A transport line and a support type transport device

By designing a strap-type transportation device, using interlaced and distributed grid strips and driving equipment, the dust and jitter problems caused by workpiece friction in traditional transportation structures are solved, and high-quality transportation operations and workpiece performance guarantees are achieved.

CN113353569BActive Publication Date: 2025-03-04SHENZHEN JT AUTOMATION EQUIP CO LTD
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Patent Information

Application Number
CN202110660036.2
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-06-15
Publication Date
2025-03-04
Estimated Expiration
2041-06-15

AI Technical Summary

Technical Problem

Traditional chain or mesh belt transportation structures cause workpiece friction to produce dust during chip packaging, affecting the welding environment, and may cause wafer plate jitter and affecting chip performance.

Method used

A sling type transport device is designed, including a transport sling arranged between the loading device and the belt-type loading device. A plurality of grid strips extending in the same direction and are distributed interlaced with the belt-type loading device, and are equipped with driving equipment to realize the lifting and horizontal movement of the sling.

Benefits of technology

By reducing the friction between the workpiece to be transported and the transport device, dust generation and wafer shaking are avoided, transportation operation quality is improved and the structural performance of the workpiece is ensured.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention discloses a transport line and a support-bar transport device. The support-bar transport device comprises a transport support bar arranged between a loading device and a belt-type unloading device; the transport support bar has a plurality of grid bars extending in the same direction as the conveying belt surface of the belt-type unloading device and staggeredly distributed; the transport support bar is connected to a driving device for driving the transport support bar to move from the upper side of the conveying belt surface to the lower side of the conveying belt surface between the loading device and the belt-type unloading device. The support-bar transport device can be used to transport workpieces to be transported such as wafer plates that have high requirements on product quality, and can avoid friction between the wafer plates and the support-bar transport device and its downstream equipment, and avoid problems such as abrasion, dust generation, and deviation from the preset transport direction caused by the wafer plates during transportation.
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Description

Technical Field

[0001] The present invention relates to the field of transport equipment, in particular to a support bar type transport device and a transport line, comprising the support bar type transport device. Background Art

[0002] One of the important links in the chip manufacturing process is chip packaging, and in this chip packaging process, the chips and their components usually need to be transported. In the traditional welding process, chains or mesh belts are generally used as the carrier for transportation. This type of transportation structure has the following disadvantages:

[0003] 1. The friction between the transport carrier and the transported object easily generates dust, which pollutes the welding process environment. In particular, the long-term operation of the transport carrier cannot meet the requirements of the Class 1000 dust-free process of the chip. Therefore, the operator needs to clean the aforementioned dust regularly.

[0004] Second, when the transport carrier and the transported object, such as the wafer plate of the chip, rub against each other, it will inevitably cause the wafer plate to shake, which will cause the solder balls on the wafer plate to shift, seriously affecting the product performance of the chip. Summary of the invention

[0005] The object of the present invention is to provide a support bar type transport device, which can reduce or even completely avoid the mutual friction between the workpiece to be transported and the device, improve the quality of the transport operation and ensure the structural performance of the workpiece to be transported. Another object of the present invention is to provide a transport line, including the above-mentioned support bar type transport device.

[0006] To achieve the above-mentioned purpose, the present invention provides a support-bar type transport device, including a transport support bar used to be arranged between a loading device and a belt-type unloading device; the transport support bar has a plurality of bars that extend in the same direction as the transport belt surface of the belt-type unloading device and are staggered; the transport support bar is connected to a driving device used to drive the transport support bar to move from the upper side of the transport belt surface to the lower side of the transport belt surface between the loading device and the belt-type unloading device.

[0007] Preferably, the driving device comprises a first driving device for driving the transport support bar to move up and down, and a second driving device for driving the transport support bar to move horizontally between a loading device and a belt unloading device.

[0008] Preferably, the first driving device comprises a first motor and a rocker arm; one end of the rocker arm is connected to the output shaft of the first motor, and the other end is used to abut against the bottom of the transport support bar.

[0009] Preferably, it also includes a plurality of first positioning parts for supporting the transport support bar upward; all of the first positioning parts are spaced apart along the length direction of the bars of the transport support bar; all of the first positioning parts are linked; and the rocker arm abuts against the transport support bar through the first positioning parts.

[0010] Preferably, any one of the first positioning parts comprises a pair of supports and a supporting member connected between the pair of supports; and the transport support frame is placed above the supporting member.

[0011] Preferably, the transport support bar includes a feed end for connecting to a loading device and a discharge end for connecting to a belt unloading device; a sensor is provided on one side of the feed end; and the first motor is connected to a controller for automatically starting the first motor when the sensor detects a workpiece to be transported.

[0012] Preferably, the second driving device includes a second motor and a ball screw; the screw of the ball screw is connected to the output shaft of the second motor; a mating surface is provided between the slider of the ball screw and the transport support bar for realizing sliding nesting of the two along the lifting direction of the transport support bar and stopping along the horizontal movement direction of the transport support bar.

[0013] Preferably, the second driving device also includes a second positioning portion fixedly mounted on the slider; the second positioning portion has a plurality of comb teeth for one-to-one connection with all the bars; the top end of any of the comb teeth has a downwardly recessed groove; the bar has a thin neck portion for being embedded in the groove and stopped on both sides of the groove.

[0014] The present invention also provides a transport line, including a loading device and a belt-type unloading device spaced apart in the horizontal direction; and also including the support bar type transport device as described above; the loading device and the belt-type unloading device are both pulley devices; the height of the loading device is not less than the minimum height of the transport support bar when it is on one side of the loading device.

[0015] Preferably, the belt body surface of the belt unloading device has a plurality of convex strips extending along the length direction of the belt; the upper surfaces of all the convex strips form the conveyor belt surface.

[0016] Compared with the above-mentioned background technology, the support bar type transport device provided by the present invention includes a transport support bar used to be arranged between a loading device and a belt-type unloading device; the transport support bar has a plurality of bars which extend in the same direction as the transport belt surface of the belt-type unloading device and are staggeredly distributed; the transport support bar is connected to a driving device which is used to drive the transport support bar to move from the upper part of the transport belt surface to the lower part of the transport belt surface between the loading device and the belt-type unloading device.

[0017] The support-bar transport device is arranged between the loading device and the belt-type unloading device, and is displaced relative to the loading device and the belt-type unloading device under the action of the driving device. At the same time, combined with the relative position relationship between the grid bars of its transport support bar and the transport belt surface of the belt-type unloading device, the transfer of the workpiece to be transported between the loading device and the belt-type unloading device can be achieved under the premise that the workpiece to be transported and the transport support bar are relatively stationary.

[0018] Therefore, when the above-mentioned support-bar transport device is used to transport workpieces such as wafer plates with high requirements on product quality, it can avoid friction between the wafer plates and the support-bar transport device and its downstream equipment, thereby avoiding problems such as wear, dust generation, and deviation from the preset transport direction caused by the wafer plates during transportation. It is suitable for dust-free, acid-base, high-temperature and other environments, and is suitable for wafer plates of different diameters that meet the grid gap requirements.

[0019] As for the transport line provided by the present invention, it adopts a pulley device as a loading device and a belt-type unloading device. Therefore, in addition to being able to avoid friction and wear of the workpiece to be transported between the support-bar transport device and the belt-type unloading device, friction and wear of the workpiece to be transported can also be avoided between the loading device and the support-bar transport device, thereby effectively weakening or even completely avoiding the wear and dust generation caused to the wafer plate waiting to be transported during loading. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0021] Figure 1 A schematic diagram of the structure of a support bar type transport device provided in an embodiment of the present invention;

[0022] Figure 2 A structural thumbnail diagram of a support bar type transport device provided in an embodiment of the present invention;

[0023] Figure 3 for Figure 2 A partial enlarged view at the second positioning portion;

[0024] Figure 4 for Figure 3 A detailed enlargement of the groove and the narrow neck.

[0025] Among them, 01-workpiece to be transported, 1-transport support bar, 11-grid bar, 111-thin neck, 2-first motor, 3-rocker, 41-support, 42-support member, 5-sensing member, 6-second motor, 7-ball screw, 8-second positioning part, 81-claw teeth, 811-groove, 9-linkage pull rod, 10-track. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] In order to enable those skilled in the art to better understand the scheme of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0028] Please refer to Figures 1 to 4 , Figure 1 A schematic diagram of the structure of a support bar type transport device provided in an embodiment of the present invention; Figure 2 A structural thumbnail diagram of a support bar type transport device provided in an embodiment of the present invention; Figure 3 for Figure 2 A partial enlarged view at the second positioning portion; Figure 4 for Figure 3 A partial enlarged view of the groove and the narrow neck. Figure 1 The product shown is a long strip structure. Figure 1 The shape structure and connection relationship of important structures in the Figure 2 by Figure 1 Based on, omitted Figure 1 Part of the structure in the middle of the product and enlarge the parts of the structure on the left and right ends of the product.

[0029] The present invention provides a support bar type transport device, comprising a transport support bar 1 having multiple bars 11 and a driving device connected to the transport support bar 1; the aforementioned transport support bar 1 is arranged between a loading device and a belt unloading device, and plays a role in transferring the workpiece 01 to be transported between the loading device and the belt unloading device; the aforementioned driving device is used to drive the transport support bar 1 to move from the loading device to the belt unloading device, thereby realizing the bars 11 of the transport support bar 1 moving from the upper surface of the conveyor belt surface of the belt unloading device to the lower surface of the conveyor belt surface.

[0030] As for the multiple bars 11 of the transport support bar 1, they all extend in the same direction as the conveyor surface of the belt-type unloading device and are interlaced with each other. For example, if the transport support bar 1 has two parallel bars 11, the conveyor surface of the belt-type unloading device is between the two parallel bars 11, and the length direction of the conveyor surface is parallel to the length direction of the bars 11. Of course, if the transport support bar 1 has three or more parallel and spaced bars 11, the conveyor surface of the belt-type unloading device can be set to one or more, and any one of the conveyor surfaces is spaced and interlaced between two adjacent bars 11.

[0031] When the workpiece 01 to be transported enters the transport support bar 1 from the loading device, the workpiece 01 to be transported is placed on the bars 11 of the transport support bar 1. In the process of the driving device driving the workpiece 01 to be transported to move toward the belt unloading device, the workpiece 01 to be transported and the bars 11 always remain relatively still. When the transport support bar 1 moves to the belt unloading device, because the bars 11 of the transport support bar 1 and the conveyor belt surface of the belt unloading device extend in the same direction and are staggered, once the transport support bar 1 moves downward from the upper side of the conveyor belt surface of the belt unloading device, it means that the conveyor belt surface moves upward relative to the transport support bar 1 and its bars 11. At this time, the transport support bar 1 and its bars 11 can be staggered with the conveyor belt surface, and the workpiece 01 to be transported placed on the bars 11 is lifted up by the upwardly moving conveyor belt surface and detached from the bars 11. Thereafter, the workpiece 01 to be transported lifted up by the conveyor belt surface can continue to move downstream of the process line under the drive of the belt unloading device.

[0032] Among them, the conveyor belt surface of the belt unloading device moves along the length direction of the grid bars 11 between the gaps between adjacent grid bars 11 without interfering with the grid bars 11, and can smoothly and safely transfer the workpiece 01 to be transported from the transport support bar 1.

[0033] It can be seen that when the support bar type transport device transfers the workpiece 01 to be transported between the loading device and the belt unloading device, the workpiece 01 to be transported on the transport support bar 1 will not produce relative displacement with the transport support bar 1; the workpiece 01 to be transported on the belt unloading device will not produce a relative position with the belt unloading device; the transport support bar 1 transferred between the transport support bar 1 and the belt unloading device will not produce relative displacement with the contact structure due to the transfer. Only when the workpiece 01 to be transported is separated from the original contact structure, will the workpiece 01 to be transported produce relative displacement with the aforementioned original contact structure, thereby realizing the transfer of the workpiece 01 to be transported from the transport support bar 1 to the belt unloading device.

[0034] In summary, it can be seen that the support-bar transport device provided by the present invention can be used to transport workpieces such as wafer plates that have high requirements on product quality. It can avoid friction between the wafer plates and the support-bar transport device and its downstream equipment, and avoid problems such as wear, dust generation, and deviation from the preset transport direction caused by the wafer plates during transportation. It is suitable for dust-free, acid-base, high-temperature and other environments, and is suitable for wafer plates of different diameters that meet the grid bar gap requirements.

[0035] In addition, for the support-type transport device, if the loading device located upstream of the support-type transport device is specifically set to a belt conveyor, a robot with a mechanical claw, or other equipment, it can also effectively reduce or even completely avoid the wear and dust generation on the wafer plate waiting to be transported workpiece 01 during loading.

[0036] The support bar type transport device provided by the present invention is further described below in conjunction with the accompanying drawings and implementation modes.

[0037] For the above-mentioned support bar type transport device, its driving device may include a first driving device for driving the transport support bar 1 to move up and down and a second driving device for driving the transport support bar 1 to move horizontally.

[0038] The second driving device can drive the transport support bar 1 to move between a loading device and a belt unloading device with a horizontal interval. For example, when the second driving device drives the transport support bar 1 to move horizontally to the left, the transport support bar 1 is brought into contact with the loading device on the left side, thereby realizing the transfer of the workpiece 01 to be transported from the loading device to the transport support bar 1; when the second driving device drives the transport support bar 1 to move horizontally to the right, the transport support bar 1 is brought into contact with the belt unloading device on the right side, thereby realizing the transfer of the workpiece 01 to be transported from the transport support bar 1 to the belt unloading device.

[0039] The function of the first driving device is to drive the transport support bar 1 to rise and fall. For example, when the transport support bar 1 contacts the belt unloading device, the first driving device drives the transport support bar 1 to move from the upper surface of the transport belt of the belt unloading device to the lower surface of the transport belt. According to the relative motion relationship, the transport belt of the belt unloading device moves upward relative to the transport support bar 1, thereby lifting the workpiece 01 to be transported mounted on the transport support bar 1, and realizing the transfer of the workpiece 01 to be transported from the transport support bar 1 to the belt unloading device. As for the first driving device driving the transport support bar 1 to move upward, it can be regarded as resetting the transport support bar 1, or playing a role in assisting the transfer of the workpiece 01 to be transported between the loading device and the transport support bar 1.

[0040] In the above structure, the auxiliary role played by the first driving device in transferring the workpiece 01 to be transported when it moves upward is specifically embodied in that: when the feeding device adopts a belt conveyor, the workpiece 01 to be transported will move synchronously with the belt surface of the feeding device toward the exit side. In order to reduce the friction of the workpiece 01 to be transported, the exit side of the feeding device is usually slightly higher than the transport support bar 1. Then, when part of the workpiece 01 to be transported has been separated from the belt surface of the feeding device and is suspended directly above the transport support bar 1, the first driving device drives the transport support bar 1 to move upward, thereby steadily lifting the workpiece 01 to be transported from the belt surface of the feeding device. In this way, it is avoided that the workpiece 01 to be transported and the transport support bar 1 slide relative to each other due to the flushing of the feeding device and the transport support bar 1, and it is also avoided that the workpiece 01 to be transported falls and is damaged due to the formation of a fixed height difference between the feeding device and the transport support bar 1.

[0041] As for the first driving device for realizing lifting drive and the second driving device for realizing horizontal drive, a specific setting method is given below for each of them.

[0042] The first driving device includes a first motor 2 and a rocker 3; one end of the rocker 3 is connected to the output shaft of the first motor 2, and the other end of the rocker 3 is used to abut against the bottom of the transport support bar 1. When the output shaft of the first motor 2 outputs angular displacement outward, it drives the rocker 3 to rotate with the aforementioned output shaft as the rotation axis, and the other end of the rocker 3, that is, the end abutting against the bottom of the transport support bar 1, is displaced. Since the function of the first driving device is to realize the lifting and lowering drive of the transport support bar 1, the output shaft of the first motor 2 can be distributed horizontally, so that the rocker 3 rotates in a vertical plane.

[0043] by Figure 1 and Figure 2 For example, Figure 2 The left end of the middle rocker arm 3 is connected to the first motor 2, and the right end of the rocker arm 3 is used to contact the transport support bar 1, specifically, contacting the transport support bar 1 through the support 41 and the support member 42. When the output shaft of the first motor 2 drives the rocker arm 3 to rotate counterclockwise, the right end of the rocker arm 3 generates an upward displacement component, which can realize the upward movement of the transport support bar 1; on the contrary, when the output shaft of the first motor 2 drives the rocker arm 3 to rotate clockwise, the right end of the rocker arm 3 generates a downward displacement component, which can realize the downward movement of the transport.

[0044] In order to avoid the risk of transferring the workpiece 01 to be transported due to the large height difference between the loading device and the support bar type transport device, usually, the height difference between the loading device and the transport support bar 1 of the support bar type transport device is small, so the swing arm 3 can rotate at a small angle to meet the lifting and lowering requirements of the transport support bar 1. In other words, the first motor 2 of the first driving device can be provided with an angle limit structure to restrict the rotation range of the swing arm 3, so that the swing arm 3 can swing, thereby utilizing the vertical displacement of the swing arm 3 during the swinging process to realize the lifting and lowering of the transport support.

[0045] Furthermore, the first driving device may also include a plurality of first positioning parts for upwardly supporting the transport support bar 1. All the aforementioned first positioning parts are spaced along the length of the grid bar of the transport support bar 1, and all the first positioning parts are linked, which is conducive to stably supporting the transport support bar 1 when the transport support bar 1 is in a long strip structure, and avoiding the transport support bar 1 from tilting.

[0046] All the first positioning parts can be connected to the same linkage rod 9, so as to transmit the displacement of the rocker rod 3 to any first positioning part.

[0047] Obviously, the rocker arm 3 is arranged between the output shaft of the first motor 2 and all the first positioning parts. For example, since all the first positioning parts are connected, the rocker arm 3 can be connected to one of the first positioning parts, thereby driving all the other first positioning parts to move synchronously at the same time.

[0048] The first positioning portion may specifically include a pair of supports 41 respectively disposed on both sides of the length direction of the bars of the transport support bar 1 and a support member 42 connected between the pair of supports 41. In simple terms, the pair of supports 41 and the support member 42 connected between the supports 41 can be regarded as an H-shaped or gate-shaped structure, and the bars 11 of the transport support bar 1 are placed above the crossbar of the H-shaped or gate-shaped structure.

[0049] On the basis of the above structure, the support bar type transport device also includes an induction component 5 connected to the first motor 2; according to the relative position relationship between the transport support bar 1 and the loading device and the belt unloading device, the two ends of the transport support bar 1 can be divided into a feeding end for connecting to the loading device and a discharging end for connecting to the belt unloading device, and the aforementioned induction component 5 is arranged on the feeding end side of the transport support bar 1.

[0050] The induction member 5 is used to detect whether the workpiece 01 to be transported of the loading device has been transferred to the transport support bar 1. If the workpiece 01 to be transported has been transferred from the loading device to the transport support bar 1, the first motor 2 automatically turns on the first motor 2 through the controller under the signal obtained by the induction member 5, so that the first motor 2 drives the transport support bar 1 to move upward through the swing rod 3, thereby assisting in completing the transfer of the workpiece 01 to be transported to the transport support bar 1.

[0051] The second driving device used in the present invention may include a second motor 6 and a ball screw 7 connected to the output shaft of the second motor 6. On this basis, the slider of the ball screw 7 cooperates with the bar 11 of the transport support bar 1, and the matching surface is used to realize the freedom of relative movement of the two, and the matching surface is used to realize the sliding nesting of the slider and the bar 11 along the lifting direction of the transport support bar 1 and to prevent the slider and the bar 11 from relative movement along the horizontal movement direction of the transport support bar 1.

[0052] For example, please refer to Figure 3 and Figure 4 The slider of the ball screw 7 is fixedly connected with a second positioning portion 8 , and the second positioning portion 8 has a plurality of comb teeth 81 , and all the comb teeth 81 are connected with all the grid bars 11 in a one-to-one correspondence.

[0053] Furthermore, for the support bar type transport device, in addition to the thread rolling screw 7, rails 10 may be provided on both sides of the transport support bar 1 so that the thread rolling screw 7 and its slider drive the second positioning portion 8 to move smoothly.

[0054] For any pair of interconnected comb teeth 81 and grid bars 11, the top of the comb teeth 81 is provided with a groove 811 that is sunken downward, and the groove 811 sinks in the vertical direction and penetrates in the horizontal movement direction of the transport support bar 1; at the same time, the grid bar 11 has a thin neck 111 for being inserted into the groove 811, and the thin neck 111 is thick at both sides and thin in the middle, and the thinner middle part can be inserted into the groove 811, while the thicker two sides can be stopped at both sides of the comb teeth 81 and its groove 811, preventing the grid bar 11 from moving relative to the second positioning portion 8 along the horizontal movement direction of the transport support bar 1. It can be seen that the contact surface between the groove 811 and the thin neck 111 is the matching surface described above.

[0055] Based on the above structure of the second positioning portion 8, when the first driving device drives the transport support bar 1 to rise or fall, the grid bar 11 can move freely in the groove 811 along the vertical direction, and will not interfere with the driving of the transport support bar 1 by the first driving device; when the second driving device drives the transport support bar 1 to move along the horizontal movement direction, the grid bar 11 is stopped by the cooperation between its thin neck 111 and the groove 811, so that the grid bar 11 is relatively fixed with respect to the comb teeth 81 and its groove 811, and then the transport support bar 1 and its grid bar 11 are driven by the ball screw 7 and its slider to move along the horizontal movement direction.

[0056] On the basis of any of the above embodiments, the present invention further provides a transport line, including a feeding device and a belt-type unloading device spaced apart in the horizontal direction, and also including a support bar transport device. In the transport line, the feeding device and the belt-type unloading device are both pulley devices; the height of the feeding device is not less than the minimum height of the transport support bar 1 when it is on one side of the feeding device, and preferably the height of the feeding device is greater than the minimum height of the transport support bar 1 on one side of the feeding device. The minimum height of the transport support bar 1 refers to the height of the lowest position of the transport support bar 1 under the traction movement of the driving device.

[0057] In particular, in the conveyor line, the belt body surface of the belt unloading device has a plurality of convex strips extending along the belt length direction, and the conveyor belt surface of the belt unloading device mentioned above refers to the surface formed by the upper surfaces of all the convex strips mentioned above. More specifically, when the conveyor support bar 1 and the belt unloading device generate relative motion in the height direction, the convex strips shuttle up and down between two adjacent grid bars 11, and the grid bars 11 shuttle up and down between two adjacent convex strips.

[0058] The above-mentioned transport line can be applied in the field of chip packaging in the semiconductor industry, for example, in the 3D-Through Silicon Via (TSV) process which has higher requirements for the transportation process. This process requires that the chips and their components as the workpiece 01 to be transported have higher stability, less friction and the possibility of generating dust during transportation.

[0059] The following takes a specific transportation line as an example to explain the specific operation steps of transporting wafer plates on this transportation line:

[0060] First, the transport support bar 1 is at the minimum height and close to the loading device as the starting position. At the starting position, the pulley device serving as the loading device stops running when the sensing member 5 detects the workpiece 01 to be transported. At the same time, the first motor 2 starts and drives the transport support bar 1 to generate a preset upward displacement component through the rocker arm 3, multiple groups of supports 41 and support members 42, so that the transport support bar 1 rises and lifts the wafer plate moved out from the exit side of the loading device.

[0061] Secondly, after the first motor 2 stops, the second motor 6 starts and drives the transport support bar 1 and the wafer plate mounted on the transport support bar 1 to move horizontally by a preset displacement toward the pulley device serving as a belt unloading device through the ball screw 7 and the slider, so that part of the transport support bar 1 is directly above the conveyor belt surface of the belt unloading device. At this time, part of the transport support bar 1 is still directly above the support 41 and the support member 42, which is convenient for subsequent actions.

[0062] Furthermore, during the startup of the second motor 6 or after the second motor 6 stops, the first motor 2 starts and drives the transport support bar 1 to generate a preset downward displacement component through the rocker arm 3, multiple sets of supports 41 and the support rod, so that the transport support bar 1 and the conveyor belt surface are staggered and interlaced up and down, so that the conveyor belt surface lifts up the wafer plate originally on the transport support bar 1, and then drives the wafer plate to completely leave the area where the transport support bar 1 is located through the movement of the belt unloading device and realizes the transfer of the wafer plate to a specific position.

[0063] Finally, when the wafer plate is lifted upward by the conveyor belt until it is separated from the conveyor support bar 1, the second motor 6 drives the conveyor support bar 1 to return to the starting position through the ball screw 7 and its slider.

[0064] The first motor 2 can be positioned by movement through a baffle installed at a specific position, so that the transport support bar 1 can be moved to a specific preset position.

[0065] It should also be noted that when the second motor 6 is started and the wafer plate has not yet been transferred to the conveyor belt surface, only the transport support bar 1 and the wafer plate above it move with the second motor 6. At this time, the transport support bar 1 and the wafer plate are relatively stationary, and the transport support bar 1 and the multiple groups of supports 41 and the support members 42 slide relatively.

[0066] The above is a detailed introduction to the transport line and the support bar transport device provided by the present invention. Specific examples are used in this article to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the present invention, several improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A support bar type transport device, characterized in that: It comprises a transport support bar (1) for being arranged between a feeding device and a belt-type unloading device; the transport support bar (1) has a plurality of grid bars (11) for extending in the same direction as the conveyor belt surface of the belt-type unloading device and being arranged in a staggered manner; the transport support bar (1) is connected to a driving device for driving the transport support bar (1) to move from above the conveyor belt surface to below the conveyor belt surface between the feeding device and the belt-type unloading device; The driving device comprises a first driving device for driving the transport support bar (1) to move upward and downward, and a second driving device for driving the transport support bar (1) to move horizontally between a loading device and a belt unloading device; The first driving device comprises a first motor (2) and a swing rod (3); one end of the swing rod (3) is connected to the output shaft of the first motor (2), and the other end is used to abut against the bottom of the transport support bar (1); It also includes a plurality of first positioning parts for supporting the transport support bar (1) upward; all the first positioning parts are spaced apart along the length direction of the grid bar of the transport support bar (1); all the first positioning parts are linked; the swing rod (3) abuts against the transport support bar (1) through the first positioning parts; Any of the first positioning parts comprises a pair of supports (41) and a support member (42) connected between the pair of supports (41); the transport support bar (1) is placed above the support member (42); The second driving device comprises a second motor (6) and a ball screw (7); the screw of the ball screw (7) is connected to the output shaft of the second motor (6); a matching surface is provided between the slider of the ball screw (7) and the transport support bar (1) for realizing sliding nesting of the two along the lifting direction of the transport support bar (1) and stopping along the horizontal movement direction of the transport support bar (1); The second driving device further comprises a second positioning portion (8) fixedly mounted on the slider; the second positioning portion (8) comprises a plurality of comb teeth (81) for one-to-one connection with all the grid bars (11); the top end of any of the comb teeth (81) comprises a groove (811) recessed downward; the grid bar (11) comprises a thin neck portion (111) for being embedded in the groove (811) and being locked at two sides of the groove (811); The thin neck (111) is thick at both sides and thin in the middle, the thinner middle portion can be inserted into the groove (811), and the thicker two sides can be stopped at both sides of the comb teeth (81) and the groove (811), thereby preventing the grid bar (11) from moving relative to the second positioning portion (8) along the horizontal moving direction of the transport support bar (1); When the first driving device drives the transport support bar (1) to rise or fall, the grid bar (11) can move freely in the vertical direction in the groove (811) without interfering with the driving of the transport support bar (1) by the first driving device; when the second driving device drives the transport support bar (1) to move in the horizontal direction, the grid bar (11) is stopped by the cooperation between its thin neck (111) and the groove (811), so that the grid bar (11) is relatively fixed with respect to the comb teeth (81) and its groove (811), and then the transport support bar (1) and its grid bar (11) are driven by the ball screw (7) and its slider to move in the horizontal direction.

2. The support bar type transport device according to claim 1, characterized in that: The transport support bar (1) comprises a feed end for connecting to a loading device and a discharge end for connecting to a belt-type unloading device; a sensor (5) is provided on one side of the feed end; and the first motor (2) is connected to a controller for automatically starting the first motor (2) when the sensor (5) detects a workpiece (01) to be transported.

3. A transport line, comprising a feeding device and a belt unloading device spaced apart in a horizontal direction; characterized in that: It also includes the support bar type transport device as described in claim 1 or 2; the loading device and the belt type unloading device are both pulley devices; the height of the loading device is not less than the minimum height of the transport support bar (1) when it is on one side of the loading device.

4. The transport line according to claim 3, characterized in that: The belt body surface of the belt type unloading device is provided with a plurality of convex strips extending along the belt length direction; the upper surfaces of all the convex strips form the conveyor belt surface.

Citation Information

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