Method for manufacturing conversion unit and conversion unit

Abstract

The present invention relates to a method for manufacturing a conversion unit (1), in particular a MEMS conversion unit, which is used to convert an electrical signal into a displacement and / or to convert a displacement into an electrical signal, wherein at least one conversion element (3) is arranged on a carrier element (2), and the conversion element (3) is coupled to a diaphragm unit (5) which can be displaced along a lifting axis (H). According to the present invention, in order to form at least one flexible diaphragm element (14), a flowable and curable diaphragm material is at least partially poured onto a reinforcing element (4) of the diaphragm unit (5) which is or can be coupled to the conversion element (3), so that the diaphragm element (14) together with the reinforcing element (4) at least partially forms the diaphragm unit (5). The present invention also relates to a conversion unit (1).

Description

Technical Field

[0001] The invention relates to a method for manufacturing a transducer unit, in particular a MEMS transducer unit, for converting an electrical signal into a deflection and / or converting a deflection into an electrical signal, wherein at least one transducer element is arranged on a carrier element and the transducer element is coupled to a diaphragm unit that can be deflected along a lifting axis. The invention also relates to a transducer unit. Background Art

[0002] DE 60313715 T2 discloses a method for manufacturing a conversion unit. The method comprises applying a sacrificial layer on a substrate, and then applying a membrane layer, a lower electrode layer, an active layer and an upper electrode layer in sequence. The disadvantage is that the manufacturing method is relatively complicated. Summary of the invention

[0003] The object of the present invention is to provide a flexible manufacturing method for a conversion unit.

[0004] The solution of the invention for achieving the above-mentioned object is a method for producing a converter unit and a converter unit having the features of the independent claims.

[0005] A method for manufacturing a conversion unit for converting an electrical signal into a displacement and / or converting a displacement into an electrical signal is proposed. The conversion unit may be a MEMS conversion unit comprising a piezoelectric actuator. In one application, the conversion unit may be used to generate and / or detect sound waves in the audible wavelength range and / or the ultrasonic range. In this application, the electrical signal may be an audio signal, which is converted into a displacement, which in turn generates a sound wave. Thus, the conversion unit may be a loudspeaker and / or a microphone. As a microphone, the conversion unit converts the displacement originating from the sound wave into an electrical signal or an audio signal. The conversion unit may be an audio converter, in particular a MEMS audio converter or an electrodynamic audio converter. In the case of generating and / or detecting sound waves in the ultrasonic range, these sound waves may be used, for example, in technical test equipment or in ultrasonic equipment for ultrasonic inspection.

[0006] As a supplement or alternative, the conversion unit can also be used as an actuator, wherein, for example, a force or pressure is generated by means of a deflection. In addition, the conversion unit can also be used as a sensor when an operation causes a deflection (for example also a pressure or a force), which is then converted into an electrical signal by the conversion unit.

[0007] In the method, at least one conversion element is arranged on a carrier element. The carrier element can be, for example, a carrier substrate. Thus, the at least one conversion element for generating and / or detecting sound waves is arranged on the carrier element. The conversion element can convert an electrical signal or voltage into a deflection, thereby generating a sound wave. However, the conversion element can also convert a deflection into an electrical signal or voltage, thereby detecting a sound wave. The carrier element can, for example, include a printed circuit board and / or electrical wires for the conversion element.

[0008] In addition, the conversion element is coupled to a diaphragm unit that can be displaced along the lifting axis. By means of the coupling, the displacement can be exchanged between the diaphragm unit and the at least one conversion element. For example, in order to generate sound waves, the conversion element can cause the diaphragm unit to be displaced according to an electrical signal, or apply vibration to the diaphragm unit so that the diaphragm unit excites the vibration of the air above it, thereby generating sound waves. On the other hand, the air vibrating due to the sound waves can also excite the vibration of the diaphragm unit, which is in turn transmitted to the conversion element. The conversion element converts the vibration into an electrical signal, i.e., an audio signal.

[0009] According to the invention, to form at least one flexible membrane element, a flowable and curable membrane material is at least partially cast onto a reinforcing element of the membrane unit that is (can be) coupled to a conversion element. The membrane element together with the reinforcing element at least partially forms the membrane unit.

[0010] The diaphragm material may be, for example, a polymer. Furthermore, the diaphragm material may be silicone. The diaphragm material may be a thermoplastic, an elastomer or a thermosetting plastic. Since the diaphragm element is flexible, it can be deflected together with the reinforcing element, so that the diaphragm unit can be deflected. The reinforcing element itself may be flexible, but less flexible than the at least one diaphragm element. The reinforcing element has a higher rigidity than the diaphragm element. However, the reinforcing element may also be rigid. In this way, in the event of a deflection of the diaphragm unit, only the at least one diaphragm element bends or twists.

[0011] By casting the at least one membrane element onto the reinforcing element, the production method can be simplified. Furthermore, a flexible production method can be achieved thereby, since any shape of the conversion unit and / or the reinforcing element can be achieved by casting the flowable membrane material. This eliminates the need for pre-adjusting the membrane unit to different shapes of the conversion unit.

[0012] When the conversion unit is used as an audio converter, the acoustic properties of the conversion unit also depend on the flexibility of the diaphragm element. A smaller flexibility or a higher rigidity, for example, would weaken the acoustic properties. When the conversion unit is used as a pressure sensor, for example, the pressure range within which the conversion unit can measure the pressure can be defined by selecting the flexibility of the diaphragm element. It is clear that under high pressure, the diaphragm element needs to be less flexible in order to limit its own deflection. In this case, the flexibility can be selected with the help of the diaphragm material or the composition of the diaphragm material. For example, for a smaller flexibility, a diaphragm material with a higher elastic modulus after curing is selected. As a supplement or alternative, the thickness of the at least one diaphragm element can also be changed to adjust its flexibility or rigidity.

[0013] Preferably, the flowable and curable diaphragm material is poured onto the reinforcing element in such a way that the at least one flexible diaphragm element and / or the diaphragm unit is formed independently of the conversion element. As a supplement or alternative, the reinforcing element can also be arranged in such a way that the at least one flexible diaphragm element and / or the diaphragm unit is formed independently of the conversion element. By making the at least one flexible diaphragm element and / or the diaphragm unit independent of the conversion element, the conversion unit has a modular structure. In particular, after the diaphragm material has been cured, the conversion element and the diaphragm unit are separated from each other or are connected only by a coupling.

[0014] Preferably, the at least one conversion element is coupled to the at least one reinforcement element and the membrane element is subsequently cast, so that first a firm connection is formed between the reinforcement element and the conversion element and then the membrane element is arranged on the unit formed by the conversion element and the reinforcement element.

[0015] Preferably, the at least one conversion element is arranged in a receiving cavity of a barrier configuration. The barrier configuration may be arranged on the carrier element first and then the conversion element may be arranged. As an alternative, the conversion element may be arranged first and then the barrier configuration may be arranged on the carrier element. The barrier configuration may be in the form of a frame with a receiving cavity on the carrier element. The barrier configuration or the receiving cavity formed thereby may be filled with a flowable membrane material. The flowable membrane material is intercepted by means of the barrier configuration or intercepted on the area for forming the at least one membrane element.

[0016] If the conversion element is arranged in the accommodating cavity, the barrier configuration completely surrounds the conversion element. In addition, when the reinforcing element is coupled with the conversion element, the barrier configuration also completely surrounds the reinforcing element.

[0017] Preferably, the at least one diaphragm element is cast onto the reinforcing element in a transverse direction oriented transversely to the lifting axis. The reinforcing element has a circumferential side extending around the reinforcing element transversely to the lifting axis. Thus, the at least one diaphragm element is cast onto the circumferential side of the reinforcing element. The circumferential side also faces the baffle configuration. In the case of casting the diaphragm element onto the reinforcing element in the transverse direction to form the diaphragm element, the area of ​​the diaphragm unit is increased, so that the acoustic performance of the conversion unit is enhanced, for example.

[0018] In addition or as an alternative, the at least one diaphragm element is preferably cast onto the barrier arrangement. Since the barrier arrangement is firmly connected to the carrier element, the diaphragm unit is anchored to the carrier substrate due to the coupling of the diaphragm element to the barrier arrangement. Thus, when the converter unit is used as a loudspeaker, the diaphragm unit can vibrate or deflect in accordance with the audio signal and thus generate sound. The diaphragm unit is thus tensioned on the barrier arrangement by the diaphragm element. The diaphragm unit is fixed to the barrier arrangement.

[0019] In addition or as an alternative, the at least one diaphragm element is preferably arranged between the reinforcement element and the barrier arrangement. Since the barrier arrangement can extend completely around the reinforcement element, the at least one diaphragm element can be arranged completely in the area between the barrier arrangement and the reinforcement element. In the case of arranging the at least one diaphragm element between the reinforcement element and the barrier arrangement, the diaphragm unit can also form a closed surface with the barrier arrangement. In this way, the diaphragm unit can exert pressure and / or vibrations on the surrounding medium, for example air, in order to generate and / or detect sound.

[0020] Preferably, the diaphragm material is at least partially poured onto the first and / or second end side of the reinforcing element in the direction of the lifting axis, thereby at least partially forming a diaphragm element on the first and / or second end side of the reinforcing element. The diaphragm material can also be poured into the edge region of the first and / or second end side of the reinforcing element. In the direction of the lifting axis, the reinforcing element can have a thickness of only a few μm, for example 1-5 μm. This makes the peripheral side correspondingly smaller, so in order to improve the connection between the reinforcing element and the at least one diaphragm element, the first and / or second end side is, for example, poured with diaphragm material in a surrounding manner in its edge region. In this way, the reinforcing element is surrounded by the at least one diaphragm element. Therefore, the diaphragm element at least partially surrounds the reinforcing element. Thereby, the connection between the at least one diaphragm element and the reinforcing element is improved.

[0021] In particular, sections of the reinforcement element can also be roughened, for example by a chemical process, on the first and / or second end side in order to produce a positive connection between the reinforcement element and the membrane element.

[0022] Preferably, the barrier arrangement, the conversion element and / or the reinforcing element are arranged relative to one another in such a way that the reinforcing element is spaced apart from the barrier arrangement. This allows the reinforcing element to be displaced contactlessly and / or freely relative to the barrier arrangement.

[0023] Preferably, the at least one diaphragm element is arranged such that it is spaced apart from the conversion element. To this end, the diaphragm material is poured onto the reinforcing element in such a way that the formed diaphragm element is spaced apart from the conversion element. This prevents the conversion element from obstructing the flexible diaphragm element during deflection.

[0024] Preferably, the reinforcing element and / or the conversion element are arranged coaxially relative to the barrier configuration. In addition or as an alternative, the reinforcing element and the conversion element can also be arranged coaxially relative to each other. In the case of, for example, using the conversion unit as an audio converter, the vibration characteristics of the diaphragm unit can thereby be improved. The diaphragm unit can thereby be deflected without, for example, a tilting of the diaphragm unit or a change in the orientation of the diaphragm unit occurring during the deflection.

[0025] Preferably, the barrier arrangement is bonded to the carrier element. Additionally or alternatively, the barrier arrangement can also be formed integrally with the carrier element during the formation of the carrier element. Furthermore, for example, a template can be placed on the carrier element and filled with a barrier material for forming the barrier arrangement. The barrier material can also be a polymer, for example.

[0026] Preferably, a coupling element is arranged between the conversion unit and the reinforcing element. The conversion unit and the reinforcing element can be coupled by means of the coupling element. As a supplement or alternative, the coupling element is arranged between the conversion unit and the reinforcing element so that the conversion unit and the reinforcing element are spaced a certain distance apart. In this way, even when the diaphragm unit and the reinforcing element are displaced to the maximum extent, the reinforcing element or the diaphragm unit is still spaced a certain distance apart from the conversion unit. This prevents the diaphragm unit from colliding with the conversion unit during the displacement process. In addition, the coupling element can be integrally formed with the conversion element or the reinforcing element. As an alternative, the coupling element can also be first connected to the conversion element or the reinforcing element, and then connected to the corresponding counterpart, i.e. the reinforcing element or the conversion element.

[0027] Preferably, in order to form the at least one membrane element, the membrane material is injected into a membrane space which adjoins the reinforcing element in a lateral direction transverse to the lifting axis. Thus, the membrane space is a space for forming the membrane element.

[0028] Additionally or alternatively, the membrane space may be arranged in the transverse direction between the reinforcing element and the baffle arrangement.

[0029] Preferably, a flowable and curable filling material is poured into at least one filling space in the accommodating cavity. After curing, a filling element is formed in the accommodating cavity. The filling material can be poured onto the reinforcing element, the conversion element and / or the baffle configuration. As a supplement or alternative, the filling element can also be poured onto the at least one, in particular cured, diaphragm element. The filling element is also flexible. Preferably, the filling element is more flexible than the diaphragm element. In the case where the conversion unit is used as an audio converter, the acoustic properties of the conversion unit can be changed and / or determined by means of the filling element, for example. The at least one filling space is adjacent to the diaphragm element and / or is spaced a certain distance from this diaphragm element.

[0030] Preferably, the filling material is injected into the housing cavity before and / or after the membrane material is / has been poured onto the reinforcing element. Thus, for example, the filling material can be injected into the housing cavity first, the membrane material can then be poured onto the reinforcing element, and then the filling material can be injected into the housing cavity again. In this way, the conversion unit can be manufactured step by step.

[0031] Preferably, at least one injection opening is formed in the carrier element so that the membrane material and / or the filling material can be injected through the injection opening, thereby enabling the membrane material and / or the filling material to be injected into the accommodating cavity.

[0032] Preferably, the membrane unit is arranged on the top side of the conversion unit and the injection opening is arranged on the bottom side, wherein the membrane material and / or the filling material is injected from the direction of the bottom side.

[0033] Preferably, the reinforcing element and / or the barrier arrangement is attached to an auxiliary element and the membrane material and / or the filling material is injected from the direction of the carrier element. The auxiliary element can be, for example, a plate, so that the plate closes the receiving cavity of the barrier arrangement. In the case of the membrane material being injected, the membrane material accumulates in the receiving cavity above the auxiliary element and forms the at least one membrane element after solidification.

[0034] Preferably, during and / or after the injection of the membrane material and / or the filling material, the conversion unit is deflected and / or vibrated, so that a distribution of the membrane material and / or the filling material is achieved.

[0035] Additionally or alternatively, the membrane material and / or the filling material is preferably poured under pressure. This can speed up the production process.

[0036] Preferably, the membrane material and the filling material are cured successively, in particular under heat input.

[0037] The invention further provides a transducer unit, in particular a MEMS transducer unit, for converting a deflection into an electrical signal and / or converting an electrical signal into a deflection, preferably for generating and / or detecting sound waves in the audible wavelength range and / or in the ultrasonic range.

[0038] The conversion unit comprises a carrier element and at least one conversion element arranged on the carrier element. With the aid of the conversion element, a deflection can be converted into an electrical signal and / or an electrical signal can be converted into a deflection. The conversion element can, for example, comprise a piezoelectric actuator, which can convert an electrical signal into a deflection and convert a deflection into an electrical signal.

[0039] The conversion unit also includes a diaphragm unit coupled to the conversion element. With the aid of the diaphragm unit, a deflection can be transmitted to the surrounding medium (e.g. air), whereby sound is generated. Additionally or alternatively, vibrations and / or pressure of the medium can also lead to a deflection of the diaphragm unit, which is transmitted to the conversion element, whereby the conversion element generates an electrical signal.

[0040] According to the invention, the membrane unit comprises a reinforcement element which is coupled to the conversion element and to which at least one flexible membrane element is at least partially cast, so that the reinforcement element together with the membrane element at least partially forms the membrane unit.

[0041] Furthermore, the conversion unit can be constructed according to one or more methods in the above and / or below description. In addition or as an alternative, the method steps of the above method can also be implemented to form a conversion unit having at least one of the following features.

[0042] Preferably, the conversion element and the diaphragm unit are arranged independently of each other. That is, the conversion element and the diaphragm unit are independent units, elements or components. In this way, a modular structure of the conversion unit can be achieved.

[0043] As a supplement or alternative, the conversion element and the membrane unit are preferably arranged at a certain distance from each other. The conversion element and the reinforcing element and / or the at least one flexible membrane element may also be arranged at a certain distance from each other.

[0044] As a supplement or alternative, the conversion element and the diaphragm unit are preferably coupled to each other by means of a coupling element. The conversion element can also be coupled to the reinforcing element by means of the coupling element. As a supplement or alternative, the conversion element and the diaphragm unit, in particular the reinforcing element, can also be coupled to each other completely and / or only via the coupling element. In this way, the deflection is transmitted between the conversion element and the diaphragm unit only via the coupling element.

[0045] Preferably, the conversion element is arranged on the carrier element by means of at least one foot element, in particular by means of at least two foot elements, so that the conversion element is spaced a certain distance from the carrier element.

[0046] Preferably, the elastic modulus of the diaphragm material and / or the filling material is less than 10 MPa, in particular less than 1 MPa. Preferably, the elastic modulus of the diaphragm material is greater than the elastic modulus of the filling material.

[0047] Also preferably, the diaphragm material and the filling material are different from each other. As an alternative, the diaphragm material and the filling material can also be the same. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] Further advantages of the present invention are described in detail below.

[0049] Figure 1 is a schematic cross-sectional view of a conversion unit including a conversion element and a membrane unit.

[0050] Figure 2 is a schematic cross-sectional view of a conversion unit comprising a conversion element and a membrane unit located on an auxiliary element.

[0051] Figure 3 is a schematic cross-sectional view of a conversion unit including a conversion element and a membrane unit.

[0052] Figure 4 is a schematic cross-sectional view of a conversion unit including a conversion element and a membrane unit. DETAILED DESCRIPTION

[0053] Figure 1 Schematic cross-sectional view of the conversion unit 1. With the aid of the conversion unit 1, an electrical signal can be converted into a deflection. Such a conversion is performed, for example, when the conversion unit 1 is used as a loudspeaker or an actuator. As a supplement or alternative, the deflection can also be converted into an electrical signal with the aid of the conversion unit 1. Such a conversion is performed, for example, when the conversion unit 1 is used as a microphone or a sensor. The conversion unit 1 can also be a MEMS conversion unit. With the aid of the deflection, for example, a force or a pressure can be generated.

[0054] The conversion unit 1 comprises a carrier element 2, on which at least one conversion element 3 is arranged. With the aid of the conversion element 3, a deflection can be converted into an electrical signal and / or an electrical signal can be converted into a deflection. Therefore, the conversion element 3 can be used, for example, to generate and / or detect sound waves. In addition, the conversion element 3 can be deflected in the direction of the lifting axis H, thereby generating a deflection and / or an electrical signal. The conversion element 3 can, for example, comprise a substrate and at least one piezoelectric actuator. With the aid of the piezoelectric actuator, an electrical signal can be converted into a deflection and / or a deflection can be converted into an electrical signal. The piezoelectric actuator can be deflected or deflected along the lifting axis H.

[0055] Furthermore, the conversion unit 1 comprises a diaphragm unit 5, which is coupled to the at least one conversion element 3. With the aid of the diaphragm unit 5, for example, vibrations can be transferred from the conversion element 3 to the surrounding air as a displacement, thereby generating sound, and the conversion unit 1 can then be used as a loudspeaker. As a supplement or alternative, with the aid of the diaphragm unit 5, sound waves in the vibration can also be detected as displacements, which are converted into electrical signals by the conversion element 3. In this way, the conversion unit 1 can operate as a microphone. Of course, it is not important whether the sound causes the diaphragm unit 5 to be displaced. The conversion unit 1 can also be, for example, a pressure sensor or a force sensor, so that another medium different from air causes the diaphragm unit 5 to be displaced, wherein this displacement is converted into an electrical signal by the conversion element 3.

[0056] The at least one conversion element 3 is displaceable along the lifting axis H.

[0057] The conversion element 3 may, for example, include at least one piezoelectric element or piezoelectric actuator, which generates a voltage during the deflection process and deflects itself when a voltage is applied. In another embodiment, the conversion element 3 may also include a coil and a magnet. In this way, the conversion unit 1 may also be an electrodynamic audio converter.

[0058] However, the conversion unit 1 can also be another sensor and / or actuator. For example, the conversion unit 1 can be a pressure sensor or a force sensor, which determines the pressure or force from the deflection of the conversion element 3. As an actuator, the conversion unit 1 can also generate a force or a pressure.

[0059] Furthermore, the conversion unit 1 of this embodiment has a baffle arrangement 6 which, in particular together with the carrier element 2 , defines a receiving cavity 7 . Here, the conversion element 3 and the reinforcing element 4 are arranged in the receiving cavity 7 .

[0060] In addition, in this embodiment, a coupling element 9 is provided between the conversion element 3 and the reinforcing element 4. By means of the coupling element 9, the diaphragm unit 5 and / or the reinforcing element 4 are also spaced a certain distance from the conversion element 3, thereby preventing the reinforcing element from hitting the conversion element 3 during the deflection process of the diaphragm unit 5 and / or the reinforcing element 4. The coupling element 9 may also be integrally formed with the conversion element 3, the diaphragm unit 5 and / or the reinforcing element 4.

[0061] In addition, as shown here, the diaphragm unit 5 can be arranged independently of the conversion element 3 or arranged separately. The diaphragm unit 5 and the conversion element 3 are arranged and / or constructed separately from each other. The diaphragm unit 5 and the conversion element 3 are coupled to each other only by means of a coupling element 9. Based on the independent layout and / or construction scheme of the diaphragm unit 5 and the conversion element 3, the conversion unit 1 has a modular structure. In this way, for example, the conversion unit 1 can be constructed step by step. In the case where a component of the conversion unit 1 is damaged or arranged and / or constructed in an incorrect manner, this component can be removed again or rearranged or constructed.

[0062] The conversion unit 1 furthermore has a top side 10 and a bottom side 11 lying opposite the top side, in particular in the direction of the lifting axis H. The membrane unit 5 is arranged on the top side 10. The carrier element 2 is arranged in the region of the bottom side 11.

[0063] The reinforcing element 4 also has a first end side 15 and a second end side 16, wherein the two end sides 15, 16 are spaced apart from one another in the direction of the lifting axis H. The first end side 15 faces the top side 10. Furthermore, the first end side 15 forms part of the top side 10. The first end side 15 also faces away from the conversion element 3. The second end side 16 faces the conversion element 3. Furthermore, the first end side 15 or the reinforcing element 4 is arranged in such a way that the first end side 15 is flush with the barrier arrangement 6. The first end side 15 is flush with the barrier top side 22.

[0064] The membrane unit 5 also has at least one flexible membrane element 14a, b, which is formed in the method for producing the converter unit 1 by pouring a flowable and curable membrane material onto the reinforcing element 4. The membrane unit 5 thus comprises the reinforcing element 4 and the at least one membrane element 14a, b.

[0065] By forming at least one diaphragm element 14a, b by pouring diaphragm material onto the reinforcing element 4, almost any shape of the diaphragm unit 5 can be achieved without the need for pre-manufacturing the diaphragm elements 14a, b. In addition, tolerances during manufacturing are also compensated by pouring the diaphragm material. In addition, in the case of using the conversion unit as an audio converter, the acoustic properties of the conversion unit 1 can be adjusted almost arbitrarily, for example by increasing or reducing the diaphragm material poured onto the reinforcing element 4 and thereby increasing or reducing the thickness of the diaphragm elements 14a, b. This decision can be made during the manufacturing process. By pouring the at least one diaphragm element 14a, b, the manufacturing method is made more flexible.

[0066] The reinforcing element 4 also has a peripheral side 17, which forms a peripheral surface. In this case, the peripheral side 17 extends completely around the reinforcing element 4. The peripheral side 17 faces the baffle arrangement 6. In this case, the at least one membrane element 14a, b is at least partially cast on the peripheral side 17. In addition, the at least one membrane element 14a, b extends between the reinforcing element 4, in particular the peripheral side 17, and the baffle arrangement 6.

[0067] According to the present embodiment, two membrane elements 14a, b are shown. In the case where the membrane elements 14a, b extend completely around the reinforcing element 4, the membrane unit 5 comprises only one membrane element 14. Thus, the two membrane elements 14a, b shown here can be combined into one piece. In the case where the reinforcing element 4 is completely spaced apart from the barrier arrangement 6, i.e. not in contact with the barrier arrangement 6, the membrane element 14 can extend completely around the reinforcing element 4.

[0068] As shown here, the at least one membrane element 14 a, b can be flush with the first and / or second end side 15 , 16 of the reinforcement element 4 .

[0069] According to the present embodiment, the reinforcing element 4 is arranged centrally between the baffle arrangements 6. The at least one membrane element 14a, b is therefore likewise symmetrical.

[0070] According to the present exemplary embodiment, the conversion unit 1 comprises at least one foot element 12a, b, by means of which the conversion element 3 is arranged on the carrier element 2. By means of the at least one foot element 12a, b, the conversion unit 3 can be spaced apart from the carrier element 2 to prevent the conversion unit 3 from striking the carrier element 2 during deflection. Two foot elements 12a, b are shown here.

[0071] According to the present embodiment, the carrier element 2 further has a through hole 8. In the case where the conversion unit 1 is an audio converter, the acoustic effect of the conversion unit 1 can be adjusted or improved by means of the through hole 8. The through hole 8 shown here is arranged on the bottom side 11. The through hole 8 of the present embodiment is also arranged between two foot elements 12a, b. The through hole 8 can also be formed in the manufacturing method.

[0072] The at least one conversion element 3 also has at least one recess 19a, b. Two recesses 19a, b are shown here, but in other cases a single recess 19 can also be provided, which, as shown here, extends around the coupling element 9. With the aid of the recesses 19a, b, the conversion element 3 can be deflected or deflected better. The area at the at least one recess 19a, b can form a desired bending area or a desired deflection area.

[0073] The conversion unit 1 further comprises a rear space 20, which is arranged on the side of the conversion element 3 facing away from the diaphragm unit 5. The rear space 20 can also partially surround the through hole 8. The acoustic effect can also be adjusted by means of the rear space 20. The rear space 20 can also be formed in the manufacturing method.

[0074] Figure 2 A conversion unit 1 is shown having a section for injecting at least one membrane material.

[0075] Furthermore, for simplicity, features and their functions that have been described in previous figures will not be described again. Furthermore, features that are the same or at least have similar functions are indicated by the same reference numerals compared to previous and / or subsequent figures. Accordingly, for clarity, some features may be described in subsequent figures.

[0076] Here, the conversion unit 1 is shown in a different, opposite orientation. Figure 1 The top side 10 is located at the top, and Figure 2 The mid-bottom side 11 is located at the top.

[0077] According to the present embodiment, the carrier element 2 has an injection opening 18. Here, the injection opening 18 is arranged on the bottom side 11. In the production method of the conversion unit 1, this conversion unit can be rotated and / or oriented so that the bottom side 11 is located at the top, so that the flowable membrane material can be injected into the receiving chamber 7 through the injection opening 18.

[0078] In the manufacturing method, the conversion unit 1 can be attached to an auxiliary element 23. The auxiliary element 23 is a plate or at least plate-shaped. The auxiliary element 23 can be used to delimit or seal the receiving chamber 7 on the top side 10 so that the membrane material can be filled into the receiving chamber 7 and intercepted there. The auxiliary element 23 is shown here without hatching.

[0079] According to this embodiment, the conversion unit 1, in particular the accommodating chamber 7, has at least one diaphragm space 13a, b, which is filled with diaphragm material, and in which at least one diaphragm element 14a, b is formed after curing (see Figure 1 ).

[0080] The membrane spaces 13a, b are delimited here by the barrier arrangement 6, the reinforcing element 4 and the auxiliary element 23. Here, the barrier arrangement 6 is in contact with the auxiliary element 23 by means of the barrier top side 22 and the reinforcing element 4 by means of the first end side 15. Furthermore, the barrier arrangement 6 is located flat on the auxiliary element 23 by means of the barrier top side 22 and the reinforcing element 4 by means of the first end side 15. The contact surface between the auxiliary element 23 and the reinforcing element 4 and / or the barrier arrangement 6 is sealed at least with respect to the membrane material.

[0081] Thus, the membrane material can be filled into the receiving chamber 7 from the direction of the bottom side 11 through the injection opening 18. The membrane space 13a, b is arranged at the lowest point, so that the membrane material flows into the membrane space automatically, that is, under the action of gravity. After curing, the at least one membrane element 14a, b is formed.

[0082] Furthermore, the accommodation chamber 7 can be further divided. In addition to the membrane space, the conversion unit 1 or the accommodation chamber 7 can have at least one filling space 21, into which a filling material can be filled.

[0083] The membrane material and the filling material can be filled in any order. Figure 2 As in the embodiment shown, the membrane material is first filled in because the membrane spaces 13a, b are arranged in the deepest region (relative to the flow direction caused by gravity). If the membrane material is filled in, it can be cured, for example, under heat, to form at least one membrane element 14a, b.

[0084] The filling material can then be filled into the filling space 21 , for example also via the filling opening 18 .

[0085] According to the present embodiment, in addition to the membrane spaces 13 a, b, the accommodating chamber 7 is divided into a plurality of filling spaces 21 a - g.

[0086] The first filled space 21a is arranged here between the second membrane space 13b and the carrier element 2 and adjoins the second membrane space 13b. The second filled space 21b is arranged between the first filled space 21a and the carrier element 2 and adjoins both.

[0087] The third filling space 21c is arranged between the reinforcing element 4 and the conversion element 3. The fourth filling space 21d is also arranged between the reinforcing element 4 and the conversion element 3, and at least partially overlaps with the recess 19b. The fifth filling space 21e is also arranged between the reinforcing element 4 and the conversion element 3, and at least partially overlaps with the recess 19a. The sixth filling space 21f is arranged between the reinforcing element 4 and the conversion element 3.

[0088] The seventh filled space 21 g is arranged between the carrier element 2 and the eighth filled space 21 h , wherein the eighth filled space 21 h adjoins the membrane space 13 a .

[0089] The filling material for the respective filling space 21 is flowable, like a membrane material, and can be cured, for example, by supplying heat.

[0090] After the filling material has been introduced, it is likewise cured, wherein this operation can be carried out gradually.

[0091] When the converter unit is operated as an audio transducer, the acoustic properties of the converter unit 1 can be adjusted, for example, by filling the filling spaces 21a-g with different filling materials. For this purpose, the cured filling material preferably has an elastic modulus of less than 10 MPa or preferably less than 1 MPa.

[0092] By adjusting the acoustic properties of the conversion unit 1 with the aid of the cured filling material, no other elements for adjusting the acoustic properties are required. For example, a grid can be embedded in the accommodating cavity 7 to adjust the acoustic properties, but the manufacturing method of the grid is relatively complicated. If such a grid has the wrong dimensions, it cannot be embedded. The filling material can be filled in a simple step and automatically matches the accommodating cavity 7 or the corresponding filling space 21.

[0093] Figure 3 A converter unit 1 is shown which comprises a membrane unit 5 .

[0094] Furthermore, for simplicity, features and their functions that have been described in previous figures will not be described again. Furthermore, features that are the same or at least have similar functions are indicated by the same reference numerals compared to previous and / or subsequent figures. Accordingly, for clarity, some features may be described in subsequent figures.

[0095] According to the present embodiment, the at least one membrane element 14a, b extends at least partially within the second end side 16. This allows the connection between the reinforcing element 4 and the at least one membrane element 14a, b to be reinforced. In this case, the at least one membrane element 14a, b completely covers the second end side 16.

[0096] Additionally or alternatively, the at least one membrane element 14a, b can also extend at least partially within the first end side 15. When the membrane elements 14a, b extend at least partially within the two end sides 15, 16, the membrane elements 14a, b surround the reinforcing element 4, so that the connection between the reinforcing element 4 and the at least one membrane element 14a, b is strengthened.

[0097] In the manufacturing method, for example, a certain amount of membrane material is filled into the receiving cavity 7 until the second end side 16 is at least partially covered, so that the membrane material can be cured.

[0098] The reinforcing element 4 furthermore has at least one edge region 24a, b which faces the barrier arrangement 6. The reinforcing element 4 can also have only one edge region 24 extending around the reinforcing element 4. The at least one membrane element 14a can also be arranged at least in the edge region 24a, b.

[0099] Figure 4 A converter unit 1 is shown which comprises a membrane unit 5 .

[0100] Furthermore, for simplicity, features and their functions that have been described in previous figures will not be described again. Furthermore, features that are the same or at least have similar functions are indicated by the same reference numerals compared to previous and / or subsequent figures. Accordingly, for clarity, some features may be described in subsequent figures.

[0101] According to the present embodiment, the at least one membrane element 14a, b is also arranged at least partially on the first end side 15. The auxiliary element 23 has at least one recess 25a, b, into which the membrane material can flow, in order to form the membrane element 14a, b at least partially on the first end side 15 after solidification. By means of the shape of the recess 25a, b, it is also possible to fix a region of the at least one membrane element 14a, b on the first end side 15. As shown here, the membrane element 14a, b can be arranged on the first end side 15 at least in the edge region 24a, b of the reinforcing element.

[0102] In an alternative embodiment, the at least one membrane element 14a, b can also be arranged only on the first end side 15. In this case, the membrane material is filled into the receiving space 7 at most to a certain extent until the membrane material is flush with the second end side 16.

[0103] The invention is not limited to the embodiments shown and described. Modifications are possible within the scope of the claims and features may be combined even if they have been disclosed and described in different embodiments.

[0104] Reference numerals list

[0105] 1 Conversion unit

[0106] 2 Carrier elements

[0107] 3 Conversion elements

[0108] 4 Reinforcement components

[0109] 5 Diaphragm unit

[0110] 6. Blockage Configuration

[0111] 7. Accommodation chamber

[0112] 8 Through holes

[0113] 9 Coupling elements

[0114] 10 Top side

[0115] 11 Bottom side

[0116] 12 Foot components

[0117] 13 Diaphragm space

[0118] 14 Diaphragm element

[0119] 15 First end side

[0120] 16 Second end side

[0121] 17 Week Side

[0122] 18 Injection opening

[0123] 19 Notch

[0124] 20 Back Space

[0125] 21 Filling space

[0126] 22 Top side of the partition

[0127] 23 Auxiliary components

[0128] 24 Marginal Area

[0129] 25 grooves

[0130] H Lifting Axis

[0131] Q Horizontal

Claims

1. A method for manufacturing a conversion unit (1), the conversion unit being used to convert an electrical signal into an offset and / or to convert an offset into an electrical signal, wherein at least one converter element (3) is arranged on the carrier element (2), and The conversion element (3) is coupled to a diaphragm unit (5) which can be displaced along a lifting axis (H), It is characterized in that In order to form at least one flexible diaphragm element (14), a flowable and curable diaphragm material is poured onto a reinforcement element (4) of the diaphragm unit (5) which is coupleable to a conversion element (3), so that the diaphragm element (14) together with the reinforcement element (4) at least partially forms the diaphragm unit (5); and The flowable and curable membrane material is poured onto the reinforcement element (4) and / or arranged on the reinforcement element (4) in such a way that the at least one membrane element (14) is formed independently of the conversion element (3).

2. The method according to claim 1, It is characterized in that The conversion unit (1) is a MEMS conversion unit.

3. The method according to claim 1, It is characterized in that The flowable and curable membrane material is poured onto the reinforcing element (4) and / or arranged on the reinforcing element (4) in such a way that the membrane unit (5) is formed independently of the conversion element (3).

4. The method according to claim 1, It is characterized in that The at least one conversion element (3) is coupled to the at least one reinforcement element (4), and the membrane element (14) is subsequently cast.

5. The method according to claim 1, It is characterized in that The at least one conversion element (3) is arranged in a receiving cavity (7) of a baffle arrangement (6), so that the conversion element (3) and / or the reinforcing element (4) are completely surrounded by the baffle arrangement (6).

6. The method according to claim 5, It is characterized in that Casting the at least one membrane element (14) onto the reinforcing element (4) in a transverse direction oriented transversely to the lifting axis (H), and / or Casting at least one membrane element (14) onto the baffle arrangement (6), and / or At least one membrane element (14) is arranged between the reinforcing element (4) and the baffle arrangement (6).

7. The method according to claim 1, It is characterized in that Casting the membrane element (14) onto the peripheral side (17) of the reinforcing element (4), and / or The membrane material is at least partially poured onto the first and / or second end sides (15, 16) of the reinforcing element (4) in the direction of the lifting axis (H), so that the at least one membrane element (14) is at least partially formed on the first and / or second end sides (15, 16) of the reinforcing element (4).

8. The method according to claim 7, It is characterized in that In the edge region (24), the membrane material is at least partially cast in the direction of the lifting axis (H) onto the first and / or second end side (15, 16) of the reinforcing element (4).

9. The method according to claim 5, It is characterized in that The baffle arrangement (6), the conversion element (3) and / or the reinforcing element (4) are arranged relative to one another in such a way that the reinforcing element (4) is spaced a certain distance from the baffle arrangement (6), and / or The at least one diaphragm element (14) is arranged at a distance from the conversion element (3).

10. The method according to claim 5, It is characterized in that The reinforcing element (4) and / or the conversion element (3) are arranged coaxially relative to the baffle arrangement (6).

11. The method according to claim 1, It is characterized in that A coupling element (9) is arranged between the conversion element (3) and the reinforcing element (4).

12. The method according to claim 5, It is characterized in that To form the at least one membrane element (14), the membrane material is injected into a membrane space (13) which adjoins the reinforcing element (4) in a transverse direction oriented transversely to the lifting axis (H), and / or Arranged in the transverse direction between the reinforcing element (4) and the baffle arrangement (6).

13. The method according to claim 5, It is characterized in that At least one filling space (21) located in the accommodating cavity (7) is filled with a flowable and curable filling material.

14. The method according to claim 13, It is characterized in that Before and / or after pouring the membrane material onto the reinforcing element (4), the filling material is injected into the receiving cavity (7).

15. The method according to claim 1, It is characterized in that At least one injection opening (18) is formed in the carrier element (2) in order to inject membrane material and / or filling material through the injection opening (18).

16. The method according to claim 15, It is characterized in that The membrane unit (5) is arranged on the top side (10) of the conversion unit (1), and the injection opening (18) is arranged on the bottom side (11), wherein the membrane material and / or the filling material is injected from the direction of the bottom side (11).

17. The method according to claim 13, It is characterized in that The reinforcing element (4) and / or the baffle arrangement (6) are attached to an auxiliary element (23), and the membrane material and / or the filling material are injected from the direction of the carrier element (2).

18. The method according to claim 13, It is characterized in that During and / or after the injection of the membrane material and / or the filling material, the conversion unit (1) is deflected and / or vibrated, and / or The diaphragm material and / or the filling material is injected under pressure.

19. A conversion unit (1) for converting an offset into an electrical signal and / or converting an electrical signal into an offset, Having a carrier element (2), at least one conversion element (3) arranged on the carrier element (2), and a diaphragm unit (5) coupled to the conversion element (3), It is characterized in that The diaphragm unit (5) comprises a reinforcing element (4) which is coupled to the conversion element (3) and on which at least one flexible diaphragm element (14) is at least partially cast, so that the reinforcing element (4) together with the diaphragm element (14) at least partially forms the diaphragm unit (5), wherein The conversion unit (1) is formed by means of a method according to any one of claims 1 to 18.

20. The conversion unit according to claim 19, It is characterized in that The conversion unit is a MEMS conversion unit.

21. The conversion unit according to claim 19, It is characterized in that The conversion unit is used to generate and / or detect sound waves in the audible wavelength range and / or in the ultrasonic range.

22. The conversion unit according to claim 19, It is characterized in that The conversion element (3) and the diaphragm unit (5) are arranged independently of each other, and / or The conversion element (3) and the diaphragm unit (5) are arranged at a certain distance from each other, and / or The conversion element (3) and the diaphragm unit (5) are coupled to each other only by means of the coupling element (9).

23. The conversion unit according to claim 22, It is characterized in that The conversion element (3) and the reinforcing element (4) and / or the at least one flexible membrane element (14) are arranged at a distance from each other.

24. The conversion unit according to claim 19, It is characterized in that The conversion element (3) is arranged on the carrier element (2) by means of at least one foot element (12).

25. The conversion unit according to claim 24, It is characterized in that The conversion element (3) is arranged on the carrier element (2) by means of at least two foot elements (12).

26. The conversion unit according to claim 19, It is characterized in that The elastic modulus of the diaphragm material and / or the filling material is less than 10 MPa.

27. The conversion unit according to claim 26, It is characterized in that The elastic modulus of the diaphragm material and / or the filling material is less than 1 MPa.

28. The conversion unit according to claim 19, It is characterized in that The diaphragm material and the filling material are different from each other, or The membrane material is the same as the filling material.

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