A compact atom interferometer integrated device

Abstract

The present invention discloses a compact integrated atomic interferometer device, including a cold atom interferometer physical system, a cooling light module and a Raman light module, and a fluorescence detection and collection device. The present invention utilizes the structure of a single decahedral vacuum glass cavity, combined with a collimating beam expander and a magnetic field coil, etc. for effective integration. The decahedral vacuum glass cavity of the present invention avoids the defects of induced current and induced magnetic field existing in a metal vacuum cavity, and has a larger light-passing area and a smaller volume; the cooling light module and the Raman light module are simpler than the existing optical system for realizing atomic interference, simplifying the optical path structure and reducing the optical path cost; the cube vacuum cavity of the entire device is independent of the peripheral devices, and the cooling light module and the Raman light module can be debugged separately and then assembled and integrated, which is suitable for glass cavity devices of different structures. The present invention can be applied to high-precision atomic inertial sensing technology to improve the level of sensor integration.

Description

Technical Field

[0001] The invention relates to a high-precision atomic inertial sensing technology, and in particular to a compact cold atom interferometer integrated device, which is suitable for the field of atomic interference precision measurement. Technical Background

[0002] Atom interferometers are gradually being used in inertial navigation, geological surveys, resource exploration, and basic scientific research. Atom interferometer systems usually built on optical platforms in laboratories are large in size and difficult to transport. In order to meet engineering and space applications, it is necessary to develop miniaturized and portable atom interferometer devices.

[0003] The atomic interferometer device includes a vacuum cavity, a collimated laser module, a detection module, etc. The atomic interference process includes the trapped cooling, falling, interference, and detection of atomic groups. In order to meet the atomic interference conditions, it is necessary to integrate a vacuum cavity, a fiber collimator, a light-transmitting glass window, an anti-Helmholtz coil and a Helmholtz coil, a fluorescence detection and collection device, etc. Therefore, how to efficiently integrate the above unit modules on the basis of meeting the physical principles of the atomic interferometer is an important issue facing the atomic interferometer device. At present, most atomic interferometers adopt a metal vacuum cavity structure, and a glass window is sealed on the metal cavity for light transmission. Since the position of the sealing blade and the fixing screws need to be sealed during the sealing process, the volume and weight of the metal cavity are much larger than those of the glass cavity under the condition of achieving the same light aperture; factors such as induced current and induced magnetic field in the metal vacuum cavity will interfere with the atomic interference process and need to be avoided as much as possible; the size of the anti-Helmholtz coil and the Helmholtz coil is limited by the size of the vacuum cavity, and the glass cavity can effectively reduce the size of the vacuum sealing part and the volume of the vacuum cavity. At the same time, the size of the anti-Helmholtz coil and the Helmholtz coil can be reduced through reasonable design. Therefore, there is still room for improvement in terms of the demand for miniaturized atom interferometers in practical applications. Summary of the invention

[0004] The purpose of the present invention is to provide a compact cold atom interferometer integrated device in response to the demand for miniaturized atom interferometers in the prior art. The present invention utilizes the structure of a single decahedral vacuum glass cavity, combined with the effective integration of devices such as fiber collimators and magnetic field coils, and separately debugs the light-through cooling light and Raman light modules, and then assembles them with the glass cavity. Each device module is independent of each other, realizing a miniaturized atom interferometer system that can be used in the field of atomic interference precision measurement.

[0005] The above-mentioned object of the present invention is achieved by the following technical solutions:

[0006] A compact atomic interferometer integrated device comprises a physical system, the physical system comprises a decahedron vacuum glass cavity, the decahedron vacuum glass cavity comprises a first side circular glass window, a second side circular glass window, a third side circular glass window, a fourth side circular glass window, a fifth side circular glass window, a sixth side circular glass window, a seventh side circular glass window, and an eighth side circular glass window uniformly distributed in sequence in the circumferential direction, the decahedron vacuum glass cavity further comprises a front circular light-transmitting window sheet and a rear circular light-transmitting window sheet,

[0007] The first collimating beam expander, the beam expander and shaper, the second collimating beam expander, the fluorescence detection and collection device, the third collimating beam expander, the first reflecting device, and the fourth collimating beam expander are respectively arranged on the outside of the first side circular glass window, the outside of the second side circular glass window, the outside of the third side circular glass window, the outside of the fourth side circular glass window, the outside of the fifth side circular glass window, the outside of the sixth side circular glass window, and the outside of the seventh side circular glass window, the fifth collimating beam expander, the beam expander and shaper, the second collimating beam expander, the fluorescence detection and collection device, the third collimating beam expander, the first reflecting device, and the fourth collimating beam expander are respectively arranged on the outside of the front circular light-transmitting window piece, and the second reflecting device is arranged on the outside of the rear circular light-transmitting window piece.

[0008] The eighth side circular glass window is connected to one end of the glass tube, the other end of the glass tube is connected to the base, the base is sealed to the metal flange, the right side window of the cube vacuum chamber is sealed to the metal flange, the right side window of the cube vacuum chamber is also welded with an alkali metal releaser through a vacuum connector, and the front side window of the cube vacuum chamber fixes the ion pump.

[0009] An anti-Helmholtz coil and a Helmholtz coil are arranged outside the decahedral vacuum glass cavity.

[0010] As described above, the output optical axes of the first collimating beam expander and the third collimating beam expander are collinear, the output optical axes of the second collimating beam expander and the fourth collimating beam expander are collinear, the output optical axis of the beam expander and the beam shaper are collinear with the reflected light of the first reflecting device, and the output optical axis of the fifth collimating beam expander is collinear with the reflected light of the second reflecting device.

[0011] The first reflecting device as described above comprises a first external quarter wave plate and a first external reflecting mirror, the exit optical axis of the beam expander and shaper is perpendicular to the second side circular glass window, the sixth side circular glass window, and the first external reflecting mirror in sequence, and the first external quarter wave plate is located between the sixth side circular glass window and the first external reflecting mirror outside the sixth side circular glass window;

[0012] The second reflecting device includes a second external quarter-wave plate and a second external reflector. The output light axis of the fifth collimating expander is perpendicular to the front circular light-clearing window, the rear circular light-clearing window, and the second external reflector in sequence. The second external quarter-wave plate is located between the rear circular light-clearing window and the second external reflector outside the rear circular light-clearing window.

[0013] A compact atomic interferometer integrated device also includes an optical system, the optical system includes a cooling optical module,

[0014] The cooling light module includes a cooling light laser. The single-frequency laser generated by the cooling light laser is divided into two beams of single-frequency laser after passing through a first beam splitting unit, one of which is output to a first frequency stabilizing unit, and the other is obtained by passing through a first laser power amplification unit and a first acousto-optic modulator unit to obtain cooling light. The cooling light is divided into the first cooling light to the fifth cooling light by a beam splitting and shaping unit and enters the first collimating beam expander to the first collimating beam expander respectively.

[0015] The optical system as described above also includes a Raman optical module, which includes a first Raman optical laser and a second Raman optical laser. The first Raman light output by the first Raman optical laser is divided into two beams after passing through a second optical splitting unit, wherein a portion of the first Raman light is output to a second frequency stabilization unit, and the remaining first Raman light is input to a second laser power amplification unit to combine with the second Raman light output by the second Raman optical laser to obtain combined Raman light, a portion of the combined Raman light is input to a beat frequency phase locking unit, and the remaining combined Raman light passes through a second acousto-optic modulator unit to obtain output Raman light, and the output Raman light is transmitted to the beam expander and shaper through a beam combining and shaping unit.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] The present invention proposes a compact integrated atomic interferometer device, which utilizes the structure of a single decahedral vacuum glass cavity, combined with effective integration of collimating beam expanders, magnetic field coils, and fluorescence detection and collection devices, to achieve functions such as three-dimensional magneto-optical trapping of atoms, cooling, and manipulation of atoms. Compared with the traditional metal cavity solution, the decahedral vacuum glass cavity avoids the defects of induced current, induced magnetic field, gas penetration, etc. in the metal vacuum cavity, and has a larger light-passing area and a smaller volume; the optical module includes 8 units, which is simpler than the existing optical system for realizing atomic interference, simplifies the optical path structure, and reduces the optical path cost; the vacuum cavity of the entire device is independent of the peripheral devices, and the cooling light and Raman light modules can be debugged separately and then assembled and integrated, which is suitable for glass cavity devices of different structures. The present invention can be applied to high-precision atomic inertial sensing technology to improve the level of sensor integration. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 Schematic diagram of the decahedral vacuum glass cavity for the compact cold atom interferometer;

[0019] Figure 2 This is a schematic diagram of the physical system structure of the compact cold atom interferometer;

[0020] Figure 3The front view (yz) and side view (xz) of the optical path structure of the compact cold atom interferometer, where (a) is the front view; (b) is the side view;

[0021] Figure 4 Schematic diagram of cooling light module and Raman light module of compact cold atom interferometer, where (a) is the schematic diagram of cooling light module; (b) is the schematic diagram of Raman light module;

[0022] Figure 5 The same-direction interference fringes of the compact cold atom interferometer;

[0023] In the figure: 100-decahedral vacuum glass cavity, 101-glass window, 102-window, 103-alkali metal release agent, 104-glass tube, 105-copper gasket, 106-base, 201-first collimating beam expander, 202-second collimating beam expander, 203-third collimating beam expander, 204-fourth collimating beam expander, 205-fifth collimating beam expander, 3-anti-Helmholtz coil, 4-Helmholtz coil, 501-first reflection Device, 502-second reflection device, 6-fluorescence detection and collection device; 7-beam expander and shaper, 800-support and fixation module, 801-metal flange, 802-right side window of the cube vacuum chamber, 803-front side window of the cube vacuum chamber, 804-cube vacuum chamber, 9-ion pump, C1-first cooling light, C2-second cooling light, C3-third cooling light, C4-fourth cooling light, C5-fifth cooling light, R-Raman light. DETAILED DESCRIPTION

[0024] In order to facilitate ordinary technicians in the field to understand and implement the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and examples. It should be understood that the implementation examples described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0025] Implementation Cases:

[0026] In this embodiment, the compact atom interferometer integrated device includes a physical system and an optical system. The compact atom interferometer physical system includes a decahedral vacuum glass cavity 100, an alkali metal releaser 103, collimating beam expanders 201-204 through which cooling light C1-C5 passes, a Helmholtz coil 3, an anti-Helmholtz coil 4, a first reflection device, a second reflection device, a fluorescence detection and collection device 6, a beam expander and shaper 7 through which Raman light R passes, a supporting and fixing module 800 and an ion pump 9, etc.

[0027] like Figure 1As shown, the decahedral vacuum glass chamber 100 includes eight side circular glass windows 101 and front and rear circular light-transmitting windows 102 evenly distributed in the circumferential direction. The surfaces of the eight side circular glass windows 101 and the front and rear circular light-transmitting windows 102 are coated with anti-reflection films to prevent the laser beam from causing unnecessary reflection in the chamber and affecting the measurement. The eight side circular glass windows 101 are arranged in a unidirectional order ( Figure 2 In the figure (clockwise direction), there are the first side circular glass window, the second side circular glass window, the third side circular glass window, the fourth side circular glass window, the fifth side circular glass window, the sixth side circular glass window, the seventh side circular glass window, and the eighth side circular glass window, and the front and rear circular light-transmitting window pieces 102 are the front circular light-transmitting window piece and the rear circular light-transmitting window piece, respectively. The eighth side circular glass window is connected to one end of the glass tube 104, and the other end of the glass tube 104 is connected to the base 106. The base 106 is sealed to the metal flange 801. As a preferred solution, the copper gasket 105 on the right side of the base 106 and the metal flange 801 on the left side of the base 106 are vacuum-sealed to the cube vacuum chamber 804 by welding. The right side window 802 of the cube vacuum chamber 804 is sealed to the metal flange 801. The right side window 802 of the cube vacuum chamber 804 is also welded with an alkali metal releaser 103 through a vacuum connector to provide an alkali metal atom source for the atomic interferometer. The front side window 803 of the cube vacuum chamber 804 fixes the ion pump 9 to maintain the vacuum of the vacuum chamber.

[0028] The first collimating beam expander 201, the beam expander and shaper 7, the second collimating beam expander 202, the fluorescence detection and collection device 6, the third collimating beam expander 203, the first reflecting device 501, and the fourth collimating beam expander 204 are respectively arranged on the outer side of the first side circular glass window, the outer side of the second side circular glass window, the outer side of the third side circular glass window, the outer side of the fourth side circular glass window, the outer side of the fifth side circular glass window, the outer side of the sixth side circular glass window, and the outer side of the seventh side circular glass window, the fifth collimating beam expander 205 is arranged on the outer side of the front circular light-transmitting window, and the second reflecting device 502 is arranged on the outer side of the rear circular light-transmitting window.

[0029] like Figure 2, as shown in FIG3 , the first collimating beam expander 201, the second collimating beam expander 202, the third collimating beam expander 203, the fourth collimating beam expander 204, and the fifth collimating beam expander 205 are used to generate the first cooling light C1, the second cooling light C2, the third cooling light C3, the fourth cooling light C4, and the fifth cooling light C5, respectively, and each includes a fiber collimator, a beam expander, an internal quarter wave plate, and an internal reflector arranged in sequence. Among them, the fiber collimator and the beam expander in the collimating beam expander (201-205) are fixed in front of the internal quarter wave plate and the internal reflector in the collimating beam expander (201-205) to adjust the collimation and spot size of the cooling light (C1-C5), and the internal quarter wave plate and the internal reflector adjust the polarization and direction of the cooling light (C1-C5). Each collimating beam expander (201-205) is fixed to the rear panel through a supporting fixed base 800, wherein the output light axis of the first collimating beam expander 201 is perpendicular to the first side circular glass window, the output light axis of the second collimating beam expander 202 is perpendicular to the third side circular glass window, the output light axis of the third collimating beam expander 203 is perpendicular to the fifth side circular glass window, and the output light axis of the fourth collimating beam expander 204 is perpendicular to the seventh side circular glass window.

[0030] The second reflecting device 502 includes a second external quarter-wave plate and a second external reflector. The output optical axis of the fifth collimating expander 205 is perpendicular to the front circular light-transmitting window, the rear circular light-transmitting window, and the second external reflector of the decahedral vacuum cavity 100 in sequence. The second external quarter-wave plate is located between the rear circular light-transmitting window and the second external reflector outside the rear circular light-transmitting window.

[0031] The distance between the exit optical axes of the first collimating beam expander 201, the second collimating beam expander 202, the third collimating beam expander 203, the fourth collimating beam expander 204 and the fifth collimating beam expander 205 and the first side circular glass window, the third side circular glass window, the fifth side circular glass window, the seventh side circular glass window and the rear circular light-transmitting window is approximately 4 cm, thereby reducing the propagation distance and optical power loss of each light beam.

[0032] The beam expander and shaper 7 includes a fiber collimator, a beam expander and a shaper. The fiber collimator, the beam expander and the shaper are fixed in the beam expander and shaper in sequence. The beam expander and shaper 7 is vertically fixed to the upper end of the rear panel by a supporting and fixing base 800. The first reflecting device 501 includes a first external quarter wave plate and a first external reflector. The output optical axis of the beam expander and shaper 7 is vertical to the second side circular glass window, the sixth side circular glass window, and the first external reflector in sequence. The distance between the beam expander and shaper 7 and the second side circular glass window is about 2 cm. The first external quarter wave plate is located between the sixth side circular glass window and the first external reflector outside the sixth side circular glass window.

[0033] The fluorescence detection and collection device 6 includes a photodetector and a signal amplification circuit. The detection optical axis of the front photodetector is perpendicular to the fourth side circular glass window of the decahedron vacuum glass chamber 100, and the distance is 2 cm. The fluorescence detection and collection device 6 is fixed on the rear panel. Since the fluorescence signal is very weak, the rear amplification circuit converts the current signal output by the photodetector into a voltage signal and then amplifies it by 10 7 times, the response time is 1.8ms, and the detection noise is 10mV, which meets the experimental conditions for collecting the fluorescence signal of atomic stimulated radiation.

[0034] The optical path structure of the space includes: the first cooling light C1 to the fourth cooling light C4 after being expanded and collimated by the first collimating beam expander 201, the second collimating beam expander 202, the third collimating beam expander 203, and the fourth collimating beam expander 204 are respectively perpendicular to the first side circular glass window, the third side circular glass window, the fifth side circular glass window, and the seventh side circular glass window, and are respectively incident into the decahedron vacuum glass cavity 100 at 90 degrees, and the fifth cooling light C5 after being expanded and collimated by the fifth collimating beam expander 205 is perpendicular to the front circular light-transmitting window and the rear circular light-transmitting window of the decahedron vacuum cavity 100. The circular light-transmitting window is vertically incident on the second external quarter-wave plate and the second external reflector 502. The second external reflector 502 is adjusted to allow the fifth cooling light C5 to return to the fifth collimating beam expander 205 along the original path, wherein the optical path trajectories of the first cooling light C1 and the third cooling light C3 in the decahedron vacuum glass cavity 100 overlap, the optical path trajectories of the second cooling light C2 and the fourth cooling light C4 in the decahedron vacuum glass cavity 100 overlap, and the optical path trajectories of the fifth cooling light C5 and the original reflected light overlap. The second external quarter-wave plate is adjusted to form three pairs of circularly polarized cooling lights required for the magneto-optical trap. The Raman light R passing through the beam expander and shaper 7 is incident perpendicularly to the second side circular glass window at 90° and enters the decahedron vacuum glass cavity 100, and then is emitted perpendicularly to the sixth side circular glass window at 90° to the first external quarter-wave plate and the first external reflector 5. The first external reflector is adjusted to allow the Raman light R to return to the beam expander and shaper 7 along the original path to generate the opposite Raman light required for Raman transition.

[0035] A magnetic field coil is arranged outside the decahedral vacuum glass cavity 100, and the magnetic field coil includes an anti-Helmholtz coil 3 and a Helmholtz coil 4. The Helmholtz coil 4 includes an x-direction compensation magnetic field coil, a y-direction compensation magnetic field coil, and a z-direction compensation magnetic field coil. The anti-Helmholtz coil 3 and the x-direction compensation magnetic field coil are circular coils, and the y-direction compensation magnetic field coil and the z-direction compensation magnetic field coil are rectangular coils. The axis of the anti-Helmholtz coil 3 is fixed perpendicular to the front circular light-transmitting window and the rear circular light-transmitting window, the axis y of the x-direction compensation magnetic field coil is fixed parallel to the axis of the anti-Helmholtz coil 3, the vertical center axis of the y-direction compensation magnetic field coil is fixed parallel to the front circular light-transmitting window and the rear circular light-transmitting window, and the vertical center axis of the z-direction compensation magnetic field coil is fixed perpendicular to the front circular light-transmitting window and the rear circular light-transmitting window. The radius of each coil and the coil spacing ratio are restricted by the geometric size of the vacuum device, ensuring that the space is minimized to the maximum extent while still meeting the magnetic field conditions to generate gradient magnetic fields and compensation magnetic fields, without the need for additional magnetic shielding equipment.

[0036] like Figure 4 As shown, the optical system includes a cooling optical module and a Raman optical module.

[0037] The cooling light module includes a cooling light laser, which generates a single-frequency laser. The single-frequency laser generated by the cooling light laser 10 is divided into two beams of single-frequency laser after passing through a first spectroscopic unit, wherein one beam of the single-frequency laser is output to a first frequency stabilizing unit corresponding to the cooling light laser, and the first frequency stabilizing unit controls the single-frequency laser generated by the cooling light laser to be locked to the cooling light transition frequency of the alkali metal D2 line, and the other beam of the single-frequency laser is passed through a first laser power amplification unit and a first acousto-optic modulator unit to obtain the cooling light required for the experiment, and finally the cooling light is divided into the first cooling light to the fifth cooling light by a spectroscopic shaping unit and enters the first collimating beam expander 201 to the fifth collimating beam expander 205 of the physical system of the atom interferometer.

[0038] The Raman optical module includes a first Raman optical laser and a second Raman optical laser. The first Raman light output by the first Raman optical laser is divided into two beams after passing through a second optical splitting unit, wherein part of the first Raman light is output to a second frequency stabilization unit corresponding to the first Raman optical laser unit, and the second frequency stabilization unit is used to control the frequency stabilization of the first Raman light. The remaining first Raman light is input to a second laser power amplification unit to combine with the second Raman light output by the second Raman optical laser to obtain combined Raman light. A small part of the combined Raman light is input to a beat frequency locking unit to control the frequency of the first Raman light and the second Raman light to be locked at a fixed frequency difference. Most of the remaining combined Raman light passes through a second acousto-optic modulator unit to obtain output Raman light. Finally, the output Raman light is connected to a high-power polarization-maintaining optical fiber through a beam combining and shaping unit to be transmitted to a beam expander and shaper 7 of a physical system of an atomic interferometer.

[0039] Implementation effect:

[0040] In this embodiment, the physical system is 266 mm × 180 mm × 270 mm in length, width and height. The atomic cooling temperature in a single decahedral vacuum glass cavity is lower than 10 μK, and the number of trapped atoms is not less than 10 7 / s. The surface of the decahedral vacuum glass cavity is coated with an anti-reflection film, the cooling light transmittance is better than 99.9%, the optical power loss is better than 3%, and the beam power stability is 1.1%, which can greatly improve the stability and vibration resistance of the vacuum system; the optical module is output through each unit optical fiber, and the number of lasers is reduced by the beat frequency phase-locking unit. In the frequency spectrum range of 10-100Hz, the phase noise of the Raman light is less than -80dBc@60Hz, the output power of the first Raman light and the second Raman light is higher than 500mw, the power stability is 2.8%, and the fringe contrast of the co-directional interferometer is 83%. At the same time, the system is more compact, the optical path is highly stable, and the resistance of the optical path system to temperature changes and environmental airflow changes is improved. The present invention can meet the engineering needs of miniaturized cold atom inertial devices.

[0041] Laser cooling of atoms, vacuum technology, and atomic interference in atom interferometers are common technologies and are not discussed in detail in this patent.

[0042] The specific embodiments described herein are merely examples of the spirit of the present invention. Those skilled in the art may make various modifications or additions to the specific embodiments described or replace them in similar ways, but they will not deviate from the spirit of the present invention or exceed the scope defined by the appended claims.

Claims

1. A compact atomic interferometer integrated device, comprising a physical system, characterized in that: The physical system comprises a decahedral vacuum glass chamber (100), the decahedral vacuum glass chamber (100) comprising a first side circular glass window, a second side circular glass window, a third side circular glass window, a fourth side circular glass window, a fifth side circular glass window, a sixth side circular glass window, a seventh side circular glass window, and an eighth side circular glass window uniformly distributed in sequence in the circumferential direction, the decahedral vacuum glass chamber (100) further comprising a front circular light-transmitting window sheet and a rear circular light-transmitting window sheet, A first collimating beam expander (201), a beam expander and shaper (7), a second collimating beam expander (202), a fluorescence detection and collection device (6), a third collimating beam expander (203), a first reflecting device (501), and a fourth collimating beam expander (204) are respectively arranged on the outside of the first side circular glass window, the outside of the second side circular glass window, the outside of the third side circular glass window, the outside of the fourth side circular glass window, the outside of the fifth side circular glass window, the outside of the sixth side circular glass window, and the outside of the seventh side circular glass window; a fifth collimating beam expander (205) is arranged on the outside of the front circular light-transmitting window; and a second reflecting device (502) is arranged on the outside of the rear circular light-transmitting window. The eighth side circular glass window is connected to one end of the glass tube (104), the other end of the glass tube (104) is connected to the base (106), the base (106) is sealed and connected to the metal flange (801), the right side window (802) of the cube vacuum chamber (804) is sealed and connected to the metal flange (801), the right side window (802) of the cube vacuum chamber (804) is also welded to the alkali metal release agent (103) through a vacuum connector, and the front side window (803) of the cube vacuum chamber (804) is fixed to the ion pump (9), An anti-Helmholtz coil (3) and a Helmholtz coil (4) are arranged outside the decahedral vacuum glass cavity (100).

2. A compact atomic interferometer integrated device according to claim 1, characterized in that: The output optical axes of the first collimating beam expander (201) and the third collimating beam expander (203) are collinear, the output optical axes of the second collimating beam expander (202) and the fourth collimating beam expander (204) are collinear, the output optical axis of the beam expander and shaper (7) is collinear with the reflected light of the first reflecting device (501), and the output optical axis of the fifth collimating beam expander (205) is collinear with the reflected light of the second reflecting device (502).

3. A compact atomic interferometer integrated device according to claim 1, characterized in that: The first reflecting device (501) comprises a first external quarter wave plate and a first external reflecting mirror, the exit optical axis of the beam expander and shaper (7) is perpendicular to the second side circular glass window, the sixth side circular glass window, and the first external reflecting mirror in sequence, and the first external quarter wave plate is located between the sixth side circular glass window and the first external reflecting mirror outside the sixth side circular glass window; The second reflecting device (502) comprises a second external quarter-wave plate and a second external reflecting mirror, the output optical axis of the fifth collimating beam expander (205) is perpendicular to the front circular light-transmitting window, the rear circular light-transmitting window, and the second external reflecting mirror in sequence, and the second external quarter-wave plate is located between the rear circular light-transmitting window and the second external reflecting mirror outside the rear circular light-transmitting window.

4. The compact atomic interferometer integrated device according to claim 1, characterized in that: It also includes an optical system, which includes a cooling light module. The cooling light module comprises a cooling light laser. The single-frequency laser generated by the cooling light laser is divided into two beams of single-frequency laser after passing through a first light splitting unit, wherein one beam of single-frequency laser is output to a first frequency stabilizing unit, and the other beam of single-frequency laser is obtained by passing through a first laser power amplifying unit and a first acousto-optic modulator unit to obtain cooling light. The cooling light is divided into first to fifth cooling lights by a light splitting and shaping unit and enters first to fifth collimating beam expanders (201) to (205) respectively.

5. The compact atomic interferometer integrated device according to claim 4, characterized in that: The optical system also includes a Raman optical module, which includes a first Raman optical laser and a second Raman optical laser. The first Raman light output by the first Raman optical laser is divided into two beams after passing through a second optical splitting unit, wherein a portion of the first Raman light is output to a second frequency stabilization unit, and the remaining first Raman light is input to a second laser power amplification unit to combine with the second Raman light output by the second Raman optical laser to obtain combined Raman light, a portion of the combined Raman light is input to a beat frequency phase locking unit, and the remaining combined Raman light passes through a second acousto-optic modulator unit to obtain output Raman light, and the output Raman light is transmitted to a beam expander and shaper (7) through a beam combining and shaping unit.

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