Semiconductor crystal rod rolling grinding machine tool

Abstract

The present invention provides a semiconductor crystal rod rolling grinding machine tool, including a machine tool base, a crossbeam located above the machine tool base, a Z-axis feed slide mounted on the crossbeam and a Z-axis drive device driving the Z-axis feed slide to move, a fixture group mounted at the bottom of the Z-axis feed slide, a loading guide rail mounted on the machine tool base, a loading conveying slide mounted on the loading guide rail, a detection slide and a driving mechanism, a loading centering device mounted on the loading conveying slide, a blank detection device and an X-ray crystal orientation detector mounted on the detection slide, a crystal rod grinding device mounted on the machine tool base, and a processing detection device mounted on the crystal rod grinding device. The present invention realizes full-automatic processing, mechanical loading, mechanical detection to determine the grinding times, reduces manual operation, and increases work efficiency and work accuracy.

Description

Technical Field

[0001] The invention relates to the technical field of silicon rod processing, in particular to a semiconductor crystal rod rolling and grinding machine tool. Background Art

[0002] At present, the semiconductor crystal rod rolling machines widely used in the market mostly use manual loading, clamping, alignment, and testing for processing. This processing method of manual loading and unloading, manual testing to determine the number of grindings, and manual size testing after a single grinding has low processing efficiency while ensuring processing quality. In addition, depending on the level of the operator and the difference in the testing method, the consistency of crystal rod processing is poor.

[0003] Moreover, the existing roller grinding machine has too much mechanical parts, which causes the occupied area to be too large. Summary of the invention

[0004] In order to solve the above technical problems, a semiconductor crystal rod rolling and grinding machine is provided.

[0005] The technical means adopted by the present invention are as follows:

[0006] A semiconductor crystal rod tumbling machine tool, comprising:

[0007] Machine tool base;

[0008] A crossbeam, which is arranged above the machine tool base and extends in a direction parallel to the length direction of the machine tool base;

[0009] A Z-axis feed slide is mounted on the crossbeam and is slidably connected to the crossbeam;

[0010] A Z-axis feed drive device is installed on the crossbeam and is used to drive the Z-axis feed slide to move horizontally along the extension direction of the crossbeam; the Z-axis feed drive device can use a lead screw, the output end of the lead screw is connected to the Z-axis feed slide, and the input end is connected to the motor;

[0011] A clamping assembly is installed at the bottom of the Z-axis feed slide, and is used to axially clamp the two end faces of the crystal rod and drive the crystal rod to rotate around its axis;

[0012] A feeding guide rail assembly is installed on the machine tool base and is arranged at the head end of the machine tool base, and extends along the width direction of the machine tool base;

[0013] A feeding conveying slide is installed on the feeding guide rail group and is slidably connected to the feeding guide rail group;

[0014] The feeding and conveying slide drive mechanism is used to drive the feeding and conveying slide to move horizontally along the extension direction of the feeding guide rail group; the feeding and conveying slide drive mechanism can adopt a lead screw, the output end of the lead screw is connected to the feeding and conveying slide, and the input end is connected to the motor;

[0015] A detection slide, mounted on the feeding guide rail assembly and slidably connected to the feeding guide rail assembly;

[0016] The detection slide drive mechanism is used to drive the detection slide to move horizontally along the extension direction of the feeding guide rail group; the detection slide drive mechanism can adopt a lead screw, the output end of the lead screw is connected to the detection slide, and the input end is connected to the motor;

[0017] A feeding centering device, installed on the feeding conveying slide, is used to radially clamp the outer wall of the crystal rod and make the axis of the crystal rod parallel to the length direction of the machine tool base;

[0018] A blank detection device, mounted on the detection slide, for detecting the blank size and machining allowance of the crystal rod;

[0019] An X-ray crystal orientation detector, mounted on the detection slide, for detecting the crystal lines of the crystal rod;

[0020] a crystal rod grinding device, mounted on the side of the machine tool base, for grinding the crystal rod; and

[0021] The processing detection device is installed on the crystal rod grinding device and is used to detect the size of the crystal rod after processing. The processing detection device can be a combination of a probe and a cylinder, and the cylinder pushes the probe to extend and retract, and then the probe performs detection.

[0022] Preferably, the fixture set comprises:

[0023] A Z-axis lead screw, which is mounted on the Z-axis feed slide, and an input end of which is connected to the first motor;

[0024] Two chucks, one of which is connected to the output end of the Z-axis lead screw, and the other chuck is fixedly connected to the Z-axis feed slide; and

[0025] The motor and the harmonic reducer are connected to the chuck fixed on the Z-axis feed slide and are used to drive the chuck to rotate around its axis.

[0026] The chuck may be the chuck provided by application number [2020217826293] or [201820892877X];

[0027] Preferably, the crystal rod grinding device includes a V-groove grinding device and at least one outer circle and reference surface grinding device, wherein the V-groove grinding device is used to process a V-groove on the silicon rod, and the outer circle and reference surface grinding device is used to grind the outer surface of the silicon rod and process a reference plane on the outer surface of the silicon rod, and the V-groove grinding device and the outer circle and reference surface grinding device are arranged opposite to each other. When multiple outer circle and reference surface grinding devices are used, multiple outer circle and reference surface grinding devices are arranged side by side, and one of them can be used alone for rough grinding, one of them can be used alone for fine grinding, and one of them can be used alone for grinding the reference surface. Alternatively, one outer circle and reference surface grinding device can be used.

[0028] Preferably, the V-groove grinding device and the outer circle and reference surface grinding device both include:

[0029] A grinding guide rail, the extension direction of which is the width direction of the machine tool base;

[0030] A spindle feed slide is mounted on the grinding guide rail and slidably cooperates with the grinding guide rail;

[0031] A spindle screw, whose output end is connected to the spindle feed slide, and whose input end is connected to a motor for driving the spindle feed slide to move horizontally along the grinding guide rail; and

[0032] The grinding spindle is mounted on the spindle feed slide, and its input end is connected with a spindle drive mechanism. The spindle drive mechanism can adopt a motor with a pulley, and then connected to the input end of the grinding spindle through a belt to realize the rotation of the grinding spindle.

[0033] Preferably, the grinding spindle of the outer circle and reference surface grinding device is installed on the spindle feeding slide through a vertical feeding mechanism, and the vertical feeding mechanism comprises:

[0034] A frame, vertically fixed on the spindle feed slide;

[0035] A vertical guide rail mounted on the inner wall of the frame;

[0036] A lifting slide is slidably matched with the vertical guide rail, and the grinding spindle is installed on the lifting slide and

[0037] The lifting cylinder is installed on the spindle feed slide, and its input end is connected to the lifting slide.

[0038] Preferably, the feeding centering device comprises:

[0039] Two slide rails, which are arranged in parallel and fixed on the feeding and conveying slide, and whose extending direction is parallel to the length direction of the machine tool base;

[0040] A silicon rod carrying device, located between the two slide rails, and used for carrying the silicon rod;

[0041] Two clamping jaw systems, the extension directions of the two clamping jaw systems are parallel to the width direction of the machine tool base, and are used to clamp the silicon rod carried by the silicon rod carrying device; and

[0042] A clamping jaw system driving mechanism, used for driving the two clamping jaw systems to move toward or away from each other along the extension direction of the slide rail;

[0043] The clamping system comprises:

[0044] A slide plate, the extension direction of which is parallel to the width direction of the machine tool base, and the bottom of which is slidably connected to the two slide rails via a slide block;

[0045] A clamping jaw guide rail is located on the slide plate, and its extension direction is parallel to the width direction of the machine tool base;

[0046] Two clamping jaws, the bottoms of the two clamping jaws are slidably connected to the clamping jaw guide rail via a clamping jaw slider, and the opposing surfaces of the two clamping jaws have a V-shaped clamping opening; and

[0047] The clamping jaw driving mechanism is located on the slide plate and is used to drive the two clamping jaws to move toward or away from each other along the extension direction of the clamping jaw guide rail.

[0048] Preferably, the silicon rod supporting device comprises:

[0049] A tray, the tray is located above the slide, and the extension direction is parallel to the length direction of the machine tool base, both ends of the tray have vertical plates extending vertically downward, and the length of the tray is greater than or equal to the length of the slide rail;

[0050] A crystal support, fixed on the top of the tray, for carrying the silicon rod;

[0051] A first horizontal plate, fixed to the vertical plate;

[0052] A second transverse plate, located below the first transverse plate and fixedly connected to the loading and conveying slide;

[0053] A plurality of sliding guide rods vertically passing through the first transverse plate and the second transverse plate;

[0054] A plurality of first springs, sleeved on a portion of the sliding guide rod between the first transverse plate and the second transverse plate; and

[0055] Two limiting blocks are respectively fixed on the lower surface of the first transverse plate and the upper surface of the second transverse plate for limiting.

[0056] Preferably, the clamping jaw system driving mechanism comprises:

[0057] A first left-right double-nut screw, whose two output ends are respectively fixedly connected to the bottoms of the two slides, and whose input end is a hand wheel or a first motor;

[0058] The first left-right double-nut lead screw is connected to the slide plate via a floating buffer mechanism;

[0059] The floating buffer mechanism comprises:

[0060] A screw fixing seat is fixed to the middle part of the slide plate, and the middle part of the screw of the first left-right double-nut screw is connected to the slide plate through the screw fixing seat;

[0061] A fixed seat, which is located beside the screw fixed seat and is fixedly connected to the feeding conveying slide;

[0062] A guide bolt, the extension direction of which is parallel to the length direction of the machine tool base, and the end of which, away from the screwing end, passes through the fixing seat and is fixedly connected to the screw fixing seat; and

[0063] The second spring is sleeved on the guide bolt, one end of which is connected to the fixing seat, and the other end of which is connected to the lead screw fixing seat.

[0064] Preferably, the clamping jaw driving mechanism is a second left-right rotating double-nut screw, whose two output ends are respectively fixedly connected to the two clamping jaws, and whose input end is a motor.

[0065] Preferably, the clamping jaw system further comprises: a clamping jaw opening position feedback mechanism;

[0066] Preferably, the jaw opening position feedback mechanism comprises:

[0067] A screw bearing seat is fixed at one end of the slide plate and is close to the clamp driving motor, and one end of the screw of the second left-right double-nut screw is connected to the slide plate through the screw bearing seat;

[0068] The jaw opening position trigger switch is installed on the screw bearing seat. When the two jaws move apart to the maximum stroke, the jaw close to the jaw opening position trigger switch touches the jaw opening position trigger switch to turn on.

[0069] Preferably, the V-shaped clamp has a vertical surface at the inner end of its opening.

[0070] Preferably, a silicon rod detection mechanism is installed on the vertical surface;

[0071] The silicon rod detection mechanism comprises:

[0072] A mounting groove, machined in the vertical plane, with its opening extending toward an open outer end of the clamping opening;

[0073] A piston, the outer diameter of which matches the inner diameter of the mounting groove, is partially located in the mounting groove and partially passes through the notch of the mounting groove;

[0074] A piston rod, the extension direction of which is parallel to the width direction of the machine tool base, one end of which passes through the bottom of the mounting groove and is fixedly connected to the piston;

[0075] a third spring, located in the mounting groove and sleeved on the piston rod, with one end connected to the piston and the other end connected to the bottom of the mounting groove, for resetting the piston rod; and

[0076] A trigger switch is installed on the side of the clamping jaw without the clamping opening and close to the other end of the piston rod; after the clamping jaw clamps the silicon rod, the piston rod moves and the other end of the piston rod triggers the trigger switch.

[0077] Preferably, the position of the mounting groove on each of the vertical surfaces is different, or the length of the notch through which each of the pistons passes through the mounting groove is different.

[0078] Alternatively, a contact displacement sensor is installed on the vertical surface to replace the silicon rod detection mechanism.

[0079] Preferably, the blank detection device comprises a detection cylinder fixed on the detection slide, the output end of the detection cylinder is connected to a mounting plate via a detection bracket, and the mounting plate is slidably connected to a detection guide rail fixed on the detection slide, and the extension direction of the detection guide rail is parallel to the width direction of the machine tool base;

[0080] A probe is installed on the mounting plate, and the output end of the probe is connected to a guide wheel shaft, the guide wheel shaft pre-presses the probe, and a guide wheel is installed at the end of the guide wheel shaft away from the probe, the extension direction of the guide wheel shaft coincides with the extension direction of the probe, and the mounting plate is provided with a guide wheel shaft anti-rotation mechanism at the location of the guide wheel shaft, which is used to prevent the guide wheel shaft from rotating around its axis.

[0081] Preferably, a plane is processed on the side wall of the guide wheel shaft; the guide wheel shaft rotation prevention mechanism includes a mounting seat fixed on the mounting plate, and a groove is processed on the mounting seat at one end facing the guide wheel, and the guide wheel shaft axially passes through the bottom of the groove, and threaded holes are respectively provided on the four walls of the groove, and one of the threaded holes or two of the threaded holes opposite to each other is provided with a fixing bolt, and the fixing bolt cooperates with the plane to prevent the guide wheel shaft from rotating around its axis; a reset spring sleeved on the guide wheel shaft is provided in the groove, and one end of the reset spring is connected to one end of the guide wheel shaft having a guide wheel, and the other end of the reset spring is connected to the bottom of the groove, and the outer diameter of one end of the guide wheel shaft having a guide wheel matches the inner diameter of the groove.

[0082] The working process of the present invention is as follows: the silicon rod is placed in the loading and centering device, the loading and centering device clamps the silicon rod, and then the loading and conveying slide moves from the side of the machine tool base to the machine tool base, and the clamp group on the Z-axis feed slide clamps the two end faces of the silicon rod in the length direction of the machine tool base; the detection slide moves to the location of the silicon rod, and the blank detection device detects the size of the silicon rod to determine the processing allowance. Afterwards, the Z-axis feed slide and the clamp group drive the silicon rod to the crystal rod grinding device for grinding (grinding is performed according to the feedback from the blank detection device, and the clamp group drives the crystal rod to rotate around its axis during the grinding process). After the grinding process is completed, the processing and detection device is used for re-inspection (size inspection is performed after rough grinding, followed by fine grinding, and re-inspection is still performed after fine grinding). After that, the Z-axis feed slide moves to its original position, the detection slide slides out, and the X-ray crystal orientation detector performs crystal orientation detection on the ground silicon rod. After the crystal line is detected, it moves back to the crystal rod grinding device for OF plane (reference plane) or V-shaped Notch groove (V-shaped groove) processing. After that, the silicon rod returns to its original position for unloading.

[0083] Compared with the prior art, the present invention has the following advantages:

[0084] 1. The present invention realizes full-automatic processing, mechanical feeding, mechanical detection to determine the grinding times, reduces manual operation, and increases work efficiency and work accuracy.

[0085] 2. Reasonable use of structure and space can effectively reduce the space occupied by the compression tool.

[0086] 3. The present invention can realize the fixing and clamping of cylindrical wafer blank bars of different diameters at the same center. The clamping point span can be adjusted according to the different lengths of silicon bars to ensure that the center axis of the wafer blank is horizontal. It has the function of detecting the clamping diameter of the bar and whether there is material. It has the function of unloading when the bar is subjected to axial thrust. It has the function of boosting the clamping action of the bar. It has the function of feedback on the position of the jaw opening.

[0087] 4. A roller is added to the probe in the blank detection device to achieve continuous detection of silicon rods, thereby increasing detection efficiency and accuracy.

[0088] Based on the above reasons, the present invention can be widely promoted in the fields of silicon rod processing and the like. BRIEF DESCRIPTION OF THE DRAWINGS

[0089] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0090] Figure 1 It is a schematic structural diagram of a semiconductor crystal rod grinding machine tool in a specific implementation manner of the present invention.

[0091] Figure 2 It is a schematic diagram of the structure of a semiconductor crystal rod grinding machine tool from another perspective in a specific implementation mode of the present invention.

[0092] Figure 3 This is a structural distribution diagram of a semiconductor crystal rod grinding machine tool in a specific implementation mode of the present invention (top view).

[0093] Figure 4 It is a schematic diagram of the structure of a clamp group in a specific implementation manner of the present invention.

[0094] Figure 5 It is a front view of the outer circle and reference surface grinding device in a specific embodiment of the present invention.

[0095] Figure 6 It is a structural schematic diagram of a feeding centering device in a specific implementation manner of the present invention.

[0096] Figure 7 It is a structural schematic diagram of the feeding centering device in another perspective in a specific implementation manner of the present invention.

[0097] Figure 8 It is a schematic diagram of the structure of the floating buffer mechanism in a specific implementation manner of the present invention.

[0098] Fig. 9 It is a schematic diagram of the structure of the silicon rod detection mechanism in a specific implementation manner of the present invention.

[0099] Fig.10 It is a schematic structural diagram of a blank detection device in a specific implementation manner of the present invention.

[0100] Fig.11 for Fig.10 AA section view.

[0101] In the figure: 1, machine tool base; 2, crossbeam; 3, Z-axis feed slide; 4, Z-axis feed drive device; 5, fixture group; 501, Z-axis lead screw; 502, chuck; 503, motor and harmonic reducer;

[0102] 6. Feeding guide rail assembly; 7. Feeding conveying slide; 8. Feeding conveying slide drive mechanism; 9. Inspection slide; 10. Inspection slide drive mechanism; 11. Feeding centering device; 1101. Slide plate guide rail; 1102. Slide plate; 1103. Claw guide rail; 1104. Claw; 1105. Second left-right double-nut lead screw; 1106. Claw drive motor; 1107. First left-right double-nut lead screw; 1108. Hand wheel; 1109. Tray; 1110. Crystal tray; 1111 , first horizontal plate; 1112, second horizontal plate; 1113, sliding guide rod; 1114, first spring; 1115, limit block; 1116, screw fixing seat; 1117, fixing seat; 1118, guide bolt; 1119, second spring; 1120, screw bearing seat; 1121, jaw opening position trigger switch; 1122, vertical surface; 1123, mounting groove; 1124, piston; 1125, piston rod; 1126, third spring; 1127, trigger switch;

[0103] 12. Blank detection device; 1201. Detection cylinder; 1202. Detection bracket; 1203. Mounting plate; 1204. Detection guide rail; 1205. Probe; 1206. Guide wheel shaft; 1207. Guide wheel; 1208. Mounting seat; 1209. Set bolt; 1210. Reset spring; 1211. Guide wheel shaft mounting screw;

[0104] 13. X-ray crystal orientation detector; 14. Crystal rod grinding device; 1401. V-groove grinding device; 1402. External circle and reference surface grinding device; 1403. Grinding guide rail; 1404. Spindle feed slide; 1405. Grinding spindle; 1406. Spindle drive mechanism; 1407. Frame; 1408. Vertical guide rail; 1409. Lifting slide; 1410. Lifting cylinder; 15. Processing detection device. DETAILED DESCRIPTION

[0105] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0106] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is by no means intended to limit the present invention and its application or use. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0107] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprising" and / or "including" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0108] Unless otherwise specifically stated, the relative arrangement of the parts and steps described in these embodiments, the numerical expressions and numerical values ​​do not limit the scope of the present invention. At the same time, it should be clear that, for ease of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. The technology, methods and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be regarded as part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0109] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention: the directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0110] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below their position devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0111] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0112] like Figures 1 to 10 As shown, a semiconductor crystal rod rolling grinding machine tool comprises:

[0113] Machine tool base 1;

[0114] A crossbeam 2, which is arranged above the machine tool base 1 and extends in a direction parallel to the length direction of the machine tool base 1;

[0115] A Z-axis feed slide 3 is mounted on the crossbeam 2 and is slidably connected to the crossbeam 2;

[0116] A Z-axis feed drive device 4 is installed on the crossbeam 2 and is used to drive the Z-axis feed slide 3 to move horizontally along the extension direction of the crossbeam 2; the Z-axis feed drive device 4 can use a lead screw, the output end of the lead screw is connected to the Z-axis feed slide 3, and the input end is connected to the motor;

[0117] A clamping assembly 5 is installed at the bottom of the Z-axis feed slide 3, and is used to axially clamp the two end faces of the crystal rod and drive the crystal rod to rotate around its axis;

[0118] A feeding guide rail group 6 is installed on the machine tool base 1 and is arranged at the head end of the machine tool base 1, and extends along the width direction of the machine tool base 1; two guide rails are usually used for structural stability;

[0119] A feeding conveying slide 7 is mounted on the feeding guide rail group 6 and is slidably connected to the feeding guide rail group 6;

[0120] The feeding and conveying slide drive mechanism 8 is used to drive the feeding and conveying slide 7 to move horizontally along the extension direction of the feeding guide rail group 6; the feeding and conveying slide drive mechanism 8 can adopt a lead screw, the output end of the lead screw is connected to the feeding and conveying slide 7, and the input end is connected to the motor;

[0121] A detection slide 9 is mounted on the feeding guide rail group 6 and is slidably connected to the feeding guide rail group 6;

[0122] The detection slide drive mechanism 10 is used to drive the detection slide 9 to move horizontally along the extension direction of the feeding guide rail group 6; the detection slide drive mechanism 10 can adopt a lead screw, the output end of the lead screw is connected to the detection slide 9, and the input end is connected to the motor;

[0123] A feeding centering device 11 is installed on the feeding conveying slide 7 and is used to radially clamp the outer wall of the crystal rod and make the axis of the crystal rod parallel to the length direction of the machine tool base 1;

[0124] A blank detection device 12, mounted on the detection slide 9, for detecting the blank size and machining allowance of the crystal rod;

[0125] An X-ray crystal orientation detector 13, installed on the detection slide 9, for detecting the crystal line of the crystal rod; a crystal rod grinding device 14, installed on the side of the machine tool base 1, for grinding the crystal rod; and

[0126] The processing detection device 15 is installed on the crystal rod grinding device 14 and is used to detect the size of the crystal rod after processing. The processing detection device 15 can be a combination of a probe and a cylinder, and the cylinder pushes the probe to extend and retract, and then the probe performs detection.

[0127] The fixture group 5 includes: a Z-axis screw 501, which is installed on the Z-axis feed slide 3, and its input end is connected to the first motor; the axis of the Z-axis screw 501 is parallel to the length direction of the machine tool base. In order to ensure the stability of the movement of the chuck, a guide rail can be set on the Z-axis feed slide 3, and the chuck 502 can be set on the guide rail to slide with the guide rail. Two chucks 502, one of which is connected to the output end of the Z-axis screw 501, and the other is fixedly connected to the bottom of the Z-axis feed slide 3. The chuck 502 can be a chuck provided by application number [2020217826293] or [201820892877X]; the chuck 502 fixed at the bottom of the Z-axis feed slide 3 is connected to the motor and the harmonic reducer 503, and the motor and the harmonic reducer 503 are used to drive this chuck 502 to rotate around its axis.

[0128] The crystal rod grinding device 14 includes a V-groove grinding device 1401 and at least one outer circle and reference surface grinding device 1402, wherein the V-groove grinding device 1401 is used to process a V-groove on the silicon rod, and the outer circle and reference surface grinding device 1402 is used to grind the outer surface of the silicon rod and process a reference plane on the outer surface of the silicon rod, and the V-groove grinding device 1401 and the outer circle and reference surface grinding device 1402 are arranged opposite to each other. When multiple outer circle and reference surface grinding devices 1402 are used, multiple outer circle and reference surface grinding devices 1402 are arranged side by side, and one of them can be used alone for rough grinding, one of them can be used alone for fine grinding, and one of them can be used alone for grinding the reference surface. Alternatively, one outer circle and reference surface grinding device 1402 can be used.

[0129] Preferably, the V-groove grinding device 1401 and the outer circle and reference surface grinding device 1402 both include: a grinding guide rail 1403, the extension direction of which is the width direction of the machine tool base 1; a spindle feed slide 1404, which is mounted on the grinding guide rail 1403 and slidably cooperates with the grinding guide rail 1403; a spindle screw, the output end of which is connected to the spindle feed slide, and the input end of which is connected to a motor for driving the spindle feed slide 1404 to move horizontally along the grinding guide rail 1403; and a grinding spindle 1405, which is mounted on the spindle feed slide 1404 and the input end of which is connected to a spindle drive mechanism 1406. The spindle drive mechanism 1406 can use a motor with a pulley, and then connect the input end of the grinding spindle through a belt to realize the rotation of the grinding spindle.

[0130] Preferably, the grinding spindle 1405 of the outer circle and reference surface grinding device 1402 is installed on the spindle feeding slide 1404 through a vertical feeding mechanism, and the vertical feeding mechanism includes: a frame 1407, which is vertically fixed on the spindle feeding slide 1404; a vertical guide rail 1408, which is installed on the inner wall of the frame 1407; a lifting slide 1409, which is slidably matched with the vertical guide rail 1408, and the grinding spindle 1405 is installed on the lifting slide 1409; and a lifting cylinder 1410, which is installed on the spindle feeding slide 1404, and its input end is connected to the lifting slide 1409. The processing detection device 15 is installed on the lifting slide 1409.

[0131] Preferably, the feeding centering device 11 comprises: two slide rails 1101, the two slide rails 1101 are arranged in parallel and fixed on the feeding conveying slide 7, and the extension direction is parallel to the length direction of the machine tool base 1;

[0132] A silicon rod carrying device, located between the two slide rails 1101, and used for carrying silicon rods;

[0133] Two clamping jaw systems, the extension direction of the two clamping jaw systems is parallel to the width direction of the machine tool base 1, and are used to clamp the silicon rod carried by the silicon rod carrying device; and

[0134] A clamping jaw system driving mechanism, used to drive the two clamping jaw systems to move toward or away from each other along the extension direction of the slide rail 1101;

[0135] The clamping system includes: a slide plate 1102, whose extension direction is parallel to the width direction of the machine tool base 1, and whose bottom is slidably connected to the two slide plate guide rails 1101 through a slide plate slider; a clamping jaw guide rail 1103, located on the slide plate 1102, and whose extension direction is parallel to the width direction of the machine tool base 1; two clamping jaws 1104, whose bottoms are slidably connected to the clamping jaw guide rails 1103 through clamping jaw sliders, and whose opposite surfaces have a V-shaped clamping mouth; and a clamping jaw driving mechanism, located on the slide plate 1102, and used to drive the two clamping jaws 1104 to move toward or away from each other along the extension direction of the clamping jaw guide rails.

[0136] Preferably, the clamp driving mechanism is a second left-right rotating double-nut screw 1105 , two output ends of which are respectively fixedly connected to the two clamps 1104 , and an input end of which is a clamp driving motor 1106 .

[0137] Preferably, the driving mechanism of the clamping system comprises: a first left-right double-nut screw 1107, whose two output ends are respectively fixedly connected to the bottoms of the two slides 1102, and whose input end is a hand wheel 1108 or a first motor;

[0138] Preferably, the silicon rod carrying device comprises: a tray 1109, the tray 1109 is located above the slide 1102, and the extension direction is parallel to the length direction of the machine tool base 1, the two ends of the tray 1109 have vertical plates extending vertically downward, and the length of the tray 1109 is greater than or equal to the length of the slide rail 1101; a crystal support 1110, fixed on the top of the tray 1109, used to carry the silicon rod; a first horizontal plate 1111, fixed on the vertical plate; a second horizontal plate 1112 , located below the first transverse plate 1111, and fixedly connected to the loading and conveying slide 7; a plurality of sliding guide rods 1113, vertically passing through the first transverse plate 1111 and the second transverse plate 1112; a plurality of first springs 1114, sleeved on the portion of the sliding guide rods 1113 located between the first transverse plate 1111 and the second transverse plate 1112; and two limit blocks 1115, respectively fixed on the lower surface of the first transverse plate 1111 and the upper surface of the second transverse plate 1112, for limiting.

[0139] The first left-right double-nut screw 1107 is connected to the slide plate 1102 via a floating buffer mechanism;

[0140] The floating buffer mechanism includes: a screw fixing seat 1116, which is fixed to the middle part of the slide 1102, and the middle part of the screw of the first left-right double-nut screw 1107 is connected to the slide 1102 through the screw fixing seat 1116; a fixing seat 1117, which is located next to the screw fixing seat 1116 and is fixedly connected to the feeding and conveying slide 7; a guide bolt 1118, whose extension direction is parallel to the length direction of the machine tool base 1, and its end away from the screwing end passes through the fixing seat 1117 and is fixedly connected to the screw fixing seat 1116; and a second spring 1119, which is sleeved on the guide bolt 1118, one end of which is connected to the fixing seat 1117, and the other end is connected to the screw fixing seat 1116.

[0141] Preferably, the clamp system also includes: a clamp open position feedback mechanism; the clamp open position feedback mechanism includes: a screw bearing seat 1120, which is fixed to one end of the slide 1102 and is close to the clamp drive motor 1106, and one end of the screw of the second left-right double-nut screw 1105 is connected to the slide 1102 through the screw bearing seat 1120; a clamp open position trigger switch 1121, which is installed on the screw bearing seat 1120, and when the two clamps 1104 move apart to the maximum stroke, the clamp 1104 close to the clamp open position trigger switch 1121 touches the clamp open position trigger switch 1121 to turn on.

[0142] Preferably, the V-shaped clamp has a vertical surface 1122 at the inner end of its opening. A silicon rod detection mechanism is installed on the vertical surface 1122; the silicon rod detection mechanism includes: a mounting groove 1123, which is machined in the vertical surface 1122 and extends toward the outer end of the opening of the clamp; a piston 1124, whose outer diameter matches the inner diameter of the mounting groove 1123, is partially located in the mounting groove 1123, and partially passes through the notch of the mounting groove 1123; a piston rod 1125, which is parallel to the width direction of the machine tool base 1, one end of which passes through the bottom of the mounting groove 1123 and is fixedly connected to the piston 1124; a third spring A spring 1126 is located in the mounting groove 1124 and is sleeved on the piston rod 1125. One end of the spring 1126 is connected to the piston 1124 and the other end is connected to the bottom of the mounting groove 1123, and is used for resetting the piston rod 1125. A trigger switch 1127 is installed on the side of the clamp 1104 where the clamp does not have the clamping opening and is close to the other end of the piston rod 1125. After the clamp 1104 clamps the silicon rod, the piston rod 1125 moves, and the other end of the piston rod 1125 triggers the trigger switch 1127.

[0143] Preferably, the installation slots 1123 on each vertical surface 1122 are located at different positions, or the lengths of the notches of each piston 1124 passing through the installation slots 1123 are different. Alternatively, a contact displacement sensor is installed on the vertical surface 1122 to replace the silicon rod detection mechanism.

[0144] Preferably, the blank detection device 12 comprises a detection cylinder 1201 fixed on the detection slide 9, the output end of the detection cylinder 1201 is connected to a mounting plate 1203 through a detection bracket 1202, and the mounting plate 1203 is slidably connected to a detection guide rail 1204 fixed on the detection slide 9, and the extension direction of the detection guide rail 1204 is parallel to the width direction of the machine tool base 1;

[0145] A probe 1205 is installed on the installation plate 1203, and the output end of the probe 1205 is connected to a guide wheel shaft 1206, the guide wheel shaft 1206 pre-presses the probe 1205, and a guide wheel 1207 is installed at the end of the guide wheel shaft 1206 away from the probe 1205, the extension direction of the guide wheel shaft 1206 coincides with the extension direction of the probe 1205, and the extension direction of the probe 1205 is parallel to the width direction of the machine tool base 1, and the installation plate 1203 is provided with a guide wheel shaft anti-rotation mechanism at the location of the guide wheel shaft 1206, which is used to prevent the guide wheel shaft 1206 from rotating around its axis.

[0146] Preferably, a plane is processed on the side wall of the guide wheel shaft 1206; the guide wheel shaft 1206 anti-rotation mechanism includes a mounting seat 1208 fixed on the mounting plate 1203, and a groove is processed on one end of the mounting seat 1208 facing the guide wheel 1207, and the guide wheel shaft 1206 axially passes through the bottom of the groove, and threaded holes are respectively provided on the four walls of the groove, and a fixing bolt 1209 is provided in one of the threaded holes or in two of the threaded holes arranged opposite to each other, and the fixing bolt 1209 cooperates with the plane to prevent the guide wheel from rotating. The wheel shaft 1206 rotates around its axis, and after the set bolt 1209 is pressed against the plane, it rotates back to ensure the smooth extension and contraction of the guide wheel shaft 1206; a return spring 1210 is provided in the groove and sleeved on the guide wheel shaft 1206, and one end of the return spring 1210 is connected to one end of the guide wheel shaft 1206 with the guide wheel 1207, and the other end of the return spring 1210 is connected to the groove bottom of the groove, and the outer diameter of one end of the guide wheel shaft 1206 with the guide wheel 1207 matches the inner diameter of the groove. A guide wheel shaft mounting screw 1211 is fixed to one end of the guide wheel shaft 1206 passing through the mounting seat 1208, and the guide wheel shaft mounting screw 1211 is in contact with the output end of the probe 1205 and pre-presses the probe 1205.

[0147] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A semiconductor crystal rod tumbling machine tool, characterized in that: include: Machine tool base; A crossbeam, which is arranged above the machine tool base and extends in a direction parallel to the length direction of the machine tool base; A Z-axis feed slide is mounted on the crossbeam and is slidably connected to the crossbeam; A Z-axis feed drive device, mounted on the crossbeam, for driving the Z-axis feed slide to move horizontally along the extension direction of the crossbeam; A clamping assembly is installed at the bottom of the Z-axis feed slide, and is used to axially clamp the two end faces of the crystal rod and drive the crystal rod to rotate around its axis; A feeding guide rail assembly is installed on the machine tool base and is arranged at the head end of the machine tool base, and extends along the width direction of the machine tool base; A feeding conveying slide is installed on the feeding guide rail group and is slidably connected to the feeding guide rail group; A feeding conveying slide driving mechanism, used for driving the feeding conveying slide to move horizontally along the extension direction of the feeding guide rail group; A detection slide, mounted on the feeding guide rail assembly and slidably connected to the feeding guide rail assembly; A detection slide drive mechanism, used for driving the detection slide to move horizontally along the extension direction of the feeding guide rail group; A feeding centering device, installed on the feeding conveying slide, is used to radially clamp the outer wall of the crystal rod and make the axis of the crystal rod parallel to the length direction of the machine tool base; A blank detection device is installed on the detection slide and is used to detect the blank size and machining allowance of the crystal rod; the blank detection device includes a detection cylinder fixed on the detection slide, the output end of the detection cylinder is connected to a mounting plate through a detection bracket, and the mounting plate is slidably connected to a detection guide rail fixed on the detection slide, and the extension direction of the detection guide rail is parallel to the width direction of the machine tool base; a probe is installed on the mounting plate, the output end of the probe is connected to a guide wheel shaft, the guide wheel shaft pre-presses the probe, and a guide wheel is installed at the end of the guide wheel shaft away from the probe, the extension direction of the guide wheel shaft coincides with the extension direction of the probe, and the mounting plate is provided with a guide wheel shaft rotation prohibition machine at the location of the guide wheel shaft The guide wheel shaft has a first end and a second end which are connected to the guide wheel shaft via a cam, the second end of the guide wheel shaft having a first end and a second end which are connected to the guide wheel shaft via a cam. An X-ray crystal orientation detector, mounted on the detection slide, for detecting the crystal lines of the crystal rod; A crystal rod grinding device, installed on the side of the machine tool base, for grinding the crystal rod; as well as A processing detection device, installed on the crystal rod grinding device, used to detect the size of the crystal rod after processing; The fixture set comprises: A Z-axis lead screw, which is mounted on the Z-axis feed slide, and an input end of which is connected to the first motor; Two chucks, one of which is connected to the output end of the Z-axis lead screw, and the other chuck is fixedly connected to the Z-axis feed slide; and The motor and the harmonic reducer are connected to the chuck fixed on the Z-axis feed slide and are used to drive the chuck to rotate around its axis.

2. A semiconductor crystal rod tumbling machine tool according to claim 1, characterized in that: The crystal rod grinding device includes a V-groove grinding device and at least one outer circle and reference surface grinding device. The V-groove grinding device is used to process a V-groove on a silicon rod, and the outer circle and reference surface grinding device is used to grind the outer surface of the silicon rod and process a reference plane on the outer surface of the silicon rod.

3. A semiconductor crystal rod tumbling machine tool according to claim 2, characterized in that: The V-groove grinding device and the outer circle and reference surface grinding device both include: A grinding guide rail, the extension direction of which is the width direction of the machine tool base; A spindle feed slide is mounted on the grinding guide rail and slidably cooperates with the grinding guide rail; A spindle screw, whose output end is connected to the spindle feed slide, and whose input end is connected to a motor for driving the spindle feed slide to move horizontally along the grinding guide rail; and The grinding spindle is mounted on the spindle feed slide, and the input end of the grinding spindle is connected with a spindle drive mechanism.

4. A semiconductor crystal ingot tumbling machine tool according to claim 3, characterized in that: The grinding spindle of the outer circle and reference surface grinding device is installed on the spindle feeding slide through a vertical feeding mechanism, and the vertical feeding mechanism includes: A frame, vertically fixed on the spindle feed slide; A vertical guide rail mounted on the inner wall of the frame; A lifting slide is slidably matched with the vertical guide rail, and the grinding spindle is installed on the lifting slide and The lifting cylinder is installed on the spindle feed slide, and its input end is connected to the lifting slide.

5. The semiconductor crystal ingot tumbling machine tool according to claim 1, characterized in that: The feeding centering device includes: two slide rails, the two slide rails are arranged in parallel and fixed on the feeding conveying slide, and the extension direction is parallel to the length direction of the machine tool base; it also includes two clamping jaws, the bottoms of the two clamping jaws are slidably connected to the clamping jaw rails through clamping jaw sliders, and the opposite surfaces of the two clamping jaws have a V-shaped clamping mouth; the V-shaped clamping mouth has a vertical surface at the inner end of its opening, and a silicon rod detection mechanism is installed on the vertical surface; the silicon rod detection mechanism includes: a mounting groove, which is processed in the vertical surface and the opening extends toward the outer end of the opening of the clamping mouth; a piston, whose outer diameter is the same as that of the mounting groove The inner diameter of the clamp is matched, part of which is located in the mounting groove and part of which passes through the notch of the mounting groove; the piston rod is parallel to the width direction of the machine tool base, and one end of the piston rod passes through the bottom of the mounting groove and is fixedly connected to the piston; the third spring is located in the mounting groove and sleeved on the piston rod, one end of which is connected to the piston and the other end is connected to the bottom of the mounting groove, and is used for resetting the piston rod; and the trigger switch is installed on the side of the clamp without the clamping opening and close to the other end of the piston rod; after the clamp clamps the silicon rod, the piston rod moves, and the other end of the piston rod triggers the trigger switch; A silicon rod carrying device, located between the two slide rails, and used for carrying the silicon rod; Two clamping jaw systems, the extension directions of the two clamping jaw systems are parallel to the width direction of the machine tool base, and are used to clamp the silicon rod carried by the silicon rod carrying device; and A clamping jaw system driving mechanism, used for driving the two clamping jaw systems to move toward or away from each other along the extension direction of the slide rail; The clamping system comprises: A slide plate, the extension direction of which is parallel to the width direction of the machine tool base, and the bottom of which is slidably connected to the two slide rails via a slide block; A clamping jaw guide rail is located on the slide plate, and its extension direction is parallel to the width direction of the machine tool base; And a clamping jaw driving mechanism is located on the slide plate and is used to drive the two clamping jaws to move toward or away from each other along the extension direction of the clamping jaw guide rail.

6. A semiconductor crystal ingot tumbling machine tool according to claim 5, characterized in that: The silicon rod supporting device comprises: A tray, the tray is located above the slide, and the extension direction is parallel to the length direction of the machine tool base, both ends of the tray have vertical plates extending vertically downward, and the length of the tray is greater than or equal to the length of the slide rail; A crystal support, fixed on the top of the tray, for carrying the silicon rod; A first horizontal plate, fixed to the vertical plate; A second transverse plate, located below the first transverse plate and fixedly connected to the loading and conveying slide; A plurality of sliding guide rods vertically passing through the first transverse plate and the second transverse plate; A plurality of first springs, sleeved on a portion of the sliding guide rod between the first transverse plate and the second transverse plate; and Two limiting blocks are respectively fixed on the lower surface of the first transverse plate and the upper surface of the second transverse plate for limiting.

7. The semiconductor crystal ingot tumbling machine tool according to claim 5, characterized in that: The clamping jaw system driving mechanism comprises: A first left-right double-nut screw, whose two output ends are respectively fixedly connected to the bottoms of the two slides, and whose input end is a hand wheel or a first motor; The first left-right double-nut lead screw is connected to the slide plate via a floating buffer mechanism; The floating buffer mechanism comprises: A screw fixing seat is fixed to the middle part of the slide plate, and the middle part of the screw of the first left-right double-nut screw is connected to the slide plate through the screw fixing seat; A fixed seat, which is located beside the screw fixed seat and is fixedly connected to the feeding conveying slide; A guide bolt, the extension direction of which is parallel to the length direction of the machine tool base, and the end of which, away from the screwing end, passes through the fixing seat and is fixedly connected to the screw fixing seat; and The second spring is sleeved on the guide bolt, one end of which is connected to the fixing seat, and the other end of which is connected to the lead screw fixing seat.

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