A fully automatic waterway transportation line for unloading grinding machines

Abstract

The invention discloses a fully automatic waterway transportation line for unloading a grinding machine, comprising a fixed base frame, a plurality of conveying rollers fixedly installed on the top of the fixed base frame, an exchange truss and a transport truss respectively arranged on the top of the transporting rollers, a fixed frame slidably installed on one side of the exchange truss and the transport truss respectively, a lifting device slidably connected in the fixed frame, a cylinder movably installed on the bottom of the lifting device, clamping arms fixedly installed on both side ends of the cylinder, a loading water tank movably connected between the clamping arms, the bottom of the loading water tank is frictionally installed on a downloading platform, a loading film box movably installed in the loading water tank, the invention solves the problem of material transmission and transportation in the grinding process, realizes automated management of the process, and improves the degree of automated management of the factory; on the one hand, it realizes automated transportation, and on the other hand, it solves the influence of the grinding disc replacement work of the grinding machine; the loading water tank is clamped by the clamping arm, and is transported to the conveying roller for transportation through the truss.

Description

Technical Field

[0001] The invention relates to the technical field of material unloading and transportation for a grinding machine, and in particular to a fully automatic waterway transportation line for unloading material for a grinding machine. Background Art

[0002] In the semiconductor industry, the performance of each process machine is different, and the wafers are required to be uploaded in a dry state (hereinafter referred to as dry method) or a wet state (hereinafter referred to as wet method). The same applies to the download port. At the same time, the type of wafer carrier to be uploaded will also be required, such as OC cassettes, FOUP boxes, FOSB boxes, single wafers, etc. And with the development and progress of technology, the demand is increasing, the production capacity is also increasing, and the labor required is also increasing accordingly. In order to reduce labor and improve equipment efficiency, factory automation production has become the mainstream of production workshops now.

[0003] When loading in the grinding workshop, a single wafer needs to be mounted on the U-shaped plate slot (special tooling for the machine). When unloading, it needs to be taken out with a suction cup, placed in the plate basket, and soaked. It will then be transported to the next process by the operator. Because the grinding plate weighs more than 1 ton, a 1.5 ton forklift is required for disassembly and replacement. The existing automated transportation line has limited load-bearing capacity. Therefore, we propose a fully automatic waterway transportation line for grinding machine unloading to solve the above problem. Summary of the invention

[0004] The object of the present invention is to provide a fully automatic waterway transport line for unloading a grinding machine to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a fully automatic waterway transport line for unloading a grinding machine, comprising a fixed base frame, a plurality of conveying rollers are fixedly installed on the top of the fixed base frame, an exchange truss and a transport truss are respectively provided on the top of the conveying rollers, a fixed frame is slidably installed on one side of the exchange truss and the transport truss, a lifting device is slidably connected in the fixed frame, a cylinder is movably installed at the bottom of the lifting device, clamping arms are fixedly installed on both side ends of the cylinder, a loading water tank is movably connected between the clamping arms, the bottom of the loading water tank is frictionally installed on the unloading platform, and a loading film box is movably installed in the loading water tank.

[0006] Preferably, the conveying rollers are arranged in two rows in parallel on the top of the fixed base frame and the axis centers of each conveying roller coincide with each other.

[0007] Preferably, a forklift is provided on one side of the fixed chassis, and the forklift has a load capacity of 1.5T and dimensions of the forklift: body length 2140-2670mm, body width 1080-1230mm, lifting height 3000mm, and turning radius 1965-2335mm.

[0008] Preferably, the clamping arms are provided with two and a trapezoidal groove hook is fixedly mounted on the bottom of the two clamping arms on opposite sides, and the opening direction of the trapezoidal groove hook is close to the lifting device.

[0009] Preferably, trapezoidal clamping edges are fixedly installed on the tops of both sides of the loading water tank, and a trapezoidal groove is provided at the bottom of the trapezoidal clamping edge, and the vertical cross-sectional area of ​​the trapezoidal groove is greater than or equal to the vertical cross-sectional area of ​​the trapezoidal groove hook.

[0010] Preferably, a plurality of U-shaped fins are fixedly provided in the film loading box.

[0011] Preferably, the exchange truss and the transport truss are both of U-shaped structure and the minimum height must be higher than 3 meters.

[0012] Compared with the prior art, the beneficial effects of the present invention are: the present invention solves the problem of material transmission and handling in the grinding process, realizes automated management of the process, and improves the degree of automated management of the factory; on the one hand, it realizes automated transportation, and on the other hand, it solves the impact of replacing the grinding disc of the grinding machine; the loading water tank is clamped by the clamping arm, and transported to the conveying roller for transportation through the truss, and the transportation process does not affect the normal work of the grinding disc. The unloading end of the grinding machine is a wet unloading of the sheet basket. During the transportation process, the loaded sheet box is always in a water tank immersed state, so that the process can proceed normally. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the structure of the present invention;

[0014] Figure 2 It is a schematic diagram of the structure of the exchange truss and the transport truss in the present invention;

[0015] Figure 3 For the present invention Figure 1 Schematic diagram of the enlarged structure at point A in the middle.

[0016] In the figure: fixed base frame 1, conveying roller 2, exchange truss 3, forklift 4, handling truss 5, lifting device 6, cylinder 7, clamping arm 8, trapezoidal slot hook 81, fixed frame 9, loading water tank 10, trapezoidal clamping edge 101, handle 102, unloading platform 11, loading film box 12. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0018] See also Figure 1-3The present invention provides a technical solution: a fully automatic waterway transport line for unloading a grinding machine, comprising a fixed base frame 1, a plurality of conveying rollers 2 are fixedly installed on the top of the fixed base frame 1, an exchange truss 3 and a transport truss 5 are respectively provided on the top of the conveying rollers 2, a fixed frame 9 is slidably installed on one side of the exchange truss 3 and the transport truss 5, a lifting device 6 is slidably connected in the fixed frame 9, a cylinder 7 is movably installed at the bottom of the lifting device 6, clamping arms 8 are fixedly installed on both side ends of the cylinder 7, a loading water tank 10 is movably connected between the clamping arms 8, the bottom of the loading water tank 10 is frictionally installed on a downloading platform 11, and a loading film box 12 is movably installed in the loading water tank 10.

[0019] like Figure 1 As shown, the conveying rollers 2 are arranged in two rows on the top of the fixed chassis 1 and the axis of each conveying roller 2 coincides. A forklift 4 is arranged on one side of the fixed chassis 1. The forklift 4 has a load of 1.5T and dimensions of the forklift 4: body length 2140-2670mm, body width 1080-1230mm, lifting height 3000mm, and turning radius 1965-2335mm.

[0020] like Figure 3 As shown, the clamping arms 8 are provided with two and the bottoms of the two clamping arms 8 on opposite sides are fixedly mounted with trapezoidal groove hooks 81 , and the opening direction of the trapezoidal groove hooks 81 is close to the lifting device 6 .

[0021] like Figure 3 As shown, the top of both sides of the loading water tank 10 is fixedly mounted with a trapezoidal clamping edge 101, the bottom of the trapezoidal clamping edge 101 is provided with a trapezoidal groove and the vertical cross-sectional area of ​​the trapezoidal groove is greater than or equal to the vertical cross-sectional area of ​​the trapezoidal groove hook 81. A plurality of U-shaped fins are fixedly arranged in the loading film box 12.

[0022] like Figure 2 As shown, the exchange truss 3 and the transport truss 5 are both of U-shaped structure and the minimum height must be higher than 3 meters.

[0023] Working principle: The present invention pre-arranges a material unloading platform 11 at the unloading port of the grinding machine. The material unloading platform 11 has two stations and a special loading water tank 10 is placed on it. A loading film box 12 is placed in the loading water tank 10 to ensure that the loading film box 12 is always immersed in the water tank. A material handling truss 5 is provided above the material unloading platform 11. The control device on the material unloading platform 11 enables the clamping arm 8 to transport the loading water tank 10 to the conveying roller 2 through the handling truss 5. The transportation end point is pre-set as the loading port of the cleaning machine. Because wet transportation is required, the conveying roller 2 and the handling truss 5 are both provided with double lines, one for transporting a full water tank and the other for transporting an empty water tank. An exchange truss 3 is pre-arranged at the cleaning machine to adjust the transportation lines of the full and empty loading water tanks 10. After the full water tank is transported to the specified position, its height will be lowered. After the handover with the robot next to the washing machine is completed, the empty loading water tank 10 is moved to the transport roller line for reflux transportation through the exchange truss 3.

[0024] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A fully automatic waterway transport line for unloading a grinding machine, comprising a fixed base frame (1), characterized in that: A plurality of conveying rollers (2) are fixedly mounted on the top of the fixed base frame (1), and an exchange truss (3) and a transport truss (5) are respectively arranged on the top of the conveying rollers (2). A fixed frame (9) is slidably mounted on one side of the exchange truss (3) and the transport truss (5), and a lifting device (6) is slidably mounted in the fixed frame (9). A cylinder (7) is movably mounted on the bottom of the lifting device (6), and clamping arms (8) are fixedly mounted on both side ends of the cylinder (7). A loading water tank (10) is movably mounted between the clamping arms (8). The bottom of the loading water tank (10) is frictionally mounted on the unloading platform (11), and a loading film box (12) is movably mounted in the loading water tank (10); the unloading platform (11) is provided at the unloading port of the grinding machine, the unloading platform (11) has two workstations and a dedicated loading water tank (10) is placed on the unloading platform (11), the loading film box (12) is placed in the loading water tank (10), and it is ensured that the loading film box (12) is always immersed in the water tank; a carrying truss (5) is provided above the unloading platform (11), and a gripping arm (8) is controlled by a control device on the unloading platform (11) The loaded water tank (10) is transported to the conveying roller (2) via the transporting truss (5), and the transport destination is pre-set as the loading port of the cleaning machine. Because wet transport is required, the conveying roller (2) and the transporting truss (5) are both provided with double lines, one line for transporting the fully loaded loaded water tank (10), and the other line for transporting the empty loaded water tank (10). An exchange truss (3) is pre-set at the cleaning machine to adjust the transport lines of the fully loaded and empty loaded water tanks (10); after the fully loaded water tank is transported to the specified position, its height will be lowered until it is handed over to the robot next to the cleaning machine. After completion, the empty loading water tank (10) is moved for reflux transportation by exchanging the trusses (3); the two clamping arms (8) are provided with trapezoidal groove hooks (81) fixedly mounted at the bottoms of opposite sides of the two clamping arms (8), and the opening direction of the trapezoidal groove hooks (81) is close to the lifting device (6); trapezoidal clamping edges (101) are fixedly mounted at the tops of both sides of the loading water tank (10), and the bottoms of the trapezoidal clamping edges (101) are provided with trapezoidal grooves, and the vertical cross-sectional area of ​​the trapezoidal grooves is greater than or equal to the vertical cross-sectional area of ​​the trapezoidal groove hooks (81).

2. The fully automatic waterway transportation line for unloading a grinding machine according to claim 1 is characterized by: The conveying rollers (2) are arranged in two rows in parallel on the top of the fixed base frame (1), and the axis centers of each conveying roller (2) coincide with each other.

3. The fully automatic waterway transportation line for unloading a grinding machine according to claim 1 is characterized by: A forklift (4) is provided on one side of the fixed chassis (1). The forklift (4) has a load capacity of 1.5 tonnes and dimensions of the forklift (4): a body length of 2140-2670 mm, a body width of 1080-1230 mm, a lifting height of 3000 mm, and a turning radius of 1965-2335 mm.

4. The fully automatic waterway transportation line for unloading a grinding machine according to claim 1 is characterized by: A plurality of U-shaped fins are fixedly arranged in the film loading box (12).

5. The fully automatic waterway transportation line for unloading a grinding machine according to claim 1 is characterized by: The exchange truss (3) and the transport truss (5) are both of U-shaped structure and their minimum height must be higher than 3 meters.

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