A multi-silicon wafer flipping and positioning device

By designing a multi-silicon wafer flip positioning device, the suction cup traverse mechanism and the battery cell flip mechanism can be used to achieve synchronous flip and transport of multiple sets of silicon wafers, the problem of low single-chip processing efficiency in the prior art is solved and the working efficiency is improved.

CN111302063BActive Publication Date: 2025-02-18SUZHOU MAXWELL TECH CO LTD
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Patent Information

Application Number
CN202010166169.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-03-11
Publication Date
2025-02-18
Estimated Expiration
2040-03-11

AI Technical Summary

Technical Problem

In the prior art, silicon wafer flip devices can only process single silicon wafers, resulting in low flip and conveying efficiency of multiple sets of silicon wafers.

Method used

A multi-silicon wafer flip positioning device is designed, including a suction cup traverse mechanism, a battery cell flip mechanism and a shuttle plate positioning and transmission mechanism. Multiple groups of silicon wafers are grasped through the suction cup traverse mechanism and placed on the flip mechanism to realize synchronous flip after synchronous flip. Transport to the next station.

Benefits of technology

Synchronous flip and efficient transport of multiple sets of silicon wafers are realized, working efficiency is improved, and the problem of low single-chip processing efficiency in the existing technology is solved.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention discloses a multi-silicon wafer flipping and positioning device, belonging to the technical field of solar cell. The flipping and positioning device of the present invention comprises a bracket and a shuttle plate positioning and transmission mechanism, the bracket is provided with a first sliding module and a cell carrier mechanism, the first sliding module is used to drive the suction cup transverse movement mechanism to slide back and forth toward the cell carrier mechanism to grab the cell, the bottom of the suction cup transverse movement mechanism is provided with a cell flipping mechanism for receiving the cell group, the cell flipping mechanism performs synchronous flipping on the received cell group and makes it fall onto the shuttle plate positioning and transmission mechanism for transportation. The present invention overcomes the shortcomings of the prior art that the number of silicon wafer flips is limited, resulting in low efficiency in cell transportation, the suction cup transverse movement mechanism can slide back and forth multiple times to grab the cell and place it on the cell flipping mechanism, the cell flipping mechanism performs synchronous flipping on multiple groups of cells, and the shuttle plate positioning and transmission mechanism then transports multiple groups of cells to the next station for processing at the same time, thereby improving work efficiency.
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Description

Technical Field

[0001] The invention belongs to the technical field of solar cell chips, and more specifically, relates to a multi-silicon chip flipping and positioning device. Background Art

[0002] A silicon wafer is a sheet-like object made of silicon. It is generally made of very pure crystalline silicon (single crystal silicon). The molecular structure of single crystal silicon is very stable. During the production process, the silicon wafer needs to be flipped over to change the processing surface. In addition, when the silicon wafer is processed, it also needs to be flipped over for inspection. The existing silicon wafer flipping device usually flips a single silicon wafer.

[0003] For example, the patent application number is 2017215027453, the application date is November 13, 2017, and the invention is named as: a silicon wafer flipping device. The silicon wafer flipping device of the application includes a stand, a telescopic cylinder, a flipping assembly and a turntable assembly. The telescopic cylinder is arranged on the stand, and a guide column is arranged on the stand. The turntable assembly is arranged on the guide column. The turntable assembly is connected to the telescopic cylinder through a telescopic rod. The turntable assembly includes a turntable and a swing cylinder. The turntable is arranged above the swing cylinder and connected to the swing cylinder. The flipping assembly is arranged above the turntable. The flipping assembly includes a rotating cylinder, a flipping arm, a suction cup and a vacuum generator. The flipping arm is arranged on both sides of the rotating cylinder and connected to the rotating cylinder. The suction cup is arranged on the flipping arm, the vacuum generator is arranged on the rotating cylinder, and the suction cup is connected to the vacuum generator. The device can adjust the horizontal position and angle of the flipping assembly, but is not suitable for flipping multiple silicon wafers. Only one silicon wafer can be flipped at a time, and the production efficiency is low.

[0004] In summary, how to overcome the low efficiency of flipping silicon wafers in the prior art and achieve synchronous flipping and conveying of multiple groups of silicon wafers is a technical problem that urgently needs to be solved in the prior art. Summary of the invention

[0005] 1. Technical problem to be solved by the invention

[0006] The present invention overcomes the deficiency of the prior art that the number of silicon wafer flips is limited resulting in low efficiency in conveying battery cells, and provides a multi-silicon wafer flipping and positioning device. The suction cup transverse movement mechanism can slide back and forth multiple times to grab the battery cells and place them on the battery cell flipping mechanism. The battery cell flipping mechanism synchronously flips multiple groups of battery cells and makes them fall onto the shuttle positioning and transmission mechanism. The shuttle positioning and transmission mechanism then simultaneously transports the multiple groups of battery cells to the next workstation for processing, thereby improving work efficiency.

[0007] 2. Technical solution

[0008] In order to achieve the above object, the technical solution provided by the present invention is:

[0009] A multi-silicon wafer flipping and positioning device of the present invention comprises a bracket, a suction cup transverse movement mechanism and a shuttle plate positioning and transmission mechanism. The bracket is provided with a first sliding module and a battery cell carrying mechanism. The first sliding module is used to drive the suction cup transverse movement mechanism to slide back and forth toward the battery cell carrying mechanism to grab the battery cell. A battery cell flipping mechanism for receiving the battery cell group is provided at the bottom of the suction cup transverse movement mechanism. The battery cell flipping mechanism synchronously flips the received battery cell group and makes it fall onto the shuttle plate positioning and transmission mechanism for transportation.

[0010] As a further improvement of the present invention, the suction cup transverse movement mechanism includes a slide seat slidably connected to the first sliding module and a first vacuum suction cup arranged in an array on the slide seat, and the first vacuum suction cup is arranged downward to grab the battery cell.

[0011] As a further improvement of the present invention, the battery cell flipping mechanism includes a flipping base and a transmission shaft arranged in parallel on the flipping base, a second vacuum suction cup is arranged on the transmission shaft, and the second vacuum suction cup is arranged upward to receive the battery cell group.

[0012] As a further improvement of the present invention, at least one transmission shaft on the flip base is connected to the driving wheel, and the remaining transmission shafts are connected to the synchronous wheel, and a tensioning wheel is also provided between the transmission wheels.

[0013] As a further improvement of the present invention, the shuttle plate positioning and transmission mechanism includes a shuttle plate lifting mechanism and a second sliding module that drives the shuttle plate lifting mechanism to slide toward the battery cell flipping mechanism. When the shuttle plate lifting mechanism slides to the bottom of the battery cell flipping mechanism, the vacuum of the second vacuum suction cup fails to release the battery cell.

[0014] As a further improvement of the present invention, the shuttle plate lifting mechanism includes a silicon wafer support plate, a slider matched with the second sliding module is provided at the bottom of the silicon wafer support plate, and a positioning pin is also provided on the silicon wafer support plate.

[0015] As a further improvement of the present invention, the positioning pins are driven to rise and fall by a cylinder arranged at the bottom of the shuttle plate lifting mechanism. When the battery cell is placed on the silicon wafer support plate, the cylinder retracts and the battery cell enters the positioning groove formed by the positioning pins.

[0016] As a further improvement of the present invention, a graphite pad for placing the battery cells is also provided on the silicon wafer support plate, and the graphite pad is arranged in an array on the silicon wafer support plate.

[0017] As a further improvement of the present invention, positioning pins are arranged along the circumference of each graphite pad.

[0018] As a further improvement of the present invention, the battery cell carrying mechanism includes a carrier conveying track and a carrier arranged on the carrier conveying track, and the carrier is used to carry the battery cell group.

[0019] 3. Beneficial effects

[0020] Compared with the prior art, the technical solution provided by the present invention has the following significant effects:

[0021] (1) In the multi-wafer flipping and positioning device of the present invention, the suction cup transverse movement mechanism can slide back and forth multiple times to grab the battery cells and place them on the battery cell flipping mechanism. The battery cell flipping mechanism flips multiple groups of battery cells synchronously and releases them to fall onto the shuttle positioning and transmission mechanism at the bottom. The shuttle positioning and transmission mechanism then transports the multiple groups of battery cells to the next workstation for processing at the same time, thereby improving work efficiency.

[0022] (2) A multi-silicon wafer flipping and positioning device of the present invention, wherein the cell flipping mechanism comprises parallel transmission shafts, each of which is provided with a second vacuum suction cup, the second vacuum suction cup being arranged upward to receive a cell group, and a tensioning wheel being arranged between each transmission wheel, so as to realize synchronous rotation of the transmission shafts, thereby realizing synchronous flipping of multiple groups of cell groups, so that the cell groups are flipped into place to ensure effective docking between the shuttle positioning transmission mechanism and the cell flipping mechanism.

[0023] (3) In a multi-silicon wafer flipping and positioning device of the present invention, a positioning pin is provided on the shuttle lifting mechanism of the shuttle positioning and transmission mechanism. The number of cells released by the cell flipping mechanism and the occupied area are relatively large. The positioning pin can realize the positioning of the cell to achieve precise docking.

[0024] (4) In a multi-silicon wafer flipping and positioning device of the present invention, the positioning pins can be driven up and down by a cylinder arranged at the bottom of the shuttle plate lifting mechanism. When the battery cell is placed on the silicon wafer support plate, the cylinder retracts and the battery cell enters the positioning groove formed by the positioning pins. The positioning pins are arranged circumferentially along the graphite pad arranged in an array. Each positioning groove corresponds to a battery cell one by one, thereby realizing simultaneous positioning of multiple battery cells, improving the positioning accuracy of the shuttle plate lifting mechanism, and ensuring the transportation quality of the battery cells. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a structural schematic diagram of a multi-silicon wafer flipping and positioning device of the present invention;

[0026] Figure 2 It is a structural schematic diagram of the carrier board in the present invention;

[0027] Figure 3 It is a schematic diagram of the cooperation between the bracket and the suction cup transverse movement mechanism in the present invention;

[0028] Figure 4 It is a structural schematic diagram of the battery cell flipping mechanism in the present invention;

[0029] Figure 5 It is a structural schematic diagram of the shuttle plate positioning transmission mechanism in the present invention;

[0030] Figure 6 It is a structural schematic diagram of the shuttle plate lifting mechanism in the present invention.

[0031] Reference numerals:

[0032] 100, bracket; 110, first sliding module; 111, first motor;

[0033] 200, suction cup transverse movement mechanism; 210, slide seat; 211, first vacuum suction cup;

[0034] 300, battery cell flipping mechanism; 310, second motor; 311, first reducer; 312, tensioning wheel; 313, synchronous wheel; 314, transmission shaft; 315, second vacuum suction cup; 316, suction cup connecting block;

[0035] 400, shuttle plate positioning transmission mechanism; 410, shuttle plate lifting mechanism; 411, slider; 412, positioning pin; 413, cylinder; 414, graphite pad; 415, silicon wafer support plate; 420, second sliding module; 421, second reducer; 422, second motor;

[0036] 500, battery cell carrying mechanism; 510, carrier conveying track; 520, carrier. DETAILED DESCRIPTION

[0037] In order to further understand the content of the present invention, the present invention is described in detail in conjunction with the accompanying drawings and embodiments.

[0038] Example 1

[0039] Combination Figure 1 and Figure 3 A multi-silicon wafer flipping and positioning device of this embodiment includes a bracket 100, a suction cup transverse movement mechanism 200 and a shuttle plate positioning and transmission mechanism 400. The bracket 100 is provided with a first sliding module 110 and a battery cell carrying mechanism 500. The first sliding module 110 is used to drive the suction cup transverse movement mechanism 200 to slide back and forth toward the battery cell carrying mechanism 500 to grab the battery cell. A battery cell flipping mechanism 300 for receiving the battery cell group is provided at the bottom of the suction cup transverse movement mechanism 200. The battery cell flipping mechanism 300 synchronously flips the received battery cell group and makes it fall onto the shuttle plate positioning and transmission mechanism 400 for transportation.

[0040] In this embodiment, the battery cell carrying mechanism 500 includes a carrier conveying track 510 and a carrier 520 disposed on the carrier conveying track 510. The carrier 520 is used to carry multiple battery cells. Figure 2As shown, the carrier template of the carrier plate 520 can be adjusted according to the size of the silicon wafer to meet the loading of battery cells of different specifications. Specifically in this embodiment, the bracket 100 is arranged vertically, and the bracket 100 is provided with a first sliding module 110, and the first sliding module 110 can drive the suction cup transverse movement mechanism 200 to slide horizontally along the slide rail. When the suction cup transverse movement mechanism 200 slides to the battery cell bearing mechanism 500, the vacuum generator of the suction cup transverse movement mechanism 200 is opened to form a suction cup vacuum, and then the battery cell on the battery cell bearing mechanism 500 is adsorbed to achieve grasping, and then the battery cell is transported to the battery cell flipping mechanism 300 under the drive of the first sliding module 110. At this time, the vacuum breaking valve is opened, the suction cup vacuum fails, and the battery cell is released and falls onto the battery cell flipping mechanism 300.

[0041] In this embodiment, the first sliding module 110 can drive the suction cup transverse movement mechanism 200 to move back and forth multiple times between the battery cell carrying mechanism 500 and the battery cell flipping mechanism 300 to achieve multiple picking and placing of the battery cells. In this embodiment, the battery cell flipping mechanism 300 can receive the battery cell group that is transported by the suction cup transverse movement mechanism 200 by sliding back and forth and flip it synchronously, so that the battery cell is set downward. At this time, the shuttle plate positioning transmission mechanism 400 moves to the bottom of the battery cell flipping mechanism 300 to receive the battery cell group and then transport it. In this embodiment, the first sliding module 110 is driven by the first motor 111 set on the bracket 100.

[0042] In a multi-silicon wafer flipping and positioning device of the present embodiment, the suction cup transverse movement mechanism 200 can grab the battery cells multiple times and release them to make them fall onto the battery cell flipping mechanism 300, and the battery cell flipping mechanism 300 then flips multiple groups of battery cells synchronously, and the shuttle positioning and transmission mechanism 400 can simultaneously transport the multiple groups of battery cells placed on the battery cell flipping mechanism 300 to the next workstation for processing, thereby improving work efficiency.

[0043] Specifically in the present embodiment, the suction cup transverse movement mechanism 200 includes a slide 210 slidably connected to the first sliding module 110 and a first vacuum suction cup 211 arranged in an array on the slide 210, and the first vacuum suction cup 211 is arranged downward to grab the battery cell; the battery cell flipping mechanism 300 includes a flipping base and a transmission shaft 314 arranged in parallel on the flipping base, and a second vacuum suction cup 315 is provided on the transmission shaft 314, and the second vacuum suction cup 315 is arranged upward to receive the battery cell group.

[0044] In this embodiment, suction cup connection blocks 316 are equidistantly arranged on each transmission shaft 314, and the suction cup connection blocks 316 are used to install the second vacuum suction cup 315. Since the battery cell is relatively brittle and easy to break, the requirements for its transmission, transportation and flipping operations are relatively high. In this embodiment, the battery cell is grasped by the adsorption effect of the first vacuum suction cup 211 and the second vacuum suction cup 315, which can effectively protect the battery cell and achieve safe docking of the battery cell. In this embodiment, the battery cell flipping mechanism 300 drives the battery cell to flip 180° by driving the transmission shaft 314, so that the battery cell is downwardly docked with the shuttle plate positioning transmission mechanism 400. After the shuttle plate positioning transmission mechanism 400 moves to the bottom of the battery cell flipping mechanism 300 to catch the battery cell group, the transmission shaft 314 rotates 180° in the opposite direction to reset the second vacuum suction cup 315 for use during the next flip.

[0045] Preferably, in order to achieve synchronous flipping of multiple groups of battery cells, improve work efficiency, and ensure that the battery cells are flipped in place, in this embodiment, at least one transmission shaft 314 on the flip base is connected to the driving wheel 312, and the remaining transmission shafts 314 are connected to the synchronous wheel 313, and a tensioning wheel 314 is also provided between each transmission wheel. In this embodiment, the tensioning wheel 314 is provided between each transmission wheel, which can achieve a better transmission effect, prevent the synchronous wheel 313 from slipping due to the increase in the number of transmission shafts 314, and eventually cause the rotation of each transmission wheel to be asynchronous, and the battery cell is not flipped in place. Therefore, the tensioning wheel 314 provided can ensure the synchronous flipping of each group of battery cells, and the shuttle plate positioning transmission mechanism 400 and the battery cell flipping mechanism 300 are effectively connected.

[0046] Example 2

[0047] A multi-silicon wafer flipping and positioning device in this embodiment has a structure that is basically the same as that in Example 1. Furthermore, in this embodiment, the shuttle plate positioning and transmission mechanism 400 includes a shuttle plate lifting mechanism 410 and a second sliding module 420 that drives the shuttle plate lifting mechanism 410 to slide toward the battery cell flipping mechanism 300. When the shuttle plate lifting mechanism 410 slides to the bottom of the battery cell flipping mechanism 300, the vacuum of the second vacuum suction cup 315 fails to release the battery cell.

[0048] Specifically, in this embodiment, the second sliding module 420 is driven by the second motor 422 arranged on the shuttle positioning transmission mechanism 400. The direction in which the shuttle lifting mechanism 410 is driven by the second sliding module 420 to slide is perpendicular to the direction in which the suction cup transverse movement mechanism 200 is driven by the first sliding module 110 to slide, so as to make it more convenient for the battery cells to dock with each other.

[0049] Preferably, the shuttle plate lifting mechanism 410 includes a silicon wafer support plate 415, a slider 411 matching with the second sliding module 420 is provided at the bottom of the silicon wafer support plate 415, and a positioning pin 412 is also provided on the silicon wafer support plate 415. Since the battery cells released by the battery cell flipping mechanism 300 are in multiple groups, the number and occupied area are large, in this embodiment, the positioning pin 412 is provided on the silicon wafer support plate 415 to realize the positioning of the battery cells, so as to realize the precise docking of the battery cell groups.

[0050] Example 3

[0051] The present embodiment is a multi-silicon wafer flipping and positioning device, and its structure is basically the same as that of Embodiment 2. Furthermore, the positioning pin 412 in the present embodiment is driven to rise and fall by the cylinder 413 arranged at the bottom of the shuttle plate lifting mechanism 410. When the battery cell is placed on the silicon wafer support plate 415, the cylinder 413 retracts and the battery cell enters the positioning groove formed by the positioning pin 412.

[0052] In this embodiment, a graphite pad 414 for placing battery cells is also provided on the silicon wafer support plate 415. The graphite pad 414 is arranged in an array on the silicon wafer support plate 415. Preferably, the graphite pad 414 is arranged corresponding to each battery cell. The graphite pad 414 can prevent the battery cell from contacting other material parts to generate dirt, and plays an isolating and protective role for the battery cell.

[0053] Furthermore, in this embodiment, the positioning pins 412 are arranged along the circumference of each graphite pad 414, that is, the positioning pins 412 arranged circumferentially of each graphite pad 414 form positioning grooves, and each positioning groove corresponds to a battery cell one by one, thereby realizing simultaneous positioning of multiple battery cells, improving the positioning accuracy of the shuttle plate lifting mechanism 410, and ensuring the quality of battery cell transportation.

[0054] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A multi-silicon wafer flipping and positioning device, characterized in that: The invention comprises a support (100), a suction cup transverse movement mechanism (200) and a shuttle plate positioning and transmission mechanism (400); the support (100) is provided with a first sliding module (110) and a battery cell carrying mechanism (500); the first sliding module (110) is used to drive the suction cup transverse movement mechanism (200) to slide back and forth toward the battery cell carrying mechanism (500) to grab the battery cell; the bottom of the suction cup transverse movement mechanism (200) is provided with a battery cell flipping mechanism (300) for receiving a battery cell group; the battery cell flipping mechanism (300) performs synchronous flipping on the received battery cell group and causes it to fall onto the shuttle plate positioning and transmission mechanism (400) for transportation; The suction cup transverse movement mechanism (200) comprises a slide seat (210) slidably connected to the first sliding module (110) and first vacuum suction cups (211) arranged in an array on the slide seat (210), wherein the first vacuum suction cups (211) are arranged downward to grasp the battery sheet; The battery cell flipping mechanism (300) comprises a flipping base and a transmission shaft (314) arranged in parallel on the flipping base, the transmission shaft (314) being provided with a second vacuum suction cup (315), and the second vacuum suction cup (315) being arranged upwards to receive the battery cell group; The shuttle plate positioning transmission mechanism (400) comprises a shuttle plate lifting mechanism (410) and a second sliding module (420); The shuttle plate lifting mechanism (410) comprises a silicon wafer support plate (415), a sliding block (411) matching with the second sliding module (420) is provided at the bottom of the silicon wafer support plate (415), and a positioning pin (412) is also provided on the silicon wafer support plate (415); The positioning pin (412) is driven to rise and fall by a cylinder (413) disposed at the bottom of the shuttle plate lifting mechanism (410); when the battery cell is placed on the silicon chip support plate (415), the cylinder (413) retracts and the battery cell enters the positioning groove formed by the positioning pin (412).

2. The multi-silicon wafer flipping and positioning device according to claim 1, characterized in that: The second sliding module (420) is used to drive the shuttle plate lifting mechanism (410) to slide towards the battery cell flipping mechanism (300); when the shuttle plate lifting mechanism (410) slides to the bottom of the battery cell flipping mechanism (300), the vacuum of the second vacuum suction cup (315) fails to release the battery cell.

3. The multi-silicon wafer flipping and positioning device according to claim 1, characterized in that: The silicon wafer support plate (415) is also provided with a graphite pad (414) for placing a battery cell, and the graphite pads (414) are arranged in an array on the silicon wafer support plate (415).

4. The multi-silicon wafer flipping and positioning device according to claim 3, characterized in that: The positioning pins (412) are arranged along the circumference of each graphite pad (414).

5. A multi-silicon wafer flipping and positioning device according to any one of claims 1 to 4, characterized in that: The battery cell carrying mechanism (500) comprises a carrier conveying track (510) and a carrier (520) arranged on the carrier conveying track (510), wherein the carrier (520) is used to carry a battery cell group.

Citation Information

Patent Citations

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