A hydrostatic gas radial bearing with elastic corrugated foil support

Abstract

The present invention discloses a hydrostatic gas radial bearing with elastic wave foil support. The hydrostatic gas radial bearing comprises a bearing base, an elastic wave foil, a bearing inner ring, an inner ring positioning pin and a fixing gasket. A fixing groove is provided on the bearing base, and the elastic wave foil is welded in the fixing groove through a fixing gasket; a certain number of throttling holes are evenly arranged on the bearing base and the bearing inner ring in the circumferential direction, and positioning grooves are provided on the sides; the inner ring positioning pin is located in the positioning groove, which can prevent the bearing inner ring from rotating in the circumferential direction. The present invention adds an elastic wave foil and a bearing inner ring, and the elastic wave foil can play an elastic supporting role, allowing the shaft to have a larger vibration amplitude, thereby improving the stability and impact resistance of the bearing; the bearing inner ring is easy to replace, reducing the cost; at the same time, the multiple rows of evenly distributed throttling holes provided on the bearing base and the bearing inner ring can improve the uniformity of the gas supply; the double-layer throttling hole structure can reduce the drilling depth and reduce the difficulty of processing.

Description

Technical Field

[0001] The invention belongs to the field of gas bearings and high-speed rotating machinery, and in particular relates to a static pressure gas radial bearing with elastic corrugated foil support. Background Art

[0002] Hydrostatic gas radial bearings have the advantages of low vibration, high rotation accuracy, low friction loss, long life and no pollution to the environment. They are widely used in the aerospace industry, semiconductor industry, ultra-precision processing equipment and precision measuring equipment. Bearing stiffness is the main performance indicator of hydrostatic gas radial bearings and the key to ensuring bearing accuracy. The load-bearing capacity and stiffness of hydrostatic gas bearings are related to the throttling form, gas supply pressure and support structure. The throttling methods of hydrostatic gas bearings are mainly small hole throttling, slit throttling, surface throttling and porous throttling. At present, there are different degrees of research and application on the above throttling methods in China. Among them, small hole gas supply hydrostatic gas bearings generally use throttling holes with smaller apertures and smaller bearing gaps, so that the gas has a stronger throttling effect in the process of passing through the throttling holes and bearing gaps, which is conducive to the improvement of bearing stiffness. The widely used small hole throttling hydrostatic gas radial bearings have high stiffness, but their load-bearing capacity is low and their stability is poor. At present, the bearing capacity of small-hole throttle static pressure gas radial bearings is usually improved by high gas supply pressure. However, small-hole throttle static pressure gas radial bearings are prone to air hammer vibration at high gas supply pressure, which leads to bearing failure, which greatly restricts the improvement of bearing bearing capacity. At the same time, when the main shaft rotates at high speed, if it encounters external impact and disturbance, when the rotor loses stability, sintering and adhesion will occur between the main shaft and the bearing, causing serious wear and even damage to the main shaft and bearings, seriously affecting the safety and stable operation of the equipment.

[0003] Based on some existing research difficulties, we invented a hydrostatic gas radial bearing with elastic wave foil support. Compared with the traditional hydrostatic gas radial bearing, the present invention adds elastic wave foil and bearing inner ring. The elastic wave foil can play an elastic support role, allowing the shaft to have a larger vibration amplitude, improving the stability and impact resistance of the bearing; the bearing inner ring is easy to replace, reducing costs; at the same time, the multiple rows of evenly distributed throttling holes opened on the bearing base and the bearing inner ring can improve the uniformity of air supply; the double-layer throttling hole structure can reduce the drilling depth, reduce the difficulty of processing, and make the bearing more adaptable. Summary of the invention

[0004] The present application provides a static pressure gas radial bearing with elastic wave foil support, which improves the structural form and throttling form of the bearing support, adds elastic wave foil and bearing inner ring, and the elastic wave foil can play an elastic support role, allowing the shaft to have a larger vibration amplitude, improving the stability and impact resistance of the bearing; the bearing inner ring is easy to replace, reducing the cost; at the same time, the multiple rows of evenly distributed throttling holes opened on the bearing base and the bearing inner ring can improve the uniformity of air supply; the double-layer throttling hole structure can reduce the drilling depth, reduce the difficulty of processing, and make the bearing more adaptable. The technical solution of the present invention is as follows.

[0005] The invention discloses a static pressure gas radial bearing with elastic wave foil support, comprising a bearing base, an elastic wave foil, a bearing inner ring, an inner ring positioning pin and a fixing gasket. A fixing groove is provided on the bearing base, and the elastic wave foil is welded in the fixing groove through a fixing gasket; a certain number of throttling holes are evenly arranged on the bearing base and the bearing inner ring along the circumferential direction, and a positioning groove is provided on the side; the inner ring positioning pin is located in the positioning groove, and the throttling holes of the bearing base and the bearing inner ring can be positioned, and at the same time, the bearing inner ring is prevented from rotating along the circumferential direction; the diameter of the bearing inner ring is slightly larger than the diameter of the main shaft, thereby forming a bearing gap; the manufactured bearing base, elastic wave foil and bearing inner ring are stacked in sequence.

[0006] The bearing base is evenly provided with several throttling holes of the same structure along the circumferential direction, the diameter of the large hole is 2~4mm, the diameter of the small hole is 1~2mm, the number of holes is 4~14, and there are 1~4 rows. The throttling holes of the bearing base can be arranged at equal distances or at variable distances in the axial direction.

[0007] The elastic wave foil is a metal wave foil type, and the wave foil is evenly provided with several through holes of the same structure along the circumferential direction, with a hole diameter of 1~2mm, a number of 4~14, and 1~4 rows. The foil through holes can be arranged at equal distances or at variable distances in the axial direction, and the foil through holes are aligned with the throttle holes of the bearing base.

[0008] The width of the elastic wave foil is smaller than the width of the bearing base, the difference is 2-4 mm, the height of the pressed foil is 0.2-0.7 mm, and the number of wave arches is 8-50.

[0009] The bearing inner ring is evenly provided with several throttling holes of the same structure along the circumferential direction, the diameter of the large hole is 1~2mm, the diameter of the small hole is 0.2~1mm, the number of holes is 4~14, and there are 1~4 rows. The throttling holes in the bearing inner ring can be arranged at equal distances or at variable distances in the axial direction, and the throttling holes in the bearing inner ring are aligned with the throttling holes in the bearing base.

[0010] The width of the bearing inner ring is slightly smaller than the width of the bearing base, the difference does not exceed 1mm, and the inner diameter of the bearing inner ring is slightly larger than the spindle diameter, the difference is 0.02mm~0.2mm. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 An exploded view of a static pressure gas radial bearing with elastic corrugated foil support provided by the present invention.

[0012] Figure 2 A schematic diagram of the assembly of a static pressure gas radial bearing with elastic corrugated foil support provided by the present invention.

[0013] Figure 3 A schematic diagram of the installation and positioning of a bearing base, an elastic wave foil and a bearing inner ring used in a static pressure gas radial bearing with an elastic wave foil support provided by the present invention.

[0014] Figure 4 A schematic diagram of the distribution of throttling holes and the distribution of locating grooves of the bearing base used in the static pressure gas radial bearing with elastic corrugated foil support provided by the present invention.

[0015] Figure 5 A schematic diagram of the distribution of throttling holes and the distribution of locating grooves on the inner ring of the bearing used in the static pressure gas radial bearing with elastic corrugated foil support provided by the present invention.

[0016] A schematic diagram of a hydrostatic gas radial bearing with elastic corrugated foil support according to an embodiment of the present application, with description of the accompanying drawings:

[0017] 1. Bearing base; 11. Orifice of bearing base; 12. Fixing groove; 13. Side of bearing base; 14. Positioning groove of bearing base; 15. Other side of bearing base; 2. Elastic wave foil; 21. Side of elastic wave foil; 3. Bearing inner ring; 31. Orifice of bearing inner ring; 32. Positioning groove of bearing inner ring; 33. Side of bearing inner ring; 4. Positioning pin of inner ring; 5. Fixing gasket. DETAILED DESCRIPTION

[0018] In order to enable those skilled in the art to better understand the objectives, technical solutions and advantages of the present invention, the technical solutions in the embodiments of the present invention will be described below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0019] like Figure 1As shown, the present invention provides a static pressure gas radial bearing with elastic wave foil support. The static pressure gas radial bearing comprises a bearing base 1, an elastic wave foil 2, a bearing inner ring 3, an inner ring positioning pin 4 and a fixed gasket 5. Among them, the elastic wave foil 2 is first punched with a certain number of small holes on a metal sheet, the hole diameter is 1~2mm, the number is 4~14, and there are 1~4 rows. The foil through holes can be arranged equidistantly or at variable intervals in the axial direction, and then pressed on a mold to form a wave foil type elastic support foil. The wave foil through holes are aligned with the throttle hole of the bearing base, and then welded in the fixing groove 12 of the bearing base 1 through the fixed gasket 5.

[0020] like Figure 2 As shown, the elastic wave foil 2 is welded in the fixing groove 12 of the bearing base 1 through the fixing gasket 5, and the foil side 21 coincides with the bearing base side 13. The inner ring positioning pin 4 is located at the bearing base positioning groove 14 and the bearing inner ring positioning groove 32, which can position the throttle hole of the bearing base and the bearing inner ring, and prevent the bearing inner ring from rotating in the circumferential direction; the manufactured bearing base 1, elastic wave foil 2 and bearing inner ring 3 are assembled as shown in the figure. Figure 2 The arrangements shown are superimposed one on the other.

[0021] like Figure 3 As shown, the width of the elastic wave foil 2 is smaller than the width of the bearing base 1, the difference is 2~4mm, the height of the pressed foil is 0.2~0.7mm, and the number of wave arches is 8~50; the width of the bearing inner ring 3 is slightly smaller than the width of the bearing base 1, the difference does not exceed 1mm; the inner diameter of the bearing inner ring 3 is slightly larger than the spindle diameter, the difference is 0.02mm~0.2mm. The elastic wave foil 2 contacts the inner ring of the bearing base 1 and the outer ring of the bearing inner ring 3 respectively, playing the role of elastic support and vibration buffering.

[0022] like Figure 4 As shown, the bearing base 1 is evenly provided with a number of throttle holes 11 of the same structure along the circumferential direction, the large hole diameter is 2-4 mm, the small hole diameter is 1-2 mm, the number of holes is 4-14, and there are 1-4 rows, and the bearing base throttle holes 11 can be arranged at equal distances or at variable distances in the axial direction. A bearing base positioning groove 14 is opened on the side 15 of the bearing base 1.

[0023] like Figure 5 As shown, the bearing inner ring 3 is evenly provided with several throttle holes 31 of the same structure along the circumferential direction, the large hole diameter is 1~2mm, the small hole diameter is 0.2~1mm, the number of holes is 4~14, and there are 1~4 rows. The bearing inner ring throttle holes 31 can be arranged at equal distances or at variable distances in the axial direction, and the bearing inner ring throttle holes are aligned with the bearing base throttle holes. The side surface 33 of the bearing inner ring 3 is provided with a bearing inner ring positioning groove 32.

Claims

1. A hydrostatic gas radial bearing with elastic corrugated foil support, characterized in that: The bearing comprises a bearing base, an elastic wave foil, a bearing inner ring, an inner ring positioning pin and a fixing gasket; a fixing groove is provided on the bearing base, and the elastic wave foil is welded in the fixing groove through the fixing gasket; a certain number of throttling holes are evenly arranged on the bearing base and the bearing inner ring along the circumferential direction, and positioning grooves are provided on the sides; the inner ring positioning pin is located in the positioning groove, and the throttling holes of the bearing base and the bearing inner ring can be positioned, and at the same time, the bearing inner ring is prevented from rotating along the circumferential direction; the diameter of the bearing inner ring is slightly larger than the diameter of the main shaft, so as to form a bearing gap; the manufactured bearing base, elastic wave foil and bearing inner ring are stacked in sequence; The bearing base is evenly provided with a number of throttle holes of the same structure along the circumferential direction, the diameter of the large hole is 2-4 mm, the diameter of the small hole is 1-2 mm, the number of holes is 4-14, and there are 1-4 rows. The throttle holes of the bearing base can be arranged at equal distances in the axial direction or at variable distances. The elastic wave foil is a metal wave foil type, and the wave foil is evenly provided with a number of through holes with the same structure along the circumferential direction, with a hole diameter of 1-2 mm, a number of 4-14, and 1-4 rows. The foil through holes can be arranged at equal distances or at variable distances in the axial direction, and the foil through holes are aligned with the throttle holes of the bearing base; The width of the elastic wave foil is smaller than the width of the bearing base, the difference is 2-4 mm, the height of the pressed foil is 0.2-0.7 mm, and the number of wave arches is 8-50; The bearing inner ring is evenly provided with a number of throttle holes of the same structure along the circumferential direction, the diameter of the large hole is 1-2 mm, the diameter of the small hole is 0.2-1 mm, the number of holes is 4-14, and there are 1-4 rows. The throttle holes of the bearing inner ring can be arranged at equal distances or at variable distances in the axial direction, and the throttle holes of the bearing inner ring are aligned with the throttle holes of the bearing base; The width of the bearing inner ring is slightly smaller than the width of the bearing base, the difference does not exceed 1mm, and the inner diameter of the bearing inner ring is slightly larger than the spindle diameter, the difference is 0.02mm-0.2mm; The elastic wave foil can play an elastic supporting role, so that the shaft has a larger vibration amplitude, and improves the stability and impact resistance of the bearing; The multiple rows of evenly distributed throttling holes opened on the bearing base and the bearing inner ring can improve the uniformity of air supply; the double-layer throttling hole structure can reduce the drilling depth.

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