An adsorption tower for removing impurity particles from gas

Abstract

The present invention relates to an adsorption tower for removing impurity particles in gas, and belongs to the field of gas purification. The adsorption tower includes an adsorption tower body, a cleaning brush, a scraper, a discharge plate, and a reciprocating motion system, and may also include a stirring mechanism. A baffle and a filter are arranged in the adsorption tower body from top to bottom, and the baffle is filled with an adsorbent for adsorbing gas impurities. The filter is used to filter particulate impurities in the gas; the cleaning brush and the scraper make reciprocating motion on the filter driven by the reciprocating motion system, and at the same time, with the cooperation of the discharge plate, the blockages in the mesh of the filter are cleaned out and discharged from the adsorption tower body; the stirring mechanism is used to stir the adsorbent particles accumulated in the adsorption tower body. The adsorption tower structure of the present invention is reasonably designed. On the one hand, it can automatically clean the filter to remove the blockages in the mesh of the filter to ensure that the gas passes through the filter smoothly; on the other hand, it can stir the adsorbent particles to increase the contact area between the adsorbent particles and the gas.

Description

Technical Field

[0001] The invention relates to an adsorption tower for removing impurity particles in gas, belonging to the field of gas purification. Background Art

[0002] High-purity electronic gases are supplied to various fields such as semiconductors, photovoltaics, optical fibers, LEDs, and LCD technologies. The purity of the gas (including gaseous impurities and particulate impurities content) has a great impact on the performance of semiconductor devices. Therefore, in the production process of electronic gases, industrial gases need to be purified to meet the needs of the semiconductor industry. However, in the process of purifying industrial gases, particulate impurities can easily clog the filter, thereby affecting the purification efficiency. Summary of the invention

[0003] In view of this, the present invention provides an adsorption tower for removing impurity particles in gas, which can clean the filter and remove blockages in the filter mesh during the adsorption purification process to ensure smooth passage of gas and thus ensure purification efficiency.

[0004] The objectives of the present invention are achieved through the following technical solutions.

[0005] An adsorption tower for removing impurity particles in gas, the adsorption tower comprising an adsorption tower body, a cleaning brush, a scraper, a discharge plate and a reciprocating motion system;

[0006] The adsorption tower body is provided with a baffle and a filter from top to bottom in sequence, the baffle is filled with an adsorbent for adsorbing gas impurities, and the filter is used to filter particulate impurities in the gas; an air inlet pipe is installed on the adsorption tower body below the filter, an air outlet pipe is installed on the adsorption tower body above the filled adsorbent, and an impurity outlet is processed on the side wall at the bottom of the adsorption tower body;

[0007] The cleaning brush is located above the filter screen, and the bristles of the cleaning brush penetrate the mesh of the filter screen; the scraper is located below the filter screen and contacts the lower surface of the filter screen; the reciprocating motion system is used to drive the cleaning brush and the scraper to reciprocate on the filter screen; the discharge plate is installed at one end of the bottom of the adsorption tower body close to the impurity outlet, and the scraper is located above the discharge plate and has a clearance fit with the discharge plate;

[0008] Filter cleaning principle: The cleaning brush can effectively clean out the impurity particles that are blocked in the filter mesh. The cleaned impurity particles stick to the lower surface of the filter under the action of the airflow, and are pushed to the top of the discharge plate by the scraper. Since the air pressure on one side of the discharge plate close to the impurity outlet is greatly reduced, the impurity particles can fall freely and be discharged through the impurity outlet.

[0009] Further, the reciprocating motion system includes a connecting plate, a stop rod, a connecting rod, a mounting plate, a reciprocating screw, a screw sleeve and a first motor;

[0010] A first cavity is processed on the mounting plate;

[0011] One end of the two push rods that pass through the adsorption tower body are fixedly connected to the connecting plate, the other end of one push rod is fixedly connected to the cleaning brush, and the other end of the other push rod is fixedly connected to the scraper; the mounting plate is fixedly installed on the outer wall of the adsorption tower body, the first motor is installed at one end of the mounting plate, the output shaft end of the first motor extends into the first cavity and is fixedly connected to one end of the reciprocating screw, the other end of the reciprocating screw is rotatably connected to the inner wall of the first cavity, and the reciprocating screw is sleeved with a screw sleeve that matches it; one end of the connecting rod that passes through the first cavity is fixedly connected to the screw sleeve, and the other end of the connecting rod is fixedly connected to the connecting plate;

[0012] The first motor is started to drive the reciprocating screw to rotate, the reciprocating screw drives the screw sleeve to move, the connecting rod and the connecting plate drive the push rod to move, and the two push rods respectively drive the cleaning brush and the scraper to move.

[0013] Furthermore, the adsorption tower also includes a stirring mechanism for stirring the adsorbent particles accumulated in the adsorption tower body; the stirring mechanism includes a stirring paddle, a first bevel gear, a second bevel gear, a rotating rod, a first pulley, a second pulley and a belt, and a second cavity is processed on the mounting plate;

[0014] The output shaft end of the first motor passes through the second cavity and extends into the first cavity; the first bevel gear and the second bevel gear are both located in the second cavity, the first bevel gear is fixedly mounted on the output shaft of the first motor, and the second bevel gear is meshed with the first bevel gear; the lower end of the rotating rod is fixedly connected to the second bevel gear, the upper end of the rotating rod is fixedly connected to the first pulley, the second pulley is fixedly connected to the stirring paddle, and a belt is sleeved between the first pulley and the second pulley;

[0015] Start the first motor, the first bevel gear drives the second bevel gear to rotate, the second bevel gear drives the rotating rod to rotate, the rotating rod drives the first pulley to rotate, the belt drives the second pulley to rotate, thereby driving the stirring paddle to rotate, greatly increasing the contact area between the adsorbent particles and the gas.

[0016] Beneficial effects:

[0017] The adsorption tower described in the present invention can realize automatic cleaning of the filter to remove blockages in the mesh of the filter, thereby ensuring that the gas passes through the filter smoothly, thereby ensuring the purification efficiency; and through reasonable structural design, a motor can be used to simultaneously clean the filter and stir the adsorbent particles, and the stirring of the adsorbent particles can increase the contact area between the adsorbent particles and the gas, thereby improving the utilization rate of the adsorbent. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 Schematic diagram of the structure of the adsorption tower used to prepare high-purity tungsten hexafluoride in the embodiment.

[0019] Figure 2 It is a front view of the adsorption tower used for preparing high-purity tungsten hexafluoride in the embodiment.

[0020] Figure 3 for Figure 1 A local enlarged schematic diagram of point A in the middle.

[0021] Figure 4 for Figure 2 A local enlarged schematic diagram of point B in the middle.

[0022] Figure 5 Schematic diagram of the working state of the adsorption tower used to prepare high-purity tungsten hexafluoride in the embodiment.

[0023] Among them, 1-adsorption tower body, 2-discharge plate, 3-blocking net, 4-filter net, 5-discharge port, 6-first push plate, 7-air inlet pipe, 8-connecting plate, 9-second cylinder, 10-second push plate, 11-stirring blade, 12-adsorbent particles, 13-air outlet pipe, 14-stirring shaft, 15 first cylinder, 16 feed barrel, 17-screw conveyor, 18-discharge channel, 19-processing box, 20-connecting pipe, 21-storage box, 22-first motor, 23-reciprocating screw, 24-first cavity, 25-mounting plate, 26-screw sleeve, 27-resist rod, 28-connecting rod, 29-second pulley, 30-belt, 31-first pulley, 32-rotating rod, 33-scraper, 34-cleaning brush, 35-second bevel gear, 36-second cavity, 37-first bevel gear. DETAILED DESCRIPTION

[0024] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0025] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0026] Example 1

[0027] Tungsten hexafluoride is mainly used as a raw material for the chemical vapor deposition (CVD) process of metal tungsten in the electronics industry, and WSi2 made from WF6 can be used as a wiring material in large-scale integrated circuits (LSI). Industrial WF6 contains metal impurities and HF, so in order to meet the needs of the semiconductor industry, it is necessary to purify the industrial WF6 to obtain high-purity WF6 with a purity of more than 99.999%. This embodiment is explained by taking the adsorption tower for preparing high-purity tungsten hexafluoride as an example.

[0028] An adsorption tower for preparing high-purity tungsten hexafluoride, the adsorption tower mainly comprises an adsorption tower body 1, a cleaning brush 34, a scraper 33, a discharge plate 2 and a reciprocating motion system, and may also include a feeding mechanism, a discharging mechanism, a recycling mechanism and a stirring mechanism;

[0029] like Figure 1 As shown, a baffle 3 and a filter 4 are sequentially arranged in the adsorption tower body 1 from top to bottom, the baffle 3 is filled with an adsorbent for adsorbing HF impurities, and the filter 4 is used to filter particulate impurities in tungsten hexafluoride; an air inlet pipe 7 is installed on the adsorption tower body 1 below the filter 4, a discharge port 5 is arranged on the side wall of the adsorption tower body 1 above the baffle 3 and close to the baffle 3, a valve is installed in the discharge port 5, a through hole is processed on the side wall of the adsorption tower body 1 opposite to the discharge port, a feed port and an air outlet pipe 13 are arranged on the adsorption tower body 1 above the filled adsorbent, and an impurity outlet is processed on the side wall at the bottom of the adsorption tower body 1;

[0030] The adsorbent is in granular form, and sodium fluoride granules can be selected;

[0031] like Figure 1 As shown, the feeding mechanism is used to add new adsorbent particles into the adsorption tower body 1, and the feeding mechanism includes a storage box 21, a screw conveyor 17, a feed barrel 16, a first cylinder 15 and a first push plate 6;

[0032] like Figure 1 As shown, the discharging mechanism is used to discharge the adsorbent particles 12 at the bottom of the adsorbent filled in the adsorption tower body 1, and the discharging mechanism includes a second cylinder 9 and a second push plate 10; wherein the second push plate 10 can be designed as a wedge-shaped structure, the bottom of the wedge-shaped plate is close to the upper surface of the baffle 3, the plane end of the wedge-shaped plate faces the discharging port 5, and the inclined end of the wedge-shaped plate faces away from the discharging port 5;

[0033] like Figure 1As shown, the recycling mechanism is used to desorb the used adsorbent particles 12 discharged from the adsorption tower body 1, and store the desorbed adsorbent particles 12 in the storage box 21; the recycling mechanism includes a discharge channel 18, a processing box 19, a connecting pipe 20 and a heating system; wherein the processing box 19 is equipped with an exhaust pipe for discharging the gas generated by the desorption of the adsorbent particles 12;

[0034] like Figure 2 As shown, the reciprocating motion system includes a connecting plate 8, a stop rod 27, a connecting rod 28, a mounting plate 25, a reciprocating screw 23, a screw sleeve 26 and a first motor 22; the mounting plate 25 is processed with a first cavity 24 and a second cavity 36, the first cavity 24 is a strip cavity, and the second cavity 36 is a circular cavity;

[0035] like Figure 2 and Figure 4 As shown, the stirring mechanism is used to stir the adsorbent particles 12 accumulated in the adsorption tower body 1, and the stirring mechanism includes a stirring paddle, a first bevel gear 37, a second bevel gear 35, a rotating rod 32, a first pulley 31, a second pulley 29 and a belt 30, and the stirring paddle includes a stirring shaft 14 and a stirring blade 11;

[0036] Combination Figure 1 to Figure 4 , the connection relationship between the components is as follows:

[0037] A first cylinder 15 is installed at one end of the feed barrel 16, and the other end of the feed barrel 16 is connected to the feed port; the storage box 21 is connected to the feed barrel 16 through a screw conveyor 17; the first push plate 6 is located inside the feed barrel 16 and is fixedly connected to the telescopic end of the first cylinder 15, and a sealing ring is sleeved on the outer wall of the first push plate 6 that contacts the inner wall of the feed barrel 16, and when no material is fed, the first push plate 6 is located at one end of the feed barrel 16 close to the feed port; the second cylinder 9 is installed at the through hole on the adsorption tower body 1, and the second push plate 10 is placed on the baffle 3 and is fixedly connected to the telescopic end of the second cylinder 9; one end of the discharge channel 18 is connected to the processing box 19, and the discharge channel 18 is connected to the processing box 19. The other end of the channel 18 is connected to the discharge port 5; one end of the connecting pipe 20 is connected to the processing box 19, and the other end of the connecting pipe 20 is connected to the storage box 21; the heating system is arranged on the inner wall of the processing box 19; the cleaning brush 34 is located above the filter screen 4, and the bristles of the cleaning brush 34 pass through the mesh of the filter screen 4; the scraper 33 is located below the filter screen 4 and contacts the lower surface of the filter screen 4; one end of the two push rods 27 that pass through the adsorption tower body 1 are fixedly connected to the connecting plate 8, the other end of one push rod 27 is fixedly connected to the cleaning brush 34, and the other end of the other push rod 27 is fixedly connected to the scraper 33; the mounting plate 25 is fixedly mounted on the adsorption tower body On the outer wall of the body 1, the first motor 22 is installed at one end of the mounting plate 25, and the end of the output shaft of the first motor 22 passes through the second cavity 36 and extends into the first cavity; one end of the reciprocating screw 23 is fixedly connected to the end of the output shaft of the first motor 22, and the other end of the reciprocating screw 23 is rotatably connected to the inner wall of the first cavity 24, and a screw sleeve 26 matching it is sleeved on the reciprocating screw 23; one end of the connecting rod 28 passing through the first cavity 24 is fixedly connected to the screw sleeve 26, and the other end of the connecting rod 28 is fixedly connected to the connecting plate 8; the discharge plate 2 is installed at one end of the bottom of the adsorption tower body 1 close to the impurity outlet, and the scraper 33 is connected to the discharge plate 2 when it is located above the discharge plate 2. Clearance fit; the first bevel gear 37 and the second bevel gear 35 are both located in the second cavity 36, the first bevel gear 37 is fixedly mounted on the output shaft of the first motor 22, and the second bevel gear 35 is meshed with the first bevel gear 37; the lower end of the rotating rod 32 is fixedly connected to the second bevel gear 35, the upper end of the rotating rod 32 is fixedly connected to the first pulley 31, the second pulley 29 is fixedly connected to the upper end of the stirring shaft 14, and a belt 30 is sleeved between the first pulley 31 and the second pulley 29; the lower end of the stirring shaft 14 is located in the adsorption tower body 1, and multiple groups of stirring blades 11 are installed on the stirring shaft 14, and the stirring blades are located inside the adsorbent particles 12 filled on the baffle 3.

[0038] The working principle of the adsorption tower used to prepare high-purity tungsten hexafluoride is as follows:

[0039] The tungsten hexafluoride gas enters the adsorption tower body 1 through the air inlet pipe 7, firstly filters out the granular impurities contained in the tungsten hexafluoride gas through the filter screen 4, and then enters the filled adsorbent particles 12 through the retaining net 3. The adsorbent particles 12 can adsorb HF in the tungsten hexafluoride gas, and after the adsorption is completed, the high-purity tungsten hexafluoride gas is discharged through the air outlet pipe 13; wherein, during use, the adsorbent particles 12 at the bottom of the adsorbent filled on the retaining net 3 are pushed out at regular intervals and new adsorbent particles 12 are added at the same time, and the filter screen 4 is cleaned at regular intervals;

[0040] like Figure 5 As shown, the specific process of feeding and discharging is as follows: start the first cylinder 15, pull the first push plate 6 to the end of the feed barrel 16 away from the feed port, start the screw conveyor 17 to transport the new adsorbent particles 12 in the storage box 21 to the feed barrel 16, and start the first cylinder 15 again to push the first push plate 6 to push the new adsorbent particles 12 into the adsorption tower body 1; while feeding, start the second cylinder 9 to push the second push plate 10 forward to push the adsorbent particles 12 with high utilization rate at the bottom of the adsorbent filled on the baffle 3, open the valve of the discharge port 5, and the pushed adsorbent particles 12 enter the processing box 19 through the discharge channel 18, and the temperature in the processing box 19 is heated to above 250°C (preferably 250°C to 350°C) by the heating system, so that the attachments on the adsorbent particles are desorbed, and the gas generated by desorption is discharged from the exhaust pipe of the processing box 19, and the desorbed adsorbent particles 12 enter the storage box 21 through the connecting pipe 20 for recycling;

[0041] like Figure 5 As shown, the specific process of cleaning and stirring is as follows: start the first motor 22 to drive the reciprocating screw 23 to rotate, the reciprocating screw 23 drives the screw sleeve 26 to move, and drives the push rod 27 to move through the connecting rod 28 and the connecting plate 8, and the two push rods 27 drive the cleaning brush 34 and the scraper 33 to move, the cleaning brush 34 can effectively clean out the impurity particles blocked in the mesh of the filter screen 4, and the cleaned impurity particles are attached to the lower surface of the filter screen 4 under the action of the airflow, and the cleaned impurity particles are pushed to the top of the discharge plate 2 by the scraper 33. Since the air pressure on the side of the discharge plate 2 close to the impurity outlet is greatly reduced, the impurity particles can fall freely and be discharged through the impurity outlet; while starting the first motor 22, the first bevel gear 37 drives the second bevel gear 35 to rotate, the second bevel gear 35 drives the rotating rod 32 to rotate, the rotating rod 32 drives the first pulley 31 to rotate, and drives the second pulley 29 to rotate through the belt 30, thereby driving the stirring paddle to rotate.

[0042] The cleaning and stirring process can be carried out continuously or intermittently, depending on actual needs.

[0043] In summary, the above are only preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An adsorption tower for removing impurity particles from gas, characterized in that: The adsorption tower comprises an adsorption tower body, a cleaning brush, a scraper, a discharge plate and a reciprocating motion system; The adsorption tower body is provided with a baffle and a filter from top to bottom in sequence, the baffle is filled with an adsorbent for adsorbing gas impurities, and the filter is used to filter particulate impurities in the gas; an air inlet pipe is installed on the adsorption tower body below the filter, an air outlet pipe is installed on the adsorption tower body above the filled adsorbent, and an impurity outlet is processed on the side wall at the bottom of the adsorption tower body; The cleaning brush is located above the filter, and the bristles of the cleaning brush penetrate the mesh of the filter; the scraper is located below the filter and contacts the lower surface of the filter; the reciprocating motion system is used to drive the cleaning brush and the scraper to reciprocate on the filter; the discharge plate is installed at one end of the bottom of the adsorption tower body close to the impurity outlet, and the scraper is located above the discharge plate and fits in the gap with the discharge plate.

2. The adsorption tower for removing impurity particles in gas according to claim 1, characterized in that: The reciprocating motion system comprises a connecting plate, a stop rod, a connecting rod, a mounting plate, a reciprocating screw, a screw sleeve and a first motor; A first cavity is processed on the mounting plate; One ends of the two push rods passing through the adsorption tower body are fixedly connected to the connecting plate, the other end of one push rod is fixedly connected to the cleaning brush, and the other end of the other push rod is fixedly connected to the scraper; the mounting plate is fixedly installed on the outer wall of the adsorption tower body, the first motor is installed at one end of the mounting plate, the output shaft end of the first motor extends into the first cavity and is fixedly connected to one end of the reciprocating screw, the other end of the reciprocating screw is rotatably connected to the inner wall of the first cavity, and the reciprocating screw is provided with a screw sleeve that matches it; one end of the connecting rod passing through the first cavity is fixedly connected to the screw sleeve, and the other end of the connecting rod is fixedly connected to the connecting plate.

3. The adsorption tower for removing impurity particles in gas according to claim 2, characterized in that: The adsorption tower also includes a stirring paddle, a first bevel gear, a second bevel gear, a rotating rod, a first pulley, a second pulley and a belt, and a second cavity is processed on the mounting plate; The output shaft end of the first motor passes through the second cavity and extends into the first cavity; the first bevel gear and the second bevel gear are both located in the second cavity, the first bevel gear is fixedly mounted on the output shaft of the first motor, and the second bevel gear is meshed with the first bevel gear; the lower end of the rotating rod is fixedly connected to the second bevel gear, the upper end of the rotating rod is fixedly connected to the first pulley, the second pulley is fixedly connected to the stirring paddle, and a belt is sleeved between the first pulley and the second pulley.

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