One-way microfiltration valve and vacuum equipment having the same

Abstract

The present invention provides a one-way microfiltration valve and a vacuum device having the one-way microfiltration valve, which belongs to the technical field of vacuum equipment, wherein the one-way microfiltration valve comprises: a valve body, a valve core, an elastic member, a microfiltration member and a throttle plug, wherein the valve core is slidably arranged in the valve body; the elastic member is connected to the valve core and has an elastic force that causes the valve core to move in the direction of closing the circulation channel; the microfiltration member is arranged in the circulation channel and is used to filter the fluid circulating in the circulation channel; the throttle plug is arranged in the inlet section of the valve body and has a throttle hole connected to the microfiltration member; the one-way microfiltration valve of the present invention realizes the passage of ultra-low flow in the inlet section through the throttle plug and the microfiltration member, and ensures that the fluid passing through has ultra-high cleanliness through the microfiltration member, thereby ensuring that the fluid can be unidirectionally conducted with ultra-low flow and ultra-high cleanliness.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum equipment, and in particular to a one-way microfiltration valve and vacuum equipment having the one-way microfiltration valve. Background Art

[0002] In the vacuum or compressor field, some special working conditions or shaft seal protection gases need to flow in one direction according to the required flow rate, cleanliness, and flow. Specifically, for example, the shaft seal protection gas at the low-pressure end of the vacuum pump requires ultra-low flow (to ensure that the vacuum degree is not affected) and ultra-high cleanliness (to ensure that the shaft seal is not damaged).

[0003] The existing one-way valves on the market cannot meet the requirements in terms of flow control and cleanliness control. Summary of the invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defect that the one-way valve in the prior art cannot ensure ultra-low flow and ultra-high cleanliness conduction, thereby providing a one-way microfiltration valve and a vacuum equipment having the one-way microfiltration valve.

[0005] In order to solve the above technical problems, the present invention provides a one-way microfiltration valve, comprising:

[0006] A valve body having an inlet section and an outlet section, wherein a flow channel is provided between the inlet section and the outlet section;

[0007] A valve core is slidably disposed in the outlet section of the valve body, and has a blocking portion for blocking the circulation channel, wherein the blocking portion blocks the circulation channel by moving in a direction toward the circulation channel;

[0008] an elastic member connected to the valve core and having an elastic force for moving the valve core in a direction of closing the flow channel;

[0009] A microfilter, disposed in the circulation channel, for filtering the fluid circulating in the circulation channel;

[0010] A throttle plug is arranged in the inlet section of the valve body and has a throttle hole communicated with the micro-filter element.

[0011] Optionally, the microfilter element is cylindrical, and one end of the flow channel has a cylindrical cavity section for mounting the microfilter element.

[0012] Optionally, the blocking portion of the valve core is rectangular, and the other end of the circulation channel has a rectangular cavity section for accommodating the blocking portion of the valve core.

[0013] Optionally, the maximum width of the rectangular cavity section of the circulation channel is smaller than the diameter of the cylindrical cavity section.

[0014] Optionally, a first sealing ring is sleeved on one end of the throttle plug facing the circulation channel.

[0015] Optionally, a second sealing ring is sleeved on one end of the valve core facing the circulation channel.

[0016] Optionally, a guide sleeve is detachably connected to the outlet section of the valve body, and the valve core has a sliding section partially inserted into the guide sleeve.

[0017] Optionally, the elastic member is sleeved on the sliding section, and two ends of the elastic member are respectively against the guide sleeve and the elastic member.

[0018] Optionally, the guide sleeve is detachably clamped in the outlet section of the valve body via a clamping spring.

[0019] The present invention also provides a vacuum device, comprising the one-way microfiltration valve described in any one of the above schemes.

[0020] The technical solution of the present invention has the following advantages:

[0021] 1. The one-way microfiltration valve provided by the present invention realizes the passage of ultra-low flow through the throttle plug and the microfiltration element in the inlet section, and ensures that the fluid passing through has ultra-high cleanliness through the microfiltration element, thereby ensuring that the fluid can be conducted in a one-way manner with ultra-low flow and ultra-high cleanliness.

[0022] 2. The vacuum equipment provided by the present invention has the one-way microfiltration valve mentioned above, and thus has the advantages of the one-way microfiltration valve mentioned above. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 It is a front cross-sectional view of an implementation manner of a one-way microfiltration valve provided in an embodiment of the present invention.

[0025] Figure 2 for Figure 1 Exploded view of the one-way microfiltration valve.

[0026] Figure 3 for Figure 2 Stereoscopic diagram.

[0027] Description of reference numerals:

[0028] 1. Valve body; 2. Valve core; 3. Inlet section; 4. Outlet section; 5. Flow channel; 6. Elastic member; 7. Microfiltration member; 8. Throttle plug; 9. Columnar cavity section; 10. Sealing part; 11. Rectangular cavity section; 12. First sealing ring; 13. Second sealing ring; 14. Guide sleeve; 15. Retaining spring. DETAILED DESCRIPTION

[0029] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0031] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0033] The one-way microfiltration valve provided in this embodiment can be used in vacuum equipment to provide one-way conduction gas with ultra-low flow and ultra-high cleanliness for the vacuum equipment. In addition, it can also be used for one-way conduction of other fluids with ultra-low flow and ultra-high cleanliness.

[0034] like Figure 1As shown, a specific implementation of the one-way microfiltration valve provided in this embodiment includes: a valve body 1 and a valve core 2 slidably disposed in the valve body 1. The valve body 1 has an inlet section 3 and an outlet section 4, and a circulation channel 5 is provided between the inlet section 3 and the outlet section 4; the valve core 2 is slidably disposed in the outlet section 4 of the valve body 1, and the valve core 2 has a blocking portion 10 for blocking the circulation channel 5, and the blocking portion 10 blocks the circulation channel 5 by moving in the direction of the circulation channel 5.

[0035] An elastic member 6 is connected to the valve core 2, and the elastic member 6 has an elastic force that causes the valve core 2 to move in the direction of closing the circulation channel 5; a microfilter 7 is also arranged in the circulation channel 5, and the microfilter 7 is used to filter the fluid flowing in the circulation channel 5; a throttle plug 8 is arranged in the inlet section 3 of the valve body 1, and the throttle plug 8 has a throttling hole connected to the microfilter 7.

[0036] The one-way microfiltration valve provided in this embodiment compresses the microfiltration element 7 through the throttle plug 8 in the inlet section 3 to achieve the passage of ultra-low flow, and the microfiltration element 7 ensures that the fluid passing through has ultra-high cleanliness, thereby ensuring that the fluid can be unidirectionally conducted with ultra-low flow and ultra-high cleanliness. In addition, in the one-way microfiltration valve provided in this embodiment, the microfiltration element 7 and the throttle plug 8 are pressed together, and the microfiltration flow rate is adjusted by replacing and adjusting the aperture of the throttle hole of the throttle plug 8, thereby achieving the microfiltration flow rate being adjustable within the aperture range of the throttle hole. For example, at a pressure of 0.12MPa, when the aperture of the throttle hole is 0.9mm, the flow rate is 25±5sccm (cubic centimeters per minute). Therefore, the ultra-low flow of the one-way microfiltration valve provided in this embodiment can achieve a one-way conduction flow rate of 20 to 100sccm (cubic centimeters per minute) at a pressure of 0.1 to 0.2MPa.

[0037] like Figure 2 , Figure 3 As shown, the microfilter element 7 is cylindrical, and one end of the flow channel 5 has a cylindrical cavity section 9 for installing the microfilter element 7. Specifically, the microfilter element 7 can be made of a stainless steel sintered filter element. In addition, microporous filtration structures such as sintered ceramics, powder metallurgy, and Teflon sintered filter elements can also be used. The microfilter element 7 can be arranged in a multi-piece stacking or single-piece manner to ensure that the filtration life and filtration accuracy are not attenuated. Therefore, the one-way microfiltration valve provided in this embodiment can achieve ultra-high cleanliness filtration by making the filtration accuracy reach 0.1 to 5um (micrometers).

[0038] like Figure 2 , Figure 3As shown, the blocking portion 10 of the valve core 2 is rectangular, and the other end of the circulation channel 5 has a rectangular cavity section 11 for accommodating the blocking portion 10 of the valve core 2. Specifically, the maximum width of the rectangular cavity section 11 of the circulation channel 5 is smaller than the diameter of the cylindrical cavity section 9. By inserting the blocking portion 10 of the valve core 2 into the rectangular cavity section 11 of the circulation channel 5, the circulation channel 5 is closed to achieve one-way closure. Then, by pushing the blocking portion 10 of the valve core 2 out of the rectangular cavity section 11 of the circulation channel 5, the circulation channel 5 is conducted to achieve one-way conduction.

[0039] like Figure 1-3 As shown, a first sealing ring 12 is sleeved on one end of the throttle plug facing the circulation channel 5, and the first sealing ring 12 is used to close the gap between the throttle plug and the circulation channel 5, so as to prevent the fluid from leaking from the throttle plug.

[0040] like Figure 1-3 As shown, a second sealing ring 13 is sleeved on one end of the valve core 2 facing the circulation channel 5 , and the second sealing ring 13 is used to close the gap between the periphery of the valve core 2 and the circulation channel 5 , thereby preventing fluid from leaking from the periphery of the valve core 2 .

[0041] like Figure 2 , Figure 3 As shown, a guide sleeve 14 is detachably connected to the outlet section 4 of the valve body 1, and the valve core 2 has a sliding section partially inserted in the guide sleeve 14. The elastic member 6 is sleeved on the sliding section, and the two ends of the elastic member 6 are respectively against the guide sleeve 14 and the elastic member 6. Through the setting of the guide sleeve 14, the valve core 2 can be elastically set first, and then the valve core 2 and the guide sleeve 14 can be installed together in the valve body 1, so as to facilitate the assembly of the one-way microfiltration valve. Specifically, the guide sleeve 14 can be detachably clamped in the outlet section 4 of the valve body 1 through a retaining spring 15. In addition, as an alternative embodiment, the guide sleeve 14 can also be fastened in other conventional ways, such as by fasteners.

[0042] The one-way microfiltration valve provided in this embodiment has the advantages of compact structure and small size. Specifically, the diameter can be 1.2 cm, the length can be 3.4 cm, the weight is only 21 g, and the structure is simple and the cost is low.

[0043] In addition, this embodiment also provides a vacuum device, which uses the one-way microfiltration valve described in the above solution, and provides ultra-low flow and ultra-high cleanliness one-way conduction for the vacuum device. Specifically, the one-way microfiltration valve can be used for dry pump shaft seal protection.

[0044] Obviously, the above embodiments are merely examples for clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the present invention.

Claims

1. A one-way microfiltration valve, characterized in that: include: A valve body (1) having an inlet section (3) and an outlet section (4), wherein a flow channel (5) is provided between the inlet section (3) and the outlet section (4); A valve core (2) is slidably disposed in the outlet section (4) of the valve body (1), and has a blocking portion (10) for blocking the circulation channel (5), wherein the blocking portion (10) blocks the circulation channel (5) by moving in a direction toward the circulation channel (5); An elastic member (6) connected to the valve core (2) and having an elastic force for moving the valve core (2) in a direction to close the circulation channel (5); A microfilter (7) is arranged in the circulation channel (5) and is used to filter the fluid circulating in the circulation channel (5); A throttle plug (8) is arranged in the inlet section (3) of the valve body (1) and has a throttle hole communicated with the microfilter (7). The microfilter (7) is pressed in the inlet section (3) by the throttle plug (8).

2. The one-way microfiltration valve according to claim 1, characterized in that: The micro-filter element (7) is cylindrical, and one end of the flow channel (5) has a cylindrical cavity section (9) for installing the micro-filter element (7).

3. The one-way microfiltration valve according to claim 2, characterized in that: The blocking portion (10) of the valve core (2) is rectangular, and the other end of the circulation channel (5) has a rectangular cavity section (11) for accommodating the blocking portion (10) of the valve core (2).

4. The one-way microfiltration valve according to claim 3, characterized in that: The maximum width of the rectangular cavity section (11) of the circulation channel (5) is smaller than the diameter of the cylindrical cavity section (9).

5. The one-way microfiltration valve according to any one of claims 1 to 4, characterized in that: A first sealing ring (12) is sleeved on one end of the throttle plug (8) facing the circulation channel (5).

6. The one-way microfiltration valve according to any one of claims 1 to 4, characterized in that: A second sealing ring (13) is sleeved on one end of the valve core (2) facing the circulation channel (5).

7. The one-way microfiltration valve according to any one of claims 1 to 4, characterized in that: The outlet section (4) of the valve body (1) is detachably connected to a guide sleeve (14), and the valve core (2) has a sliding section partially inserted into the guide sleeve (14).

8. The one-way microfiltration valve according to claim 7, characterized in that: The elastic member (6) is sleeved on the sliding section, and two ends of the elastic member (6) respectively abut against the guide sleeve (14) and the elastic member (6).

9. The one-way microfiltration valve according to claim 7, characterized in that: The guide sleeve (14) is detachably clamped in the outlet section (4) of the valve body (1) via a clamping spring (15).

10. A vacuum device, characterized in that: The invention comprises the one-way microfiltration valve according to any one of claims 1 to 9.

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