A measuring device and a measuring method for auxiliary standard components of a ground penetrating radar calibration device

Abstract

The present invention provides a measuring device and a measuring method for auxiliary standard components of a ground penetrating radar calibration device. Four linear guides are combined into a portable detachable three-dimensional displacement platform, and the four linear guides are respectively the first to fourth linear guides, the first linear guide and the fourth linear guide are parallel to the Z axis, the second linear guide is parallel to the X axis, and the third linear guide is parallel to the Y axis. The laser interferometer and the linear interferometer are fixed on the second linear guide, and the linear reflector and the reflector fixing device are fixed on the third linear guide, wherein the incident light and the outgoing light of the laser interferometer should be parallel to the Y axis and perpendicular to the measured plate. The present invention realizes the measurement of the motion error in the working direction for compensating the final measurement result, automatically finding the measurement positioning point and automating the measurement process, which ensures the precision and accuracy of the measuring device and greatly shortens the measurement time.

Description

Technical Field

[0001] The invention belongs to the field of geophysical exploration. Background Art

[0002] Ground penetrating radar has become a powerful tool for geophysical exploration due to its many advantages such as high detection resolution and high working efficiency. Especially in recent years, with the rapid development of electronic technology, signal processing technology and computer application technology, ground penetrating radar has been continuously updated and developed, and its application field has been continuously expanded. Radar calibration has become the top priority of radar tracing work.

[0003] The auxiliary standard components of the ground penetrating radar calibration device are an important part of the radar metrology standard. However, it is difficult to measure this equipment, requiring the measurement standard to have high measurement accuracy and good data repeatability, and its value traceability work has not been fully carried out. The industry generally adopts the management system of metrology verification for the value traceability of such instruments and equipment, and the instruments and equipment must have a strict value traceability chain. Therefore, to establish a scientific and complete ground penetrating radar metrology standard, it is necessary to first realize the high-precision and rapid measurement of the auxiliary standard components of the ground penetrating radar calibration device, so as to realize the value traceability transmission. Summary of the invention

[0004] A measuring device for auxiliary standard components of a ground penetrating radar calibration device, characterized in that: four linear guides are combined into a portable and detachable three-dimensional displacement platform, the four linear guides are respectively the first to fourth linear guides, the first linear guide 1 and the fourth linear guide 4 are parallel to the Z axis, the second linear guide 2 is parallel to the X axis, the third linear guide 3 is parallel to the Y axis, a laser interferometer 5 and a linear interferometer 6 are fixed on the second linear guide 2, a linear reflector 7 and a reflector fixing device 8 are fixed on the third linear guide 3, wherein the incident light and the outgoing light of the laser interferometer 5 should be parallel to the Y axis and perpendicular to the measured plate 11.

[0005] A method for applying the measuring device, characterized in that:

[0006] (1) Four linear guides are combined into a portable detachable three-dimensional translation stage, wherein the first linear guide 1 and the fourth linear guide 4 are parallel to the Z axis and move together in the Z axis, the second linear guide 2 is parallel to the X axis and can move in the X axis direction, the third linear guide 3 is parallel to the Y axis and can move in the Y axis direction, wherein the third linear guide 3 can move along the X axis direction with the linear guide 2, and the second linear guide 2 can move along the Z axis direction with the first and fourth linear guides; the laser interferometer 5 and the linear interferometer 6 are fixed on the second linear guide 2 and can move along the X axis direction with the second linear guide 2, the linear reflector 7 and the reflector fixing device 8 are fixed on the third linear guide 3 and can move along the Y axis direction with the third linear guide 3, wherein the incident light and the outgoing light of the laser interferometer 5 should be parallel to the Y axis and perpendicular to the measured plate 11.

[0007] (2) The laser interferometer 5 measures the straightness error of the linear guide 3 in the Y-axis direction through the straightness interferometer 9 and the straightness reflector 10, which is used to compensate for the error of the final thickness measurement result;

[0008] (3) The laser interferometer 5 is initially zeroed through a fixed position, and the linear reflector 7 is inserted into the fixing device 8 through a linear rod. During the measurement process, when the linear rod contacts the surface of the object to be measured, the linear guide rail stops moving. During this process, the relative positions of the laser interferometer 5, the linear interferometer 6, and the linear reflector 7 remain unchanged;

[0009] (4) The linear reflector 6 is placed at the first measured point of the measured plate, and the laser interferometer 5 automatically adjusts its position through the three-dimensional translation stage until the interferometer is in a normal working state, finds the initial measurement position, and places the reflector back into the fixture;

[0010] (5) The laser interferometer will automatically detect multiple measuring points on each measured plate to obtain the flatness of each plane, thereby calculating the average thickness of the measured object. After the measurement is completed, the laser interferometer will automatically return to the initial zero position to facilitate the movement of the measured plate.

[0011] This patent application mainly solves the technical problems of auxiliary standard component measurement of ground penetrating radar calibration device. Mainly include:

[0012] ①Measure the position of the upper and lower surfaces of the object to be measured to obtain the thickness value of the object to be measured. A portable and detachable three-dimensional displacement stage is realized by combining linear guide rails, and a laser interferometer is installed once to generate linear movement in three dimensions. The target mirror is moved to different positions to measure the motion error in the working direction to compensate for the final measurement result, automatically find the measurement positioning point and automate the measurement process, thus ensuring the accuracy of the measuring device;

[0013] ② Design a reflector fixing device so that when the reflector contacts the surface of the object being measured during the measurement process, there will be no squeezing. When contact occurs, the relative positions of the laser interferometer, linear interferometer, and linear reflector remain unchanged, and contact is achieved without affecting the measurement, further ensuring the accuracy of the measurement results.

[0014] ③The entire device solves the problem of high-precision measurement of standard components assisted by three-dimensional laser interferometry automatic measurement of ground-penetrating radar calibration devices, ensuring that the measurement time is greatly shortened during the interference process. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 Measuring device for auxiliary standard components of ground penetrating radar calibration device

[0016] 1, 2, 3, 4 - the first to fourth linear guide rails Linear guide rail 5 - laser interferometer 6 - linear interferometer 7 - linear reflector 8 - fixture 9 - straightness interferometer 10 - straightness reflector 11 - measured plate DETAILED DESCRIPTION

[0017] Four linear guides are combined into a portable detachable three-dimensional displacement stage, the first linear guide 1 and the fourth linear guide 4 are parallel to the Z axis, the second linear guide 2 is parallel to the X axis, the third linear guide 3 is parallel to the Y axis, the laser interferometer 5 and the linear interferometer 6 are fixed on the second linear guide 2, the linear reflector 7 and the reflector fixture 8 are fixed on the third linear guide 3, wherein the incident light and the outgoing light of the laser interferometer 5 should be parallel to the Y axis and perpendicular to the measured plate 11. The above components together constitute the measuring device of the auxiliary standard component of the ground penetrating radar calibration device.

[0018] (1) Four linear guide rails are combined into a portable and detachable three-dimensional translation stage. The position relationship is as follows: Figure 1 As shown, the first linear guide 1 and the fourth linear guide 4 are parallel to the Z axis and move together in the Z axis, the second linear guide 2 is parallel to the X axis and can move in the X axis direction, the third linear guide 3 is parallel to the Y axis and can move in the Y axis direction, wherein the third linear guide 3 can move along the X axis direction with the linear guide 2, and the second linear guide 2 can move along the Z axis direction with the linear guides 1 and 4; the laser interferometer 5 and the linear interferometer 6 are fixed on the second linear guide 2 and can move along the X axis direction with the linear guide 2, the linear reflector 7 and the reflector fixture 8 are fixed on the third linear guide 3 and can move along the Y axis direction with the third linear guide 3, wherein the incident light and the outgoing light of the laser interferometer 5 should be parallel to the Y axis and perpendicular to the measured plate 11. The above components together constitute the measuring device of the auxiliary standard component of the ground penetrating radar calibration device.

[0019] (2) The laser interferometer 5 can measure the straightness error of the linear guide 3 in the Y-axis direction through the straightness interferometer 9 and the straightness reflector 10, which can be used to compensate for the error of the final thickness measurement result;

[0020] (3) The laser interferometer 5 is initially zeroed through a fixed position, and the linear reflector 7 is inserted into the fixing device 8 through a linear rod. During the measurement process, when the linear rod contacts the surface of the object to be measured, the linear guide rail stops moving, and the linear reflector can move to prevent squeezing and deformation with the object to be measured. During this contact process, the relative positions of the laser interferometer 5, the linear interferometer 6, and the linear reflector 7 remain unchanged, which does not affect the measurement result;

[0021] (4) The linear reflector 6 is placed at the first measured point of the measured plate. Since the laser interferometer 5 does not receive the return light signal, it will automatically adjust its position through the three-dimensional translation stage until the interferometer is in a normal working state, finds the initial measurement position, and places the reflector back into the fixing device;

[0022] (5) The laser interferometer will automatically detect multiple measuring points on each measured plate to obtain the flatness of each plane, thereby calculating the average thickness of the measured object. After the measurement is completed, the laser interferometer will automatically return to the initial zero position to facilitate the movement of the measured plate;

[0023] (6) Repeat the above measurement on other test pieces in turn to obtain the thickness value of the auxiliary standard part of the ground penetrating radar calibration device.

[0024] This patent can provide technical support for the measurement of auxiliary standard components of ground-penetrating radar calibration devices. It realizes a portable and detachable three-dimensional displacement stage through a combination of linear guide rails, realizes the use of laser interferometers to generate linear movement in three dimensions at one time, and measures the motion error in the working direction to compensate for the final measurement result, ensuring the accuracy of the measuring device; the flatness of a flat plate surface and different points on the base surface are measured to achieve fully automatic measurement, greatly improving the accuracy while shortening the measurement time; a reflector fixing device is designed, which will not cause extrusion when the reflector contacts the surface of the object to be measured. When contact occurs, the relative positions of the laser interferometer, the spectroscope, and the reflector remain unchanged, and contact is made without affecting the measurement, ensuring the accuracy of the measurement result. The entire device solves the problem of high-precision measurement of auxiliary standard components of ground-penetrating radar calibration devices by three-dimensional laser interference automatic measurement, ensuring that the measurement time is greatly shortened during the interference process.

[0025] A measuring device and a measuring method for auxiliary standard components of a ground penetrating radar calibration device are proposed. A portable and detachable three-dimensional translation stage is realized by combining linear guides, thereby realizing high-precision automatic measurement of three-dimensional laser interference. The motion error of the working direction is measured by a laser interferometer to compensate for the final measurement result, automatically find the measurement positioning point and automate the measurement process, thereby ensuring the accuracy of the measuring device. A reflector fixing device is designed so that no squeezing occurs when the reflector contacts the surface of the object to be measured. When contact occurs, the relative positions of the laser interferometer, the beam splitter and the reflector remain unchanged, and the contact occurs without affecting the measurement, thereby ensuring the accuracy of the measurement result.

Claims

1. A method for measuring auxiliary standard components of a ground penetrating radar calibration device, characterized in that: The device used in the method is specifically as follows: four linear guides are combined into a portable detachable three-dimensional displacement stage, the four linear guides are respectively the first to fourth linear guides, the first linear guide and the fourth linear guide are parallel to the Z axis, the second linear guide is parallel to the X axis, the third linear guide is parallel to the Y axis, a laser interferometer and a linear interferometer are fixed on the second linear guide, and a linear reflector and a reflector fixing device are fixed on the third linear guide, wherein the incident light and the outgoing light of the laser interferometer should be parallel to the Y axis and perpendicular to the measured plate; The steps of this method are as follows: (1) Four linear guides are combined into a portable and detachable three-dimensional translation stage. The first linear guide and the fourth linear guide are parallel to the Z axis and move together in the Z axis. The second linear guide is parallel to the X axis and can move in the X axis direction. The third linear guide is parallel to the Y axis and can move in the Y axis direction. The third linear guide can move along the X axis with the linear guides, and the second linear guide can move along the Z axis with the first and fourth linear guides. The laser interferometer and the linear interferometer are fixed on the second linear guide and can move along the X axis with the second linear guide. The linear reflector and the reflector fixing device are fixed on the third linear guide and can move along the Y axis with the third linear guide. The incident light and the outgoing light of the laser interferometer should be parallel to the Y axis and perpendicular to the measured plate. (2) The laser interferometer measures the straightness error of the linear guide in the Y-axis direction through the straightness interferometer and the straightness reflector, which is used to compensate for the error of the final thickness measurement result; (3) The laser interferometer is initially zeroed at a fixed position, and the linear reflector is inserted into a fixing device through a linear rod. During the measurement process, when the linear rod contacts the surface of the object to be measured, the linear guide stops moving. During this process, the relative positions of the laser interferometer, linear interferometer, and linear reflector remain unchanged; (4) Place the linear reflector at the first measured point of the measured plate. The laser interferometer automatically adjusts its position through the three-dimensional translation stage until the interferometer is in normal working condition. After finding the initial measurement position, place the reflector back into the fixture. (5) The laser interferometer will automatically detect multiple measuring points on each measured plate to obtain the flatness of each plane, thereby calculating the average thickness of the measured object; after the measurement is completed, the laser interferometer will automatically return to the initial zero position to facilitate the movement of the measured plate.

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