Guide rail phase shifter

Abstract

The present invention discloses a guide rail structure phase shifter, including a base, a main body and an adapter plate; the base is provided with a working groove, in which a main body is installed; an elastic reset structure is connected between the main body and the base; a circular hole is provided on the lower end surface of the main body, an actuator is installed in the working groove in the base, and the actuator is installed in the circular hole; a guide rail mechanism is installed on the inner wall of the working groove in the base, and the guide rail mechanism is fixedly connected to the main body; a through hole is provided on the side of the base, the actuator is electrically connected to a wiring harness, a wire buckle is provided at the end of the wiring harness, and the wire buckle is fixed in the through hole; the upper end of the main body is connected to an adapter plate. The present invention increases the constraint of the movement of the main body, does not cause position deviation, greatly improves the service life, indirectly helps enterprises reduce losses, and improves the working efficiency of the interferometer.

Description

Technical Field

[0001] The invention relates to the field of interferometer components, and in particular to a guide rail structure phase shifter. Background Art

[0002] At present, in the field of interferometer detection, the use of computer algorithms to calculate the quality of the sample under test reflected by the interferometer fringes is becoming more and more widely used. In the interferometric phase shifting algorithm, it is required that there is a sub-micron displacement between the sample under test and the standard lens, and the displacement curve of each point on the end face of the moved object is consistent, stable, and recoverable. This is the role of the phase shifter.

[0003] When the interferometer is calculated through software, it is unable to obtain a stable, precise, and recoverable displacement, which often leads to a large displacement error, causing the final calculation result to differ greatly from the actual value, ultimately affecting the company's judgment on the quality of the measured samples.

[0004] A similar solution available on the market is to set a phase shifter with single-point support or multi-point support on the interferometer. If the phase shifter is supported at a single point, the phase shift position will often deviate, the reset recovery performance will decrease over time, and the service life of the phase shifter will be short. If the phase shifter is supported at multiple points, the price is often very high, which is not conducive to promotion and use. Summary of the invention

[0005] In view of the shortcomings of the prior art, the present invention provides a phase shifter with a guide rail structure, which solves the defects of the above-mentioned technology.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] The guide rail structure phase shifter is characterized in that it includes a base, a main body and an adapter plate; a working groove is provided on the base, and a main body is installed in the working groove; an elastic reset structure is connected between the main body and the base; a circular hole is opened on the lower end surface of the main body, and an actuator is installed in the working groove in the base, and the actuator is installed in the circular hole; a guide rail mechanism is installed on the inner wall of the working groove in the base, and the guide rail mechanism is fixedly connected to the main body; a through hole is provided on the side of the base, and the actuator is electrically connected to a wiring harness, and a wire buckle is provided at the end of the wiring harness, and the wire buckle is fixed in the through hole; the upper end of the main body is connected to the adapter plate.

[0008] In an optimized solution, the upper end of the actuator is connected to the circular hole through a cylindrical pin and a top screw.

[0009] According to the optimized solution, the guide rail mechanism includes a plurality of sliders fixedly mounted on the inner wall of the working groove; a slide groove is provided on a side surface of each slider away from the inner wall of the working groove, a guide rail is slidably connected in the slide groove, and the guide rail is fixedly mounted on the side surface of the main body.

[0010] In an optimized solution, the elastic reset structure includes a plurality of springs fixedly installed between the main body and the base.

[0011] Due to the adoption of the above technology, compared with the prior art, the beneficial effects of the present invention are:

[0012] The present invention forms a working groove on the base by adding an outer frame to the base, and the outer frame is rigidly connected to the base. A slider is installed on the inner wall of the working groove, and a guide rail is installed on the main body. The slide rail moves on the slider, which increases the constraint of the movement of the main body, does not cause position deviation, greatly improves the service life, indirectly helps enterprises reduce losses, and improves the working efficiency of the interferometer. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 The figure is a schematic diagram of an exploded structure of an embodiment of the present invention. DETAILED DESCRIPTION

[0014] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0015] like Figure 1 As shown, the guide rail structure phase shifter comprises a base 8, a main body 10 and an adapter plate 1. The base 8 is provided with a working groove, in which the main body 10 is installed. The upper end of the main body is connected to the adapter plate.

[0016] There are two ways to realize the working groove. The first is to use the same material as the base to make an outer frame by rigid connection, and a working groove is formed inside the outer frame. The second is to directly use processing equipment to make a groove on the base, and the groove becomes a working groove after grinding.

[0017] An elastic reset structure is connected between the main body and the base. The elastic reset structure includes a plurality of springs 9 fixedly installed between the main body and the base.

[0018] A circular hole is provided on the lower end surface of the main body, and an actuator 11 is installed in the working groove in the base, and the upper end of the actuator 11 is installed in the circular hole through a cylindrical pin 3 and a top screw 2. A guide rail mechanism is installed on the inner wall of the working groove in the base, and the guide rail mechanism is fixedly connected to the main body. The guide rail mechanism includes a plurality of sliders 5 fixedly installed on the inner wall of the working groove. A slide groove is provided on one side of each slider away from the inner wall of the working groove, and a guide rail 4 is slidably connected in the slide groove, and the guide rail 4 is fixedly installed on the side of the main body 10.

[0019] A through hole 7 is provided on the side of the base, and the actuator is electrically connected to a wiring harness. A wire buckle 6 is provided at the end of the wiring harness, and the wire buckle 6 is fixed in the through hole 7 .

[0020] The technologies of each part of this embodiment are:

[0021] Actuator, a part with good piezoelectric effect that is encapsulated by piezoelectric ceramics with a packaging structure. Base, a part that connects the fixed actuator, adapter plate and equipment. Main body, a part that converts the displacement of the actuator into the displacement of the end face of the main body. Connecting plate, connected to the main body, and transfers the mechanical structure to be measured. Wire buckle, a part that fixes and leads the wire harness. Cylindrical pin, a part that smoothly transfers the displacement of the actuator. Top screw, a part that adjusts the preload of the contact between the cylindrical pin and the actuator. Spring, a part that provides restoring force for the main body to reset.

[0022] A slider is installed on the inner wall of the working groove of the present invention, a guide rail is installed on the main body, and the slide rail moves on the slider, which increases the constraint on the movement of the main body and does not cause position deviation, greatly improving the service life, indirectly helping enterprises reduce losses and improving the working efficiency of the interferometer.

[0023] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0024] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0025] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A guide rail structure phase shifter, characterized in that: Including a base, a main body and an adapter plate; The base is provided with a working groove, in which a main body is installed; an elastic reset structure is connected between the main body and the base; A circular hole is provided on the lower end surface of the main body, and an actuator is installed in the working groove in the base, and the actuator is installed in the circular hole; A guide rail mechanism is installed on the inner wall of the working groove in the base, and the guide rail mechanism includes a plurality of sliders fixedly installed on the inner wall of the working groove; each slider is provided with a slide groove on one side away from the inner wall of the working groove, and a guide rail is slidably connected in the slide groove, and the guide rail is fixedly installed on the side of the main body; A through hole is provided on the side of the base, the actuator is electrically connected to a wiring harness, a wire buckle is provided at the end of the wiring harness, and the wire buckle is fixed in the through hole; The upper end of the main body is connected with an adapter plate.

2. The guide rail structure phase shifter according to claim 1, characterized in that: The upper end of the actuator is connected in the circular hole through a cylindrical pin and a top screw.

3. The guide rail structure phase shifter according to claim 1, characterized in that: The elastic reset structure comprises a plurality of springs fixedly installed between the main body and the base.

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