Appearance defect detection equipment and detection method thereof

Abstract

The present invention discloses an appearance defect detection device and a detection method thereof, comprising a loading pan bin, a loading transplanting device, a loading conversion mechanism, a CCD detection mechanism, a unloading conversion mechanism, an unloading transplanting device and an unloading pan bin arranged in sequence; the loading conversion mechanism and the unloading conversion mechanism both comprise a pick-up and placement device and a first Z-axis driving device for driving the pick-up and placement device to move up and down; the CCD detection mechanism comprises a detection station and a CCD detection Z-axis module, the CCD detection Z-axis module comprises a second Z-axis driving device and a CCD detection device arranged on the second Z-axis driving device, the CCD detection Z-axis module is arranged corresponding to the detection station, and the detection station is connected between the loading conversion mechanism and the unloading conversion mechanism through an XYθ axial driving mechanism. Automatic detection of products is realized, with high work efficiency and high detection quality, and labor costs are saved, which is conducive to mass detection of products.

Description

Technical Field

[0001] The present invention relates to the field of detection equipment, and in particular to an appearance defect detection equipment and a detection method thereof, which are mainly used for wafer appearance detection. Background Art

[0002] The wafer manufacturing process is also constantly improving. In order to effectively ensure the yield of wafer products, it is often necessary to perform defect inspection on the wafer appearance after the wafer is manufactured.

[0003] In traditional technology, the detection of wafer appearance defects is usually carried out manually by visually inspecting the wafer. This detection method is inefficient, labor-intensive, and prone to false detection or missed detection, and cannot guarantee the quality of wafer products leaving the factory. Later, automatic wafer detection equipment appeared, which can improve detection efficiency and quality, but it is still difficult to meet the requirements of high requirements for neat arrangement and extremely low false detection rate (almost zero false detection and missed detection rate).

[0004] Therefore, it is necessary to improve the existing appearance defect detection equipment. Summary of the invention

[0005] In view of this, the present invention aims at the deficiencies in the prior art, and its main purpose is to provide an appearance defect detection equipment and a detection method thereof, which is provided with a loading and transplanting device, a loading and conversion mechanism, a CCD detection mechanism, a unloading and conversion mechanism, and a unloading and transplanting device arranged in sequence, and is equipped with a detection station connected between the loading and conversion mechanism and the unloading and conversion mechanism through an XYθ axial drive mechanism, so as to realize automatic detection of products, have high working efficiency and high detection quality, save labor costs, and be conducive to large-scale detection of products.

[0006] To achieve the above purpose, the present invention adopts the following technical solutions:

[0007] An appearance defect detection device comprises a loading tray bin, a loading material transplanting device, a loading material conversion mechanism, a CCD detection mechanism, a unloading material conversion mechanism, a unloading material transplanting device and an unloading tray bin which are arranged in sequence;

[0008] The loading conversion mechanism and the unloading conversion mechanism both include a pick-and-place device and a first Z-axis driving device for driving the pick-and-place device to move up and down; the CCD detection mechanism includes a detection station and a CCD detection Z-axis module, the CCD detection Z-axis module includes a second Z-axis driving device and a CCD detection device arranged on the second Z-axis driving device, the CCD detection Z-axis module is arranged corresponding to the detection station, and the detection station is connected between the loading conversion mechanism and the unloading conversion mechanism through an XYθ axial driving mechanism.

[0009] As a preferred solution, the upper material tray bin and the lower material tray bin both include a material bin and a lifting device for driving the material bin to lift and lower, and the material bin is provided with a plurality of parallel arranged material tray loading ports for placing material trays; the upper material transplanting device and the lower material transplanting device both include a material tray storage area for placing material trays and a translation mechanism for driving the material tray storage area to move back and forth between the material tray loading port and the picking and placing device.

[0010] As a preferred solution, the tray loading port is provided with an anti-foolproof portion.

[0011] As a preferred solution, a first ion blower is provided on the input side of the loading and transplanting device and the first output side of the unloading and transplanting device; a sweeping dock is also provided on the loading and transplanting device, and the sweeping dock is located between the input side of the loading and transplanting device and the loading conversion mechanism.

[0012] As a preferred solution, a sensor for detecting whether there is a product on the tray is also provided on the input side of the feeding and transplanting device.

[0013] As a preferred solution, the picking and placing device includes a suction cup frame and a vacuum suction cup arranged at the bottom of the suction cup frame, a buffer component is arranged on the suction cup frame, and a product avoiding position is also arranged on the vacuum suction cup.

[0014] As a preferred embodiment, the loading and transplanting device and the unloading and transplanting device are both arranged along the X-axis direction, the loading and transplanting conversion mechanism and the unloading and transplanting conversion mechanism are respectively arranged on the outside of the loading and transplanting device and the unloading and transplanting device, and the CCD detection mechanism is arranged between the inside of the loading and transplanting device and the inside of the unloading and transplanting device.

[0015] As a preferred solution, the XYθ axial drive mechanism includes a Y axial drive mechanism, an X axial drive mechanism arranged on the Y axial drive mechanism, and a θ axis drive mechanism arranged on the X axial drive mechanism, and the detection station is arranged on the θ axis drive mechanism.

[0016] As a preferred solution, a defective material tray is provided on the second output side of the material unloading and transplanting device, and the material unloading conversion mechanism also includes a transverse driving device. The first Z-axis driving device is arranged on the transverse driving device, and the transverse driving device drives the picking and placing device to move back and forth between the defective material tray and the material tray storage area.

[0017] A method for detecting appearance defects, based on the appearance defect detection device, comprises the following steps:

[0018] In the first step, the loading and transplanting device takes the product from the loading bin and then drives the product to move under the loading conversion mechanism;

[0019] In the second step, the loading conversion mechanism grabs the product, and the inspection station moves to the bottom of the loading conversion mechanism, and then the loading conversion mechanism places the product on the inspection station;

[0020] The fourth step is to move the inspection station to the bottom of the CCD inspection Z-axis module. After the CCD inspection Z-axis module inspects the product, the inspection station moves to the bottom of the blanking conversion mechanism.

[0021] In the fifth step, after the material unloading conversion mechanism grabs the product, the material unloading and transplanting device moves to the bottom of the material unloading conversion mechanism, and the material unloading conversion mechanism puts the product into the material unloading and transplanting device for unloading to the material unloading bin.

[0022] Compared with the prior art, the present invention has obvious advantages and beneficial effects. Specifically, it can be seen from the above technical solution that:

[0023] Mainly, by providing a feeding and transplanting device, a feeding conversion mechanism, a CCD detection mechanism, a feeding conversion mechanism, and a feeding and transplanting device arranged in sequence, and cooperating with a detection station connected between the feeding conversion mechanism and the feeding conversion mechanism through an XYθ axial drive mechanism, automatic detection of products is realized, with high working efficiency and high detection quality, and labor costs are saved, which is conducive to mass detection of products;

[0024] Secondly, the setting of the loading and unloading pan warehouse, in conjunction with the setting of the loading and transplanting device, can realize the automatic loading and unloading of products, improve the degree of automation, and further improve the inspection efficiency of products;

[0025] Furthermore, a defective product tray is provided on the second output side of the material unloading and transplanting device, and the corresponding material unloading conversion mechanism also includes a transverse driving device. The first Z-axis driving device is arranged on the transverse driving device, and the transverse driving device drives the picking and placing device to move back and forth between the defective product tray and the tray storage area, thereby realizing automatic sorting of products.

[0026] In order to more clearly illustrate the structural features and effects of the present invention, the present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a three-dimensional schematic diagram of a preferred embodiment of the present invention;

[0028] Figure 2 is an exploded view of a preferred embodiment of the present invention;

[0029] Figure 3 It is a three-dimensional schematic diagram of a preferred embodiment of the present invention (excluding the upper frame);

[0030] Figure 4It is a three-dimensional schematic diagram of another viewing angle of a preferred embodiment of the present invention (excluding the upper frame);

[0031] Figure 5 It is a partial structural diagram of a preferred embodiment of the present invention (CCD detection mechanism and XYθ axial drive mechanism);

[0032] Figure 6 It is a partial structural diagram of a preferred embodiment of the present invention (a loading and transplanting device and a unloading and transplanting device);

[0033] Figure 7 It is a partial structural diagram of a preferred embodiment of the present invention (upper material tray bin, lower material tray bin, defective material tray);

[0034] Figure 8 Schematic diagram of a loading tray bin according to a preferred embodiment of the present invention;

[0035] Fig. 9 yes Figure 8 A partial enlarged view of the middle A;

[0036] Fig.10 Schematic diagram of a feed conversion mechanism according to a preferred embodiment of the present invention;

[0037] Fig.11 It is a schematic diagram of a material transfer mechanism according to a preferred embodiment of the present invention.

[0038] Description of the accompanying drawings:

[0039] 10. Feeding tray silo 11. Material silo

[0040] 12. Lifting device 121. Lifting cylinder

[0041] 122. Silo mounting frame 101. Tray loading port

[0042] 102. Anti-fool unit 20. Loading and transplanting device

[0043] 21. Material tray storage area 211. Positioning PIN

[0044] 22. Translation mechanism

[0045] 23. First ion blower 24. Wharf sweeper

[0046] 30. Loading conversion mechanism 31. Pick-and-place device

[0047] 311, suction cup frame 312, vacuum suction cup

[0048] 313, buffer assembly 32, first Z-axis driving device

[0049] 33. Second ion fan 34. Alignment camera

[0050] 35. Overpressure travel sensor 40. CCD detection mechanism

[0051] 41. Inspection station 42. CCD inspection Z-axis module

[0052] 421. Second Z-axis driving device 422. CCD detection device

[0053] 50. Material transfer mechanism 51. Horizontal drive device

[0054] 60. Material feeding and transplanting device 61. Defective material tray

[0055] 70. Unloading pan bin 80. Lower rack

[0056] 81. Marble countertop 811. Marble diving platform

[0057] 90, upper frame 100, material tray

[0058] 1001, insert slot 1002, baffle

[0059] 110, XYθ axial drive mechanism 1101, Y axial drive mechanism

[0060] 1102. X-axis driving mechanism 1103. θ-axis driving mechanism. DETAILED DESCRIPTION

[0061] Please refer to Figures 1 to 11 As shown, it shows the specific structure of a preferred embodiment of the present invention, including a loading bin 10, a loading transplanting device 20, a loading conversion mechanism 30, a CCD detection mechanism 40, a unloading conversion mechanism 50, a unloading transplanting device 60 and an unloading bin 70 arranged in sequence;

[0062] The loading and transplanting device 20 and the unloading and transplanting device 60 are both arranged along the X-axis direction, the loading and transplanting conversion mechanism 30 and the unloading and transplanting conversion mechanism 50 are respectively arranged on the outside of the loading and transplanting device 20 and the unloading and transplanting device 60, and the CCD detection mechanism 40 is arranged between the inside of the loading and transplanting device 20 and the inside of the unloading and transplanting device 60.

[0063] The loading and transplanting device 20, the loading and conversion mechanism 30, the CCD detection mechanism 40, the unloading and conversion mechanism 50, and the unloading and transplanting device 60 are all arranged on a marble table 81, and the marble table 81 is arranged on the top of the lower frame 80. The loading and discharging bin 10 and the unloading and discharging bin 70 are both arranged on the lower frame 80 and are both located on the side of the marble table 81; and, the marble table 81 is provided with a marble diving platform 811 at the CCD detection mechanism 40, and the CCD detection mechanism 40 is arranged at the front end of the marble diving platform 811; in addition, the lower frame 80 is also provided with an upper frame 90 that covers the loading and discharging bin 10, the loading and transplanting device 20, the loading and conversion mechanism 30, the CCD detection mechanism 40, the unloading and conversion mechanism 50, the unloading and transplanting device 60 and the unloading and discharging bin 70.

[0064] The upper material tray bin 10 and the lower material tray bin 70 both include a material bin 11 and a lifting device 12 for driving the material bin 11 to move upward and downward. The material bin 11 is provided with a plurality of tray loading ports 101 arranged in parallel for placing the material trays 100. The lifting device 12 includes a lifting cylinder 121 and a material bin mounting frame 122 disposed on the lifting cylinder 121. The material bin mounting frame 122 is provided with a guide rail. The lifting cylinder 121 drives the material bin 11 to be movably disposed on the material bin mounting frame 122.

[0065] In addition, the tray loading port 101 is provided with an anti-foolproof portion 102, and correspondingly includes a tray 100, the bottom of the tray 100 is provided with an insertion groove 1001 adapted to the anti-foolproof portion 102, the insertion groove 1001 is adapted to the anti-foolproof portion 102, and baffles 1002 are provided at the four corners of the tray 100, and the total thickness of the placed products does not exceed the height of the baffles 1002; a sensor for detecting whether the total thickness of the placed products exceeds the baffle 1002 is also provided on the silo mounting frame 122; preferably, the tray loading port 101 is 7 arranged at intervals.

[0066] The loading and transferring device 20 and the unloading and transferring device 60 both include a tray storage area 21 for placing trays and a translation mechanism 22 for driving the tray storage area 21 to move back and forth between the tray loading port 101 and the placing and taking device 31;

[0067] Furthermore, the input side of the loading and transplanting device 20 and the first output side of the unloading and transplanting device 60 are both provided with a first ion blower 23; the loading and transplanting device 20 is also provided with a sweeping dock 24, and the sweeping dock 24 is located between the input side of the loading and transplanting device 20 and the loading conversion mechanism 30; the input side of the loading and transplanting device 20 is also provided with a sensor for detecting whether there is a product on the material tray;

[0068] Preferably, the tray storage area 21 is provided with positioning PINs 211 for positioning the trays, and there are four positioning PINs 211, which are respectively arranged at the four corners of the tray storage area 21. Correspondingly, the tray 100 has positioning holes adapted to the positioning PINs 211.

[0069] The loading conversion mechanism 30 and the unloading conversion mechanism 50 both include a pick-and-place device 31 and a first Z-axis driving device 32 for driving the picking-and-place device 31 to move up and down; the CCD detection mechanism 40 includes a detection station 41 and a CCD detection Z-axis module 42, the CCD detection Z-axis module 42 includes a second Z-axis driving device 421 and a CCD detection device 422 arranged on the second Z-axis driving device 421, wherein the CCD detection device 422 is an AOI detection device, the CCD detection Z-axis module 42 is arranged corresponding to the detection station 41, the detection station 41 is connected between the loading conversion mechanism 30 and the unloading conversion mechanism 50 through an XYθ axial driving mechanism 110, and the detection station 41 is scanned by the scanning terminal 24 before the detection;

[0070] Furthermore, a defective material tray 61 is provided at the second output side of the material unloading and transplanting device 60, and the material unloading conversion mechanism 50 further includes a transverse driving device 51, and the first Z-axis driving device 32 is provided on the transverse driving device 51, and the transverse driving device 51 drives the pick-and-place device 31 to and from the defective material tray 61 and the material tray storage area 21; a counting sensor is also provided on the defective material tray 61;

[0071] In addition, the pick-and-place device 31 includes a suction cup frame 311 and a vacuum suction cup 312 arranged at the bottom of the suction cup frame 311. The suction cup frame 311 is provided with a buffer component 313. The function of the buffer component 313 is to offset the deadweight of the vacuum suction cup 312. The vacuum suction cup 312 is also provided with a product avoidance position and a material tray avoidance position.

[0072] Preferably, the feeding conversion mechanism 30 also includes a second ion blower 33, an alignment camera 34 and an over-pressure stroke sensor 35, the second ion blower 33 is arranged toward the bottom of the vacuum suction cup 312, the alignment camera 34 is arranged toward the top of the vacuum suction cup 312, and the over-pressure stroke sensor 35 is arranged on the side of the buffer assembly 313.

[0073] The XYθ axial drive mechanism 110 includes a Y axial drive mechanism 1101 , an X axial drive mechanism 1102 disposed on the Y axial drive mechanism 1101 , and a θ axis drive mechanism 1103 disposed on the X axial drive mechanism 1102 . The detection station 41 is disposed on the θ axis drive mechanism 1103 .

[0074] The detection method of this embodiment is described in detail as follows:

[0075] In the first step, the loading and transplanting device 20 takes the product from the loading bin 10 and then drives the product to move below the loading conversion mechanism 30;

[0076] In the second step, the material transfer mechanism 30 grabs the product, and at the same time the inspection station 41 moves to the bottom of the material transfer mechanism 30, and then the material transfer mechanism 30 places the product on the inspection station 41;

[0077] Step 4: the inspection station 41 moves to below the CCD inspection Z-axis module 42. After the CCD inspection Z-axis module 42 inspects the product, the inspection station 41 moves to below the blanking conversion mechanism 50.

[0078] In the fifth step, after the material transfer mechanism 50 grabs the product, the material transfer device 60 moves to the bottom of the material transfer mechanism 50, and the material transfer mechanism 50 places the product on the material transfer device 60 for unloading to the material tray bin 70, or the material transfer mechanism 50 moves to the top of the defective product tray 61 and places the product on the defective product tray 61.

[0079] The design emphasis of the present invention is:

[0080] Mainly, by providing a feeding and transplanting device, a feeding conversion mechanism, a CCD detection mechanism, a feeding conversion mechanism, and a feeding and transplanting device arranged in sequence, and cooperating with a detection station connected between the feeding conversion mechanism and the feeding conversion mechanism through an XYθ axial drive mechanism, automatic detection of products is realized, with high working efficiency and high detection quality, and labor costs are saved, which is conducive to mass detection of products;

[0081] Secondly, the setting of the loading and unloading pan warehouse, in conjunction with the setting of the loading and transplanting device, can realize the automatic loading and unloading of products, improve the degree of automation, and further improve the inspection efficiency of products;

[0082] Furthermore, a defective product tray is provided on the second output side of the material unloading and transplanting device, and the corresponding material unloading conversion mechanism also includes a transverse driving device. The first Z-axis driving device is arranged on the transverse driving device, and the transverse driving device drives the picking and placing device to move back and forth between the defective product tray and the tray storage area, thereby realizing automatic sorting of products.

[0083] The above description is only a preferred embodiment of the present invention and does not limit the technical scope of the present invention. Therefore, any slight modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. An appearance defect detection device, characterized in that: It includes a loading tray warehouse, a loading transplanting device, a loading conversion mechanism, a CCD detection mechanism, a unloading conversion mechanism, a unloading transplanting device and an unloading tray warehouse which are arranged in sequence; The loading conversion mechanism and the unloading conversion mechanism both include a pick-and-place device and a first Z-axis driving device for driving the pick-and-place device to move up and down; the CCD detection mechanism includes a detection station and a CCD detection Z-axis module, the CCD detection Z-axis module includes a second Z-axis driving device and a CCD detection device arranged on the second Z-axis driving device, the CCD detection Z-axis module is arranged corresponding to the detection station, and the detection station is connected between the loading conversion mechanism and the unloading conversion mechanism through an XYθ axial driving mechanism.

2. The appearance defect detection device according to claim 1, characterized in that: The upper material tray bin and the lower material tray bin both include a material bin and a lifting device that drives the material bin to lift and lower, and a plurality of parallel arranged material tray loading ports for placing material trays are provided in the material bin; the upper material transplanting device and the lower material transplanting device both include a material tray storage area for placing material trays and a translation mechanism that drives the material tray storage area to move back and forth between the material tray loading port and the picking and placing device.

3. The appearance defect detection device according to claim 2, characterized in that: The tray loading port is provided with a fool-proof portion.

4. The appearance defect detection device according to claim 2, characterized in that: The input side of the loading and transplanting device and the first output side of the unloading and transplanting device are both provided with a first ion blower; the loading and transplanting device is also provided with a sweeping dock, and the sweeping dock is located between the input side of the loading and transplanting device and the loading conversion mechanism.

5. The appearance defect detection device according to claim 1 or 4, characterized in that: The input side of the feeding and transplanting device is also provided with a sensor for detecting whether there is a product on the tray.

6. The appearance defect detection device according to claim 1, characterized in that: The pick-and-place device comprises a suction cup frame and a vacuum suction cup arranged at the bottom of the suction cup frame, a buffer component is arranged on the suction cup frame, and a product avoiding position is also arranged on the vacuum suction cup.

7. The appearance defect detection device according to claim 1 or 2, characterized in that: The loading and transplanting device and the unloading and transplanting device are both arranged along the X-axis direction, the loading and transplanting conversion mechanism and the unloading and transplanting conversion mechanism are respectively arranged on the outside of the loading and transplanting device and the unloading and transplanting device, and the CCD detection mechanism is arranged between the inside of the loading and transplanting device and the inside of the unloading and transplanting device.

8. The appearance defect detection device according to claim 7, characterized in that: The XYθ axial drive mechanism includes a Y axial drive mechanism, an X axial drive mechanism arranged on the Y axial drive mechanism, and a θ axis drive mechanism arranged on the X axial drive mechanism, and the detection station is arranged on the θ axis drive mechanism.

9. The appearance defect detection device according to claim 2, characterized in that: A defective material tray is arranged on the second output side of the material unloading and transplanting device, and the material unloading conversion mechanism also includes a transverse driving device. The first Z-axis driving device is arranged on the transverse driving device, and the transverse driving device drives the picking and placing device to move back and forth between the defective material tray and the material tray storage area.

10. A method for detecting appearance defects, characterized in that: The device for detecting appearance defects according to any one of claims 1 to 9 comprises the following steps: In the first step, the loading and transplanting device takes the product from the loading bin and then drives the product to move under the loading conversion mechanism; In the second step, the loading conversion mechanism grabs the product, and the inspection station moves to the bottom of the loading conversion mechanism, and then the loading conversion mechanism places the product on the inspection station; The fourth step is to move the inspection station to the bottom of the CCD inspection Z-axis module. After the CCD inspection Z-axis module inspects the product, the inspection station moves to the bottom of the blanking conversion mechanism. In the fifth step, after the material unloading conversion mechanism grabs the product, the material unloading and transplanting device moves to the bottom of the material unloading conversion mechanism, and the material unloading conversion mechanism puts the product into the material unloading and transplanting device for unloading to the material unloading bin.

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