Packaging test methods and equipment

Abstract

The present application relates to a packaging testing method and apparatus, which utilizes the fluidity of liquid metal and uses liquid metal as a packaging testing material. The change in the grayscale value and / or resistance value of the liquid metal after surface oxidation is used as a judgment basis. Under the action of water and air that enter the interior of the package through the package layer to be tested, the liquid metal undergoes a transformation from a liquid metal metal phase to a metal oxide. The water and oxygen permeability of the sample to be tested is obtained by obtaining the grayscale value and / or resistance value of the sample to be tested, thereby judging the water and oxygen barrier effect of the package layer to be tested.

Description

Technical Field

[0001] The present invention relates to the field of detection technology, and in particular to a packaging testing method and equipment. Background Art

[0002] The quality of packaging performance determines the lifespan of a device and is crucial to its industrialization. Flexible electronic devices utilize a large number of organic materials and cathode metals that are highly sensitive to water and oxygen. During use, they may need to withstand high-strain deformation modes such as bending, folding, twisting, and even stretching. Therefore, the packaging performance requirements for such devices are higher than those for general semiconductor devices. Current packaging testing technologies used in flexible electronics are primarily based on semiconductor technology and include humidity sensors, weighing, and calcium testing methods. These methods can only measure the static water and oxygen barrier properties of flexible electronic device packaging layers, but cannot detect the water and oxygen barrier properties of devices during stretching and bending. Summary of the Invention

[0003] The present application provides a packaging testing method and equipment that can meet the dynamic testing requirements for flexible packaging materials.

[0004] A packaging testing method, comprising:

[0005] Providing a test sample, wherein a flexible substrate layer of the test sample is covered with a liquid metal layer, and the liquid metal layer is coated with a packaging layer to be tested;

[0006] performing a deformation test on the test sample;

[0007] Obtaining the water and oxygen transmission rate of the package layer to be tested under different deformation states;

[0008] The packaging quality of the packaging layer to be tested is determined according to the water and oxygen transmission rate.

[0009] In one embodiment, providing a test sample comprises:

[0010] Providing a flexible substrate layer;

[0011] forming the liquid metal layer on the flexible substrate layer by 3D printing or spin coating;

[0012] The liquid metal layer is encapsulated by using the encapsulation layer to be tested to obtain the test sample.

[0013] In one embodiment, encapsulating the liquid metal layer using the packaging layer to be tested includes:

[0014] Encapsulating the liquid metal layer with the packaging layer to be tested on one side of the flexible substrate layer to obtain a packaging sample to be tested;

[0015] The liquid metal layer is encapsulated using a standard encapsulation layer with a known water and oxygen permeability on the other side of the flexible substrate layer opposite to the encapsulation layer to be tested, to obtain a standard encapsulation sample.

[0016] In one embodiment, obtaining the water and oxygen transmission rate of the packaging layer to be tested under different deformation states includes:

[0017] acquiring surface image information of the liquid metal layer at preset intervals;

[0018] Obtaining a first grayscale value corresponding to the package surface to be tested according to the surface image information;

[0019] The water and oxygen permeability of the packaging layer to be tested is obtained according to the first grayscale value and the second grayscale value and the water and oxygen permeability corresponding to the standard packaging surface.

[0020] In one embodiment, at least two liquid metal layers are stacked on the flexible substrate layer of the test sample, each of the liquid metal layers includes a flexible substrate with multiple grooves and liquid metal filled in the grooves, and the multiple grooves of two adjacent liquid metal layers are cross-distributed.

[0021] In one embodiment, obtaining the water and oxygen transmission rate of the packaging layer to be tested under different deformation states includes:

[0022] Obtaining resistance values ​​of adjacent intersections of the grooves of the liquid metal layer at preset intervals;

[0023] The water and oxygen permeability of the packaging layer to be tested is obtained according to the rate of change of the resistance value.

[0024] In one embodiment, obtaining the water and oxygen transmission rate of the packaging layer to be tested under different deformation states includes:

[0025] A corresponding relationship between the water oxygen permeability and the grayscale value or resistance value of the liquid metal layer is provided.

[0026] A packaging and testing device, which implements the steps of the above packaging and testing method, and includes a fixture, a detection module, and a processing module, wherein:

[0027] The fixture is used to fix the flexible substrate layer in the test sample and perform a deformation operation on the flexible substrate layer;

[0028] The detection module is used to collect characteristic parameters of the liquid metal layer;

[0029] The processing module is connected to the detection module, and is configured to receive the characteristic parameters and obtain the water and oxygen transmission rate of the packaging layer to be tested according to the characteristic parameters.

[0030] In one embodiment, a detection chamber is further included, wherein the detection chamber is used to accommodate the test sample and provide different detection environments.

[0031] In one embodiment, the detection module includes a light source and an image acquisition device, the light source is used to provide a test light source, and the image acquisition device is used to acquire surface image information of the liquid metal layer.

[0032] In one embodiment, the detection module includes a resistance testing device, which is connected to the liquid metal layer and is used to obtain resistance values ​​at intersections of adjacent grooves of the liquid metal layer.

[0033] The packaging testing method and apparatus provided herein include providing a test sample having a flexible substrate layer covered with a liquid metal layer, which is then coated with a packaging layer to be tested; performing a deformation test on the test sample; obtaining the water and oxygen transmission rates of the packaging layer to be tested under different deformation states; and determining the packaging quality of the packaging layer to be tested based on the water and oxygen transmission rates. The packaging testing method provided herein utilizes the fluidity of liquid metal, using liquid metal as the packaging test material, and can meet the dynamic testing requirements for flexible packaging materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0035] Figure 1 A flowchart of a packaging testing method provided by an embodiment;

[0036] Figure 2 A schematic structural diagram of a test sample provided in yet another embodiment;

[0037] Figure 3 A schematic structural diagram of a test sample provided in yet another embodiment;

[0038] Figure 4 A schematic structural diagram of a test sample provided in yet another embodiment;

[0039] Figure 5 for Figure 4 Schematic diagram of the corresponding relationship between the morphological change of the liquid metal layer of the test sample and the state of the encapsulation layer provided in;

[0040] Figure 6 A flowchart of a packaging testing method provided in yet another embodiment;

[0041] Figure 7 for Figure 3 A front view of the liquid metal layer with a resistance test device connected thereto;

[0042] Figure 8 for Figure 3 Schematic diagram of the back side of the liquid metal layer with a resistance test device connected;

[0043] Figure 9 A schematic structural diagram of a packaging and testing device provided in yet another embodiment;

[0044] Figure 10 A schematic structural diagram of a packaging and testing device provided in yet another embodiment;

[0045] Figure 11 for Figure 9 Schematic diagram of the middle fixture stretching, bending, and twisting the test sample. DETAILED DESCRIPTION

[0046] In order to facilitate the understanding of the present application, in order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application, and preferred embodiments of the present application are provided in the accompanying drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of the present application. The present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited to the specific embodiments disclosed below.

[0047] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined. In the description of this application, the meaning of "several" is at least one, such as one, two, etc., unless otherwise clearly and specifically defined.

[0048] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this application pertains. The terms used herein are for the purpose of describing specific embodiments only and are not intended to limit this application. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0049] Figure 1 A flowchart of a packaging test method provided in an embodiment is shown in FIG. Figure 1 As shown, the packaging test method includes steps 110 to 140, wherein:

[0050] Step 110 : providing a test sample, wherein a flexible substrate layer of the test sample is covered with a liquid metal layer, and the liquid metal layer is coated with a packaging layer to be tested.

[0051] refer to Figure 2 , the test sample of the present application includes a flexible substrate layer 210, a liquid metal layer 220 and a packaging layer to be tested 230 that are stacked. Among them, the flexible substrate layer 210 may include one or more materials such as flexible glass, polyimide (PI), polyethylene terephthalate (PET), polydimethylsiloxane (PDMS), etc., and the specific material of the flexible substrate layer 210 is not limited in this embodiment. It should be noted that the packaging layer to be tested 230 and the flexible substrate layer 210 can both be transparent materials, so that the surface information of the liquid metal layer 220 can be better observed. The liquid metal layer 220 can be prepared from liquid metals such as gallium indium tin alloy (Galinstan), gallium indium alloy (EGaIn), gallium zinc alloy (GaZn) or gallium tin alloy (GaSn). The specific composition of the liquid metal layer 220 is not limited in this embodiment.

[0052] In one embodiment, the liquid metal layer 220 can be formed by 3D printing or spin coating a layer of liquid metal. The thickness of the liquid metal layer 220 can be 10 μm to 5 mm. In practical applications, the thickness of the liquid metal layer 220 is determined by the type of substrate and the viscosity of the liquid metal. If the substrate is repellent to the liquid metal and the viscosity of the liquid metal is lower, the thickness of the liquid metal layer 220 is greater. If the substrate is repellent to the liquid metal and the viscosity of the liquid metal is higher, the thickness of the liquid metal layer 220 is smaller.

[0053] In one embodiment, at least two liquid metal layers are stacked on the flexible substrate layer 210 of the test sample. The liquid metal layer includes a flexible substrate with multiple grooves and liquid metal filled in the grooves, and the grooves of two adjacent liquid metal layers are cross-distributed. Figure 3 As shown, a first liquid metal layer 2201 and a second liquid metal layer 2202 are stacked on a flexible substrate layer 210. Multiple grooves are intersectingly arranged in the first and second liquid metal layers 2201 and 2202. Micropores can be provided on the back of the flexible substrate at locations corresponding to the grooves, but no liquid exchange occurs. The flexible substrate can be made of materials such as flexible glass, polyimide (PI), polyethylene terephthalate (PET), and polydimethylsiloxane (PDMS).

[0054] In one embodiment, if Figure 2 As shown, the flexible substrate layer 210 is a flexible substrate layer 210 with a microstructure. The function of the microstructure is mainly to prevent the packaging layer from collapsing during the flexible deformation process, thereby causing uneven distribution of liquid metal in the liquid metal layer 220 and resulting in inaccurate test results. The use of a flexible substrate with a microstructure can avoid the above problems.

[0055] Step 120: Perform a deformation test on the test sample.

[0056] During the test, the test sample can be placed in different test environments. For example, the test sample can be placed in a test chamber. Depending on the test environment requirements, the test chamber can be introduced with gases of different compositions, such as oxygen, water, or water vapor. This can accelerate the water-oxygen permeation process and shorten the test time. During the test, the temperature in the test chamber can be room temperature.

[0057] The deformation test of the test sample can be performed during the packaging test by stretching or bending the test sample through a stretching and bending auxiliary device to simulate different deformation states of the test sample, thereby testing the water and oxygen transmission rate of the test sample in different deformation states, and the test results are more accurate.

[0058] Step 130 : Obtain the water and oxygen transmission rates of the packaging layer to be tested under different deformation states.

[0059] The liquid metal layer beneath the package under test absorbs water and air, transforming from a metallic phase to a metal oxide. This is accompanied by changes in characteristic parameters such as surface grayscale and resistance. These changes in grayscale and resistance can be used to determine the water and oxygen transmission rate of the package under test. Furthermore, due to its fluidity, liquid metal is suitable for dynamic testing of flexible packaging layers and is also suitable for detecting cracks in these layers.

[0060] In one embodiment, the package layer to be tested may be a flexible package layer, for example, a Barix film isolation layer, a SiO x N y Isolation layer, Al2O3 / ZnO2 isolation layer, polyparaxylene, polyimide and fluororesin, etc.

[0061] Step 140 : determining the packaging quality of the packaging layer to be tested according to the water and oxygen transmission rate.

[0062] The higher the water and oxygen permeability, the worse the water and oxygen barrier effect of the encapsulation layer; the lower the water and oxygen permeability, the better the water and oxygen barrier effect of the encapsulation layer.

[0063] The packaging test method provided in this embodiment includes providing a test sample, wherein the flexible substrate layer of the test sample is covered with a liquid metal layer, and the liquid metal layer is coated with a packaging layer to be tested; performing a deformation test on the test sample; obtaining the water and oxygen permeability of the packaging layer to be tested under different deformation states according to the oxidation state of the liquid metal layer; and determining the packaging quality of the packaging layer to be tested according to the water and oxygen permeability. The packaging test method provided in this application uses the change in the grayscale value and / or resistance value of the liquid metal surface after oxidation as a judgment basis. When the liquid metal enters the interior of the packaging through the packaging layer to be tested, the liquid metal undergoes a transformation from a liquid metal metal phase to a metal oxide. The water and oxygen permeability of the sample to be tested is obtained by obtaining the grayscale value and / or resistance value of the sample to be tested, thereby judging the water and oxygen barrier effect of the packaging layer to be tested.

[0064] It should be noted that the liquid metal forming the liquid metal layer reacts with the water or oxygen permeating the package layer under test to form metal oxides, resulting in a metal-metal oxide mixture. Liquid metal generally exhibits a black metallic luster, while metal oxides exhibit a silvery-white, rough surface. Therefore, as the oxidation process progresses, the metal-metal oxidation ratio continuously changes, and the surface color of the liquid metal layer gradually changes from black to gray, and ultimately to silver-gray. Therefore, the water and oxygen permeability of the package layer is directly related to the grayscale value of the liquid metal layer.

[0065] The liquid metal forming the liquid metal layer reacts with the water or oxygen that permeates the encapsulation layer to form metal oxides, resulting in a metal-metal oxide mixture. Liquid metal has lower resistance and higher conductivity than metal oxides. Therefore, as the oxidation process progresses, the metal-metal oxidation ratio changes, and the resistance of the mixture continues to increase until all the liquid metal is oxidized to metal oxides and the resistance reaches a stable level. Therefore, the water and oxygen permeability of the encapsulation layer is directly related to the resistance change rate of the liquid metal layer.

[0066] Calibration can determine the correspondence between the water and oxygen permeability and the grayscale value or resistance value of the liquid metal. When testing the packaging layer to be tested, this correspondence can be used to directly determine the water and oxygen permeability of the packaging layer to be tested using the actual measured surface grayscale value or resistance value of the liquid metal. In actual use, the correspondence between different water and oxygen permeability and the surface grayscale value and / or resistance value of the liquid metal has been calibrated. Furthermore, due to the fluidity of liquid metal, the packaging testing method provided in this application is suitable for deformation testing of flexible packaging layers, thereby meeting the requirements for dynamic testing of flexible packaging materials for flexible electronics.

[0067] In one embodiment, providing a test sample comprises:

[0068] Providing a flexible substrate layer;

[0069] forming a liquid metal layer on a flexible substrate layer by 3D printing or spin coating;

[0070] The liquid metal layer is encapsulated using the encapsulation layer to be tested to obtain a test sample.

[0071] There are many ways to encapsulate the liquid metal layer using the packaging layer to be tested. In one embodiment, Figure 4 As shown, encapsulating the liquid metal layer 220 with the packaging layer to be tested 230 includes:

[0072] The liquid metal layer is encapsulated on one side of the flexible substrate layer 210 using the encapsulation layer to be tested 230 to obtain the encapsulation sample to be tested;

[0073] On the other side of the flexible substrate layer 210 opposite to the packaging layer to be tested 230 , the liquid metal layer 220 is packaged with a standard packaging layer 240 having a known water and oxygen permeability to obtain a standard packaging sample.

[0074] In this embodiment, the package sample under test and the standard package sample are subjected to conformal bending. The water and oxygen transmission rate of the package layer under test 230 is compared with the water and oxygen transmission rate of the standard package layer 240 on the other side to obtain the water and oxygen transmission rate of the package layer under test 230. During the test, the standard package sample is set to compare the performance indicators of the package sample under test and the standard package sample themselves, such as the stretchability, stiffness, and fracture mode of the film.

[0075] The specific test steps are as follows:

[0076] (1) Preparation of test samples

[0077] 1) In an inert gas (such as Ar, N2) environment, 3D print or spin-coat a liquid metal layer on both sides of the flexible substrate layer with a thickness of 10μm to 5mm.

[0078] 2) The liquid metal layer on one side is encapsulated with the encapsulation layer to be tested, and the encapsulation layer to be tested is a transparent material.

[0079] 3) A standard packaging layer with a known water and oxygen permeability is used to encapsulate the liquid metal layer on the other side of the flexible substrate layer for comparison with the packaging layer to be tested.

[0080] (2) Measurement of color change or grayscale change of liquid metal in test sample

[0081] 1) Place the test sample in a certain water and oxygen environment, perform deformation test on the test sample, and continuously photograph the surface of the liquid metal layer. The water and oxygen permeability of the package layer to be tested, as well as the possible penetration position and penetration shape, are determined by the color change or grayscale change of the liquid metal oxidation area. If water and oxygen penetrate into the package layer to be tested, the color of the liquid metal layer under the package layer to be tested will change from metallic color to dull metal oxide color. The corresponding relationship between the morphological change of the liquid metal layer and the state of the package layer to be tested is as follows: Figure 5 shown.

[0082] 2) Calculate the water and oxygen transmission rate of the package layer to be tested by comparing it with the water and oxygen transmission rate of the standard package layer on the other side.

[0083] The packaging test method provided in this embodiment performs conformal testing on a test sample and a standard sample. By comparing the color or grayscale differences of the liquid metal oxidation area during stretching, bending, and twisting, the difference in sealing performance and water and oxygen permeability between the tested packaging layer and the standard packaging layer can be intuitively obtained, thereby determining the relative sealing performance and relative water and oxygen permeability of the tested packaging layer.

[0084] In one embodiment, if Figure 6 As shown, obtaining the water and oxygen transmission rate of the packaging layer to be tested under different deformation states includes steps 610 to 630, wherein:

[0085] Step 610: Acquire surface image information of the liquid metal layer at preset intervals. Since the test sample is continuously stretched or bent during the test, acquiring surface image information of the liquid metal layer at preset intervals allows acquisition of surface image information of the liquid metal layer after each bending or stretching recovery.

[0086] Step 620, obtaining a first grayscale value corresponding to the package surface to be tested according to the surface image information;

[0087] Step 630 , obtaining the water and oxygen permeability of the packaging layer to be tested according to the first grayscale value and the second grayscale value and water and oxygen permeability corresponding to the standard packaging sample.

[0088] The water and oxygen permeability of the standard packaging sample / the water and oxygen permeability of the packaging sample to be tested is equal to the second grayscale value corresponding to the standard packaging sample / the first grayscale value corresponding to the packaging sample to be tested. The water and oxygen permeability of the packaging layer to be tested can be calculated by obtaining the first grayscale value corresponding to the packaging sample to be tested, the second grayscale value corresponding to the standard packaging surface, and the water and oxygen permeability of the standard packaging sample.

[0089] In one embodiment, encapsulating the liquid metal layer with the encapsulation layer to be tested includes:

[0090] providing a flexible substrate layer;

[0091] At least two liquid metal layers are stacked on the flexible substrate layer. Each liquid metal layer includes a flexible substrate with multiple grooves and liquid metal filled in the grooves. The grooves of two adjacent liquid metal layers are cross-distributed.

[0092] The liquid metal layer is encapsulated using the encapsulation layer to be tested.

[0093] In one embodiment, reference Figure 3 A first liquid metal layer 2201 and a second liquid metal layer 2202 are stacked on the flexible substrate layer, and the multiple grooves of the first liquid metal layer 2201 and the multiple grooves of the second liquid metal layer 2202 are cross-distributed.

[0094] like Figure 7 and Figure 8 As shown, each liquid metal layer has micropores 2204 on its backside corresponding to grooves 2203, but no liquid exchange occurs. Micropores 2204 can be located at the intersections of multiple grooves 2203. A resistance measuring device is located outside the liquid metal layer to record the resistance of each groove 2203 filled with liquid metal to identify water and oxygen leaks. In this embodiment, the resistance measuring device can be a solid metal electrode 2205, connected to the liquid metal in each groove. The flexible substrate layer can be made of PDMS with soft protrusions on its surface.

[0095] If the liquid metal in both intersecting grooves changes, the resistance at the intersection will inevitably change. When water and oxygen permeate the package under test, oxidation occurs in both liquid metal layers, causing the resistance of the liquid metal in both intersecting grooves to increase. The resistance value represents the water and oxygen permeability, and the intersection indicates the point where the permeation occurred, known as the water and oxygen leakage point.

[0096] In one embodiment, obtaining the water and oxygen transmission rate of the packaging layer to be tested under different deformation states includes:

[0097] Obtaining resistance values ​​of intersections of adjacent liquid metal layer grooves at preset intervals;

[0098] The water and oxygen permeability of the package layer to be tested is obtained according to the resistance value.

[0099] In this embodiment, the resistance value of the package layer to be measured is obtained, and the water and oxygen permeability of the package layer to be measured can be obtained through the correspondence between the calibrated water and oxygen permeability and the resistance value of the liquid metal layer.

[0100] The specific steps are as follows:

[0101] (1) Preparation of test samples

[0102] 1) In an inert gas (such as Ar, N2) environment, a first flexible substrate with grooves is placed on one side of a flexible substrate (flexible glass, PI, PET, PDMS), and liquid metal is injected into the grooves to form a first liquid metal layer; then, a second flexible substrate with grooves is stacked on the first liquid metal layer, and liquid metal is injected into the grooves to form a second liquid metal layer; the grooves of the second liquid metal layer are arranged to intersect with the grooves of the first liquid metal layer to form a liquid metal matrix.

[0103] 2) The liquid metal matrix on the flexible substrate layer is packaged accordingly with the packaging layer to be tested.

[0104] (2) Measurement of liquid metal resistivity of test sample

[0105] 1) Place the test sample in a certain water and oxygen environment, perform a deformation test on the test sample, connect the liquid metal matrix to the solid metal electrode to measure the resistance of each groove of the liquid metal layer, and obtain the resistance value of the intersection by cross-testing the upper and lower liquid metal layers of the liquid metal matrix.

[0106] 2) The water and oxygen permeability of the sample to be tested is obtained through the correspondence between the calibrated water and oxygen permeability and the resistance value of the liquid metal layer to determine the local permeability of the packaging layer to be tested.

[0107] The packaging test method provided in this embodiment can accurately locate the position of the water and oxygen permeability difference through the electrical performance test of the liquid metal matrix, and the calculated result of the electrical signal is more accurate than the observed result.

[0108] It should be understood that although Figure 1 and Figure 6 The steps in the flowchart are shown in sequence as indicated by the arrows, but these steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified in this document, there is no strict order restriction for the execution of these steps, and these steps can be executed in other orders. In addition, Figure 1 and Figure 6 At least part of the steps may include multiple sub-steps or multiple stages. These sub-steps or stages are not necessarily executed at the same time, but can be executed at different times. The execution order of these sub-steps or stages is not necessarily sequential, but can be executed in turn or alternately with other steps or at least part of the sub-steps or stages of other steps.

[0109] The present application also provides a packaging and testing device, which implements the steps of the above packaging and testing method, such as Figure 9 As shown, the packaging test equipment includes a fixture 310, a detection module 320 and a processing module 330, wherein:

[0110] The fixture 310 is used to fix the flexible substrate layer in the test sample 340 and perform a deformation operation on the flexible substrate layer;

[0111] The detection module 320 is used to collect characteristic parameters of the liquid metal layer;

[0112] The processing module 330 is connected to the detection module 320 and is configured to receive characteristic parameters and obtain the water and oxygen transmission rate of the packaging layer to be tested according to the characteristic parameters.

[0113] In one embodiment, reference Figure 10 , further comprising a detection chamber 350, which is used to accommodate the test sample 340 and provide different detection environments.

[0114] In one embodiment, reference Figure 10 The detection module 320 includes a light source 3201 and an image acquisition device 3202. The light source 3201 is used to provide a test light source, and the image acquisition device 3202 is used to acquire surface image information of the liquid metal layer.

[0115] In one embodiment, the detection module 320 includes a resistance testing device (not shown in the figure), which is connected to the liquid metal layer and is used to obtain the resistance values ​​of the intersections of adjacent grooves of the liquid metal layer.

[0116] The light source 3201 is used to illuminate the surface of the test sample, and the image acquisition module 3202 is used to capture the changes in the surface of the liquid metal layer of the test sample, and transmit the acquired image information to the processing module 330. The processing module 330 is used to calculate the water and oxygen permeability of the package layer to be tested based on the image information. The detection chamber 350 can be a water-oxygen environment chamber that can adjust the environmental composition of water, oxygen and air. The clamp 310 is fixed on the flexible substrate layer to prevent damage to the package layer structure. In addition, the clamp 310 can perform a flexible deformation operation on the test sample. The flexible substrate is clamped and fixed on the clamp 310, and the clamp 310 can be a line clamp, and the contact position is a line. Stretching, torsion and bending can be completed. As Figure 11 As shown, during stretching, the clamps 310 stretch to both sides; during twisting, one clamp rotates and the other clamp remains stationary; during bending, the two clamps rotate upward 90° at the same time.

[0117] The measurement of the water and oxygen permeability of the organic-inorganic alternating multilayer composite film by the packaging test equipment provided in this embodiment includes the following steps:

[0118] Step 1: Encapsulate the liquid metal using an organic-inorganic alternating multilayer composite film.

[0119] (1) The PET substrate is cleaned by ultrasonic cleaning with deionized water and then dried in a vacuum oven. The surface of the PET substrate is bombarded with plasma to facilitate the adhesion of the liquid metal to the surface of the PET substrate.

[0120] (2) Preparation of liquid metal layer: In a glove box under an inert gas environment, a liquid metal layer with a thickness of 50 μm was formed on the above-mentioned cleaned and dried PET substrate by spin coating.

[0121] (3) The PET substrate with the liquid metal layer is encapsulated with an organic-inorganic alternating multilayer composite film, and the PET substrate with the liquid metal is placed in a vacuum coating machine, and the vacuum degree is drawn to less than 4×10 -4 Pa, evaporate a layer of UV curing glue on the surface of liquid metal, cure it with ultraviolet light, and grow a 10nm aluminum oxide film on the surface of UV curing glue using atomic layer deposition method. Repeat the above steps 3 times to form a UV curing glue-aluminum oxide composite encapsulation layer.

[0122] Step 2: Test the packaging effect of the packaged liquid metal layer

[0123] (1) Place the packaged test sample in the test room, set the temperature to 50℃ and the humidity to 95%. After fixing it on the fixture, set the fixture action to bend 10,000 times, once every 5 seconds, and the bending angle to 30°.

[0124] (2) Set the shooting position of the image acquisition module, turn on the light source, and start bending the test sample after the humidity and temperature conditions reach the preset conditions.

[0125] (3) The processing module records the pattern changes on the surface of the liquid metal layer, especially the circular spots and stripes in the bending area and the cracks at the bonding positions around it.

[0126] (4) The processing module determines the sealing quality of the package layer to be tested by the overall color of the liquid metal layer and the shape change speed of the cracking positions such as circular spots and stripes.

[0127] Measurement of water and oxygen permeability of AlQ3 / Al2O3 composite film by the packaging test equipment provided in this embodiment

[0128] Step 1: Encapsulate the liquid metal layer using an organic-inorganic alternating multilayer composite film

[0129] (1) A PDMS flexible substrate with soft protrusions evenly distributed on its surface was prepared. The PDMS substrate was cleaned using ultrasonic cleaning with deionized water and then dried in a vacuum oven. The surface of the PDMS substrate was plasma bombarded to facilitate the adhesion of liquid metal to the surface of the PDMS substrate.

[0130] (2) Preparation of liquid metal layer: A flexible substrate (hydrogel, PDMS, etc.) with dense micropores and grooves is placed on the PDMS surface, and liquid metal material is injected into the grooves to obtain a first liquid metal layer. A second liquid metal layer is then placed on the first liquid metal layer so that the grooves of the two liquid metal layers are cross-distributed.

[0131] (3) The PDMS substrate with two liquid metal layers was encapsulated with an AlQ3 / Al2O3 composite film, and the PDMS substrate with the liquid metal layer was placed in an atomic layer deposition device, and the vacuum degree was reduced to less than 4×10 -4 Pa, grow 10nm AlQ3 on the liquid metal surface, and then grow 10nm Al2O3 film, repeat the above steps 10 times to complete the preparation of the AlQ3 / Al2O3 composite film encapsulation layer.

[0132] Step 2: Test the packaging effect of the packaged liquid metal

[0133] (1) Place the packaged test sample in the test room, set the temperature to 80℃ and the humidity to 80%. After fixing it on the fixture, set the fixture action to bend 8000 times, stretch once every 3 seconds, and the stretch length ratio to 110%.

[0134] (2) Connect the liquid metal groove to the resistance testing equipment, and start stretching the device after the humidity and temperature conditions reach the preset conditions.

[0135] (3) The processing module records the resistance change of each matrix point (the intersection of the grooves). An increase in resistance indicates that obvious cracks or gaps have occurred in the corresponding area.

[0136] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0137] The above-described embodiments merely illustrate several implementations of the present invention, and while their descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the patent for this invention shall be determined by the appended claims.

Claims

1. A packaging test method, characterized in that: The method comprises: A test sample is provided, wherein a flexible substrate layer of the test sample is covered with a liquid metal layer, and the liquid metal layer is coated with a packaging layer to be tested; the flexible substrate layer adopts a microstructure; the microstructure is used to prevent the packaging layer to be tested from collapsing during flexible deformation; the packaging layer to be tested adopts a flexible packaging layer; Performing a deformation test on the test sample; the deformation test includes stretching or bending; Obtaining the water and oxygen transmission rate of the packaging layer to be tested under different deformation states by obtaining the gray value or resistance value of the test sample; The packaging quality of the packaging layer to be tested is determined according to the water and oxygen transmission rate.

2. The method according to claim 1, characterized in that Providing a test sample comprises: Providing a flexible substrate layer; forming the liquid metal layer on the flexible substrate layer by 3D printing or spin coating; The liquid metal layer is encapsulated by using the encapsulation layer to be tested to obtain the test sample.

3. The method according to claim 2, characterized in that The step of packaging the liquid metal layer by using the packaging layer to be tested includes: Encapsulating the liquid metal layer with the packaging layer to be tested on one side of the flexible substrate layer to obtain a packaging sample to be tested; The liquid metal layer is encapsulated using a standard encapsulation layer with a known water and oxygen permeability on the other side of the flexible substrate layer opposite to the encapsulation layer to be tested, to obtain a standard encapsulation sample.

4. The method according to claim 3, characterized in that The step of obtaining the water and oxygen transmission rate of the packaging layer to be tested under different deformation states includes: acquiring surface image information of the liquid metal layer at preset intervals; Obtaining a first grayscale value corresponding to the packaged sample to be tested according to the surface image information; The water and oxygen permeability of the packaging layer to be tested is obtained according to the first grayscale value and the second grayscale value and the water and oxygen permeability corresponding to the standard packaging sample.

5. The method according to claim 1, wherein At least two liquid metal layers are stacked on the flexible substrate layer of the test sample. Each liquid metal layer includes a flexible substrate with multiple grooves and liquid metal filled in the grooves, and the multiple grooves of two adjacent liquid metal layers are cross-distributed.

6. The method according to claim 5, characterized in that The step of obtaining the water and oxygen transmission rate of the packaging layer to be tested under different deformation states includes: Obtaining resistance values ​​of adjacent intersections of the grooves of the liquid metal layer at preset intervals; The water and oxygen permeability of the package layer to be tested is obtained according to the resistance value.

7. The method according to claim 1, characterized in that The step of obtaining the water and oxygen transmission rate of the packaging layer to be tested under different deformation states includes: A corresponding relationship between the water oxygen permeability and the grayscale value or resistance value of the liquid metal layer is provided.

8. A packaging test device, characterized in that: The device implements the steps of the packaging test method according to any one of claims 1 to 7, and the packaging test device includes a fixture, a detection module and a processing module, wherein: The fixture is used to fix the flexible substrate layer in the test sample and perform a deformation operation on the flexible substrate layer; the flexible substrate layer adopts a microstructure; the deformation operation includes stretching or bending; The detection module is used to collect characteristic parameters of the liquid metal layer; The processing module is connected to the detection module, and is configured to receive the characteristic parameters and obtain the water and oxygen transmission rate of the packaging layer to be tested according to the characteristic parameters.

9. The packaging and testing equipment according to claim 8, wherein: It also includes a detection chamber, which is used to accommodate the test sample and provide different detection environments.

10. The packaging test equipment according to any one of claims 8 or 9, characterized in that: The detection module includes a light source and an image acquisition device, wherein the light source is used to provide a test light source, and the image acquisition device is used to acquire surface image information of the liquid metal layer.

11. The packaging test equipment according to any one of claims 8 or 9, characterized in that: The detection module includes a resistance testing device, which is connected to the liquid metal layer and is used to obtain resistance values ​​of intersections of adjacent grooves of the liquid metal layer.

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