mechanism 22, and is also a screw transmission mechanism, including a second moving frame 3121, a second screw, a second guide rod, and a second servo motor. The difference is that the second moving frame 3121 spans over the second support seat 13 and the third support seat 14, and the height of the second moving frame 3121 is higher than that of the first moving frame 221. The shape of the second robot arm 31 is the same as that of the first robot arm 21, and one end of the second robot arm 31 is also provided on the second moving frame 3121 in the same manner. The second lifting mechanism 311 is cylinder two, which is fixed to one end of the second robot arm 31 away from the second moving frame 3121, and one end of the second robot arm 31 away from the second moving frame 3121 is arranged above the second temporary storage area 131, and the output end of cylinder two is also downward. The difference is that the extension range of the output end of cylinder two is greater than the extension range of the output end of cylinder one.

[0057] The structure of the second adsorption assembly 33 is the same as that of the first adsorption assembly 4. The second adsorption assembly 33 is arranged on the output end of the second cylinder. The second adsorption assembly 33 is placed above the second temporary storage area 131. There are two third robotic arms 32. One end of the third robotic arm 32 is fixed to the side of the second robotic arm 31, and the other end of the third robotic arm 32 is located beside the second adsorption assembly 33. Figure 1 The third robot arm 32 is provided with a third lifting mechanism 321 and a third lateral movement mechanism 322. The third lifting mechanism 321 is a cylinder 3, which is fixed to the end of the robot arm away from the second robot arm 31, with the output end of the cylinder 3 facing downward, and the output end of the cylinder 3 is located below the second adsorption assembly 33. Figure 6 The third transverse movement mechanism 322 includes a fixed square tube 3221, which is a steel tube. The bottom of the fixed square tube 3221 is provided with strip holes 3222 arranged along the length direction thereof.

[0058] A movable rail 3223 and a servo motor 3224 are provided in the fixed square tube 3221. The cross section of the movable rail 3223 is in a "T" shape. The top horizontal plate of the movable rail 3223 is placed in the fixed square tube 3221. One vertical side of the movable rail 3223 passes through the bar hole 3222 and extends to the outside of the bottom of the fixed square tube 3221. The overall length of the movable rail 3223 is greater than the length of the fixed square tube 3221. The top surface of the top horizontal plate of the movable rail 3223 is provided with a rack 3225 along the length direction of the movable rail 3223. The servo motor 3224 is arranged above the movable rail 3223 and obliquely below the cylinder 3, and the two servo motors 3224 are far away from each other. And fixed to the inner wall of one side of the movable rail 3223. The output end of the servo motor 3224 is provided with a gear 3226 meshing with the rack 3225. The movable rail 3223 can be moved along its length direction in the fixed square tube 3221 by a servo motor, and in order to facilitate sliding, the contact surface between the top cross plate of the movable rail 3223 and the fixed square tube 3221 is polished, and lubricating oil is injected between the two.

[0059] Combination Figure 1 Since the third robot arm 32 is provided at two locations, the third lifting mechanism 321, the third lateral movement mechanism 322, and the third adsorption assembly 34 are each provided at two locations, wherein the ends of the tops of the two fixed square tubes 3221 close to each other are respectively fixed at the bottoms of the two cylinders, and the two third adsorption assemblies 34 are respectively fixed at the bottoms of the two moving rails 3223. The purpose is to leave a moving spacing between the two third adsorption assemblies 34 and between the two fixed square tubes 3221. The width of the moving spacing is greater than the width of the second adsorption assembly 33, in order not to interfere with the normal lifting and lowering of the second adsorption assembly 33.

[0060] Combination Figure 1 and Figure 5 The structure of the third adsorption assembly 34 is the same as that of one side of the first adsorption assembly 4, and is also a four-row and three-column structure. Figure 6 A connecting plate is provided on the top of the third adsorption assembly 34, and the connecting plate separates the adsorption parts 5 of the third adsorption assembly 34 into three parts, so that the two third adsorption assemblies 34 can be moved to the bottom of the two sides of the second adsorption assembly 33 respectively. The length of the movable rail 3223 here is greater than the length of the fixed square tube 3221, and the length of the movable rail 3223 needs to be sufficient to move the two third adsorption assemblies 34 to the bottom of the second adsorption assembly 33, and the opposite sides of the two third adsorption assemblies 34 are flush with the opposite sides of the fixed square tube 3221 respectively. The connecting plate is fixed to the bottom end of the movable rail 3223 extending out of the fixed square tube 3221 along its length direction.

[0061] Before using the second tool 3, the bottoms of all the suction cups 51 on the second suction assembly 33 must be adjusted to the same level, and the bottoms of all the suction cups 51 on the third suction assembly 34 must be adjusted to the same level. Figure 1 , Figure 3 , Figure 7 , first start the servo motor three 3224 to move the two third adsorption components 34 away from each other; start the cylinder two to lower the second adsorption component 33, use the suction cup 51 to adsorb the film 621 located on the second temporary storage area 131, and then use the cylinder two to withdraw it to its original position; start the servo motor three 3224, so that the two third adsorption components 34 are respectively located below the two sides of the second adsorption component 33, start the cylinder three, use the suction cup 51 to adsorb the film 622 located on the second temporary storage area 131, and then use the cylinder three to withdraw it to its original position. The second robot arm 31 can use the second lateral movement device to transport the film 621; 622 from the second temporary storage area 131 to the stacking area 141 to cooperate with the first robot arm 21 to stack the thin plate 60.

[0062] Embodiment 2:

[0063] Based on a thin plate stacking device provided in the first embodiment, this embodiment provides a thin plate stacking method. Before use, all the suction cups on the second adsorption assembly 33 need to be adjusted to the same horizontal plane, and all the suction cups on the third adsorption assembly 34 and all the suction cups on the first suction cup assembly 4 need to be adjusted to the same horizontal plane. The stacking process includes:

[0064] S10, Combination Figure 7 , at least one substrate 61 is placed on the first temporary storage area 121, at least one layer of film 621; 622 is placed on the second temporary storage area 131, and a first film 63 is first placed on the stacking area 141 by the third adsorption component 34. The purpose is to standardize the position of the lowest layer of film so that the position of the first film 63 is consistent with the positions of other films 621; 622 transported by the third adsorption component 34 and the second adsorption component 33.

[0065] S20, use the first adsorption component 4 to adsorb the substrate 61, and move the substrate 61 horizontally above the first film 63, so that the substrate 61 is stacked on the top surface of the first film 63; use the second adsorption component 33 to adsorb the film 621 on the second temporary storage area 131, and use the third adsorption component 34 to adsorb a layer of film 622, so that the films 621 and 622 on the second adsorption component 33 and the third adsorption component 34 are arranged side by side; then restore the first adsorption component 4 and return it to its original position.

[0066] S30, Combination Figure 8, move the second robot arm 31 laterally to stack the film 622 on the third adsorption component 34 on the top surface of the substrate 61. After the film 622 of the third adsorption component 34 is stacked, move the third adsorption component 34 laterally, and start the servo motor 2 to move the second robot arm 31 laterally for a short distance, and then let the second adsorption component 33 descend, so that the film 621 is stacked on the top surface of the film 622 in an offset manner; then restore the second adsorption component 33 and the third adsorption component 34 and return them to their original positions;

[0067] S40, repeating steps S20 and S30, in S30, each time after the film 622 of the third adsorption assembly 34 is stacked, the second robot arm 31 is moved horizontally by an equal distance in the opposite direction of the last short-distance lateral movement, so that the plurality of thin plates 60 are stacked by Fig. 9 The lateral staggered stacking in the stacking area 141 shown can facilitate the subsequent removal of a single thin plate 60 .

[0068] Embodiment three:

[0069] A thin plate stacking device, combined with Fig.10 , which is different from the first embodiment in that the third support seat 14 can be a scissor-type lifting platform 7, and the stacking area 141 is arranged on the lifting platform 7. A bracket 71 is arranged on one side of the lifting platform 7, and the bracket 71 is fixed on the ground. A detection controller 72 capable of controlling the lifting mechanism of the lifting platform 7 is arranged on the top side of the bracket 71, and a gap is left between the detection controller 72 and the top surface of the lifting platform 7. The detection controller 72 is used to detect the height of the top surface of the thin plate 60. If the height of the top surface of the thin plate 60 is higher than the detection controller 72, the detection controller will generate an electrical signal transmitted to the lifting mechanism of the lifting platform 7, driving the lifting platform 7 to lower until the top surface of the thin plate 60 is flush with the detection controller 72.

[0070] Embodiment 4:

[0071] A thin plate stacking method is different from the second embodiment in that the thin plates 60 are stacked using the lifting platform 7 mentioned in the third embodiment.

[0072] The embodiments of this specific implementation method are all preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention in turn. Therefore, any equivalent changes made based on the structure, shape, and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A thin plate stacking device, characterized in that: It comprises a frame (1), a first machine tool (2), and a second machine tool (3); The frame (1) comprises a first support seat (12), a second support seat (13), and a third support seat (14); the first support seat (12) is provided with a first temporary storage area (121), the second support seat (13) is provided with a second temporary storage area (131), and the third support seat (14) is provided with a stacking area (141); The first machine (2) comprises a first robot arm (21), a first adsorption component (4) is disposed at the bottom of one end of the first robot arm (21), the first adsorption component (4) is disposed above the first temporary storage area (121), and is used to adsorb the substrate in the first temporary storage area (121), and the first robot arm (21) can move longitudinally toward or away from the first temporary storage area (121), and can move transversely toward or away from the stacking area (141); The second machine (3) comprises a second robot arm (31) and a third robot arm (32). A second adsorption component (33) is provided at the bottom of one end of the second robot arm (31). The second adsorption component (33) is arranged above the second temporary storage area (131) and is used to adsorb the film in the second temporary storage area (131). The second robot arm (31) can move longitudinally toward or away from the second temporary storage area (131) and move laterally toward or away from the stacking area (141). A third adsorption component (34) is provided at the bottom of the third robot arm (32) and is used to adsorb the film in the second temporary storage area (131). The third adsorption component (34) is arranged above the second temporary storage area (131) and below the first adsorption component (4). The third robot arm (32) is arranged on the second robot arm (31). The third robot arm (32) can move the third adsorption component (34) longitudinally toward or away from the second temporary storage area (131) and move to the left and right sides. The second robot arm (31) is provided with a second transverse movement mechanism (312) and a second lifting mechanism (311); the second transverse movement mechanism (312) is arranged on the frame (1), and straddles the top of the side of the second support seat (13) and the third support seat (14), and is located above the second temporary storage area (131) and the stacking area (141); one end of the second robot arm (31) is arranged on the second transverse movement mechanism (312), and the second lifting mechanism (311) is arranged at the other end of the second robot arm (31); the second adsorption component (33) is arranged at the output end of the second lifting mechanism (311); One end of the third robot arm (32) is arranged on the second robot arm (31), and the other end is provided with a third lifting mechanism (321), a third transverse movement mechanism (322) is provided at the bottom of the third lifting mechanism (321), and the third adsorption component (34) is arranged below the third transverse movement mechanism (322); The third robot arm (32) is provided at least at two locations, respectively provided on both sides of the second robot arm (31), and the bottoms of the two third adsorption components (34) are on the same horizontal plane, and the two third adsorption components (34) can both be moved laterally away from or closer to the second adsorption component (33) through the third transverse movement mechanism (322), thereby leaving space for the longitudinal movement of the second adsorption component (33).

2. A thin plate stacking device according to claim 1, characterized in that: The first robot arm (21) is provided with a first transverse movement mechanism (22) and a first lifting mechanism (23); the first transverse movement mechanism (22) is arranged on the frame (1), and straddles the top of the side of the first support seat (12) and the third support seat (14), and is located above the first temporary storage area (121) and the stacking area (141); one end of the first robot arm (21) is arranged on the first transverse movement mechanism (22), and the first lifting mechanism (23) is arranged at the other end of the first robot arm (21); the first adsorption component (4) is arranged at the output end of the first lifting mechanism (23).

3. A thin plate stacking method, based on a thin plate stacking device according to any one of claims 1 to 2, characterized in that: include: S10, placing at least one substrate (61) on a first temporary storage area (121), and at least one thin film (621; 622) is placed on the second temporary storage area (131), and a first film (63) is also placed on the stacking area (141); S20, using the first adsorption component (4) to adsorb the substrate (61), and moving the substrate (61) horizontally to above the first film (63), so that the substrate (61) is stacked on the top surface of the first film (63); using the second adsorption component (33) to adsorb the film (621) on the second temporary storage area (131), and using the third adsorption component (34) to also adsorb a layer of film (622); S30, moving the second robot arm (31) laterally to allow the film (622) on the third adsorption component (34) to be stacked on the top surface of the substrate (61), moving the third adsorption component (34) laterally, and allowing the second adsorption component (33) to descend to allow the film (621) to be stacked on the top surface of the film (622); S40, repeating steps S20 and S30 to stack a plurality of thin plates (60) on the stacking area (141).

4. A thin plate stacking method according to claim 3, characterized in that: In step S10, the first film (63) is adsorbed and placed by the third adsorption component (34) of the third robot arm (32).

5. A thin plate stacking method according to claim 3, characterized in that: In step S30, after the film (623) of the third adsorption component (34) is stacked, the second robot arm (31) moves laterally for a short distance, removes the third adsorption component (34), and then allows the second robot arm (31) to descend, so that the film (621) is laterally staggered on the film (622).

6. A thin plate stacking method according to claim 3, characterized in that: In step S40, a plurality of thin plates (60) are stacked on the stacking area (141) in a transversely staggered manner.

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