A local cooling structure for the window flange of a high vacuum and high temperature operation device

Abstract

The present invention belongs to a cooling structure, and specifically relates to a local cooling structure of a window flange on a high vacuum and high temperature operating device. A local cooling structure of a flange on a high vacuum and high temperature baking operating device includes an inner sealing structure, the inner wall of the inner sealing structure is an inner sealing surface, the shape of the inner sealing surface matches the shape of the internal parts, an outer sealing structure is arranged on the upper end face of the inner sealing structure, the lower part of the outer sealing structure is fixedly connected to the inner sealing structure, the lower end of the outer sealing structure forms an outer sealing surface, an outer sealing pressure plate is arranged above the outer sealing structure, and a diagnostic window is arranged between the outer sealing structure and the outer sealing pressure plate. The significant effect of the present invention is that the metal seal and the rubber seal are an integrated structure, the cooling pipe directly cools the inner and outer high vacuum sealing surfaces, no external water channel is required, the structure is compact, the processing technology is simple, the water channel has good flow guidance, the heat dissipation capacity is strong, and the cooling efficiency is high.

Description

Technical Field

[0001] The invention belongs to a cooling structure, and in particular relates to a local cooling structure of a window flange on a high-vacuum and high-temperature operating device. Background Art

[0002] Impurities in the magnetic confinement fusion device have a great impact on plasma discharge, confinement quality and safe operation of the device. These impurities mainly come from residual gases retained on the wall and some internal components. These retained impurities will be discharged to the outside during the discharge process. At present, the more effective means is to bake the device at high temperature under high vacuum conditions or operate it under high temperature wall conditions to release the residual gases, especially water vapor and oxygen-containing impurities, retained on the surface of the device and internal components, and then pump these impurities out through the vacuum pump group. Generally, the higher the baking temperature, the greater the density and pressure of impurities and vapor, and the easier it is to release them from the wall. In order to obtain a relatively clean vacuum and wall environment, the baking temperature needs to be increased as much as possible.

[0003] At present, the main high-temperature experimental devices in the world can be divided into three categories according to their baking temperature capabilities: (1) around 100 degrees Celsius. Most small and medium-sized devices currently use this temperature range. These devices are small in size and can expel the main water vapor impurities through general baking. Then, during the discharge process, plasma is used to continuously bombard the tempering device wall to achieve impurity discharge; (2) around 200 degrees Celsius, which is mainly used to expel water vapor. This section is mainly represented by devices such as the British MAST; (3) around 300 degrees Celsius, which is mainly used to expel impurities inside the material and in small gaps. It has a very good cleaning effect on impurities on the device wall. Large devices and new-generation fusion devices are the first choice for design. For example, the International Thermonuclear Experimental Reactor (ITER) and the US DIII-D all use 300 degrees Celsius baking. The largest fusion experimental device under construction in China, the China Tokamak No. 2M (HL-2M Tokamak), also uses 300 degrees baking.

[0004] However, under the existing technical conditions, some diagnostic components and measurement windows will not be able to withstand a high temperature of 300 degrees Celsius. For example, the most commonly used O-ring for sealing can only reach a maximum of about 180 degrees Celsius, and some electronic components can only work at about 100 degrees Celsius. Therefore, a special local cooling structure or process needs to be designed to protect the window and components. At present, the DIII-D device uses glass metallization for some small diagnostic windows, and then metal sealing can be used. For some larger diagnostic windows (CF200 and above, runway-type windows), due to high temperature stress and other reasons, the method of directly welding quartz glass and metal cannot be used. Instead, a pipe is drawn from the device and the temperature difference of the stainless steel pipe is used to cool down. However, this method will increase the distance from the window to the plasma, affecting the solid angle of the diagnostic measurement. The use of a spiral structure cooling water flow on the pipeline requires multiple welding, and the processing technology is relatively complicated. In addition, the large-area cooling pipeline not only affects the overall baking effect, but also affects the field of view of the measurement. Summary of the invention

[0005] The content of the present invention is to address the defects of the prior art and provide a local cooling structure technology for the flange on a high-vacuum and high-temperature operating device. It only cools the flange end face and the blade part that need to be protected. Compared with the prior art, it has the characteristics of good local scattering performance and compact structure.

[0006] The present invention is implemented as follows: a local cooling structure of a flange on a high-vacuum high-temperature baking operation device includes an inner sealing structure, the inner wall of the inner sealing structure is an inner sealing surface, the shape of the inner sealing surface matches the shape of the internal parts, an outer sealing structure is arranged on the upper end surface of the inner sealing structure, the lower part of the outer sealing structure is fixedly connected to the inner sealing structure, the lower end of the outer sealing structure forms an outer sealing surface, an outer sealing pressure plate is arranged above the outer sealing structure, and a diagnostic window is arranged between the outer sealing structure and the outer sealing pressure plate.

[0007] As described above, a local cooling structure of a flange on a high-vacuum and high-temperature baking operating device, wherein the connecting surface of the outer sealing structure and the inner sealing structure forms a cavity, and the cavity is a cooling channel, and the cooling channel is connected to the outside through an external inlet and outlet cooling pipe, and the external inlet and outlet cooling pipe is fixedly connected to the outer sealing structure.

[0008] In the local cooling structure of the flange on the high vacuum and high temperature baking operation device as described above, the inner sealing structure and the outer sealing structure are fixedly connected by a first ultra-high vacuum sealing welding.

[0009] In the local cooling structure of the flange on the high vacuum and high temperature baking operation device as described above, the external inlet and outlet cooling pipe is fixedly connected to the outer sealing structure by a second ultra-high vacuum sealing welding.

[0010] As described above, in the local cooling structure of the flange on a high vacuum and high temperature baking operation device, an inner sealing screw hole is provided on the outer sealing structure, and the outer sealing structure is fixedly connected to the flange blade surface by screws provided in the inner sealing screw hole.

[0011] As described above, a local cooling structure of a flange on a high-vacuum and high-temperature baking operating device is provided, wherein matching screw holes are provided on the outer sealing structure and the outer sealing pressure plate, and an outer sealing screw hole is formed after the two positions are matched, and the outer sealing structure and the outer sealing pressure plate are fixedly connected by screws provided in the outer sealing screw hole.

[0012] In the local cooling structure of the flange on the high vacuum and high temperature baking operation device as described above, the cooling channel is arranged along the outer sealing surface of the outer sealing structure for more than one circle.

[0013] In the local cooling structure of the flange on the high vacuum and high temperature baking operation device as described above, a cooling sealing ring is further arranged between the outer sealing structure and the diagnostic window.

[0014] The local cooling structure of the flange of the high vacuum high temperature baking operation device as described above, wherein the vacuum leakage rate of the first ultra-high vacuum sealing weld 3 and the second ultra-high vacuum sealing weld 6 is less than 1.0×10 -10 Pam 3 / sec.

[0015] As described above, a local cooling structure of a flange on a high vacuum and high temperature baking operation device, wherein the inner sealing surface is a high vacuum step sealing structure or a knife edge sealing structure, which matches the vacuum flange structure of the device, and the outer sealing surface is a high finish sealing surface.

[0016] In the local cooling structure of the flange on the high vacuum and high temperature baking operation device as described above, the cooling channel is a water cooling channel or an air cooling channel.

[0017] In the local cooling structure of the flange on the high vacuum and high temperature baking operation device as described above, a bellows is arranged in the outer sealing structure, and the bellows divides the outer sealing structure into two parts, the inner part and the outer part.

[0018] The remarkable effects of the present invention are: the metal seal and the rubber seal are an integrated structure, the cooling pipeline directly cools the two inner and outer high vacuum sealing surfaces, no external water channel is required, the structure is compact, the processing technology is simple, the water channel has good flow guidance, the heat dissipation capacity is strong, and the cooling efficiency is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram of a local cooling structure of a flange on a high vacuum and high temperature baking operation device provided by the present invention.

[0020] Among them, 1-inner sealing structure, 2-inner sealing surface, 3-first ultra-high vacuum sealing weld, 4-outer sealing structure, 5-cooling channel, 6-second ultra-high vacuum sealing weld, 7-external inlet and outlet cooling pipes, 8-cooling sealing ring, 9-outer sealing surface, 10-diagnostic window, 11-outer sealing screw hole, 12-inner sealing screw hole, 13-outer sealing pressure plate. DETAILED DESCRIPTION

[0021] As attached Figure 1 As shown, a local cooling structure of the flange on a high vacuum high temperature baking operation device,

[0022] It includes: an inner sealing structure 1, a sealing surface 2, a first ultra-high vacuum sealing weld 3, an outer sealing structure 4, a cooling channel 5, a second ultra-high vacuum sealing weld 6, an external inlet and outlet cooling pipeline 7, a cooling sealing ring 8, an outer sealing surface 9, a diagnostic window 10, an outer sealing screw hole 11 and an inner sealing screw hole 12. The connection method is as follows: the inner sealing surface 2 of the inner sealing structure 1 is connected to the flange blade surface of the device through the inner sealing screw hole 12, the end face of the inner sealing structure 1 is connected to the inner end face of the outer sealing structure 4 through the first ultra-high vacuum sealing weld 3, and a cooling channel 5 with a moderate space is reserved between the two structures. The cooling channel 5 needs to be arranged along the sealing surface 9 of the outer sealing structure 4 for more than one circle and led out from the edge through the external inlet and outlet pipe. The cooling channel 5 is connected to the external inlet and outlet cooling pipe 7 on the side of the outer sealing structure 4 through the second ultra-high vacuum sealing weld 6, the sealed outer end face of the outer sealing structure 4 is connected to the diagnostic window 10 through the cooling sealing ring 8 and the outer sealing screw hole 11, and the outer sealing pressure plate 13 is connected to the outer sealing structure 4 through screws.

[0023] The first ultra-high vacuum sealing welding 3 and the second ultra-high vacuum sealing welding 6 are the same high vacuum sealing welding structure and method, and the vacuum leakage rate is required to be less than 1.0×10 -10 Pam 3 / sec.

[0024] The cooling seal ring 8 is a rubber ring that cannot withstand a high temperature of nearly 300 degrees Celsius, such as a rubber ring. After being cooled by the structure of the present invention, its temperature is reduced to a range that an O-ring can withstand, that is, below 180 degrees Celsius.

[0025] The inner sealing surface 2 on the inner sealing structure 1 is a high vacuum step sealing structure or a knife-edge sealing structure, which matches the vacuum flange structure of the device. The outer sealing surface 9 is a high-finish sealing surface that needs to meet the vacuum leakage rate requirements of the device.

[0026] The cooling channel 5 can be water-cooled or air-cooled, and the diameter of the channel is determined by factors such as the temperature difference to be cooled, the cooling medium, the thermal conductivity of the material, and the flow rate.

[0027] The diagnostic window 10 is determined by factors such as the structure and material required for diagnosis.

[0028] When the temperature of the device is very high, reaching above 300 degrees Celsius, the outer sealing structure 4 can be divided into inner and outer parts by a bellows, which can increase thermal resistance and relieve thermal stress caused by high temperature difference.

[0029] The connection relationship is as follows: the flange blade surface of the device is connected to the inner sealing surface 2 of the inner sealing structure 1, the end face of the inner sealing structure 1 is connected to the inner end face of the outer sealing structure 4 through the first ultra-high vacuum sealing weld 3, and a cooling channel 5 with a moderate space is reserved between the two structures. The cooling channel 5 needs to be arranged along the sealing surface 9 of the outer sealing structure 4 for more than one circle and led out from the edge through the external inlet and outlet pipe. The cooling channel 5 is connected to the external inlet and outlet cooling pipe 7 on the side of the outer sealing structure 4 through the second ultra-high vacuum sealing weld 6, and the sealed outer end face of the outer sealing structure 4 is connected to the diagnostic window 10 and the outer sealing pressure plate 13 through the cooling sealing ring 8.

[0030] In the present invention, the so-called "first" and "second" do not represent any logical order relationship, but are only used to distinguish two identical components and technologies included in the system.

[0031] Compared with the prior art, the present invention has the following advantages: the general cooling structure uses a water-cooling pipe directly welded on the pipeline, which requires a neck of a certain length between the inner and outer flanges, and its cooling efficiency is not very good. The cooling pipeline provided by the present invention is directly between the two sealing surfaces and only acts on the local area that needs to be cooled, which not only protects the outer sealing surface, but also does not affect the baking or hot wall operation of the device. In addition, the cooling technology provided by the present invention is an integrated welded structure, the water channel has good flow guidance, a compact structure, and occupies little space.

[0032] The present invention is not limited to the above-mentioned embodiments. Within the scope of knowledge possessed by ordinary technicians in this field, various changes can be made without departing from the spirit of the present invention. Various changes, modifications, substitutions and variations can be made to these implementation methods and still fall within the scope of protection of this patent.

Claims

1. A local cooling structure for a window flange on a high vacuum and high temperature operation device, characterized in that: The invention comprises an inner sealing structure (1), the inner wall of the inner sealing structure (1) being an inner sealing surface (2), the shape of the inner sealing surface (2) matching the shape of the internal parts, an outer sealing structure (4) being arranged on the upper end surface of the inner sealing structure (1), the lower part of the outer sealing structure (4) being fixedly connected to the inner sealing structure (1), the lower end of the outer sealing structure (4) forming an outer sealing surface (9), an outer sealing pressure plate (13) being arranged above the outer sealing structure (4), and a diagnostic window (10) being arranged between the outer sealing structure (4) and the outer sealing pressure plate (13); The connection surface between the outer sealing structure (4) and the inner sealing structure (1) forms a cavity, and the cavity is a cooling channel (5). The cooling channel (5) is connected to the outside through an external inlet and outlet cooling pipeline (7), and the external inlet and outlet cooling pipeline (7) is fixedly connected to the outer sealing structure (4); An inner sealing screw hole (12) is provided on the outer sealing structure (4), and the outer sealing structure (4) is fixedly connected to the flange blade surface by means of screws provided in the inner sealing screw hole (12); Screw holes with matching positions are arranged on the outer sealing structure (4) and the outer sealing pressure plate (13). When the two positions are matched, an outer sealing screw hole (11) is formed. The outer sealing structure (4) and the outer sealing pressure plate (13) are fixedly connected by screws arranged in the outer sealing screw hole (11); A cooling sealing ring (8) is also provided between the outer sealing structure (4) and the diagnostic window (10).

2. The local cooling structure of the window flange on the high vacuum and high temperature operation device according to claim 1, characterized in that: The inner sealing structure (1) and the outer sealing structure (4) are fixedly connected by a first ultra-high vacuum sealing welding (3).

3. A local cooling structure for a window flange on a high vacuum and high temperature operation device as claimed in claim 2, characterized in that: The external inlet and outlet cooling pipe (7) is fixedly connected to the outer sealing structure (4) via a second ultra-high vacuum sealing weld (6).

4. A local cooling structure for a window flange on a high vacuum and high temperature operation device as claimed in claim 3, characterized in that: The cooling channel (5) is arranged along the outer sealing surface (9) of the outer sealing structure (4) for more than one circle.

5. The local cooling structure of the window flange on the high vacuum and high temperature operation device according to claim 4, characterized in that: The vacuum leakage rate of the first ultra-high vacuum sealing weld 3 and the second ultra-high vacuum sealing weld (6) is less than 1.0×10 -10 Pam 3 / sec.

6. The local cooling structure of the window flange on the high vacuum and high temperature operation device according to claim 5, characterized in that: The inner sealing surface (2) is a high vacuum step sealing structure or a knife edge sealing structure, and the sealing structure matches the vacuum flange structure of the device, and the outer sealing surface (9) is a high finish sealing surface.

7. The local cooling structure of the window flange of the high vacuum and high temperature operation device according to claim 6, characterized in that: The cooling channel (5) is a water cooling channel or an air cooling channel.

8. The local cooling structure of the window flange on the high vacuum and high temperature operation device according to claim 7, characterized in that: A bellows is arranged in the outer sealing structure (4), and the bellows divides the outer sealing structure (4) into two parts, an inner part and an outer part.

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