A semiconductor film diffusion source raw material anti-coagulation device

The anti-coagulation device composed of an eccentric wheel and a tension spring solves the problem of coagulation and solidification of semiconductor film diffusion source raw materials during storage, thereby improving the stability of the slurry and the film quality.

CN113023127BActive Publication Date: 2025-09-30SHANDONG XINYUAN MICROELECTRONICS CO LTD
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Patent Information

Application Number
CN202110230382.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-03-02
Publication Date
2025-09-30
Estimated Expiration
2041-03-02

AI Technical Summary

Technical Problem

In the prior art, semiconductor film diffusion source raw materials are easily condensed and solidified during storage, and continuous stirring causes the temperature to rise, affecting the film quality.

Method used

A semiconductor film diffusion source raw material anti-coagulation device is used. By utilizing the combination of an eccentric wheel and a tension spring, the eccentric wheel is driven by a rotary motor to rotate. The material barrel rotates on the bearing seat and swings under the action of centrifugal force to prevent the slurry from coagulating.

Benefits of technology

Effectively prevent slurry from coagulating, maintain temperature stability and improve film quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention discloses a semiconductor film diffusion source raw material anti-coagulation device, which belongs to the technical field of production molding equipment, including a frame and an eccentric wheel. A symmetrical baffle is provided on the upper part of the eccentric wheel, and an upper support rod and a lower support rod are provided on the upper and lower sides of the baffle, respectively. Tension springs and limit blocks are provided at the ends of the upper and lower support rods, respectively. A sleeve assembly is sleeved on the middle position of the tension springs and limit blocks on the upper and lower support rods, and a bearing seat is provided on the side of the sleeve assembly. The two ends of the barrel are respectively placed on the bearing seats. The output end of the rotating motor is connected to the rotating shaft, and the rotating shaft drives the eccentric wheel to rotate. On the one hand, the two ends of the barrel are respectively placed on the bearing seats and can rotate in the bearing seats. On the other hand, when the eccentric wheel rotates, under the action of centrifugal force, the sleeve assembly connected to the two ends of the barrel slides on the upper and lower support rods, squeezing or stretching the tension spring, forming a swing, and preventing the barrel slurry from coagulating through the swing and rotation.
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Description

Technical Field

[0001] The invention belongs to the technical field of production molding equipment, and in particular is a semiconductor film diffusion source raw material anti-coagulation device. Background Art

[0002] Semiconductor materials are the primary building blocks of microelectronic and optoelectronic devices. Large-scale integrated circuits, in particular, are becoming increasingly integrated and smaller. Semiconductor thin films are the fundamental building blocks of these devices. Semiconductor film diffusion sources are also commonly known as paper sources within the industry.

[0003] However, the production of such film-like diffusion sources is relatively difficult. Before film formation, the mixed materials are in an emulsion, and the prepared materials tend to solidify during storage. Prior art methods for preventing solidification often use stirring. For example, Chinese patent application number CN201811588885.6 discloses a storage device structure for preventing solidification in cement crack-resistant mortar. However, continuous stirring generates a large amount of heat, which increases the temperature of the slurry, affecting its properties and making it difficult to form a semiconductor film-like diffusion source. Summary of the Invention

[0004] In order to overcome the defect in the prior art that the mixed material is easily coagulated and solidified during storage, the present invention provides a semiconductor film diffusion source raw material anti-coagulation device to prevent the slurry from coagulating.

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions: a semiconductor film diffusion source raw material anti-coagulation device, comprising a frame and an eccentric wheel, a rotating motor is provided on the frame, the output end of the rotating motor is connected to the rotating shaft, the eccentric wheel is fixedly arranged on the rotating shaft, two symmetrical baffles are provided on the upper part of the eccentric wheel, upper support rods and lower support rods are respectively provided on the top and bottom of the opposite sides of the two symmetrical baffles, tension springs and limit blocks are respectively provided at the ends of the upper support rod and the lower support rod, a sleeve assembly is mounted on the outer side of a section of the upper support rod and the lower support rod where the tension spring and the limit block are located, bearing seats are respectively fixedly connected between the upper support rod and the lower support rod on the two symmetrical baffles, and the two bearing seats are rotatably connected to the material barrel.

[0006] As a further improvement of the present invention, an upper groove with the rotating shaft as the axis is provided at the bottom of the eccentric wheel, and a lower groove with the rotating shaft as the axis is provided on the upper part of the frame, and balls are installed in the corresponding upper and lower grooves.

[0007] As a further improvement of the present invention, the upper groove opens downward, and the lower groove opens upward. Both the upper groove and the lower groove are arc-shaped grooves and their positions correspond to each other.

[0008] As a further improvement of the present invention, an automatic rotating bearing is provided on the bearing seat, and both ends of the barrel are respectively placed on corresponding automatic rotating bearings.

[0009] As a further improvement of the present invention, the bottom of the barrel is connected to a fixing ring fixedly arranged on the upper part of the eccentric wheel through an elastic rope.

[0010] As a further improvement of the present invention, the fixing ring is fixed to the center of the eccentric wheel, and the upper part of the elastic rope is connected to the center of the bottom of the barrel.

[0011] As a further improvement of the present invention, a limiting shoulder is provided at the end of the sleeve assembly.

[0012] Compared with the prior art, the present invention has the following beneficial effects: in the present invention, the output end of the rotating motor is connected to the rotating shaft, and the rotating shaft drives the eccentric wheel to rotate. On the one hand, the two ends of the barrel are respectively placed on the bearing seats and can rotate in the bearing seats. On the other hand, the eccentric wheel rotates, and under the action of centrifugal force, the sleeve assembly connected to the two ends of the barrel slides on the upper support rod and the lower support rod, squeezing or stretching the tension spring to form a swing, and the swing and rotation prevent the slurry in the barrel from coagulating. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The present invention will be further described below with reference to the accompanying drawings and specific embodiments:

[0014] Figure 1 This is a schematic structural diagram of a semiconductor film diffusion source raw material anti-coagulation device according to the present invention;

[0015] In the figure: 1 frame, 2 eccentric wheel, 3 rotating shaft, 4 rotating motor, 5 upper groove, 6 lower groove, 7 ball bearing, 8 baffle, 9 upper support rod, 10 sleeve assembly, 11 tension spring, 12 limit block, 13 lower support rod, 14 bearing seat, 15 material barrel, 16 elastic rope, 17 fixing ring, 18 limit shoulder. DETAILED DESCRIPTION

[0016] In order to make the technical solutions and beneficial effects of the present invention more clearly understood, the present invention will be further described in detail below with reference to specific embodiments.

[0017] The present invention discloses a semiconductor film diffusion source raw material anti-coagulation device, referring to Figure 1, which includes a frame 1 and an eccentric wheel 2. A rotating motor 4 is provided on the frame 1. The output end of the rotating motor 4 is connected to the rotating shaft 3. The eccentric wheel 2 is fixedly arranged on the rotating shaft 3. Two symmetrical baffles 8 are provided on the upper part of the eccentric wheel 2. Upper support rods 9 and lower support rods 13 are provided on the top and bottom of the opposite sides of the two symmetrical baffles 8 respectively. Tension springs 11 and limit blocks 12 are provided at the ends of the upper support rods 9 and the lower support rods 13 respectively. A sleeve assembly 10 is mounted on the outer side of a section of the upper support rods 9 and the lower support rods 13 located on the tension springs 11 and the limit blocks 12. Bearing seats 14 are respectively provided between the upper support rods 9 and the lower support rods 13 on the two symmetrical baffles 8. Automatic rotating bearings are provided on the bearing seats 14, and both ends of the barrel 15 are placed on corresponding automatic rotating bearings respectively.

[0018] In the present invention, the output end of the rotating motor 4 is connected to the rotating shaft 3, and the rotating shaft 3 drives the eccentric wheel 2 to rotate. The two ends of the barrel 15 are respectively placed on the bearing seat 14. Under the action of the automatic rotating bearing, the barrel 15 can rotate on the bearing seat 14, and the eccentric wheel 2 rotates. Under the action of centrifugal force, the sleeve assembly 10 connected at both ends of the barrel 15 slides on the upper support rod 9 and the lower support rod 13, squeezing or stretching the tension spring 11 to form a swing, and the swing and rotation are used to prevent the slurry in the barrel 15 from coagulating.

[0019] An upper groove 5 with the rotating shaft 3 as the axis is provided at the bottom of the eccentric wheel 2, and a lower groove 6 with the rotating shaft 3 as the axis is provided on the upper part of the frame 1. The upper groove 5 opens downward and the lower groove 6 opens upward. The upper groove 5 and the lower groove 6 are both arc-shaped grooves and their positions correspond to each other. Balls 7 are installed in the corresponding upper grooves 5 and lower grooves 6. A lower groove 6 with the rotating shaft 3 as the axis is provided on the upper part of the frame 1. The balls 7 are placed in the upper grooves 5 and the lower grooves 6, which makes the eccentric wheel more stable and prevents the eccentric wheel from being offset due to the weight of the barrel. Without affecting the rotation of the eccentric wheel 2, the stability of the eccentric wheel 2 can also be improved.

[0020] The bottom of the bucket 15 is connected to a fixed ring 17 fixed to the top of the eccentric wheel 2 via an elastic cord 16. The fixed ring 17 is fixed to the center of the eccentric wheel 2, and the upper part of the elastic cord 16 is connected to the center of the bottom of the bucket 15. When the bucket 15 rotates, the fixed ring 17 stretches the elastic cord 16, so that the elastic cord 16 increases the tension between the bucket 15 and the eccentric wheel 2 during the rotation of the bucket 15, allowing the bucket 15 to return to its original position quickly and more stably.

[0021] A limiting shoulder 18 is provided at the end of the sleeve assembly 10 , and the limiting shoulder 18 is connected to the tension spring 11 to prevent the tension spring 11 from shifting positions, so that the device swings more smoothly.

[0022] It should be understood that the specific embodiments described herein are only used to understand the present invention and are not used to limit the present invention. All other embodiments obtained by ordinary technicians in this field without making any creative work are within the scope of protection of the present invention.

Claims

1. A semiconductor film diffusion source raw material anti-coagulation device, characterized by: The invention comprises a frame (1) and an eccentric wheel (2), wherein a rotating motor (4) is provided on the frame (1), an output end of the rotating motor (4) is connected to a rotating shaft (3), the eccentric wheel (2) is fixedly arranged on the rotating shaft (3), two symmetrical baffles (8) are provided on the upper part of the eccentric wheel (2), an upper support rod (9) and a lower support rod (13) are provided on the top and bottom of the opposite sides of the two symmetrical baffles (8), respectively, a tension spring (11) and a limit block (12) are provided at the ends of the upper support rod (9) and the lower support rod (13), a sleeve assembly (10) is sleeved on a section of the upper support rod (9) and the lower support rod (13) located outside the tension spring (11) and the limit block (12), a bearing seat (14) is fixedly connected between the upper support rod (9) and the lower support rod (13) on the two symmetrical baffles (8), and the two bearing seats (14) are rotatably connected to a material barrel (15); An upper groove (5) with the rotating shaft (3) as the axis is provided at the bottom of the eccentric wheel (2), and a lower groove (6) with the rotating shaft (3) as the axis is provided at the upper part of the frame (1), and balls (7) are installed in the upper groove (5) and the lower groove (6) corresponding to each other; The upper groove (5) opens downward, and the lower groove (6) opens upward. Both the upper groove (5) and the lower groove (6) are arc-shaped grooves and their positions correspond to each other. An automatic rotating bearing is provided on the bearing seat (14), and both ends of the barrel (15) are respectively placed on corresponding automatic rotating bearings; The bottom of the barrel (15) is connected to a fixing ring (17) fixedly arranged on the upper part of the eccentric wheel (2) via an elastic rope (16); The fixing ring (17) is fixed to the center of the eccentric wheel (2), and the upper part of the elastic rope (16) is connected to the bottom center of the barrel (15).

2. The semiconductor film diffusion source raw material anti-coagulation device according to claim 1, characterized in that: A limiting shoulder (18) is provided at the end of the sleeve assembly (10).

Citation Information

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