Electron gun device

Abstract

The electron gun device is heated to a high temperature in a vacuum to emit electron beams. The surface of the material (108, 125) emitting electron beams is a hydride metal that melts into a liquid when working at a high temperature. The liquid hydride metal is contained in a hollow jacket container (102, 124) that is solid when working at a high temperature as a hydride liquid metal or an unhydride liquid metal. The hydride metal is heated to a high temperature together with the jacket container (102, 124). The hydride liquid metal is exposed from the jacket container (102, 124), forming a liquid surface where gravity, an electric field, and a surface tension of the liquid surface are mutually balanced, and electron beams are emitted from the exposed hydride liquid metal surface.

Description

Technical Field

[0001] The present invention relates to an electron gun device used for an electron beam drawing device, an X-ray generator, an electron beam welding machine, an electron microscope, etc. Background Art

[0002] An electron gun is a source that generates electron beams and is used for the following purposes.

[0003] 1) Electron beam imaging device

[0004] Used to form patterns on glass dry plates in semiconductor manufacturing plants or photoexposure equipment mask manufacturing plants. Since there is no other technology capable of producing patterns, an electron gun that generates electron beams is necessary. About 20 units are sold annually on the world market.

[0005] 2) Electron beam patterning direct lithography device for research and development

[0006] It is used for electron beam direct imaging for various purposes. It is used for semiconductor trial production and micro-MEMS trial production. About several hundred units are produced every year. Here, MEMS is the abbreviation of "Micro Electro Mechanical Systems" in English, which means "Micro Electro Mechanical Systems". It refers to a device with a micron-level structure that integrates mechanical elements such as sensors, actuators, and circuits on semiconductor silicon substrates, glass substrates, and organic materials.

[0007] 3) X-ray generating device

[0008] Electron guns are essential in various X-ray generating devices for medical and industrial use. X-ray devices are used in a variety of fields, such as human body transmission imaging in hospitals, CT devices, internal structure experiments of equipment in industrial use, and inspection of luggage, etc.

[0009] 4) Electron beam welding machine or 3D modeling device

[0010] It is used for precision welding for purposes such as joining different metals of different materials in a vacuum. In addition, electron beams have been used in three-dimensional modeling devices in recent years.

[0011] 5) Electron microscope.

[0012] Electron guns used for various electron microscopes for semiconductor inspection and observation, and various research and development. The overall market for the device is several hundred billion yen. However, it is believed that the electron gun device disclosed in this disclosure may not be applicable to cheap devices costing less than several million yen.

[0013] As electron emission materials (= electron gun materials), various substances are used, and the commonly used substances are narrowed down to two types: thermal electron emission tungsten electron guns and thermal electron emission LaB6 electron guns. Here, "LaB6" is hereinafter referred to as "LaB6".

[0014] Tungsten electron guns are cheap at around 1,000 yen each and can be used easily, but they have a lifespan of 1,000 hours and low brightness, 104A / cm at 50kV. 2 In addition, the operating temperature is about 2500°C.

[0015] The price of LaB6 electron gun is as high as 200,000 yen to 500,000 yen per gun. The brightness is relatively high, with a peak of 106A / cm at 50kV. 2 However, the evaporation rate of this material varies depending on the operating temperature. At 1550°C to 1600°C, there is an evaporation loss of several tens of μm in 1000 hours. Therefore, it has a major disadvantage that the higher the brightness, the shorter the lifespan.

[0016] Here, the LaB6 crystal, which is the electron emission material, is worn out by use. Then, when worn out, the shape changes and the expected electron beam emission cannot be performed. In addition, there is the following problem: if the LaB6 crystal reaches a high temperature, the evaporated product of the LaB6 material accumulates on the surface of the heater used for heating, the resistance value of the heater decreases, and if the same heating current flows, the temperature of the LaB6 crystal decreases.

[0017] In addition, in order to suppress the evaporation generated on the side of the LaB6 crystal, a method of forming a cover using a carbon film or a high-melting-point metal film has been proposed. The cover made of a carbon film or a high-melting-point metal film does not change in shape and remains after the electron gun is used for a long time, but a large amount of the upper surface of the LaB6 crystal is lost and enters the inner surface of the cover. Therefore, at the beginning of use, the intensity distribution of the electron beam emitted from the front end of the LaB6 crystal is strong and the irradiation uniformity of the center is good. In contrast, after long-term use, the overall current of the electron beam emission distribution generated on the upper surface of the LaB6 crystal becomes smaller, and the uniformity of the electron emission distribution also deteriorates due to the narrowing of the amplitude.

[0018] This situation has been shown in Patent Document 1 (Japanese Patent Gazette No. 5595199). After hundreds of hours of use, the LaB6 crystal at the front end of the electron gun is worn out, and the front end surface changes from a flat surface to a round hill shape. Since the front end of the electron gun after such wear and tear cannot emit electron beams with the same electron beam emission intensity, it is not only unable to be used as a stable electron gun, but it is also pointed out that the biggest problem is that the uniformity distribution of the irradiated electron beam changes. The inventors have also faced the same problem for more than 30 years. That is, if you try to increase the brightness, high temperature is required, and the wear and tear of the LaB6 crystal surface causes the shape of the electron gun to change in a short time, shortening the life. If this problem is not overcome, there is no prospect for the future of electron guns.

[0019] Patent Document 1: Japanese Patent No. 5595199 Summary of the invention

[0020] As described above, it is expected that the electron gun has a higher brightness, the heater temperature is stabilized, and the life of the electron gun is prolonged. In particular, it is expected that the life of the electron gun can be long to more than one year.

[0021] The electron gun involved in the present invention is an electron gun device that emits electron beams by being heated to a high temperature in a vacuum. The surface of the material that emits electron beams is a hydride metal that melts into a liquid when working at a high temperature. The liquid hydride metal is contained in a hollow sleeve container that is solid when working at a high temperature as a hydride liquid metal or a liquid metal before hydride. The hydride metal is heated to a high temperature together with the sleeve container. The hydride liquid metal is exposed from the sleeve container to form a liquid surface in which gravity, an electric field and the surface tension of the liquid surface are mutually balanced, and electron beams are emitted from the exposed hydride liquid metal surface.

[0022] The electron gun according to the present invention preferably has the following structure.

[0023] In an electron gun that is heated to a high temperature of 1000°C or higher and 1600°C or lower in a vacuum to emit electron beams,

[0024] 1) The material used to emit electron beams is a molten liquid when working at high temperature, and is a hydrogenated metal. The work function of the metal material in the unhydrogenated state is reduced by hydrogenation, thereby increasing the electron emission intensity and inhibiting oxidation of the material when exposed to air or oxygen.

[0025] 2) The liquid hydride metal is contained in a hollow jacketed container which is solid when working at high temperature, and is heated to high temperature together with the container.

[0026] The hollow jacket container is made of a material that does not chemically react with the liquid metal hydride of the electron beam emitting material but dissolves under the high temperature state, and the hollow jacket container has electrical conductivity.

[0027] 3) Liquid metal atoms can reduce the original work function of liquid metal atoms by combining with hydrogen atoms, which can increase the electron emission efficiency. The vapor pressure of liquid metal in vacuum at high temperature is 10 -6 Pascal to 1 Pascal,

[0028] 4) The normal vector of the surface of the hydrogenated liquid metal is consistent with the direction of gravity, forming a roughly horizontal static plane through gravity and the electric field.

[0029] 5) Thermal electron emission or electric field application type thermal electron emission is performed in the direction of gravity or in the direction opposite to gravity.

[0030] Effects of the Invention

[0031] According to the present invention, it is possible to simultaneously achieve higher brightness of an electron gun, more stable heater temperature, and longer life of the electron gun. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1A The diagram for explaining the embodiment of the present invention is a diagram showing a case where the electron emitting surface faces in the direction opposite to gravity.

[0033] Figure 1B The diagram for explaining the embodiment of the present invention is a diagram showing a case where the electron emitting surface faces the direction of gravity.

[0034] Figure 2 This figure is used to illustrate the situation in which the solid LaB6 single crystal electron gun of the comparative example emits electrons at a high temperature, the LaB6 crystal evaporates, and the shape of the electron gun changes.

[0035] Figure 3 A diagram showing a decrease in the total amount of liquid due to evaporation of the electron emission material of the liquid electron gun when the electron emission surface is oriented in the direction of gravity in the embodiment.

[0036] Figure 4 A diagram illustrating surface tension and capillary phenomena.

[0037] Figure 5A The diagram is for explaining the electron emission material of the liquid electron gun, and is for explaining the case where, for example, lanthanum liquid is used.

[0038] Figure 5B This figure is a diagram for explaining the electron emission material of the liquid electron gun, and is a diagram for explaining the case of using, for example, hydrogenated lanthanum liquid.

[0039] Figure 6 This is a diagram for explaining the relationship between the electron gun heating temperature and the generated current value.

[0040] Fig. 7A This is a diagram for explaining that a photocatalyst is required to clean the carbon atoms contained in the liquid electron emission material, and is an explanatory diagram for the case where a photocatalyst powder is mixed in the liquid material.

[0041] Figure 7B This is a diagram for explaining that a photocatalyst is required to clean the carbon atoms contained in the liquid electron emission material, and is an explanatory diagram of a case where a photocatalyst film is attached to the inner surface of the sleeve.

[0042] Figure 8 This is a diagram for explaining a method of flowing hydrogen gas into the interior of a vacuum electron gun chamber provided in a liquid electron gun.

[0043] Fig. 9 This is a diagram for explaining a first method of filling a hollow sleeve container with a liquid electron emission material.

[0044] Fig.10 This is a diagram for explaining a second method of filling a hollow sleeve container with a liquid electron emission material.

[0045] Fig.11 A diagram showing the supply of hydrogen by a hydrogen storage alloy in an electron emission material in which powder is mixed into a liquid.

[0046] Fig. 12A This figure is an overall view of an electron gun for explaining an electron gun in which a thin film having a plurality of openings is provided on the electron emitting surface of a sleeve to perform multiple electron emissions to form multiple beams.

[0047] Fig. 12B The figure is an enlarged view of the front end of the multi-electron source for explaining an electron gun that forms a multi-beam by arranging a thin film having a plurality of openings on the electron emitting surface of a sleeve to perform multi-electron emission.

[0048] Fig.13A This is an explanatory diagram showing a case where a large electron emission area is required and a large electron emission surface is formed by bundling a plurality of hollow jacket containers as a plurality of capillaries, and is an overall view of an electron gun.

[0049] Fig. 13B This is an explanatory diagram showing a case where a large electron emission area is required and a large electron emission surface is formed by bundling a plurality of hollow jacket containers as a plurality of capillaries, and is an enlarged view of the front end portion.

[0050] Fig.14 A diagram showing a method of periodically dropping solid electron emission material into a hollow jacket container in order to compensate for the loss of electron emission material in a liquid electron gun.

[0051] Fig.15A The figure is an overall view showing that the approximate plane of the liquid of the liquid electron emission material when the electron gun is tilted about 45 degrees when gravity is in the downward direction is almost unchanged from when it is vertical.

[0052] Fig. 15B The figure shows that the approximate plane of the liquid of the liquid electron emission material is almost unchanged when the electron gun is tilted about 45 degrees when gravity is in the downward direction and when it is vertical, and is an enlarged view of the main part. DETAILED DESCRIPTION

[0053] (Invention process)

[0054] First, the inventors discovered the following phenomenon: in the case of an electron gun that heats a LaB6 single crystal at high temperature, if a hydrocarbon adhesive having a relatively long chain of hydrocarbons (CH2) is used, the electron gun has a significantly different high brightness at the normal operating temperature of LaB6, 1500° C., and the brightness does not change when operating at a low temperature of 300° C. to 1200° C. However, it is difficult to obtain stability and controllability with the adhesive.

[0055] Therefore, the method of supplying hydrocarbons through gas was used instead. The reason for using gas is that the pressure and flow rate of the gas can be easily controlled from the outside. The type of gas is methane gas CH4. This is the simplest hydrocarbon gas. LaB6 single crystals usually require a high temperature of more than 1500°C, but if LaB6 crystals are placed at 1200°C and methane gas is supplied at a rate of 10 -4 Pascal flows in a way that fills the inside of the vacuum chamber of the electron gun, and after 5 hours, the electron generation intensity of the LaB6 single crystal at about 1500°C can be achieved. The reason is that the methane gas acts to destroy the boron element boron (B) of LaB6, forming a gas called diborane (B2H6) and is continuously pumped out by the vacuum pump. As a result, it can be seen that lanthanum atoms remain on the surface of LaB6 as liquid and generate electrons as lanthanum liquid. It was also found that lanthanum hydride can be formed using lanthanum liquid generated by methane gas and hydrogen in methane. The carbon in methane gas is used to destroy the lattice of boron element B. In the state of forming lanthanum liquid, when placed at 1200°C, the work function of LaB6 usually drops significantly from 2.6eV to 2.1eV~2.0eV, so the electron generation efficiency is 100 times to 1000 times, so it can be used even if the temperature is reduced by 300°C.

[0056] Since lanthanum is easily oxidized, when it is taken out of the air, the thin lanthanum hydride layer on the LaB6 crystal easily reacts with oxygen in the air to become lanthanum oxide. Since the work function of lanthanum oxide is a large 3.5eV, the electron generation efficiency is very poor even if the vacuum is sucked again.

[0057] The present inventors have confirmed that the low work function of the lanthanum solution caused by the steady flow of methane at 1200° C. is caused by the hydrogenated lanthanum LaHx, and is consistent with the work function obtained by dissolving the lanthanum hydrogen reagent in a hollow jacket container.

[0058] LaHx as used herein refers to a substance in which 1 to 3 hydrogen atoms exist for 1 lanthanum. X refers to a case in which its value cannot be determined.

[0059] At the same time, the inventors used a tungsten boat to heat a lanthanum ingot in a vacuum and put it into a hollow sleeve container to liquefy the lanthanum. The ingot was operated in an electron gun cavity through which hydrogen gas flowed, and the same work function of 2.1eV to 2.0eV as lanthanum hydride was obtained.

[0060] Therefore, it was found that if lanthanum hydride is used, an electron gun with high brightness at the liquid surface and low temperature operation can be produced. Since LaB6 evaporates on the solid surface of LaB6 at 1500°C or above and the shape of the solid surface changes, the electron emission amount and electron emission distribution change in a short time, resulting in a short life due to the short usable conditions. At 1550°C, it is about 1000 hours.

[0061] In a liquid electron gun, the shape of the liquid surface does not change relative to the evaporation of the electron emitting material, only the total amount of liquid changes.

[0062] Therefore, when emitting electron beams in a direction opposite to the direction of gravity, that is, toward the upper surface of the liquid electron gun, if a mechanism is provided to control the upper liquid level to be constant to compensate for the decreasing total amount of evaporated liquid, the liquid surface can be kept as a horizontal plane and its height can be kept constant.

[0063] The case of emitting electron beams in the same direction as the gravity direction, that is, downward, is described. Most electron beam irradiation devices irradiate electron beams downward relative to gravity. In this case, how to maintain lanthanum hydride as a liquid electron gun material. Liquid lanthanum hydride is contained inside a solid hollow sleeve container. A hole is opened on the front electron emitting surface of the sleeve container. The sleeve is formed into a roughly cylindrical shape or a trapezoidal cylindrical shape with a tapered front end.

[0064] When heated at high temperature, the liquid metal material adheres to the side of the hollow sleeve container due to capillary phenomenon. Therefore, even if the bottom of the front end of the sleeve is open, the liquid will not flow out and drip downward. When the lanthanum liquid is used as an electron gun, the total amount of liquid metal that is balanced with gravity can be determined, and the bottom open opening of the sleeve forms a roughly flat surface that is still due to surface tension, that is, a liquid surface formed by surface tension. By applying voltage to the electrode and applying voltage to the liquid surface, electrons can be emitted from the liquid surface by heating.

[0065] As described above, the inventors of the present invention have studied a scheme to liquefy the electron emitting surface of the electron gun, focusing on the fact that there is no method to prevent LaB6 crystals from evaporating at the operating temperature when only solid LaB6 is used, and that the shape change of the electron gun surface as a solid cannot be avoided and the limited life cannot be avoided. If liquefied, a constant shape can be continuously maintained against evaporation of the electron gun surface. Its life can be used until the total amount of liquid is exhausted.

[0066] Hereinafter, a mode (embodiment) for carrying out the present invention will be described with reference to the drawings.

[0067] Figure 1A , Figure 1B A diagram showing one embodiment of the present invention. Figure 1A A liquid electron emission planar electron gun (the liquid surface of the liquid electron emission material 108 is perpendicular to the direction of gravity (gravity vector)) that emits an electron beam in a direction opposite to gravity (the direction opposite to gravity) is described. The liquid electron emission material 108 is heated by a holder 103 and a PG heater 110 through which current flows, and liquefies at a high temperature of 1000°C to 1600°C. The liquid electron gun material is set to utilize a hollow sleeve container 102 without leaking to the outside. From the exposed surface of the upper part of the liquid electron emission material, thermal electrons or thermoelectric field emission current are emitted as an electron beam 107. The emission current passes through a Wehnelt electrode 104 that controls the amount of electron emission, and is accelerated by an anode 101 to become an electron beam 107. As time passes, the liquid electron emission material evaporates, and the total amount of liquid decreases. However, the shape of the upper surface of the liquid does not change, but if it is left as it is, the liquid level will drop over time, and the height of the electron gun source will change. In order to prevent this, the gear 105 rotates periodically, pushing upward the rack 113 that meshes with the gear 105 and moves the piston 111 up and down. As a result, the support 112 of the piston 111 is pushed up. As a result, since the piston 111 is pushed up, the shape of the upper surface of the liquid electron emission material and the position in the height direction remain unchanged. Thus, high brightness and long life are achieved at the same time. The potential of the Wehnelt electrode can be positive or negative. However, in order to accelerate electrons, the potential of the anode is positive 1kV to 100kV or more. In addition, 114 represents a ceramic disc of an electrical insulator for fixing the holder 103, 106 represents the lower part of the Wehnelt electrode for controlling the electron emission amount, and 109 represents the direction of gravity.

[0068] Figure 1BThe present invention describes a liquid electron emission planar electron gun that emits an electron beam in the same direction as gravity (the liquid surface of the liquid electron emission material 125 is perpendicular to the direction of gravity (gravity vector)). The liquid electron emission material 125 is heated by the holder 117 and the PG heater 118 during the flow of current, and liquefies at a high temperature operating temperature of 1000°C to 1600°C. The liquid electron gun material is configured to utilize a hollow sleeve container 124 so as not to leak to the outside. From the exposed surface of the lower part of the liquid electron emission material, thermal electrons or thermoelectric field emission current are emitted as an electron beam 120. The emission current is accelerated by the anode 119 to become an electron beam 120 via the lower part 116 of the Wehnelt electrode that controls the amount of electron emission. The hollow sleeve container is formed of a high melting point material having a contact angle of less than 90 degrees with respect to the liquid metal when heated at a high temperature. The shape of the hollow sleeve is formed to cover the side of the electron beam emission material facing the gravity axis direction. The outer shape is a prism, cylinder, or truncated cone shape with the gravity direction as the central axis, and the internal shape is a prism, cylinder, elliptical cylinder, long cylinder or truncated cone shape with the gravity direction as the central axis. As the liquid electron emission material evaporates over time, the total amount of liquid decreases. However, the shape of the lower surface of the liquid does not change. The static equilibrium liquid metal liquid surface is formed by the gravity applied to the liquid metal, the electrostatic force of the surface electric field of the electrode for extracting electrons, and the surface tension of the sleeve container and the liquid metal, and a constant electron emission surface is maintained for a long time. However, at this time, the total amount of the liquid electron emission material 125 has a lower limit and an upper limit. When the average radius of the cylinder or prism constituting the lowermost inner surface of the hollow sleeve is R, the minimum limit value of the capacity of the liquid metal is 4πR 3 / 3, that is, the volume of liquid that has a capacity larger than that of a sphere that can adhere to the inner surface is determined to be the amount of liquid that will not drip from the opening of the lower sleeve container. When the maximum radius of the cross section with the largest inner diameter of the cross section inside the sleeve container is set to r (cm), the contact angle between the sleeve material and the liquid metal material for electron emission is set to θ (degrees), the surface tension of the liquid metal is set to γLG (dyne / cm), the density of the liquid metal is set to ρ (5 to 10 when water is set to 1), and the acceleration is set to 980 (g·cm / s 2 : cgs system), the maximum limit value of the capacity of the liquid metal is determined as follows: when it is less than 4 / 5 of the height of the liquid metal in the gravity direction h = 2γLG×cos(θ(degrees)) / (r×ρ×980)(cm), no liquid dripping will occur from the bottom of the sleeve container.

[0069] Here, it is preferred that the radius of the portion of the jacketed container having the largest inner diameter is 0.1 mm to 1 mm.

[0070] In addition, when the hollow sleeve is inclined relative to gravity, the upper surface of the surface of the liquid metal faces the direction of gravity, and the liquid surface is perpendicular to gravity.

[0071] The lower surface of the liquid metal is a plane along the front cross section of the hollow sleeve, i.e., a plane perpendicular to the sleeve axis, due to the mutual balance of gravity, electric field and surface tension at this position. In this case, the surface tension is dominant, so it becomes a plane along the front cross section of the hollow sleeve, i.e., a plane perpendicular to the sleeve axis. This situation is valid when the sleeve is tilted to plus or minus 60 degrees relative to gravity.

[0072] The hollow sleeve container uses a solid high melting point material as the base material. The so-called base material means a film that is not less than 5μm. The base material must not react chemically with the liquid electron emission material such as lanthanum hydride liquid. If a chemical reaction occurs and it melts, the lanthanum liquid will be modified by generating compounds that react with the sleeve container material, so the work function changes and the electron emission ability is significantly reduced. In addition, the thickness of the hollow sleeve container becomes thinner and thinner, and finally a hole is opened, and the lanthanum hydride liquid leaks to an unexpected surface to form droplets. If electrons are also emitted from the droplets, it will become an electron gun with an emission amount far exceeding that of a normal one.

[0073] However, the electrons emitted from the lanthanum hydride liquid leaking from the unexpected hole are electron streams that cannot be used for general purposes. The material of the hollow sleeve container cannot have cracks. For this purpose, it is necessary to have a high melting point material with a melting point of more than 2000°C. In order to maintain a high melting point and an electron gun to maintain a constant shape at high temperatures, it is preferred that the tensile strength, bending strength, etc. at high temperatures up to 2000°C be high strengths of more than 500M Pascals, and the hardness be a hardness of more than 6 on the Mohs hardness.

[0074] In addition, in order to avoid chemical reaction with lanthanum liquid, carbon, silicon, silicon carbide, silicon nitride boron carbide (B4C) cannot be used.

[0075] Tungsten, rhenium, tantalum, molybdenum, titanium diboride, zirconium diboride, tungsten boride, etc. can be used as the above-mentioned high melting point materials. A mixed calcined product of titanium diboride (TiB2), boron nitride (BN) and aluminum nitride (AlN) can also be used. Not limited to the above, there are also borides, nitrides, and oxides (except Al2O3 aluminum oxide) of metals or transition metals that can be used as sleeve container materials. Therefore, these substances can be constituted as the main body. A conductor can be used as a matrix material. In the case of an insulating material, a conductive film needs to be provided on the outer surface, bottom surface, upper surface, and inner surface of the sleeve. The thickness of the conductive film is 1 μm to 5 μm. Since the film on the inner surface may break in contact with the lanthanum liquid, it is necessary to prevent the lanthanum liquid from leaking in the matrix (a material with thickness and a certain volume) of the hollow sleeve container.

[0076] According to experimental trials, single crystals of titanium diboride, zirconium diboride, hafnium diboride, tantalum diboride or yttrium ammonium diboride have shown the best performance when used as sleeves.

[0077] In addition, by using the back cover 123 of the hollow sleeve container for preventing unnecessary evaporation of the liquid electron emission material, a lifespan longer than 25 times can be achieved, and a lifespan longer than 5 years can be achieved.

[0078] In addition, 122 denotes a ceramic disc which is an electrical insulator for fixing the holder 117; 115 denotes the upper part of the Wehnelt electrode for controlling the electron emission amount; and 121 denotes the direction of gravity.

[0079] Figure 2 This is a diagram illustrating the life of the solid LaB6 crystal of the comparative example. Figure 2 Before use, the LaB6 crystal 207 has an irradiation distribution 208 with uniform intensity when heated and an accelerating voltage is applied to emit electrons. However, after the electron gun material evaporates and is lost, the planar area of ​​the front end becomes smaller, and it becomes a LaB6 crystal 215 with a thin cylindrical portion. In this case, the irradiation distribution 219 emitted by the electron gun has a high intensity only at the center, and the area with uniform irradiation distribution becomes very small. If the electron gun emission distribution changes in this way, it has to be said that the electron gun has reached the end of its life. Usually, an electron gun using LaB6 crystal at 1550°C to 1600°C reaches the end of its life in about 500 hours to 1000 hours. When the flat portion of the front end is 50μmΦ, the front end becomes less than 10μmΦ after 1000 hours of life. The above is a problem of life.

[0080] In addition to the life of the electron gun, there are other problems. Figure 2 As shown, when the LaB6 crystal reaches a high temperature, the LaB6 crystal 207 is consumed and becomes thinner, and at the same time, the evaporated product 216 of the LaB6 material accumulates on the surface of the pyrolytic graphite heater 212, and the resistance value of the heater decreases. If the same heating current is applied, the temperature of the LaB6 crystal will decrease.

[0081] In addition, 201 represents the upper part of the Wehnelt electrode for controlling the amount of electron emission; 202 represents the lower part of the Wehnelt electrode for controlling the amount of electron emission; 203 represents a metal holder through which a heating current flows; 204 represents a PG (pyrolytic graphite) heater; 205 represents an anode; 206 represents an electrically insulating ceramic disc for fixing 203; 207 represents a LaB6 single crystal at the beginning of use; 208 represents the electron emission distribution at the beginning of use; 209 represents the upper part of the Wehnelt electrode for controlling the amount of electron emission; 210 represents the lower part of the Wehnelt electrode for controlling the amount of electron emission; 211 represents a metal holder through which a heating current flows; 212 indicates a PG (pyrolytic graphite) heater; 213 indicates an anode; 214 indicates a ceramic disc which is an electrical insulator fixing 211; 215 indicates a portion of the LaB6 crystal clamped by the heater; 216 indicates the evaporated LaB6 crystal which accumulates on the PG heater, reduces the resistance value of the heater and causes the temperature to drop; 217 indicates the shape of the LaB6 single crystal consumed by high-temperature sublimation; 218 indicates the shape of the LaB6 single crystal without consumption at the time of initial use; 219 indicates the electron emission distribution at the time of initial use after the electron emission distribution changes with the consumption of the LaB6 single crystal; 220 indicates the electron emission distribution at the time of initial use.

[0082] Figure 3 1 is a diagram showing the reduction in the total amount of liquid due to the evaporation of the electron emission material of the liquid electron gun when the electron emission surface of the present embodiment is facing the direction of gravity. In this figure, the case where the rear cover of the sleeve container is removed in order to show the evaporation of lanthanum hydride is explained. Since the electron emission surface is a lanthanum hydride surface of the liquid electron emission material that emits electrons from a roughly plane determined by gravity, electric field and surface tension, even if time passes, the height of the electron emission surface in the direction of gravity and the shape of the liquid surface remain completely unchanged, thereby maintaining high brightness and long life. This is a very good advantage of the present embodiment. However, after a long time, the lanthanum hydride 308 of the liquid electron emission material at the beginning of use continues to evaporate in a vacuum at a constant vapor pressure. After a certain period of time, the liquid level 318 of the liquid electron emission material 319 decreases in the upper direction. Finally, the total amount of liquid is exhausted in about 3 months. As a liquid electron gun, this has reached the original life limit. However, by Figure 1B As shown, the use of the hollow sleeve container rear cover 123 for preventing unnecessary evaporation of the liquid electron emission material can achieve a lifespan that is 25 times longer or more, and can achieve a lifespan that is more than 5 years.

[0083] In addition, 301 represents the upper part of the Wehnelt electrode for controlling the electron emission amount; 302 represents the lower part of the Wehnelt electrode for controlling the electron emission amount; 303 represents a metal holder through which a heating current flows; 304 represents a PG (pyrolytic graphite) heater; 305 represents a hollow sleeve container; 306 represents an anode; 307 represents an electrically insulating ceramic disc for fixing 303; 308 represents the direction in which the liquid electron emission material evaporates from the back of the sleeve container; 309 represents the liquid electron emission material; 310 represents an electron beam emitted in the direction of gravity; 311 represents an electron 312 represents the upper part of the Wehnelt electrode for controlling the emission amount; 313 represents a metal holder through which a heating current flows; 314 represents a PG (pyrolytic graphite) heater; 315 represents a hollow sleeve container; 316 represents an anode; 317 represents a ceramic disc as an electrical insulator for fixing 313; 318 represents the direction in which the liquid electron emission material evaporates from the back of the sleeve container; 319 represents the liquid electron emission material after the total liquid amount decreases due to evaporation over time; 320 represents an electron beam emitted in the direction of gravity.

[0084] Figure 4 : This is a diagram for explaining capillary phenomena and surface tension. When water 402 adheres to glass substrate 401, surface tension acts in the direction of angle θ, θ is less than 90 degrees, and water 402 adheres to glass substrate 401 in the form of droplets. θ is called the contact angle. When the contact angle is less than 90 degrees, wettability is considered good, and when the contact angle is more than 90 degrees, wettability is poor, which is called water repellency. In particular, in the case of mercury 411, the contact angle is more than 90 degrees and wettability is poor. If glass tube 403 is immersed in water 405 in water container 404, water is sucked into the glass tube due to capillary phenomena, and the height h of the upper surface 406 of the water surface that rises due to capillary phenomena inside the glass tube is γLG (unit: dyn / cm; 72dyn / cm in the case of water), the liquid density is ρ (1 in the case of water, 6 in the case of lanthanum), and the acceleration of gravity is g (980cm / s 2), when the radius of the glass tube is r, the height h = (2γLGcosθ) / (rρg). If the radius of the glass tube is 0.5 mm, the liquid level rises by 28 mm. For mercury with a contact angle of 90 degrees or more, the mercury surface 416 in the glass tube is lower than the mercury surface 412 of the mercury container 413. Therefore, in the case of mercury, if the glass tube 415 rises, as shown in 417, the glass tube that becomes empty when pulled out of the mercury container and the glass tube with a contact angle of more than 90 degrees have poor wettability with mercury, and no mercury under the capillary phenomenon remains in the tube. If the above capillary phenomenon is applied to the hollow sleeve container of the liquid electron gun, the liquid electron emission material adheres to the inner wall side of the sleeve container, and even if there is an opening at the bottom, the liquid electron emission material will not leak out of the sleeve container, forming a stable and roughly flat liquid surface in which gravity, electric field and surface tension are balanced. It is important that electrons can be stably emitted from the roughly flat liquid surface of the liquid in the direction of gravity.

[0085] 407 indicates the water surface outside the glass tube of the water container; 408 indicates the glass tube; 409 indicates the water inside the glass tube when separated from the water container by capillary action (the bottom becomes a roughly flat surface due to surface tension); 410 indicates a glass substrate; 412 indicates the mercury liquid surface outside the glass tube; and 414 indicates mercury.

[0086] Table 1 is a table for explaining the limit value of the liquid height of the liquid electron gun due to capillary phenomenon, that is, "the limit height of lanthanum liquid". In addition, the limit height of lanthanum liquid is shown as the height of the liquid allowed for the diameter of the opening of the cover part for the height of water, lanthanum and cerium that can adhere to the inside of the cylindrical capillary due to capillary phenomenon, and is calculated based on the surface tension of water being 72.75 dyn / cm. In addition, for lanthanum and cerium, division is also performed based on the larger value of the density when the liquid is formed with the same surface tension as water. In fact, it can be considered that lanthanum and cerium also have a surface tension of more than 10 times at more than 1000°C.

[0087] [Table 1]

[0088] On the limit height of lanthanum liquid

[0089]

[0090] The height of the liquid allowed for the diameter of the opening of the cover member, which is shown as the height of the liquid of water, lanthanum and cerium that can adhere to the inside of the cylindrical capillary due to the capillary phenomenon, is calculated based on the surface tension of water being 72.75 dyn / cm. In addition, for lanthanum and cerium, the division operation is also performed based on the larger value of the density when the liquid becomes liquid with the same surface tension as water. In fact, it can be considered that lanthanum and cerium also have a surface tension of more than 10 times above 1000°C. This is equivalent to about 1000 dyn / cm, so it may be more than 10 times higher than the value in Table 1. Table 1 is calculated based on the surface tension of water at room temperature being 72 dyn / cm. When the inner diameter of the sleeve is 0.5 mm, the liquid level of water is 56 mm, and when the lanthanum density is 6, the allowable height is 9.3 mm. This value is longer than the actual length of the electron gun sleeve container of 3 mm, and is a condition that can always be met. It is known that the average inner diameter of the thickest part of the sleeve container and the limit height are inversely proportional. Therefore, as long as the jacket container is not set thicker than usual, the lanthanum liquid will not drip from the jacket opening itself in the direction of gravity. Since the density of cerium is 6.5, this condition is almost unchanged. In addition, according to the experiments of the inventors, the surface tension between the high melting point metal and the lanthanum of the metal boride is very strong, especially above 1000°C, and the wettability problem has never occurred in the experiment. If the actual required operating temperature of 1000°C to 1600°C, the brightness and life requirements can be determined, the inner diameter of the hollow jacket container can be determined in design.

[0091] Figure 5A and 5B This is a diagram for explaining the electron emission material of a liquid electron gun. Figure 5B The opening at the front end of the sleeve container emits an electron beam 605 from lanthanum hydride. Figure 5A This is a diagram for explaining the use of lanthanum liquid. In this case, hydrogen gas needs to be passed through the electron gun cavity to hydrogenate it and reduce the work function before use. In particular, if it is not hydrogenated, it will be oxidized in about 10 minutes in the air and react with water to start hydrogenation. Since it is difficult to use it as an electron gun again, it is necessary to Figure 5B As shown, hydrogen atoms 606 react with lanthanum atoms 603 to form lanthanum hydride. That is, hydrogenation is not only necessary to maintain the electron emission efficiency, but also necessary to prevent oxidation when it is taken out into the air. If hydrogenation reaches a certain level or more, yellow crystals of lanthanum hydride LaHx will be formed on the electron emission surface, so oxidation can be protected. If hydrogenation is fully performed, when the lanthanum hydride electron gun is operated, it is not necessary to keep hydrogen flowing in the electron gun cavity vacuum.

[0092] In addition, 601 is a diagram showing the entire liquid electron gun; 602 represents an electron beam emitted in the direction of gravity; 603 represents lanthanum atoms as electron emission materials; 604 is a diagram showing the entire liquid electron gun, 605 represents an electron beam emitted in the direction of gravity; 606 represents hydrogen atoms entering the lanthanum atom liquid.

[0093] Figure 6 This is a diagram illustrating the relationship between the electron gun heating temperature and the generated current value. The horizontal axis is the temperature of the electron gun (°C), and the vertical axis is the intensity of the emission current (current (μA)). 703 represents the emission current of lanthanum hydride. 704 represents the electron emission current of a solid LaB6 single crystal. It can be seen that at the same temperature, the emission current intensity of lanthanum hydride is 100 to 1000 times higher than that of a LaB6 single crystal. That is, lanthanum hydride can achieve the same intensity at a temperature 300°C lower than the operating temperature of a LaB6 single crystal. In addition, since the LaB6 single crystal is solid, the shape change caused by evaporation will not meet the use conditions in a short time. Lanthanum hydride is a liquid, and the liquid level is stably determined by gravity, electric field and surface tension. It can be used until the liquid is exhausted, so the actual life is 10 to 100 times. 705 represents the electron emission intensity of a tungsten electron gun. If tungsten is used at a temperature exceeding 2000°C, a 100 μmΦ tungsten wire evaporates and cuts in about 100 hours, so the life is extremely short.

[0094] Table 2 is a table for studying the types of elements that are candidates for use as liquid electron emission materials, and studying the suitability of various elements and substances as liquid electron emission materials. The table shows the suitability, material name, melting point, boiling point, whether it is liquefied at a temperature of 1000°C to 1500°C, and the vapor pressure showing the degree of evaporation in this temperature range.

[0095] [Table 2]

[0096]

[0097] *1CPD: Based on contact potential difference method

[0098] *2PE: Based on the photoelectric effect method

[0099] The commonly used material in the past was LaB6 single crystal, which was used at a temperature of 1500°C to 1600°C. In order to find a better material, it is necessary to find metal atoms that can be liquefied for a long time between 1000°C and 1600°C. In other words, it is necessary to find a metal atom that has a 10 -3 Pascal to 10 -1Pascal's low vapor pressure. That is, a melting point of about 1300°C and a boiling point of more than 3000°C are required. In other words, a material with a large difference between the melting point and the boiling point is required. In addition, it is necessary to find an element whose work function is below 3eV and which is reduced to a relatively small 1eV when hydrogenated. For example, barium and calcium have a melting point as low as 700°C to 800°C, but a boiling point of about 1500°C, and evaporate immediately when in action, so such elements are not suitable. According to the research of the inventors, the vapor pressure of lanthanum and cerium at 1300°C is 10 -3 Pascal is the most suitable element. In addition, gadolinium has a temperature of 10 at 1300 °C. -1 Pascal, praseodymium is 1 Pascal at 1500℃, terbium is 1 Pascal at 1516℃, and compared with lanthanum and cerium, the lifespan of the latter three is expected to be very short, but they are not completely unusable. Based on such research, lanthanum and cerium can be proposed as the most suitable elements.

[0100] Fig. 7A and Figure 7B A diagram for explaining the photocatalyst required for cleaning the carbon atoms contained in the liquid electron emission material (reference numerals 901 and 906 represent a diagram of the entire liquid electron gun). It is known that carbon atoms significantly deteriorate the electron emission efficiency of lanthanum hydride. Therefore, it is possible to generate a compound with the electron emission material, such as lanthanum or lanthanum atoms of lanthanum hydride, through the carbon atoms contained in the material of the hollow sleeve container. In order to prevent this, the purpose is to remove the carbon element by carbonizing the carbon component in the lanthanum liquid using titanium dioxide, which is a photocatalyst using ultraviolet light and is known to activate the oxygen remaining in the lanthanum liquid or the oxygen remaining in the electron gun cavity, and tungsten trioxide, which is a photocatalyst using visible light.

[0101] Titanium dioxide TiO2 powder and tungsten trioxide WO3 powder 902 are mixed into lanthanum hydride liquid 903. Or, Figure 7BIn the figure, an oxide film 907 of titanium dioxide or tungsten trioxide is attached to the inner surface of the hollow sleeve container as a photocatalyst. Since the electron gun emits at least visible light at a temperature above 1000°C through the PG heater, it is possible to remove carbon impurities by oxidation using the light energy emitted by itself. 904 and 909 are the back covers of the sleeve container, which are used to prevent lanthanum hydride from evaporating from the back of the electron gun emission surface. 905 and 910 are hollow sleeve containers. 903 and 908 are lanthanum hydride. According to the description of this figure, even when there is a very small amount of carbon component of less than 0.1% in the hollow sleeve container, the emission current of the liquid electron gun can be kept constant. However, if the carbon impurities in the sleeve container can be reduced, a photocatalyst may not be needed, but considering the carbon contamination from the electron gun cavity, it is preferred to use a photocatalyst for safety. In addition, since the natural oxide film of metallic titanium can be used as titanium dioxide and the natural oxide film of metallic tungsten can be used as tungsten trioxide, the powder 902 or oxide film 907 used may also be metallic titanium or metallic tungsten.

[0102] Figure 8 A diagram illustrating a method of flowing hydrogen into the interior of a vacuum electron gun chamber provided for a liquid electron gun. When the amount of hydrogen in the lanthanum hydride 1001 of the liquid electron emission material is insufficient, it is necessary to flow hydrogen molecules 1007 into the electron gun chamber to control the gas partial pressure and replenish an appropriate amount of hydrogen. Hydrogen is flowed from a hydrogen bottle 1020 into the electron gun chamber 1022 via a hydrogen regulating mass flow controller 1021. Typically, a turbomolecular pump 1011a opens valve 1010 to evacuate the interior of the electron gun chamber. However, if the hydrogen in the electron gun chamber is 1×10 -4 Pascals will not impose a large load on the turbomolecular pump 1011a. However, if lanthanum is to be hydrogenated in a short time, 10 Pascals need to be flowed into the electron gun cavity. -3Pascal or more hydrogen partial pressure. In this case, since the turbomolecular pump 1011a is loaded and emits a considerable amount of heat, the valve 1010 is closed and the second column 1019 is evacuated by the turbomolecular pump 1011b. In this way, the hydrogen partial pressure in the electron gun cavity can be maintained high and the load applied by the turbomolecular pump can be reduced. This is because the circular hole on the vacuum partition wall 1012 between the second column and the third column is small, so a hydrogen gas partial pressure difference can be generated between the electron gun cavity and the second column. By the way, the electron beam 1008 passes through the vacuum partition wall 1013, uses the electron beam deflection electrode 1017 and the electron beam converging magnetic field lens 1018, and irradiates the electron beam to the working substrate 1015 for electron beam observation, electron beam drawing or electron beam welding inside the third column 1016 for electron beam irradiation, and performs the necessary work. At this time, the hydrogen partial pressure in the electron gun cavity is the highest, and the hydrogen partial pressure becomes lower in the order of the second column and the third column.

[0103] In addition, 1002 represents a hollow sleeve container; 1003 represents the liquid surface of the opening at the front end of the open sleeve container of the liquid electron gun material (forming a roughly flat surface or a part of a sphere with a larger radius due to surface tension); 1004 represents a Wehnelt electrode for controlling the electron emission amount; 1005a and 1005b represent metal holders through which a heating current flows; 1006a and 1006b represent PG (pyrolytic graphite) heaters; 1009 represents a ceramic disc as an electrical insulator for fixing the holder; 1011a, 1011b, and 1011c represent turbomolecular pumps; and 1004 represents a rough-dry pump.

[0104] Fig. 9This is a diagram for explaining a first method of filling a hollow sleeve container with a liquid electron emission material. A hollow sleeve container 1102 is suspended by a mechanical device 1101, and the mechanical device 1101 is used to hold the hollow sleeve container and move it in the lateral and vertical directions. In addition, a lanthanum liquid 1107 as a liquid metal in a crucible or boat 1103 for filling the liquid metal is heated to a high temperature by a heater 1111 for melting the liquid metal and liquefied. The hollow sleeve container 1102 is mechanically lowered until it contacts the lanthanum liquid 1107, and the lanthanum liquid 1107 is sucked into the interior of the hollow sleeve container 1102 by the capillary phenomenon. The interior of the sleeve container 1102 is vacuum, and the entire sleeve container is filled with the lanthanum liquid 1107. The sleeve container is pulled up, and the filling of the lanthanum liquid inside the sleeve container 1102 is completed. In this operation, the vacuum device 1106 is evacuated by the vacuum pump 1108, and hydrogen is introduced from the hydrogen bottle 1110 into the vacuum chamber 1106 via the mass flow controller 1109 for hydrogen flow regulation. Thus, the lanthanum liquid inside the vacuum chamber is hydrogenated. The lanthanum liquid in the hollow sleeve container is also hydrogenated. Thus, the key to lanthanum hydride is completed.

[0105] In addition, 1104 represents a power source for a heater for melting liquid metal; 1105 represents a transmission line from the power source for a heater for melting liquid metal to the heater; 1108 represents a vacuum pump; 1109 represents a mass flow controller for regulating hydrogen flow; and 1110 represents a hydrogen tank.

[0106] Fig.10 A diagram for explaining a second method of filling a hollow sleeve container with a liquid electron emission material. A hollow sleeve container 1207 faces downward 1204 relative to gravity. Lanthanum hydride powder is preliminarily contained in a container 1205 containing lanthanum hydride powder on the back side of the hollow sleeve container, and the lanthanum hydride powder is filled from the back side of the hollow sleeve container by tilting. The filled lanthanum hydride powder 1208 is heated to a high temperature by the heating of the heater 1203 in the vacuum chamber 1213, and becomes liquid lanthanum hydride 1212. The vacuum chamber 1213 is evacuated by a vacuum pump 1214, and hydrogen is flowed in from a hydrogen bottle 1215 from a mass flow controller 1216 for hydrogen flow regulation in a timely or continuous manner as needed. Thus, lanthanum hydride is filled in the hollow sleeve container.

[0107] In addition, 1201 represents a ceramic disc which is an electrical insulator for fixing a holder; 1202 represents a metal holder through which a heating current flows; 1206 represents lanthanum hydride powder contained in a hollow sleeve container; 1209 represents the direction of gravity; 1210 represents a transmission line from a power source for a heater for melting liquid metal to a heater; 1211 represents a power source for a heater for melting liquid metal; and 1217 represents the direction of gravity.

[0108] Fig.11 This is a diagram showing a situation where hydrogen is provided by a hydrogen storage alloy that absorbs and stores a large amount of hydrogen inside an electron emission material that is mixed in a powder form into a liquid. The hydrogen storage alloy is enclosed together with the liquid metal material in a sheath container. The hydrogen storage alloy 1301 mixed into the lanthanum hydride liquid absorbs and stores a large amount of hydrogen molecules 1302. If the pressure is reduced and heated in a vacuum chamber, the hydrogen storage alloy releases hydrogen molecules 1303, and the hydrogen atoms increase in the lanthanum hydride liquid. In this way, the amount of hydrogen atoms in the lanthanum hydride liquid can be controlled. The hydrogen storage alloy 1301 is a hydrogen storage alloy containing palladium, titanium, zirconium, vanadium or nickel as a main component.

[0109] Fig. 12A , Fig. 12B This figure explains an electron gun that forms multiple beams by providing a thin film having multiple openings on the electron emitting surface of a sleeve to emit multiple electrons. Fig. 12A This is an overall diagram of the electron gun. Fig. 12B This is an enlarged view of the front end of the multi-electron source.

[0110] As a multi-beam electron gun, a member having a plate-like member 1411 formed of a thin high-melting-point conductive material with a plurality of circular or square holes on the front end open surface of a hollow sleeve container 1410 is used. The liquid of lanthanum hydride is exposed on the surface of all the circular or square holes. Electrons are emitted in parallel from the exposed lanthanum hydride liquid into a vacuum. Through the Wehner electrode 1404, a plurality of electron beams 1406 accelerated by the anode 1405 are emitted.

[0111] In addition, 1401 represents the upper part of the Wehnelt electrode for controlling the electron emission amount; 1402 represents a metal holder through which a heating current flows; 1403 represents a PG (pyrolytic graphite) heater; 1407 represents a ceramic disc as an electrical insulator for fixing the holder; 1408 represents a rear cover of a hollow sleeve container for preventing unnecessary evaporation of a liquid electron emission material; and 1409 represents a liquid electron emission material, namely, lanthanum hydride.

[0112] Fig.13A , Fig. 13B This is an explanatory diagram showing a case where a large electron emission area is required and a large electron emission surface is formed by bundling a plurality of hollow jacket containers as a plurality of capillaries. Fig.13A This is an overall diagram of the electron gun. Fig. 13B This is an enlarged view of the front end.

[0113] A large-area sleeve container 1509 is formed by bundling a plurality of (seven in this case) hollow sleeve containers (forming a plurality of bundles), and each individual hollow sleeve container has a filled lanthanum hydride electron emission liquid material 1508. Electron beams 1506 are emitted from the exposed surfaces of the lanthanum hydride liquid. The reason for bundling a plurality of small sleeve containers without using a large-area sleeve container is that the amount of liquid that can be retained in the capillary by capillary action is limited to a fixed amount. That is, since the liquid level height of the capillary action of the liquid is inversely proportional to the circumferential distance of the inner diameter of the capillary, the smaller the capillary, the higher the liquid level that can be formed. This method can also form multiple beams.

[0114] In addition, 1501 represents the upper part of the Wehnelt electrode for controlling the electron emission amount; 1502 represents a metal holder through which a heating current flows; 1503 represents a PG (pyrolytic graphite) heater; 1504 represents the lower part of the Wehnelt electrode for controlling the electron emission amount; 1505 represents an anode; 1507 represents a ceramic circular plate as an electrical insulator for fixing the holder; 1510 represents a rear cover of a hollow sleeve container for preventing unnecessary evaporation of a liquid electron emission material.

[0115] Fig.14 A diagram showing a method of periodically dropping solid electron emitting material into a hollow sleeve container to compensate for the loss of electron emitting material of a liquid electron gun.

[0116] When the lanthanum hydride liquid electron gun is used for a long time, the liquid lanthanum hydride 1613 evaporates and the liquid level becomes low. Therefore, it is necessary to fill new solid lanthanum hydride 1601. Through the regular rotation of the belt conveyor of the solid supply mechanism 1603, a plurality of solid lanthanum hydrides 1601 fall one by one on the upper surface of the shell regularly. 1605a, 1605b, and 1605c represent the fallen solid lanthanum hydride. The fallen solid lanthanum hydride contacts with the liquid lanthanum hydride 1613 heated to a temperature above the melting point by the PG (pyrolytic graphite) heater 1608 and melts. In this way, the loss of liquid lanthanum hydride can be filled.

[0117] Fig.14 This is a diagram showing filling by supplying solid lanthanum hydride to a jacket container. In this example, the hydride-treated liquid metal material is filled in the form of powder, solid or liquid from the side opposite to the surface of the hollow jacket container and the electron beam emitting side. Alternatively, liquid lanthanum hydride can be filled through a tube that is not in electrical contact with the inner surface of the jacket container. Fig.14 In the embodiment, the gravity direction 1602 is toward the falling direction of the solid. In addition, the solid lanthanum hydride can also be a powder.

[0118] In addition, 1604 represents a ceramic disc which is an electrical insulator for fixing a holder; 1606 represents an upper portion of a Wehnelt electrode for controlling the amount of electron emission; 1607 represents a metal holder through which a heating current flows; 1609 represents a lower portion of a Wehnelt electrode for controlling the amount of electron emission; 1610 represents an anode; 1611 represents an electron beam emitted in the direction of gravity; and 1612 represents a hollow sleeve container.

[0119] Fig.15A , Fig. 15B The liquid exposed surface of the liquid electron emission material when the electron gun is tilted about 45 degrees with gravity directed downward (in the direction of the gravity vector) is shown to be a substantially flat surface 1702. Even if the surface is tilted 45 degrees, it is almost unchanged compared to when it is in the vertical direction. That is, a surface perpendicular to the central axis of the sleeve is maintained at the surface attached by surface tension at the opening of the sleeve side.

[0120] In addition, when the hollow sleeve is inclined relative to gravity, the upper surface of the surface of the liquid metal faces the direction of gravity, and the liquid surface is perpendicular to gravity.

[0121] The lower surface of the liquid metal is a plane along the front cross section of the hollow sleeve, i.e., a plane perpendicular to the sleeve axis, due to the mutual balance of gravity, electric field and surface tension at this position. In this case, the surface tension is dominant, so it becomes a plane along the front cross section of the hollow sleeve, i.e., a plane perpendicular to the sleeve axis. This situation is valid when the sleeve is tilted to plus or minus 60 degrees relative to gravity.

[0122] The inventor has confirmed that if the emission direction of the electron beam is within a range of plus or minus 60 degrees from the direction of gravity 1701 (inside the cone), the function of the liquid electron gun can be basically normally satisfied. Therefore, the electron gun using the liquid electron emission material can be used at plus or minus 60 degrees downward. However, when facing the direction perpendicular to the direction of gravity, the liquid will move laterally in the capillary, so the exposed surface of the liquid lanthanum hydride will not be formed at the front end of the sleeve container. In order to prevent this situation, it is considered necessary to apply horizontal pressure to the liquid lanthanum hydride.

[0123] [About Modifications, etc.]

[0124] In this embodiment, the hydrogenated metal material is limited to several elements such as lanthanum and cerium, but other elements can also be used in the present invention if they can be used as liquid electron emission materials with significantly improved electron generation efficiency after hydrogenation.

[0125] In addition, since hydrogenation reduces the work function of the material and increases the amount of electron beam emission, the degree varies depending on the element being targeted, but it can be considered to be roughly common. The description so far mainly describes lanthanum hydride, but the hydrogenated liquid metal can also be a lanthanum metal, such as lanthanum, cerium, gadolinium, terbium or praseodymium. The hydrogenation of these metals can be achieved by flowing hydrogen gas inside the vacuum chamber.

[0126] When the electron gun is taken out into the air, after the liquid metal hydride such as lanthanum hydride is used as an electron gun, it is taken out from the vacuum chamber into the air, and the liquid metal material may be oxidized due to the oxygen in the air. When it is put into the vacuum and used as an electron gun again, it is preferred to flow hydrogen gas through the electron gun chamber. However, due to the complexity of the device design, in the case of lanthanum hydride, the electron emission surface of the sleeve container is covered with solid lanthanum hydride (yellow solid with LaHx:x=2.8) under certain conditions, so that natural oxidation can be prevented.

[0127]

Taylor cone electron gun for zirconium

[0128] As for the liquid electron gun, there is currently a method in which a sharp liquid surface formed of zirconium liquid at the sharp tip of tungsten is used as an electron emission surface. In this electron gun, zirconium evaporates and disappears after a certain period of time, and it is necessary to liquefy zirconium again. That is, compared with the use of a plane perpendicular to the gravity direction of a stable liquid as a high-brightness electron gun that is stable over time in the present embodiment, the method, purpose, and operating principle of the electron gun using zirconium liquid of Taylor cone are completely different.

[0129]

About pressurized fluid atomizer technology

[0130] There is also a technology that applies pressure from the rear of a hollow sleeve container, applies an electric field to the front end, releases liquid or gas, and then uses a nozzle to spray to form a film or solid, or to carve or grind the work object as the object. This technology is similar to the present embodiment. The shape of the nozzle is similar to the hollow sleeve container of the present embodiment. However, in this embodiment, the fluid that applies pressure to the hollow sleeve container does not always flow. The present embodiment keeps the completely non-flowing liquid electron emission material, i.e., lanthanum hydride, statically, emits high-brightness electrons from the electron emission surface, achieves long-term stability, and has completely different fields of use and configuration. Therefore, there is no reason to receive the accusation that the present invention can be easily constructed by a person skilled in the art based on the nozzle.

[0131]

About application fields

[0132] The electron gun of this embodiment is far superior to conventional electron guns, has high brightness and long life, can emit electrons stably, and can be used in a common electron beam imaging device.

[0133] In addition, since a liquid electron gun is used in this embodiment, even if the evaporation material of the electron emission surface at the front end evaporates, the height and shape of the electron gun plane do not change at all, so an ultra-high stability and high-precision electron gun can be formed. This completely overcomes the shortcomings of the existing electron gun. As a result, the life of the existing electron gun is innovatively extended.

[0134] In addition, since the life of the electron gun can be more than one year without replacing it, an electron gun suitable for a multi-electron beam drawing device can be realized. In addition, it can also be used for an X-ray source electron gun. In addition, if the diameter of the front end opening of the sleeve container is made to be less than 10 μm, it can be used as an electron gun for a scanning electron microscope and a transmission electron microscope with high brightness and long life. In addition, when hydrogen is passed through, it can be used even in a low vacuum degree, so it can also be used as an electron gun in a three-dimensional electron beam welding molding machine using an electron beam.

[0135] Furthermore, if the front end of the electron gun tube container is formed to be sharp and the opening is formed to be a micro opening, it can also be applied to an ultrafine pattern drawing device or an observation electron microscope.

[0136] As described above, since the electron gun achieves high brightness and long life, the electron gun involved in this embodiment has made a huge contribution to the entire electron beam application device industry based on electron guns, including electron beam imaging devices, electron beam microscopes, electron beam inspection devices, X-ray generators, etc.

[0137] Industrial Applicability

[0138] In electron beam imaging equipment, an electron gun needs to have a brightness that is 10 times higher than that of existing LaB6 or CeB6 electron guns. 7 A / cm 2 spherical brightness. Therefore, the normal operating temperature of the existing LaB6 or CeB6 electron gun is 1500°C, and it needs to be heated to 1600°C for use. In this way, the life of the electron gun is shortened, and about 70μm will be sublimated and lost in about a month. Therefore, it is necessary to expose the vacuum chamber to the air once a month to replace the electron gun. However, in the electron gun of this embodiment, it can work for more than one year without maintenance, and can achieve an electron beam intensity that is more than 10 times the existing one. Since the electron gun of this embodiment only needs one day of maintenance time a year, the maintenance cost can be reduced.

[0139] By making it multi-column and multi-beam, it is possible to achieve semiconductor manufacturing refinement from 10nm to 5nm. By further improving the integration level, it can be used to build artificial intelligence with fine patterns and brain-type computer industries that imitate neurons, self-driving cars, various robots, robots for dangerous places, nursing robots, interactive coexistence robots, fast-operating robots for large-scale buildings and large-scale projects, and artificial brains that upload human consciousness and copy the human memory consciousness and thinking process at that time, and then inherit human thinking methods and memories to consciously have infinite life. The semiconductor industry will become a huge artificial intelligence industry in the future.

[0140] In addition, the electron gun of this embodiment can also be used in an X-ray emitting device, and as a high-brightness, high-current, and long-life electron gun, it can exert great power as all X-ray electron guns. X-ray emitting devices have a huge market for use in dangerous goods detection devices in transportation agencies and health diagnosis such as diagnosis of cancer, cerebral hemorrhage, and cerebral infarction. As described above, the electron gun of this embodiment contributes to the formation of a huge industry of more than 5 trillion yen.

[0141] In the above description, different reference numerals may be assigned to the same components and their description may be omitted. This is explained in the description of reference numerals.

[0142] Description of the label

[0143] 101: Anode

[0144] 102: Hollow sleeve container

[0145] 103: A metal grip through which a heating current flows

[0146] 104: Upper part of Wehnelt electrode for controlling electron emission amount

[0147] 105: Gear

[0148] 106: Lower part of Wehnelt electrode for controlling electron emission amount

[0149] 107: Electron beam emitted in the direction opposite to gravity

[0150] 108: Liquid electron emission material

[0151] 109: Direction of gravity

[0152] 110: PG (pyrolytic graphite) heater

[0153] 111: A piston that moves up and down to keep the height of the upward liquid electron emission surface constant.

[0154] 112: Supporting member of piston 111

[0155] 113: Rack that meshes with 105 to move piston 111 up and down

[0156] 114: Ceramic disc for fixing the electrical insulator of 103

[0157] 115: Upper part of Wehnelt electrode for controlling electron emission

[0158] 116: Lower part of Wehnelt electrode for controlling electron emission amount

[0159] 117: A metal grip through which a heating current flows

[0160] 118: PG (pyrolytic graphite) heater

[0161] 119: Anode

[0162] 120: Electron beam emitted in the direction of gravity

[0163] 121: Direction of gravity

[0164] 122: Ceramic disc for fixing the electrical insulator of 117

[0165] 123: Back cover for a hollow sleeve container for preventing unwanted evaporation of liquid electron-emitting material

[0166] 124: Hollow sleeve container

[0167] 125: Liquid electron emission material

[0168] 201: Upper part of Wehnelt electrode for controlling electron emission

[0169] 202: Lower part of Wehnelt electrode for controlling electron emission amount

[0170] 203: A metal grip through which a heating current flows

[0171] 204: PG (pyrolytic graphite) heater

[0172] 205: Anode

[0173] 206: Ceramic disc for fixing the electrical insulator of 203

[0174] 207: LaB6 single crystal at the beginning of use

[0175] 208: Electron emission distribution at the beginning of use

[0176] 209: Upper part of Wehnelt electrode for controlling electron emission

[0177] 210: Lower part of Wehnelt electrode for controlling electron emission

[0178] 211: A metal grip through which a heating current flows

[0179] 212: PG (pyrolytic graphite) heater

[0180] 213: Anode

[0181] 214: Ceramic disc for fixing the electrical insulator of 211

[0182] 215: LaB6 crystal section held by a heater

[0183] 216: Evaporated LaB6 crystals accumulate on the PG heater, reducing the heater resistance and causing the temperature to drop.

[0184] 217: Shape of LaB6 single crystal lost due to high temperature sublimation

[0185] 218: The shape of a lossless LaB6 single crystal at the beginning of use

[0186] 219: Electron emission distribution at the beginning of use and after the loss of LaB6 single crystal changes

[0187] 220: Electron emission distribution at the beginning of use

[0188] 301: Upper part of Wehnelt electrode for controlling electron emission

[0189] 302: Lower part of Wehnelt electrode for controlling electron emission amount

[0190] 303: A metal grip through which a heating current flows

[0191] 304: PG (pyrolytic graphite) heater

[0192] 305: Hollow sleeve container

[0193] 306: Anode

[0194] 307: Ceramic disc for fixing the electrical insulator of 303

[0195] 308: Direction of evaporation of liquid electron emission material from the back of the sleeve container

[0196] 309: Liquid electron emission materials

[0197] 310: Electron beam emitted in the direction of gravity

[0198] 311: Upper part of Wehnelt electrode for electron emission control

[0199] 312: Lower part of Wehnelt electrode for electron emission control

[0200] 313: A metal grip through which a heating current flows

[0201] 314: PG (pyrolytic graphite) heater

[0202] 315: Hollow sleeve container

[0203] 316: Anode

[0204] 317: Ceramic disc for fixing the electrical insulator of 313

[0205] 318: Direction of evaporation of liquid electron-emitting material from the back of the sleeve container

[0206] 319: Liquid electron emission material after evaporation and reduction of total liquid volume over time

[0207] 320: Electron beam emitted in the direction of gravity

[0208] 401: Glass substrate

[0209] 402: Water

[0210] 403: Glass tube

[0211] 404: Container of water

[0212] 405: Water

[0213] 406: The upper surface of water that rises due to capillary action

[0214] 407: Water surface outside the glass tube of a water container

[0215] 408: Glass Tube

[0216] 409: When the water inside the glass tube is separated from the water container by capillary action, the bottom surface of the water inside the glass tube becomes a roughly flat surface due to surface tension.

[0217] 410: Glass substrate

[0218] 411: For example, mercury

[0219] 412: Mercury level outside the glass tube

[0220] 413: Mercury container

[0221] 414: Mercury

[0222] 415: Glass Tube

[0223] 416: The upper surface of the mercury lowered inside the glass tube

[0224] 417: When a glass tube is pulled out of a mercury container and becomes empty, a glass tube with a contact angle greater than 90 degrees has poor wettability with mercury, and no mercury remains in the tube due to capillary phenomenon

[0225] 601: Overall picture of liquid electron gun

[0226] 602: Electron beam emitted in the direction of gravity

[0227] 603: Lanthanum atoms as electron-emitting materials

[0228] 604: Overall picture of liquid electron gun

[0229] 605: Electron beam emitted in the direction of gravity

[0230] 606: Hydrogen atoms entering lanthanum atomic liquid

[0231] 703: Emission current characteristics of lanthanum hydride

[0232] 704: Emission current characteristics of LaB6 single crystal

[0233] 705: Emission current characteristics of tungsten

[0234] 901: Overall picture of liquid electron gun

[0235] 902: High temperature photocatalyst powder, TiO2 or WO3, for cleaning carbon contamination inside lanthanum solution

[0236] 903: Lanthanum hydride as a liquid electron-emitting material

[0237] 904: Back cover of sleeve container for preventing lanthanum hydride from evaporating from the back of the electron gun emission surface

[0238] 905: Hollow sleeve container

[0239] 906: Overall picture of liquid electron gun

[0240] 907: Films of high temperature photocatalysts for cleaning carbon contamination inside lanthanum solutions, TiO2 or WO3

[0241] 908: Lanthanum hydride as a liquid electron-emitting material

[0242] 909: Back cover of a sleeve container for preventing lanthanum hydride from evaporating from the back of the electron gun emission surface

[0243] 910: Hollow sleeve container

[0244] 1001: Lanthanum hydride as a liquid electron-emitting material

[0245] 1002: Hollow sleeve container

[0246] 1003: The liquid surface of the opening at the front end of the open sleeve container of the liquid electron gun material is formed into a roughly flat surface or a part of a spherical surface with a large radius by surface tension

[0247] 1004: Wehner electrode for controlling the amount of electron emission

[0248] 1005a, 1005b: Metal gripping tool through which heating current flows

[0249] 1006a, 1006b: PG (pyrolytic graphite) heater

[0250] 1007: Hydrogen gas flowing into the electron gun cavity

[0251] 1008: Electron beam emitted in the direction of gravity

[0252] 1009: Ceramic disc for fixing electrical insulators of grippers

[0253] 1010: Valve placed between the electron gun cavity and the turbomolecular pump

[0254] 1011a, 1011b, 1011c: Turbomolecular pump

[0255] 1012: vacuum partition wall between the anode and electron gun chamber and the downstream second column

[0256] 1013: Vacuum partition wall between the second column and the third column

[0257] 1014: Rough Dry Pump

[0258] 1015: Working substrate irradiated with electron beam, for electron beam observation, electron beam drawing or electron beam welding

[0259] 1016: The third column for electron beam irradiation

[0260] 1017: Electron beam deflection electrode

[0261] 1018: Magnetic field lens for electron beam focusing

[0262] 1019: Second level column

[0263] 1020: Hydrogen cylinder

[0264] 1021: Mass flow controller for hydrogen flow regulation

[0265] 1101: Mechanical device for holding a hollow sleeve container and moving it in the lateral and vertical directions

[0266] 1102: Hollow sleeve container

[0267] 1103: Crucible or boat for liquid metal

[0268] 1104: Power supply for heaters used to melt liquid metal

[0269] 1105: Transmission line from power supply to heater for melting liquid metal

[0270] 1106: Vacuum chamber for melting liquid metal

[0271] 1107: Lanthanum solution as liquid metal

[0272] 1108: Vacuum pump

[0273] 1109: Mass flow controller for hydrogen flow regulation

[0274] 1110: Hydrogen cylinder

[0275] 1111: Heater for melting liquid metal

[0276] 1201: Ceramic disc for fixing electrical insulators of grippers

[0277] 1202: A metal grip through which a heating current flows

[0278] 1203: PG (pyrolytic graphite) heater

[0279] 1204: Direction of gravity

[0280] 1205: Container for lanthanum hydride powder

[0281] 1206: Lanthanum hydride powder contained in a hollow sleeve container

[0282] 1207: Hollow sleeve container

[0283] 1208: Lanthanum hydride powder contained in a hollow sleeve container

[0284] 1209: Direction of gravity

[0285] 1210: Power supply to heater transmission line for melting liquid metal

[0286] 1211: Power supply for heaters used to melt liquid metal

[0287] 1212: The melted liquid metal material is lanthanum hydride

[0288] 1213: Vacuum chamber for melting liquid metal

[0289] 1214: Vacuum pump

[0290] 1215: Hydrogen cylinder

[0291] 1216: Mass flow controller for hydrogen flow regulation

[0292] 1217: Direction of Gravity

[0293] 1301: Hydrogen storage alloy atoms for further supplying hydrogen to lanthanum hydride as a liquid metal material

[0294] 1302: Hydrogen molecules stored in 1301

[0295] 1303: Hydrogen molecules released from hydrogen storage alloys

[0296] 1401: Upper part of Wehnelt electrode for controlling electron emission

[0297] 1402: A metal gripper through which a heating current flows

[0298] 1403: PG (pyrolytic graphite) heater

[0299] 1404: Lower part of Wehnelt electrode for controlling electron emission amount

[0300] 1405: Anode

[0301] 1406: Multiple electron beams emitted in parallel

[0302] 1407: Ceramic disc for fixing electrical insulator of gripper

[0303] 1408: Back cover for a hollow sleeve container for preventing unwanted evaporation of liquid electron-emitting material

[0304] 1409: Lanthanum hydride as a liquid electron-emitting material

[0305] 1410: Hollow sleeve container

[0306] 1411: The front open surface is provided with a component formed of a thin high melting point conductive material with a plurality of round or square holes.

[0307] 1501: Upper part of Wehnelt electrode for electron emission control

[0308] 1502: A metal grip through which a heating current flows

[0309] 1503: PG (pyrolytic graphite) heater

[0310] 1504: Lower part of Wehnelt electrode for electron emission control

[0311] 1505: Anode

[0312] 1506: Multiple electron beams emitted from liquid electron emitting materials in multiple hollow sleeve containers

[0313] 1507: Ceramic disc for fixing electrical insulators of grippers

[0314] 1508: Lanthanum hydride as a liquid electron-emitting material

[0315] 1509: A component formed by bundling multiple hollow sleeve containers

[0316] 1510: Back cover for a hollow sleeve container for preventing unwanted evaporation of liquid electron-emitting material

[0317] 1601: Solid lanthanum hydride for periodic replenishment of liquid metal electron guns

[0318] 1602: Direction of Gravity

[0319] 1603: Mechanism for periodically replenishing liquid metal electron gun

[0320] 1604: Ceramic disc for fixing electrical insulators of grippers

[0321] 1605a, 1605b, 1605c: Solid lanthanum hydride falling from the back opening of the hollow jacket container

[0322] 1606: Upper part of Wehnelt electrode for electron emission control

[0323] 1607: A metal grip through which a heating current flows

[0324] 1608: PG (pyrolytic graphite) heater

[0325] 1609: Lower part of Wehnelt electrode for electron emission control

[0326] 1610: Anode

[0327] 1611: Electron beam emitted in the direction of gravity

[0328] 1612: Hollow sleeve container

[0329] 1613: Lanthanum hydride as a liquid electron-emitting material

[0330] 1701: Direction of Gravity

[0331] 1702: The approximate plane of the liquid electron emission material when gravity is tilted about 45 degrees toward the electron gun below. It is almost unchanged compared to when it is vertical.

Claims

1. An electron gun device that emits electron beams by heating to a high temperature of 1000° C. or higher and 1600° C. or lower in a vacuum, The surface of the electron beam emitting material is a liquid hydride metal that melts when working at high temperatures. The liquid metal of the hydrogenated liquid metal is a lanthanum group metal, such as lanthanum, cerium, gadolinium, terbium or praseodymium. Liquid hydride metal is contained in a hollow jacket container which is solid during high-temperature operation as hydride liquid metal or liquid metal before hydride, and is heated to a high temperature together with the jacket container. The hydride liquid metal emerges from the jacket container, forming a liquid surface where gravity, electric field and surface tension of the liquid surface are mutually balanced. Electron beams are emitted from the exposed hydrogenated liquid metal surface.

2. The electron gun device according to claim 1, wherein: The surface of the hydrogenated liquid metal emits electron beams in a range of plus or minus 60 degrees or in a direction opposite to gravity when its normal vector is directed in the direction of gravity relative to the gravity direction.

3. The electron gun device according to claim 1 or 2, wherein: At high operating temperature, the vapor pressure of liquid metal in vacuum is 10 -6 Pascal to 1 Pascal.

4. The electron gun device according to claim 1 or 2, wherein: When the direction of electron beam emission is opposite to gravity, liquid metal is contained in a hollow jacket container having an opening at the top, and the surface of the liquid metal forms a liquid surface perpendicular to the same direction as gravity, and electron beams are emitted from the liquid surface.

5. The electron gun device according to claim 1 or 2, wherein: When the direction of electron beam emission is the same as the direction of gravity, liquid metal is contained in a hollow jacket container having an opening at the bottom, and the surface of the liquid metal forms a liquid surface perpendicular to the axis of the jacket container, and electron beams are emitted from the liquid surface.

6. The electron gun device according to claim 5, wherein: The liquid material emitting electron beams adheres to the inner wall side of the hollow sleeve container by capillary phenomenon, and the electron emission surface is the lowest point facing the gravity direction. The gravity applied to the liquid metal, the electrostatic force generated by the surface electric field of the electrode for extracting electrons, and the surface tension between the sleeve container and the liquid metal form a static and mutually balanced liquid metal surface. The radius of the largest part of the inner diameter of the sleeve container is 0.1 mm to 1 mm.

7. The electron gun device according to claim 6, wherein: The hollow jacket container is formed of a high melting point material having a contact angle of 90 degrees or less with respect to liquid metal when heated at high temperature. The hollow sleeve is shaped to cover the side of the electron beam emitting material facing the gravity axis. The shape is a prism, cylinder, or truncated cone with the direction of gravity as the central axis. The internal shape is a prism, cylinder, or truncated cone with the direction of gravity as the central axis.

8. The electron gun device according to claim 7, wherein: When the average radius of the cylinder or prism constituting the lowermost inner surface of the hollow sleeve is R, the minimum limit of the liquid metal capacity is 4πR 3 / 3, that is, the volume of the sphere that can be attached to the inner surface is determined as the amount of liquid that will not cause liquid to sag from the opening of the lower sleeve container, When the maximum radius of the cross section with the largest inner diameter of the cross section inside the sleeve container is set to r (cm), the contact angle between the sleeve material and the liquid metal material for electron emission is set to θ (degrees), the surface tension of the liquid metal is set to γLG (dyne / cm), the density of the liquid metal is set to ρ, and the ρ is 5 to 10 when water is set to 1, and the acceleration is set to 980 (g·cm / s 2 : cgs unit system), The maximum limit of the liquid metal capacity is set to be less than 4 / 5 of the height of the liquid metal in the gravity direction h=2γLG×cos(θ(degrees)) / (r×ρ×980)(cm), so that liquid sagging will not occur from the bottom of the sleeve container.

9. The electron gun device according to claim 1, wherein: The base material of the hollow sleeve container is a high melting point metal, or is mainly formed of metal boride.

10. The electron gun device according to claim 1 or 2, wherein: Hydrogen gas is flowed into the vacuum chamber for maintaining the vacuum in a timely or continuous manner.

11. The electron gun device according to claim 1 or 2, wherein: A cover is provided on the surface of the hollow jacketed container opposite to the exposed surface of the hydrogenated liquid metal.

12. The electron gun device according to claim 1 or 2, wherein: A solid hydrogen storage alloy of palladium, titanium, zirconium, vanadium or nickel that absorbs a large amount of hydrogen is contained inside the hollow jacket container together with the liquid metal material. The solid hydrogen storage alloy is contained in the hollow jacket together with the liquid metal material.

13. The electron gun device according to claim 1 or 2, wherein: A plate-like member having a plurality of holes is provided on the surface of the electron beam emitting side of the hollow sleeve, and the hydrogenated liquid metal stays inside the holes to form a liquid surface emitting electron beams, thereby emitting a plurality of electron beams in parallel.

14. The electron gun device according to claim 1 or 2, wherein: Bundle multiple hollow sleeve containers.

15. The electron gun device according to claim 1 or 2, wherein: A material of hydrogenated liquid metal is filled in a solid or liquid form from the side of the hollow jacket container opposite to the electron beam emitting side.

16. The electron gun device according to claim 1, wherein The base material of the hollow sleeve container is mainly formed of single crystals of titanium diboride, zirconium diboride, hafnium diboride, tantalum diboride or yttrium diboride.

Images