A multifunctional silicon wafer testing platform

Abstract

The present invention belongs to the field of silicon wafer detection technology, and particularly relates to a multifunctional silicon wafer detection platform, including a mounting base, a detection module is arranged on the mounting base, and a photovoltaic silicon wafer transfer module and a semiconductor silicon wafer transfer module are arranged next to the detection module. The detection module includes a bracket, a first linear guide fixed on the bracket, and a detection sensor slidably arranged on the first linear guide; the photovoltaic silicon wafer transfer module includes a first linear module and a photovoltaic silicon wafer conveying assembly slidably arranged on the first linear module; the semiconductor silicon wafer transfer module includes a second linear module, a rotating platform arranged on the second linear module, and an adjustable grabber arranged on the top of the rotating platform. The present invention is compatible with the detection of photovoltaic and semiconductor silicon wafers through the matching design of the photovoltaic silicon wafer transfer module and the semiconductor silicon wafer transfer module, and realizes the detection of thickness, TTV, warping, and bending of photovoltaic and semiconductor silicon wafers, which greatly improves the silicon wafer detection efficiency of R&D personnel.

Description

Technical Field

[0001] The invention belongs to the technical field of silicon wafer detection, and in particular relates to a multifunctional silicon wafer detection platform. Background Art

[0002] Currently, the photovoltaic industry and the semiconductor industry have their own testing equipment for silicon wafer testing. However, in both the photovoltaic and semiconductor industries, the testing equipment is mainly aimed at the production end, focusing on the continuous and rapid testing of silicon wafers of a certain fixed size, and the position of the silicon wafer testing is fixed.

[0003] However, when it comes to R&D, it is often necessary to detect the cutting conditions at different locations of the silicon wafer in detail, and to optimize the cutting process by analyzing a large number of detection points on a single silicon wafer. Moreover, silicon wafers vary in size, so the detection points of existing equipment are not comprehensive enough and it is difficult to be compatible with multiple types of silicon wafers. Summary of the invention

[0004] In view of various deficiencies in the prior art, the inventors have designed a multifunctional silicon wafer detection platform through long-term practice.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A multifunctional silicon wafer detection platform includes a mounting base, a detection module is arranged on the mounting base, and a photovoltaic silicon wafer transfer module and a semiconductor silicon wafer transfer module are arranged next to the detection module. The detection module includes a bracket, a first linear guide fixed on the bracket, and a detection sensor slidably arranged on the first linear guide; the photovoltaic silicon wafer transfer module includes a first linear module and a photovoltaic silicon wafer conveying assembly slidably arranged on the first linear module; the semiconductor silicon wafer transfer module includes a second linear module, a rotating platform arranged on the second linear module, and an adjustable gripper arranged on the top of the rotating platform.

[0007] Furthermore, the bracket includes an upper beam and a lower beam, and the first linear guide rail is arranged on both the upper beam and the lower beam; the detection sensor is connected to the first slider on the first linear guide rail through a mounting seat; and a clamp is provided at one end of the mounting seat away from the first slider.

[0008] Furthermore, the two detection sensors are coaxially arranged; and two mechanical limit stops are provided on the first linear guide rail.

[0009] Furthermore, second linear guide rails are arranged on both sides along the length direction of the first linear module, and second sliders are arranged on the second linear guide rails; and two second linear guide rails are arranged on both sides of the bracket respectively.

[0010] Furthermore, the photovoltaic silicon wafer conveying assembly comprises a connecting base plate and vertical plates fixed on both sides of the connecting base plate in the length direction; the two ends of the two vertical plates are respectively connected by a driving shaft and a driven shaft, the driving shaft is fixed between the two vertical plates through bearing seats at both ends, and the driven shaft is fixed between the two vertical plates through first idler wheels at both ends; the two ends of the connecting base plate are respectively fixed to the two second sliders (35).

[0011] Furthermore, the middle parts of the two vertical plates are grooved; a plurality of second idler wheels are evenly arranged on the inner sides of the two vertical plates, and the second idler wheels are fixed to the vertical plates through idler wheel shafts.

[0012] Furthermore, the inner side of the bearing seat is connected to a first synchronous belt pulley through a key, and the first synchronous belt pulley is arranged on the inner side of the vertical plate; a second synchronous belt pulley is provided on the outer side of the vertical plate, and the second synchronous belt pulley and the first synchronous belt pulley are arranged coaxially.

[0013] Furthermore, a first servo motor is provided at the bottom of the connecting base plate near one end of the driving shaft; the output shaft of the first servo motor is connected to the third synchronous pulley through a key; the second synchronous pulley and the third synchronous pulley are driven to operate through a transmission belt.

[0014] Furthermore, the rotating platform is fixed on the second linear module via a connecting plate; a second servo motor is provided on one side of the rotating platform, and the second servo motor is connected to a driving input end of the rotating platform.

[0015] Furthermore, the adjustable gripping plate is fixed to the turntable of the rotating platform by bolts, and the adjustable gripping plate is provided with three retractable claws.

[0016] The beneficial effects of the present invention are:

[0017] Through the matching design of the photovoltaic silicon wafer transfer module and the semiconductor silicon wafer transfer module, it is compatible with the detection of photovoltaic and semiconductor silicon wafers, and is compatible with various silicon wafer specifications and covers a larger detection area, thereby realizing the detection of thickness, TTV, warping and bending of photovoltaic and semiconductor silicon wafers; in addition, the detection platform of the present invention has a simple structure, low cost, stable and reliable detection, which greatly improves the silicon wafer detection efficiency of R&D personnel. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is an overall schematic diagram of the present invention;

[0019] Figure 2 is a schematic diagram of a detection module of the present invention;

[0020] Figure 3 It is a schematic diagram of the photovoltaic silicon wafer transfer module of the present invention;

[0021] Figure 4 is a schematic diagram of the driving shaft of the present invention;

[0022] Figure 5 It is a schematic diagram of a semiconductor silicon wafer transfer module of the present invention.

[0023] In the attached figure:

[0024] 10-installation base, 11-foot cup;

[0025] 20-detection module, 21-bracket, 22-upper beam, 23-lower beam, 24-first linear guide rail, 25-first slider, 26-mounting seat, 27-detection sensor;

[0026] 30- photovoltaic silicon wafer transfer module, 31- first linear module, 32- second linear guide rail, 33- connecting base plate, 34- vertical plate, 341- second idler wheel, 35- second slider, 36- first servo motor, 37- driving shaft, 371- bearing seat, 372- first synchronous pulley, 38- second synchronous pulley, 381- transmission belt, 382- third synchronous pulley, 39- driven shaft;

[0027] 40-semiconductor silicon wafer transfer module, 41-second linear module, 42-connecting plate, 43-rotating platform, 44-second servo motor, 45-adjustable gripper, 46-claw;

[0028] 50-Electrical control box. DETAILED DESCRIPTION

[0029] In order to enable those skilled in the art to better understand the technical solution of the present invention, the technical solution of the present invention is clearly and completely described below in conjunction with the accompanying drawings of the present invention. Based on the embodiments in this application, other similar embodiments obtained by ordinary technicians in this field without making creative work should all fall within the scope of protection of this application. In addition, the directional words mentioned in the following embodiments, such as "up", "down", "left", "right", etc., are only reference to the directions of the accompanying drawings. Therefore, the directional words used are used to illustrate rather than limit the invention.

[0030] The present invention will be further described below in conjunction with the accompanying drawings and preferred embodiments.

[0031] See also Figure 1 The multifunctional silicon wafer inspection platform of the present invention includes a mounting base 10 to provide support for all components thereon. The mounting base 10 is provided with an inspection module 20 for inspecting various properties of silicon wafers. Beside the inspection module 20, a photovoltaic silicon wafer transfer module 30 and a semiconductor silicon wafer transfer module 40 are provided; the photovoltaic silicon wafer transfer module 30 is used to transport silicon wafers when inspecting photovoltaic silicon wafers; and the semiconductor silicon wafer transfer module 40 is used to transport silicon wafers when inspecting semiconductor silicon wafers.

[0032] An electric control box 50 is also provided on one side of the mounting base 10. An electric control system is provided in the electric control box 50. Control buttons are provided on the electric control box 50 to control the start and stop of the equipment on the mounting base 10. The operator can manually switch the detection mode through the buttons on the electric control box 50. There are two detection modes, one is a photovoltaic silicon wafer detection mode, and the other is a semiconductor silicon wafer detection mode.

[0033] Four foot cups 11 are provided at the bottom of the mounting base 10 for supporting the entire mounting base 10 and adjusting the levelness of the mounting base 10 .

[0034] See also Figure 1 , Figure 2 The detection module 20 includes a bracket 21, a first linear guide rail 24 fixed on the bracket 21, and a detection sensor 27 slidably disposed on the first linear guide rail 24. Specifically, the bracket 21 includes an upper beam 22 and a lower beam 23, and the first linear guide rail 24 is disposed on both the upper beam 22 and the lower beam 23. The detection sensor 27 is connected to the first slider 25 on the first linear guide rail 24 through a mounting seat 26. A clamping claw is disposed at one end of the mounting seat 26 away from the first slider 25, for clamping the detection sensor 27.

[0035] In this embodiment, two detection sensors 27 are coaxially arranged, and the silicon wafer is located between the two sensors during detection; the first linear guide rail 24 is provided with left and right mechanical limiters (not shown in the figure), the left limiter corresponds to the photovoltaic silicon wafer detection mode, and the right limiter corresponds to the semiconductor silicon wafer detection mode.

[0036] See also Figure 1 , Figure 3 , Figure 4 The photovoltaic silicon wafer transfer module 30 includes a first linear module 31 and a photovoltaic silicon wafer conveying assembly slidably arranged on the first linear module 31. The first linear module 31 is fixed to the mounting base 10 by bolts. Second linear guides 32 are arranged on both sides along the length direction of the first linear module 31, and second sliders 35 are arranged on the second linear guides 32. In this embodiment, the second linear guides 32 are fixed to the mounting base 10 by bolts, and the two second linear guides 32 are respectively arranged on both sides of the bracket 21 of the detection module 20.

[0037] The photovoltaic silicon wafer conveying assembly includes a connecting bottom plate 33 and vertical plates 34 fixed on both sides of the connecting bottom plate 33 in the length direction. The middle parts of the two vertical plates 34 are slotted to facilitate the detection sensor 27 on the lower crossbeam 23 of the detection module 20 to pass through. The two ends of the two vertical plates 34 are connected by a driving shaft 37 and a driven shaft 39 respectively. The driving shaft 37 is fixed between the two vertical plates 34 through the bearing seats 371 at both ends, and the driven shaft 39 is fixed between the two vertical plates 34 through the first idler wheels at both ends. Several second idler wheels 341 are also evenly arranged on the inner side of the two vertical plates 34 to support the conveyor belt between the two vertical plates 34 (not shown in the figure). The second idler wheels 341 are fixed to the vertical plates 34 through the idler wheel shaft.

[0038] The inner side of the bearing seat 371 is connected to the first synchronous pulley 372 through a key, and the first synchronous pulley 372 is arranged on the inner side of the vertical plate 34. A second synchronous pulley 38 is arranged on the outer side of the vertical plate 34 corresponding to the first synchronous pulley 372, and the second synchronous pulley 38 is coaxial with the first synchronous pulley 372. A first servo motor 36 is arranged at the bottom of the connecting bottom plate 33 near one end of the driving shaft 37, and the output shaft of the first servo motor 36 is connected to the third synchronous pulley 382 through a key. The second synchronous pulley 38 and the third synchronous pulley 382 are driven to operate through the transmission belt 381.

[0039] In this embodiment, the two ends of the connecting plate 33 are fixed to the two second sliders 35, and the middle of the connecting plate 33 is fixed to the slider on the first linear module 31. These three sliders can slide left and right, thereby driving the components thereon to move left and right.

[0040] See also Figure 1 , Figure 5 The semiconductor silicon wafer transfer module 40 includes a second linear module 41, a rotating platform 43 disposed on the second linear module 41, and an adjustable gripper 45 disposed on the top of the rotating platform 43. The second linear module 41 is fixed to the mounting base 10 by bolts, and the rotating platform 43 is fixed to the second linear module 41 by a connecting plate 42. A second servo motor 44 is provided on one side of the rotating platform 43, and the second servo motor 44 is connected to the driving input end of the rotating platform 43. The adjustable gripper 45 is fixed to the turntable of the rotating platform 43 by bolts, and the adjustable gripper 45 is provided with three retractable claws 46 for being compatible with semiconductor silicon wafers of different diameters.

[0041] The silicon wafer detection platform of the present invention is used as follows:

[0042] (I) Photovoltaic silicon wafer testing

[0043] (1) Select the photovoltaic silicon wafer detection function on the electric control box 50;

[0044] (2) The silicon wafer is placed on the left side of the conveyor belt of the photovoltaic silicon wafer transfer module 30. The first servo motor 36 drives the conveyor belt to start conveying the silicon wafer to the right side, passing between the upper and lower detection sensors 27 of the detection module 20. The sensors start to continuously detect the distance on the surface of the silicon wafer.

[0045] (3) After the silicon wafer completely passes through the detection sensor 27, the conveyor belt stops, and the detection of the left line of the silicon wafer is completed;

[0046] (4) The first linear module 31 is started, driving the photovoltaic silicon wafer conveying assembly to move a certain distance to the left, so that the detection point of the detection sensor 27 is aligned with the middle of the silicon wafer;

[0047] (5) The conveyor belt starts in the reverse direction, driving the silicon wafer to be transported to the left, and the detection sensor 27 completes the continuous detection on the center line of the silicon wafer;

[0048] (6) After the wafer centerline detection is completed, the conveyor belt stops, and the first linear module 31 starts, driving the photovoltaic silicon wafer conveying assembly to continue to move a certain distance to the left, so that the detection point of the detection sensor 27 is aligned with the right line of the silicon wafer;

[0049] (7) The conveyor belt starts and conveys the silicon wafer to the right. The detection sensor 27 completes the continuous detection on the right line of the silicon wafer. After the detection is completed, the silicon wafer continues to be conveyed to the right and stops at the right end of the conveyor belt;

[0050] (8) The detection sensor 27 transmits the collected data to the electronic control system in the electronic control box 50, and after calculation and processing, outputs the detection values ​​of the thickness, TTV, warpage, bending, etc. of the silicon wafer.

[0051] (II) Semiconductor silicon wafer inspection

[0052] (1) Select the semiconductor silicon wafer detection function on the electric control box 50;

[0053] (2) adjusting the adjustable gripping plate 45 to the size of the semiconductor silicon wafer, mainly 4 inches, 6 inches, 8 inches, and 12 inches in diameter;

[0054] (3) Place the semiconductor silicon wafer on the adjustable gripping plate 45, and the claws 46 on the gripping plate slightly grip the silicon wafer;

[0055] (4) Move the detection module 20 to the right limit position of the first linear guide rail 24 and fix it;

[0056] (5) The second linear module 41 of the semiconductor silicon wafer transfer module 40 drives the silicon wafer to move to the right until the detection sensor 27 is aligned with the center of the silicon wafer and detects it;

[0057] (6) After the detection is completed, the second linear module 41 drives the silicon wafer to move a certain distance to the left and stops, and the rotating platform 43 starts to drive the silicon wafer to rotate smoothly. During the rotation process, the detection sensor 27 completes continuous detection along the circumference of the silicon wafer, and the rotating platform 43 stops;

[0058] (7) The second linear module 41 continues to move to the left for a certain distance and stops, and the rotating platform 43 continues to start, driving the silicon wafer to rotate smoothly. During the rotation process, the detection sensor 27 completes continuous detection on another circumference of the silicon wafer, and the rotating platform 43 stops;

[0059] (8) Repeat the above steps to complete the continuous detection of the center of the semiconductor silicon wafer and the circumference of circles with different radii.

[0060] The present invention has been described in detail above. The above description is only a preferred embodiment of the present invention and should not limit the scope of implementation of the present invention. That is, all equivalent changes and modifications made within the scope of this application should still fall within the scope of the present invention.

Claims

1. A multifunctional silicon wafer testing platform, comprising a mounting base (10), characterized in that: The mounting base (10) is provided with a detection module (20), and a photovoltaic silicon wafer transfer module (30) and a semiconductor silicon wafer transfer module (40) are provided next to the detection module (20); the detection module (20) comprises a bracket (21), a first linear guide rail (24) fixed on the bracket (21), and a detection sensor (27) slidably arranged on the first linear guide rail (24); the photovoltaic silicon wafer transfer module (30) comprises a first linear module (31) and a photovoltaic silicon wafer conveying assembly slidably arranged on the first linear module (31); the semiconductor silicon wafer transfer module (40) comprises a second linear module (41), a rotating platform (43) arranged on the second linear module (41), and an adjustable gripper (45) arranged on the top of the rotating platform (43); The bracket (21) comprises an upper crossbeam (22) and a lower crossbeam (23), and the first linear guide rail (24) is arranged on both the upper crossbeam (22) and the lower crossbeam (23); the detection sensor (27) is connected to the first slider (25) on the first linear guide rail (24) through a mounting seat (26); and a clamping claw is arranged at one end of the mounting seat (26) away from the first slider (25); Second linear guide rails (32) are arranged on both sides of the first linear module (31) in the length direction, and second sliders (35) are arranged on the second linear guide rails (32); the two second linear guide rails (32) are arranged on both sides of the bracket (21) respectively; The photovoltaic silicon wafer conveying assembly comprises a connecting bottom plate (33) and vertical plates (34) fixed on both sides of the connecting bottom plate (33) in the length direction; the two ends of the two vertical plates (34) are respectively connected through a driving shaft (37) and a driven shaft (39); the driving shaft (37) is fixed between the two vertical plates (34) through bearing seats (371) at both ends thereof, and the driven shaft (39) is fixed between the two vertical plates (34) through first idler wheels at both ends thereof; the two ends of the connecting bottom plate (33) are respectively fixed to the two second sliding blocks (35); The inner side of the bearing seat (371) is connected to a first synchronous belt pulley (372) via a key, and the first synchronous belt pulley (372) is arranged on the inner side of the vertical plate (34); a second synchronous belt pulley (38) is arranged on the outer side of the vertical plate (34), and the second synchronous belt pulley (38) and the first synchronous belt pulley (372) are coaxially arranged; A first servo motor (36) is provided at the bottom of the connecting base plate (33) near one end of the driving shaft (37); the output shaft of the first servo motor (36) is connected to the third synchronous pulley (382) via a key; the second synchronous pulley (38) and the third synchronous pulley (382) are driven to operate via a transmission belt (381); The rotating platform (43) is fixed on the second linear module (41) via a connecting plate (42); a second servo motor (44) is provided on one side of the rotating platform (43), and the second servo motor (44) is connected to the driving input end of the rotating platform (43).

2. The multifunctional silicon wafer detection platform according to claim 1, characterized in that: The two detection sensors (27) are coaxially arranged; and the first linear guide rail (24) is provided with two mechanical limit stops.

3. The multifunctional silicon wafer detection platform according to claim 1, characterized in that: The middle parts of the two vertical plates (34) are both grooved; a plurality of second idler wheels (341) are evenly arranged on the inner sides of the two vertical plates (34), and the second idler wheels (341) are fixed to the vertical plates (34) via idler wheel shafts.

4. The multifunctional silicon wafer detection platform according to claim 1, characterized in that: The adjustable gripping plate (45) is fixed to the turntable of the rotating platform (43) by means of bolts, and the adjustable gripping plate (45) is provided with three retractable claws (46).

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