TFT product testing equipment

By designing a TFT product testing device containing motion components and biometric components, the problem of low testing efficiency in the prior art is solved, automated alignment connectivity and precision testing are realized, and testing efficiency is improved.

CN111426943BActive Publication Date: 2024-12-27HANGZHOU CHANGCHUAN TECH CO LTD
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Patent Information

Application Number
CN202010371900.2
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-05-06
Publication Date
2024-12-27
Estimated Expiration
2040-05-06

AI Technical Summary

Technical Problem

The existing TFT product test devices cannot achieve automatic alignment communication, resulting in low testing efficiency.

Method used

A TFT product testing device including a controller, base, motion component, biometric component and needle cartoon communication component is designed. Through the four-way motion of the motion component and the automatic identification of the biometric component, the precise alignment of the product to be tested is achieved. and automated testing.

Benefits of technology

It realizes accurate alignment and automated alignment communication of the products to be tested, significantly improving the testing efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention relates to the field of integrated circuit testing technology, and in particular to a TFT product testing device. The TFT product testing device comprises: a controller, a base, and a motion component, a biometric component, and a pin card communication component arranged on the base, wherein the motion component, the biometric component, and the pin card communication component are all connected to the controller for communication; the motion component comprises a test fixture, a Y-axis drive, a Z-axis drive, an X-axis drive, and a rotating drive; the Z-axis drive is connected to the Y-axis drive, the X-axis drive is connected to the Z-axis drive, the rotating drive is connected to the Z-axis drive, and the test fixture is connected to the rotating drive. The TFT product testing device provided by the present invention can realize movement in four directions of the product to be tested, so that the TFT can accurately reach the test position, complete the connection with the pin card communication component and the biometric component, realize automatic alignment and connection, and make the test efficiency high.
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Description

Technical Field

[0001] The present invention relates to the technical field of integrated circuit testing, and in particular to a TFT product testing device. Background Art

[0002] Ultrasonic fingerprint recognition technology has been widely used. TFT (thin film transistor) is the fingerprint recognition area of ​​the ultrasonic fingerprint module series. TFT and the ultrasonic fingerprint module body are assembled together through the "bonding" process to form a complete ultrasonic fingerprint module chip. The test of TFT products is mainly to improve the test yield of the complete module after the ultrasonic module body and TFT are bonded by controlling the yield of TFT products. Therefore, it is necessary to test TFT products before "bonding" TFT and ultrasonic module body.

[0003] The existing TFT product testing devices on the market cannot realize automatic alignment and connectivity testing of the product to be tested, resulting in low testing efficiency. Summary of the invention

[0004] The object of the present invention is to provide a TFT product testing device to solve the technical problem of low testing efficiency of the TFT product testing device in the prior art.

[0005] The present invention provides a TFT product testing device, comprising: a controller, a base, and a motion component, a biometric component, and a pin card communication component arranged on the base, wherein the motion component, the biometric component, and the pin card communication component are all communicatively connected with the controller;

[0006] The motion assembly includes a test fixture, a Y-axis drive, a Z-axis drive, an X-axis drive and a rotation drive; the Z-axis drive is transmission-connected to the Y-axis drive, the X-axis drive is transmission-connected to the Z-axis drive, the rotation drive is transmission-connected to the Z-axis drive, and the test fixture is transmission-connected to the rotation drive.

[0007] Furthermore, the TFT product testing device also includes a visual positioning component communicatively connected to the controller, and the visual positioning component is used to position the test fixture; the biometric identification component and the pin card communication component are diagonally arranged, and the visual positioning component and the motion component are diagonally arranged.

[0008] Further, the needle card communication assembly includes a probe card, a needle card mounting plate and a needle card support block, the needle card support block is connected to the base, the needle card mounting plate is mounted on the needle card support block, the probe card is fixed on the needle card mounting plate, and the needle card mounting plate extends out of the needle card support block in a direction close to the motion assembly;

[0009] The motion assembly also includes a limit plate, a first end of the limit plate is higher than a second end of the limit plate, the first end of the limit plate is fixedly connected to the test fixture, and the second end of the limit plate can abut against the pin card mounting plate.

[0010] Furthermore, the pin card communication assembly also includes a leveling member, and the leveling member is connected to the pin card mounting plate to adjust the horizontality of the pin card mounting plate.

[0011] Furthermore, the pin-card communication assembly also includes an X-axis adjustment member and a Y-axis adjustment member; the X-axis adjustment member is connected to the support block, and the Y-axis adjustment member is connected to the base, or the Y-axis adjustment member is connected to the support block, and the X-axis adjustment member is connected to the base.

[0012] Furthermore, the pin card communication component also includes a test board mounting plate, an ultrasonic module test board and a connecting column, one end of the test board mounting plate is fixedly connected to the support block, one end of the test board mounting plate extends away from the moving component, one end of the connecting column is connected to the test board mounting plate, and the other end is connected to the ultrasonic module test board.

[0013] Furthermore, the biometric identification component includes a fixed seat, a lifting drive and a biometric identification head, the fixed seat is fixedly connected to the base, the lifting drive is connected to the fixed seat, and the lifting drive is transmission-connected to the biometric identification head to drive the biometric identification head to move up and down.

[0014] Furthermore, the biometric identification component also includes a transverse guide rail, a sliding plate and a biometric identification bracket, the transverse guide rail is fixed on the fixing seat, the sliding plate is slidably arranged on the transverse guide rail, the biometric identification bracket is fixed on the sliding plate, and the lifting drive member is arranged on the biometric identification bracket.

[0015] Furthermore, the biometric identification component also includes a test position fixing member, and the test position fixing member is arranged on the transverse guide rail to fix the position of the sliding plate.

[0016] Further, the lifting drive member includes a power member, a linear slide rail, a locking block, a transfer block and a guide shaft, the power member is connected to the upper part of the linear slide rail, and the linear slide rail is slidably arranged on the biometric identification bracket;

[0017] The lower end of the linear slide rail is connected to the upper part of the locking block, the lower part of the locking block is connected to the adapter block through an adjusting screw, and the axis of the adjusting screw is located in the vertical direction, the guide shaft passes through the adapter block and the locking block, the axis of the guide shaft is located in the horizontal direction, and the adapter block is connected to the biometric identification head.

[0018] Furthermore, the biometric identification component also includes a buffer, one end of the buffer is connected to the locking block, and the other end of the locking block is connected to the biometric identification bracket.

[0019] The TFT product testing device provided by the present invention comprises: a controller, a base, and a motion component, a biometric identification component and a pin-card communication component arranged on the base, wherein the motion component, the biometric identification component and the pin-card communication component are all communicatively connected with the controller; the motion component comprises a test fixture, a Y-axis driving component, a Z-axis driving component, an X-axis driving component and a rotating driving component; the Z-axis driving component is transmission-connected with the Y-axis driving component, the X-axis driving component is transmission-connected with the Z-axis driving component, the rotating driving component is transmission-connected with the Z-axis driving component, and the test fixture is transmission-connected with the rotating driving component.

[0020] The test fixture is used to place the product to be tested. The controller can drive the test fixture to move in three directions by the comprehensive movement of the Y-axis drive, the Z-axis drive and the X-axis drive. The rotating drive can drive the test fixture to rotate. The motion component can adjust the position of the product to be tested in four directions, so that the product to be tested can reach the test position. After the motion component sends the product to be tested to the test position, the probe on the pin card communication component contacts the test point on the product to be tested, and then the biometric pressure head (simulating human fingers) in the biometric component presses the biometric area of ​​the product to be tested. The electrical signal output of the pin card communication component is compared with the electrical signal generated by the good product. If the result is consistent (error is allowed), it means that the product to be tested is qualified. The TFT product testing device provided by the present invention can realize the movement of the product to be tested in four directions, so that the TFT can accurately reach the test position, complete the connection with the pin card communication component and the biometric component, realize automatic alignment and connection, and make the test efficiency high. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings constituting a part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the accompanying drawings:

[0022] Figure 1 is a structural schematic diagram of a TFT product testing device according to an embodiment of the present invention;

[0023] Figure 2 yes Figure 1A schematic diagram of the structure of the moving components in the TFT product testing device shown;

[0024] Figure 3 yes Figure 1 A schematic diagram of the structure of a biometric identification component in a TFT product testing device from one perspective;

[0025] Figure 4 yes Figure 1 Another perspective structural diagram of the biometric identification component in the TFT product testing device shown;

[0026] Figure 5 yes Figure 1 The structural schematic diagram of the pin-card communication component in the TFT product testing device shown;

[0027] Figure 6 yes Figure 5 The structural schematic diagram of the corner slide in the pin card communication assembly shown;

[0028] Figure 7 yes Figure 1 The schematic diagram of the structure of the visual positioning component in the TFT product testing device is shown.

[0029] In the figure: 1-motion component; 11-test fixture; 12-bend joint; 13-limit plate; 14-pad; 15-gasket; 16-three-axis precision slide; 17-slide mounting plate; 18-drag chain mounting block; 19-drag chain; 110-linear module; 111-servo motor;

[0030] 2-biometric identification component; 21-base plate; 22-mounting bracket; 23-reinforcement; 24-line rail mounting plate; 25-reinforcement rib; 26-line rail pad; 27-fixing block; 28-line rail; 29-sliding plate; 210-biometric identification bracket; 211-stepping motor; 212-gear; 213-motor mounting plate; 214-fixing plate; 215-buffer block; 216-photoelectric sensor; 217-rack mounting block; 218-rack; 219-first counterweight block; 220-second counterweight block; 221-linear guide ;222-sensor baffle;223-first locking block;224-second locking block;225-tension spring support;226-adapter block;227-guide shaft;228-mounting seat;229-headless screw;230-adapter plate;231-beam sensor;232-buckle fixing block;233-buckle;234-biometric mounting seat;235-oil-free bushing;236-equal height bolt;237-biometric pressure head;238-compression spring;240-biometric mounting plate;241-tension spring fixing piece;242-tension spring;

[0031] 3-needle card communication assembly; 31-probe card; 32-needle card mounting plate; 33-needle card support block; 34-corner slide; 35-needle card cross roller slide; 36-test board mounting plate; 37-ultrasonic module test board; 38-connecting column; 39-leveling fixing plate; 341-upper corner slide; 342-lower corner slide;

[0032] 4-visual positioning assembly; 41-camera; 42-camera fixing part; 43-side shooting light source support part; 44-lens fixing part; 45-positioning cross roller slide; 46-camera fixing support plate; 47-positioning bracket; 48-positioning bracket support plate; 410-fastener;

[0033] 5-Base. DETAILED DESCRIPTION

[0034] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0035] like Figures 1 to 5 As shown, the present invention provides a TFT product testing device, including: a controller, a base, and a motion component 1, a biometric identification component 2 and a pin card communication component 3 arranged on the base 5, the motion component 1, the biometric identification component 2 and the pin card communication component 3 are all communicatively connected with the controller; the motion component 1 includes a test fixture 11, a Y-axis driving member, a Z-axis driving member, an X-axis driving member and a rotating driving member; the Z-axis driving member is transmission-connected with the Y-axis driving member, the X-axis driving member is transmission-connected with the Z-axis driving member, the rotating driving member is transmission-connected with the Z-axis driving member, and the test fixture 11 is transmission-connected with the rotating driving member.

[0036] In this embodiment, the test fixture 11 is used to place the product to be tested. The controller can control the comprehensive movement of the Y-axis driving member, the Z-axis driving member and the X-axis driving member, thereby driving the test fixture 11 to move in three directions. The rotating driving member can drive the test fixture 11 to rotate. The motion component 1 can adjust the position of the product to be tested in four directions, so that the product to be tested can reach the test position. After the motion component 1 sends the product to be tested to the test position, the probe on the pin card communication component 3 contacts the test point on the product to be tested, and then the biometric pressure head 237 (simulating a human finger) in the biometric recognition component 2 presses the biometric recognition area of ​​the product to be tested. The electrical signal output of the pin card communication component 3 is compared with the electrical signal generated by the good product. If the results are consistent (errors are allowed), it means that the product to be tested is qualified.

[0037] The TFT product testing device provided in this embodiment can realize movement in four directions of the product to be tested, so that the TFT can accurately reach the test position, complete the connection with the pin card communication component 3 and the biometric identification component 2, realize automatic alignment and connection, and make the test efficiency high.

[0038] like Figure 1 As shown, based on the above embodiment, the TFT product testing device further includes a visual positioning component 4 communicatively connected to the controller; the biometric identification component 2 and the pin card communication component 3 are diagonally arranged, and the visual positioning component 4 and the motion component 1 are diagonally arranged.

[0039] In this embodiment, the visual positioning component 4 can position the test fixture 11, and the TFT product is fixed on the test fixture. The visual device indirectly realizes the positioning of the TFT product, and sends the position information of the test fixture 11 (which can also be understood as the position information of the TFT product) to the controller in real time. The controller controls the movement of the motion component 1 according to the gap between the current position of the test fixture 11 (which can also be understood as the current position of the TFT product) and the designated test position, thereby being able to accurately control the movement of the motion component 1, making the alignment of the product to be tested more accurate and the test efficiency higher.

[0040] The biometric identification component 2 and the pin card communication component 3 are arranged diagonally, and the visual positioning component 4 and the motion component 1 are arranged diagonally. This structure makes the TFT product testing device compact and reasonably designed.

[0041] Among them, Figure 7 As shown, the visual positioning assembly 4 includes: a camera 41, a camera fixing member 42, a side-shooting light source support member 43, a positioning cross roller type slide 45 and a camera 41 support fixing plate 214; the camera 41 is mounted on the camera fixing member 42, the camera fixing member 42 is connected to the side-shooting light source support member 43, the lens of the camera 41 is connected to the side-shooting light source support member 43 through the lens fixing member 44, one side of the positioning cross roller type slide 45 is connected to the side-shooting light source support member 43, and the other side of the positioning cross roller type slide 45 is connected to the camera fixing support plate 46. After the height position of the camera 41 is adjusted, one side is connected to the side-shooting light source support member 43 through the fastener 410, and the other side is connected to the camera fixing support plate 46. The positioning bracket 47 is connected to the camera fixing support plate 46, and the middle is fixed by the positioning bracket support plate 48.

[0042] like Figure 2 As shown, based on the above embodiment, further, the Y-axis driving member, the Z-axis driving member and the X-axis driving member in the motion assembly 1 can all adopt an electric telescopic rod, a gear rack structure or a ball screw structure. The rotary driving member can adopt a motor or a worm gear structure. The Y-axis driving member, the Z-axis driving member and the rotary driving member can directly adopt a three-axis precision slide 16.

[0043] It should be noted that the Z direction is in the vertical direction, the X direction and the Y direction are both in the horizontal direction, and the X direction is perpendicular to the Z direction, and the Y direction is perpendicular to both the X direction and the Z direction.

[0044] like Figure 2 As shown, based on the above embodiment, further, the test fixture 11 includes a test plate, the test plate is hollow, a plurality of air holes are provided on the top surface of the test plate, and an air outlet is provided on the side of the test plate, and the air outlet is used to connect to the exhaust device.

[0045] In this embodiment, after the product to be tested is placed on the test board, the exhaust device is connected to the air outlet through the bend 12, so that the test board is evacuated, so that a vacuum is formed inside the test board, so that the product to be tested is adsorbed, and the purpose of fixing the product to be tested is achieved. The use of vacuum negative pressure to fix the product to be tested can prevent the product to be tested from being damaged. Of course, steps can also be set on the test board to limit the position of the product to be tested.

[0046] like Figure 5 As shown, on the basis of the above embodiment, further, the needle card communication component 3 includes a probe card 31, a needle card mounting plate 32 and a needle card support block 33, the needle card support block 33 is connected to the base 5, the needle card mounting plate 32 is mounted on the needle card support block 33, the probe card 31 is fixed on the needle card mounting plate 32, the needle card mounting plate 32 extends out of the needle card support block 33 in the direction close to the motion component 1; the motion component 1 also includes a limit plate 13, the first end of the limit plate 13 is higher than the second end of the limit plate 13, the first end of the limit plate 13 is fixedly connected to the test fixture 11, and the second end of the limit plate 13 can abut against the needle card mounting plate 32.

[0047] In this embodiment, a limit plate 13 is provided to limit the rise of the test fixture 11. When the test fixture 11 rises driven by the Z-axis driving member, if the second end of the limit plate 13 abuts against the probe card mounting plate 32, the test fixture 11 can be prevented from continuing to rise, thereby preventing the test fixture 11 from damaging the probe card 31 of the communication component. The limit plate 13 can limit the maximum rising height of the product to be tested under the installation space limitation of the probe card support block 33.

[0048] Furthermore, a pad block 14 and a plurality of gaskets 15 can be set at the second end of the limit plate 13, the pad block 14 is fixed to the second end of the limit plate, and the plurality of gaskets 15 are stacked on the pad block 14, and the number of gaskets 15 can be adjusted according to the specific installation space, thereby ensuring that the gasket 15 is in contact with the probe card mounting plate 32 before the test fixture 11 collides with the probe card 31.

[0049] Specifically, Figure 2As shown, the limit plate is arranged in a Z shape, the Y-axis driving component includes a linear module 110 and a servo motor 111 connected to the linear module 110, the motion component 1 also includes a slide mounting plate 17, a drag chain mounting block 18 and a drag chain 19, the three-axis precision slide 16 is connected to the limit plate to realize the X and Z movement and rotation angle compensation of the product, the lower part of the three-axis precision slide 16 is connected to the slide mounting plate 17, one side of the slide mounting plate 17 is also connected to the drag chain mounting block 18, the lower part of the slide mounting plate is connected to the linear module 110, and the drag chain 19 is connected to the drag chain mounting block 18 to facilitate the movement of connecting lines such as wires.

[0050] like Figure 1 and Figure 5 As shown, based on the above embodiment, the pin card communication assembly further includes a leveling member, which is connected to the pin card mounting plate 32 to adjust the horizontality of the pin card mounting plate 32 .

[0051] In this embodiment, the leveling member can be used to adjust the level of the mounting plate according to the level of the product to be tested, so that the probe card 31 is parallel to the product to be tested, thereby ensuring that the probes of the probe card 31 can fully contact the test points on the product to be tested, thereby ensuring the test accuracy.

[0052] Among them, the structural form of the leveling member can be various, for example: the leveling member includes a ball joint, the mounting plate is rotatably connected to the needle card support block 33 through the ball joint, and the relative position between the mounting plate and the needle card support block 33 can be fixed by friction force, or by using an adjusting screw to achieve fixation.

[0053] As an alternative, Figure 6 As shown, the leveling member includes a leveling fixing plate 39 and a corner slide 34 (the corner slide 34 can adopt a conventional structure), such as: the corner slide 34 includes an upper corner slide 341, a lower corner slide 342 and an adjusting handle arranged on the lower corner slide, the bottom of the upper corner slide 341 is provided with an arc-shaped protrusion, the top of the lower corner slide 342 is provided with a groove matching the arc-shaped protrusion, and the adjusting handle is used to adjust the position of the upper corner slide 341 relative to the lower corner slide 342; the upper corner slide 341 is connected to the needle card mounting plate 32, and the lower corner slide is connected to the needle card support block 33, one end of the leveling fixing plate 39 is fixedly connected to the needle card mounting plate 32, and the other end of the leveling fixing plate 39 is fixedly connected to the needle card support block 33, so as to relatively fix the upper corner slide and the lower corner slide.

[0054] In this embodiment, the upper corner turntable can swing in the vertical plane along the arc of the groove relative to the lower corner turntable, so as to adjust the horizontality of the mounting plate. When the corner slide is adjusted, one end of the leveling fixing plate 39 is fixedly connected to the needle card mounting plate 32, and the other end of the leveling fixing plate 39 is fixedly connected to the needle card support block 33 to relatively fix the upper corner slide 341 and the lower corner slide 342. The leveling component has a simple structure, which makes the adjustment process smooth.

[0055] like Figure 5 As shown, based on the above embodiment, the pin card communication assembly further includes an X-axis adjustment member and a Y-axis adjustment member; the X-axis adjustment member is connected to the pin card support block 33, and the Y-axis adjustment member is connected to the base, or the Y-axis adjustment member is connected to the pin card support block 33, and the X-axis adjustment member is connected to the base.

[0056] It should be noted that both the X-direction adjusting member and the Y-direction adjusting member move in a horizontal plane, and the X-direction is perpendicular to the Y-direction.

[0057] In this embodiment, an X-axis adjustment member and a Y-axis adjustment member are provided to realize movement of the mounting plate in the X-axis and the Y-axis, thereby realizing adjustment of the position of the probe card 31, further facilitating the motion component 1 to drive the alignment and connection of the product to be tested, and further improving the test efficiency.

[0058] Wherein, both the X-axis adjusting member and the Y-axis adjusting member may adopt an electric telescopic rod, a gear rack structure or a ball screw structure.

[0059] Optionally, a needle card cross roller type slide 35 is used to integrate the X-axis adjustment member and the Y-axis adjustment member, which has a compact structure and occupies less space.

[0060] like Figure 5 As shown, based on the above embodiment, further, the pin card communication component 3 also includes a test board mounting plate 36, an ultrasonic module test board 37 and a connecting column 38, one end of the test board mounting plate 36 is fixedly connected to the pin card support block 33, one end of the test board mounting plate 36 extends in a direction away from the motion component 1, one end of the connecting column 38 is connected to the test board mounting plate 36, and the other end is connected to the ultrasonic module test board 37.

[0061] In this embodiment, a test board mounting plate 36 and an ultrasonic module test board 37 are used to complete the test of the product to be tested. The test board mounting plate 36 and the ultrasonic module test board 37 are used to set the needle card support block 33 on the side away from the moving component 1, and the structure is reasonable and compact.

[0062] like Figure 3 and Figure 4As shown, based on the above embodiment, further, the biometric identification component 2 includes a fixed seat, a lifting drive member and a biometric identification head 237, the fixed seat is fixedly connected to the base, the lifting drive member is connected to the fixed seat, and the lifting drive member is transmission-connected to the biometric identification head 237 to drive the biometric identification head 237 to move up and down.

[0063] In this embodiment, the lifting drive member can drive the biometric identification head 237 to rise or fall, so as to press on the fingerprint identification area of ​​the product to be tested, thereby completing the experiment.

[0064] The lifting drive member may be an electric telescopic rod or a ball screw structure.

[0065] As an alternative, Figure 3 and Figure 4 As shown, the lifting drive component includes a power component, which includes a stepper motor 211, a gear 212 and a rack 218. The stepper motor 211 is fixed on a fixed frame, the power output shaft of the stepper motor 211 is fixedly connected to the gear 212, the gear 212 is meshed with the rack 218 for transmission, and the rack 218 is transmission-connected to the biometric identification pressure head 237.

[0066] In this embodiment, the gear 212 drives the rack 218 to move up and down, thereby driving the biometric identification head 237 to move up and down, which can achieve precise control and prevent the biometric identification head 237 from damaging the product to be tested.

[0067] like Figure 3 and Figure 4 As shown, based on the above embodiment, the biometric identification component 2 further includes a transverse guide rail, a sliding plate 29 and a biometric identification bracket 210, the transverse guide rail is fixed on the fixed seat, the sliding plate 29 is slid on the transverse guide rail, the biometric identification bracket is fixed on the sliding plate 29, and the lifting drive member is arranged on the biometric identification bracket.

[0068] In this embodiment, the transverse guide rail extends horizontally and in a direction away from the pin-card communication component 3, so that the structure is compact and the layout is reasonable. The sliding plate 29 can slide on the transverse guide rail, so the debugging position can be set. The sliding plate 29 can be set to the debugging position when it is slid to the position of the transverse guide rail away from the pin-card communication component 3. Before the actual test, the product to be tested can be transported to the test position through the motion component 1, and the parallelism of the probe card is adjusted to be consistent with the parallelism of the product to be tested at this position. The position of the probe card 31 is fixed, and then the product to be tested is moved to the debugging position. At this position, the parallelism of the biometric pressure head 237 is adjusted to make it parallel to the product to be tested, so as to ensure that the pressure head can press the product tightly during the actual test process, thereby avoiding problems during the actual test process, and also to ensure test efficiency.

[0069] like Figure 3 and Figure 4 As shown, based on the above embodiment, the biometric identification component 2 further includes a test position fixing member, and the test position fixing member is arranged on the transverse guide rail to fix the position of the sliding plate 29.

[0070] In this embodiment, a test position fixing member is provided on the transverse guide rail, and the test position fixing member fixes the position of the sliding plate 29, thereby preventing the sliding plate 29 from moving during the test process and causing the test failure.

[0071] Among them, the structural form of the test position fixing part can be various, for example, an electromagnet is set at the test position on the transverse guide rail. When the sliding plate 29 is in the test position, the electromagnet is energized to generate suction to suck the sliding plate 29 (of course, the sliding plate 29 needs to be made of a material that can be magnetically attracted).

[0072] As an optional solution, the test position fixing member includes a plurality of fixing blocks 27, which are detachably connected to the transverse guide rail, such as by bolt connection or clamping. When the sliding plate 29 is located at the test position, the plurality of fixing blocks 27 are fixed on both sides of the sliding plate 29 to clamp and fix the sliding plate 29.

[0073] like Figure 3 and Figure 4 As shown, on the basis of the above embodiment, further, the lifting drive component also includes a linear slide rail, a locking block, an adapter block 226 and a guide shaft 227, the rack 218 is connected to the upper part of the linear slide rail, and the linear slide rail is slidably arranged on the biometric bracket; the lower end of the linear slide rail is connected to the upper part of the locking block, the lower part of the locking block is connected to the adapter block 226 through an adjusting screw, and the axis of the adjusting screw is located in the vertical direction, the guide shaft 227 passes through the adapter block and the locking block, the axis of the guide shaft 227 is located in the horizontal direction, and the adapter block 226 is connected to the biometric pressure head 237.

[0074] In this embodiment, the locking block is connected to the adapter block 226 in the vertical direction through an adjusting screw, and the locking block is rotatably connected to the adapter block 226 in the horizontal direction through a guide shaft 227. The locking block can rotate around the guide shaft 227. Specifically, there can be four adjusting screws, which are distributed at the four corners of the locking block. By adjusting the height of the four adjusting screws, the horizontality of the locking block can be adjusted, thereby adjusting the horizontality of the biometric identification head 237.

[0075] like Figure 3 and Figure 4As shown, based on the above embodiment, the biometric identification component 2 further includes a beam sensor 231 and a pressure head mounting seat 228, the beam sensor 231 is connected to the bottom of the adapter block 226, the pressure head mounting seat 228 is connected to the beam sensor 231, and the biometric pressure head 237 is set on the pressure head mounting seat 228.

[0076] In this embodiment, the beam sensor 231 is capable of detecting the pressure exerted on the pressure head and transmitting the detected pressure value to the controller. The controller can determine whether the biometric pressure head 237 presses the product to be tested based on the pressure value, thereby further improving the test efficiency.

[0077] like Figure 3 and Figure 4 As shown, based on the above embodiment, the biometric identification component 2 further includes a buffer, one end of the buffer is connected to the locking block, and the other end of the locking block is connected to the biometric identification bracket.

[0078] In this embodiment, the buffer is provided to prevent excessive downward impact force of the biometric identification head 237 and other components below when the stepper motor 211 is powered off, thereby avoiding damage to the probe.

[0079] The buffer member may be a damping buffer, or a tension spring 242, etc.

[0080] like Figure 3 and Figure 4 As shown, specifically:

[0081] The fixing seat includes a bottom plate 21, two mounting brackets 22 arranged opposite to each other and a reinforcing plate. The lower part of the bottom plate 21 is fixedly connected to the base 5, and the upper part of the bottom plate 21 is connected to the two mounting brackets 22. The two mounting brackets 22 are connected by a reinforcing member 23 to increase strength.

[0082] The transverse guide rail includes a linear rail 28, a linear rail mounting plate 24, a reinforcing rib 25, a linear rail pad 26 and a slider. The linear rail mounting plate 24 is fixed on the mounting support frame. A reinforcing rib 25 is connected between a mounting support frame and the linear rail mounting plate 24. The reinforcing rib 25 can increase the stability of the linear rail 28. Two linear rail pads 26 are respectively connected to both sides of the linear rail mounting plate 24, four fixing blocks 27 are connected to the linear rail mounting plate 24, and the linear rails 28 are respectively connected above the two linear rail pads 26. The slider is slidably arranged on the linear rail 28, and the sliding plate 29 is fixedly connected to the slider.

[0083] The adapter plate 230 may include a first portion connected to the mounting seat and a second portion connected to the locking block, wherein the first portion is fixed to the second portion. The locking block includes a first locking block 223 and a second locking block 224, and the adjusting screw is a headless screw 229.

[0084] The shaft end of the stepper motor 211 is connected to the gear 212, one side of the motor mounting plate 213 is connected to the stepper motor 211, and the other side is connected to the fixed plate 214, a buffer block 215 is installed on one side of the fixed plate 214, and a photoelectric sensor 216 is installed on the other side of the fixed plate 214, a rack 218 is fixed on one side of the rack mounting block 217, and the other side of the rack mounting block 217 is connected to the second counterweight block 220, the first counterweight block 219 and the second counterweight block 220 are connected and then connected to the upper part of the linear guide 221, the sensor baffle 222 is connected to the second counterweight block 220, and the lower part of the linear guide 221 is connected to the first locking block 2 23. The second locking block 224 is connected (the first locking block 223 and the second locking block 224 clamp the lower part of the linear guide rail 221), the tension spring support 225 is installed on the second locking block 224, the guide shaft 227 is inserted between the second locking block 224 and the second part of the adapter block 226, the guide shaft 227 is also inserted between the adapter block 226 and the first part of the mounting seat 228 (the axial direction of the guide shaft between the first part and the mounting seat intersects with the axial direction of the guide shaft between the second part and the second locking block), and the headless screws 229 for adjustment are installed between the second locking block 224 and the second part of the adapter block 226 and on both sides of the guide shaft 227.

[0085] An adapter plate 230 is connected to one side of the mounting seat 228 and installed together with the beam sensor 231. A buckle fixing block 232 is installed below the beam sensor 231. Buckles 233 are installed on both sides of the buckle fixing block 232. At the same time, the other side of the buckle 233 is fixed to the L-shaped biometric mounting seat 234. Two oil-free bushings 235 are installed on the biometric mounting seat 234. The biometric mounting seat 234 and the biometric pressure head 237 are connected with equal-height bolts 236, and a compression spring 238 is inserted to achieve elastic buffering. A flexible pressure head is installed in the cavity of the biometric pressure head 237. The biometric mounting plate 240 is respectively connected to the linear guide rail 221, the motor mounting plate 213 and the tension spring fixing piece 241. The tension spring support 225 is installed on the tension spring fixing piece 241, and the tension spring 242 is installed.

[0086] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

[0087] In addition, those skilled in the art will appreciate that, although some of the above-described embodiments include certain features included in other embodiments but not other features, the combination of features of different embodiments is meant to be within the scope of the present application and form different embodiments. For example, any one of the claimed embodiments may be used in any combination. In addition, the information disclosed in this background technology section is intended only to deepen the understanding of the overall background technology of the present application and should not be regarded as an admission or in any form to imply that the information constitutes prior art already known to those skilled in the art.

Claims

1. A TFT product testing device, characterized in that: include: A controller, a base, and a motion component, a biometric component, and a needle card communication component arranged on the base, wherein the motion component, the biometric component, and the needle card communication component are all communicatively connected with the controller; The motion assembly includes a test fixture, a Y-direction drive, a Z-direction drive, an X-direction drive, and a rotation drive; the Z-direction drive is transmission-connected to the Y-direction drive, the X-direction drive is transmission-connected to the Z-direction drive, the rotation drive is transmission-connected to the Z-direction drive, and the test fixture is transmission-connected to the rotation drive; The needle card communication assembly includes a probe card, a needle card mounting plate and a needle card support block, wherein the needle card support block is connected to the base, the needle card mounting plate is mounted on the needle card support block, the probe card is fixed on the needle card mounting plate, and the needle card mounting plate extends out of the needle card support block in a direction close to the motion assembly; The motion assembly also includes a limit plate, a first end of the limit plate being higher than a second end of the limit plate, the first end of the limit plate being fixedly connected to the test fixture, and the second end of the limit plate being capable of abutting against the needle card mounting plate; a pad block and a plurality of gaskets are provided at the second end of the limit plate, a plurality of the gaskets are stacked on the pad block, and the number of the gaskets is adjusted according to the specific installation space, so as to ensure that the gasket abuts against the needle card mounting plate before the test fixture collides with the probe card.

2. The TFT product testing device according to claim 1, characterized in that: It also includes a visual positioning component that is communicatively connected to the controller, and the visual positioning component is used to position the test fixture; the biometric identification component and the pin card communication component are diagonally arranged, and the visual positioning component and the motion component are diagonally arranged.

3. The TFT product testing device according to claim 1, characterized in that: The pin card communication assembly also includes a leveling member, which is connected to the pin card mounting plate to adjust the horizontality of the pin card mounting plate.

4. The TFT product testing device according to claim 3, characterized in that: The pin-card communication assembly also includes an X-axis adjusting member and a Y-axis adjusting member; the X-axis adjusting member is connected to the support block, and the Y-axis adjusting member is connected to the base, or the Y-axis adjusting member is connected to the support block, and the X-axis adjusting member is connected to the base.

5. The TFT product testing device according to claim 1, characterized in that: The pin card communication component also includes a test board mounting plate, an ultrasonic module test board and a connecting column, one end of the test board mounting plate is fixedly connected to the support block, one end of the test board mounting plate extends away from the moving component, one end of the connecting column is connected to the test board mounting plate, and the other end is connected to the ultrasonic module test board.

6. The TFT product testing device according to claim 2, characterized in that: The biometric identification component includes a fixed seat, a lifting drive and a biometric identification pressure head. The fixed seat is fixedly connected to the base, the lifting drive is connected to the fixed seat, and the lifting drive is transmission-connected to the biometric identification pressure head to drive the biometric identification pressure head to move up and down.

7. The TFT product testing device according to claim 6, characterized in that: The biometric identification component also includes a transverse guide rail, a sliding plate and a biometric identification bracket. The transverse guide rail is fixed on the fixing seat. The sliding plate is slidably arranged on the transverse guide rail. The biometric identification bracket is fixed on the sliding plate. The lifting drive member is arranged on the biometric identification bracket.

8. The TFT product testing device according to claim 7, characterized in that: The biometric identification component further comprises a test position fixing member, and the test position fixing member is arranged on the transverse guide rail to fix the position of the sliding plate.

9. The TFT product testing device according to claim 7, characterized in that: The lifting drive member includes a power member, a linear slide rail, a locking block, a transfer block and a guide shaft, the power member is connected to the upper part of the linear slide rail, and the linear slide rail is slidably arranged on the biometric identification bracket; The lower end of the linear slide rail is connected to the upper part of the locking block, the lower part of the locking block is connected to the adapter block through an adjusting screw, and the axis of the adjusting screw is located in the vertical direction, the guide shaft passes through the adapter block and the locking block, the axis of the guide shaft is located in the horizontal direction, and the adapter block is connected to the biometric identification head.