A vacuum sample transfer device

Abstract

The present invention discloses a vacuum sample transfer device, which belongs to the technical field of vacuum accessories for scanning electron microscopes. It includes a sample transfer part, a ball valve, a docking part and a sample testing part, and the sample transfer part includes a rotating slider, a sealing plate, a sample transfer tube, a sample clamping table, a sample holder, a mobile grabbing mechanism, a sample transfer rod and a fixed tube. The present invention isolates the contact between the sample to be tested and the atmosphere, avoids air pollution or erosion of the sample, and keeps the sample in a vacuum environment; avoids the need to open the electron microscope hatch every time the sample is tested, saves the time for re-vacuuming, and keeps the electron microscope in a vacuum state; improves the service life of the electron microscope, and at the same time reduces the probability of failure of the scanning electron microscope, saves expensive maintenance costs, and improves the utilization rate of the instrument.

Description

Technical Field

[0001] The invention relates to a vacuum sample transfer device, belonging to the technical field of vacuum accessories for scanning electron microscopes. Background Art

[0002] Nowadays, more and more electron microscopy experiments require samples to be transferred under vacuum or inert gas. This is because once these materials are exposed to the atmosphere, they will be affected by the water and oxygen in the air and react chemically with the substances on the surface of the samples, making it impossible to observe and analyze the materials. Summary of the invention

[0003] The present invention aims at solving the problems mentioned in the above background technology by adopting the following technical solutions:

[0004] A vacuum sample transfer device comprises a sample transfer part, a ball valve, a docking part and a sample testing part, wherein the sample transfer part comprises a rotating slider, a sealing plate, a sample transfer cylinder, a sample clamping platform, a sample holder, a movable grabbing mechanism, a sample transfer rod and a fixed cylinder, one side of the sample transfer cylinder is connected with one end of the ball valve, the docking part is connected with the other end of the ball valve, the sample testing part is located at one side of the docking part, the sample transfer rod comprises a first sample transfer rod and a second sample transfer rod, one end of the first sample transfer rod and the second sample transfer rod are threadedly connected, the sample transfer cylinder is sleeved at one end of the first sample transfer rod, and a first sealing mechanism for sealing the first sample transfer rod is further provided inside the sample transfer cylinder, one end of the movable grabbing mechanism is detachably fixedly connected with the sample clamping platform by a rotating screw, the sample holder is fixedly mounted on the sample clamping platform, one side of the rotating slider is fixedly connected with the sealing plate by a screw, one end of the rotating slider is further provided with a transmission mechanism for rotating the rotating slider, and when the transmission mechanism rotates the rotating slider, the sealing plate blocks and / or separates the connection between the sample transfer cylinder and the ball valve.

[0005] As a preferred example, the mobile grabbing mechanism includes a mobile grabbing head, a mobile slider, and a mobile spring. The mobile grabbing head is in the shape of a stage. The other end of the first sample transfer rod is threadedly sleeved on one end of the mobile grabbing head. The mobile slider and the mobile spring are respectively located inside the mobile grabbing head, and the first sample transfer rod located inside the mobile grabbing head is fixed to the mobile spring, and the mobile spring also limits the movement inside the stage-shaped mobile grabbing head. One end of the mobile slider is fixed to the other end of the mobile spring, one end of the rotating screw penetrates and extends into the interior of the mobile grabbing head, and abuts against the other end of the mobile slider, and the other end of the rotating screw is fixed to the sample clamping stage. One end of the mobile grabbing head is provided with a rotating hole matching the rotating screw. When the sample clamping stage is fixed to the mobile grabbing head, the rotating screw is also clamped inside the rotating hole.

[0006] As a preferred example, the shape of the rotating hole is an L-shaped hole.

[0007] As a preferred example, the first sealing mechanism includes a first O-ring pressure block, a first type sealing ring and a first nut. The interior of the sample transfer tube is also provided with a first channel and a second channel. The first channel is located inside the sample transfer tube, and the second channel is located at one end of the sample transfer tube. One end of the first channel is connected to one side of the second channel, and the second channel and the first channel form a T-shaped channel. The number of the first circle pressure block and the first O-ring is multiple, and the multiple first circle pressure blocks and the multiple first O-rings are alternately distributed inside the first channel. The multiple first circle pressure blocks and the multiple first O-rings are all sleeved on the first sample transfer rod. The first nut is movably sleeved on the first sample transfer rod, and one side of the first nut is threadedly connected to the inner side wall of the second channel and presses one end of the first circle pressure block.

[0008] As a preferred example, the transmission mechanism includes a return spring, a fixed cylinder, a rotating shaft, and a rotating handle. The fixed cylinder is fixedly sleeved on the sample transfer cylinder, and the internal channel of the fixed cylinder is connected to the first channel of the sample transfer cylinder. The rotating shaft is fixedly sleeved inside the fixed cylinder, and the interior of the fixed cylinder is also provided with a second sealing mechanism for sealing the rotating shaft, which extends into the interior of the sample transfer cylinder and is fixed to the rotating slider. The rotating handle is fixed to one end of the rotating shaft, the return spring is sleeved on the rotating shaft, and one end of the return spring is abutted against the rotating handle, and the other end of the return spring is abutted against the second sealing mechanism on the side wall of the fixed cylinder.

[0009] As a preferred example, an acrylic sealing plate is further provided inside the sample transfer tube, and the acrylic sealing plate is also threadedly connected to the fixed tube, and one end of the acrylic sealing plate is also threadedly connected to a hook, and when the sample transfer tube seals the connection between the sample transfer tube and the ball valve, one end of the sealing plate is sleeved on the acrylic sealing plate, and a second O-ring is provided at the connection between the acrylic sealing plate and the sample transfer tube, and a nut pressing block is provided on the side of the sample transfer tube extending out of the acrylic sealing plate, which is used to press the sample transfer tube onto the acrylic sealing plate.

[0010] As a preferred example, the second sealing mechanism includes a second O-ring pressure block, a third O-ring and a second nut, the internal channel of the fixed cylinder is divided into a third channel and a fourth channel, the third channel is located inside the fixed cylinder, the fourth channel is located at one end of the fixed cylinder, one end of the third channel is connected to one side of the fourth channel, and the third channel and the fourth channel also form a T-shaped channel, the number of the second circle pressure block and the third O-ring are both multiple, and the multiple second circle pressure blocks and the multiple third O-rings are alternately distributed inside the third channel, the multiple second circle pressure blocks and the multiple third O-rings are all sleeved on the rotating shaft, the second nut is movably sleeved on the rotating shaft, and one side of the second nut is threadedly connected to the inner wall of the fourth channel and presses one end of the second circle pressure block, and the other end of the return spring is against the side wall of the second nut located inside the fixed cylinder.

[0011] As a preferred example, a groove is provided on the side of the sealing plate close to the acrylic sealing plate, and a fourth O-ring is provided in the groove for sealing the sealing plate and the acrylic sealing plate together.

[0012] As a preferred example, a threaded hole is provided on the acrylic sealing plate, and an external thread is provided on the fixing tube. The external thread on the fixing tube is threadedly connected to the threaded hole on the acrylic sealing plate, and a fifth O-ring is also provided at the connection between the outer wall of the fixing tube and the threaded hole for sealing the fixing tube and the threaded hole.

[0013] As a preferred example, the sample testing part includes a sample placement table and a scanning electron microscope fixed base, the scanning electron microscope is fixed to the scanning electron microscope fixed base by screws, the sample placement table is fixed to the scanning electron microscope fixed base by top screws, and the sample placement table is provided with a clamping table convex groove matching the sample clamping table.

[0014] The beneficial effects of the present invention are as follows: the present invention isolates the contact between the sample to be tested and the atmosphere, thereby preventing the sample from being polluted or corroded by the air, and keeping the sample in a vacuum environment; avoiding the need to open the electron microscope hatch for each sample test, saving the time for re-vacuuming, and keeping the electron microscope in a vacuum state; improving the service life of the electron microscope, while reducing the probability of failure of the scanning electron microscope, saving expensive maintenance costs, and improving the utilization rate of the instrument. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of the present invention;

[0016] Figure 2 for Figure 1 Schematic diagram of the structure of Part A;

[0017] Figure 3It is a schematic diagram of the structural relationship between the rotating slider, the sample transfer tube, the acrylic sealing plate, the sealing plate, the second sample transfer rod, the handle ball, the fixed tube, the return spring, the rotating shaft, and the rotating handle in the present invention;

[0018] Figure 4 for Figure 3 Schematic diagram of the structure of the middle BB part;

[0019] Figure 5 It is a cross-sectional view of the structural relationship between the acrylic sealing plate, the fixing cylinder, the return spring, the fifth O-ring, the second O-ring pressing block, the second nut, the rotating shaft, and the rotating handle in the present invention;

[0020] Figure 6 It is a structural schematic diagram of the sealing plate in the present invention when it is separated from the connecting part between the sample transfer tube and the ball valve with the assistance of the transmission mechanism;

[0021] Figure 7 It is a structural schematic diagram of the sealing plate in the present invention when it is closed at the connection point between the sample transfer tube and the ball valve with the assistance of the transmission mechanism.

[0022] In the figure: rotating slider 1, sample transfer tube 2, sealing plate 3, fourth O-ring 4, second O-ring 5, acrylic sealing plate 6, hook 7, nut block 8, sample clamp 9, sample holder 10, rotating screw 11, moving grab head 12, moving slider 13, moving spring 14, first sample transfer rod 15, first O-ring block 16, first O-ring 17, first nut 18, second sample transfer rod 19, handle ball 20, return spring 21, fifth O-ring 22, third O-ring 23, fixed tube 24, second O-ring block 25, second nut 26, rotating shaft 27, rotating handle 28, scanning electron microscope fixed base 29, sample bracket 30, docking part 31, ball valve 32, rotating hole 33, second channel 34. DETAILED DESCRIPTION

[0023] In order to make the technical means, creative features, objectives and effects of the present invention easier to understand, the present invention is further described below with reference to specific illustrations.

[0024] like Figure 1-7As shown, a vacuum sample transfer device includes a sample transfer part, a ball valve 32, a docking part 31 and a sample testing part. The sample transfer part includes a rotating slider 1, a sealing plate 3, a sample transfer tube 2, a sample clamping table 9, a sample holder 10, a movable grasping mechanism, a sample transfer rod, and a fixed tube 24. One side of the sample transfer tube 2 is connected to one end of the ball valve 32, and the docking part 31 is connected to the other end of the ball valve. The sample testing part is located on one side of the docking part 31. The sample transfer rod includes a first sample transfer rod 15 and a second sample transfer rod 19. One end of the first sample transfer rod 15 is threadedly connected to the second sample transfer rod 19. The sample transfer tube 2 It is sleeved on one end of the first sample transfer rod 15, and the interior of the sample transfer tube 2 is also provided with a first sealing mechanism for sealing the first sample transfer rod 15, one end of the mobile grasping mechanism is detachably fixedly connected to the sample clamping table 9 by a rotating screw 11, and the sample holder 10 is fixedly installed on the sample clamping table 9, one side of the rotating slider 1 is fixedly connected to the sealing plate 3 by a screw, and one end of the rotating slider 1 is also provided with a transmission mechanism for rotating the rotating slider 1. When the transmission mechanism rotates the rotating slider 1, the sealing plate 3 blocks and / or separates the connection between the sample transfer tube 2 and the ball valve 32.

[0025] The mobile grabbing mechanism includes a mobile grabbing head 12, a mobile slider 13, and a mobile spring 14. The mobile grabbing head 12 is in the shape of a stage. The other end of the first sample transfer rod 15 is threadedly sleeved on one end of the mobile grabbing head 12. The mobile slider 13 and the mobile spring 14 are respectively located inside the mobile grabbing head 12, and the first sample transfer rod 15 located inside the mobile grabbing head 12 is fixed to the mobile spring 14, and the mobile spring 14 also limits the movement inside the stage-shaped mobile grabbing head 12. One end of the mobile slider 13 is fixed to the other end of the mobile spring 14. One end of the rotating screw 11 penetrates and extends into the interior of the mobile grabbing head 12 and abuts against the other end of the mobile slider 13. The other end of the rotating screw 11 is fixed to the sample clamping stage 9. One end of the mobile grabbing head 12 is provided with a rotating hole 33 matching the rotating screw 11. When the sample clamping stage 9 is fixed to the mobile grabbing head 12, the rotating screw 11 is also clamped inside the rotating hole 33.

[0026] The shape of the rotating hole 33 is an L-shaped hole.

[0027] The first sealing mechanism includes a first O-ring pressing block 16, a first O-ring sealing ring 17 and a first nut 18. A first channel and a second channel 34 are further provided inside the sample transfer tube 2. The first channel is located inside the sample transfer tube 2, and the second channel 34 is located at one end of the sample transfer tube 2. One end of the first channel is connected to one side of the second channel 34, and the second channel 34 and the first channel form a T-shaped channel. There are multiple first O-ring pressing blocks 16 and multiple first O-ring sealing rings 17, and the multiple first O-ring pressing blocks 16 and multiple first O-ring sealing rings 17 are alternately distributed inside the first channel. The multiple first O-ring pressing blocks 16 and multiple first O-ring sealing rings 17 are all sleeved on the first sample transfer rod 15. The first nut 18 is movably sleeved on the first sample transfer rod 15, and one side of the first nut 18 is threadedly connected to the inner side wall of the second channel 34 and presses one end of the first O-ring pressing block 16.

[0028] The transmission mechanism includes a return spring 21, a fixed cylinder 24, a rotating shaft 27, and a rotating handle 28. The fixed cylinder 24 is fixedly sleeved on the sample transfer cylinder 2, and the internal channel of the fixed cylinder 24 is connected to the first channel of the sample transfer cylinder 2. The rotating shaft 27 is fixedly sleeved inside the fixed cylinder 24, and the interior of the fixed cylinder 24 is also provided with a second sealing mechanism for sealing the rotating shaft 27, which extends into the interior of the sample transfer cylinder 2 and is fixed to the rotating slider 1. The rotating handle 28 is fixed to one end of the rotating shaft 27. The return spring 21 is sleeved on the rotating shaft 27, and one end of the return spring 21 is abutted against the rotating handle 28, and the other end of the return spring 21 is abutted against the second sealing mechanism on the side wall of the fixed cylinder 24.

[0029] An acrylic sealing plate 6 is also provided inside the sample transfer tube 2, and the acrylic sealing plate 6 is also threadedly connected to the fixed tube 24. A hook 7 is also threadedly connected to one end of the acrylic sealing plate 6. When the sample transfer tube 2 blocks the connection between the sample transfer tube 2 and the ball valve 32, one end of the sealing plate 3 is sleeved on the acrylic sealing plate 6, and a second O-ring 5 is provided at the connection between the acrylic sealing plate 6 and the sample transfer tube 2, and a nut pressing block 8 is provided on one side of the sample transfer tube 2 extending out of the acrylic sealing plate 6 for pressing the sample transfer tube 2 onto the acrylic sealing plate 6.

[0030] The second sealing mechanism includes a second O-ring pressing block 25, a third O-ring 23 and a second nut 26. The internal channel of the fixed cylinder 24 is divided into a third channel and a fourth channel. The third channel is located inside the fixed cylinder 24, and the fourth channel is located at one end of the fixed cylinder 24. One end of the third channel is connected to one side of the fourth channel, and the third channel and the fourth channel also form a T-shaped channel. The number of the second O-ring pressing block 25 and the third O-ring 23 are both multiple, and the multiple second O-ring pressing blocks 25 and the multiple third O-ring 23 are alternately distributed inside the third channel. The multiple second O-ring pressing blocks 25 and the multiple third O-ring 23 are all sleeved on the rotating shaft 27. The second nut 26 is movably sleeved on the rotating shaft 27, and one side of the second nut 26 is threadedly connected to the inner side wall of the fourth channel and presses one end of the second O-ring pressing block 25. The other end of the return spring 21 is against the side wall of the second nut 26 located inside the fixed cylinder 24.

[0031] A groove is formed on one side of the sealing plate 3 close to the acrylic sealing plate 6 , and a fourth O-ring 4 is provided in the groove for sealing the sealing plate 3 and the acrylic sealing plate 6 .

[0032] A threaded hole is provided on the acrylic sealing plate 6, and an external thread is provided on the fixing tube 24. The external thread on the fixing tube 24 is threadedly connected to the threaded hole on the acrylic sealing plate 6. A fifth O-ring 22 is also provided at the connection between the outer wall of the fixing tube 24 and the threaded hole to seal the fixing tube 24 and the threaded hole.

[0033] The sample testing part includes a sample placing table 30 and a scanning electron microscope fixed base 29. The scanning electron microscope is fixed to the scanning electron microscope fixed base 29 by screws. The sample placing table 30 is fixed to the scanning electron microscope fixed base 29 by top screws, and a clamping table convex groove matching the sample clamping table 9 is provided on the sample placing table 30.

[0034] One end of the second sample transfer rod 19 is also fixedly connected to a handle ball 20 .

[0035] The ball valve 32 is also provided with a ball valve hook for hanging the hook 7 on the ball valve 32 .

[0036] The ball valve 32 is also provided with a ball valve exhaust port for releasing the gas inside the ball valve.

[0037] The process of closing or opening the connection between the sample tube 2 and the ball valve 32 through the sealing plate 3 is as follows: with the cooperation of the return spring 21, the rotating shaft 27 drives the rotating slider 1 to rotate, thereby driving the sealing plate 3 to rotate relative to the connection between the sample tube 2 and the ball valve 32, so that the connection between the sample tube 2 and the ball valve 32 can be closed or opened under the action of the sealing plate 3.

[0038] Working principle: First, place the sample in an inert gas drying room or a vacuum environment for sample loading, fix the sample on the sample holder 10, then pull the sample transfer rod handle ball 20 to make the sample clamp 9 completely enter the sample transfer tube 2, then rotate the rotary handle 28 to allow the sealing plate 3 to be clamped into the sample transfer tube 2, so that the connection between the sample transfer tube 2 and the ball valve can achieve a sealing effect, then connect the sample transfer part with the ball valve hook through the hook 7, and then use an external device to extract the gas inside the ball valve 32 through the ball valve exhaust port, then rotate the rotary handle 28 to open the sample transfer tube 2, and observe the vacuum pressure. If it meets the use requirements, then open the handle of the ball valve 32 in the vacuum, so that the electron microscope, the ball valve 32 and the sample transfer part are completely connected together. (The ball valve 32 uses a commercially available ball valve 32, so operate the handle on the ball valve 32 to make the ball valve 32, the electron microscope, the ball valve 32 and the sample transfer part The connection between them belongs to the prior art, so it is not explained in the text. In addition, the electron microscope is installed on the docking part 31 also using the prior art, for example, through a flange connection). Then gently push the handle ball 20 to push the sample clamping table 9 into the electron microscope until it is stuck in the clamping table convex groove on the sample setting table 30 on the scanning electron microscope fixed base 29 which is pre-installed in the electron microscope. Then gently push the handle ball 20 and rotate the ball 20 90 degrees. Driven by the sample transfer rod (the first sample transfer rod 15 and the second sample transfer rod 19 together constitute the sample transfer rod), the clamping table convex groove on the sample setting table 30 and the sample clamping table 9 are separated. Then pull the handle ball 20 back until the sample clamping table 9 and the sample holder 10 enter the sample transfer tube 2, then rotate the rotating handle 28 to close the sample transfer tube 2, and then close the ball valve 32 and the ball valve exhaust port in the vacuum environment. After the user finishes the experiment, it can be taken out according to the above method.

[0039] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A vacuum sample transfer device, comprising a sample transfer part, a ball valve (32), a docking part (31) and a sample testing part, characterized in that: The sample transfer part comprises a rotating slider (1), a sealing plate (3), a sample transfer tube (2), a sample clamping platform (9), a sample holder (10), a movable grasping mechanism, a sample transfer rod, and a fixed tube (24). One side of the sample transfer tube (2) is connected to one end of a ball valve (32), and the docking part (31) is connected to the other end of the ball valve. The sample testing part is located on one side of the docking part (31). The sample transfer rod comprises a first sample transfer rod (15) and a second sample transfer rod (19). One end of the first sample transfer rod (15) is threadedly connected to the second sample transfer rod (19). The sample transfer tube (2) is sleeved on one end of the first sample transfer rod (15), and the sample transfer rod (19) is threadedly connected to the second sample transfer rod (19). The interior of the sample tube (2) is also provided with a first sealing mechanism for sealing the first sample transfer rod (15); one end of the movable grasping mechanism is detachably fixedly connected to the sample clamping table (9) by a rotating screw (11); the sample holder (10) is fixedly mounted on the sample clamping table (9); one side of the rotating slider (1) is fixedly connected to the sealing plate (3) by a screw; one end of the rotating slider (1) is also provided with a transmission mechanism for rotating the rotating slider (1); when the transmission mechanism rotates the rotating slider (1), the sealing plate (3) blocks and / or separates the connection between the sample transfer tube (2) and the ball valve (32); The mobile grabbing mechanism comprises a mobile grabbing head (12), a mobile slider (13), and a mobile spring (14); the mobile grabbing head (12) is in the shape of a platform; the other end of the first sample transmission rod (15) is threadedly sleeved on one end of the mobile grabbing head (12); the mobile slider (13) and the mobile spring (14) are respectively located inside the mobile grabbing head (12); the first sample transmission rod (15) located inside the mobile grabbing head (12) is fixed to the mobile spring (14); and the mobile spring (14) also limits the movement of the mobile grabbing head (12) in the platform shape. Inside, one end of the movable slider (13) is fixed to the other end of the movable spring (14), one end of the rotating screw (11) penetrates and extends into the interior of the movable grabbing head (12) and abuts against the other end of the movable slider (13), the other end of the rotating screw (11) is fixed to the sample clamping table (9), and one end of the movable grabbing head (12) is provided with a rotating hole (33) matching the rotating screw (11), when the sample clamping table (9) is fixed to the movable grabbing head (12), the rotating screw (11) is also clamped in the rotating hole (33); The first sealing mechanism comprises a first O-ring pressing block (16), a first O-ring sealing ring (17) and a first nut (18); the interior of the sample transfer tube (2) is also provided with a first channel and a second channel (34); the first channel is located inside the sample transfer tube (2); the second channel (34) is located at one end of the sample transfer tube (2); one end of the first channel is connected to one side of the second channel (34); the second channel (34) and the first channel form a T-shaped channel; the first O-ring pressing block (16) and the first O-ring sealing ring (17) are connected to each other; The number of the first O-rings (17) is multiple, and the first O-ring pressing blocks (16) and the first O-rings (17) are alternately distributed inside the first channel. The first O-ring pressing blocks (16) and the first O-rings (17) are all sleeved on the first sample transfer rod (15). The first nut (18) is movably sleeved on the first sample transfer rod (15), and one side of the first nut (18) is threadedly connected to the inner wall of the second channel (34) and presses one end of the first O-ring pressing block (16); The transmission mechanism comprises a return spring (21), a fixed cylinder (24), a rotating shaft (27), and a rotating handle (28); the fixed cylinder (24) is fixedly sleeved on the sample transmission cylinder (2), and the internal channel of the fixed cylinder (24) is communicated with the first channel of the sample transmission cylinder (2); the rotating shaft (27) is fixedly sleeved inside the fixed cylinder (24), and the interior of the fixed cylinder (24) is also provided with a second sealing mechanism for sealing the rotating shaft (27), and extends into the interior of the sample transmission cylinder (2) and is fixed to the rotating slider (1); the rotating handle (28) is fixed to one end of the rotating shaft (27); the return spring (21) is sleeved on the rotating shaft (27), and one end of the return spring (21) abuts against the rotating handle (28), and the other end of the return spring (21) abuts against the second sealing mechanism on the side wall of the fixed cylinder (24); The second sealing mechanism comprises a second O-ring pressing block (25), a third O-ring (23) and a second nut (26); the internal channel of the fixed cylinder (24) is divided into a third channel and a fourth channel; the third channel is located inside the fixed cylinder (24); the fourth channel is located at one end of the fixed cylinder (24); one end of the third channel is connected to one side of the fourth channel; and the third channel and the fourth channel also form a T-shaped channel; the number of the second O-ring pressing block (25) and the third O-ring (23) are both multiple, and the multiple first O-rings (23) are multiple. Two O-ring pressing blocks (25) and a plurality of third O-ring sealing rings (23) are alternately distributed inside the third channel. The plurality of second O-ring pressing blocks (25) and the plurality of third O-ring sealing rings (23) are all sleeved on the rotating shaft (27). The second nut (26) is movably sleeved on the rotating shaft (27). One side of the second nut (26) is threadedly connected to the inner wall of the fourth channel and presses one end of the second O-ring pressing block (25). The other end of the return spring (21) abuts against the side wall of the second nut (26) located inside the fixed cylinder (24).

2. A vacuum sample transfer device according to claim 1, characterized in that: The shape of the rotating hole (33) is an L-shaped hole.

3. A vacuum sample transfer device according to claim 1, characterized in that: An acrylic sealing plate (6) is also provided inside the sample transfer tube (2), and the acrylic sealing plate (6) is also threadedly connected to the fixed tube (24). One end of the acrylic sealing plate (6) is also threadedly connected to a hook (7). When the sample transfer tube (2) blocks the connection between the sample transfer tube (2) and the ball valve (32), one end of the sealing plate (3) is sleeved on the acrylic sealing plate (6), and a second O-ring (5) for connecting the sample transfer tube (2) and the acrylic sealing plate (6) to the sample transfer tube (2) is provided at the connection between the acrylic sealing plate (6) and the sample transfer tube (2), and a nut pressing block (8) for pressing the sample transfer tube (2) onto the acrylic sealing plate (6) is provided on one side of the sample transfer tube (2) extending out of the acrylic sealing plate (6).

4. A vacuum sample transfer device according to claim 1, characterized in that: A groove is provided on one side of the sealing plate (3) close to the acrylic sealing plate (6), and a fourth O-type sealing ring (4) is provided in the groove for sealing the sealing plate (3) and the acrylic sealing plate (6) together.

5. A vacuum sample transfer device according to claim 3, characterized in that: The acrylic sealing plate (6) is provided with a threaded hole, the fixing tube (24) is provided with an external thread, the external thread on the fixing tube (24) is threadedly connected to the threaded hole on the acrylic sealing plate (6), and a fifth O-ring (22) for sealing the fixing tube (24) and the threaded hole is provided at the connection between the outer wall of the fixing tube (24) and the threaded hole.

6. A vacuum sample transfer device according to claim 1, characterized in that: The sample testing part comprises a sample placing table (30) and a scanning electron microscope fixed base (29); the scanning electron microscope is fixed to the scanning electron microscope fixed base (29) by screws; the sample placing table (30) is fixed to the scanning electron microscope fixed base (29) by top screws; and the sample placing table (30) is provided with a clamping table convex groove matching the sample clamping table (9).

Images