Mask plate and mask plate structure

Abstract

The present disclosure provides a mask plate and a mask plate structure. The mask plate includes a plate body. The plate body includes a through-engraving area with hollow holes, the through-engraving area includes a plurality of effective evaporation areas arranged at intervals and a spacing area between two adjacent effective evaporation areas; at least two of the plurality of effective evaporation areas are distributed along a first direction; the spacing area between two adjacent effective evaporation areas distributed along the first direction includes a non-hollowing area, and the area of ​​the non-hollowing area is greater than the area of ​​the hollow holes. The present disclosure can improve the evaporation effect.

Description

Technical Field

[0001] The present disclosure relates to the field of display technology, and in particular to a mask plate and a mask plate structure. Background Art

[0002] With the development of display technology, organic light-emitting diode display devices with faster response speed and higher contrast are becoming more and more widely used, and their manufacturing process has also attracted more and more attention. Among them, evaporation is a relatively mature process for manufacturing organic light-emitting diode display devices, and has been used in mass production. However, the existing evaporation effect is poor. Summary of the invention

[0003] The purpose of the present disclosure is to provide a mask plate and a mask plate structure, which can improve the evaporation effect.

[0004] According to one aspect of the present disclosure, a mask is provided, comprising:

[0005] A plate body comprises a through-engraved area with hollow holes, wherein the through-engraved area comprises a plurality of effective evaporation areas arranged at intervals and a spacing area between two adjacent effective evaporation areas; at least two of the plurality of effective evaporation areas are distributed along a first direction; the spacing area between two adjacent effective evaporation areas distributed along the first direction comprises a non-hollowed area, and the area of ​​the non-hollowed area is greater than the area of ​​the hollow holes.

[0006] Furthermore, a plurality of non-hollow areas are arranged at intervals between two adjacent effective vapor deposition areas, and some of the non-hollow areas are distributed along a second direction, and the second direction intersects with the first direction.

[0007] Furthermore, the plurality of non-hollow areas between two adjacent effective evaporation areas constitute a plurality of non-hollow columns, the plurality of non-hollow columns are spaced apart along the first direction, and each non-hollow column includes a plurality of non-hollow areas distributed along the second direction.

[0008] Furthermore, the plurality of non-hollow columns include a first non-hollow column and a second non-hollow column, the first non-hollow column and the second non-hollow column are arranged alternately, and the number of the non-hollow areas in the first non-hollow column is less than the number of the non-hollow areas in the second non-hollow column.

[0009] Furthermore, the number of the non-hollow columns is an odd number.

[0010] Further, the number of the first non-hollow columns is one more than the number of the second non-hollow columns; or

[0011] The number of the first non-hollow columns is one less than the number of the second non-hollow columns.

[0012] Further, the number of the non-hollow areas in the first non-hollow column is one less than the number of the non-hollow areas in the second non-hollow column.

[0013] Furthermore, at least four of the effective evaporation areas are distributed along the first direction to form at least three spacing areas distributed along the first direction; for the spacing areas distributed along the first direction, the number of the non-hollow areas in the spacing areas located at the middle position is less than the number of the non-hollow areas in the spacing areas located at the end positions.

[0014] Further, for the spacing areas distributed along the first direction, the number of the non-hollow areas in the spacing areas gradually increases from the middle position to the end position.

[0015] According to one aspect of the present disclosure, a mask plate structure is provided, comprising:

[0016] a frame having at least one opening;

[0017] The above-mentioned mask plate is arranged on the frame, and the effective evaporation area corresponds to the opening.

[0018] The mask plate and mask plate structure disclosed in the present invention include a non-hollow area in the interval area between two adjacent effective evaporation areas distributed along the first direction, and because the area of ​​the non-hollow area is larger than the area of ​​the hollow hole, the strength of the mask plate can be enhanced and the deformation of the mask plate during the stretching process can be reduced, that is, the wrinkles of the mask plate during the production and stretching process can be reduced, thereby solving the problem of scratches and foreign objects caused by the lamination of the mask plate and the substrate to be evaporated during the evaporation process, and can also enhance the lamination effect between the mask plate and the substrate to be evaporated, thereby improving PPA (Pixel Position Accuracy, pixel opening position accuracy). BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of an evaporation system in the related art.

[0020] Figure 2 It is a schematic diagram of a mask plate and a substrate in the related art.

[0021] Figure 3 It is another schematic diagram of a mask plate and a substrate in the related art.

[0022] Figure 4 is a schematic diagram of a mask plate according to an embodiment of the present disclosure.

[0023] Figure 5 and Figure 6 yes Figure 4 A partial schematic diagram of the structure shown.

[0024] Figure 7 is another schematic diagram of a mask plate according to an embodiment of the present disclosure.

[0025] Figure 8 and Fig. 9 yes Figure 7 A partial schematic diagram of the structure shown.

[0026] Explanation of the reference numerals: 1. through-engraving area; 101. effective evaporation area; 102. non-hollow area; 103. non-hollow column; 1031. first non-hollow column; 1032. second non-hollow column; 2. peripheral area; 201. buffer area; 202. alignment mark; 203. clamp; 204. solid material area; 3. evaporation source; 4. base; 5. mask plate; 6. substrate to be evaporated; 601. PS protrusion; 7. pressing plate; 8. magnetic partition. DETAILED DESCRIPTION

[0027] Exemplary embodiments will be described in detail herein, examples of which are shown in the accompanying drawings. When the following description refers to the drawings, the same numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present disclosure. Instead, they are merely examples of devices consistent with some aspects of the present disclosure as detailed in the appended claims.

[0028] The terms used in the present disclosure are only for the purpose of describing specific embodiments and are not intended to limit the present disclosure. Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The words "first", "second" and similar words used in the present disclosure specification and claims do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "one" do not indicate a quantity limit, but indicate that there is at least one. "Multiple" or "several" means two and more than two. Unless otherwise specified, words such as "front", "rear", "lower" and / or "upper" are only for the convenience of explanation and are not limited to one position or one spatial orientation. Words such as "include" or "comprise" mean that the elements or objects appearing in front of "include" or "comprise" include the elements or objects listed after "include" or "comprise" and their equivalents, and do not exclude other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, and can include electrical connections, whether direct or indirect. As used in this disclosure and the appended claims, the singular forms "a", "an", "said", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" as used herein refers to and encompasses any or all possible combinations of one or more of the associated listed items.

[0029] In the related art, the luminescent materials in the pixel area of ​​the organic light-emitting diode (OLED) are all formed by evaporation through an evaporation system. Figure 1 As shown, the evaporation system mainly includes an evaporation source 3, a magnetic baffle 8 (Magnet), a pressing plate 7 (Touch Plate), a substrate to be evaporated 6 (Glass) and a mask plate 5 (Mask). During the evaporation process, after the substrate to be evaporated 6 is introduced into the evaporation chamber and aligned with the mask plate 5 (the PS protrusion 601 is supported on the mask plate 5), the pressing plate 7 and the magnetic baffle 8 are lowered, and the substrate to be evaporated 6 and the mask plate 5 are closely attached to each other under the action of magnetic force to reduce the evaporation shadow.

[0030] The mask plate 5 may be a metal mask plate, and includes a through-engraved area with a hollow structure. Since the through-engraved area occupies a large area, the strength of the mask plate 5 is reduced. When the mask plate 5 is subjected to tension, the mask plate 5 is more likely to deform and generate large wrinkles. During evaporation, the mask plate 5 and the substrate 6 to be evaporated are bonded together. The wrinkles will cause problems such as scratching foreign objects and poor bonding, which will have a bad impact on the evaporation. Figure 2FIG. 5 shows the process of attaching the mask plate 5 to the substrate 6 to be evaporated, where the solid line represents the mask plate 5 before adsorption and the dotted line represents the mask plate 5 after adsorption. Figure 2 It can be seen from the figure that the wrinkles of the mask plate 5 are flattened due to the magnetic attraction. In the process of flattening the wrinkles due to the magnetic attraction, the mask plate 5 and the substrate 6 to be evaporated are always in a state of motion friction, that is, scraping. In the scraping process, the mask plate 5 scrapes the material on the substrate 6 to be evaporated to produce foreign matter. When the product is produced, the foreign matter will cause dark spot problems. Figure 3 As shown, after the evaporation is completed, the magnetic force between the mask plate 5 and the substrate to be evaporated 6 disappears. Due to the loss of the magnetic adsorption effect, the mask plate 5 changes from a flat state to a wrinkled state. During this change process, the organic material on the mask plate 5 due to the evaporation will fall off, and foreign matter will be generated in the evaporation chamber, affecting the evaporation effect.

[0031] In order to solve the above problems, the present disclosure provides a mask plate. Figure 4 and Figure 7 As shown, the mask plate is used to prepare a display module. The mask plate may include a plate body. The plate body includes a through-engraving area 1. The through-engraving area 1 is provided with a hollow hole. The through-engraving area 1 includes a plurality of effective evaporation areas 101 arranged at intervals and a spacing area between two adjacent effective evaporation areas 101. Among the plurality of effective evaporation areas 101, at least two effective evaporation areas 101 are distributed along a first direction. The spacing area between two adjacent effective evaporation areas 101 distributed along the first direction includes a non-hollow area 102, and the area of ​​the non-hollow area 102 is greater than the area of ​​the hollow hole.

[0032] The mask plate of the embodiment of the present disclosure includes a non-hollow area 102 in the interval area between two adjacent effective evaporation areas 101 distributed along the first direction, and because the area of ​​the non-hollow area 102 is larger than the area of ​​the hollow hole, the strength of the mask plate can be enhanced, and the deformation of the mask plate during the stretching process can be reduced, that is, the wrinkles of the mask plate during the production and stretching of the mask plate are reduced, thereby solving the problem of scratches and foreign objects caused by the bonding of the mask plate and the substrate to be evaporated during the evaporation process, improving the evaporation effect, and at the same time, enhancing the bonding effect between the mask plate and the substrate to be evaporated, and improving PPA (Pixel Position Accuracy, pixel opening position accuracy).

[0033] The following is a detailed description of each part of the mask plate according to the embodiment of the present disclosure:

[0034] like Figure 4 and Figure 7As shown, the plate body can be made of a high temperature resistant material. The high temperature resistant material can be an alloy material, but the embodiments of the present disclosure do not specifically limit this. The shape of the plate body can be a strip, of course, the shape of the plate body can also be other shapes, but the present disclosure is not limited thereto.

[0035] like Figure 4 and Figure 7 As shown, the above-mentioned display module may include a display area for displaying an image. The display area may include a plurality of pixels. Each pixel may include a plurality of sub-pixels, such as a red sub-pixel, a green sub-pixel, and a blue sub-pixel. The plate body includes a through-engraving area 1. The through-engraving area 1 may be in a strip shape, and the extension direction of the through-engraving area 1 in a strip shape may be the same as the extension direction of the plate body in a strip shape. The through-engraving area 1 is provided with a hollow structure to form a plurality of hollow holes in the through-engraving area 1. The through-engraving area 1 includes a plurality of effective evaporation areas 101 arranged at intervals. The number of the effective evaporation areas 101 may be two, three, four, six or more. Hollow holes are provided in each effective evaporation area 101. An effective evaporation area 101 may correspond to the display area of ​​the display module, and the hollow hole may correspond to a sub-pixel of the display module. The shape of the effective evaporation area 101 may be rectangular, square, etc.

[0036] like Figure 4 and Figure 7 As shown, there are at least two effective evaporation areas 101 in the plurality of effective evaporation areas 101 along the first direction ( Figure 4 and Figure 7 For example, all effective evaporation areas 101 are spaced apart along the first direction. For example, taking the mask plate in a strip shape, the first direction may be parallel to the extension direction of the mask plate. There is a spacing area between two adjacent effective evaporation areas 101. The above-mentioned hollow holes also exist in the spacing area.

[0037] like Figure 4 and Figure 7 As shown, the interval area between the two effective evaporation areas 101 distributed along the first direction includes a non-hollow area 102. The area of ​​the non-hollow area 102 is greater than the area of ​​the hollow holes. For example, the area of ​​the non-hollow area 102 can be greater than the area of ​​100 or 200 hollow holes. The shape of the non-hollow area 102 can be rectangular or square, of course, it can also be circular or elliptical, but the present disclosure is not limited thereto.

[0038] like Figure 4 and Figure 7 As shown, a plurality of non-hollow regions 102 may be provided between the two adjacent effective evaporation regions 101. Among the plurality of non-hollow regions 102, some non-hollow regions 102 are disposed along the second direction ( Figure 4 and Figure 7The second direction may intersect with the first direction. Further, the second direction may be perpendicular to the first direction.

[0039] Specifically, if Figure 5 and Figure 8 As shown, a plurality of non-hollow areas 102 between two adjacent effective evaporation areas 101 constitute a plurality of non-hollow columns 103, and the plurality of non-hollow columns 103 are spaced apart along the first direction, and each non-hollow column 103 includes a plurality of non-hollow areas 102 distributed along the second direction. The number of non-hollow columns 103 between the two adjacent effective evaporation areas 101 may be an odd number, such as three, five, etc. Among them, the number of non-hollow columns 103 between two adjacent effective evaporation areas 101 may be an odd number greater than 1. In other embodiments of the present disclosure, the number of non-hollow columns 103 between two adjacent effective evaporation areas 101 may also be an even number.

[0040] like Figure 5 and Figure 8 As shown, the plurality of non-hollow columns 103 between two adjacent effective evaporation areas 101 may include a first non-hollow column 1031 and a second non-hollow column 1032. The first non-hollow column 1031 and the second non-hollow column 1032 are arranged alternately along the first direction. The number of non-hollow areas 102 in the first non-hollow column 1031 may be less than the number of non-hollow areas 102 in the second non-hollow column 1032. The number of non-hollow areas 102 in the first non-hollow column 1031 may be one less than the number of non-hollow areas 102 in the second non-hollow column 1032, for example, Figure 5 As shown, the number of the non-hollow regions 102 in the first non-hollow column 1031 is three, and the number of the non-hollow regions 102 in the second non-hollow column 1032 is four. For another example, Figure 8 As shown, the number of non-hollow areas 102 in the first non-hollow column 1031 is five, and the number of non-hollow areas 102 in the second non-hollow column 1032 is six, but the embodiment of the present disclosure does not specifically limit this. In addition, the number of the first non-hollow column 1031 can be one more than the number of the second non-hollow column 1032. In other embodiments of the present disclosure, the number of the first non-hollow column 1031 can be one less than the number of the second non-hollow column 1032. Figure 5 As shown, taking the example that the number of the first non-hollow columns 1031 can be one less than the number of the second non-hollow columns 1032 and the number of the non-hollow columns 103 is three, the first non-hollow column 1031 is located between the two second non-hollow columns 1032. Figure 8As shown, taking the example that the number of first non-hollow columns 1031 can be one less than the number of second non-hollow columns 1032 and the number of non-hollow columns 103 is five, the middle non-hollow column 103 is the second non-hollow column 1032, which is located between two adjacent first non-hollow columns 1031, and the two outermost non-hollow columns 103 are two second non-hollow columns 1032.

[0041] like Figure 6 and Fig. 9 As shown, taking the non-hollow area 102 as a rectangle, the effective evaporation area 101 as a rectangle, the through-engraving area 1 as a strip, and the number m of the non-hollow columns 103 as an odd number as an example, the number of the first non-hollow columns 1031 can be one less than the number of the second non-hollow columns 1032. For the adjacent first non-hollow columns 1031 and the second non-hollow columns 1032, the number of non-hollow areas 102 in the second non-hollow column 1032 is n (n≥2), the number of non-hollow areas 102 in the first non-hollow column 1031 is (n-1), and the length of each non-hollow area 102 in the first direction is w1, The length of each non-hollow area 102 in the second direction is d1, the distance between two adjacent non-hollow areas 102 in the second direction is d2, the distance between the first non-hollow column 1031 and the second non-hollow column 1032 adjacent in the first direction is w2, the distance between the second non-hollow column 1032 and the side of the through-engraving area 1 is d0, the distance between the non-hollow column 103 located at the outermost side of the spacing area in the first direction and the effective evaporation area 101 is w0, the distance between two adjacent effective evaporation areas 101 in the first direction is w3, and the length of the through-engraving area 1 in the second direction is d3. The above parameters meet the following formula:

[0042] m=2*x+1 (x is a positive integer greater than or equal to 1)

[0043] d3=2*d0+n*d1+(n-1)*d2

[0044] w3=2*w0+m*w1+(m-1)*w2

[0045] like Figure 6 As shown, taking m equal to 3 and n equal to 4 as an example, the above formula is:

[0046] d3=2*d0+4*d1+3*d2

[0047] w3=2*w0+3*w1+2*w2

[0048] like Fig. 9 As shown, taking m equal to 5 and n equal to 6 as an example, the above formula is:

[0049] d3=2*d0+6*d1+5*d2

[0050] w3=2*w0+5*w1+4*w2

[0051] like Figure 7 As shown, the number of effective evaporation areas 101 spaced apart along the first direction is at least four, thereby forming at least three spacers in the first direction. For example, the number of effective evaporation areas 101 spaced apart along the first direction is six, thereby forming five spacers in the first direction. For the multiple spacers distributed along the first direction, the number of non-hollowed areas 102 in the spacers at the middle position may be less than the number of non-hollowed areas 102 in the spacers at the end positions. Furthermore, for the spacers distributed along the first direction, the number of non-hollowed areas 102 in the spacers gradually increases from the middle position to the end position.

[0052] like Figure 7 As shown, taking five spacing areas formed in the first direction as an example, the number of non-hollow areas 102 in the middle spacing area may be smaller than the number of non-hollow areas 102 in the spacing areas at both end positions; further, the two spacing areas at both end positions of the five spacing areas each include five non-hollow columns 103, and the remaining three spacing areas each include three non-hollow columns 103.

[0053] like Figure 4 and Figure 7 As shown, the plate body of the embodiment of the present disclosure may also include a peripheral area 2 surrounding the through-engraving area 1. The peripheral area 2 may include a solid material area 204 and a buffer area 201. The buffer area 201 may be arranged at intervals from the through-engraving area 1. The buffer area 201 may be in a strip shape, and the extension direction of the strip-shaped buffer area 201 may be parallel to the above-mentioned second direction. The number of the buffer areas 201 may be multiple, and the multiple buffer areas 201 may be arranged at intervals. Among them, buffer areas 201 are provided on both sides of the through-engraving area 1 in the first direction, and the number of buffer areas 201 located on both sides of the through-engraving area 1 may be multiple. The solid material area 204 may surround the buffer area 201 and the through-engraving area 1. Among them, the buffer area 201 may be distributed along the first direction with the above-mentioned effective evaporation area 101. The function of the buffer area 201 is to slow down the transmission of force in the mask plate, ensure the uniformity of the stress and strain distribution in the through-engraving area 1, and thus ensure the position accuracy of the pixel opening. In addition, a positioning mark 202 may be provided in the solid material area 204 of the plate body. The number of the positioning mark 202 may be two. The alignment mark 202 may be an alignment hole, but the present disclosure is not limited thereto. The plate body may further include a clamp 203. The clamp 203 is the area where the mask plate is clamped by the robot when the net is stretched.

[0054] The embodiment of the present disclosure also provides a mask plate structure. The mask plate structure may include a frame and the mask plate described in any of the above embodiments. The frame has at least one opening. The mask plate may be arranged on the frame, and the effective evaporation area 101 corresponds to the opening. Among them, the multiple effective evaporation areas 101 on the mask plate may correspond one-to-one to the multiple openings. Since the mask plate included in the mask plate structure of the embodiment of the present disclosure is the same as the mask plate in the embodiment of the above-mentioned mask plate, it has the same beneficial effects, and the present disclosure will not be repeated here.

[0055] The above is only a preferred embodiment of the present disclosure and does not limit the present disclosure in any form. Although the present disclosure has been disclosed as a preferred embodiment as above, it is not used to limit the present disclosure. Any technician familiar with this profession can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present disclosure. However, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present disclosure without departing from the content of the technical solution of the present disclosure are still within the scope of the technical solution of the present disclosure.

Claims

1. A mask plate, characterized in that: include: A plate body, comprising a through-engraved area with hollow holes, wherein the through-engraved area comprises a plurality of effective evaporation areas arranged at intervals and a spacing area between two adjacent effective evaporation areas; at least two of the plurality of effective evaporation areas are distributed along a first direction; the spacing area between two adjacent effective evaporation areas distributed along the first direction comprises a non-hollowed area, the area of ​​the non-hollowed area is greater than the area of ​​the hollow holes; a plurality of non-hollowed areas are arranged at intervals between the two adjacent effective evaporation areas, and some of the non-hollowed areas are distributed along a second direction, and the second direction intersects with the first direction; Each of the non-hollow areas is located between two adjacent effective evaporation areas; the multiple non-hollow areas between two adjacent effective evaporation areas constitute a multiple non-hollow columns, and the multiple non-hollow columns are spaced apart along the first direction, and each of the non-hollow columns includes a plurality of the non-hollow areas distributed along the second direction; within the same spacer area, the length of the non-hollow column adjacent to the effective evaporation area in the second direction is greater than the length of the effective evaporation area in the second direction.

2. The mask plate according to claim 1, characterized in that: The plurality of non-hollow columns include a first non-hollow column and a second non-hollow column, the first non-hollow column and the second non-hollow column are arranged alternately, and the number of the non-hollow areas in the first non-hollow column is less than the number of the non-hollow areas in the second non-hollow column.

3. The mask plate according to claim 2, characterized in that: The number of the non-hollow columns is an odd number.

4. The mask plate according to claim 2, characterized in that: The number of the first non-hollow columns is one more than the number of the second non-hollow columns; or The number of the first non-hollow columns is one less than the number of the second non-hollow columns.

5. The mask plate according to claim 2, characterized in that: The number of the non-hollow regions in the first non-hollow column is one less than the number of the non-hollow regions in the second non-hollow column.

6. The mask plate according to claim 1, characterized in that: At least four of the effective evaporation areas are distributed along the first direction to form at least three spacing areas distributed along the first direction; for the spacing areas distributed along the first direction, the number of the non-hollow areas in the spacing areas located at the middle position is less than the number of the non-hollow areas in the spacing areas located at the end positions.

7. The mask plate according to claim 6, characterized in that: For the spacing areas distributed along the first direction, the number of the non-hollow areas in the spacing areas gradually increases from the middle position to the end position.

8. A mask plate structure, characterized in that: include: a frame having at least one opening; The mask plate according to any one of claims 1 to 7, wherein the mask plate is arranged on the frame, and the effective evaporation area corresponds to the opening.

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