Tower lift, tower lift driving method and machine-readable medium

Abstract

The present invention relates to a tower lift, a tower lift driving method, and a machine-readable medium. A tower lift includes: a track module extending in a vertical direction; a plurality of carriage modules movable along the track module, each having a carriage for transporting an object; and an interference avoidance module for preventing travel interference between the carriage modules moving along the track module.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to and the benefit of Korean Patent Application No. 10-2020-0038542, filed on March 30, 2020, in the Korean Intellectual Property Office, the entire contents of which are incorporated herein by reference. Technical Field

[0003] Embodiments of the inventive concept described herein relate to a tower lift, a tower lift driving method, and a machine-readable medium, and more particularly, to a tower lift for transporting objects in a vertical direction in a multi-story building, a method for driving the tower lift, and a machine-readable medium. Background Art

[0004] Typically, semiconductor or display production lines have multiple layers. Facilities for performing processes such as deposition, exposure, etching, ion implantation, and cleaning may be located on these layers. These facilities may repeatedly perform a series of unit processes on semiconductor wafers (used as semiconductor substrates) or glass substrates (used as display substrates).

[0005] Objects such as semiconductor wafers or glass substrates may be transported between levels of a semiconductor production line by a tower lift that is mounted vertically through the levels of the semiconductor production line.

[0006] A tower lift has a carriage module for transporting objects and a rail module for vertically guiding the carriage module. The rail module is equipped with a drive belt, such as a timing belt, for raising and lowering the carriage module. The timing belt is coupled to the carriage module and moves the carriage module up and down. However, driving the timing belt in a tower lift can generate particles. For example, the timing belt can be driven by friction with a pulley, and particles can be generated by the friction between the timing belt and the pulley.

[0007] In a tower lift, one carriage module is coupled to one timing belt. This is because when multiple carriage modules are coupled to one timing belt, all of the carriage modules are raised and lowered in the same direction by the timing belt, making it difficult to independently control the movement of the carriage modules. In the case of a tower lift with one carriage module, objects are transported by one carriage module, which may reduce the efficiency of transporting objects between levels of a semiconductor production line. Summary of the Invention

[0008] Embodiments of the inventive concept provide a tower lift for minimizing particles generated when transporting an object, a method for driving the tower lift, and a machine-readable medium.

[0009] In addition, embodiments of the present inventive concept provide a tower lift for operating a plurality of carriage modules that are movable independently of each other, a method for driving the tower lift, and a machine-readable medium.

[0010] Furthermore, embodiments of the present inventive concept provide a tower lift for avoiding travel interference among a plurality of carriage modules when operating the plurality of carriage modules, a method for driving the tower lift, and a machine-readable medium.

[0011] The technical problems to be solved by the present inventive concept are not limited to the above-mentioned problems, and any other technical problems not mentioned herein will be clearly understood by those skilled in the art to which the present inventive concept pertains from the following description.

[0012] According to one embodiment, a tower lift includes: a track module extending in a vertical direction; a plurality of carriage modules movable along the track module, each carriage module having a carriage for transporting objects; and an interference avoidance module avoiding travel interference between the carriage modules moving along the track module.

[0013] According to one embodiment, the carriage module may be movable along the track module in a magnetically suspended manner.

[0014] According to one embodiment, the interference avoiding module may include: a plurality of rails having a shape capable of being combined with the rail module; a body having the rails mounted thereon; and a driving part that moves the body in a horizontal direction.

[0015] According to one embodiment, the rails may have a longitudinal direction parallel to the vertical direction and may be mounted on the body so as to be spaced apart from each other in a horizontal direction.

[0016] According to an embodiment, the track module may be divided into at least two sections, and the interference avoidance module may be provided between the sections of the track module.

[0017] According to one embodiment, the tower lift may further include a controller, and when travel interference is predicted to occur between a first bracket module, which is one of the bracket modules, and a second bracket module, which is another of the bracket modules, the controller may control the driving component and the bracket module so that one of the first bracket module and the second bracket module moves to one of the multiple tracks coupled to the bracket module, and the main body moves in a horizontal direction so that another track of the multiple tracks is coupled to the track module.

[0018] According to one embodiment, when another track is combined with the track module, the controller can control the driving component and the bracket module so that the other of the first bracket module and the second bracket module moves along the other track and the main body moves in the horizontal direction so that one track is combined with the track module.

[0019] According to one embodiment, the track module may include a frame extending vertically and a linear motor coil mounted on the frame. Each of the carriage modules may include a linear motor magnet coupled to the carriage and interacting with the linear motor coil to vertically move the carriage.

[0020] According to an embodiment, the linear motor coil may include a plurality of linear motor coils mounted on a frame so as to be spaced apart from each other in a vertical direction.

[0021] According to one embodiment, the track module may further include at least one guide rail mounted on the frame, the carriage module may further include a guide member moving along the guide rail, and the guide rail and the guide member may be spaced apart from each other by a magnetic repulsive force.

[0022] According to one embodiment, the track module may further include a power transmitter, and the bracket module may further include a power receiver, wherein the power receiver receives power transmitted by the power transmitter, and the power transmitter may transmit power to the power receiver in a contactless manner.

[0023] According to one embodiment, a method for driving a tower elevator is provided, wherein a plurality of bracket modules that transport containers having objects received therein move along a track module extending in a vertical direction, and when travel interference is predicted to occur between a first bracket module that is one of the bracket modules and a second bracket module that is another of the bracket modules, one of the first bracket module and the second bracket module moves to an interference avoiding module, the interference avoiding module having a plurality of tracks that can be combined with the track module, and a position of one of the tracks combined with the track module is changed so that the one bracket module moved to the interference avoiding module moves laterally.

[0024] According to one embodiment, when the position of one track is completely changed, another track among the tracks may be combined with the track module.

[0025] According to one embodiment, the other of the first carriage module and the second carriage module may be movable along the other rail and the rail module when the other rail is combined with the rail module.

[0026] According to one embodiment, the carriage module may be movable along the track module in a magnetically suspended manner.

[0027] According to one embodiment, a machine-readable medium for storing a program for execution by at least one controller is provided, wherein the program includes a set of instructions for implementing a method for driving a tower lift. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The above and other objects and features will become apparent from the following description with reference to the following drawings, in which like reference numerals refer to like parts throughout the various drawings unless otherwise specified, and in which:

[0029] Figure 1 is a schematic diagram illustrating a semiconductor production line in which a tower lift according to an embodiment of the present inventive concept is installed;

[0030] Figure 2 is a perspective view illustrating a track module and a bracket module of a tower lift according to an embodiment of the present inventive concept;

[0031] Figure 3 is a horizontal cross-sectional view illustrating a rail module and a carriage module of a tower lift according to an embodiment of the present inventive concept;

[0032] Figure 4 is a view illustrating an interference avoidance module of a tower lift according to an embodiment of the present inventive concept;

[0033] Figure 5is a flow chart illustrating a method for driving a tower lift according to an embodiment of the present inventive concept;

[0034] Figures 6 to 11 It shows Figure 5 A view of a tower lift driving method; and

[0035] Figure 12 is a view illustrating a rail module and an interference avoiding module of a tower lift according to another embodiment of the present inventive concept. DETAILED DESCRIPTION

[0036] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention. However, the present invention can be implemented in various forms and is not limited to the embodiments described herein. In addition, when describing embodiments of the present invention, when a detailed description related to a known function or configuration may unnecessarily obscure the subject matter of the present invention, the detailed description will be omitted. In addition, throughout the drawings, components that perform similar functions and operations are provided with the same reference numerals.

[0037] The terms "include" and "comprise" in the specification are "open" expressions, which are intended only to indicate the presence of corresponding components and, unless otherwise specifically stated, do not exclude the possibility of including additional components. In particular, it should be understood that the terms "include," "comprising," and "having," when used herein, specifically refer to the presence of the stated features, integers, steps, operations, components, and / or parts, but do not exclude the presence or addition of one or more other features, integers, steps, operations, components, parts, and / or groups thereof.

[0038] Unless otherwise specified, terms in the singular may include plural forms. In addition, in the drawings, the shapes and sizes of components may be exaggerated for clarity of illustration.

[0039] The tower lift according to this embodiment can be used to transport objects. In particular, the tower lift according to this embodiment can transport a container having an object received therein. The object can be a wafer, a glass substrate, or a reticle. The container having the object received therein can be a front opening unified pod (FOUP). Alternatively, the container having the object received therein can be a POD. In another case, the container having the object received therein can be a magazine having a plurality of printed circuits received therein, a tray having a plurality of semiconductor packages received therein, or the like.

[0040] Figure 1Schematic diagram showing a semiconductor production line in which a tower lift according to an embodiment of the present invention is installed. Figure 1 The semiconductor production line 10 may have a multi-layer structure. For example, the semiconductor production line 10 may have a first layer 11, a second layer 12, and a third layer 13. However, this is not limited thereto, and the multi-layer structure of the semiconductor production line 10 may be modified in various forms.

[0041] The tower elevator 100 , the container stocker 200 , the transport rail 300 , and a semiconductor manufacturing apparatus (not shown) that performs a semiconductor manufacturing process may be provided in the semiconductor production line 10 .

[0042] The tower lift 100 can transport containers F, each containing an object, between levels 11, 12, and 13 of the semiconductor production line 10. The tower lift 100 may include a stage module 120, a track module 140, a carriage module 160, and an interference avoidance module 180.

[0043] The stage modules 120 may be installed on the floors of the floors 11, 12, and 13 of the semiconductor production line 10, respectively. The stage modules 120 may be coupled to the transport rails 300 that transport the containers F to the container stocker 200. When the tower lift 100 transports the containers F to the floors 11, 12, and 13, the containers F transported to the floors 11, 12, and 13 may be transported to the container stocker 200 via the transport rails 300.

[0044] The track module 140 may extend in a vertical direction. The track module 140 may extend vertically between at least two layers of the semiconductor production line 10. The track module 140 may guide the movement of the carriage module 160 to be described later. In addition, the track module 140 may enable the carriage module 160 to be described later to move vertically.

[0045] The carriage module 160 may be configured to be movable along the track module 140. For example, the carriage module 160 may be configured to be movable in a vertical direction along the track module 140. The carriage module 160 may have a carriage 162 for transporting an object. The carriage module 160 may include a plurality of carriage modules. For example, the carriage module 160 may include a first carriage module 160a and a second carriage module 160b. Although Figure 1 An example in which the carriage module 160 includes two carriage modules 160 a and 160 b is shown, but the number of carriage modules may be modified in various ways.

[0046] The carriage modules 160a and 160b may have a mounting frame on which the container F receiving the object is mounted. Alternatively, the carriage modules 160a and 160b may have a robot that grips the container F. The carriage modules 160a and 160b may be modified in various structures capable of moving the container F.

[0047] The interference avoidance module 180 may be configured to avoid travel interference between the carriage modules 160a and 160b moving along the track module 140. At least one interference avoidance module 180a may be provided. For example, an interference avoidance module 180 may be provided for each of the layers 11, 12, and 13 of the semiconductor production line 10. However, without limitation thereto, an interference avoidance module 180 may be provided for some of the layers 11, 12, and 13. Alternatively, the track module 140 may be divided into at least two sections, and the interference avoidance module 180 may be provided between the sections of the track module 140.

[0048] Hereinafter, the track module 140, the bracket module 160, and the interference avoidance module 180 according to an embodiment of the present inventive concept will be described in detail. The structures and functions of the first bracket module 160a and the second bracket module 160b described above may be the same or similar to each other. The structure and function of the bracket module 160 to be described later may be equally or similarly applied to the first bracket module 160a and the second bracket module 160b.

[0049] Figure 2 is a perspective view illustrating a rail module and a bracket module of a tower lift according to an embodiment of the present inventive concept. Figure 3 is a horizontal cross-sectional view illustrating a rail module and a bracket module of a tower lift according to an embodiment of the present inventive concept.

[0050] Reference Figure 2 and Figure 3 The track module 140 may include a frame 142 , a linear motor coil 144 , a guide rail 146 , and a power transmitter 148 .

[0051] The frame 142 may extend in a vertical direction. The frame 142 may have a longitudinal direction parallel to the vertical direction. The frame 142 may be fixed to the wall W of the semiconductor production line 10. The linear motor coil 144, the guide rail 146, and the power transmitter 148, which will be described later, may be coupled to the frame 142. The frame 142 may have an "H" shape as a whole when viewed from above. However, this is not limited to this, and the shape of the frame 142 may be modified in various ways.

[0052] The linear motor coil 144 can interact with the linear motor magnet 164, which will be described later, to move the carriage 162 in the vertical direction. The interaction can be caused by magnetic force generated by the linear motor coil 144 and / or the linear motor magnet 164. The linear motor coil 144 can be mounted on the frame 142. The linear motor coil 144 can be mounted on the surface of the frame 142 that faces the carriage module 160 when viewed from above. A pair of linear motor coils 144 can be provided. The pair of linear motor coils 144 can be spaced apart from each other. The linear motor magnet 164, which will be described later, can be inserted between the pair of linear motor coils 144 that are spaced apart from each other.

[0053] An interface line (not shown) such as a power line may be connected to the linear motor coil 144. In addition, a plurality of pairs of linear motor coils 144 may be provided. The plurality of pairs of linear motor coils 144 may be mounted on the frame 142 so as to be spaced apart from each other in the vertical direction in which the frame 142 extends.

[0054] The guide rail 146 can limit some degrees of freedom of the carriage module 160. In addition to the translational freedom of the carriage module 160 in the vertical direction, the guide rail 146 can also limit the remaining degrees of freedom. The guide rail 146 can be separated from the guide member 166 of the carriage module 160 to be described later by a magnetic repulsive force. An interface line (not shown) such as a power line can be connected to the guide rail 146. In addition, the guide rail 146 or the guide member 166 can be configured with a gap sensor (not shown), and the magnetic force can be controlled based on the measurement value measured by the gap sensor. Accordingly, the gap between the guide rail 146 and the guide member 166 can be controlled to be substantially constant.

[0055] One or more guide rails 146 may be provided. For example, a plurality of guide rails 146 may be provided. One of the guide rails 146 may be mounted on one surface of the frame 142, and another of the guide rails 146 may be mounted on an opposite surface of the frame 142. For example, one guide rail 146 may be mounted on a side wall of the frame 142, and another guide rail 146 may be mounted on an opposite side wall of the frame 142. In addition, the longitudinal direction of the guide rails 146 may be parallel to the longitudinal direction of the frame 142.

[0056] The power transmitter 148 can transmit power to the power receiver 168 of the bracket module 160, which will be described later. For example, the power transmitter 148 can be one of the components of a contactless power supply device (HID) that supplies power in a contactless manner. The power transmitter 148 can be mounted on the frame 142. The power transmitter 148 can be mounted on one of the surfaces of the frame 142 on which the guide rail 146 is mounted. For example, the power transmitter 148 can be mounted on one of the side walls of the frame 142 on which the guide rail 146 is mounted. An interface line (not shown), such as a power line, can be connected to the power transmitter 148.

[0057] The carriage module 160 can transport the container F containing the object. The carriage module 160 can be configured to be movable in the vertical direction along the track module 140. The carriage module 160 can move in the vertical direction along the track module 140 and can transport the container F containing the object to the layers 11, 12, and 13 of the semiconductor production line 10. The carriage module 160 may include a carriage 162, a linear motor magnet 164, connection bodies 165a and 165b, a guide member 166, and a power receiver 168.

[0058] The bracket 162 may have a shape of a mounting frame on which the container F in which the object is received is mounted. The bracket 162 may be provided with a robot (not shown) that grips the container F in which the object is received. Figure 2 , the bracket 2 is shown as a bracket shape having three shelves. However, not limited thereto, the shape of the bracket 162 may be modified in various ways.

[0059] The linear motor magnet 164 may be coupled to the carriage 162. The linear motor magnet 164 may interact with the linear motor coil 144 described above to move the carriage 162 in the vertical direction. The interaction may be caused by magnetic forces generated by the linear motor coil 144 and / or the linear motor magnet 164.

[0060] The linear motor magnet 164 may be inserted between the pair of linear motor coils 144. A portion of the linear motor magnet 164 may be inserted between the pair of linear motor coils 144. For example, the linear motor magnet 164 may have a "T" shape as a whole when viewed from above, and one of the three racks may be inserted between the linear motor coils 144.

[0061] The connecting bodies 165a and 165b can couple the guide member 166 and the power receiver 168 described later to the bracket 162. The connecting bodies 165a and 165b can include a first connecting body 165a and a second connecting body 165b. The first connecting body 165a and the second connecting body 165b can have different shapes. The second connecting body 165b can couple the guide member 166 and the power receiver 168 to the bracket 162. The first connecting body 165a can couple the guide member 166 to the bracket 162.

[0062] The guide members 166 may be coupled to the bracket 162 by the connecting bodies 165a and 165b. Accordingly, when the bracket 162 is moved, the guide members 166 may move along the vertical direction with the bracket 162. Each of the guide members 166 may have a shape that surrounds at least a portion of a corresponding one of the guide rails 146 mounted on the frame 142. The guide members 166 may have a shape that is shaped like a circle when viewed from above. The guide rail 146 can be inserted into the guide member 166. Accordingly, in addition to the translational freedom of the carriage module 160 in the vertical direction, the guide member 166 can work together with the guide rail 146 to limit the remaining degrees of freedom. In addition, the guide rail 146 or the guide member 166 can be equipped with a gap sensor (not shown), and the magnetic force can be controlled based on the measurement value measured by the gap sensor. Accordingly, the gap between the guide rail 146 and the guide member 166 can be controlled to be substantially constant.

[0063] The power receiver 168 can receive power transmitted from the power transmitter 148. The power receiver 168 can be installed to face the power transmitter 148. The power receiver 168 can be one of the components of a contactless power supply device (HID) that supplies power in a contactless manner. The power receiver 168 can be coupled to the bracket 162 through the second connecting body 165b. Accordingly, when the bracket 162 is moved, the power receiver 168 can move along with the bracket 162 in the vertical direction.

[0064] The carriage module 160 according to an embodiment of the present invention may include a linear motor magnet 164, and the linear motor magnet 164 may interact with the linear motor coil 144 to move the carriage 162 along the track module 140. That is, the carriage module 160 according to an embodiment of the present invention may move along the track module 140 in a magnetic levitation manner. Conventional tower lifts utilize friction between a timing belt and pulleys to move the carriage module. In this case, particles may be generated. However, the carriage module 160 according to an embodiment of the present invention may move along the track module 140 in a magnetic levitation manner. Accordingly, particles can be minimized.

[0065] In addition, the carriage module 160 may include a power receiver 168, and the power receiver 168 may receive power from the power transmitter 148 in a contactless manner. That is, the power receiver 168 may receive the power required to drive the carriage module 160 in a contactless manner. Furthermore, in the present invention, the linear motor coil 144 that requires a power cord to be connected may be mounted on the frame 142, and the carriage module 160 may include a linear motor magnet 164 that does not require a power cord to be connected. That is, interface wires such as power cords may all be connected to the components of the track module 140, and no interface wires may be connected to the carriage module 160. In the event that the interface wires are connected to the carriage module 160, the connected interface wires may serve as a component that hinders the operation of the carriage module 160. However, in the present invention, no interface wires are connected to the carriage module 160, and thus the carriage module 160 may be operated more easily.

[0066] In addition, the track module 140 may include a plurality of pairs of linear motor coils 144 mounted on the frame 142 so as to be spaced apart from each other along the longitudinal direction of the frame 142. Accordingly, by changing the current transmitted to a selected one of the plurality of pairs of linear motor coils 144, the controller C may control the carriage modules 160 to be movable independently of each other.

[0067] Figure 4 : is a view showing an interference avoidance module of a tower lift according to an embodiment of the present inventive concept. Figure 4 The interference avoidance module 180 may be installed between the sections into which the track module 140 is divided. The interference avoidance module 180 may be installed on the wall W of the semiconductor production line 10. The interference avoidance module 180 may be configured to avoid travel interference between the plurality of carriage modules 160 moving along the track module 140.

[0068] The interference avoidance module 180 may include a body 182 , rails 184 and 185 , and a drive component 188 .

[0069] The main body 182 can be moved by receiving power from the driving member 188. For example, the driving member 188 can transmit power to the main body 182 and can move the main body 182 in the horizontal direction. The driving member 188 may include an actuator (not shown) and a linear rail. In addition, rails 184 and 185 may be installed on the main body 182.

[0070] Multiple rails 184 and 185 may be provided. Multiple rails 184 and 185 may be mounted on the body 182 so as to be spaced apart from one another in the horizontal direction. For example, the rails 184 and 185 may include a first rail 184 and a second rail 185. The longitudinal direction of the rails 184 and 185 may coincide with the longitudinal direction of the track module 140. For example, the longitudinal direction of the rails 184 and 185 may coincide with the vertical direction. The rails 184 and 185 may have a shape that can be combined with the track module 140. For example, if the first rail 184 is positioned between the at least two sections into which the track module 140 is divided, the first rail 184 may form a portion of the travel path along which the carriage module 160 moves. Similarly, if the second rail 185 is positioned between the at least two sections into which the track module 140 is divided, the second rail 185 may form a portion of the travel path along which the carriage module 160 moves. Additionally, tracks 184 and 185 may include the same or similar components as track module 140 to perform the same or similar functions as track module 140 described above.

[0071] Hereinafter, a method for driving a tower lift 100 according to an embodiment of the present inventive concept will be described in detail. The tower lift 100 according to an embodiment of the present inventive concept may include a controller C, and the controller C may control the operation of the components of the tower lift 100. For example, the controller C may control the operation of the components of the tower lift 100 to perform the tower lift driving method described later. The tower lift driving method described later may be stored in a program executed by at least one controller C. In other words, the program may include a set of instructions for implementing the tower lift driving method described later. The program may be stored in a machine-readable medium.

[0072] Figure 5 is a flowchart illustrating a tower elevator driving method according to an embodiment of the present inventive concept. Figures 6 to 11 It shows Figure 5 A view of the tower lift driving method.

[0073] The tower lift driving method according to an embodiment of the inventive concept can prevent travel path interference between the plurality of carriage modules 160 in a case where the tower lift 100 operates the plurality of carriage modules 160 .

[0074] For example, in a case where a plurality of carriage modules 160 transporting a container F are moved along a track module 140, the tower elevator driving method according to an embodiment of the present inventive concept can predict whether a travel interference occurs between a first carriage module 160a and a second carriage module 160b, the first carriage module being one of the carriage modules 160 and the second carriage module being another of the carriage modules 160 (S10). For example, in a case where the first carriage module 160a and the second carriage module 160b are Figure 6 In the case of movement in opposite directions as shown, the controller C can determine and predict that a travel interference will occur between the first carriage module 160a and the second carriage module 160b.

[0075] When the controller C predicts that a travel interference will occur between the first carriage module 160a and the second carriage module 160b, the controller C may move one of the first carriage module 160a and the second carriage module 160b to the interference avoidance module 180 (S20). Figure 7 As shown, the controller C can move the first bracket module 160a to the first track 184 of the interference avoidance module 180.

[0076] Thereafter, the controller C may control the driving part 188 to move the main body 182 (S30). That is, the controller C may laterally move one of the rails 184 and 185 coupled to the rail module 140. Accordingly, one of the carriage modules moved to the interference avoidance module 180 may laterally move. When the position of one rail is completely changed, the other of the rails 184 and 185 may be coupled to the rail module 140. For example, Figure 8 As shown, controller C can control driving member 184 to horizontally move main body 182, causing first track 184 to deviate from track module 140 and second track 185 to engage track module 140 to form a new travel path. Furthermore, first carriage module 160a positioned on first track 184 can move laterally. At this time, controller C can apply power to linear motor coil 144 on first track 184 to prevent first carriage module 160a from deviating from first track 184.

[0077] When the other track is combined with the track module 140 to form a new travel path, the controller C may control the carriage module 160 so that the other of the first carriage module 160a and the second carriage module 160b moves along the track module 140 and the other track (S40). Figure 9 As shown, when the second rail 185 is combined with the rail module 140 to form a new travel path, the controller C can control the second carriage module 160 b so that the second carriage module 160 b moves along the rail module 140 and the second rail 185 .

[0078] Thereafter, the controller C may control the driving member 188 to move the main body 182 again (S50). Accordingly, one carriage module may move laterally. For example, Figure 10 As shown, the first track 184 on which the first carriage module 160 a is positioned can move laterally and can be combined with the track module 140 to again form a travel path.

[0079] When one track is combined with the track module 140 to form a travel path again, the controller C may control the carriage module 160 so that the one carriage module moves along the track module 140 and the track (S60). Figure 11 As shown, when the first rail 184 is combined with the rail module 140 to form a new travel path, the controller C can control the first carriage module 160 a so that the first carriage module 160 a moves along the rail module 140 and the first rail 184 .

[0080] The above-described tower lift driving method according to an embodiment of the inventive concept can prevent travel interference between the carriage modules 160 that may occur when the tower lift 100 operates a plurality of carriage modules 160 .

[0081] Although it has been illustrated that the track module 140 provides only one travel path, the present invention is not limited thereto. Figure 12 As shown, multiple track modules may be provided. For example, the track modules may include a first track module 140a and a second track module 140b. The first track module 140a and the second track module 140b may provide a travel path along which the carriage module 160 moves. The interference avoidance module 180 may be installed between the sections divided into the first track module 140a and the sections divided into the second track module 140b. The interference avoidance module 180 may include a body 182, a first track 184, a second track 185, and a third track 186. The first track 184, the second track 185, and the third track 186 may be combined with the first track module 140a or the second track module 140b to form a travel path. The interference avoidance module 180 according to other embodiments of the present inventive concept can not only avoid travel interference between the carriage modules 160, but also move the carriage module 160 between the first track module 140a and the second track module 140b.

[0082] Although the tower lift 100 has been illustrated as being provided in the semiconductor production line 10, the tower lift 100 is not limited thereto. For example, the tower lift 100 can be equally or similarly applied to various production lines that need to transport items.

[0083] According to embodiments of the present inventive concept, particles generated when an object is transported may be minimized.

[0084] In addition, according to an embodiment of the inventive concept, a plurality of carriage modules that are movable independently of each other may be operated.

[0085] Furthermore, according to an embodiment of the inventive concept, travel interference among the plurality of carriage modules may be avoided when the plurality of carriage modules are operated.

[0086] Effects of the present inventive concept are not limited to the above-mentioned effects, and any other effects not mentioned herein can be clearly understood by those skilled in the art to which the present inventive concept pertains from this specification and the accompanying drawings.

[0087] The above description illustrates the inventive concept. In addition, the above content describes the embodiments of the inventive concept, and the inventive concept can be used in various other combinations, variations and environments. That is, the inventive concept can be changed or modified without departing from the scope of the inventive concept disclosed in this specification, the equivalent scope of the written disclosure, and / or the technology or knowledge of those skilled in the art. The written embodiment describes the best state of the technical spirit of the inventive concept, and various changes required for the specific application and purpose of the inventive concept can be made. Therefore, the detailed description of the inventive concept is not intended to limit the inventive concept to the disclosed embodiment state. In addition, it should be understood that the appended claims include other embodiments.

[0088] Although the present invention has been described with reference to exemplary embodiments, it will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the present invention. Therefore, it should be understood that the above embodiments are not restrictive, but illustrative.

Claims

1. A tower lift, comprising: A track module, wherein the track module extends in a vertical direction; a plurality of carriage modules, the plurality of carriage modules being configured to be movable along the track module, each carriage module having a carriage configured to transport an object; as well as an interference avoidance module configured to avoid travel interference between the carriage modules configured to move along the track module; wherein the bracket module is movable along the track module in a magnetic suspension manner; Wherein, the interference avoidance module includes: a plurality of rails, each rail having a shape capable of being combined with the rail module; a main body having the track mounted thereon; and a driving member configured to move the main body in a horizontal direction, wherein the track module is divided into at least two sections, and wherein the interference avoidance module is arranged between the segments of the track module; Wherein, the track module includes: a frame extending in the vertical direction; and a linear motor coil mounted on the frame, and wherein each of the carriage modules comprises a linear motor magnet coupled to the carriage and configured to interact with the linear motor coil to move the carriage in the vertical direction; wherein the linear motor coil comprises a plurality of linear motor coils mounted on the frame so as to be spaced apart from each other along the vertical direction, Each of the linear motor coils includes a pair of linear motor coils spaced apart from each other, and The linear motor magnet is inserted between the pair of linear motor coils.

2. The tower lift according to claim 1, wherein: The rails have a longitudinal direction parallel to the vertical direction and are mounted on the body so as to be spaced apart from each other along the horizontal direction.

3. The tower lift according to claim 1, wherein: The tower lift also includes a controller, and When a travel interference is predicted to occur between a first carriage module, which is one of the carriage modules, and a second carriage module, which is another of the carriage modules, the controller controls the driving component and the carriage modules so that: One of the first carriage module and the second carriage module moves to one of the plurality of rails coupled to the rail module; and The main body moves in the horizontal direction, and another rail of the plurality of rails is combined with the rail module.

4. The tower lift according to claim 3, wherein: When another track is combined with the track module, the controller controls the driving component and the carriage module so that: The other of the first carriage module and the second carriage module moves along the other track; and The main body moves in the horizontal direction, and the one rail is combined with the rail module.

5. The tower lift according to claim 1, wherein: The linear motor magnet has a "T" shape when viewed from above.

6. The tower lift according to claim 1, wherein: The track module further comprises at least one guide rail mounted on the frame, Wherein, the bracket module further includes a guide component, the guide component is configured to move along the guide rail, and The guide rail and the guide member are separated from each other by a magnetic repulsive force.

7. The tower lift according to claim 6, wherein: The guide member has a shape, and Wherein, the guide rail is inserted into the guide component.

8. The tower lift according to claim 6, wherein: One of the guide rail and the guide member is equipped with a gap sensor, and Here, based on a measurement value measured by the gap sensor, the gap between the guide rail and the guide member is controlled to be constant.

9. The tower lift according to claim 1, wherein: The track module also includes a power transmitter, The bracket module further includes a power receiver configured to receive power transmitted by the power transmitter, and The power transmitter transmits the power to the power receiver in a contactless manner.

10. A method for driving a tower lift according to any one of claims 1 to 9, wherein: A plurality of carriage modules configured to transport containers having objects received therein move along track modules extending in a vertical direction, and wherein, when a travel interference is predicted to occur between a first carriage module, which is one of the carriage modules, and a second carriage module, which is another of the carriage modules, one of the first carriage module and the second carriage module moves to an interference avoidance module, the interference avoidance module having a plurality of rails capable of being coupled to the rail module, and a position of one of the rails coupled to the rail module is changed so that the one carriage module moved to the interference avoidance module moves laterally; The bracket module moves along the track module in a magnetic suspension manner.

11. The method according to claim 10, wherein: The other one of the tracks is combined with the track module after the position of the one track is completely changed.

12. The method according to claim 11, wherein The other of the first carriage module and the second carriage module moves along the other rail and the rail module when the other rail is combined with the rail module.

13. A machine-readable medium for storing a program for execution by at least one controller, wherein: The program comprises a set of instructions configured to implement the method according to any one of claims 10 to 12.

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