A method, device and storage medium for generating random-shaped super-atoms that are easy to process

Abstract

The present invention relates to a method, device and storage medium for generating random-shaped super-atoms that are easy to process. The method comprises: generating super-atoms based on a super-atom inverse square generation function; screening the generated super-atoms based on a minimum line width to obtain super-atoms that meet processing conditions. The super-atoms generated by the present invention have smooth boundaries without any chamfers, and the method can customize the minimum line width to screen out particles or small holes that are too small, so the generated super-atoms are very easy to process and have practical value in the micro-nano processing of super-surfaces.

Description

Technical Field

[0001] The invention relates to the fields of nanophotonics and computer-aided optimization technology, and in particular to a method for generating easily processable random-shaped super atoms. Background Art

[0002] A metasurface is a two-dimensional planar structure composed of metaatoms with special electromagnetic properties arranged in a certain way. It can flexibly control the amplitude, phase, polarization, etc. of the incident light, and has powerful light field manipulation capabilities. In recent years, computer-aided optimization design methods have accelerated the development of metasurfaces. Computer-aided methods can realize metaatoms of various random shapes that cannot be designed manually, maximizing the phase modulation capabilities of metaatoms. However, the metaatoms generated by these methods often have sharp chamfers, or particles, small holes, etc. These shapes are smaller than the minimum line width of the process and are difficult to process accurately. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide a method for generating random-shaped super-atoms, so that the generated super-atoms have the characteristic of being easy to process.

[0004] The technical solution adopted by the present invention to solve the technical problem is: to provide a method for generating random-shaped super atoms that is easy to process, comprising the following steps:

[0005] (1) Generate superatoms based on the inverse square generation function of superatoms;

[0006] (2) Screening the generated superatoms based on the minimum line width to obtain superatoms that meet the processing conditions.

[0007] The step (1) specifically includes the following sub-steps:

[0008] (11) Constructing the inverse square generation function of a superatom;

[0009] (12) selecting any value f0 within the value range of the inverse square generating function of the superatom to obtain contour lines in the xy plane, wherein the contour lines divide the xy plane into a plurality of regions;

[0010] (13) The area greater than or equal to f0 is regarded as the material filling area, and the area less than f0 is regarded as the etching area, thereby obtaining a super atom.

[0011] The hyperatom inverse square generation function is Where n is the number of circles; r i is the radius of the ith circle, x i ,y i is the position of the center of the i-th circle.

[0012] The step (2) specifically includes the following sub-steps:

[0013] (21) Construct a moving circle with the minimum line width as the radius;

[0014] (22) moving the center of the moving circle along the shape boundary of the superatom, and recording the number of intersections between the moving circle and the superatom boundary during the movement;

[0015] (23) Determine whether to retain the superatom based on the number of intersections.

[0016] In the step (23), if the number of intersection points remains at 2 throughout the movement of the moving circle, the superatom is retained.

[0017] The technical solution adopted by the present invention to solve the technical problem is: a random-shaped super-atom generating device that is easy to process is also provided, comprising:

[0018] A superatom generation module, used to generate superatoms based on a superatom inverse square generation function;

[0019] The superatom screening module is used to screen the generated superatoms based on the minimum line width to obtain superatoms that meet the processing conditions.

[0020] The superatom generation module includes: a function construction unit, which is used to construct a superatom inverse square generation function; a region division unit, which is used to select any value f0 within the value range of the superatom inverse square generation function to obtain contour lines in the xy plane, and the contour lines divide the xy plane into several regions; and a region determination unit, which is used to correspond the region greater than or equal to f0 as a material filling region and the region less than f0 as an etching region, so as to obtain a superatom.

[0021] The superatom inverse square generation function constructed by the function construction unit is: Where n is the number of circles; r i is the radius of the ith circle, x i ,y i is the position of the center of the i-th circle.

[0022] The superatom screening module includes: a moving circle construction unit, which is used to construct a moving circle with a minimum line width as a radius; an intersection recording unit, which is used to move the center of the moving circle along the shape boundary of the superatom and record the number of intersections between the moving circle and the superatom boundary during the movement; and a judgment unit, which is used to judge whether to retain the superatom based on the number of intersections.

[0023] The judgment unit retains the super atom when the number of the intersection points remains at 2 throughout the movement of the moving circle.

[0024] The technical solution adopted by the present invention to solve its technical problem is: a computer-readable storage medium is also provided, on which a computer program is stored, and the program is executed by a processor to implement the steps of the above-mentioned easy-to-process random shape superatom generation method.

[0025] Beneficial Effects

[0026] Due to the adoption of the above-mentioned technical scheme, the present invention has the following advantages and positive effects compared with the prior art: the super-atom boundary generated by the present invention is smooth without any chamfer, and this method can customize the minimum line width to screen out particles or small holes that are too small, so the generated super-atom is very easy to process and has practical value in the micro-nano processing of super-surfaces. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 is a flow chart of a first embodiment of the present invention;

[0028] Figure 2 is a three-dimensional graph and a corresponding contour graph of a function f(x, y) randomly generated in the first embodiment of the present invention;

[0029] Figure 3 is a schematic diagram of the super atom shape corresponding to f0=1.2 and f0=1 in the first embodiment of the present invention;

[0030] Figure 4 Schematic diagrams of four different shapes of super atoms in the first embodiment of the present invention;

[0031] Figure 5 This is a schematic diagram of the application of the first embodiment of the present invention;

[0032] Figure 6 It is a block diagram of a second embodiment of the present invention. DETAILED DESCRIPTION

[0033] The present invention will be further described below in conjunction with specific embodiments. It should be understood that these embodiments are only used to illustrate the present invention and are not intended to limit the scope of the present invention. In addition, it should be understood that after reading the content taught by the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms fall within the scope limited by the appended claims of the application equally.

[0034] The first embodiment of the present invention relates to a method for generating random-shaped superatoms that is easy to process, such as Figure 1 As shown, the process includes the following steps: generating superatoms based on a superatom inverse square generation function; screening the generated superatoms based on a minimum line width to obtain superatoms that meet the processing conditions.

[0035] Specifically, the two steps in this embodiment are: a step of generating super-atoms of random graphics with smooth boundaries and a step of screening graphics that meet the minimum line width condition.

[0036] Generation of smooth-bounded random-shaped hyperatoms:

[0037] Set up a function f(x,y), written as This function is composed of a series of inverse square functions, that is, as the distance from the center of the circle increases, the contribution to the function gradually decreases. This embodiment is called the superatom inverse square generating function. In this function, n is the number of circles; r i is the radius of the ith circle, x i ,y i is the position of the center of the i-th circle, n,i,x i ,y i are random values ​​within a preset range. As these inverse square functions get closer, they change shape and produce a blending behavior, which makes them produce an effectively smooth surface. Figure 2 Shown is a random generated f(x,y).

[0038] Select any f(x,y)=f0 in the range, and you can get the corresponding contour line in the xy plane, such as Figure 2 As shown. Usually, the contour line is one or more smooth closed curves, which divide the plane into several regions. The region with f≥f0 corresponds to the material filling region, and the region with f<f0 corresponds to the etching region, and the corresponding super atom can be obtained. Figure 3 As shown, the left side is the super-atom shape corresponding to f0=1.2, and the right side is the super-atom shape corresponding to f0=1.

[0039] Filtering of graphics that meet the minimum line width condition:

[0040] Micro-nano processing has a minimum line width δ. Patterns smaller than this size cannot be accurately processed. Therefore, this embodiment proposes a screening step for patterns that meet the minimum line width condition. Figure 4 Four different shapes of superatoms are shown. A moving circle A with a fixed radius of δ is constructed. The center O of the moving circle A moves along the shape boundary of the superatom. The number of intersections N between the moving circle A and the superatom boundary during the movement is recorded. If the superatom meets the processing requirements of the minimum line width δ, then N=2 must always hold. Figure 4 (a). Once N≠2 appears, the super-atom graph cannot be processed accurately and is directly eliminated: Figure 4 (b), N = 4, a slit that is too small appears; Figure 4 (c), N = 4, the local pattern is too narrow; Figure 4(d), N = 0, a too small cavity (or particle) appears. After screening, the super-atoms that meet the processing conditions are retained. If the super-atom does not meet the conditions, you can return to the previous step and re-select f0 to generate a different super-atom.

[0041] The atoms generated by this embodiment can be used to make an optical metasurface that can realize the function of light beam deflection. Figure 5 As shown in (a), four superatoms are generated based on the method of this embodiment, and the supercell composed of the four superatoms has a three-dimensional structure as shown in Figure 5 (c) (the material is silicon, the substrate is silicon dioxide, the period p = 600nm, the height h = 800nm). A plane wave with a wavelength of 1550nm is incident from the substrate, and after passing through the supercell, the transmission direction is deflected by 45°, as shown in Figure 5 (b) as shown.

[0042] It is not difficult to find that the super-atom boundary generated by the present invention is smooth without any chamfers, and this method can customize the minimum line width to screen out particles or small holes that are too small. Therefore, the generated super-atom is very easy to process and has practical value in the micro-nano processing of super-surfaces.

[0043] The second embodiment of the present invention relates to an easily processable random-shaped superatom generating device, such as Figure 6 As shown, it includes: a superatom generation module, which is used to generate superatoms based on a superatom inverse square generation function; and a superatom screening module, which is used to screen the generated superatoms based on the minimum line width to obtain superatoms that meet the processing conditions.

[0044] Among them, the superatom generation module includes: a function construction unit, used to construct a superatom inverse square generation function; a region division unit, used to select any value f0 within the value range of the superatom inverse square generation function to obtain contour lines in the xy plane, and the contour lines divide the xy plane into several regions; a region determination unit, used to correspond the region greater than or equal to f0 to the material filling region, and correspond the region less than f0 to the etching region, so as to obtain a superatom.

[0045] The superatom inverse square generation function constructed by the function construction unit is: Where n is the number of circles; r i is the radius of the ith circle, x i ,y i is the position of the center of the i-th circle.

[0046] The superatom screening module includes: a moving circle construction unit, which is used to construct a moving circle with a minimum line width as a radius; an intersection recording unit, which is used to move the center of the moving circle along the shape boundary of the superatom and record the number of intersections between the moving circle and the superatom boundary during the movement; and a judgment unit, which is used to judge whether to retain the superatom based on the number of intersections.

[0047] The judgment unit retains the super atom when the number of the intersection points remains at 2 throughout the movement of the moving circle.

[0048] It should be noted that the easily processable random-shaped super-atom generating device / method of the above embodiments of the present invention can be implemented by computer program instructions, for example, by a dedicated program, and these computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer or other programmable data processing device to constitute the easily processable random-shaped super-atom generating device of the embodiment of the present invention, and these instructions can be executed by the processor of the computer or other programmable data processing device to create units or components for implementing the functions / operations specified in these flowcharts and / or boxes and / or one or more flowcharts.

[0049] Furthermore, these computer program instructions can be stored in a computer-readable memory, which can instruct a computer or other programmable processor to implement functions in a specific manner, so that these instructions stored in the computer-readable memory constitute a manufactured product containing instruction components that implement the functions / operations specified in one or more boxes of the flowchart and / or block diagram.

[0050] It should also be noted that in some alternative implementations, the functions / operations shown in the blocks may not occur in the order shown in the flow chart. For example, two blocks shown in sequence may actually be performed substantially simultaneously or these blocks may sometimes be performed in reverse order, depending on the functions / operations involved.

[0051] It should be noted that the elements disclosed and depicted herein (including the flowcharts and block diagrams in the accompanying drawings) refer to the logical boundaries between the elements. However, according to software or hardware engineering practice, the depicted elements and their functions can be executed on a machine through a computer executable medium, and the computer executable medium has a processor capable of executing program instructions stored thereon, and the program instructions are as a single-chip software structure, as an independent software module, or as a module using external programs, codes, services, etc., or any combination of these, and all of these execution schemes may fall within the scope of the present disclosure.

[0052] Although different non-limiting embodiments have specifically described components, embodiments of the invention are not limited to these specific combinations. It is possible to use some of the components or features from any non-limiting embodiment in combination with features or components from any other non-limiting embodiment.

Claims

1. A method for generating random-shaped superatoms that is easy to process, characterized in that: The following steps are involved: (1) Generate superatoms based on the inverse square generation function of superatoms, specifically including: (11) constructing a superatom inverse square generation function; wherein the superatom inverse square generation function is Where n is the number of circles; r i is the radius of the ith circle, x i ,y i is the position of the center of the i-th circle; (12) selecting any value f0 within the value range of the inverse square generating function of the superatom to obtain contour lines in the xy plane, wherein the contour lines divide the xy plane into a plurality of regions; (13) The region greater than or equal to f0 corresponds to the material filling region, and the region less than f0 corresponds to the etching region, thereby obtaining a super atom; (2) Screening the generated superatoms based on the minimum line width to obtain superatoms that meet the processing conditions.

2. The method for generating random-shaped super-atoms that are easy to process according to claim 1, characterized in that: The step (2) specifically includes the following sub-steps: (21) Construct a moving circle with the minimum line width as the radius; (22) moving the center of the moving circle along the shape boundary of the superatom, and recording the number of intersections between the moving circle and the superatom boundary during the movement; (23) Determine whether to retain the superatom based on the number of intersections.

3. The method for generating random-shaped super-atoms that are easy to process according to claim 2, characterized in that: In the step (23), if the number of intersection points remains at 2 throughout the movement of the moving circle, the superatom is retained.

4. An easily processable random-shaped superatom generating device, characterized in that: include: A superatom generation module, used to generate superatoms based on a superatom inverse square generation function; The super atom generation module includes: A function construction unit is used to construct a superatom inverse square generation function; wherein the superatom inverse square generation function is Where n is the number of circles; r i is the radius of the ith circle, x i ,y i is the position of the center of the i-th circle; A region division unit, used for selecting any value f0 in the value range of the superatom inverse square generating function to obtain contour lines in the xy plane, wherein the contour lines divide the xy plane into a plurality of regions; A region determination unit, used for corresponding a region greater than or equal to f0 as a material filling region, and corresponding a region less than f0 as an etching region, so as to obtain a super atom; The superatom screening module is used to screen the generated superatoms based on the minimum line width to obtain superatoms that meet the processing conditions.

5. The easily processable random-shaped superatom generation device according to claim 4, characterized in that: The superatom screening module includes: a moving circle construction unit, which is used to construct a moving circle with a minimum line width as a radius; an intersection recording unit, which is used to move the center of the moving circle along the shape boundary of the superatom and record the number of intersections between the moving circle and the superatom boundary during the movement; and a judgment unit, which is used to judge whether to retain the superatom based on the number of intersections.

6. The easily processable random-shaped superatom generation device according to claim 5, characterized in that: The judgment unit retains the super atom when the number of the intersection points remains at 2 throughout the movement of the moving circle.

7. A computer-readable storage medium having a computer program stored thereon, characterized in that: The program is executed by a processor to implement the steps of the method for generating random-shaped super-atoms that are easy to process as claimed in any one of claims 1 to 3.

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