A vacuum gate valve with L action

Abstract

The present invention discloses a vacuum gate valve that performs L-action, including a valve plate assembly and a driving housing; the valve plate assembly includes a valve housing and a valve plate body; an opening is provided in the middle of the valve housing, a sealing rubber is provided on the outside of the valve plate body, and a moving block, an air distributor block, a cylinder assembly, a valve stem and a sliding rod are provided inside the driving housing; the cylinder assembly includes a main push cylinder and a sealing cylinder, one end of the valve stem is fixedly connected to the valve plate body, a moving block is provided on the valve stem, and the output shaft of the main push cylinder is connected to the moving block; the moving block is slidably arranged on the sliding rod; the sealing cylinder is arranged on one side of the main push cylinder. The entire structure of the present invention has no other relative motion in the housing, so as to avoid the generation of particles. The valve plate body realizes absolute L-MOTION motion, and only has vertical compression contact with the sealing rubber with the sealing surface, which reduces friction, reduces the generation of particle size, and ensures the cleanliness of the equipment during operation.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor equipment, and in particular relates to a vacuum plug valve that performs an L action. Background Art

[0002] The semiconductor and photovoltaic industries have very high requirements for the cleanliness of equipment and environment during the production process, and have strict requirements on the number of particles generated by the components in the equipment, especially the moving parts, during operation.

[0003] Conventional vacuum gate valves use mechanical structures to drive the valve plate to move and seal, and the sealing action is achieved through a rocker rod. The valve sealing action is achieved through the rocker rod structure, and there must be friction between the sealing ring on the valve plate and the sealing surface. At the same time, the parts of the connecting rod mechanism also have relative movement, which produces relative friction. Friction will inevitably produce particles. Conventional vacuum gate valves cannot be used in industries that have requirements for environmental cleanliness, such as semiconductors, photovoltaics, etc.

[0004] Semiconductor, photovoltaic and other industries require low particle size for all their equipment parts. In semiconductor and photovoltaic equipment, the main function of vacuum valves is to separate the cavities of the equipment and realize the transmission of wafers between the cavities of the equipment. The vacuum valves in this type of equipment are called low-particle transmission valves. Because this type of valve is directly connected to the equipment cavity, there are strict requirements on the particle size generated by the movement of the valve during opening and closing (mainly the movement of the valve plate seal). The so-called low-particle valve requires the cleanliness of the valve production process on the one hand, and the most important thing is that the particle size generated during the use of the valve (valve switching) is small. Usually, the relative movement and contact between structures will inevitably produce particles due to friction. The sealing of the vacuum valve is achieved by compressing the rubber sealing ring, and the compression of the sealing ring is inevitable. Therefore, in the design process of low-particle valves, the valve plate sealing structure is mostly directly pushed, leaving only the valve plate sealing action. However, different sealing structures have different sealing actions and different particle sizes. In theory, the sealing ring only leaves vertical compression action, without horizontal friction, and the particle size generated in its sealing process is the lowest. Summary of the invention

[0005] The object of the present invention is to provide a vacuum gate valve that performs an L-action, so as to solve the problem in the prior art mentioned in the background technology that a large amount of particles are generated during the use of the vacuum gate valve.

[0006] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0007] A vacuum gate valve performing an L-action includes a valve plate assembly and a drive housing; wherein the valve plate assembly is connected to the drive housing, and the valve plate assembly includes a valve housing and a valve plate body;

[0008] An opening is provided in the middle of the valve housing, and the opening is used to connect with other devices. The valve plate body is slidably provided inside the valve housing, and a sealing rubber is provided on the outside of the valve plate body, and the sealing rubber is used to seal the opening; and the valve is controlled to be opened or closed by driving the valve plate body to move up and down to cooperate with the opening;

[0009] The interior of the driving housing is provided with a moving block, an air distribution block, a cylinder assembly, a valve stem and a sliding rod; the cylinder assembly includes a main push cylinder and a sealing cylinder, wherein one end of the valve stem is fixedly connected to the valve plate body, a moving block is arranged on the valve stem, and the output shaft of the main push cylinder is connected to the moving block; the moving block is slidably arranged on the sliding rod; the sealing cylinder is arranged on one side of the main push cylinder, the sealing cylinder includes a sealing piston and a pushing block, and the pushing block is connected to the sliding rod.

[0010] According to the above technical solution, a first gas path, a second gas path, a third gas path and a fourth gas path are arranged inside the driving housing.

[0011] According to the above technical solution, one end of the first air circuit is connected to the main thrust cylinder, and the other end of the first air circuit is connected to the air distribution block; one end of the second air circuit is connected to the air distribution block, and the other end of the second air circuit is connected to the main thrust cylinder.

[0012] According to the above technical solution, one end of the third gas circuit is connected to the sealing cylinder, the other end of the third gas circuit is connected to the gas distribution block, one end of the fourth gas circuit is connected to the gas distribution block, and the other end of the fourth gas circuit is connected to the sealing cylinder.

[0013] According to the above technical solution, a sealing plate is provided between the valve plate assembly and the drive housing, and the sealing plate is used to separate the valve plate assembly and the drive housing.

[0014] According to the above technical solution, a through hole is provided on the sealing plate, and the valve stem passes through the through hole and is connected to the valve plate body.

[0015] According to the above technical solution, a bellows is arranged on the outside of the valve stem, one end of the bellows is connected to the sealing plate, and the other end of the bellows is connected to the moving block. The bellows is used to seal the valve plate assembly.

[0016] According to the above technical solution, the air distribution block is provided with air holes, a mechanical switch A and a mechanical switch B, and the air holes include a first air hole, a second air hole, a third air hole, a fourth air hole, a fifth air hole and a sixth air hole.

[0017] According to the above technical solution, the first air hole is connected to an external air source for ventilating or degassing the cylinder assembly, and the second air hole is connected to an external air source for ventilating or degassing the cylinder assembly.

[0018] According to the above technical solution, the third air hole is connected to the first air path, the fourth air hole is connected to the second air path, the fifth air hole is connected to the third air path, and the sixth air hole is connected to the fourth air path.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] The present invention is provided with: a valve plate assembly and a driving housing, wherein the valve plate assembly includes a valve housing and a valve plate body; a moving block, an air distributor block, a cylinder assembly, a valve stem and a sliding rod are arranged inside the driving housing. The moving block, the air distributor block, the cylinder assembly, the valve stem and the sliding rod arranged inside the driving housing are used together to push the valve plate body to seal the valve housing.

[0021] The entire structure of the present invention has no other relative movement in the shell, avoiding the generation of particles. The valve plate body realizes absolute L-MOTION movement, and only has vertical compression contact with the sealing surface, which reduces friction and reduces the generation of particles. The cleanliness of the equipment during operation is guaranteed. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a front view structural schematic diagram of the present invention;

[0023] Figure 2 It is a rear view structural schematic diagram of the present invention;

[0024] Figure 3 This is a schematic diagram of the internal structure of the drive housing of the present invention;

[0025] Figure 4 This is a schematic diagram of the internal structure of the valve plate assembly of the present invention;

[0026] Figure 5 It is a schematic diagram of the overall internal structure of the present invention;

[0027] Figure 6 This is a schematic diagram of the first gas path structure of the present invention;

[0028] Figure 7 It is a schematic diagram of the remaining gas path structure of the present invention;

[0029] Figure 8 It is a schematic diagram of the overall component structure of the present invention;

[0030] Fig. 9 It is a schematic diagram of the side cross-sectional structure of the present invention;

[0031] Fig.10 This is a schematic diagram of the structure of the gas separation block of the present invention;

[0032] Fig.11 It is a three-dimensional schematic diagram of the gas separation block of the present invention;

[0033] Fig.12This is a bottom view schematic diagram of the gas distribution block of the present invention;

[0034] Fig.13 It is a simplified diagram of the gas circuit connection of the present invention.

[0035] Markings in the figure: 1-valve plate assembly, 101-valve housing, 102-valve plate body, 103-opening, 104-sealing rubber, 2-drive housing, 201-movement block, 202-gas distributor block, 203-valve stem, 204-main push cylinder, 205-sliding rod, 206-sealing cylinder, 207-sealing piston, 208-pushing block, 301-first air path, 302-second air path, 303-third air path, 304-fourth air path, 4-sealing plate, 5-through hole, 6-bellows, 7-mechanical switch A, 8-mechanical switch B, 9-first air hole, 10-second air hole, 11-third air hole, 12-fourth air hole, 13-fifth air hole, 14-sixth air hole. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] Embodiment 1

[0038] like Figures 1 to 9 As shown, a vacuum gate valve performing an L-action includes a valve plate assembly 1 and a drive housing 2; wherein the valve plate assembly 1 is connected to the drive housing 2, and the valve plate assembly 1 includes a valve housing 101 and a valve plate body 102;

[0039] An opening 103 is provided in the middle of the valve housing 101, and the opening 103 is used to connect with other devices. The valve plate body 102 is slidably provided inside the valve housing 101, and a sealing rubber 104 is provided on the outer side of the valve plate body 102, and the sealing rubber 104 is used to seal the opening 103; and the valve is controlled to be opened or closed by driving the valve plate body 102 to move up and down to cooperate with the opening 103;

[0040] The interior of the driving shell 2 is provided with a moving block 201, an air distribution block 202, a cylinder assembly, a valve stem 203 and a sliding rod 205; the cylinder assembly includes a main push cylinder 204 and a sealing cylinder 206, wherein one end of the valve stem 203 is fixedly connected to the valve plate body 102, a moving block 201 is arranged on the valve stem 203, and the output shaft of the main push cylinder 204 is connected to the moving block 201; the moving block 201 is slidably arranged on the sliding rod 205; the sealing cylinder 206 is arranged on one side of the main push cylinder 204, and the sealing cylinder 206 includes a sealing piston 207 and a pushing block 208, and the pushing block 208 is connected to the sliding rod 205.

[0041] A first gas path 301 , a second gas path 302 , a third gas path 303 and a fourth gas path 304 are disposed inside the driving housing 2 .

[0042] like Fig.13 As shown, one end of the first air circuit 301 is connected to the main push cylinder 204, and the other end of the first air circuit 301 is connected to the air distribution block 202; one end of the second air circuit 302 is connected to the air distribution block 202, and the other end of the second air circuit 302 is connected to the main push cylinder 204.

[0043] One end of the third gas path 303 is connected to the sealing cylinder 206 , and the other end of the third gas path 303 is connected to the gas distribution block 202 . One end of the fourth gas path 304 is connected to the gas distribution block 202 , and the other end of the fourth gas path 304 is connected to the sealing cylinder 206 .

[0044] A sealing plate 4 is provided between the valve plate assembly 1 and the drive housing 2 , and the sealing plate 4 is used to separate the valve plate assembly 1 and the drive housing 2 .

[0045] The sealing plate 4 is provided with a through hole 5 , and the valve stem 203 passes through the through hole 5 and is connected to the valve plate body 102 .

[0046] A bellows 6 is arranged on the outer side of the valve stem 203 , one end of the bellows 6 is connected to the sealing plate 4 , and the other end of the bellows 6 is connected to the moving block 201 . The bellows 6 is used to seal the valve plate assembly 1 .

[0047] The air distribution block 202 is provided with air holes, a mechanical switch A7 and a mechanical switch B8; the air holes include a first air hole 9, a second air hole 10, a third air hole 11, a fourth air hole 12, a fifth air hole 13 and a sixth air hole 14.

[0048] The first air hole 9 is connected to an external air source for ventilating or degassing the cylinder assembly, and the second air hole 10 is connected to an external air source for ventilating or degassing the cylinder assembly.

[0049] The third air hole 11 is connected to the first air path 301 , the fourth air hole 12 is connected to the second air path 302 , the fifth air hole 13 is connected to the third air path 303 , and the sixth air hole 14 is connected to the fourth air path 304 .

[0050] Furthermore, two sets of sealing cylinder 206 and sealing piston 207 are provided.

[0051] Furthermore, the valve stem 203 passes through the middle of the bellows 6 , and sealing collars are provided at both ends of the bellows 6 . The bellows 6 is used to separate the valve housing 101 and the drive housing 2 to achieve vacuum sealing.

[0052] Furthermore, the gas distribution block 202 described in the present application is a combination of mechanical reversing valves, and the mechanical reversing valves adopt existing devices, such as a mechanical reversing valve with a model number of M5R-210-06.

[0053] Embodiment 2

[0054] This embodiment is a further refinement of the first embodiment. This embodiment provides a specific control method. Method 1: Valve closing:

[0055] like Figure 6 , Figure 7 , Fig.10 , Fig.11 , Fig.12 As shown, the third air hole 11 is connected to the first air path 301, the fourth air hole 12 is connected to the second air path 302, the fifth air hole 13 is connected to the third air path 303, and the sixth air hole 14 is connected to the fourth air path 304. Among them, the first air path 301 and the second air path 302 push the piston movement of the main push cylinder 204 from both sides, forming a pair of air paths; one end takes in air and the other end must exhaust air. The third air path 303 and the fourth 304 are respectively connected to the sealing piston 207 of the sealing cylinder 206, forming a pair of air paths. The first air hole 9 and the second air hole 10 are connected to the external air pipe, and the first air hole 9 and the second air hole 10 are controlled by an external solenoid valve.

[0056] Specific gas circuit operation principle: the gas source enters the gas distributor block 202 from the first air hole 9, exits the gas distributor block from the third air hole 11, enters the first gas circuit 301 through the third air hole 11, and then enters the interior of the main push cylinder 204, pushing the piston in the main push cylinder 204 to move, driving the moving block 201 to slide on the sliding rod 205, so that the valve stem 203 and the valve plate body 102 move to the opening 103. At this time, the mechanical switch A7 is triggered, the gas inside the gas distributor block 202 is reversed, and the gas flows out from the fifth air hole 13 of the gas distributor block 202 and enters the third gas path 303, pushing the sealing piston 207 and the push block 208 arranged on the surface of the sealing piston 207 to move, so that the push block 208 pushes the sliding rod 205, lifts the main push cylinder 204, the sliding rod 205, the valve stem 203, the motion block 201 and the valve plate body 102, so that the sealing rubber 104 on the outside of the valve plate body 102 cooperates with the opening 103 on the valve housing 101, so that the valve plate body 102 is pressed against the valve housing 101, compressing the sealing rubber 104, thereby realizing the vacuum sealing of the valve (this action releases the mechanical switch B8 that was originally triggered). Both mechanical switches are integrated on the gas distributor block 202, the mechanical switch A7 is arranged along the longitudinal direction of the gas distributor block 202, and the mechanical switch B8 is arranged along the transverse direction of the gas distributor block 202. When the piston of the main push cylinder 204 pushes the moving block 201 to move to the right position, the piston hits the mechanical switch A7 (such as Figure 6 As shown in the figure), the mechanical switch A7 is triggered. When the main push cylinder 204 moves in the reverse direction, the mechanical switch A7 is restored to the initial position by the spring reset. When the sealing piston 207 pushes the valve plate body 102 to achieve valve sealing, the mechanical switch B8 is restored to the initial position by the spring reset; when the valve plate body 102 is disengaged from the opening 103, the sliding rod 205 is lowered, and the mechanical switch B8 is triggered by the sliding rod 205 (as shown in the figure). Fig. 9 shown).

[0057] After the main push cylinder 204 completes the action, the gas enters the second gas path 302 through the other side of the piston, enters the gas distributor through the fourth gas hole 12 of the second gas path 302, and is finally discharged through the second gas hole 10, completing a working process.

[0058] After the sealing cylinder 206 completes the action, the gas enters the fourth gas path 304 through the other side of the sealing piston 207, enters the sixth gas hole 14 through the fourth gas path 304, enters and exits the gas distribution block 202, and is finally discharged from the gas hole 10, completing a working process.

[0059] Embodiment 3

[0060] This embodiment is a further refinement of the second embodiment. This embodiment provides a specific control method. Method 2: Valve opening:

[0061] like Figure 6 , Figure 7 , Fig.10 , Fig.11 , Fig.12 As shown, the valve plate opening action flow: the external solenoid valve is switched, and the air source enters from the second air hole 10. The air source enters the air distribution block 202 from the second air hole 10, enters through the sixth air hole 14, passes through the fourth air path 304, and enters the interior of the sealing cylinder 206 through the fourth air path 304, pushing the sealing piston 207 and the pushing block 208 set on the surface of the sealing piston 207 to move in the opposite direction, and the main push cylinder 204, the sliding rod 205, the valve stem 203, the moving block 201 and the valve plate body 102 are lowered, so that the sealing rubber 104 on the outside of the valve plate body 102 is disengaged from the opening 103 on the valve housing 101, and the sealing rubber 104 is not compressed.

[0062] At this time, the mechanical switch B8 is triggered, and the airway inside the gas distributor block 202 is reversed. The gas enters from the fourth air hole 12 of the gas distributor block, enters the second air path 302 through the fourth air hole 12, pushes the main push cylinder 204 to move, and drives the motion block 201 to move on the sliding rod 205, so that the valve stem 203 and the valve plate body 102 move together, so that the valve plate body 102 is separated from the opening 103 on the valve housing 101, thereby opening the valve plate assembly 1 and giving up the entire opening position.

[0063] During the movement of the sealing cylinder 206 , the gas passes through the other side of the sealing piston 207 , enters the third gas path 303 , enters the fifth gas hole 13 through the third gas path 303 , enters the gas distributor 202 through the fifth gas hole 13 , and is finally discharged through the first gas hole 9 .

[0064] During the movement of the main push cylinder 204 , the gas passes through the other side of the main push cylinder 204 , enters the first gas path 301 , enters the third gas hole 11 through the first gas path 301 , enters the gas distributor 202 through the third gas hole 11 ; and finally is discharged through the first gas hole 9 .

[0065] Embodiment 4

[0066] like Figure 5 As shown, a mounting portion is provided at the end of the valve stem 203 , and the mounting portion is used to mount the valve plate body 102 . The mounting portion is fixedly connected to the valve plate body 102 by bolts, and the mounting portion is fixedly connected to the valve stem 203 .

[0067] The movement of the valve stem 203 drives the mounting portion and the valve plate body 102 to move together, thereby achieving sealing of the valve housing 101 .

[0068] Embodiment 5

[0069] In the present invention, the so-called L-MOTION movement is specifically: when the main push cylinder 204 drives the moving block 201 to move, since the moving block 201 is fixedly connected to the valve stem 203, it will drive the valve stem 203 to move together, and the valve stem 203 will push the valve plate body 102 to move. At this time, what is completed is a vertical linear motion, which is equivalent to the vertical line L in the L-MOTION movement.

[0070] When the sealing cylinder 206 drives the sealing piston 207 to move, it will push the pushing block 208 set on the sealing piston 207 to move together, and the pushing block 208 will push the sliding rod 205 to move, and the sliding rod 205 will drive the main push cylinder 204, the valve stem 203, the moving block 201 and the valve plate body 102 to be lifted together, completing the vertical lifting action, which is equivalent to the vertical line of L in the L-MOTION movement.

[0071] Through the above-mentioned movement method, the L-MOTION movement is completed.

[0072] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0073] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A vacuum gate valve performing L-action, characterized in that: It comprises a valve plate assembly (1) and a drive housing (2); wherein the valve plate assembly (1) is connected to the drive housing (2), and the valve plate assembly (1) comprises a valve housing (101) and a valve plate body (102); An opening (103) is provided in the middle of the valve housing (101), and the opening (103) is used to connect with other devices. The valve plate body (102) is slidably arranged inside the valve housing (101), and a sealing rubber (104) is provided on the outer side of the valve plate body (102), and the sealing rubber (104) is used to seal the opening (103); and the valve is controlled to be opened or closed by driving the valve plate body (102) to move up and down to cooperate with the opening (103); The driving housing (2) is provided with a moving block (201), an air distribution block (202), a cylinder assembly, a valve stem (203) and a sliding rod (205); the cylinder assembly comprises a main push cylinder (204) and a sealing cylinder (206), wherein one end of the valve stem (203) is fixedly connected to the valve plate body (102), a moving block (201) is provided on the valve stem (203), and an output shaft of the main push cylinder (204) is connected to the moving block (201); the moving block (201) is slidably arranged on the sliding rod (205); the sealing cylinder (206) is arranged on one side of the main push cylinder (204), the sealing cylinder (206) comprises a sealing piston (207) and a pushing block (208), and the pushing block (208) is connected to the sliding rod (205); A first gas path (301), a second gas path (302), a third gas path (303) and a fourth gas path (304) are arranged inside the drive housing (2); One end of the first gas path (301) is connected to the main push cylinder (204), and the other end of the first gas path (301) is connected to the gas distribution block (202); one end of the second gas path (302) is connected to the gas distribution block (202), and the other end of the second gas path (302) is connected to the main push cylinder (204); One end of the third gas path (303) is connected to the sealing cylinder (206), and the other end of the third gas path (303) is connected to the gas distribution block (202). One end of the fourth gas path (304) is connected to the gas distribution block (202), and the other end of the fourth gas path (304) is connected to the sealing cylinder (206).

2. The vacuum gate valve performing L-action according to claim 1, characterized in that: A sealing plate (4) is provided between the valve plate assembly (1) and the drive housing (2), and the sealing plate (4) is used to separate the valve plate assembly (1) and the drive housing (2).

3. The vacuum gate valve performing L-action according to claim 2, characterized in that: The sealing plate (4) is provided with a through hole (5), and the valve stem (203) passes through the through hole (5) to be connected to the valve plate body (102).

4. The vacuum gate valve performing L-action according to claim 1, characterized in that: A bellows (6) is arranged on the outside of the valve stem (203); one end of the bellows (6) is connected to the sealing plate (4), and the other end of the bellows (6) is connected to the moving block (201); the bellows (6) is used to seal the valve plate assembly (1).

5. The vacuum gate valve performing L-action according to claim 1, characterized in that: The gas distribution block (202) is provided with air holes, a mechanical switch A (7) and a mechanical switch B (8), and the air holes include a first air hole (9), a second air hole (10), a third air hole (11), a fourth air hole (12), a fifth air hole (13) and a sixth air hole (14).

6. The vacuum gate valve performing L-action according to claim 5, characterized in that: The first air hole (9) is connected to an external air source and is used to ventilate or release air to the cylinder assembly, and the second air hole (10) is connected to an external air source and is used to ventilate or release air to the cylinder assembly.

7. The vacuum gate valve performing L-action according to claim 6, characterized in that: The third air hole (11) is connected to the first air path (301), the fourth air hole (12) is connected to the second air path (302), the fifth air hole (13) is connected to the third air path (303), and the sixth air hole (14) is connected to the fourth air path (304).

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