A gas path connection structure for a semi-volatile organic compound micro-release chamber

Abstract

The embodiment of the present invention discloses a gas path connection structure of a semi-volatile organic compound micro-release cabin, which is used to solve the technical problem that the existing gas path connection structure uses a flow regulating device with certain pollutants to regulate the gas flow, thereby affecting the cleanliness of the gas in the gas path. The embodiment of the present invention includes a clean gas source; the clean gas source is connected to a gas supply branch and a calibration branch; the calibration branch is connected to a mass flowmeter, and the calibration branch is connected to at least one calibration gas supply pipeline, each of which is provided with a calibration control switch, each of which is connected to a gas collecting pipe, and the gas collecting pipe is provided with a flow regulating valve; the gas supply branch is connected to a working gas supply pipeline, each of which is provided with a working control switch, and the working gas supply pipeline is connected to the gas collecting pipe; the gas collecting pipe is connected to a micro-cabin.

Description

Technical Field

[0001] The invention relates to the technical field of gas path regulation, and in particular to a gas path connection structure of a semi-volatile organic matter micro-release chamber. Background Art

[0002] The existing general gas path connection structure often uses a flow control device when it is necessary to adjust the flow of gas inside the gas path of the semi-volatile organic compound micro-release chamber. Since the flow control device usually uses non-metallic rubber seals or its manufacturing material is non-metallic, when the gas in the gas path flows through the flow control device, the gas will be more or less contaminated by the flow control device, resulting in a decrease in the cleanliness of the gas.

[0003] Therefore, in order to solve the above technical problems, finding a gas path connection structure that can achieve gas flow control in the working gas path of a semi-volatile organic compound micro-release chamber for multiple test chambers without using a flow control device has become an important topic studied by technical personnel in this field. Summary of the invention

[0004] The embodiment of the present invention discloses a gas path connection structure of a semi-volatile organic compound micro-release chamber, which is used to solve the technical problem that the existing gas path connection structure of the semi-volatile organic compound micro-release chamber uses a flow regulating device with certain pollutants to regulate the gas flow, thereby affecting the cleanliness of the gas in the gas path.

[0005] The embodiment of the present invention provides a gas path connection structure of a semi-volatile organic compound micro-release chamber, comprising:

[0006] A clean air source; the clean air source is connected to an air supply branch and a calibration branch;

[0007] The calibration branch is connected to a mass flowmeter, and at least one calibration air supply pipeline is connected to the calibration branch, each calibration air supply pipeline is provided with a calibration control switch, each calibration air supply pipeline is connected to a gas collecting pipe, and the gas collecting pipe is provided with a flow regulating valve;

[0008] The air supply branch is connected to working air supply pipelines matching the number of the calibration air supply pipelines, each of the working air supply pipelines is provided with a working control switch, and the working air supply pipeline is connected to the air collecting pipe;

[0009] The air collecting pipe is connected with a micro-cabin.

[0010] Optionally, the calibration branch is connected to three calibration air supply pipelines, and the air supply branch is connected to three working air supply pipelines;

[0011] The three calibration air supply pipelines are respectively A1 calibration air supply pipeline, B1 calibration air supply pipeline and C1 calibration air supply pipeline;

[0012] The three working air supply pipelines are respectively A2 working air supply pipeline, B2 working air supply pipeline and C2 working air supply pipeline;

[0013] There are three micro-cabins, namely micro-cabin A, micro-cabin B and micro-cabin C;

[0014] There are three gas collecting pipes, which are divided into A gas collecting pipe, B gas collecting pipe and C gas collecting pipe;

[0015] The A1 calibration air supply pipeline and the A2 working air supply pipeline are commonly connected to the A air collecting pipe, and the A air collecting pipe is connected to the A micro-cabin; the B1 calibration air supply pipeline and the B2 working air supply pipeline are commonly connected to the B air collecting pipe, and the B air collecting pipe is connected to the B micro-cabin; the C1 calibration air supply pipeline and the C2 working air supply pipeline are commonly connected to the C air collecting pipe, and the C air collecting pipe is connected to the C micro-cabin.

[0016] Optionally, both the calibration control switch and the working control switch are solenoid valves.

[0017] Optionally, the calibration control switch and the working control switch are both manual valves.

[0018] Optionally, the clean gas source is clean gas stored in a gas tank.

[0019] Optionally, the air supply branch, the calibration branch, the calibration air supply pipeline and the working air supply pipeline are all pipelines of the same size.

[0020] It can be seen from the above technical solutions that the embodiments of the present invention have the following advantages:

[0021] An embodiment of the present invention provides an air path connection structure of a semi-volatile organic compound micro-release cabin, comprising a clean air source; the clean air source is connected to an air supply branch and a calibration branch; the calibration branch is connected to a mass flowmeter, and the calibration branch is connected to at least one calibration air supply pipe, each of the calibration air supply pipes is provided with a calibration control switch, each of the calibration air supply pipes is connected to an air collecting pipe, and the air collecting pipe is provided with a flow regulating valve; the air supply branch is connected to working air supply pipes matching the number of the calibration air supply pipes, each of the working air supply pipes is provided with a working control switch, and the working air supply pipes are connected to the air collecting pipe; the air collecting pipe is connected to a micro cabin. When adjusting the gas flow rate, the gas path connection structure of the semi-volatile organic compound micro-release cabin in this embodiment only needs to turn on the calibration control switch of one of the calibration gas supply pipelines, turn off the calibration control switches of the other calibration gas supply pipelines, turn off the working control switch of a working gas supply pipeline corresponding to the calibration gas supply pipeline with the calibration control switch turned on, turn on the working control switches of the other working gas supply pipelines, and then adjust the gas flow rate by controlling the flow regulating valve. The gas flow rate displayed by the mass flow meter is the current gas flow rate flowing into the micro-cabin. After adjusting the flow regulating valve, turn off the current calibration control switch, turn on the working control switch, and switch the gas flow to the working gas supply pipeline to work normally. Through the above design, the gas flow rate can be adjusted without using a gas flow control device in the working gas path, thereby maintaining the cleanliness of the gas well. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0023] Figure 1 A schematic diagram of a gas path connection structure of a semi-volatile organic compound micro-release chamber provided in an embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram of the application of a gas path connection structure of a semi-volatile organic compound micro-release chamber provided in an embodiment of the present invention;

[0025] Illustration: calibration air supply pipeline 1; working air supply pipeline 2; calibration branch 3; air supply branch 4; mass flow meter 5; calibration control switch 6; working control switch 7; clean air source 8; air collecting pipe 9; flow regulating valve 10; micro cabin 11;

[0026] A1 calibration air supply pipeline A1; B1 calibration air supply pipeline B1; C1 calibration air supply pipeline C1; A2 working air supply pipeline A2; B2 working air supply pipeline B2; C2 working air supply pipeline C2; ​​A gas collecting pipe A9; B gas collecting pipe B9; C gas collecting pipe C9; A micro cabin A11; B micro cabin B11; C micro cabin C11. DETAILED DESCRIPTION

[0027] The embodiment of the present invention discloses a gas path connection structure of a semi-volatile organic compound micro-release chamber, which is used to solve the technical problem that the existing gas path connection structure of the semi-volatile organic compound micro-release chamber uses a flow regulating device with certain pollutants to regulate the gas flow, thereby affecting the cleanliness of the gas in the gas path.

[0028] In order to enable those skilled in the art to better understand the scheme of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0029] Example

[0030] See also Figure 1 , a gas path connection structure of a semi-volatile organic compound micro-release chamber provided in an embodiment of the present invention comprises:

[0031] A clean air source 8; the clean air source 8 is connected to an air supply branch 4 and a calibration branch 3;

[0032] The calibration branch 3 is connected to a mass flowmeter 5, and the calibration branch 3 is connected to at least one calibration gas supply pipeline 1, each of the calibration gas supply pipelines 1 is provided with a calibration control switch 6, each of the calibration gas supply pipelines 1 is connected to a gas collecting pipe 9, and the gas collecting pipe 9 is provided with a flow regulating valve 10;

[0033] The air supply branch 4 is connected with working air supply pipelines 2 matching the number of the calibration air supply pipelines 1, each of the working air supply pipelines 2 is provided with a working control switch 7, and the working air supply pipelines 2 are connected with the air collecting pipe 9;

[0034] The air collecting pipe 9 is connected to a micro-cabin 11 .

[0035] It should be noted that the flow regulating valve 10 used in this embodiment is made of materials that do not contain pollutants, and the air supply branch 4, the calibration branch 3, the calibration air supply pipeline 1 and the working air supply pipeline 2 in this embodiment are all pipelines made of materials that do not contain volatile organic substances.

[0036] When adjusting the gas flow rate, the gas path connection structure of the semi-volatile organic compound micro-release chamber in this embodiment only needs to open the calibration control switch 6 of one calibration gas supply pipeline 1, close the calibration control switches 6 of other calibration gas supply pipelines 1, close the working control switch 7 of a working gas supply pipeline 2 corresponding to the calibration gas supply pipeline 1 with the calibration control switch 6 turned on, and open the working control switches 7 of other working gas supply pipelines 2, and then adjust the gas flow rate by controlling the flow regulating valve 10. The gas flow rate displayed by the mass flowmeter 5 is the current gas flow rate flowing into the micro-chamber 11. Through the above design, the gas flow rate can be adjusted without using a gas flow control device in the working gas path, and the cleanliness of the gas is well maintained.

[0037] Furthermore, the calibration control switch 6 and the working control switch 7 are both solenoid valves.

[0038] Furthermore, the calibration control switch 6 and the working control switch 7 are both manual valves.

[0039] Furthermore, the clean gas source 8 is clean gas stored in a gas tank.

[0040] Furthermore, the air supply branch 4, the calibration branch 3, the calibration air supply pipeline 1 and the working air supply pipeline 2 are all pipelines of the same size.

[0041] It should be noted that, through the above design, the gas pressure balance and flow stability of the gas pipeline can be ensured.

[0042] The advantage of the gas path connection structure of the semi-volatile organic compound micro-release chamber provided in this embodiment is that the flow regulating device (containing pollutants) on the original gas path can be removed, thereby avoiding the flow regulating device (pollutants) from affecting the cleanliness of the gas.

[0043] Application Examples

[0044] See also Figure 2 This application example is based on the above embodiment and describes in detail the specific application of the gas path connection structure of the semi-volatile organic compound micro-release chamber;

[0045] In this application example, the calibration branch 3 is connected to three calibration gas supply pipelines 1, and the gas supply branch 4 is connected to three working gas supply pipelines 2;

[0046] The three calibration air supply pipelines 1 are respectively an A1 calibration air supply pipeline, a B1 calibration air supply pipeline and a C1 calibration air supply pipeline;

[0047] The three working air supply pipelines 2 are respectively A2 working air supply pipeline, B2 working air supply pipeline and C2 working air supply pipeline;

[0048] There are three micro-cabins 11, which are divided into micro-cabin A, micro-cabin B and micro-cabin C;

[0049] There are three gas collecting pipes 9, which are divided into A gas collecting pipe, B gas collecting pipe and C gas collecting pipe;

[0050] The A1 calibration air supply pipeline and the A2 working air supply pipeline are commonly connected to the A air collecting pipe, and the A air collecting pipe is connected to the A micro-cabin; the B1 calibration air supply pipeline and the B2 working air supply pipeline are commonly connected to the B air collecting pipe, and the B air collecting pipe is connected to the B micro-cabin; the C1 calibration air supply pipeline and the C2 working air supply pipeline are commonly connected to the C air collecting pipe, and the C air collecting pipe is connected to the C micro-cabin.

[0051] It should be noted that when the entire gas circuit is running, the gas flow rate needs to be adjusted as follows:

[0052] For example, when adjusting the gas flow of micro-chamber A, the calibration control switch 6 of the calibration gas supply pipeline A1 is turned on, the working control switch 7 of the working gas supply pipeline A2 is turned off, the calibration control switches 6 of the remaining calibration gas supply pipelines B1 and C1 are turned off, and the working control switches 7 of the remaining working gas supply pipelines B2 and C2 are turned on. Subsequently, the gas flow is controlled by controlling the flow regulating valve 10 on the A collecting pipe. The mass flow meter 5 displays the current gas flow of micro-chamber A. Finally, the opening of the above-mentioned flow regulating valve 10 is fixed. After adjusting the flow regulating valve 10, the calibration control switch 6 of the calibration gas supply pipeline A1 is turned off, and the working control switch 7 of the working gas supply pipeline A2 is turned on. The airflow is switched to the working gas supply pipeline A2 to work normally. The gas flow of micro-chamber A can be adjusted in real time by the above-mentioned means, and the gas flow adjustment of micro-chambers B and C can also be carried out according to the above-mentioned method.

[0053] When the gas connection structure of the semi-volatile organic compound micro-release cabin is operating normally, the calibration control switches 6 of the A1 calibration air supply pipeline, the B1 calibration air supply pipeline, and the C1 calibration air supply pipeline are all in the closed state, and the working control switches 7 of the A2 working air supply pipeline, the B2 working air supply pipeline, and the C2 working air supply pipeline are all in the open state, and the gas enters the A micro-cabin, the B micro-cabin, and the C micro-cabin through the A2 working air supply pipeline, the B2 working air supply pipeline, and the C2 working air supply pipeline.

[0054] The above is a detailed introduction to the gas path connection structure of the semi-volatile organic compound micro-release chamber provided by the present invention. For those skilled in the art, according to the ideas of the embodiments of the present invention, there may be changes in the specific implementation methods and application scopes. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A gas path connection structure for a semi-volatile organic compound micro-release chamber, characterized in that: It comprises a clean air source (8); the clean air source (8) is connected to an air supply branch (4) and a calibration branch (3); The calibration branch (3) is connected to a mass flow meter (5), and the calibration branch (3) is connected to at least one calibration air supply pipeline (1), each calibration air supply pipeline (1) is provided with a calibration control switch (6), each calibration air supply pipeline (1) is connected to a gas collecting pipe (9), and the gas collecting pipe (9) is provided with a flow regulating valve (10); The air supply branch (4) is connected to working air supply pipelines (2) whose number matches the calibration air supply pipeline (1), each working air supply pipeline (2) is provided with a working control switch (7), and the working air supply pipeline (2) is connected to the air collecting pipe (9); The gas collecting pipe (9) is connected to a micro-cabin (11).

2. The gas path connection structure of the semi-volatile organic compound micro-release chamber according to claim 1, characterized in that: The calibration branch (3) is connected to three calibration air supply pipelines (1), and the air supply branch (4) is connected to three working air supply pipelines (2); The three calibration air supply pipelines (1) are respectively an A1 calibration air supply pipeline, a B1 calibration air supply pipeline and a C1 calibration air supply pipeline; The three working air supply pipelines (2) are respectively an A2 working air supply pipeline, a B2 working air supply pipeline and a C2 working air supply pipeline; The number of the micro-cabins (11) is three, which are divided into micro-cabin A, micro-cabin B and micro-cabin C; The number of the gas collecting pipes (9) is three, which are divided into gas collecting pipe A, gas collecting pipe B and gas collecting pipe C; The A1 calibration air supply pipeline and the A2 working air supply pipeline are commonly connected to the A air collecting pipe, and the A air collecting pipe is connected to the A micro-cabin; the B1 calibration air supply pipeline and the B2 working air supply pipeline are commonly connected to the B air collecting pipe, and the B air collecting pipe is connected to the B micro-cabin; the C1 calibration air supply pipeline and the C2 working air supply pipeline are commonly connected to the C air collecting pipe, and the C air collecting pipe is connected to the C micro-cabin.

3. The gas path connection structure of the semi-volatile organic compound micro-release chamber according to claim 1, characterized in that: The calibration control switch (6) and the working control switch (7) are both solenoid valves.

4. The gas path connection structure of the semi-volatile organic compound micro-release chamber according to claim 1, characterized in that: The calibration control switch (6) and the working control switch (7) are both manual valves.

5. The gas path connection structure of the semi-volatile organic compound micro-release chamber according to claim 1, characterized in that: The clean gas source (8) is clean gas stored in a gas storage tank.

6. The gas path connection structure of the semi-volatile organic compound micro-release chamber according to claim 1, characterized in that: The air supply branch (4), the calibration branch (3), the calibration air supply pipeline (1) and the working air supply pipeline (2) are all pipelines of the same size.

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