A sample stage with a bridge structure

Abstract

The present invention proposes a sample stage with a bridge structure, which includes: a sample holder, a sample holder support frame, a bridge structure frame and a displacement mechanism. The sample holder is arranged on and supported by the sample holder support frame, and the sample holder has a sample receiving portion for receiving a sample to be tested. The sample holder support frame is arranged so that the sample holder support frame crosses the bridge structure frame, and a space for accommodating a magnet for providing a vertical magnetic field is defined between the top of the sample holder support frame and the top of the bridge structure frame. The bridge structure frame is constructed to support the magnet for providing a magnetic field. The displacement mechanism is located below the bridge structure frame and supports the sample holder support frame in a manner that can adjust the position of the sample holder support frame. The present invention solves the problem of spatial conflict between the magnet providing the vertical magnetic field and the stable displacement mechanism, and thus can ensure the stability of the magnetic field when displacing the sample to be tested.

Description

Technical Field

[0001] The invention belongs to the technical field of testing and measurement, and in particular relates to a sample stage with a bridge structure. Background Art

[0002] In the testing of magnetic materials or magnetic devices, a sample stage with a stable structure and on which the position of the sample can be adjusted is often required.

[0003] In order to maintain the stability of the sample, it is often necessary to place a displacement mechanism under the sample so that the center of gravity of the sample is located on the displacement table. At the same time, in order to apply a larger magnetic field to the sample, it is often necessary to use a magnet with a magnetic core, with the magnetic poles located above or below the sample, or with magnetic poles set at both the top and bottom, or with magnetic poles on the side of the sample. In most tests, space needs to be left above the sample for optical testing or for electrical testing configuration, so magnetic poles need to be placed under or on the side of the sample. In this case, the magnetic poles under the sample and the displacement mechanism will conflict in spatial configuration. Summary of the invention

[0004] In view of the shortcomings of the prior art, the present invention proposes a sample stage with a bridge structure, which includes: a sample holder, a sample holder support frame, a bridge structure frame, and a displacement mechanism. The sample holder is arranged on the upper surface of the sample holder support frame and supported by the sample holder support frame, and the sample holder has a sample receiving portion for receiving a sample to be tested. The bridge structure frame passes through the interior of the sample holder support frame so that the bridge structure frame intersects with the sample holder support frame, and a space is defined between the top of the sample holder support frame and the top of the bridge structure frame. The bridge structure frame is configured to support external auxiliary test equipment, and the lower end of the bridge structure frame is configured to be fixed to the test bench. The displacement mechanism is located in the space below the top of the bridge structure frame and supports the sample holder support frame in a manner that can adjust the position of the sample holder support frame.

[0005] Preferably, the sample holder support structure is formed into a polygonal frame structure or a door-shaped structure, and the sample holder is fixed on the upper surface of the polygonal frame structure or the door-shaped structure.

[0006] Preferably, the sample holder support structure is configured such that a gap or a break is provided on the upper surface thereof, and the center of the sample holder is aligned with the center of the gap or the break.

[0007] Preferably, the sample holder support frame having a polygonal frame structure or a door-shaped structure leaves no gap on the upper surface and is manufactured into a closed structure. The sample holder and the sample holder support frame are formed as one body, and the sample holder is arranged at the center of the upper surface of the sample holder support frame.

[0008] Preferably, the bridge structure frame includes a bridge deck and at least one pair of bridge arms of equal height. The bridge deck crosses the frame structure or the interior of the gate-shaped structure of the sample holder support frame, and the bridge deck is parallel to the sample holder; one end of a pair of bridge arms is respectively connected to the two ends of the bridge deck, and the other end of a pair of bridge arms is configured to be fixed on the test bench, and the displacement mechanism is located in the space inside the pair of bridge arms. When the sample holder support frame is formed into a polygonal frame structure, the lower side of the sample holder support frame is fixed to the upper surface of the displacement mechanism; when the sample holder support frame is formed into a gate-shaped structure, the lower ends of the two columns of the sample holder support frame are fixed to the upper surface of the displacement mechanism, and the top ends of the two columns are respectively connected to the two ends of the crossbeam of the gate-shaped structure.

[0009] Preferably, a slide member and a locking knob are provided on the upper surface of the bridge structure frame, the slide member is used to cooperate with the slider on the lower side of the magnet to guide the installation and movement of the magnet, and the locking knob is used to position and tighten the magnet installed by means of the slide and the slider.

[0010] Preferably, the sample stage with the bridge structure is further provided with a magnetic conductive member, which is in a polygonal frame structure and is arranged on the top surface of the bridge structure frame, the top surface of the magnetic conductive member is above the sample holder and parallel to the upper surface of the sample holder, and the magnetic conductive member and the sample holder support frame are in a cross structure. A light hole is provided on the top of the magnetic conductive member, and the light hole is located directly above the sample receiving portion.

[0011] Preferably, a space for accommodating the magnet for providing a vertical magnetic field is defined between the lower side of the magnetic conductive member and the top of the sample holder support frame.

[0012] Preferably, an in-plane magnet is fixed on the bridge structure frame, and the in-plane magnet is configured to provide an in-plane magnetic field with a magnetic field direction parallel to the surface of the sample to be tested to the sample to be tested.

[0013] The sample stage of the present invention solves the spatial conflict problem between the magnet providing the magnetic field and the stable sample support frame by setting a bridge structure frame, and realizes the placement of the magnet within a relatively close distance below the sample to be tested, thereby obtaining a larger vertical magnetic field. In addition, the sample stage of the present invention can make the center of gravity of the sample to be tested and the sample holder still within the table of the displacement mechanism, which has the advantage of stability compared to the cantilever support method, ensuring high stability when the sample is fixed or translated.

[0014] In addition, the bridge structure frame supporting the magnet and the displacement mechanism do not affect each other, so when the displacement mechanism adjusts the displacement of the sample to be tested, the magnetic field remains stable. Moreover, this structure is very convenient for disassembly and modification, and the bridge structure frame or the displacement mechanism can be disassembled and modified separately as needed. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the three-dimensional structure of an exemplary sample stage of the present invention.

[0016] Figure 2 yes Figure 1 A schematic diagram of the three-dimensional structure of the bridge structure frame in the sample stage is shown.

[0017] Figure 3 Can be set in Figure 1 Schematic diagram of the structure of the magnet providing a perpendicular magnetic field in the sample stage shown.

[0018] Figure 4 Several exemplary structures of sample holder support racks are shown, among which (a) is a sample holder support rack with a four-frame structure having a gap or a break at the top, (b) is a sample holder support rack with a four-frame structure having no gap or a break at the top, and (c) is a sample holder support rack with an eight-frame structure having a gap or a break at the top.

[0019] Figure 5 A schematic structural diagram of another exemplary sample stage is shown, in which the sample holder support frame is a quadrilateral frame structure with a fracture arranged on the top.

[0020] Figure 6 A schematic structural diagram of yet another exemplary sample stage is shown, in which an in-plane magnet supporting member is provided.

[0021] Figure 7 A schematic structural diagram of yet another exemplary sample stage is shown, which is provided with a magnetic conductive component. DETAILED DESCRIPTION

[0022] In order to help better understand the technical solution of the present application, the specific implementation methods of the present application will be described in detail below with reference to the accompanying drawings.

[0023] The present invention provides a sample stage with a bridge structure, which can be installed at a suitable position of a test bench for performing the required detection. Figure 1 As shown, the sample stage generally comprises: a sample holder 1, a sample holder support frame 2, a bridge structure frame 3 and a displacement mechanism 4.

[0024] The sample holder 1 is disposed on the top of the sample holder support frame 2 and supported by the sample holder support frame 2. The sample holder 1 has a sample receiving portion 5 for receiving a sample to be tested. Figure 1As shown, a sample holder adjusting knob 16 may be provided in the sample stage, and the sample holder adjusting knob 16 is connected to the sample holder 1 by, for example, a spring, and the pitch angle of the sample holder 1 is adjusted by the sample holder adjusting knob 16, thereby adjusting the pitch angle of the sample to be tested. Although the sample holder 1 is shown in the drawings to be in the shape of a flat plate, the sample holder 1 is not limited to a flat plate structure, and may also be other structures.

[0025] The sample holder support frame 2 is a frame structure, and is arranged so that the sample holder support frame 2 and the bridge structure frame 3 intersect each other, preferably perpendicular to each other. A space is defined between the top of the sample holder support frame 2 and the top of the bridge structure frame 3, and the space can be used to accommodate external auxiliary test equipment supported on the bridge structure frame 3, for example, a first magnet 8 for providing a vertical magnetic field, a light source, etc.

[0026] The bridge structure frame 3 is a bridge structure, which is configured to be fixedly installed at an appropriate position of the test bench, and is used to directly or indirectly support the first magnet 8 providing a vertical magnetic field and / or the second magnet 12 providing an in-plane magnetic field (see Figure 6 ).like Figures 1-2 and Figures 5 to 7 As shown, the bridge structure frame 3 can be constructed as a gate-type or Π-type frame structure, which includes a bridge deck 6 and a pair of equal-height bridge arms 7, the bridge deck 6 serving as a lateral support portion, and the pair of equal-height bridge arms 7 serving as two vertical support portions opposite to each other. Figure 1 and Figure 2 As shown, two slideway members 9 facing each other may be provided on the transverse support portion, and the longitudinal outer side surfaces of the slideway members 9 are aligned with or parallel to the longitudinal outer side surfaces of the transverse support portion. Figure 3 As shown, a slider 11 matched with the slide member 9 is provided at the bottom of the first magnet 8, and the slide member 9 can guide the slider 11 to move along its track, thereby guiding the movement of the first magnet 8. On the other hand, the slide member 9 is also used to position the first magnet 8, and a locking knob 10 can be provided on the slide member 9 to fasten the first magnet 8.

[0027] The displacement mechanism 4 is located in the space below the top of the bridge structure frame 3, and is connected to and supports the sample holder support frame 2 in a manner that can adjust the position of the sample holder support frame 2. Specifically, the lower side of the sample holder support frame 2 is fixed to the upper surface of the displacement mechanism 4, and the sample holder support frame 2 is displaced as the upper surface of the displacement mechanism 4 is displaced. The lower side of the displacement mechanism 4 is configured to be fixed to the test bench. The displacement mechanism 4 can be any suitable micro-displacement mechanism known in the prior art, such as a commercially available XYR axis manual fine-tuning platform of model LSP90-LM.

[0028] The displacement mechanism 4 and the bridge structure frame 3 are independent of each other, that is, when the displacement mechanism 4 adjusts the position of the sample holder support frame 2, the position of the bridge structure frame 3 will not change accordingly, thus ensuring that the first magnet 8 and / or the second magnet 12 will not be displaced, thereby ensuring the stability of the magnetic field.

[0029] The sample holder support frame 2 is preferably constructed as a door-shaped or II-shaped frame structure (see Figure 1 ) or polygonal frame structure (see Figures 4 to 7 ), a gap or break can be set at the top as needed.

[0030] When the sample holder support frame 2 is a door-shaped or Π-shaped frame structure, Figure 1 As shown, the sample holder support frame 2 spans the top of the bridge structure frame 3. The sample holder support frame 2 has a transverse support portion and two vertical support arms opposite to each other, and the transverse support portion constitutes the top of the sample holder support frame 2. When a gap or a break is provided at the top, the sample receiving portion 5 on the sample holder 1 is located directly above the gap or the break, and the first magnet 8 for providing a vertical magnetic field is provided directly below the sample receiving portion 5.

[0031] When the sample holder support frame 2 is a polygonal frame structure, Figures 5 to 7 As shown, the top of the bridge structure frame 3 passes through the internal space of the sample holder support frame 2 and is located above the lower side of the sample holder support frame 2. When a gap or a break is provided at the top of the sample holder support frame 2, the sample receiving portion 5 of the sample holder 1 is located directly above the gap or the break. The polygonal frame structure is preferably selected from a rectangular frame structure, a regular hexagonal frame structure or a regular octagonal frame structure.

[0032] When there is no gap or break at the top of the sample holder support frame 2, the sample holder 1 and the sample holder support frame 2 can be formed as one piece. In this case, the sample receiving portion 5 is provided at an appropriate position on the top of the sample holder support frame 2 as required, for example, the sample receiving portion 5 can be located directly above the first magnet 8 for providing a vertical magnetic field, or at the center of the in-plane magnetic field provided by the second magnet 12.

[0033] When the sample holder support frame 2 is constructed as a polygonal frame structure, the sample stage of the present invention may also be provided with an in-plane magnet support member 15 for supporting the second magnet 12, and the second magnet 12 is used to provide an in-plane magnetic field required for detection. Figure 6As shown, the sample holder support frame 2 is a rectangular frame structure, and the in-plane magnet support member 15 is arranged on the bridge structure frame 3 and supported by the top of the bridge structure frame 3, so that the in-plane magnet support member 15 is parallel to the bridge structure frame 3 and crosses the sample holder support frame 2. The in-plane magnet support member 15 has two lateral arms respectively located on both sides of the sample holder receiving portion 5, and each lateral arm is configured to be provided with a second magnet 12 for providing an in-plane magnetic field. The sample receiving portion 5 of the sample holder 1 is located at the center of the magnetic field provided by the second magnet 12.

[0034] When the sample holder support frame 2 is constructed as a polygonal frame structure, the sample stage of the present invention may also be provided with a magnetic conductive member 13. Figure 7 As shown, the magnetic conductive member 13 can be constructed as a frame structure, which is arranged on the bridge structure frame 3 and supported by the bridge structure frame 3. The lower side of the magnetic conductive member 13 passes through the internal space of the sample holder support frame 2, and the top of the magnetic conductive member 13 is located above the top of the sample holder support frame 2, so that the plane where the magnetic conductive member 13 is located intersects (preferably vertically intersects) with the plane where the sample holder support frame 2 is located, and is in the same plane or parallel to the plane where the bridge structure frame 3 is located. The top of the magnetic conductive member 13 can be provided with a light hole 14, and the light hole 14 is located just above the sample receiving portion 5 of the sample holder 1, so that the sample to be tested placed in the sample receiving portion 5 can be optically detected through the light hole 14. A space for accommodating a first magnet 8 for providing a vertical magnetic field is defined between the lower side of the magnetic conductive member 13 and the top of the sample holder support frame 2.

[0035] The exemplary sample stage of the present invention is described above in conjunction with the accompanying drawings. It should be noted that the various technical features described above in conjunction with the specific examples can be combined with each other to form a new implementation of the technical solution of the present invention. For example, the parts on both sides of the sample receiving portion 5 on the top of the sample holder support frame 2 can be configured to serve as in-plane magnet support members, so that there is no need to set up additional Figure 6 The in-plane magnet support member 15 shown in FIG.

[0036] The sample stage of the present invention has a simple structure, is easy to install and use, and has high stability. In particular, since the bridge structure frame 3 is provided in the sample stage, the spatial conflict problem between the coil poles providing the vertical and / or in-plane magnetic field and the stable sample support frame is well solved, and in particular, the magnet is placed at a relatively close distance below the sample to be tested, providing the required large vertical magnetic field for detection.

[0037] The above description of the specific implementation methods of the present application is intended to enable those skilled in the art to implement or practice the technical solution of the present application, but the scope of the present application is not limited to the above specific implementation methods. Without departing from the spirit of the present application, those skilled in the art may make various changes and modifications to the above specific implementation methods, and these changes and modifications also fall within the scope of protection of the present application.

[0038] Thus, the present application will not be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A sample stage with a bridge structure, comprising: The sample holder, the sample holder support frame, the bridge structure frame, and the displacement mechanism are characterized by: The sample holder is arranged on and supported by the sample holder support frame, and the sample holder has a sample receiving portion for receiving a sample to be tested. The bridge structure frame is constructed as a door-type or Π-shaped frame structure, and the bridge structure frame passes through the interior of the sample holder support frame so that the bridge structure frame intersects with the sample holder support frame, and a space is defined between the top of the sample holder support frame and the top of the bridge structure frame. The bridge structure frame is configured to support external auxiliary test equipment, and the lower end of the bridge structure frame is configured to be fixed to the test bench. The displacement mechanism is located in the space below the top of the bridge structure frame and supports the sample holder support frame in a manner capable of adjusting the position of the sample holder support frame. The bridge structure frame includes a bridge deck and at least one pair of bridge arms of equal height; The bridge deck crosses the frame structure or the door-shaped structure of the sample holder support frame, and the bridge deck is parallel to the sample holder; one end of a pair of bridge arms is respectively connected to the two ends of the bridge deck, and the other end of the pair of bridge arms is configured to be fixed on the test bench, and the displacement mechanism is located in the space inside the pair of bridge arms. When the sample holder support frame forms a polygonal frame structure, the lower side of the sample holder support frame is fixed to the upper surface of the displacement mechanism; when the sample holder support frame forms a gate-shaped structure, the lower ends of the two columns of the sample holder support frame are fixed to the upper surface of the displacement mechanism, and the top ends of the two columns are respectively connected to the two ends of the crossbeam of the gate-shaped structure.

2. The sample stage with a bridge structure according to claim 1, characterized in that: The sample holder support structure is formed into a polygonal frame structure or a door-shaped structure, and the sample holder is fixed on the upper surface of the polygonal frame structure or the door-shaped structure.

3. The sample stage with a bridge structure according to claim 2, characterized in that: The upper surface of the sample holder support frame is provided with a gap or a break, and the center of the sample holder is aligned with the center of the gap or the break.

4. The sample stage with a bridge structure according to claim 2, characterized in that: The upper surface of the polygonal frame structure or the door-shaped structure has no gaps and is manufactured into a closed structure. The sample tray and the sample tray support frame are formed as one body, and the sample tray is arranged at the center of the upper surface of the sample tray support frame.

5. The sample stage with a bridge structure according to claim 1, characterized in that: A magnet is fixed on the bridge structure frame, and the magnet is selected from a permanent magnet, an electromagnet composed of a coil, or an electromagnet composed of a magnetic core and a coil.

6. The sample stage with a bridge structure according to claim 1 or 5, characterized in that: A slide member and a locking knob are provided on the upper surface of the bridge structure frame. The slide member is used to cooperate with the slider on the lower side of the magnet to guide the installation and movement of the magnet. The locking knob is used to position and tighten the magnet installed by means of the slide member and the slider.

7. The sample stage with a bridge structure according to claim 5, characterized in that: A magnetic conductive component is also provided, which is in a polygonal frame structure and is arranged on the top surface of the bridge structure frame. The top surface of the magnetic conductive component is above the sample holder and parallel to the upper surface of the sample holder. The magnetic conductive component and the sample holder support frame are in a cross structure. A light-through hole is arranged on the top of the magnetic conductive component, and the light-through hole is located directly above the sample receiving portion.

8. The sample stage with a bridge structure according to claim 7, characterized in that: A space for accommodating a magnet for providing a vertical magnetic field is defined between the lower side of the magnetic conductive component and the top of the sample holder support frame.

9. The sample stage with a bridge structure according to claim 6, characterized in that: An in-plane magnet is fixed on the bridge structure frame, and the in-plane magnet is configured to provide an in-plane magnetic field with a magnetic field direction parallel to the surface of the sample to be tested for the sample to be tested.

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