Automatic code reading device

Abstract

The present invention provides an automatic code reading device comprising a base plate, a detection assembly, a gripping assembly, a first sliding assembly, and a second sliding assembly. The first sliding assembly and the second sliding assembly are both mounted on the base plate. The detection assembly includes a code reader, and the gripping assembly includes a vacuum suction cup. The code reader is mounted on the first sliding assembly, and the vacuum suction cup is mounted on the second sliding assembly, with the code reader and the vacuum suction cup being positioned in correspondence with each other. The automatic code reading device of the present invention solves the problem of existing semiconductor silicon wafer code reading without manual reading, which is prone to code reading errors and low work efficiency.

Description

Technical Field

[0001] The invention belongs to the field of visual recognition of conductive silicon wafers, and in particular relates to an automatic code reading device. Background Art

[0002] In the field of visual identification of semiconductor silicon wafers, manual reading of markings can easily lead to visual fatigue, errors, and low work efficiency. Automated equipment can shorten reading time and improve the degree of automation. Therefore, accurate and rapid reading of markings is of great practical value in industrial applications in the semiconductor field. Summary of the Invention

[0003] In view of this, the present invention proposes an automatic code reading device to solve the problem that the existing semiconductor silicon wafer code reading is not manually read, which easily leads to code reading errors and low work efficiency.

[0004] To achieve the above object, the technical solution created by the present invention is implemented as follows:

[0005] An automatic code reading device comprises a base plate, a detection component, a gripping component, a first sliding component, and a second sliding component. The first sliding component and the second sliding component are both mounted on the base plate. The detection component includes a code reader. The gripping component includes a vacuum suction cup. The code reader is mounted on the first sliding component. The vacuum suction cup is mounted on the second sliding component. The code reader and the vacuum suction cup are arranged correspondingly.

[0006] Furthermore, the first sliding assembly includes a linear module, a first mounting bracket, and a mounting cross bar. The linear module is mounted on the base plate, the mounting bracket is mounted on the slider of the linear module, the mounting cross bar is fixed to the upper end of the mounting bracket, and the code reader is mounted on the end of the mounting cross bar away from the mounting bracket.

[0007] Furthermore, the mounting frame includes a first sliding plate and a fixed plate. The first sliding plate is fixedly connected to the slider of the linear module. One end of the first sliding plate is fixedly connected to the bottom of the fixed plate. The top of the fixed plate is fixedly connected to the end of the mounting cross bar away from the code reader.

[0008] Furthermore, the second sliding assembly includes a second mounting frame, a second guide rail, a second driving gear, a second driven gear, a second synchronous belt, a second motor, a vertical plate, and a connecting rod. The second mounting frame includes a back plate and a support leg. There are multiple support legs, and the bottoms of the multiple support legs are fixedly connected to the bottom plate, and the tops are connected to the back plate. The second driving gear and the second driven gear are both mounted on the bottom of the back plate through mounting members. The second driving gear and the second driven gear are arranged at both ends of the back plate. The second synchronous belt is connected between the second driving gear and the second driven gear. The second guide rail is fixed to the upper part of the back plate. The second guide rail is arranged parallel to the second synchronous belt. A slider corresponding to the second guide rail is fixed to the bottom of the sliding plate. The sliding plate is slidably connected to the slide rail through the slider. One end of the sliding plate is fixedly connected to the vertical plate, and the other end is fixedly connected to the connecting rod. A strip through hole is opened on the back plate. The strip through hole is arranged parallel to the second slide rail. The end of the connecting rod away from the sliding plate passes through the strip through hole and is fixedly connected to the second synchronous belt. The top of the vertical plate is connected to the vacuum suction cup.

[0009] Furthermore, the second sliding assembly also includes a lifting unit, which includes a rack, a gear, a slide rod, a slide groove, a third motor, and a third mounting bracket. The gear is installed on the vertical plate through a rotating shaft, the rotating shaft passes through the vertical plate, and is fixedly connected to the output shaft of the third motor. The third motor is fixed on the side of the vertical plate away from the gear. The rack is vertically installed on the third mounting bracket, the rack is meshed with the gear, the slide rod is arranged parallel to the rack, the slide rod is installed on the third mounting bracket, the slide groove is fixed on the vertical plate, the slide rod is slidably connected to the slide groove, and the vacuum suction cup is installed on the third mounting bracket.

[0010] Furthermore, the third mounting frame includes a hanging plate and a limiting plate. The hanging plate is fixedly connected to the rack and the slide rod. The top of the hanging plate is connected to one end of the limiting plate. The other end of the limiting plate is fixedly connected to the vacuum suction cup through a mounting piece.

[0011] Furthermore, it also includes a film basket base and a lifting component. The lifting component is installed on the bottom plate, and the film basket base is installed on the lifting component. The film basket base is arranged below the vacuum suction cup.

[0012] Furthermore, the lifting assembly includes a drive unit, a screw rod, a top plate, a first guide rail, a guide rail mounting plate, and a slider mounting plate. The bottoms of the screw rod and the slider mounting plate are fixedly connected to the base plate, and the tops of the screw rod and the slider mounting plate are fixedly connected to the top plate. The screw rod is rotatably connected to the base plate and the top plate respectively through bearings. The lower part of the screw rod is connected to the drive unit. The first guide rail is vertically fixed on the guide rail mounting plate. A slider corresponding to the first guide rail is fixed on the slider mounting plate. The slider mounting plate is slidably connected to the first guide rail through the slider, and the side of the slider mounting plate away from the first guide rail is fixedly connected to the sheet basket base.

[0013] Furthermore, the drive unit includes a first motor, a first driving wheel, a first driven wheel, and a first synchronous belt. The first driving wheel is installed on the base plate through a mounting shaft. The top of the first driving wheel is connected to the output shaft of the first motor. The first driven wheel is fixed on the screw rod. The first synchronous belt is connected between the first driving wheel and the first driven wheel.

[0014] Furthermore, it also includes a box shell and a hole plate. The box shell is installed on the base. The detection component, the grabbing component, the first sliding component, and the second sliding component are all arranged in the box shell. The hole plate is arranged on the top of the box shell. The hole plate is arranged on the side of the vacuum suction cup away from the code reader. The hole plate is spaced apart from the first sliding component and the second sliding component respectively.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] (1) The invention proposes an automatic code reading device that can accurately read the labeling number of silicon wafers, effectively avoiding the risk of human misreading and increased granularity, improving code reading efficiency, reducing human labor intensity, and lowering labor costs.

[0017] (2) The first sliding assembly can drive the code reader to move horizontally, thereby reading the marking numbers at the left, middle, and right positions of the silicon wafer.

[0018] (3) The second sliding assembly can not only drive the vacuum suction cup to move horizontally but also to move up and down, thereby enabling the silicon wafer to be grasped flexibly. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings, which constitute part of the present invention, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0020] Figure 1 A schematic diagram of an automatic code reading device according to an embodiment of the present invention;

[0021] Figure 2 A partial schematic diagram of an automatic code reading device according to an embodiment of the present invention;

[0022] Figure 3 A schematic diagram of a second sliding assembly according to an embodiment of the present invention;

[0023] Figure 4 A schematic diagram of a second sliding assembly according to an embodiment of the present invention;

[0024] Figure 5 This is a schematic diagram of the installation of an automatic code reading device described in an embodiment of the present invention.

[0025] Description of reference numerals:

[0026] 1. Mounting bracket; 2. Film basket; 3. Ion rod; 4. Air filter; 5. Box shell; 6. Connecting plate; 7. Mounting block; 8. Orifice plate; 9. Code reader; 10. Mounting crossbar; 11. Vacuum suction cup; 111. Hanging plate; 112. Limit plate; 12. Fixing plate; 13. Film basket base; 14. First driving wheel; 15. Bottom plate; 16. First motor; 17. Screw; 18. Guide rail mounting plate; 19. Top plate; 20. Rolling bearing; 21. Slider mounting plate; 22. First Guide rail; 24. Linear module; 25. Module mounting plate; 26. Pillar; 27. Slide base plate; 28. First driven wheel; 29. First synchronous belt; 30. Support leg; 31. Back plate; 32. Second guide rail; 33. Second motor; 34. Gear; 35. Rack; 36. Vertical plate; 37. Slide rail; 38. Third motor; 39. Second driven gear; 40. Pressure block; 41. Second synchronous belt; 42. Second driving gear; 43. Slide groove; 44. Sliding plate; 45. Strip through hole. DETAILED DESCRIPTION

[0027] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0028] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, features defined as "first", "second" and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0029] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art can understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0030] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0031] like Figure 1 、 Figure 2 As shown, an automatic code reading device includes a base plate 15, a detection component, a gripping component, a first sliding component, and a second sliding component. The first sliding component and the second sliding component are both mounted on the base plate 15. The detection component includes a code reader 9, and the gripping component includes a vacuum suction cup 11. The code reader 9 is mounted on the first sliding component, and the vacuum suction cup 11 is mounted on the second sliding component. The code reader 9 and the vacuum suction cup 11 are arranged correspondingly.

[0032] like Figure 1 、 Figure 2 As shown, the first sliding assembly includes a linear module 24, a first mounting bracket, and a mounting cross bar 10. The linear module 24 is mounted on the base plate 15, the mounting bracket is mounted on the slider of the linear module 24, the mounting cross bar 10 is fixed to the upper end of the mounting bracket, and the code reader 9 is mounted on the end of the mounting cross bar 10 away from the mounting bracket.

[0033] like Figure 2 As shown, the mounting frame includes a first sliding plate 44 and a fixed plate 12. The first sliding plate 44 is fixedly connected to the slider of the linear module 24. One end of the first sliding plate 44 is fixedly connected to the bottom of the fixed plate 12, and the top of the fixed plate 12 is fixedly connected to the end of the mounting crossbar 10 away from the code reader 9. The first sliding assembly can drive the code reader 9 to move horizontally, thereby reading the markings on the left, center, and right sides of the silicon wafer.

[0034] like Figure 3 、 Figure 4As shown, the second sliding assembly includes a second mounting frame, a second guide rail 32, a second driving gear 42, a second driven gear 39, a second synchronous belt 41, a second motor 33, a vertical plate 36, and a connecting rod. The second mounting frame includes a back plate 31 and a leg 30. There are multiple legs 30, and the bottoms of the multiple legs 30 are fixedly connected to the bottom plate 15, and the tops are connected to the back plate 31. The second driving gear 42 and the second driven gear 39 are both installed at the bottom of the back plate 31 through mounting parts. The second driving gear 42 and the second driven gear 39 are arranged at both ends of the back plate 31. The second synchronous belt 41 is connected to the second driving gear 42 and Between the second driven gear 39, the second guide rail 32 is fixed on the upper part of the back plate 31, the second guide rail 32 is arranged parallel to the second synchronous belt 41, and a slider corresponding to the second guide rail 32 is fixed to the bottom of the sliding plate 44. The sliding plate 44 is slidingly connected to the slide rail 37 through the slider. One end of the sliding plate 44 is fixedly connected to the vertical plate 36, and the other end is fixedly connected to the connecting rod. A strip through hole 45 is opened on the back plate 31, and the strip through hole 45 is arranged parallel to the second slide rail 37. The end of the connecting rod away from the sliding plate 44 passes through the strip through hole 45 and is fixedly connected to the second synchronous belt 41. The top of the vertical plate 36 is connected to the vacuum suction cup 11.

[0035] like Figure 3 、 Figure 4 As shown, the second sliding assembly also includes a lifting unit, which includes a rack 35, a gear 34, a slide rod, a chute 43, a third motor 38, and a third mounting frame. The gear 34 is mounted on the vertical plate 36 via a rotating shaft. The rotating shaft runs through the vertical plate 36 and is fixedly connected to the output shaft of the third motor 38. The third motor 38 is fixed to the side of the vertical plate 36 away from the gear 34. The rack 35 is vertically mounted on the third mounting frame and meshes with the gear 34. The slide rod is arranged parallel to the rack 35 and is mounted on the third mounting frame. The chute 43 is fixed to the vertical plate 36 and is slidably connected to the slide rod. The vacuum suction cup 11 is mounted on the third mounting frame. The second sliding assembly can drive the vacuum suction cup 11 to move laterally and to move it up and down, thereby enabling flexible grasping of silicon wafers.

[0036] like Figure 1 、 Figure 2 As shown, the third mounting frame includes a hanging plate 111 and a limiting plate 112. The hanging plate 111 is fixedly connected to the rack 35 and the sliding rod. The top of the hanging plate 111 is connected to one end of the limiting plate 112. The other end of the limiting plate 112 is fixedly connected to the vacuum suction cup 11 through a mounting member.

[0037] like Figure 1 、 Figure 2As shown, it also includes a film basket 2 base and a lifting assembly. The lifting assembly is installed on the bottom plate 15, and the film basket 2 base is installed on the lifting assembly. The film basket 2 base is arranged below the vacuum suction cup 11. A positioning block is fixed on the film basket 2 base. The positioning block is compatible with 4-inch, 5-inch, 6-inch, and 8-inch film baskets 2 and plays a positioning role for the film basket 2.

[0038] like Figure 1 、 Figure 2 As shown, the lifting assembly includes a drive unit, a screw rod 17, a top plate 19, a first guide rail 22, a guide rail mounting plate 18, and a slider mounting plate 21. The bottoms of the screw rod 17 and the slider mounting plate 21 are fixedly connected to the bottom plate 15, and the tops of the screw rod 17 and the slider mounting plate 21 are fixedly connected to the top plate 19. The screw rod 17 is rotatably connected to the bottom plate 15 and the top plate 19 respectively through bearings. The lower part of the screw rod 17 is connected to the drive unit. The first guide rail 22 is vertically fixed on the guide rail mounting plate 18. A slider corresponding to the first guide rail 22 is fixed on the slider mounting plate 21. The slider mounting plate 21 is slidably connected to the first guide rail 22 through the slider, and the side of the slider mounting plate 21 away from the first guide rail 22 is fixedly connected to the base of the sheet basket 2.

[0039] like Figure 2 As shown, the drive unit includes a first motor 16, a first driving wheel 14, a first driven wheel 28, and a first synchronous belt 29. The first driving wheel 14 is installed on the base plate 15 through a mounting shaft. The top of the first driving wheel 14 is connected to the output shaft of the first motor 16. The first driven wheel 28 is fixed on the screw rod 17. The first synchronous belt 29 is connected between the first driving wheel 14 and the first driven wheel 28.

[0040] like Figure 1 As shown, the system also includes a housing 5 and an orifice plate 8. The housing 5 is mounted on a base. The detection assembly, gripper assembly, first sliding assembly, and second sliding assembly are all located within the housing 5. The orifice plate 8 is located at the top of the housing 5, on the side of the vacuum suction cup 11 away from the code reader 9. The orifice plate 8 is spaced apart from the first sliding assembly and the second sliding assembly. An air filter 4 is mounted on a mounting bracket, blowing clean air downward to push dust below the orifice plate 8, creating a steady flow. The ion rod 3 eliminates static electricity and prevents metal ions from adsorbing on the silicon wafer surface, ensuring compliance with Class I cleanroom requirements.

[0041] The steps for automatic code reading are as follows:

[0042] 1. Place the automatic code reading device on the mounting bracket 1 and manually place the film basket 2 on the base of the film basket 2.

[0043] 2. Press the start button, the vacuum suction cup 11 and the code reader 9 will move at the same time, and the second sliding assembly will drive the vacuum suction cup 11 to take the wafer to the bottom of the code reader 9. Driven by the first sliding assembly, the code reader 9 will start to move and read the silicon wafer label number.

[0044] 3. After reading is completed, the vacuum suction cup 11 puts the silicon wafer back, and the wafer basket 2 starts to descend one wafer slot position under the drive of the lifting assembly. The vacuum suction cup 11 takes the second wafer and starts reading. After reading, it is put back and the above operations are repeated in sequence.

[0045] 4. After reading the entire basket, the film basket 2 rises to its initial position and is manually removed.

[0046] The present invention accurately reads the silicon wafer labeling number based on the Wafer ID Reader automatic code reading device, effectively avoiding the risk of human misreading and increased granularity, improving code reading efficiency, reducing human labor intensity, and lowering labor costs.

[0047] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. An automatic code reading device, characterized in that: A base plate (15), a detection component, a gripping component, a first sliding component, and a second sliding component, wherein the first sliding component and the second sliding component are both mounted on the base plate (15), the detection component includes a code reader (9), the gripping component includes a vacuum suction cup (11), the code reader (9) is mounted on the first sliding component, the vacuum suction cup (11) is mounted on the second sliding component, and the code reader (9) and the vacuum suction cup (11) are arranged correspondingly; The first sliding assembly includes a linear module (24), a first mounting frame, and a mounting crossbar (10), wherein the linear module (24) is mounted on a base plate (15), the mounting frame is mounted on a slider of the linear module (24), the mounting crossbar (10) is fixed to an upper end of the mounting frame, and the code reader (9) is mounted on an end of the mounting crossbar (10) away from the mounting frame; The mounting frame includes a first sliding plate (44) and a fixed plate (12), wherein the first sliding plate (44) is fixedly connected to a slider of the linear module (24), one end of the first sliding plate (44) is fixedly connected to the bottom of the fixed plate (12), and the top of the fixed plate (12) is fixedly connected to an end of the mounting crossbar (10) away from the code reader (9); The second sliding assembly includes a second mounting frame, a second guide rail (32), a second driving gear (42), a second driven gear (39), a second synchronous belt (41), a second motor (33), a vertical plate (36), and a connecting rod. The second mounting frame includes a back plate (31), a leg (30), and a plurality of legs (30). The bottoms of the plurality of legs (30) are fixedly connected to the bottom plate (15), and the tops are connected to the back plate (31). The second driving gear (42) and the second driven gear (39) are both installed at the bottom of the back plate (31) through a mounting member. The second driving gear (42) and the second driven gear (39) are arranged at both ends of the back plate (31). The second synchronous belt (41) is connected to the second driving gear (42) and the second driven gear (39). Between the two driven gears (39), the second guide rail (32) is fixed on the upper part of the back plate (31), the second guide rail (32) is arranged in parallel with the second synchronous belt (41), a slider corresponding to the second guide rail (32) is fixed on the bottom of the sliding plate (44), the sliding plate (44) is slidably connected to the slide rail (37) through the slider, one end of the sliding plate (44) is fixedly connected to the vertical plate (36), and the other end is fixedly connected to the connecting rod, a strip through hole (45) is opened on the back plate (31), the strip through hole (45) is arranged in parallel with the second slide rail (37), one end of the connecting rod away from the sliding plate (44) passes through the strip through hole (45) and is fixedly connected to the second synchronous belt (41), and the top of the vertical plate (36) is connected to the vacuum suction cup (11); The second sliding assembly also includes a lifting unit, which includes a rack (35), a gear (34), a slide bar, a slide groove (43), a third motor (38), and a third mounting frame. The gear (34) is mounted on the vertical plate (36) through a rotating shaft, the rotating shaft passes through the vertical plate (36), and is fixedly connected to the output shaft of the third motor (38). The third motor (38) is fixed on a side of the vertical plate (36) away from the gear (34). The rack (35) is vertically mounted on the third mounting frame. The rack (35) is meshed with the gear (34). The slide bar is arranged parallel to the rack (35). The slide bar is mounted on the third mounting frame. The slide groove (43) is fixed on the vertical plate (36). The slide bar is slidably connected to the slide groove (43). The vacuum suction cup (11) is mounted on the third mounting frame.

2. The automatic code reading device according to claim 1, characterized in that: The third mounting frame comprises a hanging plate (111) and a limiting plate (112); the hanging plate (111) is fixedly connected to the rack (35) and the slide bar; the top of the hanging plate (111) is fixedly connected to one end of the limiting plate (112); and the other end of the limiting plate (112) is fixedly connected to the vacuum suction cup (11) via a mounting member.

3. The automatic code reading device according to claim 1, characterized in that: It also includes a film basket (2) base and a lifting assembly, wherein the lifting assembly is mounted on the bottom plate (15), the film basket (2) base is mounted on the lifting assembly, and the film basket (2) base is arranged below the vacuum suction cup (11).

4. The automatic code reading device according to claim 3, characterized in that: The lifting assembly comprises a driving unit, a screw rod (17), a top plate (19), a first guide rail (22), a guide rail mounting plate (18), and a slider mounting plate (21). The bottoms of the screw rod (17) and the slider mounting plate (21) are fixedly connected to the bottom plate (15), and the tops of the screw rod (17) and the slider mounting plate (21) are fixedly connected to the top plate (19). The screw rod (17) is rotatably connected to the bottom plate (15) and the top plate (19) respectively through bearings. The lower part of the screw rod (17) is connected to the driving unit. The first guide rail (22) is vertically fixed on the guide rail mounting plate (18). A slider corresponding to the first guide rail (22) is fixed on the slider mounting plate (21). The slider mounting plate (21) is slidably connected to the first guide rail (22) through the slider. The side of the slider mounting plate (21) away from the first guide rail (22) is fixedly connected to the base of the sheet basket (2).

5. The automatic code reading device according to claim 4, characterized in that: The driving unit comprises a first motor (16), a first driving wheel (14), a first driven wheel (28), and a first synchronous belt (29). The first driving wheel (14) is mounted on a base plate (15) via a mounting shaft. The top of the first driving wheel (14) is connected to the output shaft of the first motor (16). The first driven wheel (28) is fixed on a screw rod (17). The first synchronous belt (29) is connected between the first driving wheel (14) and the first driven wheel (28).

6. The automatic code reading device according to claim 1, characterized in that: The invention also includes a box shell (5) and a hole plate (8). The box shell (5) is installed on the base. The detection component, the grasping component, the first sliding component, and the second sliding component are all arranged in the box shell (5). The hole plate (8) is arranged on the top of the box shell (5). The hole plate (8) is arranged on the side of the vacuum suction cup (11) away from the code reader (9). The hole plate (8) is spaced apart from the first sliding component and the second sliding component.

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