Versatile in situ characterization and testing device

Abstract

The present invention discloses a multifunctional in-situ characterization and testing device, including a mounting seat and a sealing cover plate, a receiving cavity is provided at the upper end of the mounting seat, and thermal insulation ceramic plates are provided around and at the bottom of the receiving cavity, and all the thermal insulation ceramic plates surround an insulation chamber, a heating platform is provided in the insulation chamber, and a heating component and a temperature control component are provided inside the heating platform; at least two probes are provided on the side wall of the insulation chamber, and when the sensor element to be detected is placed on the heating platform, all the probes are pressed against the upper surface of the sensor element to be detected; an air inlet and an air outlet connected to the insulation chamber are provided on the side wall of the mounting seat; the sealing cover plate is detachably connected to the upper end of the mounting seat, and the receiving cavity is located within the range sealed by the sealing cover plate, and a light-transmitting member is provided at a position on the sealing cover plate corresponding to the insulation chamber. The multifunctional in-situ testing device disclosed by the present invention can realize the detection of sensor temperature, humidity, and gas in a controllable environment with multiple parameters, and has a simple structure and convenient operation.

Description

Technical Field

[0001] The invention relates to the field of performance testing devices for electronic materials and sensors, in particular to a multifunctional in-situ characterization and testing device. Background Art

[0002] In the research, development and production stages of electronic materials and sensors, in-situ characterization and testing, analysis of sensitive mechanisms, and acquisition of various test data of the sensor are of great help in the next step of sensor development and optimization. If a closed gas environment is required for in-situ characterization and testing of gas sensors, this places higher requirements on in-situ characterization and testing equipment.

[0003] At present, the existing gas sensor element testing devices on the market have complex structures and high costs, especially in the laboratory testing process. They are not well applied. In addition, the existing detection devices used in the laboratory cannot meet the testing requirements of local high temperature in situ and fast response parameters. Secondly, the large cavity caused by the complex structure can easily lead to hysteresis of the sensor response curve when switching the atmosphere, and the test performance is relatively simple, which cannot meet more precise testing needs. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a multifunctional in-situ characterization and testing device, which can realize the sensor performance detection and in-situ observation characterization functions under temperature, humidity, gas and other environments, and has a simple structure, convenient atmosphere switching, stable temperature control, small cavity volume, convenient operation, and good practical application effect.

[0005] A technical solution adopted by the present invention is: to provide a multifunctional in-situ characterization and testing device, including a mounting seat and a sealing cover plate, the upper end of the mounting seat is provided with a concave accommodating cavity, the four sides and the bottom of the accommodating cavity are provided with thermal insulation ceramic plates, all the thermal insulation ceramic plates surround an insulation chamber, a heating platform is provided in the insulation chamber, and a heating component and a temperature control component are provided inside the heating platform; at least two probes are provided on the side wall of the insulation chamber, when the element to be detected is placed on the heating platform, all the probes are pressed against the upper surface of the element to be detected; the side wall of the mounting seat is provided with an air inlet and an air outlet connected to the insulation chamber; the sealing cover plate is detachably connected to the upper end of the mounting seat, and the accommodating cavity is located within the range sealed by the sealing cover plate, and a light-transmitting member is provided at a position on the sealing cover plate corresponding to the insulation chamber.

[0006] Compared with the prior art, the testing and characterization device of the present invention has the following advantages:

[0007] The test device disclosed in the present invention is a multi-purpose in-situ test and characterization device for detecting the performance of sensor elements. It integrates temperature, humidity, gas control and sensor performance detection, and can realize the in-situ characterization of the reaction kinetics process of the sensor element under a high temperature environment; and the center of the sealing cover plate of the in-situ test cavity is a light-transmitting member for light transmission of different bands, which is convenient for the use of infrared spectroscopy or Raman spectroscopy for light treatment during the experiment; the high temperature of the in-situ test cavity is achieved by an internal heating table, and the heating table can realize PID closed-loop control of the temperature in conjunction with the temperature control device to achieve continuous temperature regulation; the heating table is surrounded by thermal insulation ceramics, which can achieve local high temperature inside the aluminum test cavity; in addition, the inner cavity structure of the mounting seat is more streamlined, the cavity area is smaller, the gas switching is faster and more convenient during the test, and the response recovery time is shorter. On the other hand, it also reduces the production cost, provides researchers with more autonomy and convenience, and saves precious time in research.

[0008] As an improvement, the thermal insulation ceramic plate is made of porous ceramic material, and the thermal insulation ceramic plates on the left and right sides of the mounting seat are respectively provided with mounting grooves on the side near the insulation chamber, and the mounting grooves are embedded with fixed ceramic plates made of dense ceramic material, and the fixed ceramic plates are provided with mounting holes connected along the left and right directions. The probes are symmetrically arranged on the fixed ceramic plates on the left and right sides, and one end of the probe is inserted into the mounting hole, and the other end of the probe passes through the thermal insulation ceramic plate and the mounting seat in turn to be connected with the external probe lead. In the above-mentioned improved structure, the thermal insulation ceramic plate is made of porous ceramic, which is light in weight and has good thermal insulation effect; in addition, since drilling is required for installing the probe, in order to ensure the structural strength, a dense ceramic material with better mechanical properties and processing properties is selected as the material of the fixed ceramic plate.

[0009] As a further improvement, the fixed ceramic plate is provided with interconnected plug holes and adjustment holes along the direction from the outside to the inside, the probe can be slidably mounted in the plug hole in the horizontal direction, and the end of the probe near the insulation chamber can move downward in the adjustment hole; the upper end of the fixed ceramic plate is provided with fastening screws extending vertically to the plug hole and the adjustment hole respectively; and the lower end of the fastening screw rests on the side wall of the probe. In the above improved structure, the probe can slide horizontally on the fixed ceramic plate to adjust the left and right position, and the head position of the probe can also be fine-tuned up and down, so that the probe can move downward so as to support the sensor element, limit it, and prevent the position of the element to be detected from shifting at high temperature.

[0010] As a further improvement, the upper end surfaces on the left and right sides of the mounting seat are provided with card slots for accommodating the probe leads, and the upper end of the mounting seat and the left and right sides of the insulation chamber are also provided with first avoidance grooves for connecting the card slots and the accommodating chamber; the end of the probe away from the insulation chamber extends into the first avoidance groove. In the above-mentioned improved structure, due to the sealing requirements of the inspection device, the probe leads and the card slots on the mounting seat need to be sealed during installation, so when the left and right positions of the probe need to be fine-tuned later, the leads in the card slots cannot be moved; at this time, the first avoidance groove plays an adjustment role, that is, during installation, a slightly longer lead can be reserved in the first avoidance groove, so that the probe will not touch the leads in the card slot when the horizontal fine-tuning is performed, thereby ensuring the sealing.

[0011] Preferably, the heating assembly includes a heating rod and a thermocouple extending in the front-to-back direction of the heating platform, and the insulating ceramic plate on the front side of the mounting seat is provided with through holes for the wiring ends of the heating rod and the thermocouple to pass through respectively; the front side wall of the mounting seat is provided with mounting holes for the leads of the heating rod and the thermocouple to pass through simultaneously. In the above improved structure, mounting holes for the two groups of signal leads of the heating rod and the thermocouple to pass through simultaneously are realized, the number of holes in the mounting seat is reduced, and the internal space of the mounting seat is streamlined to reduce the internal cavity area.

[0012] In a further improvement, a second avoidance groove connected to the insulation chamber is provided at the upper end of the mounting seat and located at the front side of the insulation chamber, and the ends of the heating rod and the thermocouple away from the heating platform pass through the through hole and extend into the second avoidance groove; the mounting hole is connected to the second avoidance groove. The provision of the second avoidance groove in the above structure can make it easier to install the heating component on the mounting seat and can better ensure the sealing of the insulation chamber.

[0013] In a further improvement, the air inlet and the air outlet are respectively provided on the front and rear side walls of the mounting seat, and the air inlet is connected to the second avoidance groove; the upper end surface of the heat preservation ceramic plate on the front and rear sides of the heat preservation chamber is flush with the upper end surface of the heating table. In the above improved structure, the air inlet passes through the through hole to quickly enter the detection area, so that the components to be detected can quickly achieve detection in different environmental requirements, thereby improving efficiency.

[0014] In a further improvement, a sunken cavity is provided at the bottom of the accommodating cavity, so that after the thermal insulation ceramic plate is installed at the bottom of the accommodating cavity, a space is left between the thermal insulation ceramic plate and the bottom of the cavity. In the above improved structure, an isolation space is left between the bottom thermal insulation ceramic plate and the main body of the mounting seat, and a certain amount of gas is contained in the space, so that the thermal insulation ceramic plate can better exert the thermal insulation effect, and the heat will not be directly dissipated through the mounting seat.

[0015] Preferably, the mounting seat and the sealing cover are made of aluminum; and the mounting seat and the sealing cover are provided with a plurality of heat dissipation holes that penetrate from top to bottom. Aluminum is light in weight, has good heat dissipation, and is easy to carry; in addition, heat dissipation holes are also provided on the mounting seat and the sealing cover, which further improves the heat dissipation efficiency.

[0016] Preferably, the probe is made of gold-plated tungsten steel. The material of the probe is a gold-plated tungsten steel probe, which can ensure the test sensitivity at high temperatures, and the gold-plated layer can prevent the tungsten steel from being oxidized by the test gas at high temperatures, causing the probe to be non-conductive. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the explosion structure of the multifunctional in-situ testing device of the present invention.

[0018] Figure 2 It is a structural schematic diagram of the multifunctional in-situ testing device of the present invention without a sealing cover plate.

[0019] Figure 3 It is a structural schematic diagram of the mounting base in the present invention.

[0020] Figure 4 yes Figure 3 Schematic diagram of the structure after the mounting base in FIG. 1 is installed with the thermal insulation ceramic plate.

[0021] Figure 5 yes Figure 4 Schematic diagram of a half-section of the structure.

[0022] Figure 6 It is a cross-sectional view of a fixed ceramic plate in the present invention.

[0023] Figure 7 It is a partial cross-sectional view of the sealing cover plate structure in the present invention.

[0024] As shown in the figure:

[0025] 1-mounting seat, 1.1-accommodating cavity, 1.2-concave cavity, 1.3-air inlet, 1.4-air outlet, 1.5-mounting hole, 1.6-card slot, 1.7-first avoidance groove, 1.8-second avoidance groove, 1.9-limiting boss, 2-insulating ceramic plate, 2.1-mounting groove, 3-heating table, 4-probe, 5-sealing cover, 6-light-transmitting part, 7-fixing ceramic plate, 7.1-plug-in hole, 7.2-adjusting hole, 8-fastening screw, 9-heat dissipation hole, 10-sealing gasket, 11-sealing gasket, 12-glass fixing ring, 13-ceramic screw, 14-insulating chamber. DETAILED DESCRIPTION

[0026] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0027] In the description of the present invention, it should be noted that the terms "left, right", "upper end", "front, rear", "middle", "inside and outside", "lower end", "interior", "both sides" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. It should also be noted that the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0028] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the term "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] like Figure 1 , 2 As shown, the present invention provides a multifunctional in-situ testing device, including a rectangular mounting base 1, a concave accommodating chamber 1.1 is provided in the middle of the upper end of the mounting base 1, and the accommodating chamber 1.1 is a rectangular cavity structure, and thermal insulation ceramic plates 2 are provided around and at the bottom of the accommodating chamber 1.1, and all the thermal insulation ceramic plates 2 surround an insulation chamber 14 with an upper opening, as shown in FIG. Figure 4 As shown; a heating platform 3 is installed in the inner cavity of the heat preservation chamber 14. After such arrangement, a heating detection area is formed between the upper end surface of the heating platform 3 and the inner side walls of the four circumferential heat preservation ceramic plates 2; in addition, a heating component and a temperature control component are arranged inside the heating platform 3; at least two probes 4 are arranged on the side wall of the heat preservation chamber 14. When the element to be detected is placed on the heating platform 3, all the probes 4 are pressed against the upper surface of the element to be detected (sensor element) to realize the performance detection of the sensor element. In this embodiment, the sensor element involved is a sensor chip.

[0030] Preferably, at least two probes 4 in the above structure are symmetrically arranged on any two opposite side walls of the mounting base 1, and the probes 4 on the two side walls are arranged symmetrically with each other, so that the probes 4 can perform more stable and accurate press-fit detection on the components to be detected. Specifically, Figure 2As shown, four probes 4 are respectively provided on the left and right sides of the insulation chamber 14, and the four probes 4 are symmetrically arranged in pairs along the left and right directions, realizing four groups of probes 4 for detection, and four sensor elements can be detected simultaneously. While the probes 4 are used to detect the performance of the sensor elements, they can also play a role in compression and positioning. How to achieve vertical compression and positioning is specifically described in detail later.

[0031] On the other hand, in the structure of the present embodiment, an air inlet 1.3 and an air outlet 1.4 connected to the insulation chamber 14 are provided on the side wall of the mounting base 1; thereby, various gases can be introduced into the insulation chamber 14 to realize the performance detection of the sensor element in different gas environments; in addition, a trace amount of moisture can be added to the gas introduced into the insulation chamber 14 to realize environmental detection of different humidities, that is, a multifunctional test of the sensor element in different temperature, gas and humidity environments can be realized through a detection device.

[0032] In the above structure, since the entire test environment needs to be carried out in a sealed environment, a sealing cover plate 5 is detachably connected to the upper end of the mounting base 1, and the accommodating cavity 1.1 is located within the range sealed by the sealing cover plate 5, so that the insulation chamber 14 forms a sealed chamber. In addition, a light-transmitting component 6 is detachably installed in the middle part of the sealing cover plate 5, i.e., at a position corresponding to the insulation chamber 14. Preferably, the light-transmitting component 6 is a light-transmitting glass sheet.

[0033] Specifically, Figure 1 As shown, a sealing gasket 10 is provided between the mounting seat 1 and the sealing cover plate 5 to achieve sealing cooperation between the mounting seat 1 and the sealing cover plate 5. Preferably, the sealing gasket 10 is made of polytetrafluoroethylene material, which has better high temperature resistance. The four corners of the upper cover 5 are detachably connected and fixed to the mounting seat 1 by corresponding connecting screws. In addition, a circular window 5.1 is provided in the middle of the upper end of the sealing cover plate 5, a circular first step groove 5.2 for fitting the light-transmitting member 6 is provided on the outer periphery of the window, and a sealing gasket 11 made of polytetrafluoroethylene is provided between the light-transmitting member 6 and the first step groove 5.2, and a circular second step groove 5.3 with a diameter larger than the first step groove 5.2 is provided on the sealing cover plate 5 above the first step groove 5.2, a glass fixing ring 12 is provided on the second step groove 5.3, and the inner end of the glass fixing ring 12 is pressed and positioned on the upper end surface of the light-transmitting member 6, and the outer end of the glass fixing ring 12 is fixed to the second step groove 5.3 by corresponding screw connection, thereby realizing the detachable and sealed connection and fixation of the light-transmitting member 6 and the sealing cover plate 5. After such arrangement, the light-transmitting member 6 can be replaced as required, such as Figure 7As shown. The window for installing the glass sheet on the upper cover of the test cavity is designed in a circular shape, which can better ensure the strength of the upper cover of the test cavity; in addition, the lower end of the light-transmitting member 6 is limited by a sealing gasket 11 made of polytetrafluoroethylene material to ensure the airtightness of the cavity and prevent the light-transmitting member 6 from being crushed; the light-transmitting member 6 is fixed with a glass fixing ring 12 made of an annular aluminum material, which can be tightly fixed on the sealing cover plate 5 with M3 screws, and the screws do not penetrate the sealing cover plate 5 and do not contact the light-transmitting member 6, thereby ensuring the stability and the sealing of the connection structure between the light-transmitting member 6 and the sealing cover plate 5.

[0034] In this embodiment, the thermal insulation ceramic plate 2 is made of porous ceramic material, and the thermal insulation ceramic plate 2 on the left and right sides of the mounting seat 1 is respectively provided with a vertically extending mounting groove 2.1 on one side near the insulation chamber 14, and the mounting groove 2.1 is embedded with a fixed ceramic plate 7 made of dense ceramic material; one end of the probe 4 passes through the fixed ceramic plate 7 and extends to the insulation chamber 14, and the other end of the probe 4 passes through the thermal insulation ceramic plate 2 and the mounting seat 1 in turn to be connected with an external probe lead.

[0035] like Figure 2 , 6 As shown, the fixed ceramic plate 7 is provided with a connecting hole 7.1 and an adjusting hole 7.2 which are connected from the outside to the inside, the probe 4 is slidably mounted in the connecting hole 7.1 in the horizontal direction, and the end of the probe 4 near the insulation chamber 14 can move downward in the adjusting hole 7.2; the upper end of the fixed ceramic plate 7 is provided with a fastening screw 8 which extends vertically to the inside of the connecting hole 7.1 and the adjusting hole 7.2, and the lower end of the fastening screw 8 is against the side wall of the probe 4. Specifically, as Figure 6 As shown, the plug-in hole 7.1 is a cylindrical hole, and the adjustment hole 7.2 is a waist-shaped hole arranged vertically, and the upper end surface of the adjustment hole 7.2 is flush with the upper end of the plug-in hole 7.1; that is, when the probe 4 is inserted from the plug-in hole 7.1 toward the insulation chamber 14 to the set position, the positioning of the probe 4 can be achieved by the fastening screw 8 above the plug-in hole 7.1. When the height of the probe 4 needs to be adjusted, the fastening screw 8 above the adjustment hole 7.2 can be screwed to cause the part of the probe 4 located in the adjustment hole 7.2 to undergo a slight elastic deformation downward, thereby causing the probe 4 to be vertically pressed and limited on the upper surface of the sensor element. While realizing signal detection, the limiting effect can also be achieved by pressing the probe 4 on the upper end surface of the sensor element, thereby avoiding inaccurate detection results caused by position displacement of the sensor element in a high temperature environment. On the other hand, the fixed ceramic plate 7 in the above structure can fix the probe 4 and ensure the insulation between the probe 4 and the accommodating cavity 1.1, so as to prevent short circuit between the probe 4 and the accommodating cavity 1.1 and ensure stable output of the detection signal.

[0036] Preferably, Figure 2 , 4As shown, a card slot 1.6 for accommodating the probe lead is provided on the upper end surface on the left and right sides of the mounting seat 1, and a first avoidance groove 1.7 for connecting the card slot 1.6 and the accommodating cavity 1.1 is also provided on the upper end of the mounting seat 1 and on the left and right sides of the insulation chamber 14; the end of the probe 4 away from the insulation chamber 14 extends into the first avoidance groove 1.7.

[0037] In this embodiment, the heating assembly includes a heating rod and a thermocouple (not shown in the figure) extending in the front-to-back direction of the heating platform 3. Through holes 2.1 for the wiring ends of the heating rod and the thermocouple to pass through are respectively provided on the thermal insulation ceramic plate 2 on the front side of the mounting seat 1; and a mounting hole 1.5 for the leads of the heating rod and the thermocouple to pass through simultaneously is provided on the front side wall of the mounting seat 1. The mounting seat 1 is provided with a mounting hole 1.5 for two groups of signal leads of the heating rod and the thermocouple to pass through simultaneously. Specifically, the two groups of signal leads in this mounting hole 1.5 are led out through an aviation plug and docked with another external aviation plug connected to the heating rod and the thermocouple signal leads.

[0038] More specifically, the upper end of the mounting base 1 and the front side of the heat preservation chamber 14 is provided with a second avoidance groove 1.8 connected to the heat preservation chamber 14, and the ends of the heating rod and the thermocouple away from the heating platform 3 pass through the through hole 2.1 and extend into the second avoidance groove 1.8; the mounting hole 1.3 is connected to the second avoidance groove 1.8. Figure 4 As shown, the air inlet 1.3 and the air outlet 1.4 are respectively provided on the front and rear side walls of the mounting seat 1, and the air inlet 1.3 is connected to the second avoidance groove 1.8; the upper end surface of the thermal insulation ceramic plate 2 on the front and rear sides of the thermal insulation chamber 14 is flush with the upper end surface of the heating platform 3. The front and rear side walls of the mounting seat 1 are provided with asymmetric air inlet 1.3 and air outlet 1.4 in the front and rear directions. The gas enters the thermal insulation chamber 14 through the air inlet 1.3 and is discharged through the air outlet 1.4. In addition, in this structure, the upper end surface of the thermal insulation ceramic plate 2 located on the front and rear sides of the thermal insulation chamber 14 is lower than the thermal insulation ceramic plate 2 on the left and right sides to form a lower groove, so that the gas introduced from the air inlet 1.3 can pass through the second avoidance groove 1.8, and then enter the thermal insulation chamber 14 from the lower groove, and finally be discharged from the lower groove on the other side through the air outlet 1.4. The entire structure ensures faster switching when the gas is introduced, reduces gas retention, and reduces the reaction time required for switching the gas.

[0039] On the other hand, Figure 5As shown, a sunken cavity 1.2 is provided at the bottom of the accommodating cavity 1.1, so that after the bottom of the accommodating cavity 1.1 is equipped with a thermal insulation ceramic plate 2, a space is left between the thermal insulation ceramic plate 2 and the bottom of the cavity 1.2. After such a setting, a space is formed between the thermal insulation ceramic plate 2 and the cavity 1.2, and there is a certain amount of gas in the space to avoid direct contact between the thermal insulation ceramic plate 2 and the mounting seat 1, because in this embodiment, the mounting seat 1 adopts aluminum material with a relatively good heat dissipation effect, but the insulation chamber 14 area needs to ensure a local high temperature environment, so the interval setting in the above structure has a better insulation effect than direct contact.

[0040] like Figure 3 As shown, limiting bosses 1.9 are further provided on the left and right sides of the accommodating cavity 1.1. When the bottom of the accommodating cavity 1.1 is equipped with the thermal insulation ceramic plate 2, the upper surface of the thermal insulation ceramic plate 2 at the bottom is flush with the upper surface of the limiting boss 1.9. After such an arrangement, when the thermal insulation ceramic plates 2 are equipped around the accommodating cavity 1.1, the thermal insulation ceramic plates 2 on the left and right sides of the accommodating cavity 1.1 are simultaneously pressed onto the upper part of the outer edge of the limiting boss 1.9 and the bottom thermal insulation ceramic plate 2, as shown in FIG. Figure 5 As shown, the thermal insulation ceramic plate 2 at the bottom of the accommodating cavity 1.1 can be pressed and positioned to improve stability.

[0041] In the above structure, the mounting seat 1 and the sealing cover plate 5 are made of aluminum to ensure better heat dissipation effect; and the mounting seat 1 and the sealing cover plate 5 are provided with a plurality of heat dissipation holes 9 which pass through from top to bottom, and the sealing gasket 10 between the sealing cover plate 5 and the mounting seat 1 is also provided with corresponding through holes to ensure that the heat dissipation holes 9 on the mounting seat 1 and the sealing cover plate 5 are vertically connected, thereby further improving the heat dissipation effect.

[0042] In addition, the probe 4 is made of gold-plated tungsten steel. The reason why the material of the probe 4 in this embodiment is gold-plated tungsten steel is selected is that: the tungsten steel probe has very high strength below three thousand degrees Celsius, which can ensure that it is tightly against the sensor element; but the tungsten steel probe is very easy to be oxidized in a high-temperature atmosphere, and the resulting oxide layer will cause the probe to be non-conductive. Precious metal gold is not easy to oxidize at high temperatures (below one thousand degrees Celsius), but because of its soft texture and high price, it is not suitable for direct use as a probe material. The preferred gold-plated tungsten steel probe can solve the above problems. Tungsten steel can ensure strength at high temperatures, and the gold-plated layer can prevent the tungsten steel probe from being oxidized by the test gas at high temperatures and causing non-conduction.

[0043] In this embodiment, three ceramic screw supports 13 are also provided at the bottom of the mounting base 1. Figure 5 As shown, the three ceramic screws are distributed in a triangular shape. The triangular structure can make the support more stable, and at the same time, the high-temperature mounting base 1 does not directly contact the desktop, thereby achieving physical heat insulation and preventing the table and other supporting bodies from being burned.

[0044] The above is an explanation of the preferred embodiments of the present invention, but it cannot be understood as a limitation of the claims. The present invention is not limited to the above embodiments, and its specific structure is allowed to be changed. All changes made within the protection scope of the claims of the present invention are within the protection scope of the present invention.

Claims

1. A multifunctional in-situ characterization and testing device, characterized in that: The invention comprises a mounting seat (1) and a sealing cover plate (5); the mounting seat (1) is provided with a concave accommodating cavity (1.1) at the upper end; thermal insulation ceramic plates (2) are provided around and at the bottom of the accommodating cavity (1.1); all the thermal insulation ceramic plates (2) form a thermal insulation chamber (14); a heating platform (3) is provided in the thermal insulation chamber (14); a heating component and a temperature control component are provided inside the heating platform (3); at least two probes (4) are provided on the side wall of the thermal insulation chamber (14); when a component to be detected is placed When on the heating platform (3), all probes (4) are pressed against the upper surface of the sensor element to be detected; an air inlet (1.3) and an air outlet (1.4) which are in communication with the insulation chamber (14) are provided on the side wall of the mounting seat (1); the sealing cover plate (5) is detachably connected to the upper end of the mounting seat (1), and the accommodating cavity (1.1) is located within the range sealed by the sealing cover plate (5); a light-transmitting member (6) is provided on the sealing cover plate (5) at a position corresponding to the insulation chamber (14); The thermal insulation ceramic plate (2) is made of porous ceramic material, and the thermal insulation ceramic plates (2) on the left and right sides of the mounting seat (1) are respectively provided with mounting grooves on one side near the thermal insulation chamber (14), and the mounting grooves are embedded with fixed ceramic plates (7) made of dense ceramic material; the probes (4) are symmetrically arranged on the fixed ceramic plates (7) on the left and right sides, and one end of the probe (4) passes through the fixed ceramic plate (7) and extends to the thermal insulation chamber (14), and the other end of the probe (4) passes through the thermal insulation ceramic plate (2) and the mounting seat (1) in turn to be connected with an external probe lead; the fixed ceramic plate (7) is provided with interconnected plug holes (7.1) and adjustment holes along the direction from the outside to the inside. (7.2), the probe (4) is slidably mounted in the plug-in hole (7.1) in the horizontal direction, and one end of the probe (4) near the insulation chamber (14) can move downward in the adjustment hole (7.2); the upper end of the fixed ceramic plate (7) is respectively provided with a fastening screw (8) extending vertically to the plug-in hole (7.1) and the adjustment hole (7.2), and the lower end of the fastening screw (8) is against the side wall of the probe (4); the bottom of the accommodating chamber (1.1) is provided with a sunken cavity (1.2), so that after the insulation ceramic plate (2) is mounted on the bottom of the accommodating chamber (1.1), a space is left between the insulation ceramic plate (2) and the bottom of the cavity (1.2).

2. The multifunctional in-situ characterization and testing device according to claim 1, characterized in that: The upper end surfaces on the left and right sides of the mounting seat (1) are provided with a card slot (1.6) for accommodating the probe lead, and the upper end of the mounting seat (1) and the left and right sides of the insulation chamber (14) are also provided with a first avoidance groove (1.7) for connecting the card slot (1.6) and the accommodating chamber (1.1); one end of the probe (4) away from the insulation chamber (14) extends into the first avoidance groove (1.7).

3. The multifunctional in-situ characterization and testing device according to claim 1 or 2, characterized in that: The heating assembly comprises a heating rod and a thermocouple extending in the front-to-rear direction of the heating platform (3); the thermal insulation ceramic plate (2) on the front side of the mounting seat (1) is provided with through holes for the wiring ends of the heating rod and the thermocouple to pass through; and the front side wall of the mounting seat (1) is provided with mounting holes (1.5) for the leads of the heating rod and the thermocouple to pass through simultaneously.

4. The multifunctional in-situ characterization and testing device according to claim 3, characterized in that: A second avoidance groove (1.8) in communication with the insulation chamber (14) is provided at the upper end of the mounting seat (1) and located in front of the insulation chamber (14); the ends of the heating rod and the thermocouple away from the heating platform (3) pass through the through hole and extend into the second avoidance groove (1.8); and the mounting hole (1.5) is in communication with the second avoidance groove (1.8).

5. The multifunctional in-situ characterization and testing device according to claim 4, characterized in that: The air inlet (1.3) and the air outlet (1.4) are respectively provided on the front and rear side walls of the mounting seat (1), and the air inlet (1.3) is connected to the second avoidance groove (1.8); the upper end surfaces of the thermal insulation ceramic plates (2) on the front and rear sides of the thermal insulation chamber (14) are lower than the thermal insulation ceramic plates (2) on the left and right sides, so that the gas introduced through the air inlet (1.3) can enter the thermal insulation chamber (14) and be discharged from the air outlet (1.4).

6. The multifunctional in-situ characterization and testing device according to claim 1, characterized in that: The mounting seat (1) and the sealing cover plate (5) are made of aluminum material; and the mounting seat (1) and the sealing cover plate (5) are provided with a plurality of heat dissipation holes (9) that penetrate vertically.

7. The multifunctional in-situ characterization and testing device according to claim 1, characterized in that: The probe (4) is made of gold-plated tungsten steel.

Images