A fully automatic ultrapure water resistivity adjustment mechanism

Abstract

The invention relates to the technical field of ultrapure water resistivity regulation, and in particular to a fully automatic ultrapure water resistivity regulation mechanism, comprising a shell component, a flow detection component, a device display control component, a servo motor control component and a needle valve regulation control component; the flow detection component is arranged on the top of the shell component, the flow detection component is connected to the needle valve regulation control component, the device display control component is arranged on the front end of the shell component, and the servo motor control component is rotatably connected to the needle valve regulation control component; the problem that the existing ultrapure water resistivity control method is relatively backward, ultrapure water with a fixed resistivity is provided outside a main pipeline, and once one device in the equipment stops working or fails, the resistivity of the ultrapure water in the main pipeline will change, and the change in resistivity will make the products produced by other normally operating equipment unqualified, thereby reducing the yield rate and other problems.

Description

Technical Field

[0001] The invention relates to the technical field of ultrapure water resistivity adjustment, and in particular to a full-automatic ultrapure water resistivity adjustment mechanism. Background Art

[0002] In the semiconductor manufacturing process, a continuous, uninterrupted and stable supply of high-quality ultrapure water is required. The quality indicators of ultrapure water include: resistivity, silica, dissolved oxygen, total organic carbon, temperature and microparticles. Among them, resistivity is an extremely important quality indicator. The stability of resistivity directly affects the yield of semiconductor products.

[0003] The Chinese invention patent with publication number CN107162079A discloses a pre-treatment device for supplying water to an ultrapure water machine, including a pre-treatment system and a water storage system, the pre-treatment system includes a water treatment reactor, the water storage system includes a water storage tank, the water inlet end of the water treatment reactor is connected to the tap water pipe, and a valve switch is also provided on the water supply pipeline between the tap water pipe and the water treatment reactor; the water outlet end of the water treatment reactor is connected to the water inlet end of the water storage tank, the water outlet end of the water storage tank is connected to the water inlet end of the ultrapure water machine, and also includes a control feedback unit, the control feedback unit includes a solenoid valve and a resistivity monitoring device, the resistivity monitoring device and the solenoid valve are both connected in series on the water supply pipeline between the water treatment reactor and the water storage tank, the solenoid valve is located on the water outlet side of the resistivity monitoring device, and the resistivity monitoring device and the solenoid valve are both electrically connected to the online feedback system. The invention has the advantages of being able to improve the water quality of the inlet water of the ultrapure water machine and to improve the service life of the ultrapure water machine.

[0004] The Chinese invention patent with publication number CN106746049A discloses a method for producing ultrapure water and the steps of filtering the raw water after pretreatment for the first time; using a security filter for the first filtration; filtering the raw water after the first filtration by reverse osmosis; subjecting the pure water after the reverse osmosis filtration to electrodeionization; testing the resistivity of the fresh water after the electrodeionization and comparing it with a preset value, and obtaining ultrapure water if the standard is met; and repeating the steps if the standard is not met. The ultrapure water production method provided by the invention has few detection items and high ultrapure water production efficiency, and the present invention also provides a corresponding ultrapure water production system.

[0005] However, the above patent still has the following problems:

[0006] The existing ultrapure water resistivity control method is relatively backward. Ultrapure water with a fixed resistivity is provided outside the main pipeline. Once one of the devices stops or fails, the resistivity of the ultrapure water in the main pipeline will change. The change in resistivity will make the products produced by other normally operating equipment unqualified, thereby reducing the yield rate. Summary of the invention

[0007] In view of the above problems existing in the prior art, the present invention provides a fully automatic ultrapure water resistivity regulating mechanism.

[0008] The basic scheme of the present invention is:

[0009] A fully automatic ultrapure water resistivity adjustment mechanism comprises a housing component, a flow detection component, a device display control component, a servo motor control component and a needle valve adjustment control component; the flow detection component is arranged on the top of the housing component, the flow detection component is connected to the needle valve adjustment control component, the device display control component is arranged on the front end of the housing component, and the servo motor control component is rotationally connected to the needle valve adjustment control component;

[0010] The needle valve regulating control assembly includes a needle valve bracket, a needle valve body, a coupling, two micro slide rails and a connecting conduit. The needle valve body and the servo motor control assembly are connected via a coupling. The needle valve bracket is fixed on the two micro slide rails. The needle valve body is mounted on the needle valve bracket. The two micro slide rails are slidably connected to the housing assembly to achieve forward and backward movement. The needle valve body is connected to the flow detection assembly via a plurality of connecting conduits. Preferably, the needle valve body includes a rotating wheel, a rotating shaft, a locking knob, a first valve body, a sealing collar, a second valve body, a first connecting port, a valve core sleeve, a second connecting port, a valve core and a retaining ring;

[0011] The first valve body and the second valve body are fixedly connected by a sealing ring, and the connection between the first valve body and the second valve body is disposed in the sealing ring. The rotating shaft is placed in the first valve body, one end of the rotating shaft extends out of the first valve body and is connected to the runner, one end of the rotating shaft is fixedly connected to the front end of the valve core, the middle part of the valve core is threadedly connected to the rear end of the first valve body, the rear end of the valve core is a conical needle-shaped structure, and a retaining ring is provided at the rear end of the valve core, and the retaining ring is in abutment with one end of the valve core sleeve.

[0012] Preferably, the locking knob is placed on the side of the first valve body, the bottom of the locking knob passes through the outer wall of the first valve body and rests on the rotating shaft, the first connection port and the second connection port are symmetrically spaced apart on the side wall of the second valve body, the first connection port and the second connection port are both hollow cylindrical structures, the middle parts of the first connection port and the second connection port are connected to the inside of the second valve body, and the first connection port and the second connection port are respectively connected to the flow detection component through connecting conduits.

[0013] Preferably, the servo motor control assembly includes a servo motor controller, a servo motor, a servo shaft and a servo motor bracket, the servo motor bracket is fixedly installed in the housing assembly, the servo motor is installed on the servo motor bracket, the servo motor controller is placed in the housing assembly, the servo motor controller is connected to the servo motor circuit through a wire, a servo shaft is provided at the output end of the servo motor, and the servo shaft is connected to the needle valve body through a coupling.

[0014] Preferably, the flow detection assembly includes a water pump, multiple hoses, multiple three-way pipes and a flow meter. The water pump is fixedly installed inside the shell assembly. One end of the water pump is connected to the needle valve body through a connecting conduit, and the other end of the water pump is connected to the three-way pipe through a hose. Multiple three-way pipes are symmetrically arranged at the top and bottom of the shell assembly, and multiple three-way pipes are connected through the hose. The outlet end of the shell assembly is connected to an external device, and the flow meter is placed in the middle of the hose.

[0015] Preferably, the device display control component includes a disconnect button, a start button, a manual and automatic conversion button, a running light, a stability light and a fault light. The disconnect button, the start button and the manual and automatic conversion button are arranged in a line at intervals at the front end of the shell component, and the running light, the stability light and the fault light are evenly arranged longitudinally at intervals at the front end of the shell component.

[0016] Preferably, the device display control component also includes a V power supply interface, a display and PH interface and a flow meter backup interface, and the V power supply interface, the display and PH interface and the flow meter backup interface are spaced apart and arranged at the top of the shell component.

[0017] Preferably, the shell assembly includes a main shell, multiple fixing plates and a shell cover. The main shell is a rectangular frame structure. The multiple fixing plates are distributed at four corners on both sides of the main shell. The fixing plates are L-shaped plate structures. One side of the fixing plates is fixedly connected to the main shell. The shell cover is clamped on the front end of the main shell.

[0018] Preferably, the servo motor is connected to the needle valve body via a coupling; the number of rotations and the forward and reverse rotations of the servo motor correspond to the feedback of the opening and closing size of the needle valve body.

[0019] Preferably, the fixing plate fixes the shell assembly on the main pipeline, and the flow detection assembly is connected to the inside of the main pipeline through a plurality of hoses.

[0020] The working principle and advantages of the present invention are:

[0021] The present invention includes a housing component, a flow detection component, an equipment display control component, a servo motor control component and a needle valve adjustment control component. The housing component provides support force for the installation position of each component of the mechanism, so that the mechanism can be firmly installed on the main pipeline after obtaining good physical protection during use. The mechanism uses the display in the equipment display control component and the numerical value detected by the PH interface to provide data feedback to the servo motor controller, and controls the servo motor to select the rotation direction and rotation speed. The servo motor is rotationally connected to the needle valve body through a coupling, and the number of rotations and the rotation direction of the servo motor control the needle valve body The opening and closing size of the needle valve body determines the size of the water flow rate. The mechanism determines the resistivity of the ultrapure water in the main pipeline through the flow detection component. The advantage of this mechanism is that even if one of the external equipment fails and stops, causing the resistivity of the ultrapure water in the main pipeline to change, the real-time monitoring of the flow detection component can be fed back to the mechanism body in time, thereby activating the operation of the mechanism body. The structure of this mechanism is simple to operate and easy to install. It can monitor the ultrapure water in the main pipeline in real time, thereby achieving the purpose of real-time control of the resistivity of ultrapure water, improving the yield rate of product production and improving work efficiency.

[0022] The needle valve body is provided with a first valve body and a second valve body as the main outer shell structure of the needle valve body, and is sealed and connected by a sealing ring, so as to facilitate the inspection, installation and disassembly of the needle valve body. After being driven by the coupling, the rotary wheel drives the rotary shaft to rotate, so as to control the closing degree of the valve core and the valve core sleeve, and control the water flow size in the needle valve body. The two micro slide rails realize the sliding connection between the needle valve body and the shell assembly, and ensure that a sufficient travel distance flows out when the rotary shaft rotates. The locking knob controls the abutment degree with the rotary shaft through a threaded connection with the outer wall of the first valve body, so as to realize temporary locking of the rotary shaft, thereby improving the work adjustability and convenience of the mechanism.

[0023] The servo motor bracket fixes the servo motor inside the housing assembly. After receiving the numerical feedback from the display and PH interface, the servo motor controller controls the action of the servo motor, thereby improving the working efficiency of the mechanism and reducing control retention and delay.

[0024] The flow detection component measures the water flow velocity in the main pipeline through a flow meter and provides feedback, so as to determine the resistivity of the ultrapure water in the main pipeline.

[0025] The equipment display control component controls the mechanism through the disconnect button, start button, manual and automatic conversion buttons, and provides feedback on the mechanism's operating status through the running light, stable light and fault light. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1This is a structural schematic diagram of a fully automatic ultrapure water resistivity adjustment mechanism of the present invention;

[0027] Figure 2 A schematic diagram of the internal structure of a fully automatic ultrapure water resistivity adjustment mechanism of the present invention (viewing angle 1);

[0028] Figure 3 A schematic diagram of the internal structure of a fully automatic ultrapure water resistivity adjustment mechanism of the present invention (viewing angle 2);

[0029] Figure 4 A schematic diagram of the internal structure of a fully automatic ultrapure water resistivity adjustment mechanism of the present invention (viewing angle 3);

[0030] Figure 5 It is a schematic cross-sectional structure diagram of a needle valve body in a fully automatic ultrapure water resistivity adjustment mechanism of the present invention;

[0031] The reference numerals involved in the accompanying drawings are:

[0032] Shell assembly 1; main shell 101; fixing plate 102; shell cover plate 103;

[0033] Flow detection component 2; water pump 201; hose 202; tee pipe 203; flow meter 204;

[0034] Equipment display control component 3; disconnect button 301; start button 302; manual and automatic conversion button 303; operation light 304; stability light 305; fault light 306; 24V power supply interface 307; display and PH interface 308; flow meter backup interface 309;

[0035] Servo motor control component 4; servo motor controller 401; servo motor 402; servo shaft 403; servo motor bracket 404;

[0036] Needle valve adjustment control assembly 5; needle valve bracket 501; needle valve body 502; coupling 503; micro slide rail 504; connecting guide tube 505; retaining ring 506; rotating wheel 507; rotating shaft 508; locking knob 509; first valve body 510; sealing ring 511; second valve body 512; first connecting port 513; valve core sleeve 514; second connecting port 515; valve core 516. DETAILED DESCRIPTION

[0037] The following is a further detailed description through specific implementation methods: Example

[0038] A fully automatic ultrapure water resistivity adjustment mechanism comprises a housing component 1, a flow detection component 2, a device display control component 3, a servo motor control component 4 and a needle valve adjustment control component 5; the flow detection component 2 is arranged on the top of the housing component 1, the flow detection component 2 is connected to the needle valve adjustment control component 5, the device display control component 3 is arranged on the front end of the housing component 1, and the servo motor control component 4 is rotationally connected to the needle valve adjustment control component 5;

[0039] The needle valve adjustment control component 5 includes a needle valve bracket 501, a needle valve body 502, a coupling 503, two micro slide rails 504 and a connecting conduit 505. The needle valve body 502 and the servo motor control component 4 are connected through the coupling 503. The needle valve bracket 501 is fixed on the two micro slide rails 504. The needle valve body 502 is installed on the needle valve bracket 501. The two micro slide rails 504 are slidably connected to the shell component 1 to achieve forward and backward movement. The needle valve body 502 is connected to the flow detection component 2 through multiple connecting conduits 505.

[0040] The present invention includes a housing component 1, a flow detection component 2, a device display control component 3, a servo motor control component 4 and a needle valve adjustment control component 5. The housing component 1 provides support force for the installation position of each component of the mechanism, so that the mechanism can be firmly installed on the main pipeline after obtaining good physical protection during use. The mechanism uses the display in the device display control component 3 and the value detected by the PH interface 308 to provide data feedback to the servo motor controller 401, and controls the servo motor 402 to select the rotation direction and rotation speed. The servo motor 402 is rotatably connected to the needle valve body 502 through a coupling 503. The number of rotations of the servo motor 402 and The direction of rotation controls the opening and closing size of the needle valve body 502. The degree of opening and closing of the needle valve body 502 determines the size of the water flow rate. The mechanism determines the resistivity of the ultrapure water in the main pipeline through the flow detection component 2. The advantage of this mechanism is that even if one of the external devices fails and stops, causing the resistivity of the ultrapure water in the main pipeline to change, the real-time monitoring of the flow detection component 2 can be fed back to the mechanism body in time, thereby activating the operation of the mechanism body. The structure of the mechanism is simple to operate and easy to install. It can monitor the ultrapure water in the main pipeline in real time, thereby achieving the purpose of real-time control of the resistivity of ultrapure water, thereby improving the yield rate of product production and improving work efficiency.

[0041] The needle valve body 502 includes a rotating wheel 507, a rotating shaft 508, a locking knob 509, a first valve body 510, a sealing collar 511, a second valve body 512, a first connecting port 513, a valve core sleeve 514, a second connecting port 515, a valve core 516 and a retaining ring 506;

[0042] The first valve body 510 and the second valve body 512 are fixedly connected by a sealing ring 511, and the connection between the first valve body 510 and the second valve body 512 is disposed in the sealing ring 511. The rotating shaft 508 is disposed in the first valve body 510, and one end of the rotating shaft 508 extends out of the first valve body 510 and is connected to the runner 507, and one end of the rotating shaft 508 is fixedly connected to the front end of the valve core 516, and the middle part of the valve core 516 is threadedly connected to the rear end of the first valve body 510. The rear end of the valve core 516 is a conical needle-shaped structure, and a retaining ring 506 is provided at the rear end of the valve core 516, and the retaining ring 506 is in contact with one end of the valve core sleeve 514.

[0043] The locking knob 509 is placed on the side of the first valve body 510, and the bottom of the locking knob 509 passes through the outer wall of the first valve body 510 and rests on the rotating shaft 508. The first connection port 513 and the second connection port 515 are symmetrically spaced on the side wall of the second valve body 512. The first connection port 513 and the second connection port 515 are both hollow cylindrical structures. The middle parts of the first connection port 513 and the second connection port 515 are connected to the inside of the second valve body 512, and the first connection port 513 and the second connection port 515 are connected to the flow detection component 2 through the connecting conduit 505 respectively.

[0044] The needle valve body 502 is provided with a first valve body 510 and a second valve body 512 as the main shell structure of the needle valve body, and is sealed and connected by a sealing ring 511, so as to facilitate the inspection, installation and disassembly of the needle valve body 502. After being driven by the coupling 503 to rotate, the rotary wheel 507 drives the rotating shaft 508 to rotate, so as to control the closing degree of the valve core 516 and the valve core sleeve 514, and control the water flow in the needle valve body 502. The two micro slide rails 504 realize the sliding connection between the needle valve body 502 and the shell assembly 1, so as to ensure that when the rotating shaft 508 rotates, a sufficient travel distance flows out. The locking knob 509 is connected to the outer wall of the first valve body 510 by a thread, controls the degree of abutment with the rotating shaft 508, and realizes temporary locking of the rotating shaft 508, thereby improving the work adjustability and convenience of the mechanism.

[0045] The servo motor control component 4 includes a servo motor controller 401, a servo motor 402, a servo shaft 403 and a servo motor bracket 404. The servo motor bracket 404 is fixedly installed in the housing component 1, the servo motor 402 is installed on the servo motor bracket 404, the servo motor controller 401 is placed in the housing component 1, the servo motor controller 401 is connected to the servo motor 402 circuit through a wire, a servo shaft 403 is provided at the output end of the servo motor 402, and the servo shaft 403 is connected to the needle valve body 502 through a coupling 503.

[0046] The servo motor bracket 404 fixes the servo motor 402 inside the housing assembly 1. After receiving the numerical feedback from the display and PH interface 308, the servo motor controller 401 controls the servo motor 402 to move, thereby improving the working efficiency of the mechanism and reducing control retention and delay.

[0047] The flow detection component 2 includes a water pump 201, multiple hoses 202, multiple three-way pipes 203 and a flow meter 204. The water pump 201 is fixedly installed inside the shell component 1. One end of the water pump 201 is connected to the needle valve body 502 through a connecting conduit 505, and the other end of the water pump 201 is connected to the three-way pipe 203 through the hose 202. The multiple three-way pipes 203 are symmetrically arranged at the top and bottom of the shell component 1. The multiple three-way pipes 203 are connected through the hose 202. The output end of the shell component 1 is connected to an external device, and the flow meter 204 is placed in the middle of the hose 202.

[0048] The flow detection component 2 measures the water flow velocity in the main pipeline through the flow meter 204 and provides feedback, so as to determine the resistivity of the ultrapure water in the main pipeline. Example

[0049] A fully automatic ultrapure water resistivity adjustment mechanism comprises a housing component 1, a flow detection component 2, a device display control component 3, a servo motor control component 4 and a needle valve adjustment control component 5; the flow detection component 2 is arranged on the top of the housing component 1, the flow detection component 2 is connected to the needle valve adjustment control component 5, the device display control component 3 is arranged on the front end of the housing component 1, and the servo motor control component 4 is rotationally connected to the needle valve adjustment control component 5;

[0050] The needle valve adjustment control component 5 includes a needle valve bracket 501, a needle valve body 502, a coupling 503, two micro slide rails 504 and a connecting conduit 505. The needle valve body 502 and the servo motor control component 4 are connected through the coupling 503. The needle valve bracket 501 is fixed on the two micro slide rails 504. The needle valve body 502 is installed on the needle valve bracket 501. The two micro slide rails 504 are slidably connected to the shell component 1 to achieve forward and backward movement. The needle valve body 502 is connected to the flow detection component 2 through multiple connecting conduits 505.

[0051] The present invention includes a housing component 1, a flow detection component 2, a device display control component 3, a servo motor control component 4 and a needle valve adjustment control component 5. The housing component 1 provides support force for the installation position of each component of the mechanism, so that the mechanism can be firmly installed on the main pipeline after obtaining good physical protection during use. The mechanism uses the display in the device display control component 3 and the value detected by the PH interface 308 to provide data feedback to the servo motor controller 401, and controls the servo motor 402 to select the rotation direction and rotation speed. The servo motor 402 is rotatably connected to the needle valve body 502 through a coupling 503. The number of rotations of the servo motor 402 and The direction of rotation controls the opening and closing size of the needle valve body 502. The degree of opening and closing of the needle valve body 502 determines the size of the water flow rate. The mechanism determines the resistivity of the ultrapure water in the main pipeline through the flow detection component 2. The advantage of this mechanism is that even if one of the external devices fails and stops, causing the resistivity of the ultrapure water in the main pipeline to change, the real-time monitoring of the flow detection component 2 can be fed back to the mechanism body in time, thereby activating the operation of the mechanism body. The structure of the mechanism is simple to operate and easy to install. It can monitor the ultrapure water in the main pipeline in real time, thereby achieving the purpose of real-time control of the resistivity of ultrapure water, thereby improving the yield rate of product production and improving work efficiency.

[0052] The needle valve body 502 includes a rotating wheel 507, a rotating shaft 508, a locking knob 509, a first valve body 510, a sealing collar 511, a second valve body 512, a first connecting port 513, a valve core sleeve 514, a second connecting port 515, a valve core 516 and a retaining ring 506;

[0053] The first valve body 510 and the second valve body 512 are fixedly connected by a sealing ring 511, and the connection between the first valve body 510 and the second valve body 512 is disposed in the sealing ring 511. The rotating shaft 508 is disposed in the first valve body 510, and one end of the rotating shaft 508 extends out of the first valve body 510 and is connected to the runner 507, and one end of the rotating shaft 508 is fixedly connected to the front end of the valve core 516, and the middle part of the valve core 516 is threadedly connected to the rear end of the first valve body 510. The rear end of the valve core 516 is a conical needle-shaped structure, and a retaining ring 506 is provided at the rear end of the valve core 516, and the retaining ring 506 is in contact with one end of the valve core sleeve 514.

[0054] The locking knob 509 is placed on the side of the first valve body 510, and the bottom of the locking knob 509 passes through the outer wall of the first valve body 510 and rests on the rotating shaft 508. The first connection port 513 and the second connection port 515 are symmetrically spaced on the side wall of the second valve body 512. The first connection port 513 and the second connection port 515 are both hollow cylindrical structures. The middle parts of the first connection port 513 and the second connection port 515 are connected to the inside of the second valve body 512, and the first connection port 513 and the second connection port 515 are connected to the flow detection component 2 through the connecting conduit 505 respectively.

[0055] The needle valve body 502 is provided with a first valve body 510 and a second valve body 512 as the main shell structure of the needle valve body, and is sealed and connected by a sealing ring 511, so as to facilitate the inspection, installation and disassembly of the needle valve body 502. After being driven by the coupling 503 to rotate, the rotary wheel 507 drives the rotating shaft 508 to rotate, so as to control the closing degree of the valve core 516 and the valve core sleeve 514, and control the water flow in the needle valve body 502. The two micro slide rails 504 realize the sliding connection between the needle valve body 502 and the shell assembly 1, so as to ensure that when the rotating shaft 508 rotates, a sufficient travel distance flows out. The locking knob 509 is connected to the outer wall of the first valve body 510 by a thread, controls the degree of abutment with the rotating shaft 508, and realizes temporary locking of the rotating shaft 508, thereby improving the work adjustability and convenience of the mechanism.

[0056] The servo motor control component 4 includes a servo motor controller 401, a servo motor 402, a servo shaft 403 and a servo motor bracket 404. The servo motor bracket 404 is fixedly installed in the housing component 1, the servo motor 402 is installed on the servo motor bracket 404, the servo motor controller 401 is placed in the housing component 1, the servo motor controller 401 is connected to the servo motor 402 circuit through a wire, a servo shaft 403 is provided at the output end of the servo motor 402, and the servo shaft 403 is connected to the needle valve body 502 through a coupling 503.

[0057] The servo motor bracket 404 fixes the servo motor 402 inside the housing assembly 1. After receiving the numerical feedback from the display and PH interface 308, the servo motor controller 401 controls the servo motor 402 to move, thereby improving the working efficiency of the mechanism and reducing control retention and delay.

[0058] The flow detection component 2 includes a water pump 201, multiple hoses 202, multiple three-way pipes 203 and a flow meter 204. The water pump 201 is fixedly installed inside the shell component 1. One end of the water pump 201 is connected to the needle valve body 502 through a connecting conduit 505, and the other end of the water pump 201 is connected to the three-way pipe 203 through the hose 202. The multiple three-way pipes 203 are symmetrically arranged at the top and bottom of the shell component 1. The multiple three-way pipes 203 are connected through the hose 202. The output end of the shell component 1 is connected to an external device, and the flow meter 204 is placed in the middle of the hose 202.

[0059] The flow detection component 2 measures the water flow velocity in the main pipeline through the flow meter 204 and provides feedback, so as to determine the resistivity of the ultrapure water in the main pipeline.

[0060] The device display control component 3 includes a disconnect button 301, a start button 302, a manual and automatic conversion button 303, a running light 304, a stable light 305 and a fault light 306. The disconnect button 301, the start button 302 and the manual and automatic conversion button 303 are arranged in a straight line at intervals at the front end of the housing component 1, and the running light 304, the stable light 305 and the fault light 306 are arranged at intervals at the front end of the housing component 1. The device display control component 3 also includes a 24V power supply interface 307, a display and PH interface 308 and a flow meter backup interface 309. The 24V power supply interface 307, the display and PH interface 308 and the flow meter backup interface 309 are arranged at intervals at the top of the housing component 1.

[0061] The device display control component 3 controls the mechanism through the disconnect button 301, the start button 302, and the manual and automatic conversion button 303, and provides feedback on the operating status of the mechanism through the operation light 304, the stability light 305 and the fault light 306.

[0062] The housing assembly 1 includes a main housing 101, a plurality of fixing plates 102 and a housing cover plate 103. The main housing 101 is a rectangular frame structure. The plurality of fixing plates 102 are distributed at four corners and are arranged on both sides of the main housing 101. The fixing plates 102 are L-shaped plate structures. One side of the fixing plates 102 is fixedly connected to the main housing 101. The housing cover plate 103 is clamped on the front end of the main housing. The servo motor 402 is connected to the needle valve body 502 through a coupling 503; the number of rotations and the forward and reverse rotations of the servo motor 402 correspond to the opening and closing size feedback of the needle valve body 502. The fixing plates 102 fix the housing assembly 1 on the main pipeline, and the flow detection assembly 2 is connected to the inside of the main pipeline through a plurality of hoses 202.

[0063] The method for using the fully automatic ultrapure water resistivity adjustment mechanism of the present invention is as follows:

[0064] S1. Data detection: This mechanism displays the value detected by the display in the device display control component 3 and the PH interface 308.

[0065] S2. Feedback control: Feedback data to the servo motor controller 401 to control the servo motor 402 to select the rotation direction and rotation speed. The servo motor 402 is rotationally connected to the needle valve body 502 through the coupling 503.

[0066] S3. Resistivity adjustment: The number of revolutions and the direction of rotation of the servo motor 402 control the opening and closing of the needle valve body 502. The opening and closing degree of the needle valve body 502 determines the water flow rate. This mechanism determines the resistivity of the ultrapure water in the main pipeline through the flow detection component 2.

[0067] The above is only an embodiment of the present invention. The common sense such as the known specific structure and characteristics in the scheme is not described in detail here. The ordinary technicians in the relevant field are aware of all the common technical knowledge in the technical field of the invention before the application date or priority date, can obtain all the existing technologies in the field, and have the ability to apply the conventional experimental means before that date. The ordinary technicians in the relevant field can improve and implement the scheme in combination with their own abilities under the enlightenment given by this application. Some typical known structures or known methods should not become obstacles for the ordinary technicians in the relevant field to implement this application. It should be pointed out that for the technicians in this field, without departing from the structure of the present invention, several deformations and improvements can be made, which should also be regarded as the protection scope of the present invention, and these will not affect the effect of the implementation of the present invention and the practicality of the patent.

Claims

1. A fully automatic ultrapure water resistivity adjustment mechanism, characterized in that: The device comprises a housing component (1), a flow detection component (2), a device display control component (3), a servo motor control component (4) and a needle valve adjustment control component (5); the flow detection component (2) is disposed on the top of the housing component (1), the flow detection component (2) is connected to the needle valve adjustment control component (5), the device display control component (3) is disposed at the front end of the housing component (1), and the servo motor control component (4) is rotationally connected to the needle valve adjustment control component (5); The needle valve regulating control component (5) comprises a needle valve support (501), a needle valve body (502), a coupling (503), two micro slide rails (504) and a connecting conduit (505); the needle valve body (502) and the servo motor control component (4) are connected via the coupling (503); the needle valve support (501) is fixed on the two micro slide rails (504); the needle valve body (502) is mounted on the needle valve support (501); the two micro slide rails (504) are slidably connected to the housing component (1) to achieve forward and backward movement; the needle valve body (502) is connected to the flow detection component (2) via a plurality of connecting conduits (505); The needle valve body (502) comprises a rotating wheel (507), a rotating shaft (508), a locking knob (509), a first valve body (510), a sealing collar (511), a second valve body (512), a first connecting port (513), a valve core sleeve (514), a second connecting port (515), a valve core (516) and a retaining ring (506); The first valve body (510) and the second valve body (512) are fixedly connected via a sealing collar (511); the first valve body (510) and the second valve body (512) are connected and disposed in the sealing collar (511); the rotating shaft (508) is disposed in the first valve body (510); one end of the rotating shaft (508) extends out of the first valve body (510) and is connected to the rotating wheel (507); one end of the rotating shaft (508) is fixedly connected to the front end of the valve core (516); the middle part of the valve core (516) is threadedly connected to the rear end of the first valve body (510); the rear end of the valve core (516) is a conical needle-shaped structure; a retaining ring (506) is provided at the rear end of the valve core (516); the retaining ring (506) is in abutment contact with one end of the valve core sleeve (514); The locking knob (509) is disposed on the side of the first valve body (510), the bottom of the locking knob (509) passes through the outer wall of the first valve body (510) and abuts against the rotating shaft (508), the first connection port (513) and the second connection port (515) are symmetrically spaced and disposed on the side wall of the second valve body (512), the first connection port (513) and the second connection port (515) are both hollow cylindrical structures, the middle parts of the first connection port (513) and the second connection port (515) are in communication with the interior of the second valve body (512), and the first connection port (513) and the second connection port (515) are in communication with the flow detection assembly (2) via the connecting conduit (505) respectively; The servo motor control component (4) comprises a servo motor controller (401), a servo motor (402), a servo shaft (403) and a servo motor bracket (404); the servo motor bracket (404) is fixedly mounted in the housing component (1); the servo motor (402) is mounted on the servo motor bracket (404); the servo motor controller (401) is placed in the housing component (1); the servo motor controller (401) is connected to the servo motor (402) circuit via a wire; a servo shaft (403) is provided at the output end of the servo motor (402); and the servo shaft (403) is connected to the needle valve body (502) via a coupling (503); The flow detection component (2) comprises a water pump (201), a plurality of hoses (202), a plurality of three-way pipes (203) and a flow meter (204); the water pump (201) is fixedly mounted inside the housing component (1); one end of the water pump (201) is connected to the needle valve body (502) via a connecting conduit (505); the other end of the water pump (201) is connected to the three-way pipe (203) via a hose (202); the plurality of three-way pipes (203) are symmetrically arranged at the top and bottom of the housing component (1); the plurality of three-way pipes (203) are connected via the hose (202); the outlet end of the housing component (1) is connected to an external device; and the flow meter (204) is arranged in the middle of the hose (202).

2. The fully automatic ultrapure water resistivity adjustment mechanism according to claim 1, characterized in that: The device display control component (3) comprises a disconnect button (301), a start button (302), a manual and automatic conversion button (303), an operation light (304), a stability light (305) and a fault light (306); the disconnect button (301), the start button (302) and the manual and automatic conversion button (303) are arranged in a straight line at intervals at the front end of the housing component (1); and the operation light (304), the stability light (305) and the fault light (306) are arranged at intervals at the front end of the housing component (1) in a longitudinal direction.

3. The fully automatic ultrapure water resistivity adjustment mechanism according to claim 2, characterized in that: The device display control component (3) further comprises a 24V power supply interface (307), a display and PH interface (308) and a flow meter standby interface (309), wherein the 24V power supply interface (307), the display and PH interface (308) and the flow meter standby interface (309) are arranged at intervals on the top of the housing component (1).

4. The fully automatic ultrapure water resistivity adjustment mechanism according to claim 3, characterized in that: The housing assembly (1) comprises a main housing (101), a plurality of fixing plates (102) and a housing cover plate (103); the main housing (101) is a rectangular parallelepiped frame structure; the plurality of fixing plates (102) are distributed at four corners on both sides of the main housing (101); the fixing plates (102) are L-shaped plate structures; one side of the fixing plates (102) is fixedly connected to the main housing (101); and the housing cover plate (103) is snap-fitted to the front end of the main housing.

5. The fully automatic ultrapure water resistivity adjustment mechanism according to claim 4, characterized in that: The servo motor (402) is connected to the needle valve body (502) via a coupling (503); the number of rotations and the forward and reverse rotations of the servo motor (402) correspond to the opening and closing size of the needle valve body (502) in feedback.

6. The fully automatic ultrapure water resistivity adjustment mechanism according to claim 5, characterized in that: The fixing plate (102) fixes the housing component (1) on the main pipeline, and the flow detection component (2) is connected to the inside of the main pipeline through a plurality of hoses (202).

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