Filter wetting system and liquid supply system

Abstract

The application provides a filter wetting system and a liquid supply system. The filter wetting system comprises a filter device, a discharge pipeline and a wetting pipeline. The filter device comprises at least one filter. The discharge pipeline is connected with a blowdown port of the filter device and is used for discharging residual liquid generated after the filter device filters. The wetting pipeline is connected with the discharge pipeline at one end and is used for pre-wetting a standby filter. The liquid supply system comprises a liquid supply pipeline, a filter device, a spraying device, a discharge pipeline and a wetting pipeline. One end of the liquid supply pipeline is connected to a liquid supply source. The filter wetting system and the liquid supply system can pre-wet the standby filter during the normal liquid supply process without occupying the working period of the equipment, thereby effectively saving the downtime of the equipment, improving the output rate of the equipment and reducing the production cost.

Description

Technical Field

[0001] This invention belongs to the field of integrated circuit manufacturing, and in particular relates to a filter wetting system and a liquid supply system for organic solvents. Background Technology

[0002] Photolithography is a crucial process in semiconductor manufacturing. It involves transferring patterns from a photomask onto a substrate using a photoresist (also known as a photoresist) under light. The photolithography process requires various organic solvents, including photoresist and developer. If these solvents contain impurities such as bubbles or particles, the quality of the transferred pattern will degrade, or even lead to complete transfer failure. Therefore, existing photolithography systems using organic solvents require filters to remove impurities like bubbles and particles. Filters are typically made of hydrophilic or hydrophobic materials. Hydrophobic filters usually require pre-wetting before use. Only properly pre-wetted filters can be used for filtration. Insufficient or no wetting will generate bubbles, which can cause pressure instability in the coating system and, more importantly, lead to defects in the lithographic pattern when sprayed onto the substrate, affecting product yield. Therefore, pre-wetting of hydrophobic filters is critical. Currently, there is no dedicated pre-wetting device for these filters. To prevent filter contamination during prewetting, current technologies utilize the equipment's own liquid supply lines to prewet the corresponding backup filters. However, prewetting times can exceed 12 hours, severely impacting equipment output and restart time. This represents a significant waste for lithography equipment costing hundreds of millions of dollars, leading to unnecessary increases in manufacturing costs. Summary of the Invention

[0003] In view of the shortcomings of the prior art described above, the purpose of this invention is to provide a filter wetting system and a liquid supply system to solve the problems of reduced equipment output and increased production costs caused by using a liquid supply pipeline to pre-wet the standby filter in the prior art.

[0004] To achieve the above and other related objectives, the present invention provides a filter wetting system, comprising a filter device, a discharge pipeline, and a wetting pipeline. The filter device includes at least one filter. The discharge pipeline is connected to the drain outlet of the filter device for discharging residual liquid generated after filtration by the filter device. One end of the wetting pipeline is connected to the discharge pipeline for pre-wetting a standby filter.

[0005] Optionally, the filtration device includes a filter, which has an inlet, an outlet, and a drain outlet, and the inlet, outlet, and drain outlet of the filter correspond one-to-one with the inlet, outlet, and drain outlet of the filtration device.

[0006] In another alternative embodiment, the filtration device includes a first filter and a second filter. Both the first filter and the second filter include an inlet, an outlet, and a drain outlet. The inlet of the first filter corresponds to the inlet of the filtration device, the outlet of the first filter is connected to the inlet of the second filter, and the drain outlet of the second filter is connected to the discharge pipeline.

[0007] In one alternative, the other end of the wetting line is connected to the discharge line, and the backup filter is connected to the wetting line.

[0008] Optionally, a filter holder is provided on the wetting pipeline for placing the spare filter.

[0009] Optionally, a valve is provided on the wetting pipeline, and the valve is located at the end of the wetting pipeline adjacent to the discharge pipeline.

[0010] Optionally, the filter wetting system further includes a recovery container connected to the discharge line for recovering residual liquid discharged from the discharge line.

[0011] Alternatively, the filter wetting system may further include a timer connected to the valve for closing the valve after a set time.

[0012] In another alternative, the other end of the wetting conduit is connected to the recycling container.

[0013] The present invention also provides a liquid supply system, comprising a liquid supply pipeline, a filtration device, a spraying device, a discharge pipeline, and a wetting pipeline. One end of the liquid supply pipeline is connected to a liquid supply source. The filtration device includes an inlet, an outlet, and a drain outlet. The inlet of the filtration device is connected to the end of the liquid supply pipeline away from the liquid supply source, and the filtration device is used to filter impurities contained in the liquid in the liquid supply pipeline. The spraying device is connected to the outlet of the filtration device and is used to spray the filtered liquid onto a substrate. The discharge pipeline is connected to the drain outlet of the filtration device and is used to discharge residual liquid generated after filtration by the filtration device. One end of the wetting pipeline is connected to the discharge pipeline and is used to pre-wet a standby filter.

[0014] Optionally, the filtration device includes a filter, which has an inlet, an outlet, and a drain outlet, and the inlet, outlet, and drain outlet of the filter correspond one-to-one with the inlet, outlet, and drain outlet of the filtration device.

[0015] In another alternative embodiment, the filtration device includes a first filter and a second filter. Both the first filter and the second filter include an inlet, an outlet, and a drain outlet. The inlet of the first filter is connected to the end of the liquid supply pipeline away from the liquid supply source. The outlet of the first filter is connected to the inlet of the second filter. The outlet of the second filter is connected to the spraying device. The drain outlet of the second filter is connected to the discharge pipeline.

[0016] Optionally, the other end of the wetting pipeline is connected to the discharge pipeline, and the spare filter is connected to the wetting pipeline.

[0017] Optionally, a filter holder is provided on the wetting pipeline for placing the spare filter.

[0018] Optionally, a valve is provided on the wetting pipeline, and the valve is located at the end of the wetting pipeline adjacent to the discharge pipeline.

[0019] Optionally, the liquid supply system further includes a recovery container connected to the discharge pipeline for recovering residual liquid discharged from the discharge pipeline.

[0020] Optionally, the liquid supply system further includes a pressure stabilizing pump connected between the first filter and the second filter, for outputting the liquid filtered by the first filter to the second filter at a stable power.

[0021] Optionally, the liquid supply system further includes a timer connected to the valve for closing the valve after a set time.

[0022] Optionally, the other end of the wetting pipeline is connected to the recycling container.

[0023] Optionally, the liquid supply system further includes a storage container connected to the liquid supply pipeline between the liquid supply source and the filter device, the storage container being used to store the liquid supplied by the liquid supply source.

[0024] As described above, the filter wetting system and liquid supply system of the present invention have the following beneficial effects: the filter wetting system and liquid supply system of the present invention can pre-wet the standby filter during the normal liquid supply process without occupying the working time of the equipment, thus effectively saving equipment downtime, improving equipment output, and reducing production costs. Attached Figure Description

[0025] Figure 1 and Figure 2 The diagram shown is a structural schematic of the filter wetting system according to Embodiment 1 of the present invention.

[0026] Figure 3 The diagram shown is a schematic diagram of the liquid supply system according to Embodiment 2 of the present invention.

[0027] Figure 4 The diagram shown is a schematic diagram of the liquid supply system according to Embodiment 3 of the present invention.

[0028] Component designation explanation

[0029] 11 Liquid supply lines

[0030] 12 Liquid supply sources

[0031] 13 Filtration device

[0032] 131 First Filter

[0033] 132 Second Filter

[0034] 14 Spraying equipment

[0035] 15 Wetting Pipeline

[0036] 16, 24 Discharge Pipelines

[0037] 17 Filter holder

[0038] 18 Valves

[0039] 19 Recycling Containers

[0040] 20 Pressure Stabilizing Pump

[0041] 21 Delay Unit

[0042] 22 Storage containers

[0043] 31. Spare Filter

[0044] 41 Hydraulic pump

[0045] 42 Mass Flow Meter

[0046] 43 Hydraulic gauge Detailed Implementation

[0047] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0048] Please see Figures 1 to 4It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the present invention. Although the illustrations only show components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation, the shape, quantity and proportion of each component in the actual implementation can be arbitrarily changed, and the layout of the components may also be more complex.

[0049] Example 1

[0050] Figure 1 and Figure 2 The diagram shown is a structural schematic of the filter wetting system according to Embodiment 1 of the present invention. Figure 1 and Figure 2 As shown, the filter wetting system includes a filter device 13, a discharge pipe 16, and a wetting pipe 15. The filter device 13 includes at least one filter. The discharge pipe 16 is connected to the drain port of the filter device 13 and is used to discharge the residual liquid produced after filtration by the filter device 13. One end of the wetting pipe 15 is connected to the discharge pipe 16 and is used to pre-wet the standby filter 31. The filter wetting system of the present invention utilizes the residual liquid on the discharge pipe 16 to pre-wet the standby filter 31. Pre-wetting of the standby filter 31 can be performed during normal liquid supply without occupying the equipment's operating time, thus effectively saving equipment downtime, increasing equipment output, and reducing production costs.

[0051] As an example, the inlet of the filter device 13 is typically connected to a supply line to filter the liquid from the supply line. The residual liquid produced after filtration is discharged through the outlet line 16. This invention utilizes this residual liquid to pre-wet the standby filter 31. Various organic solvents used in the photolithography process of semiconductor manufacturing plants, including photoresist, propylene glycol methyl ether acetate (PGMEA), hexamethyldisilamine (HMDS), and xylene, primarily contain air bubbles. Therefore, the outlet line 16 is mainly for discharging air bubbles from the liquid. These air bubbles include those present in the photoresist itself and those generated by the filter. However, during the discharging process, a certain amount of liquid is inevitably carried away by the air bubbles, resulting in a liquid containing air bubbles after filtration. This liquid is discharged through the outlet line 16 and can be used to pre-wet the standby filter 31. The outlet of the filter device 13 is typically connected to the equipment's operating end, such as a spraying device 14, which will be further explained in other embodiments of this specification. The residual liquid produced after filtration by the filter device 13 is only unsuitable for photolithography coating process because it contains air bubbles. It contains very few other impurities besides air bubbles, so it can be used to pre-wet the spare filter 31 without worrying about contaminating the spare filter 31.

[0052] In one example, the other end of the wetting pipe 15 is connected to the discharge pipe 16, and the spare filter 31 is connected to the wetting pipe 15. Of course, in other examples, the other end of the wetting pipe 15 may also be directly connected to the plant's sewage system or to other recycling devices, which will be discussed later.

[0053] The backup filter 31 can be directly connected to the wetting conduit 15, or a filter bracket 17 can be installed on the wetting conduit 15 to hold the backup filter 31. The filter bracket 17 facilitates the installation and removal of the backup filter 31. When the filter bracket 17 is installed, a dummy filter can be installed on the filter bracket 17 to prevent leakage if pre-wetting is not required. There can be more than one wetting conduit 15, or multiple backup filters 31 can be pre-wetted simultaneously on the same wetting conduit 15; this embodiment does not impose strict limitations.

[0054] As an example, a valve 18 is provided on the wetting pipeline 15. The valve 18 is located at the end of the wetting pipeline 15 adjacent to the discharge pipeline 16, so that the valve 18 can be opened when pre-wetting of the backup filter 31 is required. Of course, there can be more than one valve 18. For example, when a backup filter 31 is placed, one valve 18 can be installed on each side of the backup filter 31. The two valves 18 can be of the same type, such as automatic on / off valves. In this case, a timer 21 can be set to be connected to one of the valves 18. For example, the timer 21 can be connected to the valve 18 adjacent to the liquid inlet of the backup filter 31, so that the valve 18 will be closed after a predetermined time to stop the pre-wetting operation. The predetermined time is usually the pre-wetting time required for the backup filter 31, which is usually determined when the backup filter 31 is manufactured. Of course, the valve 18 adjacent to the liquid inlet of the backup filter 31 can also be a manual valve, which can be opened or closed by the operator as needed for pre-wetting. The valve 18 on the other side can be an automatic switching valve. This embodiment does not impose strict restrictions.

[0055] The residual liquid in the discharge pipe 16, after flowing through the wetting pipe 15 for pre-wetting of the backup filter 31, can be directly connected to the plant's sewage system for harmless treatment before discharge. Alternatively, as shown in this embodiment, a recovery container 19 can be installed in the liquid supply system. This recovery container 19 is connected to the discharge pipe 16 to recover the residual liquid discharged from the discharge pipe 16. The recovered residual liquid can be reused, greatly saving resources and reducing production costs. The other end of the wetting pipe 15 can also be connected to the recovery container 19.

[0056] like Figure 1 As shown, in one example, the filtration device 13 includes a filter, which includes an inlet, an outlet, and a drain outlet, and the inlet, outlet, and drain outlet of the filter correspond one-to-one with the inlet, outlet, and drain outlet of the filtration device 13.

[0057] like Figure 2 As shown, in another example, the filtration device 13 includes a first filter 131 and a second filter 132. Both the first filter 131 and the second filter 132 include an inlet, an outlet, and a drain outlet. The inlet of the first filter 131 corresponds to the inlet of the filtration device 13, the outlet of the first filter 131 is connected to the inlet of the second filter 132, and the drain outlet of the second filter 132 is connected to the discharge pipe 16. When the filtration device 13 includes the first filter 131 and the second filter 132, the inlet of the first filter 131 is connected to the supply pipe, and the drain outlet of the first filter 131 can be connected to the plant's wastewater system, a recovery device, or the wetting pipe 15 can be installed on the discharge pipe of the first filter 131. Of course, the filtration device 13 can also include three or more filters, or it can be any other filtering device; this embodiment does not impose strict limitations.

[0058] The filter wetting system of this invention can be used to wet any filter that requires pre-wetting, especially filters containing photoresist, propylene glycol methyl ether acetate (PGMEA), hexamethyldisilamine (HMDS), xylene, and other organic solvents, particularly those containing hydrophobic organic solvents. Filters made of hydrophobic materials used with these solvents require pre-wetting before use, and the pre-wetting process typically lasts for several hours or even tens of hours. The filter wetting system of this invention allows for the pre-wetting of standby filters during normal liquid supply without interrupting equipment operation, thus effectively saving downtime, increasing equipment output, and reducing production costs.

[0059] Example 2

[0060] Figure 3 The diagram shown is a structural schematic of the liquid supply system according to Embodiment 2 of the present invention. Figure 3 As shown, the liquid supply system includes a liquid supply pipeline 11, a filter device 13, a spraying device 14, a discharge pipeline 16, and a wetting pipeline 15. One end of the liquid supply pipeline 11 is connected to a liquid supply source 12. The filter device 13 includes an inlet, an outlet, and a drain outlet. The inlet of the filter device 13 is connected to the end of the liquid supply pipeline 11 away from the liquid supply source 12. The filter device 13 is used to filter impurities contained in the liquid in the liquid supply pipeline 11. The spraying device 14 is connected to the outlet of the filter device 13 and is used to spray the filtered liquid onto the substrate. The discharge pipeline 16 is connected to the drain outlet of the filter device 13 and is used to discharge the residual liquid generated after filtration by the filter device 13. One end of the wetting pipeline 15 is connected to the discharge pipeline 16 and is used to pre-wet the standby filter 31. The liquid supply system of the present invention, by setting up a wetting pipeline connected to the discharge pipeline, uses the residual liquid in the discharge pipeline to pre-wet the standby filter. The standby filter can be pre-wetted during normal liquid supply without occupying the working time of the equipment, thus effectively saving equipment downtime, improving equipment output, and reducing production costs.

[0061] As an example, the liquid supply source 12 includes various organic solvents such as photoresist, propylene glycol methyl ether acetate (PGMEA), hexamethyldisilamine (HMDS), and xylene, especially various hydrophobic organic solvents. Filters made of hydrophobic materials used with these hydrophobic organic solvents require pre-wetting before use. Only filters that have been adequately pre-wetted can be used for filtration. This is because if the filter is not wetted or is insufficiently wetted, bubbles will form. These bubbles can cause pressure instability in the spraying system and, moreover, lead to lithographic defects on the substrate surface, affecting product yield. Therefore, pre-wetting of such hydrophobic filters before use is crucial. However, the pre-wetting process typically takes several hours or even tens of hours. In existing technologies, the liquid supply system's supply line 11 is used for pre-wetting. During pre-wetting, the supply system cannot supply liquid normally, forcing the lithography equipment to shut down, resulting in a significant decrease in equipment output and an increase in production costs. This invention proposes an improvement to address these problems.

[0062] The filter device 13 is used to filter impurities in the liquid in the liquid supply line 11. These impurities mainly include air bubbles and particulate impurities, with air bubbles being particularly prevalent in photoresist liquid. Air bubbles can cause uneven photoresist coating, which in turn can lead to a decrease in the quality of the transferred pattern or even complete failure of the pattern transfer. The filter device 13 can effectively remove air bubbles. Of course, during the process of removing impurities such as air bubbles, the filter device 13 will inevitably carry some liquid with it, resulting in residual liquid after filtration. This residual liquid containing air bubbles is discharged through the discharge line 16. In other words, the residual liquid produced after filtration by the filter device 13 is only unsuitable for photolithography coating process because it contains air bubbles. It contains very few other impurities besides air bubbles, so there is no need to worry about contaminating the backup filter 31 when using it for pre-wetting. In this embodiment, as an example, the filtration device 13 includes a filter, which includes an inlet, an outlet, and a drain. The inlet, outlet, and drain of the filter correspond one-to-one with the inlet, outlet, and drain of the filtration device 13. That is, in the case of only one filter, the filter is equivalent to the filtration device 13, and therefore the inlet, outlet, and drain of both are completely identical. The filter is preferably an air filter, and different specifications can be selected according to different process requirements.

[0063] The spraying device 14 may include one or more nozzles, and a mass flow meter 42 is provided on the pipeline adjacent to the spraying device 14 to ensure that the amount of liquid sprayed by the spraying device 14 meets the process requirements. A valve 18 may also be provided to open the supply of spraying liquid when needed.

[0064] One end of the wetting pipe 15 is connected to the discharge pipe 16, while the other end can be directly connected to the sewage system at the plant end, or, as shown in this embodiment, connected to the discharge pipe 16, meaning both ends of the wetting pipe 15 are connected to the discharge pipe 16. The spare filter 31 is connected to the wetting pipe 15. The spare filter 31 can be directly connected to the wetting pipe 15 as needed and removed after pre-wetting, or a filter bracket 17 can be installed on the wetting pipe 15 to specifically house the spare filter 31. Therefore, the spare filter 31 can be easily installed or removed. When the filter bracket 17 is installed, if pre-wetting is not required, a dummy filter can be installed on the filter bracket 17 to prevent leakage. There can be more than one wetting pipe 15, or multiple spare filters 31 can be pre-wetted simultaneously on the same wetting pipe 15; this embodiment does not impose strict limitations.

[0065] As an example, a valve 18 can be installed on the wetting pipeline 15, located at the end adjacent to the discharge pipeline 16. A valve 18 can also be installed at each end of the backup filter 31. The two valves 18 can be of the same type, such as automatic on / off valves. In this case, a timer 21 can be connected to one of the valves 18, for example, connecting the timer 21 to the valve 18 adjacent to the inlet of the backup filter 31, so that the valve 18 closes after a predetermined time to stop the pre-wetting operation. The predetermined time is usually the required pre-wetting time for the backup filter 31, which is typically determined at the factory. Alternatively, the valve 18 adjacent to the inlet of the backup filter 31 can be a manual valve, opened or closed by the operator as needed for pre-wetting, while the valve 18 on the other side can be an automatic on / off valve. This embodiment does not impose strict limitations.

[0066] The residual liquid in the discharge pipe 16, after flowing through the wetting pipe 15 for pre-wetting of the backup filter 31, can be directly connected to the plant's sewage system for harmless treatment before discharge. Alternatively, as shown in this embodiment, a recovery container 19 can be installed in the liquid supply system. This recovery container 19 is connected to the discharge pipe 16 to recover the residual liquid discharged from the discharge pipe 16. The recovered residual liquid can be reused, greatly saving resources and reducing production costs. The other end of the wetting pipe 15 can also be connected to the recovery container 19.

[0067] The liquid supply system can either directly deliver the liquid from the liquid supply source 12 to the spraying device 14, or, as shown in this embodiment, provide a storage container 22. The storage container 22 is connected to the liquid supply pipeline 11 between the liquid supply source 12 and the filter device 13. The storage container 22 is used to store the liquid supplied by the liquid supply source 12. By using the storage container 22 to buffer and store the liquid from the liquid supply source 12, the spraying operation can be avoided due to the instability of the liquid supply from the liquid supply source 12. A hydraulic pump 41 can be installed on the liquid supply pipeline 11 between the liquid supply source 12 and the storage container 22 to supply liquid from the liquid supply source 12 to the storage container 22. A mass flow meter 42 can also be installed on the liquid supply pipeline 11 to measure the mass flow rate of the liquid in the liquid supply pipeline 11. A hydraulic gauge 43 connected to the storage container 22 can also be installed to measure the liquid pressure in the storage container 22. Therefore, when the liquid level in the storage container 22 is insufficient, the hydraulic pump 41 can be turned on in time to replenish the liquid in the storage container 22. Alternatively, the hydraulic gauge 43 can be connected to the hydraulic pump 41 so that when the hydraulic gauge 43 detects that the liquid level in the storage container 22 is insufficient, the hydraulic pump 41 can be turned on automatically to replenish the liquid. A discharge pipe 24 can also be installed on the storage container 22, and a valve 18 can also be installed on the discharge pipe 24 to discharge the liquid in the storage container 22 and clean the storage container 22 when the liquid has quality problems or when the liquid needs to be replaced due to process changes. Using the liquid supply system of this embodiment, the backup filter 31 can be pre-wetted simultaneously during normal liquid supply, thus effectively saving equipment downtime, increasing equipment output, and reducing production costs.

[0068] Example 3

[0069] Figure 4 The diagram shown is a structural schematic of the liquid supply system according to Embodiment 3 of the present invention. Figure 3As shown, the specific structure of the liquid supply system in this embodiment is roughly the same as that of the liquid supply system described in Embodiment 2. The difference lies in that: the filtration device 13 in Embodiment 1 only includes one filter, while the filtration device 13 in this embodiment includes a first filter 131 and a second filter 132. Both the first filter 131 and the second filter 132 include an inlet, an outlet, and a drain outlet. The inlet of the first filter 131 is connected to the end of the liquid supply pipeline 11 away from the liquid supply source 12. The outlet of the first filter 131 is connected to the inlet of the second filter 132. The outlet of the second filter 132 is connected to the spraying device 14. The drain outlet of the second filter 132 is connected to the discharge pipeline 16. The first filter 131 and the second filter 132 can be the same or different models, preferably different, and preferably the filtration level of the second filter 132 is higher than that of the first filter 131 to further improve the filtration effect. The dual filtration of the liquid using the first filter 131 and the second filter 132 effectively improves the filtration effect, ensures the purity of the filtered liquid, and is beneficial to improving production yield. With the first filter 131 and the second filter 132 installed, a pressure-stabilizing pump 20 can also be installed between them to output the liquid filtered by the first filter 131 to the second filter 132 at a stable power, ensuring the hydraulic stability of the liquid ultimately supplied to the spraying device 14 and guaranteeing the stable operation of the spraying process. With the pressure-stabilizing pump 20 installed, even if the distance between the first filter 131 and the second filter 132 is relatively long, it is not a problem. For example, the first filter 131 can be placed near the chemical supply room at the plant end, and the second filter 132 can be placed near the process production end, such as near the spraying device 14. This ensures that the amount of liquid supplied to the spraying device 14 meets the process requirements while satisfying the plant layout optimization. When the first filter 131 and the second filter 132 are installed, it is preferable to connect the wetting pipe 15 to the discharge pipe 16 of the second filter 132, because the residual liquid discharged after filtration by the second filter 132 has higher purity, which helps to reduce contamination of the backup filter 31. The discharge pipe 16 can be connected to the recovery container 19. One end of the wetting pipe 15 is connected to the discharge pipe 16, and the other end can also be connected to the discharge pipe 16, or directly to the recovery container 19, or connected to the plant's sewage system for harmless treatment before discharge. This embodiment does not impose strict limitations.The drain outlet of the first filter 131 can be directly connected to the sewage system at the plant end, or it can be connected to the same recycling container 19 as the second filter 132, or to another separate recycling container. This embodiment does not impose strict limitations. Considering that the purity of existing photoresist supplies is very high, the impurities in the photoresist are mainly air bubbles. Therefore, a wetting pipe 15 connected to the drain outlet of the first filter 131 can be set up as needed to pre-wet the backup filter 31. The specific setup method is the same as described above and will not be repeated here. Furthermore, as needed, the number of filters included in the filtration device 13 can be three or more. Three or more filters are connected sequentially to filter the supplied liquid layer by layer, improving the filtration level. Correspondingly, a pressure stabilizing pump 20 can be set between every two adjacent filters to deliver the liquid filtered by the previous filter to the next filter at a stable power, until the last filter delivers the fully filtered and purified liquid to the spraying device 14. In the case of three or more filters, except for the discharge pipe 16 of the filter directly connected to the spraying device 14, which can be equipped with the wetting pipe 15, the drain ports of the other filters can be directly connected to the sewage system at the plant end, or connected to the same or different recycling devices. This embodiment does not impose strict limitations. Other structures not mentioned in this embodiment are the same as in Embodiment 2; please refer to Embodiment 2 for details. For the sake of brevity, they will not be described again here.

[0070] In summary, this invention provides a filter wetting system and a liquid supply system. The filter wetting system includes a filtration device, a discharge pipeline, and a wetting pipeline. The liquid supply system includes a liquid supply pipeline, a filtration device, a spraying device, a discharge pipeline, and a wetting pipeline. One end of the liquid supply pipeline is connected to a liquid supply source. The filtration device includes an inlet, an outlet, and a drain outlet. The inlet of the filtration device is connected to the end of the liquid supply pipeline away from the liquid supply source. The filtration device is used to filter impurities contained in the liquid in the liquid supply pipeline. The spraying device is connected to the outlet of the filtration device and is used to spray the filtered liquid onto a substrate. The discharge pipeline is connected to the drain outlet of the filtration device and is used to discharge residual liquid generated after filtration by the filtration device. One end of the wetting pipeline is connected to the discharge pipeline and is used to pre-wet a standby filter. The filter wetting system and liquid supply system of the present invention utilize the residual liquid on the discharge pipeline to wet the standby filter. The standby filter can be pre-wetted during normal liquid supply without occupying the equipment's working time. Therefore, it can effectively save equipment downtime, improve equipment output, and reduce production costs.

[0071] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A filter wetting system, characterized in that, include: A filtration device, comprising at least one filter; The discharge pipeline is connected to the drain outlet of the filter device and is used to discharge the residual liquid generated after filtration by the filter device. A wetting pipeline, one end of which is connected to the discharge pipeline, is used to pre-wet the spare filter; The filtration device includes a first filter and a second filter. Both the first filter and the second filter include an inlet, an outlet, and a drain outlet. The inlet of the first filter corresponds to the inlet of the filtration device. The outlet of the first filter is connected to the inlet of the second filter. The drain outlet of the second filter is connected to the discharge pipeline. The filtration level of the second filter is higher than that of the first filter.

2. The filter wetting system according to claim 1, characterized in that: The other end of the wetting pipeline is connected to the discharge pipeline, and the spare filter is connected to the wetting pipeline.

3. The filter wetting system according to claim 1, characterized in that: A filter holder is provided on the wetting pipeline for placing the spare filter.

4. The filter wetting system according to claim 1, characterized in that: A valve is installed on the wetting pipeline, and the valve is located at the end of the wetting pipeline adjacent to the discharge pipeline.

5. The filter wetting system according to claim 1, characterized in that: The filter wetting system also includes a recovery container connected to the discharge pipeline for recovering residual liquid discharged from the discharge pipeline.

6. The filter wetting system according to claim 4, characterized in that: The filter wetting system also includes a timer connected to the valve for closing the valve after a set time.

7. The filter wetting system according to claim 5, characterized in that: The other end of the wetting pipeline is connected to the recycling container.

8. A liquid supply system, characterized in that, include: A liquid supply line, one end of which is connected to a liquid supply source; A filtration device, comprising an inlet, an outlet, and a drain outlet, wherein the inlet of the filtration device is connected to the end of the liquid supply pipeline furthest from the liquid supply source, and the filtration device is used to filter impurities contained in the liquid in the liquid supply pipeline. A spraying device is connected to the liquid outlet of the filter device and is used to spray the filtered liquid onto the substrate. The discharge pipeline is connected to the drain outlet of the filter device and is used to discharge the residual liquid generated after filtration by the filter device. A wetting pipeline, one end of which is connected to the discharge pipeline, is used to pre-wet the spare filter; The filtration device includes a first filter and a second filter. Both the first filter and the second filter include an inlet, an outlet, and a drain outlet. The inlet of the first filter is connected to the end of the liquid supply pipeline away from the liquid supply source. The outlet of the first filter is connected to the inlet of the second filter. The outlet of the second filter is connected to the spraying device. The drain outlet of the second filter is connected to the discharge pipeline. The filtration level of the second filter is higher than that of the first filter.

9. The liquid supply system according to claim 8, characterized in that: The other end of the wetting pipeline is connected to the discharge pipeline, and the spare filter is connected to the wetting pipeline.

10. The liquid supply system according to claim 8, characterized in that: A filter holder is provided on the wetting pipeline for placing the spare filter.

11. The liquid supply system according to claim 8, characterized in that: A valve is installed on the wetting pipeline, and the valve is located at the end of the wetting pipeline adjacent to the discharge pipeline.

12. The liquid supply system according to claim 8, characterized in that: The liquid supply system also includes a recovery container connected to the discharge pipeline for recovering residual liquid discharged from the discharge pipeline.

13. The liquid supply system according to claim 8, characterized in that: The liquid supply system also includes a pressure stabilizing pump, which is connected between the first filter and the second filter and is used to output the liquid filtered by the first filter to the second filter at a stable power.

14. The liquid supply system according to claim 11, characterized in that: The liquid supply system also includes a timer connected to the valve, which is used to close the valve after a set time.

15. The liquid supply system according to claim 12, characterized in that: The other end of the wetting pipeline is connected to the recycling container.

16. The liquid supply system according to any one of claims 8 to 15, characterized in that: The liquid supply system also includes a storage container connected to the liquid supply pipeline between the liquid supply source and the filter device, and the storage container is used to store the liquid supplied by the liquid supply source.

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