Takeover and jacket closing structure

Abstract

The present invention relates to a nozzle and a jacket closing structure, which comprises a nozzle, an intermediate pipe, a gas separation ring and an outer cylinder. The intermediate pipe is sleeved on the periphery of the nozzle, and the outer end of the intermediate pipe is connected to the outer peripheral surface of the nozzle. The gas separation ring is arranged on the inner wall of the intermediate pipe, and a buffer gas cavity is formed among the gas separation ring, the intermediate pipe and the nozzle. The outer cylinder is provided with a perforation which is connected to the inner end of the intermediate pipe, and the diameter of the perforation is larger than the outer diameter of the nozzle. The temperature in the buffer gas cavity of the present invention is close to the temperature of the nozzle, so that the temperature gradient at the connection between the outer end of the intermediate pipe and the nozzle is small, and the connection reliability is good. The temperature gradient at the connection between the inner end of the intermediate pipe and the outer cylinder is also small, and the connection reliability is good. The nozzle of the present invention is connected to the outer cylinder through the intermediate pipe, and the connection reliabilities between the outer end of the intermediate pipe and the nozzle and between the inner end of the intermediate pipe and the outer cylinder are both good, realizing the reliable connection between the nozzle and the outer cylinder.

Description

Technical Field

[0001] The present invention relates to a nozzle and a jacket closing structure. Background Art

[0002] On the top cover or bottom cover of a deposition furnace, there are nozzles such as inlet pipes, outlet pipes, and electric heating radiation pipes distributed. The deposition furnace further includes an inner cylinder and an outer thermal insulation cold jacket. The inner cylinder is in contact with high-temperature material gas, so that the temperature of the inner cylinder is very high. Since the nozzles are welded to the inner cylinder and are interconnected, the temperature of the nozzles is also very high. These high-temperature nozzles all need to pass through the outer thermal insulation cold jacket first and then extend to the outside. The outer thermal insulation cold jacket is arranged around the inner cylinder, and the high-temperature nozzles are all directly welded to the outer thermal insulation cold jacket.

[0003] There is a thermal insulation cotton isolation between the outer thermal insulation cold jacket and the nozzles. The outside of the outer thermal insulation cold jacket is in contact with the atmosphere, so that the temperature of the outer thermal insulation cold jacket is close to normal temperature. Since the temperature of the inner cylinder and the nozzles is very high and the temperature of the outer thermal insulation cold jacket is very low, there must be a very high temperature gradient and thermal expansion difference at the welding position between the nozzles and the outer thermal insulation cold jacket, thereby generating a very high local thermal stress, resulting in cracking of the weld between the nozzles and the outer thermal insulation cold jacket. The deformation between the nozzles and the outer thermal insulation cold jacket will be transmitted to the welding position between the nozzles and the inner cylinder, easily causing the connection between the nozzles and the inner cylinder to fail.

[0004] In summary, for the connection between nozzle components with a large temperature gradient, there is an easy problem of connection failure. Summary of the Invention

[0005] The purpose of the present invention is to provide a nozzle and a jacket closing structure to improve the reliability of the connection.

[0006] To achieve this purpose, the present invention adopts the following technical solutions:

[0007] A nozzle and a jacket closing structure, comprising:

[0008] A nozzle extending along a first axis;

[0009] An intermediate pipe extending along the first axis and sleeved around the nozzle, and an outer end of the intermediate pipe is connected to an outer peripheral surface of the nozzle;

[0010] An air isolation ring arranged on an inner wall of the intermediate pipe, and a buffer air cavity is formed among the air isolation ring, the intermediate pipe, and the nozzle;

[0011] An outer cylinder body provided with a perforation for the nozzle to pass through, the perforation is connected to an inner end of the intermediate pipe, and a diameter of the perforation is larger than an outer diameter of the nozzle.

[0012] Preferably, in the above-mentioned nozzle and jacket closing structure, the intermediate pipe includes a closed pipe and a sleeve. The outer end of the closed pipe is connected to the outer peripheral surface of the nozzle, the inner end of the closed pipe is connected to the outer end of the sleeve, and the inner end of the sleeve is connected to the perforation of the outer cylinder.

[0013] Preferably, in the above-mentioned nozzle and jacket closing structure, the surface of the closed pipe varies along a curve in the direction from its outer end to its inner end.

[0014] Preferably, in the above-mentioned nozzle and jacket closing structure, the air separation ring is installed on the inner wall of the sleeve.

[0015] Preferably, in the above-mentioned nozzle and jacket closing structure, the air separation ring is installed in the middle of the sleeve.

[0016] Preferably, in the above-mentioned nozzle and jacket closing structure, the air separation ring is in a ring structure, sleeved outside the nozzle and arranged at an interval from the nozzle.

[0017] Preferably, in the above-mentioned nozzle and jacket closing structure, at least part of the space between the sleeve and the nozzle is filled with heat insulation cotton.

[0018] Preferably, in the above-mentioned nozzle and jacket closing structure, the nozzle and jacket closing structure further includes an inner cylinder. The outer cylinder is located outside the inner cylinder, and the space between the outer cylinder and the inner cylinder is also filled with heat insulation cotton.

[0019] Preferably, in the above-mentioned nozzle and jacket closing structure, the nozzle is connected and communicated with the inner cylinder.

[0020] Preferably, in the above-mentioned nozzle and jacket closing structure, a leak detection port is provided on the intermediate pipe.

[0021] The beneficial effects of the nozzle and jacket closing structure of the present invention are as follows:

[0022] The temperature in the buffer gas cavity is close to the temperature of the nozzle. Since the intermediate pipe participates in enclosing the buffer gas cavity, the temperature gradient at the connection between the outer end of the intermediate pipe and the nozzle is small, and the connection reliability is good.

[0023] In addition, as a buffer between the nozzle and the outer cylinder, the intermediate pipe allows the temperature of the nozzle to reach the outer cylinder after a certain buffer, so that the temperature gradient between the inner end of the intermediate pipe and the outer cylinder is also relatively small, improving the connection reliability between the inner end of the intermediate pipe and the perforation of the outer cylinder.

[0024] Compared with the direct connection between the existing nozzle and the outer cylinder, the nozzle of the present invention is connected to the outer cylinder through an intermediate pipe, and the connection reliability between the outer end of the intermediate pipe and the nozzle and between the inner end of the intermediate pipe and the outer cylinder is relatively good, realizing the reliable connection between the nozzle and the outer cylinder. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 FIG. 1 is the nozzle and jacket closing structure of the first embodiment of the present invention;

[0026] Figure 2 FIG. 2 is the nozzle and jacket closing structure of the second embodiment of the present invention.

[0027] The names and reference numerals of the components in the figures are as follows:

[0028] Inner cylinder 1, thermal insulation cotton 2, outer cylinder 3, gas barrier ring 4, sleeve 5, closed pipe 6, leak detection port 7, nozzle 8, buffer gas chamber 9. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0029] The present invention will be further described in detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only for explaining the present invention, rather than limiting the present invention. In addition, it should be noted that only the parts related to the present invention rather than all the structures are shown in the drawings for the sake of convenience of description.

[0030] In the description of the present invention, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0031] In the present invention, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "above the top", and "on the top" of the second feature includes that the first feature is directly above and obliquely above the second feature, or merely means that the first feature is at a higher horizontal height than the second feature. The first feature being "below", "below the bottom", and "under the bottom" of the second feature includes that the first feature is directly below and obliquely below the second feature, or merely means that the first feature is at a lower horizontal height than the second feature.

[0032] In the description of this embodiment, the terms "upper", "lower", "right", etc., which represent orientation or positional relationships, are based on the orientation or positional relationships shown in the drawings. They are only for the convenience of description and simplifying operations, rather than indicating or implying that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0033] Embodiment 1

[0034] As Figure 1 shown, this embodiment discloses a nozzle and a jacket closing structure. The nozzle and the jacket closing structure include a nozzle 8, an intermediate pipe, an air separation ring 4, and an outer cylinder 3. The outer cylinder 3 of this embodiment is an outer jacket.

[0035] The nozzle 8 of this embodiment can be arranged perpendicular to the extension direction of the outer cylinder 3, or can be arranged at other angles with respect to the extension direction of the outer cylinder 3. The nozzle 8 extends along a first axis. The intermediate pipe extends along the first axis and is sleeved around the periphery of the nozzle 8. The outer end of the intermediate pipe is welded to the outer peripheral surface of the nozzle 8. The air separation ring 4 is arranged on the inner wall of the intermediate pipe, and a buffer air chamber 9 is formed among the air separation ring 4, the intermediate pipe, and the nozzle 8. The outer cylinder 3 is provided with a perforation through which the nozzle 8 passes. The perforation is connected to the inner end of the intermediate pipe, and the diameter of the perforation is larger than the outer diameter of the nozzle 8. The inner wall of the perforation is spaced from the outer peripheral surface of the nozzle 8. The inner end of the intermediate pipe is hermetically connected to the perforation to close the inner cavity of the outer cylinder 3. Specifically, the nozzle 8 can extend from the perforation to the outside along the radial direction of the outer cylinder 3.

[0036] The temperature in the buffer air chamber 9 of this embodiment is close to the temperature of the nozzle 8. Since the intermediate pipe participates in enclosing the buffer air chamber 9, the temperature gradient at the connection between the outer end of the intermediate pipe and the nozzle 8 is small, and the connection reliability is good.

[0037] In addition, as a buffer between the nozzle 8 and the outer cylinder 3, the intermediate pipe allows the temperature of the nozzle 8 to reach the outer cylinder 3 after a certain buffer, so that the temperature gradient between the inner end of the intermediate pipe and the perforation of the outer cylinder 3 is also relatively small, improving the connection reliability between the inner end of the intermediate pipe and the perforation of the outer cylinder 3.

[0038] Compared with the direct connection between the existing nozzle and the outer cylinder, the nozzle 8 in this embodiment is connected to the outer cylinder 3 through the intermediate pipe, and the connection reliabilities between the outer end of the intermediate pipe and the nozzle 8 and between the inner end of the intermediate pipe and the outer cylinder 3 are both relatively good, realizing the reliable connection between the nozzle 8 and the outer cylinder 3.

[0039] In this embodiment, the nozzle and the jacket closing structure further include an inner cylinder 1. The nozzle 8 is welded and connected to the inner cylinder 1 and is in communication therewith. The outer cylinder 3 is located around the inner cylinder 1. The inner cylinder 1 is in contact with the high-temperature material gas, so that the temperature of the inner cylinder 1 is very high. The temperature of the nozzle 8 will also be very high. The outer cylinder 3 of this embodiment is in contact with the external air, and heat-insulating cotton 2 is filled between the outer cylinder 3 and the inner cylinder 1, so that the temperature of the outer cylinder 3 is relatively low. In this case, the temperature in the buffer gas chamber 9 is relatively high, so that the temperature at the outer end of the intermediate pipe is also relatively high, and the temperature gradient at the connection between the intermediate pipe and the nozzle 8 is small, and the welding connection reliability is good.

[0040] The temperature of the intermediate pipe surrounding the buffer gas chamber 9 is lower than the temperature of the nozzle 8 and higher than the temperature of the outer cylinder 3. When the high temperature on the intermediate pipe reaches the outer cylinder 3 through the inner section of the intermediate pipe, the temperature has dropped a lot, so that the temperature gradient between the inner end of the intermediate pipe and the outer cylinder 3 is small, and the welding reliability is good.

[0041] In this embodiment, an intermediate pipe is added between the nozzle 8 and the outer cylinder 3, so that the intermediate pipe participates in the deformation coordination among the nozzle 8, the outer cylinder 3, and the inner cylinder 1, thereby reducing the local stress at the welding joint between the nozzle 8 and the inner cylinder 1, and making the overall connection reliability of this embodiment relatively high.

[0042] In this embodiment, the intermediate pipe includes a closed pipe 6 and a sleeve 5. The sleeve 5 can be a straight pipe, and the diameter of the sleeve 5 is close to or the same as the diameter of the perforation. The outer end of the closed pipe 6 is connected to the outer peripheral surface of the nozzle 8, the inner end of the closed pipe 6 is connected to the outer end of the sleeve 5, and the inner end of the sleeve 5 is connected to the perforation of the outer cylinder 3. The intermediate pipe of this embodiment is composed of two parts, the closed pipe 6 and the sleeve 5, and is convenient to install. In other alternative embodiments, the intermediate pipe can also be an integrally formed part.

[0043] In this embodiment, in the direction from the outer end to the inner end of the closed pipe 6 itself, the surface changes along a curve, which is beneficial to improving the deformation ability, thereby reducing the local stress at the connection positions between the closed pipe 6 and the nozzle 8 and the sleeve 5, so as to further improve the connection reliability.

[0044] In this embodiment, the air isolation ring 4 is installed on the inner wall of the sleeve 5. The air isolation ring 4 in this embodiment can be welded to the inner wall of the sleeve 5 or detachably connected to the sleeve 5 through connecting parts such as bolts. Further, in this embodiment, the air isolation ring 4 is installed in the middle of the sleeve 5. The air isolation ring 4 divides the sleeve 5 into an outer section and an inner section. The outer section participates in enclosing the buffer gas cavity 9, and the inner section forms a cooling transition section. In this embodiment, heat insulation cotton 2 is filled between the inner section of the sleeve 5 and the connecting pipe 8 to ensure that the temperature of the inner section of the sleeve 5 is relatively low, reduce the temperature gradient between the inner end of the sleeve 5 and the perforation of the outer cylinder body 3, and further improve the connection reliability between the inner end of the sleeve 5 and the perforation of the outer cylinder body 3. In addition, the heat insulation cotton 2 also participates in enclosing the buffer gas cavity 9, making the sealing of the buffer gas cavity 9 higher, and further reducing the temperature gradient between the outer end of the closed pipe 6 and the connecting pipe 8 to improve the welding reliability.

[0045] In this embodiment, the air isolation ring 4 is of an annular structure. The air isolation ring 4 is sleeved outside the connecting pipe 8 and is arranged at an interval from the connecting pipe 8.

[0046] In this embodiment, a leak detection port 7 is provided on the intermediate pipe. The jacket cavity of the outer cylinder body 3 can be pressurized through the leak detection port 7 to detect the tightness of the inner cylinder 1 and the outer cylinder 3.

[0047] The inner cylinder 1 in this embodiment can be a closed cavity surrounded by a cylinder, a spherical shell, an elliptical head, a dished head, a flat cover, etc. The outer cylinder body 3 is a closed cavity surrounding the inner cylinder 1.

[0048] In other alternative embodiments, the closed pipe 6 can be arc-shaped, flat-plate-shaped, conical, or a combination of any curved surface and plane that can enclose the inner cavity of the outer cylinder body 3.

[0049] In other alternative embodiments, the temperature of the connecting pipe 8 and the inner cylinder 1 can also be lower than the temperature of the outer cylinder body 3. At this time, the layout of the above structure can still ensure good connection reliability between the connecting pipe and the components of the jacket closed structure.

[0050] In other alternative embodiments, the above structure is also applicable to vacuum heat insulation or cold insulation jackets. At this time, heat conduction or cold conduction cotton needs to be filled in the buffer gas cavity 9, and other spaces can be filled with heat insulation or cold insulation cotton to enhance the heat insulation or cold insulation effect. Or no materials are filled in other spaces. Here, other spaces refer to all spaces inside the air isolation ring 4, that is, the spaces where the above heat insulation cotton 2 is distributed.

[0051] Embodiment Two

[0052] As Figure 2 shown, this embodiment is basically the same as Embodiment One, except that: the outer cylinder body 3 is the main body of the equipment.

[0053] Accordingly, the nozzle 8 of this embodiment is at a high temperature, and the main body of the equipment is at a low temperature. The inner cylinder 1 is not provided, and the nozzle 8 is used as a feed pipe extending into the main body of the equipment. No thermal insulation cotton 2 is provided inside the air separation ring 4.

[0054] There is a small temperature gradient between the nozzle 8 of this embodiment and the main body of the equipment, thus having good connection reliability.

[0055] In other alternative embodiments, the nozzle 8 can also be at a low temperature, and the main body of the equipment is at a high temperature.

[0056] Obviously, the above embodiments of the present invention are merely examples for clearly explaining the present invention, rather than limiting the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the claims of the present invention.

Claims

1. A takeover and jacket closing structure, characterized in that Comprising: A nozzle (8), extending along a first axis; An intermediate pipe, extending along the first axis and sleeved around the periphery of the nozzle (8), an outer end of the intermediate pipe being connected to an outer peripheral surface of the nozzle (8), the intermediate pipe including a closed pipe (6) and a sleeve (5), an outer end of the closed pipe (6) being connected to the outer peripheral surface of the nozzle (8), and an inner end of the closed pipe (6) being connected to an outer end of the sleeve (5); An air isolation ring (4), disposed on an inner wall of the intermediate pipe, and a buffer air chamber (9) is formed between the air isolation ring (4), the intermediate pipe, and the nozzle (8), the air isolation ring (4) being installed on an inner wall of the sleeve (5), the air isolation ring (4) dividing the sleeve (5) into an outer section and an inner section, the outer section participating in enclosing the buffer air chamber (9), and the inner section forming a cooling transition section; An outer cylinder (3), provided with a perforation for the nozzle (8) to pass through, the perforation being connected to an inner end of the intermediate pipe, and a diameter of the perforation being greater than an outer diameter of the nozzle (8), an inner end of the sleeve (5) being connected to the perforation of the outer cylinder (3).

2. The adapter and jacket closing structure according to claim 1, characterized in that In a direction from its own outer end to its own inner end, a surface of the closed pipe (6) changes along a curve.

3. The adapter and jacket closing structure according to claim 1, characterized in that, The air isolation ring (4) is installed in the middle of the sleeve (5).

4. The takeover and jacket closing structure according to claim 1, characterized in that, The air isolation ring (4) is of an annular structure, sleeved around the nozzle (8) and spaced from the nozzle (8).

5. The nozzle and jacket closing structure according to claim 1, characterized in that, At least a part of the space between the sleeve (5) and the nozzle (8) is filled with heat-insulating cotton (2).

6. The nozzle and jacket closing structure according to claim 5, characterized in that, The nozzle and jacket closing structure further includes an inner cylinder (1), the outer cylinder (3) being located around the inner cylinder (1), and the space between the outer cylinder (3) and the inner cylinder (1) is also filled with heat-insulating cotton (2).

7. The adapter and jacket closing structure according to claim 6, characterized in that, The nozzle (8) is connected and communicated with the inner cylinder (1).

8. The nozzle and jacket closing structure according to any one of claims 1-7, characterized in that, A leak detection port (7) is provided on the intermediate pipe.

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