Testing equipment and testing methods

Abstract

The present invention is conceived to provide a detection device and a detection method, which include: linearly polarizing light; separating the linearly polarized light into a first light and a second light; modulating the first light and the second light to have a phase difference to generate an output wave light; converting the output wave light to have a linear line shape in a first direction to irradiate the converted output wave light to a measured object; receiving a measurement light from the measured object, and linearly polarizing the first light and the second light of the measurement light to generate interference light; and obtaining an image of the measured object from the interference light. The measured object can be scanned in a second direction intersecting the first direction, or can be rotated around an axis in a third direction perpendicular to the first direction and the second direction, so as to obtain spatial spectral ellipsometric information (e.g., spectral ellipsometric cubic information) along a two-dimensional spatial axis at real-time speed.

Description

[0001] This application claims the priority of Korean Patent Application No. 10-2018-0173269 filed on December 31, 2018, in the Korean Intellectual Property Office, and Korean Patent Application No. 10-2019-0121610 filed on October 1, 2019, in the Korean Intellectual Property Office, the disclosures of which are incorporated herein in their entirety by reference. Technical Field

[0002] The inventive concept relates to a detection apparatus and a detection method, and more particularly, to a detection apparatus and a detection method for measuring an image of a measured object. Background Art

[0003] Imaging technology has been widely used to investigate and study physical phenomena that change in real time, and can be applied to various diagnostic and detection tools. Polarization-based imaging technology is one of the high-resolution and high-precision measurement technologies applicable to different fields.

[0004] Most polarization measurement techniques require a mechanically rotating polarizer mechanism or an electronic polarization modulation device. However, polarization measurement techniques using mechanical mechanisms or electronic polarization modulation have the disadvantages of complex hardware construction and long measurement time. Summary of the invention

[0005] Some example embodiments of the inventive concepts provide a detection apparatus and a detection method capable of measuring an image at high speed.

[0006] According to some example embodiments of the present invention, a detection device may include: a light generator that generates light; a first linear polarizer that linearly polarizes the light; a polarization interferometer that separates the linearly polarized light into a first light and a second light, and modulates the first light and the second light to have phase difference information; a line converter that converts an output wave light into an output wave light that has a linear line shape in a first direction and provides a line shape to an object to be measured, the output wave light coming out of the polarization interferometer; a scanner that loads an object to be measured, the scanner being configured to scan the object to be measured in a second direction that intersects the first direction, or to rotate around an axis in a third direction that is perpendicular to the first direction and the second direction to be scanned; a second linear polarizer that receives measurement light and linearly polarizes the first light and the second light of the measurement light to generate interference light, the measurement light coming from the output wave light that passes through the object to be measured or the output wave light reflected from the object to be measured; and an imaging spectrometer that receives the interference light to obtain an image of the object to be measured.

[0007] In certain embodiments, the line converter may be a cylindrical lens that is elongated in the first direction.

[0008] In certain embodiments, the detection device may further include an imaging lens that converts the interference light into interference light having a linear line shape in the first direction and provides the interference light of the line shape to the imaging spectrometer.

[0009] In certain embodiments, the first direction and the second direction may be perpendicular to each other.

[0010] In a specific embodiment, the polarization interferometer may include: a polarization separator that separates linearly polarized light into first light and second light, the polarization separator including an incident surface, the linearly polarized light is incident on the incident surface, a first reflecting surface, the first light is incident on the first reflecting surface, and a second reflecting surface, the second light is incident on the second reflecting surface, wherein the first reflecting surface faces the incident surface, and wherein the first reflecting surface and the second reflecting surface are adjacent to each other; a first mirror on the first reflecting surface; and a second mirror on the second reflecting surface.

[0011] In certain embodiments, the optical path length of the first light traveling back and forth between the first reflective surface and the first mirror may be different from the optical path length of the second light traveling back and forth between the second reflective surface and the second mirror. The optical path difference between the first light and the second light may be 10 μm to 100 μm.

[0012] In certain embodiments, the first mirror and the second mirror may have an angle that deviates from the vertical direction. The angle of deviation may be in the range of 0.02° to 0.1°.

[0013] In a specific embodiment, the output wave light may be irradiated at a measurement angle deviating from a direction perpendicular to the object to be measured, and the measuring light may be reflected at a measurement angle deviating from a direction perpendicular to the object to be measured. The propagation direction of the output wave light, the propagation direction of the measuring light, and the second direction may be arranged on the same plane.

[0014] In a specific embodiment, the polarization splitter may be a non-polarization beam splitter, and the polarization interferometer may further include: a first sub-linear polarizer between a first reflective surface of the polarization splitter and a first mirror; and a second sub-linear polarizer between a second reflective surface of the polarization splitter and a second mirror, wherein the first sub-linear polarizer and the second sub-linear polarizer have a polarization difference of up to 90°. The line converter may be disposed between the polarization interferometer and the object to be measured.

[0015] In a specific embodiment, the polarization splitter may be a polarization beam splitter, and the detection device may further include a non-polarization beam splitter between the first linear polarizer and the polarization interferometer, the non-polarization beam splitter providing linearly polarized light to the polarization interferometer and providing output wave light to the object to be measured. The line converter may be disposed between the non-polarization beam splitter and the object to be measured.

[0016] In certain embodiments, the output wave light may be vertically incident on the object to be measured, and the measuring light may be vertically reflected from the object to be measured.

[0017] In a specific embodiment, the detection device may further include a non-polarization beam splitter, which is adjacent to the polarization interferometer and provides the output wave light to the object to be measured. The line converter may be arranged between the polarization interferometer and the non-polarization beam splitter. The output wave light may be provided to the object to be measured through the line converter and the non-polarization beam splitter, and the measurement light may be provided to the second linear polarizer through the non-polarization beam splitter.

[0018] In certain embodiments, the interference light may be vertically incident on the imaging spectrometer.

[0019] In certain embodiments, the light generated from the light generator may be white light.

[0020] In certain embodiments, the first light and the second light may be a P-polarized wave and an S-polarized wave, respectively.

[0021] According to some example embodiments of the present inventive concept, a detection method may include: linearly polarizing light; separating the linearly polarized light into a first light and a second light; modulating the first light and the second light to have a phase difference to generate an output wave light; converting the output wave light to have a linear line shape in a first direction to irradiate the converted output wave light to a measured object; receiving measurement light coming out of the measured object, and linearly polarizing the first light and the second light of the measurement light to generate interference light; and obtaining an image of the measured object from the interference light. The measured object may be scanned in a second direction intersecting the first direction, or rotationally scanned around an axis in a third direction perpendicular to the first direction and the second direction.

[0022] In certain embodiments, the detection method may further include: converting the interference light into a linear line shape in the first direction.

[0023] In certain embodiments, the light may be monochromatic light, and the wavelength of the light may be variable.

[0024] In certain embodiments, the light may be white light.

[0025] In certain embodiments, the detection method may further include: obtaining spatial spectral ellipsometric information about the axis of the first direction, the axis of the second direction, and the wavelength axis of the light from the interference light. An image of the measured object may be extracted from the spatial spectral ellipsometric information.

[0026] In certain embodiments, the first light and the second light may be a P-polarized wave and an S-polarized wave, respectively.

[0027] In a specific embodiment, the first direction and the second direction are perpendicular to each other. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A simplified schematic diagram illustrating a detection device according to an example of a first embodiment of the inventive concept is shown.

[0029] Figure 2A An example of an interference fringe image measured in an imaging spectrometer according to an example of the first embodiment of the inventive concept is shown.

[0030] Figure 2B Shown in Figure 2A Spectral interference signal with respect to wavelength at a position on the spatial axis shown in .

[0031] Figure 3 It shows that through Figure 2A An example of a spatial spectral frequency image produced by the Fourier transform of the interference fringe image shown in .

[0032] Figure 4 Shows the Figure 3 An example of spectral ellipsometric phase difference information in one-dimensional space obtained by inverse Fourier transform of a spatial spectral frequency image is shown in FIG.

[0033] Figure 5 A graph showing comparison between spectral ellipsometric phase difference information of various wavelengths at x=8.353 measured by a detection device according to the inventive concept and spectral ellipsometric phase difference information measured by a commercial device is shown.

[0034] Figure 6 Spectral ellipsometric information measured in the form of cubic units in two-dimensional space according to the present inventive concept is shown.

[0035] Figure 7 A simplified schematic diagram illustrating an example of a detection device according to a first embodiment of the inventive concept is shown.

[0036] Figure 8A simplified schematic diagram illustrating an example of a detection device according to a first embodiment of the inventive concept is shown.

[0037] Fig. 9 A simplified schematic diagram illustrating an example of a detection device according to a second embodiment of the inventive concept is shown.

[0038] Fig.10 An example of an interference fringe image measured in an imaging spectrometer according to an example of the second embodiment of the inventive concept is shown.

[0039] Fig.11 Shows about Fig.10 An example of obtaining spectral ellipsometric phase difference information in one dimension using an interference fringe image.

[0040] Fig.12 A simplified schematic diagram illustrating an example of a detection device according to a second embodiment of the inventive concept is shown.

[0041] Fig.13 A simplified schematic diagram illustrating an example of a detection device according to a second embodiment of the inventive concept is shown. DETAILED DESCRIPTION

[0042] Now, preferred embodiments of the present inventive concept will be described hereinafter with reference to the accompanying drawings.

[0043] In the following embodiments, reflection-based detection is described, but the embodiments are also similarly applicable to transmission-based detection.

[0044] Figure 1 A simplified schematic diagram showing an example of a detection device according to a first embodiment of the inventive concept is shown. Figure 1 The detection device may include a light generator 10, a collimating lens 20, a first linear polarizer 30, a polarization interferometer 40, a line converter 61, a scanner 70, a second linear polarizer 80, an imaging lens 62 and an imaging spectrometer 90.

[0045] The light generator 10 may generate white light. The light generator 10 may be a white light source having a uniform spectral distribution within a wide range of wavelengths λ. The light generator 10 may be, for example, a deuterium lamp or a tungsten halogen lamp. It is preferred that the white light has a wavelength range that is, for example, at least 200 nm wide. The wavelength range of the white light may include one or more of a near ultraviolet range (e.g., 200 nm to 400 nm), a visible light range (e.g., 400 nm to 700 nm), and a near infrared range (e.g., 700 nm to 1700 nm).

[0046] The white light may be irradiated to the collimating lens 20. The collimating lens 20 may convert the white light leaving the light generator 10 into collimated light.

[0047] The first linear polarizer 30 can be polarized by the input light E from the collimating lens 20. in The first linear polarizer 30 may linearly polarize the white light (eg, at a rotation angle of 45°).

[0048] The polarization interferometer 40 may be an integrated polarization interferometer, and the white light is polarization modulated by the polarization interferometer 40. The polarization interferometer 40 may include a polarization separator 41, a first mirror MR1, and a second mirror MR2, wherein the first mirror MR1 and the second mirror MR2 are integrally arranged on the polarization separator 41.

[0049] The polarization separator 41 may be a non-polarization beam splitter and may separate linearly polarized white light into first light and second light. The polarization separator 41 may have an incident surface 41c on which the linearly polarized light is incident, a first reflection surface 41a, and a second reflection surface 41b vertically adjacent to the first reflection surface 41a. The distance between the incident surface 41c and the first reflection surface 41a may be the same as the distance between the second reflection surface 41b and the opposing surface of the second reflection surface 41b. The first mirror MR1 may be disposed on the first reflection surface 41a, and the second mirror MR2 may be disposed on the second reflection surface 41b.

[0050] The first sub-linear polarizer P1 may be disposed between the first reflective surface 41a and the first mirror MR1, and the second sub-linear polarizer P2 may be disposed between the second reflective surface 41b and the second mirror MR2. For example, the first sub-linear polarizer P1 may be a linear polarizer oriented at 0°, and the second sub-linear polarizer P2 may be a linear polarizer oriented at 90°. Therefore, the first light may be linearly polarized into a P-polarized wave, and then the P-polarized wave may be incident on the first mirror MR1 and reflected from the first mirror MR1. The second light may be linearly polarized into an S-polarized wave, and then the S-polarized wave may be incident on the second mirror MR2 and reflected from the second mirror MR2. Alternatively, the first sub-linear polarizer P1 and the second sub-linear polarizer P2 may be arranged differently, and thus the first light and the second light may be an S-polarized wave and a P-polarized wave, respectively. For ease of description, the first light and the second light are explained below as a P-polarized wave and an S-polarized wave, respectively.

[0051] The gap z1 / 2 between the first reflective surface 41a and the first mirror MR1 may be different from the gap z2 / 2 between the second reflective surface 41b and the second mirror MR2. In order to achieve this configuration, air may be inserted between the first reflective surface 41a and the first mirror MR1 and between the second reflective surface 41b and the second mirror MR2. The first sub-linear polarizer P1 and the second sub-linear polarizer P2 may have the same thickness. Therefore, the first light and the second light may have different optical path lengths. An optical path difference OPD may be generated between the first light and the second light, i.e., z0=|z1--z2|. For the visible light range, the optical path difference OPD (z0=|z1--z2|) may be about 30μm to about 50μm. For other wavelength ranges, the optical path difference OPD may be appropriately changed. In the range including the near ultraviolet range, the visible light range and the near infrared range, the optical path difference OPD may be about 10μm to about 100μm. The polarization splitter 41 or the non-polarization beam splitter may not have an optical path difference.

[0052] In this case, the polarization interferometer 40 can separate the linearly polarized white light into a P polarized wave and an S polarized wave, and can modulate the P polarized wave and the S polarized wave to have a phase difference, which can result in an output wave light E out For example, the polarization interferometer 40 can generate a spectral carrier frequency.

[0053] The line converter 61 may be disposed between the polarization interferometer 40 and the object OBJ to be measured, and may convert the output wave light E out The output wave light E is converted into a linear shape in the first direction D1 and provides the linear shape to the measured object OBJ. out The line converter 61 may be, for example, a cylindrical lens elongated in the first direction D1. Alternatively, the line converter 61 may be a slit elongated in the first direction D1.

[0054] The output light E from the polarization interferometer 40 out The irradiation may be performed at a measurement angle θ that deviates from the direction perpendicular to the object OBJ on the scanner 70. For example, the angle θ corresponds to the output wave light E out The incident angle of the measuring light E mea The reflection may be performed at a measurement angle θ deviating from a direction perpendicular to the object OBJ to be measured.

[0055] The object OBJ to be measured may be loaded on the scanner 70, and the scanner 70 may be configured so that the object OBJ to be measured is conveyed (scanned) in a second direction D2 intersecting the first direction D1. Preferably, the second direction D2 may be perpendicular to the first direction D1. Optionally, the scanner 70 may be configured so that the object OBJ to be measured is scanned while rotating around an axis in a third direction D3 perpendicular to the first direction D1 and the second direction D2. For example, the third direction D3 may be perpendicular to the scanner 70.

[0056] The measured object OBJ may be, for example, a thin layer deposited on a silicon substrate. In this case, the phrase “the object OBJ does not exist” may indicate that the thin layer is not deposited on the silicon substrate.

[0057] The object OBJ may have polarization anisotropy. The polarization anisotropy of the object OBJ may affect the measurement light E emitted from the object OBJ. mea Amplitude modulation and phase modulation are provided. The second linear polarizer 80 may be provided with the measurement light E reflected from the measured object OBJ. mea .

[0058] The second linear polarizer 80 can receive the measurement light E mea The P polarized wave and the S polarized wave can be linearly polarized (for example, at a rotation angle of 45°). Therefore, the P polarized wave and the S polarized wave interfere with each other to generate polarization-modulated interference light E SP .

[0059] The imaging lens 62 may be disposed between the second linear polarizer 80 and the imaging spectrometer 90. The imaging lens 62 may be, for example, a cylindrical lens elongated in the first direction D1. The imaging lens 62 may thus direct the interference light E in the first direction D1. SP Alternatively, the imaging lens 62 may be a common imaging lens.

[0060] Interference light E SP Can be provided to the imaging spectrometer 90. The interference light E SP The interference light E imaged by the imaging lens 62 may vertically enter the incident surface of the imaging spectrometer 90. SP The scanner 70 can drive the measured object OBJ to move in the second direction D2, so it is feasible to obtain spectral ellipsometric information (e.g., spectral ellipsometric cubic information) in the two-dimensional space axis (e.g., the first direction D1 and the second direction D2) (see Figure 6 ). The imaging spectrometer 90 can obtain the interference light E SPSpatial spectrum interference fringes including spatial spectrum ellipsometric information of the measured object OBJ are generated. Similar results can be obtained even when the scanner 70 drives the measured object OBJ to rotate around the axis in the third direction D3.

[0061] In this embodiment, the output wave light E out The propagation direction of the measuring light E mea The propagation direction of and the first direction D1 may be arranged on the same plane.

[0062] In the above-mentioned embodiment, the polarization separator 41 is a non-polarization beam separator, but the present invention is not limited thereto. The polarization separator 41 may be, for example, a polarization beam separator. In this case, the polarization separator 41 may be omitted. Figure 1 The polarization separator 41 may separate the linearly polarized white light into the first light and the second light. The first light and the second light may be guided toward the first mirror MR1 and the second mirror MR2 and reflected from the first mirror MR1 and the second mirror MR2 without passing through the first sub-linear polarizer P1 and the second sub-linear polarizer P2.

[0063] An extraction method will be described below, in which: Figure 1 The detection device is used to extract spatial spectral ellipsometric information (spatial spectral ellipsometric phase difference Δ(x, k) and spatial spectral ellipsometric amplitude ratio Ψ(x, k)) of the measured object OBJ from the spatial spectral interference fringes.

[0064] The input light E incident on the polarization interferometer 40 in It can be expressed as follows.

[0065]

[0066] Here, k is the wave number represented by 2π / λ. The symbol λ represents the wavelength of the light source. In the above formula, j is the wave number that follows the law j 2 =-1. Symbols u and v represent the amplitudes of input wave lights for P polarization and S polarization, respectively. Symbols ξ and η represent the phases of input wave lights for P polarization and S polarization, respectively. The x direction represents the extension direction of the first direction D1 or the line converter 61. The component in the moving direction of the scanner 70 or in the y direction related to the second direction D2 is uniform and can be ignored.

[0067] The output light E from the polarization interferometer 40 out It is expressed as follows.

[0068] E out (x, k) = E1(x, k) + E2(x, k)

[0069] In the above equation, E1(x, k) and E2(x, k) are related to the P polarization modulation path and the S polarization modulation path, respectively. The terms E1(x, k) and E2(x, k) meet at the exit of the polarization interferometer 40 and can be expressed as follows.

[0070]

[0071] and,

[0072]

[0073] Here, J pol(45) represents the Jones matrix of the first linear polarizer 30 oriented at a rotation angle of 45°. BS is the Jones matrix of the non-polarizing beam splitter used as polarization splitter 41, and the term J pol(0) and J pol(90) are the Jones matrices of the first sub-linear polarizer P1 and the second sub-linear polarizer P2, respectively. M1 and J M2 Represent the Jones matrices of the first mirror MR1 and the second mirror MR2, respectively. The items z1 and z2 represent the optical path lengths of the P-polarized wave and the S-polarized wave traveling back and forth between the corresponding mirrors and the corresponding reflecting surfaces. It is assumed that there is no optical path difference OPD in the polarization separator 41 or the non-polarizing beam splitter. Any other components of the integrated polarization interferometer 40 are stably fixed and are therefore assumed to have the same optical path. The symbols u' and v' represent the newly defined unknown amplitude terms of E1(x, k) and E2(x, k), respectively. The symbols ξ' and η' represent the newly defined unknown amplitude terms of E1(x, k) and E2(x, k), respectively.

[0074] Output Wavelength E out from Figure 1 The anisotropic object OBJ shown in FIG. reflects the light and then turns into the measurement light E. mea The polarization anisotropy of the object OBJ can be directed toward the measuring light E mea Amplitude modulation and phase modulation are provided. The second linear polarizer 80 may be provided with the measurement light E reflected from the measured object OBJ. mea The second linear polarizer 80 can receive the measurement light E mea The P polarized wave and the S polarized wave can be linearly polarized (for example, at a rotation angle of 45°). Therefore, the P polarized wave and the S polarized wave interfere with each other to generate polarization-modulated interference light E SP The interference light from the measured object OBJ It can be expressed as follows.

[0075]

[0076] in,

[0077]

[0078]

[0079] here, and Represent the interference light waves related to P polarization and S polarization respectively. Symbol | r p | and |r s | respectively represent the amplitudes of the complex Fresnel transmission coefficients for P polarization and S polarization when reflected from the measured object. Symbol δ p and δ s They respectively represent the spatial phase changes of P polarization and S polarization in the case of reflection from the measured object.

[0080] The optical path difference OPD at the integrated polarization interferometer 40 according to the present inventive concept generates a spectral carrier frequency required for extracting spatial spectral ellipsometric information (eg, spatial spectral ellipsometric phase difference Δ(x, k) and spatial spectral ellipsometric amplitude ratio Ψ(x, k)).

[0081] From the interference light E SP The resulting spatial spectral interference spectrum I(x, k) can be expressed as follows.

[0082]

[0083] In order to perform calibration before obtaining spatial spectral ellipsometric information of the measured object OBJ, an interference reference spectrum I is extracted from a silicon substrate or in a state where the measured object OBJ does not exist. ref (x, k).

[0084]

[0085] Among them, Φ ref (x, k) = 2kz o +[ξ′(x,k)-η′(x,k)]

[0086] In the above equation, γ(x, k) represents the spatial spectral coherence function of the entire optical measurement system and is invariant regardless of the presence of the object being measured. ref (x, k) represents the reference spatial spectral phase function. The symbols α(x, k) and β(x, k) are related to the absolute values ​​of the DC components of the waves traveling along the P polarization path and the S polarization path, respectively. That is,

[0087] The spatial spectral coherence function γ(x, k) and the reference spatial spectral phase function Φ ref (x, k) can be obtained from the spatial spectral interference reference spectrum Iref (x, k) is obtained. To this end, it may be necessary to ref (x, k) is changed to

[0088]

[0089] This item Fourier transform can be performed in the frequency domain of the spatial spectrum, so that the unwanted DC and AC components can be filtered out. Spatial spectrum coherence function γ(x, k) and reference spatial spectrum phase function Φ ref (x, k) is extracted from the result of inverse Fourier transform of the data with the DC and AC components removed. ref The calibration step of (x, k) and γ(x, k) is only required once, and since Φ ref (x, k) and γ(x, k) are fixed values ​​inherent in the optical measurement system, so Φ ref (x, k) and γ(x, k) can be applied to Δ(x, k) and Ψ(x, k) of any measured object after a calibration step.

[0090] When the output wave E out Reflected from the object being measured and then becomes the measuring light E mea When the interference spectrum I obj (x, k) is expressed as follows.

[0091]

[0092] Among them, Φ obj (x, k) = 2kz o +[ξ′(x,k)-η′(x,k)]+[δ P (x, k)-δ S (x, k)]

[0093] Figure 2A The spatial spectrum interference spectrum I of the measured object OBJ is shown obj (x, k), where I obj (x, k) is measured in the imaging spectrometer 90 according to the first embodiment of the inventive concept. The measured object OBJ is a silicon oxide layer (SiO2) with a nominal thickness of 1.5 μm deposited on a silicon substrate. Figure 2A In FIG. 1 , the horizontal axis represents the spectral axis (λ), the vertical axis represents the spatial axis (x) in the first direction D1, and the brightness represents interference information sensitive to spatial spectral polarization. An interference fringe image is seen along the spectral axis (λ) and the spatial axis (x). Figure 2B Shown in Figure 2A The spectral interference signal at a wavelength λ at a position (e.g., x=2.79 mm) on the spatial axis of .

[0094] The detection apparatus according to the first embodiment of the inventive concept may obtain spectral ellipsometric information of a one-dimensional space (ie, a first direction D1 ) of the object OBJ to be measured using a spectral carrier frequency.

[0095] Figure 3 Shows when Figure 2A An example of a spatial spectrum frequency image produced when the interference fringe image of is Fourier transformed in the frequency domain of the spatial spectrum. Figure 3 In the figure, the horizontal axis is the spectral frequency axis (f λ ), the vertical axis is the spatial frequency axis (f x ). The Fourier transform is performed in the frequency domain of the spatial spectrum, and then the unwanted DC and AC components can be filtered out.

[0096] After that, the reference spatial spectrum phase function Φ can be extracted by performing ref The spatial spectral phase function Φ of the measured object is extracted by using a Fourier transform similar to the Fourier transform of (x, k) obj (x, k).

[0097] The spatial spectral ellipsometric phase difference Δ(x, k) can be obtained as follows.

[0098] Δ(x, k) = Φ obj (x, k)-Φ ref (x, k)

[0099] =δ P (x, k)-δ S (x, k)

[0100] Figure 4 The spatial spectral ellipsometric phase difference Δ(x, k) of the measured object is shown. Figure 4 In , the horizontal axis represents the spectral axis λ, the vertical axis represents the spatial axis x in the first direction D1, and the brightness represents the ellipsometric phase difference Δ(x, k) of the spatial spectrum. The measured object OBJ is a silicon oxide layer (SiO2) with a nominal thickness of 1.5 μm deposited on a silicon substrate.

[0101] Figure 5 A comparison between the spatial spectral ellipsometric phase difference Δ(x, k) measured using a detection device conceived according to the present invention and Δ(k) at a specific point measured using a commercial tool (e.g., a spectroscopic ellipsometer available from JA Woollam) is shown, showing almost identical results. Figure 5 The spectral ellipsometric phase difference Δ(k) shown in is Figure 4 The results at the position x=8.352 mm are shown in FIG.

[0102] The spatial-spectral ellipsometric amplitude ratio Ψ(x, k) can be obtained in a manner similar to that used to obtain the spatial-spectral ellipsometric phase difference Δ(x, k).

[0103] In the case of reflection from an anisotropic object, the interference spectrum I obj (x, k) can be expressed as follows.

[0104]

[0105] here,

[0106] at last,

[0107]

[0108]

[0109] Furthermore, these terms α'|t p | and β'|t s | can be used to obtain the spatial spectral ellipsometric amplitude ratio Ψ(x, k), expressed as follows.

[0110]

[0111] The detection device according to the present invention can be configured so that the spatial ellipsometric information of the measured object OBJ moving along the second direction D2 is continuously measured along the two-dimensional spatial axis (e.g., the first direction D1 and the second direction D2) to obtain the spatial ellipsometric information (e.g., the spectral ellipsometric cubic information) (see Figure 6 ).

[0112] Reference Figure 6 The bottom surface represents the spatial axis (ie, x-axis) and the spectral axis (ie, λ-axis) in the first direction D1, and the vertical axis represents the spatial axis (ie, y-axis) in the second direction D2. The brightness of each cubic unit represents spatial spectral ellipsometric information.

[0113] The detection device according to the present invention can provide a device without a mechanical rotation mechanism or electronic signal modulation, which processes the signal of three-dimensional spectroscopic ellipsometric cubic data to detect microscopic defects in two-dimensional space or measure the uniformity of nanopatterns or nanofilms in two-dimensional space.

[0114] Figure 7 A simplified schematic diagram showing another example of a detection device according to the first embodiment of the present invention is shown. Omissions will be made to avoid reference to Figure 1 Repeated explanation of components and functions discussed.

[0115] Reference Figure 7According to an example of the first embodiment of the inventive concept, a non-polarization beam splitter 50 may be further included in the detection device. The non-polarization beam splitter 50 may be disposed between the first linear polarizer 30 and the polarization interferometer 40. For example, the input wave light E linearly polarized (e.g., at a rotation angle of 45°) in the first linear polarizer 30 in The polarization interferometer 40 may be provided through the non-polarization beam splitter 50 .

[0116] The polarization separator 41 of the polarization interferometer 40 may be a polarization beam splitter. Figure 1 The first sub-linear polarizer P1 and the second sub-linear polarizer P2 may not be provided. The polarization separator 41 may separate the linearly polarized white light into the first light and the second light. The first light and the second light may be guided toward the first mirror MR1 and the second mirror MR2 and reflected from the first mirror MR1 and the second mirror MR2 without passing through the first sub-linear polarizer P1 and the second sub-linear polarizer P2.

[0117] The output wave light E modulated by polarization in the polarization interferometer 40 out The output wave light E from the polarization interferometer 40 can be provided to the object OBJ to be measured on the scanner 70 through the non-polarization beam splitter 50 and the line converter 61. out The irradiation may be performed at a measurement angle θ that deviates from a direction perpendicular to the object OBJ on the scanner 70. For example, the angle θ corresponds to the output wave E out The incident angle of the measuring light E mea The reflection may be performed at a measurement angle θ deviating from a direction perpendicular to the object OBJ to be measured.

[0118] The polarization anisotropy of the object OBJ can affect the measurement light E emitted from the object OBJ. mea Amplitude modulation and phase modulation are provided. The second linear polarizer 80 may be provided with the measurement light E reflected from the measured object OBJ. mea , which can lead to interference light E SP The interference light E can be generated by the imaging lens 62. SP Provided to the imaging spectrometer 90. Interference light E SP The incident surface of the imaging spectrometer 90 can be vertically entered. The imaging spectrometer 90 can be SP Spatial spectrum interference fringes including spatial ellipsometric information of the object OBJ to be measured are generated.

[0119] Figure 8 A simplified schematic diagram showing an example of a detection device according to a first embodiment of the present invention is shown. Omissions will be made to avoid reference to Figure 1 Repeated explanation of components and functions discussed. The components in this example may be spatially arranged differently than those shown in FIG. 1 .

[0120] Reference Figure 8 According to an example of the first embodiment of the present inventive concept, a non-polarization beam splitter 50 may be further included in the detection device. The non-polarization beam splitter 50 may be disposed on one side of the polarization interferometer 40, and the line converter 61 may be placed between the polarization interferometer 40 and the non-polarization beam splitter 50. The non-polarization beam splitter 50 may convert the output wave light E from the line converter 61 into out Provided to the measured object OBJ.

[0121] Output Wavelength E out The object OBJ on the scanner 70 can be vertically irradiated, and the measurement light E mea It can be reflected vertically from the measured object OBJ.

[0122] The measurement light E reflected from the measured object OBJ mea It may re-enter the non-polarizing beam splitter 50 and travel to the second linear polarizer 80 .

[0123] Fig. 9 A simplified schematic diagram showing an example of a detection device according to a second embodiment of the present invention is shown. Omissions will be made to avoid repetition of references to Figure 1 In the detection device according to the present embodiment, the polarization interferometer 40 can be used with reference to Figure 1 The polarization interferometers discussed are different.

[0124] Reference Fig. 9 , the first mirror MR1 and the second mirror MR2 of the polarization interferometer 40 are not perpendicular to each other. For example, the first mirror MR1 and the second mirror MR2 may have an off-axis angle ε that deviates from the perpendicular direction. The off-axis angle ε may be about 0.01° to about 1°, preferably 0.02° to 0.1°. Because the first mirror MR1 is tilted at the off-axis angle ε, the polarization interferometer 40 can generate a high spatial carrier frequency to spatially modulate polarization signals separated on the spatial spectrum.

[0125] Therefore, the polarization interferometer 40 can separate the linearly polarized white light into P polarization wave and S polarization wave, and can allow the P polarization wave and the S polarization wave to have a spatial phase difference. For example, the polarization interferometer 40 can generate a high spatial carrier frequency with a spatial phase shift.

[0126] In addition, ignore Figure 1 The optical path difference OPD between the first light and the second light shown in is feasible.

[0127] The first light and the second light output from the polarization interferometer 40 may be provided to the measured object OBJ through the line converter 61. The measured object OBJ may have polarization anisotropy. The polarization anisotropy may provide amplitude modulation and phase modulation to the light coming out of the measured object OBJ. The second linear polarizer 80 may be provided with the measurement light E reflected from the measured object OBJ. mea .

[0128] The second linear polarizer 80 can receive the measurement light E mea The P polarized wave and the S polarized wave can be linearly polarized (for example, at a rotation angle of 45°). Therefore, the P polarized wave and the S polarized wave interfere with each other to generate polarization-modulated interference light E SP The imaging spectrometer 90 can obtain the interference light E SP Spatial spectral interference fringes including spatial spectral ellipsometric information of the object OBJ to be measured are generated.

[0129] Interference light E SP The interference light E can be provided to the imaging spectrometer 90 through the imaging lens 62. The imaging spectrometer 90 can obtain the interference light E from the imaging spectrometer 90. SP Produce spatial spectral interference fringes.

[0130] In the aforementioned embodiment, the polarization splitter 41 is a non-polarization beam splitter, but the present invention is not limited thereto. The polarization splitter 41 may be, for example, a polarization beam splitter. In this case, Fig. 9 The first sub-linear polarizer P1 and the second sub-linear polarizer P2 may not be used. In this case, the polarization separator 41 may separate the linearly polarized laser beam into the first light and the second light. The first light and the second light may be guided toward the first mirror MR1 and the second mirror MR2 and reflected from the first mirror MR1 and the second mirror MR2 without passing through the first sub-linear polarizer P1 and the second sub-linear polarizer P2.

[0131] The following will describe an extraction method in which Fig. 9 The detection device is used to extract spatial spectral ellipsometric information (spatial spectral ellipsometric phase difference Δ(x, k) and spatial spectral ellipsometric amplitude ratio Ψ(x, k)) of the measured object OBJ from the interference fringes.

[0132] The input light E incident on the polarization interferometer 40 in It can be expressed as follows.

[0133]

[0134] Here, k is the wave number represented by 2π / λ. The symbol λ represents the wavelength of the light source. The symbol j is the wave number that follows the rule j. 2= -1. The symbols x' and y' represent axes on the polarization interferometer 40. The symbols u and v represent the amplitudes of the incident light waves along the x' and y' axes, respectively. The symbols ξ and η represent the phases of the incident light waves along the x' and y' axes, respectively. The P polarized wave and the S polarized wave are oriented toward the x' and y' axes, respectively.

[0135] The output light E from the polarization interferometer 40 out It is expressed as follows.

[0136] E out (x′,y′,k)=E1(x′,y′,k)+E2(x′,y′,k)

[0137] Here, E1(x', y') and E2(x', y') are respectively related to the P polarization path and the S polarization path. The terms E1(x', y') and E2(x', y') meet at the exit of the polarization interferometer 40 and can be expressed as follows.

[0138]

[0139] and,

[0140]

[0141]

[0142] Here, J pol(4.5) represents the Jones matrix of the first linear polarizer 30 oriented at a rotation angle of 45°. BS is the Jones matrix of the non-polarizing beam splitter used as polarization splitter 41, and the term J pol(0) and J pol(90) are the Jones matrices of the first sub-linear polarizer P1 and the second sub-linear polarizer P2, respectively. M1 and J M2 Denote the Jones matrices of the first mirror MR1 and the second mirror MR2 respectively. Symbol k x1 , k y1 , k x2 and k y2 and Fig. 9 The symbol k is related to the off-axis angle ε. x1 and k y1 represents the component of the wave vector traveling along the P polarization path of the polarization interferometer 40, and the symbol k x2 and k y2 represents the component of the wave vector traveling along the S-polarization path of the polarization interferometer 40 .

[0143] Symbols u' and v' represent the newly defined unknown amplitude terms of E1(x', y') and E2(x', y'), respectively. Symbols ξ' and η' represent the newly defined unknown amplitude terms of E1(x', y') and E2(x', y'), respectively.

[0144] The spatial optical path difference in the polarization interferometer 40 may become a condition for generating spatial interference fringes. The line converter 61 may radiate an output wave light E having a linear line shape in the first direction D1. out Since the spatial interference fringes are important only in the first direction D1 or the x-direction, the symbols E1(x', y', k) and E2(x', y', k) may be represented as follows.

[0145]

[0146] and,

[0147]

[0148] Output Wavelength E out from Fig. 9 The anisotropic object OBJ shown in FIG. reflects the light and then turns into the measurement light E. mea The polarization anisotropy of the object OBJ can be directed to the measuring light E mea Provides amplitude modulation and phase modulation. mea It can be expressed as follows.

[0149]

[0150] Here, the x direction represents the first direction D1 or the extending direction of the line converter 61. The above equation neglects the component in the moving direction of the scanner 70 or in the y direction related to the second direction D2.

[0151] Here, J obj (x, k) represents the Jones matrix of the measured object OBJ.

[0152]

[0153] Symbol | r p | and |r s | respectively represent the amplitudes of the complex Fresnel reflection coefficients for P polarization and S polarization in the case of reflection from the measured object OBJ. Symbol δ p and δ s They respectively represent the spatial spectral phase changes of P polarization and S polarization in the case of reflection from the measured object.

[0154] The second linear polarizer 80 may be provided with the measurement light E reflected from the measured object OBJ. meaThe second linear polarizer 80 receives the measurement light E mea The P-polarized wave and the S-polarized wave are linearly polarized (for example, at a rotation angle of 45°). Therefore, the P-polarized wave and the S-polarized wave may interfere with each other to generate polarization-modulated interference light E SP Interference light It can be expressed as follows.

[0155]

[0156] in,

[0157]

[0158]

[0159] here, and Represent the output light waves associated with P polarization and S polarization respectively.

[0160] The spatial spectral interference spectrum I(x, k) caused by the interference between the P-polarized wave and the S-polarized wave can be expressed as follows.

[0161]

[0162] When the output wave E out Reflected from the anisotropic object to be measured and converted into measurement light E mea When the interference spectrum is I obj (x, k), is represented as follows.

[0163]

[0164] Here, the terms α and β relate to the absolute values ​​of the DC components of waves travelling along the P-polarized path and the S-polarized path, respectively. That is, In the above formula, γ represents the spatial spectral coherence function.

[0165] Fig.10 shows the spatial spectrum interference spectrum I in the one-dimensional space of the measured object OBJ obj (x, k), where I obj (x, k) is measured in an imaging spectrometer 90 according to a second embodiment of the inventive concept. The measured object OBJ is a silicon oxide layer (SiO2) with a nominal thickness of 1.5 μm deposited on a silicon substrate. Fig.10 In FIG. 1 , the horizontal axis represents the spectral axis (λ), the vertical axis represents the spatial axis (x) in the first direction D1, and the brightness indicates the spatial spectral interference information. The interference fringe image is seen along the spectral axis (λ) and the spatial axis (x). According to the first embodiment, the interference fringe image is seen along Figure 2AHowever, according to the second embodiment, the interference fringe image is generated along the spectral axis (λ) in Fig.10 The direction of the spatial axis (x) in .

[0166] Spatial spectral phase function Φ obj (x, k) can be expressed as follows.

[0167] Φ obj (x, k) = 2kx(k x1 -k x2 )+[ξ′(x,k)-η′(x,k)]+[δ P (x, k)-δ S (x, k)]

[0168] In order to obtain the spatial spectral phase function Φ obj (x, k), a 2D Fourier transform can be performed in the spatial spectrum frequency domain in a manner similar to that of the first embodiment. After Fourier transforming in the spatial spectrum frequency domain, the unnecessary DC and AC components can be filtered out. Then, the spatial spectrum phase function Φ is extracted from the result of the inverse Fourier transform. obj (x, k).

[0169] In order to measure the calibrated spatial spectral ellipsometric phase difference Δ(x, k), it is necessary to obtain a reference spatial spectral phase function Φ when the measured object is not present. ref (x, k). Reference space spectral phase function Φ ref (x, k) can be obtained in a manner similar to that of the first embodiment.

[0170]

[0171] in,

[0172] Φ ref (x, k) = 2kx(k x1 -k x2 )+[ξ′(x,k)-η′(x,k)]

[0173] In a manner similar to that of the first embodiment, a 2D Fourier transform may be used to extract the reference spatial spectral phase function Φ reef (x, k).

[0174] As described below, it is possible to measure the spatial spectral ellipsometric phase difference Δ(x, k) between P polarization and S polarization generated by an anisotropic object to be measured.

[0175] Δ(x, k) = Φ obj (x, k)-Φ ref (x, k)

[0176] =δP (x, k)-δ S (x, k)

[0177] Fig.11 The spatial spectral ellipsometric phase difference Δ(x, k) of the measured object is shown. Fig.11 In , the horizontal axis represents the spectral axis λ, the vertical axis represents the spatial axis x in the first direction D1, and the brightness represents the spatial spectral ellipsometric phase difference Δ(x, k). The measured object OBJ is a silicon oxide layer (SiO2) with a nominal thickness of 1.5 μm deposited on a silicon substrate.

[0178] The spatial spectral ellipsoid amplitude ratio Ψ(x, k) between P polarization and S polarization can be obtained in a manner similar to that of the first embodiment.

[0179] As described above, the detection device according to the example of the second embodiment of the present invention can be configured similarly to the first embodiment, so that the spatial spectral ellipsometric information of the measured object OBJ moving along the second direction D2 in one-dimensional space is continuously measured to obtain the spatial spectral ellipsometric information (e.g., spectral ellipsometric cubic information) along the two-dimensional spatial axis (e.g., the first direction D1 and the second direction D2) (see Figure 6 ).

[0180] Fig.12 A simplified schematic diagram showing an example of a detection device according to a second embodiment of the present invention is shown. Omissions will be made to avoid reference to Fig. 9 Repeated explanation of components and functions discussed.

[0181] Reference Fig.12 According to an example of the second embodiment of the inventive concept, a non-polarization beam splitter 50 may be further included in the detection device. The non-polarization beam splitter 50 may be disposed between the first linear polarizer 30 and the polarization interferometer 40. For example, the input wave light E linearly polarized (e.g., at a rotation angle of 45°) in the first linear polarizer 30 in The polarization interferometer 40 may be provided via the non-polarization beam splitter 50 .

[0182] like Fig.12 As shown in FIG. 4 , the polarization separator 41, the first mirror MR1 and the second mirror MR2 of the polarization interferometer 40 can be connected with Fig. 9 The polarization separator 41, the first mirror MR1, and the second mirror MR2 shown in FIG. are configured similarly. For example, the first mirror MR1 and the second mirror MR2 may have an off-axis angle ε that deviates from the vertical direction. The polarization interferometer 40 may separate linearly polarized white light into a P polarization wave and an S polarization wave, and may allow the P polarization wave and the S polarization wave to have a spatial phase difference. For example, the polarization interferometer 40 may generate a high spatial carrier frequency with a spatial phase shift.

[0183] The polarization separator 41 of the polarization interferometer 40 may be a polarization beam splitter. Fig. 9 The polarization separator 41 may separate the linearly polarized white light into the first light and the second light. The first light and the second light may be guided toward the first mirror MR1 and the second mirror MR2 and reflected from the first mirror MR1 and the second mirror MR2 without passing through Fig. 9 The first sub-linear polarizer P1 and the second sub-linear polarizer P2.

[0184] The output wave light E modulated by polarization in the polarization interferometer 40 out The output wave light E modulated by polarization in the polarization interferometer 40 can be provided to the object OBJ to be measured on the scanner 70 through the non-polarization beam splitter 50. out The output wave light E from the polarization interferometer 40 may be provided to the object OBJ to be measured on the scanner 70 through the non-polarization beam splitter 50 and the line converter 61. out The measuring light E may be irradiated at a measuring angle θ that deviates from a direction perpendicular to the object OBJ to be measured on the scanner 70, and the measuring light E may be irradiated at a measuring angle θ that deviates from a direction perpendicular to the object OBJ to be measured on the scanner 70. mea The reflection may be performed at a measurement angle θ deviating from a direction perpendicular to the object OBJ to be measured.

[0185] The polarization anisotropy of the object OBJ can affect the measurement light E emitted from the object OBJ. mea Amplitude modulation and phase modulation are provided. The second linear polarizer 80 may be provided with the measurement light E reflected from the measured object OBJ. mea . Interference light E SP The interference light E may be provided to the imaging spectrometer 90 through the imaging lens 62. SP The incident surface of the imaging spectrometer 90 can be vertically entered. The imaging spectrometer 90 can be SP Spatial spectral interference fringes including spatial spectral ellipsometric information of the object OBJ to be measured are generated.

[0186] Fig.13 A simplified schematic diagram showing another example of a detection device according to a second embodiment of the present invention is shown. Omissions will be made to avoid reference to Fig. 9 The components and functions discussed are explained repeatedly. The components in this example can be spatially separated from Fig. 9 The components shown in are arranged differently.

[0187] Reference Fig.13According to another example of the second embodiment of the present inventive concept, a non-polarization beam splitter 50 may be further included in the detection device. The non-polarization beam splitter 50 may be disposed on one side of the polarization interferometer 40, and the line converter 61 may be placed between the polarization interferometer 40 and the non-polarization beam splitter 50. The non-polarization beam splitter 50 may convert the output wave light E from the line converter 61 into out Provided to the measured object OBJ.

[0188] Output Wavelength E out The measuring light E can be vertically irradiated to the object OBJ on the scanner 70, and the ... mea May be reflected vertically from the object OBJ being measured.

[0189] The measurement light E reflected from the measured object OBJ mea It may re-enter the non-polarizing beam splitter 50 and travel to the second linear polarizer 80 .

[0190] According to the present invention, in the absence of a mechanical rotating mechanism and electronic signal modulation, the spatial spectral ellipsometric information in one-dimensional space of the measured object can be continuously measured to obtain the spatial spectral ellipsometric information (e.g., spectral ellipsometric cubic information) along the two-dimensional spatial axis. The spectral ellipsometric information can be used to measure the uniformity of nano-patterns or nano-films in two-dimensional space, or to detect microscopic defects in two-dimensional space at high speed (equivalent to several hundred times of the prior art).

[0191] Although the embodiments have been described with reference to a number of illustrative examples of the embodiments, it will be understood by those skilled in the art that various changes in form and details may be made without departing from the spirit and scope of the inventive concept as described in the appended claims. Therefore, the technical scope of the inventive concept is not limited by the above-described embodiments and examples, but by the appended claims.

Claims

1. A detection device, comprising: a light generator, generating light; A first linear polarizer, which linearly polarizes the light; a polarization interferometer that separates linearly polarized light into a first light and a second light, and modulates the first light and the second light to have phase difference information; A line converter, disposed between the polarization interferometer and the object to be measured, converting the output wave light into an output wave light having a linear line shape in a first direction and providing a line shape to the object to be measured, the output wave light coming out of the polarization interferometer; A scanner loaded with the object to be measured, wherein the scanner is configured to allow the object to be measured to be transported in a second direction intersecting the first direction, or to be rotated around an axis in a third direction perpendicular to the first direction and the second direction; a second linear polarizer receiving a measurement light and linearly polarizing a first light and a second light of the measurement light to generate interference light, the measurement light being from an output wave light passing through the measured object or an output wave light reflected from the measured object; as well as an imaging spectrometer, receiving the interference light to obtain an image of the object being measured, Wherein, the interference light includes the spectral ellipsometric information on the two-dimensional spatial axis of the measured object, Wherein, the polarization interferometer comprises: A polarization separator is used to separate linear polarized light into a first light and a second light, wherein the polarization separator comprises an incident surface, the linearly polarized light is incident on the incident surface, a first reflecting surface on which the first light is incident, and a second reflecting surface, the second light being incident on the second reflecting surface, wherein the first reflecting surface faces the incident surface, and wherein the first reflective surface and the second reflective surface are adjacent to each other; a first mirror on the first reflective surface; and a second mirror, on said second reflecting surface, wherein the first mirror and the second mirror have an angle deviating from the vertical direction, The deviation angle is in the range of 0.02° to 0.1°. The first light and the second light are P-polarized waves and S-polarized waves respectively.

2. The detection device according to claim 1, wherein: The line converter is a cylindrical lens elongated in the first direction. 3 . The detection device according to claim 1 , further comprising an imaging lens that converts the interference light into a light having a linear line shape in the first direction and provides the interference light of the line shape to the imaging spectrometer.

4. The detection device according to claim 1, wherein: The first direction and the second direction are perpendicular to each other.

5. The detection device according to claim 1, wherein: The length of an optical path that the first light travels back and forth between the first reflecting surface and the first mirror is different from the length of an optical path that the second light travels back and forth between the second reflecting surface and the second mirror.

6. The detection device according to claim 5, wherein: An optical path difference between the first light and the second light is 10 μm to 100 μm.

7. The detection device according to claim 1, wherein: The output wave light is irradiated at a measurement angle deviating from a direction perpendicular to the object to be measured, and The measuring light is reflected at a measuring angle deviating from a direction perpendicular to the object to be measured.

8. The detection device according to claim 7, wherein: The propagation direction of the output wave light, the propagation direction of the measuring light and the second direction are arranged on the same plane.

9. The detection device according to claim 7, wherein: The polarization splitter is a non-polarizing beam splitter, and The polarization interferometer further comprises: a first sub-linear polarizer between the first reflective surface of the polarization splitter and the first mirror; and a second sub-linear polarizer, between the second reflecting surface of the polarization splitter and the second mirror, Wherein, the first sub-linear polarizer and the second sub-linear polarizer have a polarization difference of up to 90°.

10. The detection device according to claim 7, wherein: The polarization splitter is a polarization beam splitter, and The detection device further includes a non-polarization beam splitter between the first linear polarizer and the polarization interferometer, wherein the non-polarization beam splitter provides linearly polarized light to the polarization interferometer and provides output wave light to the object to be measured.

11. The detection device according to claim 10, wherein: The line converter is disposed between the non-polarization beam splitter and the object to be measured.

12. The detection device according to claim 1, wherein: The output wave light is incident vertically on the object to be measured, and The measuring light is reflected vertically from the object to be measured. 13 . The detection device according to claim 12 , further comprising a non-polarization beam splitter adjacent to the polarization interferometer and providing the output wave light to the object to be measured.

14. The detection device according to claim 13, wherein: The line converter is disposed between the polarization interferometer and the non-polarization beam splitter.

15. The detection device according to claim 14, wherein: The output wave light is provided to the measured object through the line converter and the non-polarization beam splitter, and The measuring light is supplied to the second linear polarizer through the non-polarizing beam splitter.

16. The detection device according to claim 1, wherein: The interference light is vertically incident on the imaging spectrometer.

17. The detection device according to claim 1, wherein: The light generated from the light generator is white light.

18. A detection method comprising: To polarize light linearly; Separating the linearly polarized light into a first light and a second light by a polarization interferometer; modulating the first light and the second light to have a phase difference to generate an output wave light; Converting the output wave light into a linear shape in a first direction, so as to irradiate the converted output wave light onto the object to be measured; receiving a measuring light emitted from a measured object, and linearly polarizing a first light and a second light of the measuring light to generate interference light; as well as obtaining an image of the object to be measured from the interference light, The object to be measured is transported in a second direction intersecting the first direction, or rotated around an axis in a third direction perpendicular to the first direction and the second direction. Wherein, the interference light includes the spectral ellipsometric information on the two-dimensional spatial axis of the measured object, Wherein, the polarization interferometer comprises: A polarization separator is used to separate linear polarized light into a first light and a second light, wherein the polarization separator comprises an incident surface, the linearly polarized light is incident on the incident surface, a first reflecting surface on which the first light is incident, and a second reflecting surface, the second light being incident on the second reflecting surface, wherein the first reflecting surface faces the incident surface, and wherein the first reflective surface and the second reflective surface are adjacent to each other; a first mirror on the first reflective surface; and a second mirror, on said second reflecting surface, wherein the first mirror and the second mirror have an angle deviating from the vertical direction, The deviation angle is in the range of 0.02° to 0.1°. The first light and the second light are P-polarized waves and S-polarized waves respectively.

19. The detection method according to claim 18, further comprising: The interference light is converted to have a linear shape in the first direction.

20. The detection method according to claim 18, wherein: The light is monochromatic light, and the wavelength of the light is variable.

21. The detection method according to claim 18, wherein: The light is white light.

22. The detection method according to claim 18, further comprising: obtaining spatial spectral ellipsometric information about the axis of the first direction, the axis of the second direction, and the wavelength axis of the light from the interference light, Therein, the image of the measured object is extracted from the spatial spectral ellipsometric information.

23. The detection method according to claim 18, wherein: The first direction and the second direction are perpendicular to each other.

Images